JP4948970B2

JP4948970B2 - Valve devices and fittings

Info

Publication number: JP4948970B2
Application number: JP2006296276A
Authority: JP
Inventors: 泰三山本; 純一上田
Original assignee: Nabtesco Corp
Current assignee: Nabtesco Corp
Priority date: 2006-10-31
Filing date: 2006-10-31
Publication date: 2012-06-06
Anticipated expiration: 2026-10-31
Also published as: JP2008111525A

Description

本発明は、例えば半導体分野で使用されるウエハ洗浄液や基板コート剤などの薬品等の流体を対象とした通路の連結に好適に用いられる弁装置および継手に関する。 The present invention relates to a valve device and a joint suitably used for connecting passages for fluids such as chemicals such as wafer cleaning liquid and substrate coating agent used in the semiconductor field, for example.

上述した弁装置として、図８に示すものが知られている（例えば特許文献１参照）。この弁装置は、容器１００のフランジ１０１に設けられた貫通孔１０２に挿入して取付けられていて、弁枠体１０３の軸心に沿って設けた孔１０４に弁体１０５がスライド可能に配され、弁体１０５の拡径上端部１０６が、孔１０４の上側に設けた弁座１０７に当接すると弁装置が閉になり、拡径上端部１０６が弁座１０７から離れると、弁装置が開になる。そして、弁装置が開のとき、孔１０４の弁座１０７よりも下側に設けた受入部材１０８から受入れた流体が、孔１０４と弁体１０５との隙間にて形成される内部流体通路１０９を経て孔１０４の弁座１０７よりも上側に設けた送出部材１１０から容器１００の内部へ送出すように構成されている。 As the above-described valve device, one shown in FIG. 8 is known (see, for example, Patent Document 1). This valve device is attached by being inserted into a through hole 102 provided in the flange 101 of the container 100, and a valve body 105 is slidably disposed in a hole 104 provided along the axial center of the valve frame 103. When the enlarged diameter upper end portion 106 of the valve body 105 comes into contact with the valve seat 107 provided above the hole 104, the valve device is closed, and when the enlarged diameter upper end portion 106 is separated from the valve seat 107, the valve device is opened. become. When the valve device is open, the fluid received from the receiving member 108 provided below the valve seat 107 in the hole 104 passes through the internal fluid passage 109 formed in the gap between the hole 104 and the valve body 105. Then, the feed member 110 provided above the valve seat 107 of the hole 104 is sent to the inside of the container 100.

このように構成された弁装置の材質は、流体への金属イオンの混入を防止するために、流体と接する、弁枠体１０３、弁体１０５、受入部材１０８および送出部材１１０の全ての部分が樹脂材料により形成されている。
特開２００４−３０８７４０号公報 The material of the valve device configured as described above is that all parts of the valve frame 103, the valve body 105, the receiving member 108, and the delivery member 110 that are in contact with the fluid are used in order to prevent metal ions from being mixed into the fluid. It is made of a resin material.
JP 2004-308740 A

しかしながら、上述した弁装置は、フランジ１０１により弁枠体１０３の周方向周りが保持されているものの、弁枠体１０３の軸心方向に関しては金属で保持されていないため、その弁枠体１０３の軸心方向での強度を確保し変形を防止する上で長くせざるを得なく、小型化が困難であった。 However, although the valve device described above is held around the circumferential direction of the valve frame body 103 by the flange 101, the axial direction of the valve frame body 103 is not held by metal. In order to ensure the strength in the axial direction and prevent deformation, it has to be lengthened, and downsizing is difficult.

本発明は、このような従来技術の課題を解決するためになされたものであり、内部流体通路を流れる流体への金属イオンの混入を防止することができ、かつ弁枠体の軸心方向とこれに直交する方向における変形を防止した状態で小型化を図れる弁装置および継手を提供することを目的とする。 The present invention has been made to solve the above-described problems of the prior art, and can prevent the mixing of metal ions into the fluid flowing through the internal fluid passage, and the axial direction of the valve frame body. It is an object of the present invention to provide a valve device and a joint that can be reduced in size while preventing deformation in a direction orthogonal to the above.

請求項１の発明に係る弁装置は、途中で屈曲し、その屈曲部および両端に開口が設けられた内部流体通路と、該内部流体通路の一端側に設けられた弁座とを有する弁枠体と、該弁枠体に、上記内部流体通路の屈曲部と一端側開口とを結ぶ方向へスライド可能に設けられた軸部材と、該軸部材の先端部に、上記屈曲部の開口から内部流体通路内へ進出可能に設けられた弁体とを備え、上記弁枠体は、上記内部流体通路を有する樹脂製の弁枠体本体と、少なくとも２つに分割され、上記弁枠体本体を覆う状態に連結される金属製の保持カバーとを有し、その保持カバーが連結された状態で弁枠体本体における軸部材のスライド方向の両側部分と軸部材の周方向に沿った部分とを覆う構成となっており、上記弁体は、上記軸部材の先端部に取付けられる金属製の弁体基部と、この弁体基部の外側を覆いかつ上記屈曲部の開口を塞ぐ樹脂製の弁体膜とを有し、前記保持カバーは、前記内部流体通路の一端側の開口に対応する部分に第１貫通孔が、前記内部流体通路の他端側の開口に対応する部分に第２貫通孔が、前記内部流体通路の屈曲部の開口に対応する部分に弁体挿通孔がそれぞれ形成されるとともに、前記弁枠体本体における前記軸部材の周方向に沿った部分を覆い、かつ前記第２貫通孔を有する第１保持カバーを備え、弁枠体本体に対する第１保持カバーの周方向位置を決める位置決め手段が設けられていることを特徴とする。 The valve device according to the invention of claim 1 is a valve frame having an internal fluid passage that is bent halfway and has openings at both the bent portion and both ends, and a valve seat provided at one end of the internal fluid passage. Body, a shaft member provided on the valve frame body so as to be slidable in a direction connecting the bent portion of the internal fluid passage and the opening on the one end side, and an inner end of the shaft member from the opening of the bent portion. A valve body provided so as to be able to advance into the fluid passage, and the valve frame body is divided into a resin valve frame body having the internal fluid passage and at least two, and the valve frame body is A metal holding cover connected in a covering state, and in the state in which the holding cover is connected, both side portions of the valve frame body in the sliding direction of the shaft member and portions along the circumferential direction of the shaft member. The valve body is attached to the tip of the shaft member. A metal valve body base that, possess an outer covered and valve body film made of resin for closing the opening of the bent portion of the valve body base portion, the holding cover, the opening of one end of the internal fluid passageway A first through hole in a portion corresponding to the second fluid passage, a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage, and a valve body insertion hole in a portion corresponding to the opening of the bent portion of the internal fluid passage. Are formed, and includes a first holding cover that covers a portion of the valve frame body along the circumferential direction of the shaft member and has the second through hole, and the first holding cover for the valve frame body positioning means for determining the circumferential position characterized that you have provided.

請求項２の発明に係る弁装置は、途中で屈曲し、その屈曲部および両端に開口が設けられた内部流体通路と、該内部流体通路の一端側に設けられた弁座とを有する弁枠体と、該弁枠体に、上記内部流体通路の屈曲部と一端側開口とを結ぶ方向へスライド可能に設けられた軸部材と、該軸部材の先端部に、上記屈曲部の開口から内部流体通路内へ進出可能に設けられた弁体とを備え、上記弁枠体は、上記内部流体通路を有する樹脂製の弁枠体本体と、少なくとも２つに分割され、上記弁枠体本体を覆う状態に連結される金属製の保持カバーとを有し、その保持カバーが連結された状態で弁枠体本体における軸部材のスライド方向の両側部分と軸部材の周方向に沿った部分とを覆う構成となっており、上記弁体は、上記軸部材の先端部に取付けられる金属製の弁体基部と、この弁体基部の外側を覆いかつ上記屈曲部の開口を塞ぐ樹脂製の弁体膜とを有し、前記保持カバーは、前記内部流体通路の一端側の開口に対応する部分に第１貫通孔が、前記内部流体通路の他端側の開口に対応する部分に第２貫通孔が、前記内部流体通路の屈曲部の開口に対応する部分に弁体挿通孔がそれぞれ形成されるとともに、前記弁枠体本体における前記軸部材のスライド方向の片側部分であって前記第１貫通孔を有する第２保持カバーを備え、その第２保持カバーの第１貫通孔の縁と弁枠体本体との間にＯリングが、上記第１貫通孔の縁から第１貫通孔の中心に向かって突出させた突起により抜け防止された状態で、設けられていることを特徴とする。 A valve device according to a second aspect of the present invention includes a valve frame that includes an internal fluid passage that is bent halfway and has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage. Body, a shaft member provided on the valve frame body so as to be slidable in a direction connecting the bent portion of the internal fluid passage and the opening on the one end side, and an inner end of the shaft member from the opening of the bent portion. A valve body provided so as to be able to advance into the fluid passage, and the valve frame body is divided into a resin valve frame body having the internal fluid passage and at least two, and the valve frame body is A metal holding cover connected in a covering state, and in the state in which the holding cover is connected, both side portions of the valve frame body in the sliding direction of the shaft member and portions along the circumferential direction of the shaft member. The valve body is attached to the tip of the shaft member. A metal valve body base that, possess an outer covered and valve body film made of resin for closing the opening of the bent portion of the valve body base portion, the holding cover, the opening of one end of the internal fluid passageway A first through hole in a portion corresponding to the second fluid passage, a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage, and a valve body insertion hole in a portion corresponding to the opening of the bent portion of the internal fluid passage. Are formed on each side of the valve frame body in the sliding direction of the shaft member, the second holding cover having the first through hole, and the first through hole of the second holding cover. wherein O-ring between the edge and Benwaku body is the state in which edges from a preventing leakage by the projection which projects toward the center of the first through hole of the first through hole, that you have provided And

請求項３の発明に係る弁装置は、請求項１または２に記載の弁装置において、内側の樹脂管と外側の金属管とを有する外部管路を備え、上記外部管路は、前記樹脂管が前記他端側の開口に連通するように、上記金属管が前記保持カバーにおける第２貫通孔の周縁部に取付けられることを特徴とする。 A valve device according to a third aspect of the present invention is the valve device according to the first or second aspect, further comprising an external pipe having an inner resin pipe and an outer metal pipe, the outer pipe being the resin pipe. The metal tube is attached to a peripheral edge portion of the second through hole in the holding cover so that is communicated with the opening on the other end side.

請求項４の発明に係る弁装置は、請求項３に記載の弁装置において、前記樹脂管の前記弁枠体本体側の端部には、樹脂製の鍔が溶着されていることを特徴とする。 A valve device according to a fourth aspect of the present invention is the valve device according to the third aspect, characterized in that a resin cage is welded to an end of the resin pipe on the valve frame body side. To do.

請求項５の発明に係る弁装置は、請求項１乃至４のいずれかに記載の弁装置において、前記弁体膜は、前記弁座に接離する弁頭部と、これに繋がる筒状部とを有し、該筒状部の裾部が前記弁枠体に固定されることを特徴とする。 The valve device according to a fifth aspect of the present invention is the valve device according to any one of the first to fourth aspects, wherein the valve body membrane is a valve head contacting and separating from the valve seat, and a tubular portion connected thereto. And the bottom part of the cylindrical part is fixed to the valve frame body.

請求項６の発明に係る弁装置は、請求項５に記載の弁装置において、前記筒状部の裾部は、前記弁枠体本体と保持カバーとの間に挟持されていて、弁枠体本体と保持カバーとにおける裾部を挟持する部分が内部流体通路へ近づく程に縮径する縮径部を有することを特徴とする。 According to a sixth aspect of the present invention, there is provided the valve device according to the fifth aspect, wherein the bottom portion of the tubular portion is sandwiched between the valve frame body main body and the holding cover, The main body and the holding cover have a reduced diameter portion that decreases in diameter as the portion that sandwiches the skirt portion approaches the internal fluid passage.

請求項７の発明に係る継手は、請求項２に記載の弁装置を用いた継手において、前記第２保持カバーを相手側継手に当接して両継手が接続される構成となっていることを特徴とする。 A joint according to the invention of claim 7 is a joint using the valve device according to claim 2 , wherein the second holding cover is brought into contact with the mating joint and both joints are connected. Features.

本発明の弁装置にあっては、内部流体通路に露出する弁枠体本体と弁体膜とが樹脂で形成されているので、内部流体通路を流れる流体への金属イオンの混入を防止することが可能である。また、樹脂からなり変形の容易な弁枠体本体における軸部材の周方向に沿った部分だけでなく、弁枠体本体における軸部材のスライド方向の両側部分も金属製の保持カバーで保持して弁枠体が構成されているので、弁枠体における軸部材のスライド方向での変形を防止でき、これにより弁枠体における軸部材のスライド方向長さを短くすることができる。更に、保持カバーに、弁枠体本体の両端の開口に対応して第１、第２貫通孔がそれぞれ形成されているので、内部流体通路における流体の流れを邪魔することなく、樹脂製の弁枠体本体の変形を低減することができる。更にまた、位置決め手段により弁枠体本体の他端側開口と第１保持カバーの第２貫通孔との位置を一致させることが可能になる。特に、請求項３のように他端側開口に連通する外部管路を設ける場合に、その接合部からの流体漏れを防止する上で有効となる。すなわち、他端側開口と第２貫通孔との位置にズレがある場合には、外部管路の樹脂管を他端側開口に、外部管路の金属管を第２貫通孔にそれぞれ接続させるときに、樹脂製の弁枠体本体が変形した状態に外部管路が取付けられる虞があり、接合部が接合不良となり、流体漏れの発生が招来される。これに対し、本発明装置のように他端側開口と第２貫通孔との位置を一致させる構成の場合には、外部管路の樹脂管を他端側開口に、外部管路の金属管を第２貫通孔にそれぞれ一致させることができ、接合部に接合不良が発生せず、流体漏れの発生を防止することができる。 In the valve device of the present invention, since the valve frame body and the valve body film exposed to the internal fluid passage are formed of resin, it is possible to prevent metal ions from being mixed into the fluid flowing through the internal fluid passage. Is possible. Also, not only the portion along the circumferential direction of the shaft member in the valve frame body that is easily made of resin, but also the both sides in the sliding direction of the shaft member in the valve frame body are held by a metal holding cover. Since the valve frame body is configured, deformation of the shaft member in the valve frame body in the sliding direction can be prevented, and thereby the length of the shaft member in the valve frame body in the sliding direction can be shortened. Furthermore, since the first and second through holes are respectively formed in the holding cover corresponding to the openings at both ends of the valve frame body, the resin valve is not obstructed by the fluid flow in the internal fluid passage. The deformation of the frame body can be reduced. Furthermore, the positioning means can match the positions of the other end side opening of the valve frame body and the second through hole of the first holding cover. In particular, when an external conduit communicating with the other end side opening is provided as in claim 3, it is effective in preventing fluid leakage from the joint. That is, when there is a deviation between the opening of the other end side and the second through hole, the resin pipe of the external pipe line is connected to the other end side opening, and the metal pipe of the external pipe line is connected to the second through hole, respectively. In some cases, there is a possibility that the external pipe line may be attached in a state where the resin valve frame body is deformed, the joint portion becomes poorly joined, and fluid leakage occurs. On the other hand, in the case of the configuration in which the positions of the other end side opening and the second through hole are made to coincide with each other as in the present invention device, the resin pipe of the outer pipe line is set to the other end side opening, and the metal pipe of the outer pipe line Can be made to coincide with the second through-holes, respectively, so that no joint failure occurs in the joint portion and the occurrence of fluid leakage can be prevented.

請求項２の本発明装置による場合には、内部流体通路に露出する弁枠体本体と弁体膜とが樹脂で形成されているので、内部流体通路を流れる流体への金属イオンの混入を防止することが可能である。また、樹脂からなり変形の容易な弁枠体本体における軸部材の周方向に沿った部分だけでなく、弁枠体本体における軸部材のスライド方向の両側部分も金属製の保持カバーで保持して弁枠体が構成されているので、弁枠体における軸部材のスライド方向での変形を防止でき、これにより弁枠体における軸部材のスライド方向長さを短くすることができる。更に、保持カバーに、弁枠体本体の両端の開口に対応して第１、第２貫通孔がそれぞれ形成されているので、内部流体通路における流体の流れを邪魔することなく、樹脂製の弁枠体本体の変形を低減することができる。更にまた、Ｏリングを抜け防止する突起を金属製の第２保持カバーに形成しているので、確実にＯリングの抜けを防止することができる。換言すると、樹脂製の弁枠体本体に抜け防止用の突起を形成した場合には、その突起が変形し易くＯリングの抜けを防止することができないが、突起を第２保持カバー側に形成することで確実にＯリングの抜けを防止することができる。 In the case of the apparatus according to the second aspect of the present invention, since the valve frame body and the valve body film exposed to the internal fluid passage are formed of resin, mixing of metal ions into the fluid flowing through the internal fluid passage is prevented. Is possible. Also, not only the portion along the circumferential direction of the shaft member in the valve frame body that is easily made of resin, but also the both sides in the sliding direction of the shaft member in the valve frame body are held by a metal holding cover. Since the valve frame body is configured, deformation of the shaft member in the valve frame body in the sliding direction can be prevented, and thereby the length of the shaft member in the valve frame body in the sliding direction can be shortened. Furthermore, since the first and second through holes are respectively formed in the holding cover corresponding to the openings at both ends of the valve frame body, the resin valve is not obstructed by the fluid flow in the internal fluid passage. The deformation of the frame body can be reduced. Furthermore, since the protrusion that prevents the O-ring from coming off is formed on the second holding cover made of metal, it is possible to reliably prevent the O-ring from coming off. In other words, if a protrusion for preventing removal is formed on the resin valve frame body, the protrusion easily deforms and cannot prevent the O-ring from being removed, but the protrusion is formed on the second holding cover side. By doing so, it is possible to reliably prevent the O-ring from coming off.

請求項３に記載の弁装置による場合には、金属管は金属製の保持カバーに固定されるため金属管の内側に設けた樹脂管の位置を規定することができる。これにより、樹脂管と内部流体通路の他端側開口の周縁との位置がズレ難くなり、両者間の接続状態を長時間維持することができる。また、外部管路を着脱可能に構成することで、その交換やメンテナンスを容易に行うことができる。 In the case of the valve device according to the third aspect, since the metal pipe is fixed to the metal holding cover, the position of the resin pipe provided inside the metal pipe can be defined. Thereby, the position of the resin pipe and the peripheral edge of the opening on the other end side of the internal fluid passage becomes difficult to shift, and the connection state between them can be maintained for a long time. Further, by configuring the external conduit so as to be detachable, the replacement and maintenance can be easily performed.

請求項４による場合には、樹脂管とは別体の鍔を樹脂管に溶着するため、鍔の弁枠体本体側の端面における外部管路の軸心に対する角度を直角に確実に出すことが可能となり、弁枠体本体の他端側開口の周縁と鍔との接続部に凹部が形成されることを防止することができる。これにより接続部において流体の淀みが発生するのを防止することができる。また、鍔により弁枠体本体の他端側開口との接続面積を広くすることが可能となり、その接続部にＯリングを配置することもでき、これにより弁枠体本体の他端側開口と鍔との接続部の水密性を向上させ得る。 According to the fourth aspect of the present invention, since the soot separate from the resin tube is welded to the resin tube, the angle of the soot on the end face of the valve frame body side with respect to the axis of the external pipe line can be surely brought out at a right angle. It becomes possible, and it can prevent that a recessed part is formed in the connection part of the periphery of the other end side opening of a valve frame main body, and a collar. Thereby, it is possible to prevent the stagnation of the fluid from occurring in the connecting portion. Moreover, it becomes possible to widen the connection area with the other end side opening of the valve frame body by the scissors, and it is possible to arrange an O-ring at the connecting portion. It is possible to improve the water tightness of the connection part with the ridge.

請求項５による場合には、弁体膜における弁頭部に繋がる筒状部の裾部が弁枠体にて固定されるので、弁体基部、軸部材および軸受が金属製であっても、これら金属部分と内部流体通路との間を樹脂製の弁体膜にて区分けすることができる。これにより、軸部材および軸受で発生する金属粉などが内部流体通路へ混入するのを防止することができる。 In the case of claim 5, since the bottom part of the cylindrical part connected to the valve head in the valve body membrane is fixed by the valve frame body, even if the valve body base, the shaft member and the bearing are made of metal, The metal portion and the internal fluid passage can be divided by a resin valve body membrane. Thereby, it can prevent that the metal powder etc. which generate | occur | produce with a shaft member and a bearing mix in an internal fluid channel | path.

請求項６による場合には、弁枠体本体と保持カバーとにおける裾部を挟持する部分が縮径して湾曲（または屈曲）しているので、その挟持する部分の裾部との接触面積の増加が図れ、樹脂製の弁枠体本体が経年変化に伴って劣化しても裾部の挟持状態を長期間にわたり維持することが可能になる。 In the case of the sixth aspect, the portion of the valve frame body and the holding cover that sandwiches the skirt is reduced in diameter and curved (or bent), so that the contact area with the skirt of the sandwiched portion is reduced. Increase can be achieved, and even if the resin-made valve frame body deteriorates with aging, it is possible to maintain the clamping state of the skirt for a long period of time.

請求項７の本発明の継手による場合には、金属製の保持カバーで接続の際の力を受けるため、樹脂製の弁枠体本体に力が及ぶのを防止して変形を防ぐことができる。 In the case of the joint according to the present invention of claim 7 , since the force at the time of connection is received by the metal holding cover, it is possible to prevent the force from being applied to the resin valve frame body and to prevent deformation. .

以下、本発明の実施形態を図面に基づき具体的に説明する。 Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

図１は本発明の弁装置を適用した継手を示す縦断面図であり、中心線（一点鎖線）の右側は閉弁状態を示し、同じく左側は開弁状態を示すように表している。図２はその継手の底面図である。 FIG. 1 is a longitudinal sectional view showing a joint to which the valve device of the present invention is applied. The right side of the center line (dashed line) shows the valve closed state, and the left side shows the valve open state. FIG. 2 is a bottom view of the joint.

この継手１は、内部流体通路２を有する弁枠体３と、弁枠体３の内部に設けられた軸部材４と、軸部材４の先端部（図の下部）に設けられた弁体５と、軸部材４の途中をスライド自在に支持する軸受６と、軸部材４をスライドさせるスライド機構７とを備える。 The joint 1 includes a valve frame body 3 having an internal fluid passage 2, a shaft member 4 provided inside the valve frame body 3, and a valve body 5 provided at a distal end portion (lower part in the drawing) of the shaft member 4. And a bearing 6 that slidably supports the middle of the shaft member 4 and a slide mechanism 7 that slides the shaft member 4.

弁枠体３は、内部流体通路２を内部に有する樹脂製の弁枠体本体１０と、３つに分割され、弁枠体本体１０を覆う状態に連結される金属製の保持カバー２０、２１、２２と、その保持カバー２０〜２２の上側に設けられる筒状部材２３とを有する。 The valve frame body 3 is made of a resin valve frame body 10 having an internal fluid passage 2 therein, and metal holding covers 20 and 21 that are divided into three parts and connected to cover the valve frame body 10. , 22 and a cylindrical member 23 provided on the upper side of the holding covers 20-22.

弁枠体本体１０は、図３に示すように、合成樹脂、例えばポリテトラフルオロエチレン（ＰＴＦＥ）などのフッ素樹脂を用いた一体成形により、上下方向を軸心方向とする概略円筒状に形成されている。弁枠体本体１０の内部に設けられた内部流体通路２は、弁枠体本体１０の下面の軸心部に配された第１開口１１を一端とし、その第１開口１１から上方に延び、上下方向の途中に設けられた屈曲部２ａから周面に向かうＬ字状に形成されていて、弁枠体本体１０の周面に内部流体通路２の他端である第２開口１２が配されている。 As shown in FIG. 3, the valve frame body 10 is formed in a substantially cylindrical shape with the vertical direction as the axial direction by integral molding using a synthetic resin, for example, a fluororesin such as polytetrafluoroethylene (PTFE). ing. The internal fluid passage 2 provided inside the valve frame body 10 has a first opening 11 disposed at the axial center of the lower surface of the valve frame body 10 as one end, and extends upward from the first opening 11. The second opening 12, which is the other end of the internal fluid passage 2, is arranged on the peripheral surface of the valve frame body 10, and is formed in an L shape from the bent portion 2 a provided in the middle in the vertical direction toward the peripheral surface. ing.

このようにＬ字状に形成された内部流体通路２には、屈曲部２ａの下側（屈曲部２ａの曲率中心側）に弁座１３が設けられている（図１参照）。弁座１３は、第１開口１１と同一軸心状であって、下側半径よりも上側半径が長い円環状に形成されている。弁座１３の縦断面形状は、この図示例では直線状になっている。 Thus, the valve seat 13 is provided in the internal fluid channel | path 2 formed in the L-shape below the bending part 2a (the curvature center side of the bending part 2a) (refer FIG. 1). The valve seat 13 is formed in an annular shape having the same axial center as the first opening 11 and having an upper radius longer than a lower radius. The longitudinal cross-sectional shape of the valve seat 13 is linear in this illustrated example.

弁枠体本体１０の外周における形状は、縦方向に同じであって、水平方向では第２開口１２の近傍部分を直線状に、これ以外の部分を円形状に形成されている。つまり、第２開口１２の近傍部分は、概略平面状に形成されている。また、弁枠体本体１０の第２開口１２とは反対側部分には、縦方向（軸心方向）に長い位置決め用の凹溝１０ａが形成されている（図１および図３参照）。 The shape of the outer periphery of the valve frame body 10 is the same in the vertical direction, and in the horizontal direction, a portion near the second opening 12 is formed in a straight line, and the other portions are formed in a circular shape. That is, the vicinity of the second opening 12 is formed in a substantially planar shape. Further, a concave groove 10a for positioning which is long in the vertical direction (axial direction) is formed in a portion of the valve frame body 10 opposite to the second opening 12 (see FIGS. 1 and 3).

図１に示すように弁枠体本体１０における第１開口１１とは反対側（図の上側）の上面１４であって、屈曲部２ａの上側（屈曲部２ａの曲率中心とは反対側）には、軸心部に下側へ窪んだ凹部１４ａが形成され、その凹部１４ａの底部には、弁体５の挿通を可能にする開口１５が形成されている。凹部１４ａにおける開口１５の周辺部は、内部流体通路２へ近づく程に縮径した縮径部分１６となっており、この縮径部分１６の外周面部分における軸心に沿った形状は、屈曲した状態となっている（図６参照）。なお、縮径部分１６の外周面部分における軸心に沿った形状は、湾曲した状態でもよい。 As shown in FIG. 1, the upper surface 14 of the valve body 10 is opposite to the first opening 11 (upper side in the figure) and is above the bent portion 2 a (on the opposite side to the center of curvature of the bent portion 2 a). Is formed with a concave portion 14a recessed downward in the axial center portion, and an opening 15 through which the valve body 5 can be inserted is formed at the bottom of the concave portion 14a. The peripheral portion of the opening 15 in the concave portion 14a is a reduced diameter portion 16 that is reduced in diameter toward the internal fluid passage 2, and the shape along the axis of the outer peripheral surface portion of the reduced diameter portion 16 is bent. It is in a state (see FIG. 6). In addition, the shape along the axial center in the outer peripheral surface portion of the reduced diameter portion 16 may be a curved state.

上記保持カバー２０〜２２は、樹脂製の弁枠体本体１０の外側を囲むように設けられており、第１保持カバー２０は弁枠体本体１０における軸部材４の周方向に沿った部分を覆い、第２保持カバー２１は弁枠体本体１０における軸部材４のスライド方向の下側部分を覆い、第３保持カバー２２は弁枠体本体１０における軸部材４のスライド方向の上側部分を覆う。 The holding covers 20 to 22 are provided so as to surround the outside of the resin-made valve frame body 10, and the first holding cover 20 has a portion along the circumferential direction of the shaft member 4 in the valve frame body 10. The second holding cover 21 covers the lower part of the valve frame body 10 in the sliding direction of the shaft member 4, and the third holding cover 22 covers the upper part of the valve frame body 10 in the sliding direction of the shaft member 4. .

これら保持カバー２０〜２２は、図１および図４に示すように構成される。
第１保持カバー２０は、矩形状ブロック２０ａの軸心部に平面視で円形をした内部空洞２０ｂが形成されるとともに、矩形状ブロック２０ａの四隅にボルト挿通孔２０ｃが形成されている。また、第１保持カバー２０の周面には、前記第２開口１２に対応する位置に第２貫通孔２０ｄが設けられるとともに、前記凹溝１０ａに入る位置決めピン２０ｅが取付けられる。上記第２貫通孔２０ｄは、本実施形態では第２開口１２よりも大きい内径に形成されている。 These holding covers 20 to 22 are configured as shown in FIGS. 1 and 4.
The first holding cover 20 is formed with an inner cavity 20b having a circular shape in a plan view at the axial center of the rectangular block 20a, and has bolt insertion holes 20c at four corners of the rectangular block 20a. Further, on the peripheral surface of the first holding cover 20, a second through hole 20 d is provided at a position corresponding to the second opening 12, and a positioning pin 20 e that enters the concave groove 10 a is attached. The second through hole 20d is formed with an inner diameter larger than that of the second opening 12 in this embodiment.

第２保持カバー２１は、第１保持カバー２０の底面と同一の形状かつ寸法で形成されていて、軸心部に第１貫通孔２１ａが、四隅にはボルト挿通孔２１ｂが形成されている。第１貫通孔２１ａは、第１開口１１に対応する位置に配されていて、本実施形態では第１開口１１よりも大きい内径に形成されている。 The second holding cover 21 is formed in the same shape and dimensions as the bottom surface of the first holding cover 20, and a first through hole 21 a is formed in the shaft center portion, and a bolt insertion hole 21 b is formed in the four corners. The first through hole 21 a is disposed at a position corresponding to the first opening 11, and has an inner diameter larger than that of the first opening 11 in the present embodiment.

第３保持カバー２２は、高さ方向の上側から下側に向けて中径部２２ａ、大径部２２ｂ、小径部２２ｃが同心状かつ一体的に設けられている。小径部２２ｃは、第１保持カバー２０と第３保持カバー２２との軸心を一致させた状態で第１保持カバー２０の内部空洞２０ｂに挿入される。その小径部２２ｃには、上記開口１５に対応して弁体挿通孔２２ｅがその軸心方向を上下方向に一致させて設けられている。また、大径部２２ｂの下面であって小径部２２ｃよりも外側には、上向きのボルト取付穴２２ｄが軸心回りに４つ形成されている。 The third holding cover 22 is provided with a medium diameter portion 22a, a large diameter portion 22b, and a small diameter portion 22c concentrically and integrally from the upper side to the lower side in the height direction. The small diameter portion 22c is inserted into the internal cavity 20b of the first holding cover 20 in a state where the axial centers of the first holding cover 20 and the third holding cover 22 are aligned. The small-diameter portion 22c is provided with a valve element insertion hole 22e corresponding to the opening 15 with its axial direction aligned with the vertical direction. Further, four upward bolt mounting holes 22d are formed around the axis on the lower surface of the large diameter portion 22b and outside the small diameter portion 22c.

これら保持カバー２０〜２２は、図１および図４に示すように、第２保持カバー２１と第３保持カバー２２との間に第１保持カバー２０を挟み込み、第２保持カバー２１の下側からボルト挿通孔２１ｂ、２０ｃを経て第３保持カバー２２のボルト取付穴２２ｄに達するように４本のボルト２４を取付けることで連結される。 As shown in FIGS. 1 and 4, these holding covers 20 to 22 sandwich the first holding cover 20 between the second holding cover 21 and the third holding cover 22, and from the lower side of the second holding cover 21. The four bolts 24 are attached so as to reach the bolt attachment holes 22d of the third holding cover 22 through the bolt insertion holes 21b and 20c.

このようにして連結された保持カバー２０〜２２の内側には、図１に示すように弁枠体本体１０が丁度入り得る大きさの内部空間Ａが形成され、その内部空間Ａには上述した概略円筒状の弁枠体本体１０が配置される。この配置に際し、上記凹溝１０ａに位置決めピン２０ｅを入れるようにすることで、第１保持カバー２０に対する弁枠体本体１０の角度方向を所定方向に調整することが可能になる。上記内部空間Ａと弁枠体本体１０の周面との間の隙間は、弁枠体本体１０の変形に伴って第１保持カバー２０の内周面と接触し、弁枠体本体１０の変形を軽減できる寸法に設定される。但し、弁枠体本体１０における第２開口１２の近傍の概略平面状をした部分では、外部管路２５により弁枠体本体１０の変形を軽減できるようになっている。 Inside the holding covers 20 to 22 thus connected, an internal space A having a size that allows the valve frame body 10 to enter just as shown in FIG. 1 is formed. A substantially cylindrical valve frame body 10 is disposed. In this arrangement, it is possible to adjust the angular direction of the valve frame body 10 with respect to the first holding cover 20 to a predetermined direction by inserting the positioning pin 20e into the concave groove 10a. The gap between the internal space A and the peripheral surface of the valve frame body 10 comes into contact with the inner peripheral surface of the first holding cover 20 as the valve frame body 10 is deformed, and the valve frame body 10 is deformed. It is set to a dimension that can reduce this. However, the deformation of the valve frame body 10 can be reduced by the external conduit 25 in the substantially planar portion in the vicinity of the second opening 12 in the valve frame body 10.

上記外部管路２５は、弁枠体本体１０の第２開口１２に連通する状態で第１保持カバー２０に取付けられていて、内側の樹脂管２６と外側の金属管２７とを有する。金属管２７の両端にはフランジ２７ａ、２７ｂが設けられ、樹脂管２６の両端には鍔２６ａ、２６ｂが設けられている。フランジ２７ａと鍔２６ａは第１保持カバー２０に近い側のもので、フランジ２７ｂと鍔２６ｂは第１保持カバー２０から遠い側のものである。 The external conduit 25 is attached to the first holding cover 20 in a state of communicating with the second opening 12 of the valve frame body 10, and has an inner resin tube 26 and an outer metal tube 27. Flange 27a, 27b is provided at both ends of the metal tube 27, and flanges 26a, 26b are provided at both ends of the resin tube 26. The flange 27 a and the flange 26 a are on the side close to the first holding cover 20, and the flange 27 b and the flange 26 b are on the side far from the first holding cover 20.

フランジ２７ｂとそれに対応する鍔２６ｂとは面一となるように形成されている。一方の鍔２６ａは、厚み一定のリング状に別途形成されたもので、樹脂管２６の端部に鍔２６ａの内周部が溶着されている。鍔２６ａの外周部は樹脂管２６の外周面よりも外側に突出しており、その鍔２６ａの突出部分における鍔２６ｂ側には、フランジ２７ａの端面が当接している。上記鍔２６ａは、鍔２６ａの第２開口１２側端面における外部管路２５の軸心に対する角度を直角に確実に出すことを可能とするもので、弁枠体本体１０の第２開口１２と鍔２６ａとの接続部に凹部が形成されることを防ぎ、流体の淀みが発生するのを防止する。 The flange 27b and the flange 26b corresponding to the flange 27b are formed to be flush with each other. One of the flanges 26a is separately formed in a ring shape having a constant thickness, and the inner peripheral portion of the flange 26a is welded to the end of the resin tube 26. The outer peripheral portion of the flange 26a protrudes outward from the outer peripheral surface of the resin tube 26, and the end surface of the flange 27a is in contact with the flange 26b side of the protruding portion of the flange 26a. The flange 26a makes it possible to reliably bring out an angle with respect to the axial center of the external conduit 25 on the second opening 12 side end surface of the flange 26a. The concave portion is prevented from being formed in the connecting portion with 26a, and fluid stagnation is prevented.

フランジ２７ａの周面は、段付き状に形成されていて、内側の小径部２７ｃは第１保持カバー２０に設けた第２貫通孔２０ａの内側に入り、外側の大径部２７ｄは第２貫通孔２０ａの周縁部に着脱可能に固定される。その固定により樹脂管２６が第２開口１２に押圧された状態で連通連結されるようになっており、これにより弁枠体本体１０の変形を軽減する。この固定は、金属管２７を金属製の第１保持カバー２０に対して行うので樹脂管２６の位置を規定することを可能となし、これにより樹脂管２６と第２開口１２との位置をズレ難くして両者間の接続状態を長時間維持することを可能にする。また、外部管路２５が着脱可能であるので、その交換やメンテナンスを容易に行うことを可能にする。 The peripheral surface of the flange 27a is formed in a stepped shape, the inner small diameter portion 27c enters the second through hole 20a provided in the first holding cover 20, and the outer large diameter portion 27d is the second through hole. Removably fixed to the peripheral edge of the hole 20a. Due to the fixing, the resin pipe 26 is connected in communication with the second opening 12 being pressed, thereby reducing the deformation of the valve frame body 10. This fixing makes it possible to define the position of the resin pipe 26 because the metal pipe 27 is attached to the first holding cover 20 made of metal, thereby shifting the position of the resin pipe 26 and the second opening 12. It is difficult to maintain the connection state between the two for a long time. Moreover, since the external conduit 25 is detachable, it is possible to easily replace and maintain it.

上記弁枠体本体１０の第２開口１２の近傍にはＯリング３５が設けられている。このＯリング３５は、鍔２６ａにより弁枠体本体１０の第２開口１２との接続面積を広くすることが可能となることに伴って、その接続部に配置されている。そのＯリング３５は上記鍔２６ａにより弁枠体本体１０の軸心側へ押圧されることにより、弁枠体本体１０の第２開口１２と鍔２６ａとの接続部の水密性を向上させる。 An O-ring 35 is provided in the vicinity of the second opening 12 of the valve frame body 10. The O-ring 35 is disposed at the connection portion in accordance with the fact that the connection area with the second opening 12 of the valve frame body 10 can be increased by the flange 26a. The O-ring 35 is pressed toward the axial center of the valve frame body 10 by the flange 26a, thereby improving the water tightness of the connection portion between the second opening 12 of the valve frame body 10 and the flange 26a.

前記第３保持カバー２２に設けた前記弁体挿通孔２２ｅには、軸部材４が第１開口１１に対して接離する方向（図の上下方向）へスライド可能に設けられていて、軸部材４の先端部（図の下部）には弁体５が取付けられている。弁体５は、軸部材４の先端部に取付けられた金属製の弁体基部１７と、その弁体基部１７の外側を覆いかつ軸部材４のスライドに伴って弁座１３に接触して内部流体通路２を閉にする樹脂製の弁体膜１８とを有し、上記開口１５から内部流体通路２の内側への進出が可能になっている。 In the valve element insertion hole 22e provided in the third holding cover 22, the shaft member 4 is provided so as to be slidable in a direction (vertical direction in the drawing) in which the shaft member 4 is in contact with and away from the first opening 11. A valve body 5 is attached to the front end of 4 (lower part of the figure). The valve body 5 includes a metal valve body base 17 attached to the tip of the shaft member 4, and covers the outside of the valve body base 17 and contacts the valve seat 13 as the shaft member 4 slides. The valve body film 18 made of resin that closes the fluid passage 2 is provided, and can advance from the opening 15 to the inside of the internal fluid passage 2.

上記弁体５を構成する弁体膜１８は、第１開口１１の周縁に接触して内部流体通路２を閉にする弁頭部１８ａと、これに繋がる筒状部１８ｂとを有し、筒状部１８ｂの裾部１８ｃが、弁枠体３を構成する弁枠体本体１０と第３保持カバー２２との間に挟持されている。より詳細には、図６に示すように弁枠体本体１０の前記縮径部分１６と、第３保持カバー２２の外表面に取付けた撓み変形が可能なパッド１９との間で、ボルト２４の締結力を受けることにより挟持されている。そして、裾部１８ｃの固定には、屈曲した（または湾曲した）縮径部分１６を用いているので、裾部１８ｃとの接触面積を増加させることが可能となり、樹脂製の弁枠体本体１０が経年変化に伴って劣化しても裾部１８ｃの挟持状態を長期間にわたり維持することとなる。また、上記弁体膜１８は、上記開口１５を塞ぐように設けられていて、弁体基部１７と内部流体通路２との間、軸部材４と内部流体通路２との間、および軸受６と内部流体通路２との間をそれぞれ区分けする。 The valve body film 18 constituting the valve body 5 has a valve head portion 18a that contacts the peripheral edge of the first opening 11 to close the internal fluid passage 2, and a tubular portion 18b connected to the valve head portion 18a. A skirt portion 18 c of the shape portion 18 b is sandwiched between the valve frame body main body 10 constituting the valve frame body 3 and the third holding cover 22. More specifically, as shown in FIG. 6, between the reduced diameter portion 16 of the valve frame body 10 and the pad 19 attached to the outer surface of the third holding cover 22 and capable of bending deformation, the bolt 24 It is clamped by receiving the fastening force. Since the bent (or curved) reduced diameter portion 16 is used to fix the skirt 18c, the contact area with the skirt 18c can be increased, and the resin valve frame body 10 can be increased. However, even if it deteriorates with aging, the holding state of the skirt portion 18c is maintained for a long time. The valve body film 18 is provided so as to close the opening 15, and is provided between the valve body base portion 17 and the internal fluid passage 2, between the shaft member 4 and the internal fluid passage 2, and the bearing 6. The internal fluid passage 2 is divided.

第３保持カバー２２と、上記筒状部材２３の上端に設けた軸受部材２３ａとには、軸部材４をスライド自在に支持する前記軸受６が設けられている。また、第３保持カバー２２と軸受部材２３ａとの間には、軸部材４に固定した円環状部材２９が配されていて、円環状部材２９と軸受部材２３ａとの間には円環状部材２９を下方に押圧付勢するコイルばね３０が設けられている。 The bearing 6 for slidably supporting the shaft member 4 is provided on the third holding cover 22 and the bearing member 23 a provided on the upper end of the cylindrical member 23. An annular member 29 fixed to the shaft member 4 is disposed between the third holding cover 22 and the bearing member 23a, and the annular member 29 is disposed between the annular member 29 and the bearing member 23a. A coil spring 30 is provided that presses and urges downward.

また、第３保持カバー２２の内部には、第３保持カバー２２と円環状部材２９との密封空間３１にエアを供給するエア通路３２が設けられ、第３保持カバー２２と軸部材４と弁体５とで囲まれた箇所には、弁体５の上下スライドを許容する隙間３３が設けられ、その隙間３３へのエアの出入れを行うエア通路３４が設けられている。そして、これら円環状部材２９、エア通路３２、３４およびコイルばね３０は、軸部材４をスライドさせる前記スライド機構７を構成する。 In addition, an air passage 32 for supplying air to the sealed space 31 between the third holding cover 22 and the annular member 29 is provided inside the third holding cover 22, and the third holding cover 22, the shaft member 4, and the valve A space 33 that allows the valve body 5 to slide up and down is provided at a location surrounded by the body 5, and an air passage 34 that allows air to enter and exit from the space 33 is provided. The annular member 29, the air passages 32 and 34, and the coil spring 30 constitute the slide mechanism 7 that slides the shaft member 4.

エア通路３２にエアを供給すると、密封空間３１が広くなって、円環状部材２９がコイルばね３０の押圧付勢力に抗して上方に押し上げられ、軸部材４および弁体５が上方へスライドし、弁体５が弁座１３から離れて内部流体通路２が開状態となる。このとき、隙間３３にはエア通路３４を介してエアが排出される。一方、エア通路３２からエアを排出すると、密封空間３１が狭くなって、円環状部材２９がコイルばね３０の押圧付勢力により下方に押し下げられ、軸部材４および弁体５が下方へスライドし、弁体５が弁座１３に当接して内部流体通路２が閉状態となる。このとき、隙間３３にはエア通路３４を介してエアが吸引される。 When air is supplied to the air passage 32, the sealed space 31 is widened, the annular member 29 is pushed upward against the pressing biasing force of the coil spring 30, and the shaft member 4 and the valve body 5 slide upward. The valve body 5 is separated from the valve seat 13 and the internal fluid passage 2 is opened. At this time, air is discharged to the gap 33 through the air passage 34. On the other hand, when the air is discharged from the air passage 32, the sealed space 31 is narrowed, the annular member 29 is pushed downward by the pressing biasing force of the coil spring 30, and the shaft member 4 and the valve body 5 slide downward. The valve body 5 comes into contact with the valve seat 13 and the internal fluid passage 2 is closed. At this time, air is sucked into the gap 33 through the air passage 34.

内部流体通路２が開状態のとき、ウエハ洗浄液や基板コート剤などの薬品等からなる流体が、内部流体通路２を通流することになる。このとき、第２保持カバー２１には、第１開口１１に対応する部分に第１貫通孔２１ａが、第１保持カバー２０には第２開口１２に対応する部分に第２貫通孔２０ｄがそれぞれ形成されているので、内部流体通路２における流体の流れを邪魔することなく、樹脂製の弁枠体本体１０の変形を低減する。 When the internal fluid passage 2 is in an open state, a fluid composed of chemicals such as a wafer cleaning liquid and a substrate coating agent flows through the internal fluid passage 2. At this time, the second holding cover 21 has a first through hole 21 a in a portion corresponding to the first opening 11, and the first holding cover 20 has a second through hole 20 d in a portion corresponding to the second opening 12. Since it is formed, deformation of the resin valve frame body 10 is reduced without obstructing the flow of fluid in the internal fluid passage 2.

上記第２保持カバー２１の下面にはＯリング３６が設けられている。より詳細には、図７に示すように第１貫通孔２１ａの縁と弁枠体本体１０との間であって、第１貫通孔２１ａの縁から第１貫通孔２１ａの中心に向かって突出させた突起３７により抜け防止された状態で設けられている。このように金属製の第２保持カバー２１に突起３７を形成したのは、樹脂製の弁枠体本体１０に変形のし易い突起３７を形成する場合とは異なり、Ｏリング３６を確実に抜け防止するためである。 An O-ring 36 is provided on the lower surface of the second holding cover 21. More specifically, as shown in FIG. 7, it protrudes from the edge of the first through hole 21a toward the center of the first through hole 21a between the edge of the first through hole 21a and the valve frame body 10. The protrusions 37 are provided in a state in which they are prevented from being pulled out. Unlike the case in which the easily deformable protrusion 37 is formed on the resin-made valve frame body 10, the protrusion 37 is formed on the metal second holding cover 21 in this manner. This is to prevent it.

また、相手側の継手１Ａとの接続は、上記金属製の第２保持カバー２１に当接するようにして行われる。これにより、金属製の保持カバー２０、２１、２２で接続の際の力を受けるため、樹脂製の弁枠体本体１０に力が及ぶのを防止して変形を防いでいる。相手側の継手１Ａとしては、本実施形態の継手１の構成から上記Ｏリング３６が省略されたものなどを用いることができる。 Further, the connection with the mating joint 1A is performed so as to abut on the metal second holding cover 21. Thereby, since the force at the time of connection is received by the metal holding covers 20, 21, and 22, the force is not applied to the resin valve frame body 10 to prevent deformation. As the mating joint 1A, a joint in which the O-ring 36 is omitted from the configuration of the joint 1 of the present embodiment can be used.

このように構成された本実施形態の継手１による場合には、内部流体通路２に露出する弁枠体本体１０と弁体膜１８とが樹脂で形成されているので、内部流体通路２を流れる流体への金属イオンの混入を防止することが可能である。特に、弁体膜１８の裾部１８ｃを弁枠体３に固定させることで、弁体基部１７と内部流体通路２との間、軸部材４と内部流体通路２との間、および軸受６と内部流体通路２との間を樹脂製の弁体膜１８にて区分けすることが可能となり、これら弁体基部１７、軸部材４および軸受６が金属製であっても、これら金属部分から内部流体通路２を分離させ、相互に摺接する軸部材４および軸受６で発生する金属粉などが内部流体通路２へ混入することを防止する。 In the case of the joint 1 of the present embodiment configured as described above, the valve frame body 10 and the valve body film 18 exposed to the internal fluid passage 2 are formed of resin, and therefore flow through the internal fluid passage 2. It is possible to prevent metal ions from being mixed into the fluid. In particular, by fixing the skirt portion 18c of the valve body film 18 to the valve frame body 3, between the valve body base portion 17 and the internal fluid passage 2, between the shaft member 4 and the internal fluid passage 2, and the bearing 6 The internal fluid passage 2 can be divided by a resin valve body film 18, and even if the valve body base 17, the shaft member 4, and the bearing 6 are made of metal, the internal fluid can be separated from these metal portions. By separating the passage 2, metal powder generated in the shaft member 4 and the bearing 6 that are in sliding contact with each other is prevented from being mixed into the internal fluid passage 2.

また、本実施形態においては、樹脂からなり変形の容易な弁枠体本体１０における軸部材４の周方向に沿った部分だけでなく、弁枠体本体１０における軸部材４のスライド方向の両側部分も金属製の保持カバー２０〜２２で保持して弁枠体３を構成しているので、弁枠体３における軸部材４のスライド方向での変形を防止でき、これにより弁枠体３における軸部材４のスライド方向長さを短くすることができる。 Moreover, in this embodiment, not only the part along the circumferential direction of the shaft member 4 in the valve frame main body 10 which consists of resin and is easy to deform | transform, but both sides of the sliding direction of the shaft member 4 in the valve frame main body 10 Since the valve frame body 3 is configured by being held by the metal holding covers 20 to 22, the shaft member 4 in the valve frame body 3 can be prevented from being deformed in the sliding direction, whereby the shaft in the valve frame body 3 can be prevented. The length of the member 4 in the sliding direction can be shortened.

更に、本実施形態においては、第１保持カバー２０と弁枠体本体１０とに両者の周方向での位置を決める位置決め手段（凹溝１０ａと位置決めピン２０ｅ）が設けられているので、弁枠体本体１０の第２開口１２と第１保持カバー２０の第２貫通孔２０ｄとの位置を一致させることが可能になる。特に、第２開口１２に連通する外部管路２５を設ける場合に、その接合部からの流体漏れを防止する上で有効となる。すなわち、第２開口１２と第２貫通孔２０ｄとの位置がズレている場合には、外部管路２５の樹脂管２６を第２開口１２に、外部管路２５の金属管２７を第２貫通孔２０ｄにそれぞれ接続させるときに、樹脂製の弁枠体本体１０が変形した状態に外部管路２５が取付けられる虞があり、接合部が接合不良となり、流体漏れの発生が招来される。これに対し、本実施形態のように第２開口１２と第２貫通孔２０ｄとの位置を一致させる構成の場合には、外部管路２５の樹脂管２６を第２開口１２に、外部管路２５の金属管２７を第２貫通孔２０ｄにそれぞれ一致させることができ、接合部に接合不良が発生せず、流体漏れの発生を防止することができる。 Furthermore, in this embodiment, the first holding cover 20 and the valve frame body body 10 are provided with positioning means (concave groove 10a and positioning pin 20e) for determining the positions of both in the circumferential direction. The positions of the second opening 12 of the body body 10 and the second through hole 20d of the first holding cover 20 can be matched. In particular, when the external conduit 25 communicating with the second opening 12 is provided, it is effective in preventing fluid leakage from the joint. That is, when the positions of the second opening 12 and the second through hole 20d are misaligned, the resin pipe 26 of the outer conduit 25 is moved to the second opening 12, and the metal pipe 27 of the outer conduit 25 is passed through the second penetrating hole. When each of the holes 20d is connected, the external pipe 25 may be attached in a state where the resin valve frame body 10 is deformed, the joint becomes poorly joined, and fluid leakage occurs. On the other hand, in the case of the configuration in which the positions of the second opening 12 and the second through hole 20d coincide with each other as in the present embodiment, the resin pipe 26 of the external pipe 25 is connected to the second opening 12 and the external pipe The 25 metal pipes 27 can be made to coincide with the second through-holes 20d, respectively, so that no joint failure occurs in the joint portion, and the occurrence of fluid leakage can be prevented.

なお、上述した実施形態では、保持カバーを３つに分割した構成としているが、本発明はこれに限らない。例えば、第１保持カバーと第２保持カバーとを一体化し、これを第３保持カバーに連結する構成、或いは、第１保持カバーと第３保持カバーとを一体化し、これを第２保持カバーに連結する構成、つまり２つに分割した構成としてもよく、更には、３つに分解するタイプであっても別の箇所で連結する構成としてもよく、或いは４以上に分割する構成としてもよい。 In the above-described embodiment, the holding cover is divided into three, but the present invention is not limited to this. For example, the first holding cover and the second holding cover are integrated and connected to the third holding cover, or the first holding cover and the third holding cover are integrated, and this is used as the second holding cover. It is good also as a structure connected, ie, the structure divided | segmented into two, Furthermore, even if it is a type decomposed | disassembled into three, it may be set as the structure connected at another location, or it is good also as a structure divided | segmented into 4 or more.

また、上述した実施形態では、スライド機構として空気アクチュエータとばねを用いた構成を採っているが、本発明はこれに限らず、電磁石或いは手動ハンドル等の公知手段などが用いられる。 In the above-described embodiment, the air actuator and the spring are used as the slide mechanism. However, the present invention is not limited to this, and known means such as an electromagnet or a manual handle are used.

更に、本発明の弁装置および継手は、上述した半導体分野で使用されるウエハ洗浄液や基板コート剤などの薬品に限らず、清浄性が要求される食品等の流体に対しても適用されることは勿論である。 Furthermore, the valve device and the joint of the present invention are not limited to chemicals such as wafer cleaning liquid and substrate coating agent used in the semiconductor field described above, but can be applied to fluids such as foods that require cleanliness. Of course.

図１は本発明の弁装置を適用した継手を示す縦断面図である。FIG. 1 is a longitudinal sectional view showing a joint to which the valve device of the present invention is applied. 図１の継手の底面図である。It is a bottom view of the joint of FIG. 弁枠体本体を示す外観斜視図である。It is an external appearance perspective view which shows a valve frame main body. 保持カバーの分解斜視図である。It is a disassembled perspective view of a holding cover. 弁枠体本体と第１保持カバーとの位置決めの説明図（平面図）である。It is explanatory drawing (plan view) of positioning with a valve-frame body and a 1st holding cover. 弁体膜の裾部の固定状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the fixed state of the skirt part of a valve body film | membrane. 相手側継手との接続状態を説明するための図（正面図）である。It is a figure (front view) for demonstrating a connection state with the other party coupling. 特許文献１の説明図（縦断面図）である。It is explanatory drawing (longitudinal sectional view) of patent document 1. FIG.

１継手
１Ａ相手側の継手
２内部流体通路
２ａ屈曲部
３弁枠体
４軸部材
５弁体
６軸受
７スライド機構
１０弁枠体本体
１０ａ凹溝（位置決め手段）
１１第１開口（一端側の開口）
１２第２開口（他端側の開口）
１３弁座
１６縮径部分
１７弁体基部
１８弁体膜
１８ａ弁頭部
１８ｂ筒状部
１８ｃ裾部
２０、２１、２２保持カバー
２０ｄ第２貫通孔
２０ｅ位置決めピン（位置決め手段）
２１ａ第１貫通孔
２２ｅ弁体挿通孔
２５外部管路
２６樹脂管
２６ａ鍔
２７金属管
３６Ｏリング
３７突起 DESCRIPTION OF SYMBOLS 1 Joint 1A Opposite joint 2 Internal fluid passage 2a Bending part 3 Valve frame body 4 Shaft member 5 Valve body 6 Bearing 7 Slide mechanism 10 Valve frame body 10a Concave groove (positioning means)
11 1st opening (opening of one end side)
12 Second opening (opening at the other end)
13 Valve seat 16 Reduced diameter portion 17 Valve body base 18 Valve body membrane 18a Valve head portion 18b Tubular portion 18c Bottom portion 20, 21, 22 Holding cover 20d Second through hole 20e Positioning pin (positioning means)
21a First through hole 22e Valve element insertion hole 25 External pipe 26 Resin pipe 26a ２７ 27 Metal pipe 36 O-ring 37 Projection

Claims

途中で屈曲し、その屈曲部および両端に開口が設けられた内部流体通路と、該内部流体通路の一端側に設けられた弁座とを有する弁枠体と、
該弁枠体に、上記内部流体通路の屈曲部と一端側開口とを結ぶ方向へスライド可能に設けられた軸部材と、
該軸部材の先端部に、上記屈曲部の開口から内部流体通路内へ進出可能に設けられた弁体とを備え、
上記弁枠体は、上記内部流体通路を有する樹脂製の弁枠体本体と、少なくとも２つに分割され、上記弁枠体本体を覆う状態に連結される金属製の保持カバーとを有し、その保持カバーが連結された状態で弁枠体本体における軸部材のスライド方向の両側部分と軸部材の周方向に沿った部分とを覆う構成となっており、
上記弁体は、上記軸部材の先端部に取付けられる金属製の弁体基部と、この弁体基部の外側を覆いかつ上記屈曲部の開口を塞ぐ樹脂製の弁体膜とを有し、
前記保持カバーは、前記内部流体通路の一端側の開口に対応する部分に第１貫通孔が、前記内部流体通路の他端側の開口に対応する部分に第２貫通孔が、前記内部流体通路の屈曲部の開口に対応する部分に弁体挿通孔がそれぞれ形成されるとともに、前記弁枠体本体における前記軸部材の周方向に沿った部分を覆い、かつ前記第２貫通孔を有する第１保持カバーを備え、弁枠体本体に対する第１保持カバーの周方向位置を決める位置決め手段が設けられていることを特徴とする弁装置。 A valve frame body that has an internal fluid passage that is bent in the middle and that has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage;
A shaft member slidably provided in the valve frame body in a direction connecting the bent portion of the internal fluid passage and the one end side opening;
A valve body provided at the tip of the shaft member so as to be able to advance into the internal fluid passage from the opening of the bent portion;
The valve frame body includes a resin valve frame body body having the internal fluid passage, and a metal holding cover that is divided into at least two parts and connected to cover the valve frame body body, The holding cover is connected to cover both sides of the valve frame body in the sliding direction of the shaft member and the portion along the circumferential direction of the shaft member.
It said valve body, possess a metal valve body base attached to the distal end of the shaft member, covering the outside of the valve body base and a resin valve body film for closing the opening of the bent portion,
The holding cover has a first through hole in a portion corresponding to the opening on one end side of the internal fluid passage, and a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage. A valve body insertion hole is formed in a portion corresponding to the opening of the bent portion, and a first portion that covers a portion of the valve frame body along the circumferential direction of the shaft member and has the second through hole. a holding cover, the valve device characterized that you have positioning means are provided for determining the circumferential position of the first holding cover to the valve frame body.

途中で屈曲し、その屈曲部および両端に開口が設けられた内部流体通路と、該内部流体通路の一端側に設けられた弁座とを有する弁枠体と、
該弁枠体に、上記内部流体通路の屈曲部と一端側開口とを結ぶ方向へスライド可能に設けられた軸部材と、
該軸部材の先端部に、上記屈曲部の開口から内部流体通路内へ進出可能に設けられた弁体とを備え、
上記弁枠体は、上記内部流体通路を有する樹脂製の弁枠体本体と、少なくとも２つに分割され、上記弁枠体本体を覆う状態に連結される金属製の保持カバーとを有し、その保持カバーが連結された状態で弁枠体本体における軸部材のスライド方向の両側部分と軸部材の周方向に沿った部分とを覆う構成となっており、
上記弁体は、上記軸部材の先端部に取付けられる金属製の弁体基部と、この弁体基部の外側を覆いかつ上記屈曲部の開口を塞ぐ樹脂製の弁体膜とを有し、
前記保持カバーは、前記内部流体通路の一端側の開口に対応する部分に第１貫通孔が、前記内部流体通路の他端側の開口に対応する部分に第２貫通孔が、前記内部流体通路の屈曲部の開口に対応する部分に弁体挿通孔がそれぞれ形成されるとともに、前記弁枠体本体における前記軸部材のスライド方向の片側部分であって前記第１貫通孔を有する第２保持カバーを備え、その第２保持カバーの第１貫通孔の縁と弁枠体本体との間にＯリングが、上記第１貫通孔の縁から第１貫通孔の中心に向かって突出させた突起により抜け防止された状態で、設けられていることを特徴とする弁装置。 A valve frame body that has an internal fluid passage that is bent in the middle and that has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage;
A shaft member slidably provided in the valve frame body in a direction connecting the bent portion of the internal fluid passage and the one end side opening;
A valve body provided at the tip of the shaft member so as to be able to advance into the internal fluid passage from the opening of the bent portion;
The valve frame body includes a resin valve frame body body having the internal fluid passage, and a metal holding cover that is divided into at least two parts and connected to cover the valve frame body body, The holding cover is connected to cover both sides of the valve frame body in the sliding direction of the shaft member and the portion along the circumferential direction of the shaft member.
It said valve body, possess a metal valve body base attached to the distal end of the shaft member, covering the outside of the valve body base and a resin valve body film for closing the opening of the bent portion,
The holding cover has a first through hole in a portion corresponding to the opening on one end side of the internal fluid passage, and a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage. A valve body insertion hole is formed in a portion corresponding to the opening of the bent portion, and a second holding cover which is the one side portion in the sliding direction of the shaft member in the valve frame body and has the first through hole. And an O-ring between the edge of the first through hole of the second holding cover and the valve frame body body by a protrusion protruding from the edge of the first through hole toward the center of the first through hole. in a state of being strain relief, the valve characterized that you have provided apparatus.

請求項１または２に記載の弁装置において、
内側の樹脂管と外側の金属管とを有する外部管路を備え、上記外部管路は、前記樹脂管が前記他端側の開口に連通するように、上記金属管が前記保持カバーにおける第２貫通孔の周縁部に取付けられることを特徴とする弁装置。 The valve device according to claim 1 or 2,
An external pipe having an inner resin pipe and an outer metal pipe is provided, and the outer pipe has a second pipe in the holding cover such that the resin pipe communicates with the opening on the other end side. A valve device, which is attached to a peripheral portion of a through hole.

請求項３に記載の弁装置において、
前記樹脂管の前記弁枠体本体側の端部には、樹脂製の鍔が溶着されていることを特徴とする弁装置。 The valve device according to claim 3,
A valve device characterized in that a resin rod is welded to an end of the resin pipe on the valve frame body side.

請求項１乃至４のいずれかに記載の弁装置において、
前記弁体膜は、前記弁座に接離する弁頭部と、これに繋がる筒状部とを有し、該筒状部の裾部が前記弁枠体に固定されることを特徴とする弁装置。 The valve device according to any one of claims 1 to 4,
The valve body membrane includes a valve head contacting and separating from the valve seat, and a tubular portion connected to the valve head, and a skirt portion of the tubular portion is fixed to the valve frame body. Valve device.

請求項５に記載の弁装置において、
前記筒状部の裾部は、前記弁枠体本体と保持カバーとの間に挟持されていて、弁枠体本体と保持カバーとにおける裾部を挟持する部分が内部流体通路へ近づく程に縮径する縮径部を有することを特徴とする弁装置。 The valve device according to claim 5,
The bottom portion of the tubular portion is sandwiched between the valve frame body and the holding cover, and the portion that sandwiches the bottom portion of the valve frame body and the holding cover is contracted to approach the internal fluid passage. A valve device characterized by having a reduced diameter portion.

請求項２に記載の弁装置を用いた継手において、
前記第２保持カバーを相手側継手に当接して両継手が接続される構成となっていることを特徴とする継手。
In the joint using the valve device according to claim 2 ,
A joint characterized in that the second holding cover is brought into contact with the mating joint and both joints are connected.