JP4891570B2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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JP4891570B2
JP4891570B2 JP2005167367A JP2005167367A JP4891570B2 JP 4891570 B2 JP4891570 B2 JP 4891570B2 JP 2005167367 A JP2005167367 A JP 2005167367A JP 2005167367 A JP2005167367 A JP 2005167367A JP 4891570 B2 JP4891570 B2 JP 4891570B2
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pump
control box
pump housing
connector
vacuum pump
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JP2006342686A (en
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剛志 樺沢
智 奥寺
祐幸 坂口
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EDWARDSJAPAN LIMITED
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EDWARDSJAPAN LIMITED
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

本発明は、半導体製造装置、電子顕微鏡、表面分析装置、質量分析装置、粒子加速器または核融合実験装置等に用いられる真空ポンプに関する。   The present invention relates to a vacuum pump used in a semiconductor manufacturing apparatus, an electron microscope, a surface analysis apparatus, a mass analysis apparatus, a particle accelerator, a nuclear fusion experimental apparatus, or the like.

従来、この種の真空ポンプでは、コスト低減を図る等の観点から、ターボ分子ポンプを収容するポンプ筐体に、そのターボ分子ポンプの制御回路を収容する制御ボックスを着脱自在に一体に取付ける構成を採用している（例えば、特許文献１の段落００１１の記載参照）。   Conventionally, this type of vacuum pump has a configuration in which a control box for accommodating a control circuit for the turbo molecular pump is detachably and integrally attached to a pump housing for accommodating the turbo molecular pump from the viewpoint of cost reduction. (For example, refer to the description in paragraph 0011 of Patent Document 1).

上記のような制御ボックスの取付け構造としては、図５（ａ）のように、制御ボックス２とポンプ筐体１の制御ボックス取付け面１Ａとの間にスペーサ５を介在させ、直接ボルトでその制御ボックス２をポンプ筐体１に取付ける方式と、図５（ｂ）のように、上記のようなスペーサ５を介さず、直接ボルトで制御ボックス２をポンプ筐体１に取付ける方式がある。   As shown in FIG. 5 (a), the control box mounting structure as described above has a spacer 5 interposed between the control box 2 and the control box mounting surface 1A of the pump housing 1, and is directly controlled by bolts. There are a method of attaching the box 2 to the pump housing 1 and a method of attaching the control box 2 to the pump housing 1 directly with bolts without using the spacer 5 as described above, as shown in FIG.

しかしながら、何らかの原因でターボ分子ポンプの回転翼が破損し、その破片が回転翼と固定翼の間に挟まるなどにより、高速で回転しているターボ分子ポンプロータが瞬間的にロックし、ポンプ回転動作方向の大きな衝撃力がポンプ筐体１に加わり、わずかながらポンプ筐体１が回転する場合もある。一方で、制御ボックス２は、慣性によりその場に留まろうとする。このような場合に、上記のような従来の制御ボックス２の取付け構造によると、衝撃緩和対策が何ら採られておらず、単にポンプ筐体１に直接ボルトで制御ボックス２を取付けるだけの構造であるため、上記衝撃力で前記ボルトが破断し、制御ボックス２が脱落する可能性があり、また、制御ボックス２の落下によってボックス内部の制御回路が破損するという２次的損害も発生しうる。   However, for some reason, the rotor blades of the turbo molecular pump are damaged, and the fragments are sandwiched between the rotor blades and the stationary blades. A large impact force in the direction is applied to the pump housing 1 and the pump housing 1 may rotate slightly. On the other hand, the control box 2 tends to stay in place due to inertia. In such a case, according to the conventional mounting structure of the control box 2 as described above, no measures for shock reduction are taken, and the structure is such that the control box 2 is simply attached directly to the pump housing 1 with bolts. Therefore, there is a possibility that the bolt breaks due to the impact force, and the control box 2 may fall off, and a secondary damage that the control circuit inside the box is broken due to the drop of the control box 2 may occur.

さらに、上記のようなポンプ回転動作方向の衝撃力でポンプ筐体１が瞬間的に回転移動し、制御ボックス取付け面１Ａに設置されているコネクタ６が、ポンプ筐体１と制御ボックス２とで挟まれ圧迫破損する可能性がある。コネクタ６が圧迫破損すると、その破損部からのリークにより所望の真空度を保つことができず、また、この種の真空ポンプを半導体製造装置における真空形成手段として用いている場合には半導体ウエハ等が汚染されるという問題もある。   Further, the pump housing 1 is instantaneously rotated and moved by the impact force in the pump rotating operation direction as described above, and the connector 6 installed on the control box mounting surface 1A is connected between the pump housing 1 and the control box 2. There is a possibility of being pinched and damaged. When the connector 6 is compressed and damaged, a desired degree of vacuum cannot be maintained due to a leak from the damaged portion. When this type of vacuum pump is used as a vacuum forming means in a semiconductor manufacturing apparatus, a semiconductor wafer or the like There is also a problem of contamination.

特開平１１−１７３２９３号公報JP-A-11-173293

本発明は上記問題点を解決するためになされたものであり、その目的は、ターボ分子ポンプが破損した場合における、制御ボックスの脱落防止、コネクタの破損防止、所望の真空度の維持に好適な真空ポンプを提供することである。   The present invention has been made to solve the above-described problems, and its purpose is suitable for preventing the control box from falling off, preventing the connector from being damaged, and maintaining a desired degree of vacuum when the turbo molecular pump is damaged. It is to provide a vacuum pump.

上記目的を達成するために、本発明は、回転翼を有するポンプを収容するポンプ筐体の取付け面に、そのポンプの制御回路を収容する制御ボックスを一体に取付けてなる真空ポンプであって、上記制御ボックスにボルト等の締結部材で締結される第１の締結部と上記ポンプ筐体にボルト等の締結部材で締結される第２の締結部とを有し、板厚方向に変形する板状部材を介して、上記制御ボックスを上記ポンプ筐体の取付け面に取付けたことを特徴とする。 In order to achieve the above object, the present invention is a vacuum pump in which a control box that accommodates a control circuit of a pump is integrally attached to an attachment surface of a pump housing that accommodates a pump having a rotor blade, have a second fastening portion to be fastened by fastening members such as bolts to the first fastening portion and the pump housing is fastened by fastening members such as bolts to the control box, it is deformed in the thickness direction plate The control box is attached to the mounting surface of the pump housing via a member.

上記本発明においては、上記ポンプの回転翼破損等により上記ポンプ筐体にポンプ回転方向の衝撃力が生じたとき、その衝撃力を上記板状部材が吸収するようになる。   In the present invention, when an impact force in the pump rotation direction is generated in the pump casing due to damage to the rotor blades of the pump, the plate-like member absorbs the impact force.

上記本発明において、上記板状部材は、平板、または平板の一部に波形などの緩衝構造を持たせたものからなるものとしてよい。   In the present invention, the plate member may be a flat plate or a part of the flat plate having a buffer structure such as a corrugation.

上記本発明において、上記ポンプ筐体の取付け面にはコネクタが取付けられ、上記コネクタは、上記ポンプに生じる衝撃力で前記ポンプ筐体が回転移動したときに制御ボックスから離れる方向に変位する前記取付け面の一端側にずらして、取付けられるものとしてよい。   In the present invention, a connector is attached to a mounting surface of the pump casing, and the connector is displaced in a direction away from the control box when the pump casing is rotated by an impact force generated in the pump. It may be shifted and attached to one end side of the surface.

本発明にあっては、上記の如く制御ボックスの取付け構造として、制御ボックスにボルト等の締結部材で締結される第１の締結部とポンプ筐体にボルト等の締結部材で締結される第２の締結部とを有する板状部材を介して、上記制御ボックスが上記ポンプ筐体の取付け面に取付けられる構成を採用した。このため、ポンプ回転動作方向の大きな衝撃力がポンプ筐体に加わったとしても、その衝撃力を上記板状部材が吸収するから、締結部材の破断による制御ボックスの脱落を効果的に防止することができ、また、制御ボックス落下による制御回路の破損という２次的損害も回避できる。   In the present invention, as described above, as the control box mounting structure, the first fastening portion fastened to the control box with a fastening member such as a bolt and the second fastening portion fastened to the pump housing with the fastening member such as a bolt. A configuration is adopted in which the control box is attached to the attachment surface of the pump housing via a plate-like member having a fastening portion. For this reason, even if a large impact force in the pump rotating operation direction is applied to the pump housing, the impact force is absorbed by the plate-like member, so that the control box can be effectively prevented from falling off due to the breaking of the fastening member. In addition, secondary damage such as breakage of the control circuit due to dropping of the control box can be avoided.

特に、本発明のうち、上記板状部材の構造として、平板、または平板の一部に波形などの緩衝構造を採用したものは、その緩衝構造により板状部材の強度を締結部材より小さくするものであるから、締結部材が破損ないしは破壊することなく上記のような衝撃力を吸収できるという利点もある。   In particular, in the present invention, as the structure of the plate member, a flat plate or a part of the flat plate adopting a buffering structure such as a corrugation makes the strength of the plate member smaller than the fastening member by the buffer structure. Therefore, there is an advantage that the impact force as described above can be absorbed without the fastening member being damaged or destroyed.

特に、ポンプ筐体の取付け面に取付けられるコネクタの取付け位置構成として、ポンプ回転動作方向の衝撃力でポンプ筐体が回転移動したときに制御ボックスから離れる方向に変位する取付け面の一端側にずらして、当該コネクタが取付けられる構成を採用したものにあっては、ポンプ筐体が回転移動したときに、取付け面はコネクタから離れていくから、ポンプ筐体と制御ボックスとの間にコネクタが挟まれて圧迫破損したり、コネクタの破損によるリークが発生したりすることもなく、所望の真空度を保つことができ、また、リークによる半導体ウエハの汚染も防止しうる。   In particular, the position of the connector mounted on the mounting surface of the pump housing is shifted to one end of the mounting surface that is displaced away from the control box when the pump housing is rotated by the impact force in the direction of pump rotation. In the case of adopting a configuration in which the connector can be mounted, the mounting surface moves away from the connector when the pump casing rotates, so the connector is sandwiched between the pump casing and the control box. Therefore, a desired degree of vacuum can be maintained without causing pressure damage or leakage due to connector breakage, and contamination of the semiconductor wafer due to leakage can be prevented.

以下、本発明を実施するための最良の形態について、添付した図面を参照しながら詳細に説明する。   Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

図１は本発明の一実施形態である真空ポンプの説明図、図２は図１の真空ポンプで採用した板状部材の説明図である。   FIG. 1 is an explanatory view of a vacuum pump according to an embodiment of the present invention, and FIG. 2 is an explanatory view of a plate-like member employed in the vacuum pump of FIG.

図１の真空ポンプＰは、ポンプ筐体１の外面に、制御ボックス２を一体に取付けた構造になっている。ポンプ筐体１は、筒状のベース１−１の上に筒状のポンプケース１−２を同軸状に締結ボルトで一体に締結した構造であって、そのベース１−１の外周面の一部に上記制御ボックス２の取付け面１Ａを設けた構造になっている。尚、取付け面１Ａはフラットな平面になっている。   The vacuum pump P of FIG. 1 has a structure in which a control box 2 is integrally attached to the outer surface of the pump housing 1. The pump housing 1 has a structure in which a cylindrical pump case 1-2 is integrally fastened on a cylindrical base 1-1 with a fastening bolt in a coaxial manner. It has a structure in which the mounting surface 1A of the control box 2 is provided in the part. The mounting surface 1A is a flat plane.

ポンプ筐体１内には周知のターボ分子ポンプが収容され、また、制御ボックス２内にはターボ分子ポンプの制御回路が収容されている。   A well-known turbo molecular pump is accommodated in the pump housing 1, and a control circuit for the turbo molecular pump is accommodated in the control box 2.

ポンプ筐体１内の上記ターボ分子ポンプは、ターボ分子ポンプロータと一体に回転する回転翼と固定されている固定翼との相互作用により、ポンプ筐体１の吸気口Ｓからポンプ筐体１内に導入されたガス分子を、ポンプ筐体１の排気口Ｄへ向かって排気することで、吸気口Ｓ側に高真空を形成するものである。   The turbo molecular pump in the pump housing 1 is connected to the inside of the pump housing 1 from the inlet S of the pump housing 1 by the interaction between the rotating blades rotating integrally with the turbo molecular pump rotor and the fixed fixed blades. The gas molecules introduced into the are exhausted toward the exhaust port D of the pump housing 1 to form a high vacuum on the intake port S side.

制御ボックス２内の上記制御回路は、例えば、ターボ分子ポンプロータを支持する磁気軸受の駆動回路や、ターボ分子ポンプロータを回転駆動させるモータの駆動回路など、ターボ分子ポンプの運転に必要な各種制御回路を含んでいる。   The control circuit in the control box 2 includes various controls necessary for the operation of the turbo molecular pump, such as a drive circuit of a magnetic bearing that supports the turbo molecular pump rotor and a drive circuit of a motor that rotationally drives the turbo molecular pump rotor. Includes circuitry.

図１の真空ポンプＰでは、制御ボックス２をポンプ筐体１に取付ける構造例として、図２に示す薄い板状部材（以下「薄板３」という）を介して制御ボックス２をポンプ筐体１に取付けるものとしている。この薄板３は、制御ボックス２に第１の締結ボルト４１で締結される第１の締結部３１と、ポンプ筐体１に第２の締結ボルト４２で締結される第２の締結部３２とを有し、その第１の締結部３１については薄板両端部３ａ、３ｂに設けられ、また、第２の締結部３２については第１の締結部３１より少し内側に入った部位に設けられる。尚、図２では第１および第２の締結部３１、３２をそれぞれ４つずつ設けた例を示したが、その数に限定されることはなく、各締結部３１、３２の数は必要に応じて適宜変更することができる。   In the vacuum pump P of FIG. 1, as an example of a structure for attaching the control box 2 to the pump housing 1, the control box 2 is attached to the pump housing 1 via a thin plate member (hereinafter referred to as “thin plate 3”) shown in FIG. It is supposed to be attached. The thin plate 3 includes a first fastening portion 31 fastened to the control box 2 with a first fastening bolt 41 and a second fastening portion 32 fastened to the pump housing 1 with a second fastening bolt 42. The first fastening portion 31 is provided at both end portions 3 a and 3 b of the thin plate, and the second fastening portion 32 is provided at a position slightly inside the first fastening portion 31. 2 shows an example in which four each of the first and second fastening portions 31 and 32 are provided. However, the number is not limited, and the number of the fastening portions 31 and 32 is necessary. It can be changed accordingly.

上記薄板３は、第１の締結ボルト４１で制御ボックス２に一体に締結固定されるとともに、第２の締結ボルト４２でポンプ筐体１側に一体に締結固定されるが、このような締結固定状態において、薄板３の一面は、ポンプ筐体１側の取付け面１Ａに密着するが、薄板３の他面は、薄板３と制御ボックス２との間に配置されるスペーサ５の分だけ、制御ボックス２から離れて配置される。   The thin plate 3 is fastened and fixed integrally to the control box 2 by the first fastening bolt 41 and is fastened and fastened to the pump housing 1 side by the second fastening bolt 42. In this state, one surface of the thin plate 3 is in close contact with the mounting surface 1A on the pump housing 1 side, but the other surface of the thin plate 3 is controlled by the spacer 5 arranged between the thin plate 3 and the control box 2. Located away from box 2.

上記薄板３は、その薄板構成素材が有するバネ性とは別に、形状的、構造的な面から生じるバネ性を有している。すなわち、この種の薄板３としては、例えば、図３に示すような表裏面ともフラットな平板を採用してもよいが、図１、図２の例の薄板３は、そのような平板の一部（具体的には当該平板の両端部）を波形（図１、図２中符号Ｗで示す部分参照）にしてバネ性を積極的に持たせた緩衝構造になっている。このようなバネ性を生じさせる波の形については各種考えられる。例えば、図１、図２の例の薄板３では、薄板３に対して上下方向（薄板表裏面方向）に蛇行するような波形を採用したが、これとは別に、または、それと一緒に、図４のように薄板３に対して左右方向（薄板両側縁方向）に蛇行するような波形（図４中符号Ｗで示す部分参照）を採用してもよい。これにより、薄板３の強度を締結部材の強度より小さくし、締結部材が破損ないしは破壊することなく衝撃を吸収できる。   The thin plate 3 has a spring property generated from a shape and a structural surface, in addition to the spring property of the thin plate constituent material. That is, as this kind of thin plate 3, for example, a flat plate with flat front and back surfaces as shown in FIG. 3 may be adopted, but the thin plate 3 in the examples of FIGS. 1 and 2 is one of such flat plates. A buffer structure is provided in which the portion (specifically, both end portions of the flat plate) is corrugated (see the portion indicated by the symbol W in FIGS. 1 and 2) and has a positive spring property. Various forms of waves that cause such springiness are conceivable. For example, in the thin plate 3 in the example of FIGS. 1 and 2, a waveform that meanders in the vertical direction (the thin plate front and back direction) with respect to the thin plate 3 is adopted. As shown in FIG. 4, a waveform (refer to a portion indicated by a symbol W in FIG. 4) that meanders in the left-right direction (in the direction of both side edges of the thin plate) may be employed. Thereby, the strength of the thin plate 3 is made smaller than the strength of the fastening member, and the impact can be absorbed without damage or destruction of the fastening member.

上記ポンプ筐体１の取付け面１Ａにはコネクタ６が取付けられている。このコネクタ６は、ポンプ筐体１内の電装部品（例えば、前述した磁気軸受の電磁石や変位センサ、モータなど）と制御ボックス２内の制御回路とを電気的に接続する手段である。尚、コネクタ６の具体的な取付け位置については後述する。   A connector 6 is attached to the attachment surface 1A of the pump casing 1. The connector 6 is means for electrically connecting electrical components in the pump housing 1 (for example, the electromagnet of the magnetic bearing described above, a displacement sensor, a motor, etc.) and the control circuit in the control box 2. A specific mounting position of the connector 6 will be described later.

次に、上記の如く構成された図１の真空ポンプの動作について説明する。   Next, the operation of the vacuum pump of FIG. 1 configured as described above will be described.

図１の真空ポンプＰにおいて、定常運転時は、ターボ分子ポンプのポンプ動作により吸気口Ｓから排気口Ｄに向かってガスを排気する。このような通常状態においては、薄板３は何ら変形することもなく、図１（ｂ）のように最初に取付けたときの初期形態を維持している。 In the vacuum pump P of FIG. 1, during steady operation, gas is exhausted from the intake port S toward the exhaust port D by the pump operation of the turbo molecular pump. In such a normal state, the thin plate 3 is not also any deformed and maintains the initial configuration for initial attachment as shown in FIG. 1 (b).

上記のような真空ポンプの定常運転中に、何らかの原因でターボ分子ポンプの回転翼が破損すると、その破片が回転翼と固定翼の間に挟まるなどにより、高速で回転しているターボ分子ポンプロータが瞬間的にロックする場合もある。この種のロックが発生すると、ポンプ回転動作方向の大きな衝撃力がポンプ筐体１に加わるが、その衝撃力は薄板３が図１（ｃ）のように撓むことにより吸収される。 During the steady operation of the vacuum pump as described above, if the rotor blade of the turbo molecular pump breaks for some reason, the turbo molecular pump rotor that rotates at high speed, for example, is caught between the rotor blade and the fixed blade. May lock momentarily. When this kind of lock occurs, a large impact force of the pump rotation direction is applied to the pump housing 1, the impact force is thin 3 is absorbed by flexing as in FIG. 1 (c).

ところで、上記ロック時の衝撃力で、ポンプ筐体１は図１（ｂ）のような静止状態の位置から同図（ｃ）のように瞬間的に回転移動し、これにより、ポンプ筐体１に設けられている取付け面１Ａの一端１Ａ−１側は制御ボックス２から離れる方向に変位するが、その取付け面１Ａの他端１Ａ−２側は制御ボックス２に近づく方向に変位する。このため、例えば、取付け面１Ａの他端１Ａ−２側に前記コネクタ６が取付けられていると、当該コネクタ６は、取付け面１Ａと制御ボックス２とで挟まれ、圧迫破損するおそれがある。 Meanwhile, the impact force when the locking, the pump housing 1 is rotated and moved instantaneously as in FIG from the position of the stationary state as shown in FIG 1 (b) (c), thereby, the pump housing 1 The one end 1A-1 side of the mounting surface 1A provided on the side is displaced in a direction away from the control box 2, but the other end 1A-2 side of the mounting surface 1A is displaced in a direction approaching the control box 2. For this reason, for example, when the connector 6 is attached to the other end 1A-2 side of the attachment surface 1A, the connector 6 is sandwiched between the attachment surface 1A and the control box 2 and may be compressed and damaged.

そこで、上記のような不具合を防止するため、本実施形態では、図１（ｂ）に示すように、上記のような取付け面１Ａの変位方向に基づいて、その取付け面１Ａ上でのコネクタ６の取付け位置を定めている。具体的には、ポンプ筐体１と制御ボックス２とでコネクタ６が挟まれ圧迫されないように、ポンプ中心軸Ｏからオフセットした位置にコネクタ６を取付ける、すなわち、制御ボックス２から離れる方向に変位する取付け面１Ａの一端１Ａ−１側にずらして、当該コネクタ６は取付けられるものとする。そのような位置にコネクタ６を取付けておけば、上記のような衝撃力でポンプ筐体１が回転移動したときに、図１（ｃ）に示すように、取付け面１Ａはコネクタ６から離れていくから、上記のようなコネクタ６の圧迫破損は生じない。また、上記のようなオフセット位置にコネクタを取付けた場合は、取付け面１Ａの変位する方向とコネクタ６の中心軸との差が小さくなるため、コネクタ６内部のピンに過度な力がかかりにくいという利点もある。 Therefore, in order to prevent the above problems, in the present embodiment, as shown in FIG. 1B , the connector 6 on the mounting surface 1A is based on the displacement direction of the mounting surface 1A as described above. The installation position of is determined. Specifically, the connector 6 is attached at a position offset from the pump central axis O so that the connector 6 is not pinched and pressed between the pump housing 1 and the control box 2, that is, displaced in a direction away from the control box 2. It is assumed that the connector 6 is attached by shifting to the one end 1A-1 side of the attachment surface 1A. If the connector 6 is attached at such a position, when the pump housing 1 is rotated by the impact force as described above , the attachment surface 1A is separated from the connector 6 as shown in FIG. Therefore, the compression damage of the connector 6 as described above does not occur. In addition, when the connector is mounted at the offset position as described above, the difference between the direction in which the mounting surface 1A is displaced and the center axis of the connector 6 is small, so that excessive force is not easily applied to the pins inside the connector 6. There are also advantages.

上記実施形態の真空ポンプＰによると、制御ボックス２の取付け構造として、第１の締結ボルト４１で締結される第１の締結部３１とポンプ筐体１に第２のボルト４２で締結される第２の締結部３２とを有する薄板３を介して、制御ボックス２がポンプ筐体１の取付け面１Ａに取付けられる構成を採用した。このため、ポンプ回転動作方向の大きな衝撃力がポンプ筐体１に加わったとしても、その衝撃力を薄板３が吸収するから、締結ボルト４１、４２の破断による制御ボックス２の脱落を効果的に防止することができ、また、制御ボックス落下による制御回路の破損という２次的損害も回避することができる。   According to the vacuum pump P of the above embodiment, as the mounting structure of the control box 2, the first fastening portion 31 fastened by the first fastening bolt 41 and the pump housing 1 fastened by the second bolt 42 are used. A configuration in which the control box 2 is attached to the attachment surface 1 </ b> A of the pump housing 1 through the thin plate 3 having two fastening portions 32 is employed. For this reason, even if a large impact force in the pump rotating operation direction is applied to the pump housing 1, the impact force is absorbed by the thin plate 3, so that the drop-off of the control box 2 due to the breaking of the fastening bolts 41 and 42 is effectively prevented. Further, secondary damage such as breakage of the control circuit due to dropping of the control box can be avoided.

また、上記実施形態の真空ポンプＰでは、ポンプ筐体１の取付け面１Ａに取付けられるコネクタ６の取付け位置構成として、ポンプ回転動作方向の衝撃力でポンプ筐体１が回転移動したときに制御ボックス２から離れる方向に変位する取付け面１Ａの一端１Ａ−１側に、当該コネクタ６が取付けられる構成を採用した。このため、ポンプ筐体１が回転移動したときに、取付け面１Ａはコネクタ６から離れていくから、ポンプ筐体１と制御ボックス２との間にコネクタ６が挟まれて圧迫破損したり、コネクタ６の破損によるリークが発生したりすることもなく、所望の真空度を保つことができ、また、リークによる半導体ウエハの汚染も防止しうる。   Moreover, in the vacuum pump P of the said embodiment, as a mounting position structure of the connector 6 attached to the attachment surface 1A of the pump housing | casing 1, when the pump housing | casing 1 rotates and moves with the impact force of a pump rotation operation direction, a control box A configuration is adopted in which the connector 6 is attached to one end 1A-1 side of the attachment surface 1A that is displaced in a direction away from 2. For this reason, when the pump housing 1 rotates, the mounting surface 1A moves away from the connector 6, so that the connector 6 is sandwiched between the pump housing 1 and the control box 2 and is damaged by compression. No leakage due to breakage of 6 can occur and a desired degree of vacuum can be maintained, and contamination of the semiconductor wafer due to leakage can be prevented.

ところで、上記実施形態で説明した薄板３はステンレスなど熱伝導率の低い材料で作ることができる。このような材料構成の薄板３を採用した場合には、制御ボックス２内の制御回路とポンプ筐体１を容易に断熱することができる。その結果、ポンプ筐体１内を冷却している時に当該制御回路が過冷却され、結露してしまうという不具合を防止することができる。また、制御ボックス２内の制御回路とポンプ筐体１は断熱されるから、ポンプ内部に蓄積される生成物対策などのためポンプ筐体１内を保温する場合に、当該制御回路が加熱され、制御回路構成素子が故障するといった不具合も防止できる。   By the way, the thin plate 3 demonstrated by the said embodiment can be made from a material with low heat conductivity, such as stainless steel. When the thin plate 3 having such a material configuration is employed, the control circuit in the control box 2 and the pump housing 1 can be easily insulated. As a result, it is possible to prevent the problem that the control circuit is overcooled and condensed when the inside of the pump housing 1 is cooled. In addition, since the control circuit in the control box 2 and the pump housing 1 are insulated, the control circuit is heated when the pump housing 1 is kept warm for measures against products accumulated in the pump, Problems such as failure of the control circuit component can also be prevented.

図１は本発明の一実施形態である真空ポンプの説明図であり、（ａ）は真空ポンプの正面図、（ｂ）は通常状態時の真空ポンプの底面図、（ｃ）は衝撃力が加わった時の真空ポンプの底面図である。FIG. 1 is an explanatory view of a vacuum pump according to an embodiment of the present invention, wherein (a) is a front view of the vacuum pump, (b) is a bottom view of the vacuum pump in a normal state, and (c) is an impact force. It is a bottom view of the vacuum pump when added. 図２は図１の真空ポンプで採用した薄板の説明図であり、（ａ）は薄板の平面図、（ｂ）は（ａ）中のＢ−Ｂ線断面図である。2A and 2B are explanatory views of the thin plate employed in the vacuum pump of FIG. 1, wherein FIG. 2A is a plan view of the thin plate, and FIG. 2B is a cross-sectional view taken along line BB in FIG. 図３は本発明の他の実施形態である真空ポンプの説明図であり、（ａ）は通常状態時の真空ポンプの底面図、（ｂ）は衝撃力が加わった時の真空ポンプの底面図である。3A and 3B are explanatory views of a vacuum pump according to another embodiment of the present invention, wherein FIG. 3A is a bottom view of the vacuum pump in a normal state, and FIG. 3B is a bottom view of the vacuum pump when an impact force is applied. It is. 図４は本発明の他の実施形態の要部を示した説明図であり、（ａ）は通常状態時の薄板の平面図、（ｂ）は衝撃が加わった場合の薄板の平面図である。4A and 4B are explanatory views showing the main part of another embodiment of the present invention, in which FIG. 4A is a plan view of a thin plate in a normal state, and FIG. 4B is a plan view of the thin plate when an impact is applied. . 図５（ａ）（ｂ）はそれぞれ従来の真空ポンプにおける制御ボックスの取付け構造の説明図である。5A and 5B are explanatory views of a control box mounting structure in a conventional vacuum pump, respectively.

符号の説明Explanation of symbols

１ ポンプ筐体
１−１ ベース
１−２ ポンプケース
１Ａ 取付け面
１Ａ−１ 取付け面の一端（制御ボックスから離れる方向に変位する側）
１Ａ−２ 取付け面の他端（制御ボックスに近づく方向に変位する側）
２ 制御ボックス
３ 薄板（板状部材）
３ａ、３ｂ 薄板両端部
５ スペーサ
６ コネクタ
３１ 第１の締結部
３２ 第２の締結部
４１ 第１の締結ボルト
４２ 第２の締結ボルト
Ｐ 真空ポンプ
Ｓ 吸気口
Ｄ 排気口
Ｗ 波形 DESCRIPTION OF SYMBOLS 1 Pump housing | casing 1-1 Base 1-2 Pump case 1A Mounting surface 1A-1 One end of a mounting surface (the side displaced in the direction away from a control box)
1A-2 The other end of the mounting surface (side displaced toward the control box)
2 Control box 3 Thin plate (plate member)
3a, 3b Thin plate both ends 5 Spacer 6 Connector 31 First fastening part 32 Second fastening part 41 First fastening bolt 42 Second fastening bolt P Vacuum pump S Inlet D Outlet W Waveform

Claims (4)

回転翼を有するポンプを収容するポンプ筐体の取付け面に、そのポンプの制御回路を収容する制御ボックスを一体に取付けてなる真空ポンプであって、
上記制御ボックスにボルト等の締結部材で締結される第１の締結部と上記ポンプ筐体にボルト等の締結部材で締結される第２の締結部とを有し、板厚方向に変形する板状部材を介して、上記制御ボックスを上記ポンプ筐体の取付け面に取付けたこと
を特徴とする真空ポンプ。 A vacuum pump in which a control box that accommodates a control circuit of the pump is integrally attached to an attachment surface of a pump housing that accommodates a pump having a rotary blade,
Have a second fastening portion to be fastened by fastening members such as bolts to the first fastening portion and the pump housing is fastened by fastening members such as bolts to the control box, it is deformed in the thickness direction plate A vacuum pump characterized in that the control box is attached to an attachment surface of the pump housing via a member. 上記ポンプの回転翼破損等により上記ポンプ筐体にポンプ回転方向の衝撃力が生じたときに、その衝撃力を上記板状部材が吸収すること
を特徴とする請求項１に記載の真空ポンプ。 2. The vacuum pump according to claim 1, wherein when the impact force in the pump rotation direction is generated in the pump casing due to damage to the rotor blades of the pump, the plate-like member absorbs the impact force. 上記板状部材は、平板、または平板の一部に波形などの緩衝構造を持たせたものからなること
を特徴とする請求項１に記載の真空ポンプ。 The vacuum pump according to claim 1, wherein the plate-like member is made of a flat plate or a part of the flat plate having a buffering structure such as a corrugation. 上記ポンプ筐体の取付け面にはコネクタが取付けられ、
上記コネクタは、上記ポンプに生じる衝撃力で前記ポンプ筐体が回転移動したときに制御ボックスから離れる方向に変位する前記取付け面の一端側にずらして、取付けられること
を特徴とする請求項１に記載の真空ポンプ。 A connector is attached to the mounting surface of the pump casing,
The connector is attached by being shifted to one end side of the attachment surface that is displaced in a direction away from the control box when the pump casing is rotated by an impact force generated in the pump. The vacuum pump described.
JP2005167367A 2005-06-07 2005-06-07 Vacuum pump Active JP4891570B2 (en)

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