JP4861859B2 - ノズルプレートの製造方法及び液体吐出ヘッドの製造方法 - Google Patents
ノズルプレートの製造方法及び液体吐出ヘッドの製造方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
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- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (8)
- 凹形状のザグリ部と該ザグリ部の底面に開口しているノズルとを有するノズルプレートを用意し、該ノズルプレートの前記ザグリ部の底面と前記ノズルの内壁面の少なくとも一部とを含む前記ノズルプレートの表面に、撥液膜を形成する撥液膜形成工程と、
凸部を有する保護プレートを用意し、該保護プレートの前記凸部の頂面を前記ノズルプレートの前記ザグリ部の底面に当接させて、前記ノズルプレートの前記ノズルの液体吐出側の開口縁に前記保護プレートの前記凸部の頂面を密着させる当接工程と、
前記ノズルプレートを前記保護プレートが当接されている側とは反対側の液体供給側からエッチングすることにより、前記ノズルプレートの前記ノズルの内壁面から前記撥液膜を除去する撥液膜除去工程と、
前記保護プレートと前記ノズルプレートとを分離する分離工程と、
を備え、
前記保護プレートの前記凸部のうちで少なくとも前記ノズルプレートの前記ザグリ部の底面との当接部分は、弾性体からなり、
前記保護プレートの前記凸部のうちで前記当接部分以外の前記ノズルプレートの前記ザグリ部の底面との非当接部分は、前記当接部分よりも変形しやすい材料からなることを特徴とするノズルプレートの製造方法。 - 凹形状のザグリ部と該ザグリ部の底面に開口しているノズルとを有するノズルプレートを用意し、該ノズルプレートの前記ザグリ部の底面と前記ノズルの内壁面の少なくとも一部とを含む前記ノズルプレートの表面に、撥液膜を形成する撥液膜形成工程と、
凸部を有する保護プレートを用意し、該保護プレートの前記凸部の頂面を前記ノズルプレートの前記ザグリ部の底面に当接させて、前記ノズルプレートの前記ノズルの液体吐出側の開口縁に前記保護プレートの前記凸部の頂面を密着させる当接工程と、
前記ノズルプレートを前記保護プレートが当接されている側とは反対側の液体供給側からエッチングすることにより、前記ノズルプレートの前記ノズルの内壁面から前記撥液膜を除去する撥液膜除去工程と、
前記保護プレートと前記ノズルプレートとを分離する分離工程と、
を備え、
前記保護プレートのうちで少なくとも前記凸部の頂面には、前記撥液膜除去工程におけるエッチングに対して耐性を有する耐エッチング膜が形成され、
前記保護プレートの前記耐エッチング膜は、金属膜からなることを特徴とするノズルプレートの製造方法。 - 凹形状のザグリ部と該ザグリ部の底面に開口しているノズルとを有するノズルプレートを用意し、該ノズルプレートの前記ザグリ部の底面と前記ノズルの内壁面の少なくとも一部とを含む前記ノズルプレートの表面に、撥液膜を形成する撥液膜形成工程と、
凸部を有する保護プレートを用意し、該保護プレートの前記凸部の頂面を前記ノズルプレートの前記ザグリ部の底面に当接させて、前記ノズルプレートの前記ノズルの液体吐出側の開口縁に前記保護プレートの前記凸部の頂面を密着させる当接工程と、
前記ノズルプレートを前記保護プレートが当接されている側とは反対側の液体供給側からエッチングすることにより、前記ノズルプレートの前記ノズルの内壁面から前記撥液膜を除去する撥液膜除去工程と、
前記保護プレートと前記ノズルプレートとを分離する分離工程と、
を備え、
前記保護プレートのうちで少なくとも前記凸部の頂面には、撥液膜が形成されていることを特徴とするノズルプレートの製造方法。 - 前記ノズルプレート及び前記保護プレートのうちで少なくとも一方の全部又は一部が輻射線透過性の部材で形成されており、前記当接工程において、輻射線を用いて、前記保護プレートの前記凸部と前記ノズルプレートの前記ザグリ部との位置合わせを行うことを特徴とする請求項1乃至3の何れか1項に記載のノズルプレートの製造方法。
- 前記保護プレートの前記凸部を支持している平坦部の材料が、前記ノズルプレートの基材の材料と、同じであることを特徴とする請求項1乃至4の何れか1項に記載のノズルプレートの製造方法。
- 前記ノズルプレートの前記ノズルの液体吐出側の開口が半径rの円形状であり、前記ノズルプレートの前記ザグリ部の底面が半径Rの円形状であり、前記保護プレートの前記凸部の頂面が直径Dの円形状であり、前記ノズルの液体吐出側の開口の中心と前記ザグリ部の底面の中心との距離がEであるとき、r+R+E<D<2Rを満たすことを特徴とする請求項1乃至4の何れか1項に記載のノズルプレートの製造方法。
- 前記ノズルプレートの前記ノズルの液体吐出側の開口が一辺の長さlの正方形状であり、前記ノズルプレートの前記ザグリ部の底面が一辺の長さLの正方形状であり、前記保護プレートの前記凸部の頂面が一辺の長さFの正方形状であり、前記ノズルの液体吐出側の開口の中心と前記ザグリ部の底面の中心との距離がEであるとき、l/2+L/2+E<F<Lを満たすことを特徴とする請求項1乃至4の何れか1項に記載のノズルプレートの製造方法。
- 請求項1乃至7の何れか1項に記載のノズルプレートの製造方法によって製造されたノズルプレートを用いて液体吐出ヘッドを製造することを特徴とする液体吐出ヘッドの製造方法。
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JP2007057721A JP4861859B2 (ja) | 2007-03-07 | 2007-03-07 | ノズルプレートの製造方法及び液体吐出ヘッドの製造方法 |
US12/043,670 US8038891B2 (en) | 2007-03-07 | 2008-03-06 | Method of manufacturing nozzle plate and method of manufacturing liquid ejection head |
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JP2007057721A JP4861859B2 (ja) | 2007-03-07 | 2007-03-07 | ノズルプレートの製造方法及び液体吐出ヘッドの製造方法 |
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JP4861859B2 true JP4861859B2 (ja) | 2012-01-25 |
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JP5426200B2 (ja) * | 2009-03-13 | 2014-02-26 | 富士フイルム株式会社 | 撥液処理方法、ノズルプレート、インクジェットヘッド、及び電子機器 |
JP2010221495A (ja) * | 2009-03-23 | 2010-10-07 | Fujifilm Corp | 撥液処理方法、ノズルプレート、インクジェットヘッド、及び電子機器 |
JP2012015324A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | 液体塗布装置及び液体塗布方法並びにナノインプリントシステム |
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2007
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JP2008213422A (ja) | 2008-09-18 |
US20080217290A1 (en) | 2008-09-11 |
US8038891B2 (en) | 2011-10-18 |
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