JP4840832B2 - 気相成長装置、気相成長方法、および半導体素子の製造方法 - Google Patents
気相成長装置、気相成長方法、および半導体素子の製造方法 Download PDFInfo
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- 238000001947 vapour-phase growth Methods 0.000 title claims description 31
- 238000000034 method Methods 0.000 title claims description 24
- 239000004065 semiconductor Substances 0.000 title claims description 24
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- 239000007769 metal material Substances 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000002019 doping agent Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 277
- 238000006243 chemical reaction Methods 0.000 description 15
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- 239000012159 carrier gas Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000010926 purge Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 6
- QTQRGDBFHFYIBH-UHFFFAOYSA-N tert-butylarsenic Chemical compound CC(C)(C)[As] QTQRGDBFHFYIBH-UHFFFAOYSA-N 0.000 description 6
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 6
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 5
- 238000007711 solidification Methods 0.000 description 5
- 230000008023 solidification Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- -1 InGaP and InGaAs Chemical class 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
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- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910021478 group 5 element Inorganic materials 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
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- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- C—CHEMISTRY; METALLURGY
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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Description
図1に、本発明に基づいた実施の形態における気相成長装置としてのMOCVD(Metal Organic Chemical Vapor Deposition:有機金属気相堆積)装置の一例である縦型シャワーヘッド型のMOCVD装置100の模式的な構成の一例を示す。
次に、図1および図4を参照して、シャワーヘッド20の構成について説明する。シャワーヘッド20は、成長室1側から順に、シャワープレート21、冷却機構22、V族原料ガスバッファエリア23、III族原料ガスバッファエリア24、および昇温機構25によって構成されている。
図2に、シャワープレート21および冷却機構22の構造の概略図を示す。シャワープレート21には複数のV族原料ガス吐出孔41が設けられており、V族原料ガス導入配管42を通して上記シャワープレート21の上方に設けられた、V族原料ガスバッファエリア23まで通じている。
次に、MOCVD装置(気相成長装置)100を用いた気相成長方法に基づいた半導体素子の製造方法について以下説明する。
このように、本実施の形態におけるMOCVD装置100によれば、シャワーヘッド20を、V族原料ガスとIII族原料ガスとのそれぞれを充満させる互いに隔離されたV族原料ガスバッファエリア23とIII族原料ガスバッファエリア24とが、V族原料ガスバッファエリア23をガス吐出側として積層されている構造を採用している。
Claims (6)
- III族原料ガスおよびV族原料ガスを、それぞれ独立に吐出する複数のIII族原料ガス吐出孔を有するIII族原料ガス導入配管および複数のV族原料ガス吐出孔を有するV族原料ガス導入配管を配設したシャワーヘッド型ガス供給機構を介して被成膜基板を収容する成長室内に供給し、前記成長室内で混合して前記被成膜基板を成膜する気相成長装置であって、
前記シャワーヘッド型ガス供給機構には、前記V族原料ガスと前記III族原料ガスとのそれぞれを導入させる互いに隔離されたV族原料ガスバッファエリアとIII族原料ガスバッファエリアとが積層配置され、
前記シャワーヘッド型ガス供給機構は、前記成長室に接するシャワープレートを含み、
前記シャワーヘッド型ガス供給機構には、前記シャワープレートを冷却するための冷却機構が、前記シャワープレートと前記V族原料ガスバッファエリアとの間に設けられ、
前記V族原料ガス導入配管の内径は、前記III族原料ガス導入配管の外径より大きく、前記V族原料ガス導入配管の内部に、前記III族原料ガス導入配管が1対1で位置し、
前記III族原料ガスバッファエリアを、昇温または保温する機構をさらに備える、気相成長装置。 - 前記III族原料ガスバッファエリアには、前記III族原料ガスバッファエリアから前記成長室へと前記III族原料ガスを導入するための、複数の前記III族原料ガス導入配管が、前記V族原料ガスバッファエリアおよび前記冷却機構を貫通して設けられている、請求項1に記載の気相成長装置。
- 前記V族原料ガスバッファエリアには、前記V族原料ガスバッファエリアから前記成長室へと前記V族原料ガスを導入するための複数の前記V族原料ガス導入配管が、前記冷却室を貫通して設けられている、請求項1または2に記載の気相成長装置。
- 前記III族原料ガスは、金属材料およびドーパントガスの少なくともいずれかを含んでいる、請求項1から3のいずれかに記載の気相成長装置。
- 請求項1〜4のいずれかに記載の気相成長装置を用いて、前記被成膜基板の上に有機金属気相堆積法を用いて膜を成膜する工程を含む、気相成長方法。
- 請求項1〜4のいずれかに記載の気相成長装置を用いて、前記被成膜基板の上に有機金属気相堆積法を用いて膜を成膜する工程を含む、半導体素子の製造方法。
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JP2010103984A JP4840832B2 (ja) | 2010-04-28 | 2010-04-28 | 気相成長装置、気相成長方法、および半導体素子の製造方法 |
PCT/JP2011/059581 WO2011136077A1 (ja) | 2010-04-28 | 2011-04-19 | 気相成長装置、気相成長方法、および半導体素子の製造方法 |
EP11774860.8A EP2565908A4 (en) | 2010-04-28 | 2011-04-19 | STEAM SEPARATION DEVICE, STEAM SEPARATION METHOD AND METHOD FOR PRODUCING A SEMICONDUCTOR CONSTRUCTION ELEMENT |
KR1020127013061A KR20120083495A (ko) | 2010-04-28 | 2011-04-19 | 기상 성장 장치, 기상 성장 방법 및 반도체 소자의 제조 방법 |
CN201180004990.0A CN102656665B (zh) | 2010-04-28 | 2011-04-19 | 气相生长装置、气相生长方法、及半导体元件的制造方法 |
US13/505,954 US20120225564A1 (en) | 2010-04-28 | 2011-04-19 | Vapor deposition device, vapor deposition method, and semiconductor element manufacturing method |
TW100114174A TW201200625A (en) | 2010-04-28 | 2011-04-22 | Vapor deposition device, vapor deposition method, and semiconductor element manufacturing method |
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JP2013100191A (ja) * | 2011-11-07 | 2013-05-23 | Mitsubishi Chemicals Corp | 周期表第13族金属窒化物半導体結晶の製造方法 |
US20130145989A1 (en) * | 2011-12-12 | 2013-06-13 | Intermolecular, Inc. | Substrate processing tool showerhead |
US10316409B2 (en) | 2012-12-21 | 2019-06-11 | Novellus Systems, Inc. | Radical source design for remote plasma atomic layer deposition |
KR101395111B1 (ko) * | 2013-04-05 | 2014-05-19 | (주)브이티에스 | 성장효율이 개선된 mocvd 리액터 |
CN104141116B (zh) * | 2013-05-08 | 2017-04-05 | 理想晶延半导体设备(上海)有限公司 | 金属有机化学气相沉积装置、气体喷淋组件及其气体分配的控制方法 |
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KR101064210B1 (ko) * | 2009-06-01 | 2011-09-14 | 한국생산기술연구원 | 막증착 진공장비용 샤워헤드 |
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- 2011-04-19 WO PCT/JP2011/059581 patent/WO2011136077A1/ja active Application Filing
- 2011-04-19 US US13/505,954 patent/US20120225564A1/en not_active Abandoned
- 2011-04-19 CN CN201180004990.0A patent/CN102656665B/zh not_active Expired - Fee Related
- 2011-04-19 EP EP11774860.8A patent/EP2565908A4/en not_active Withdrawn
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KR20120083495A (ko) | 2012-07-25 |
CN102656665A (zh) | 2012-09-05 |
EP2565908A1 (en) | 2013-03-06 |
EP2565908A4 (en) | 2014-03-19 |
CN102656665B (zh) | 2015-01-28 |
US20120225564A1 (en) | 2012-09-06 |
TW201200625A (en) | 2012-01-01 |
JP2011233777A (ja) | 2011-11-17 |
WO2011136077A1 (ja) | 2011-11-03 |
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