JP4840712B2 - 薄膜積層体の製造装置および方法 - Google Patents
薄膜積層体の製造装置および方法 Download PDFInfo
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Description
F0:加圧バネの初期張力。
FαX:調整バネが調整レバーを引っ張る力。
R0:加圧レバーのレバー比。
R1:調整レバーのレバー比。
Fα0:調整バネの初期張力。
K:調整バネのバネ定数。
FαX:調整バネの張力の目標値。
FαS:調整バネの張力の実測値。
K:調整バネのバネ定数。
FPXR=FPX−ΔFPX ・・・(式4)
FPXR=F0−R0・R1・FαXR ・・・(式5)
FPXR=FPX+ΔFP ・・・(式6)
FPXR=F0−R0・R1・FαXR ・・・(式7)
上側の一対の可変型グリップローラにフィルムを挟み、フィルムを搬送させた際に生じたフィルムを支持する力の変化を測定した。グリップローラの設定角度θUを0°から7°まで1°ずつ変化させたとともに、各設定角度θUにおいて、グリップローラのフィルムを挟む加圧力を、4.4N、8.9N、16.3Nと増加させた。その結果を図7に示す。なお、図7の縦軸は、フィルムを搬送する前の基板を支持する力FU0から、搬送中のフィルムを支持する力FUXを減算した差分で、フィルムの引き上げ力FU(N)を表す。
図8に示す実験装置を用いて、フィルムの高さの変動を定量的に測定する試験を行った。図8に示す実験装置は、成膜室がない点を除いて、図1に示す装置と基本的に同じ構成である。図8に示す実験装置には、CVD成膜室を設ける区間において、一定型のグリップローラを上下にそれぞれ10セット設置するとともに、可変型のグリップローラを上のみに5セット設置した。なお、合計15セットのグリップローラのうち、可変型のグリップローラを第5、7、9、11、13番目に配置した。また、スパッタ成膜室を設ける区間には、一定型のグリップローラを上下にそれぞれ3セット設置した。
Claims (8)
- 帯状可撓性基板の表面に複数の薄膜を積層して薄膜積層体を製造する装置であって、
前記基板の幅方向が鉛直方向になるようにして、前記基板を水平方向に搬送する基板搬送手段と、
前記基板の搬送方向に沿って連続して配列され、前記基板の表面に成膜を行う複数の成膜室と、
前記複数の成膜室の間のうち少なくとも1つの間に配置され、前記基板の鉛直方向上側の端部を挟む少なくとも一対のグリップローラであって、このグリップローラの回転方向が前記基板の搬送方向に対して上方斜めに設置されているグリップローラと、
前記少なくとも一対のグリップローラの前記基板を挟む力を変化させることで、前記基板の高さを制御する制御手段と
を備えた薄膜積層体の製造装置。 - 帯状可撓性基板の表面に複数の薄膜を積層して薄膜積層体を製造する装置であって、
前記基板の幅方向が鉛直方向になるようにして、前記基板を水平方向に搬送する基板搬送手段と、
前記基板の搬送方向に沿って連続して配列され、前記基板の表面に成膜を行う複数の成膜室と、
前記複数の成膜室のそれぞれの間に配置され、前記基板の鉛直方向上側の端部を挟む複数対のグリップローラと、
前記複数の成膜室の間のうち少なくとも1つの間に配置され、前記基板の鉛直方向上側および下側の各端部を挟む少なくとも二対のグリップローラであって、前記上側の一対のグリップローラの回転方向が前記基板の搬送方向に対して上方斜めに設置されており、前記下側の一対のグリップローラの回転方向が前記基板の搬送方向に対して下方斜めに設置されているグリップローラと、
前記上側および下側の二対のグリップローラのうち、少なくとも一方のグリップローラの前記基板を挟む力を変化させることで、前記基板の高さを制御する制御手段と
を備えた薄膜積層体の製造装置。 - 前記グリップローラの基板を挟む力を変化させるアクチュエータと、
前記アクチュエータにエネルギーを入力するための動力手段と、
前記アクチュエータに入力したエネルギーを検出するロードセルと
を更に備え、前記制御装置が、前記グリップローラの基板を挟む力を目標値にするために、前記アクチュエータに入力するエネルギーの目標値を算出し、この入力エネルギーの目標値を前記動力手段で前記アクチュエータに入力した後、前記ロードセルで検出した入力エネルギーの検出値を、前記入力エネルギーの目標値と比較して、前記アクチュエータに入力するエネルギーの目標値を変更する請求項1又は2に記載の薄膜積層体の製造装置。 - 前記基板の高さを検出するセンサを更に備え、前記制御装置が、前記センサにより前記基板の高さが所定の範囲内でないと判定された場合に、前記グリップローラの基板を挟む力の目標値を変更する請求項3に記載の薄膜積層体の製造装置。
- 帯状可撓性基板の表面に複数の薄膜を積層して薄膜積層体を製造する方法であって、
前記基板の幅方向が鉛直方向になるようにして、前記基板を水平方向に搬送するステップと、
前記基板の搬送方向に沿って連続して配列された複数の成膜室により、前記基板の表面に成膜を行うステップと、
前記複数の成膜室の間のうち少なくとも1つの間に配置され、前記基板の鉛直方向上側の端部を挟む少なくとも一対のグリップローラであって、このグリップローラの回転方向が前記基板の搬送方向に対して上方斜めに設置されているグリップローラについて、その前記基板を挟む力を変化させることで、前記基板の高さを制御するステップと
を含む薄膜積層体の製造方法。 - 帯状可撓性基板の表面に複数の薄膜を積層して薄膜積層体を製造する方法であって、
前記基板の幅方向が鉛直方向になるようにして、前記基板を水平方向に搬送するステップと、
前記基板の搬送方向に沿って連続して配列された複数の成膜室により、前記基板の表面に成膜を行うステップと、
前記複数の成膜室の間のうち少なくとも1つの間に配置され、前記基板の鉛直方向上側および下側の各端部を挟む少なくとも二対のグリップローラであって、前記上側の一対のグリップローラの回転方向が前記基板の搬送方向に対して上方斜めに設置されており、前記下側の一対のグリップローラの回転方向が前記基板の搬送方向に対して下方斜めに設置されているグリップローラについて、これら上側および下側の二対のグリップローラのうち、少なくとも一方のグリップローラの前記基板を挟む力を変化させることで、前記基板の高さを制御するステップと
を含む薄膜積層体の製造方法。 - 前記基板の高さを制御するステップが、
前記グリップローラの基板を挟む力を目標値にするために、前記グリップローラの基板を挟む力を変化させるアクチュエータに入力するエネルギーの目標値を算出するステップと、
このエネルギーの目標値を、動力手段により前記アクチュエータに入力するステップと、
前記アクチュエータに入力したエネルギーをロードセルで検出し、この入力エネルギーの検出値を、前記入力エネルギーの目標値と比較して、前記アクチュエータに入力するエネルギーの目標値を変更するステップと
を更に含む請求項5又は6に記載の薄膜積層体の製造方法。 - 前記基板の高さを制御するステップが、
センサにより前記基板の高さを検出し、前記基板の高さが所定の範囲内であるかどうかを判定するステップと、
前記基板の高さが所定の範囲内でないと判定された場合に、前記グリップローラの基板を挟む力の目標値を変更するステップと
を更に含む請求項7に記載の薄膜積層体の製造方法。
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SE0702163L (sv) * | 2007-09-25 | 2008-12-23 | Abb Research Ltd | En anordning och ett förfarande för stabilisering och visuell övervakning av ett långsträckt metalliskt band |
JP5201490B2 (ja) * | 2008-12-24 | 2013-06-05 | 富士電機株式会社 | 可撓性基板の処理装置および薄膜積層体の製造装置 |
EP2392528A1 (en) * | 2009-01-28 | 2011-12-07 | Fuji Electric Co., Ltd. | Position controller for flexible substrate |
JP5423808B2 (ja) * | 2009-12-11 | 2014-02-19 | 富士電機株式会社 | 可撓性基板の搬送装置 |
JP5652692B2 (ja) * | 2009-12-14 | 2015-01-14 | 富士電機株式会社 | フィルム基板の搬送装置 |
US20130199442A1 (en) * | 2009-12-16 | 2013-08-08 | Fuji Electric Co., Ltd. | Apparatus for flexible substrate position control |
JP5652700B2 (ja) * | 2010-02-09 | 2015-01-14 | 富士電機株式会社 | 可撓性基板の位置制御装置 |
CN105632978B (zh) * | 2010-04-09 | 2018-10-30 | 株式会社尼康 | 基板处理装置及基板处理方法 |
JP5488997B2 (ja) * | 2010-06-17 | 2014-05-14 | 富士電機株式会社 | 薄膜積層体製造装置の基板位置制御装置 |
JP5787216B2 (ja) * | 2010-06-24 | 2015-09-30 | 富士電機株式会社 | 薄膜積層体製造装置およびその運転方法 |
KR101241718B1 (ko) * | 2011-10-13 | 2013-03-11 | 엘지이노텍 주식회사 | 태양전지 모듈 및 이의 제조방법 |
KR101554073B1 (ko) * | 2012-11-30 | 2015-09-17 | 주식회사 엘지화학 | 롤 |
CN105506553B (zh) * | 2014-09-26 | 2019-03-12 | 蒯一希 | 真空镀膜装置、真空双面镀膜装置及带材的位置调整方法 |
CN109920880B (zh) * | 2019-03-19 | 2020-08-21 | 杭州耀晗光伏技术有限公司 | 一种柔性光伏电池板自动化打孔切割设备 |
CN111705302B (zh) * | 2020-08-18 | 2020-11-10 | 上海陛通半导体能源科技股份有限公司 | 可实现晶圆平稳升降的气相沉积设备 |
CN114318286A (zh) * | 2022-01-27 | 2022-04-12 | 北京青禾晶元半导体科技有限责任公司 | 一种复合基板的制备装置及复合基板的制备方法 |
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