JP4829495B2 - 振動波駆動装置 - Google Patents
振動波駆動装置 Download PDFInfo
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- JP4829495B2 JP4829495B2 JP2004369438A JP2004369438A JP4829495B2 JP 4829495 B2 JP4829495 B2 JP 4829495B2 JP 2004369438 A JP2004369438 A JP 2004369438A JP 2004369438 A JP2004369438 A JP 2004369438A JP 4829495 B2 JP4829495 B2 JP 4829495B2
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- Prior art keywords
- electrode film
- piezoelectric element
- energy conversion
- vibration wave
- conversion element
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- 238000006243 chemical reaction Methods 0.000 claims description 29
- 238000005452 bending Methods 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
ここで、dは圧電常数を、Eは印加電圧を、dsは領域R1の面積を、hは領域R1のY軸からの距離を示す。
ここで、dは圧電常数を、Eは印加電圧を、dsは領域R2の面積を、hは領域R2のY軸からの距離を示す。なお、図10に示す圧電素子1000の直径は、圧電素子200の横断面1辺の長さと同じaである。
201−1,2 分割電極膜
202−1,2 分割電極膜
203 電極膜境界部
Claims (7)
- 表面に形成された電極膜に交流電圧が印加されることによって振動を発生する電気−機械エネルギ変換素子と、前記電気−機械エネルギ変換素子を固定する弾性体と、を備える振動子と、
前記電気−機械エネルギ変換素子及び前記弾性体の内部を通るシャフトと、
前記振動子に接触する接触体と、を有する振動波駆動装置であって、
前記電気−機械エネルギ変換素子は、前記電極膜が形成された面が多角形であり、前記電極膜が前記多角形の頂点を結ぶ対角線上以外の領域に設けられた電極膜境界部によって複数に分割されおり、
前記振動子は、
前記電気−機械エネルギ変換素子の前記シャフトと平行な方向の振動によって、前記シャフトと直交する方向に振動する複数の曲げ振動を発生し、
前記複数の曲げ振動が合成されて前記弾性体の表面に円運動が発生することにより、前記接触体を相対的に移動させる
ことを特徴とする振動波駆動装置。 - 前記分割された電極膜は前記多角形の頂点を含む領域に形成されていることを特徴とする請求項1記載の振動波駆動装置。
- 前記多角形は正方形であり、前記電極膜境界部は正方形の各辺の中点からの垂線上に設けられていることを特徴とする請求項2に記載の振動波駆動装置。
- 前記多角形は方形であり、前記電極膜は前記電極膜境界部により4分割されていることを特徴とする請求項2に記載の振動波駆動装置。
- 前記電極膜境界部は、前記多角形の電気−機械エネルギ変換素子の外周部にも設けられていることを特徴とする請求項1乃至4のいずれか1項に記載の振動波駆動装置。
- 請求項1乃至3のいずれか1項に記載の電気−機械エネルギ変換素子からなる層が複数積層されていることを特徴とする振動波駆動装置。
- 前記多角形の中心からの距離が前記多角形の頂点からの距離よりも短い領域に、異なる層の電極膜を繋ぐ導電部が形成されていることを特徴とする請求項4に記載の振動波駆動装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004369438A JP4829495B2 (ja) | 2004-12-21 | 2004-12-21 | 振動波駆動装置 |
US11/298,796 US7459832B2 (en) | 2004-12-21 | 2005-12-09 | Electro-mechanical energy converter and vibration wave driving |
US12/249,820 US7633215B2 (en) | 2004-12-21 | 2008-10-10 | Electro-mechanical energy converter and vibration wave driving |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004369438A JP4829495B2 (ja) | 2004-12-21 | 2004-12-21 | 振動波駆動装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006179578A JP2006179578A (ja) | 2006-07-06 |
JP2006179578A5 JP2006179578A5 (ja) | 2008-01-24 |
JP4829495B2 true JP4829495B2 (ja) | 2011-12-07 |
Family
ID=36594769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004369438A Expired - Fee Related JP4829495B2 (ja) | 2004-12-21 | 2004-12-21 | 振動波駆動装置 |
Country Status (2)
Country | Link |
---|---|
US (2) | US7459832B2 (ja) |
JP (1) | JP4829495B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10516349B2 (en) | 2015-12-04 | 2019-12-24 | Canon Kabushiki Kaisha | Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006352984A (ja) * | 2005-06-15 | 2006-12-28 | Tdk Corp | 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ |
CN102037740B (zh) | 2008-05-29 | 2014-08-27 | 株式会社村田制作所 | 压电扬声器、扬声器装置以及触觉反馈装置 |
WO2009144972A1 (ja) | 2008-05-29 | 2009-12-03 | 株式会社村田製作所 | シート型振動体および音響機器 |
JP5222224B2 (ja) * | 2008-12-04 | 2013-06-26 | スミダコーポレーション株式会社 | 超音波モータ |
DE102009049719A1 (de) * | 2009-10-17 | 2011-04-21 | Physik Instrumente (Pi) Gmbh & Co. Kg | Aktuator |
FR2992120B1 (fr) * | 2012-06-15 | 2014-07-18 | Commissariat Energie Atomique | Actionneur pour moteur ultrasonique et moteur ultrasonique comportant au moins un tel actionneur |
JP6025446B2 (ja) * | 2012-08-10 | 2016-11-16 | キヤノン株式会社 | 振動型アクチュエータ、撮像装置および、振動型アクチュエータを備えた装置 |
CN108802197B (zh) * | 2018-06-13 | 2021-02-02 | 武汉科技大学 | 谐振频率可调的压电智能骨料 |
DE102022114863B3 (de) * | 2022-06-13 | 2023-10-19 | Physik Instrumente (PI) GmbH & Co KG | Ultraschallmotor |
JP2024034804A (ja) * | 2022-09-01 | 2024-03-13 | キヤノン株式会社 | 振動波モータ及び駆動装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3416233A (en) * | 1966-11-04 | 1968-12-17 | Aerojet General Co | Extensometer and attachment |
US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
US5814919A (en) * | 1995-04-28 | 1998-09-29 | Canon Kabushiki Kaisha | Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element |
JP4704537B2 (ja) * | 2000-01-31 | 2011-06-15 | セイコーインスツル株式会社 | 超音波モータ及び超音波モータ付き電子機器 |
US6930436B2 (en) * | 2001-01-22 | 2005-08-16 | Canon Kabushiki Kaisha | Vibration element and vibration wave driving apparatus |
JP2003047266A (ja) | 2001-07-27 | 2003-02-14 | Canon Inc | 振動波駆動装置 |
JP5031153B2 (ja) * | 2001-07-31 | 2012-09-19 | キヤノン株式会社 | 積層電気−機械エネルギー変換素子および振動波駆動装置 |
DE10233100A1 (de) * | 2002-07-20 | 2004-01-29 | Robert Bosch Gmbh | Piezoelektrisches Aktormodul und Verfahren zur Montage eines piezoelektrischen Aktormoduls |
-
2004
- 2004-12-21 JP JP2004369438A patent/JP4829495B2/ja not_active Expired - Fee Related
-
2005
- 2005-12-09 US US11/298,796 patent/US7459832B2/en not_active Expired - Fee Related
-
2008
- 2008-10-10 US US12/249,820 patent/US7633215B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10516349B2 (en) | 2015-12-04 | 2019-12-24 | Canon Kabushiki Kaisha | Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus |
Also Published As
Publication number | Publication date |
---|---|
US7459832B2 (en) | 2008-12-02 |
US7633215B2 (en) | 2009-12-15 |
US20060131999A1 (en) | 2006-06-22 |
JP2006179578A (ja) | 2006-07-06 |
US20090039735A1 (en) | 2009-02-12 |
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