JP4829326B2 - Method for inspecting and locating leaks and apparatus suitable for carrying out the method - Google Patents

Method for inspecting and locating leaks and apparatus suitable for carrying out the method Download PDF

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JP4829326B2
JP4829326B2 JP2009177894A JP2009177894A JP4829326B2 JP 4829326 B2 JP4829326 B2 JP 4829326B2 JP 2009177894 A JP2009177894 A JP 2009177894A JP 2009177894 A JP2009177894 A JP 2009177894A JP 4829326 B2 JP4829326 B2 JP 4829326B2
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oxygen
gas
container
oxygen sensor
sensor
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JP2009244284A (en
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グローセ ブライ ヴェルナー
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Inficon GmbH Deutschland
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators

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  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Description

本発明は、試験体または容器の壁における漏れをガス分圧の変化の測定および評価によって確認するための方法ならびに試験体または容器の壁における漏れをガス分圧の変化の測定および評価によって確認するための装置に関する。   The present invention relates to a method for confirming leakage in a specimen or container wall by measurement and evaluation of changes in gas partial pressure and to confirm leakage in a specimen or container wall by measurement and evaluation of changes in gas partial pressure. Relates to a device for

漏れもしくはリークをテストガス、有利にはヘリウムによって検査しかつ場合によっては確認することが知られている。このためには、漏れを検査したい壁が差圧にさらされる。高い方の圧力を伴った側ではテストガス分圧が増加させられる。漏れが存在している場合には、テストガスが通流する。低い方の圧力を伴った面には、テストガス分圧の上昇を記録するテストガスディテクタ、通常は質量分析計が位置している。   It is known to check for leaks or leaks with a test gas, preferably helium, and possibly confirm. For this purpose, the wall to be inspected for leaks is exposed to differential pressure. On the side with the higher pressure, the test gas partial pressure is increased. If there is a leak, the test gas will flow. Located on the surface with the lower pressure is a test gas detector, usually a mass spectrometer, which records the increase in the test gas partial pressure.

質量分析計は比較的高価であると共に敏感である。質量分析計は約１０−４ｍｂａｒ以下の圧力でしか運転することができない。したがって、質量分析計の使用は比較的高い技術的な手間と金銭的な費用とに関連している。 Mass spectrometers are relatively expensive and sensitive. The mass spectrometer can only be operated at a pressure below about 10 −4 mbar. Thus, the use of mass spectrometers is associated with relatively high technical effort and financial costs.

本発明の課題は、冒頭で述べた形式の方法を改善すると共に該方法を実施するために適した装置を改良して、技術的な手間と金銭的な費用とが削減されているようにすることである。   The object of the present invention is to improve a method of the type mentioned at the beginning and to improve the apparatus suitable for carrying out the method so that the technical effort and the financial costs are reduced. That is.

この課題を解決するために本発明の方法では、酸素不含のガスで充填された正圧下にある容器の壁における漏れの確認を、前記ガスをスニッファ先端部によって吸い込みかつ該スニッファ先端部によって吸い込まれたガスにおける酸素の存在を酸素センサによって検査するように実施するようにした。さらに、前記課題を解決するために本発明の第１の装置によれば、酸素をテストガスとして使用する場合に酸素センサが設けられており、該酸素センサが、測定・評価装置に接続されており、酸素不含のガスで充填された正圧下にある容器の壁における漏れの確認が、前記ガスをスニッファ先端部によって吸い込みかつ該スニッファ先端部によって吸い込まれたガスにおける酸素の存在を酸素センサによって検査するように実施されるようにした。さらに、前記課題を解決するために本発明の第２の装置によれば、スニッファ先端部が、チャンバを備えた管路に接続されており、チャンバ内に酸素センサが位置しており、酸素不含のガスで充填された正圧下にある容器の壁における漏れの確認が、前記ガスをスニッファ先端部によって吸い込みかつ該スニッファ先端部によって吸い込まれたガスにおける酸素の存在を酸素センサによって検査するように実施されるようにした。 In the method of the present invention in order to solve this problem, the confirmation of the leak in the wall of the container in a positive pressure which is filled with oxygen-free gas, the gas by and the sniffer tip narrowing suck the sniffer tip the presence of oxygen in was incorporated sucked gas so as to implement to inspect by the oxygen sensor. Furthermore, according to the first apparatus of the present invention to solve the above-described problem, an oxygen sensor is provided when oxygen is used as a test gas, and the oxygen sensor is connected to a measurement / evaluation apparatus. cage, confirmation of the leakage at the wall of the container in a positive pressure which is filled with oxygen-free gas, oxygen presence of oxygen in the gas was incorporated sucked by and the sniffer tip narrowing suck the sniffer tip gas It was designed to be inspected by a sensor. Furthermore, in order to solve the above-described problem, according to the second device of the present invention, the sniffer tip is connected to a conduit having a chamber, the oxygen sensor is located in the chamber, Verifying leaks in the wall of the container in a positive pressure filled with free gas, to inspect the presence of oxygen in the gas was incorporated sucked by and the sniffer tip narrowing suck the sniffer tip gas by an oxygen sensor To be implemented.

酸素をテストガスとして使用することによって、酸素センサをテストガスディテクタとして使用することができる。固体電解質型酸素センサが使用されると有利である。この固体電解質型酸素センサは、かなりの時間以来、たとえば自動車触媒に対する排ガス監視で使用されている。固体電解質型酸素センサでは、この固体電解質型酸素センサを運転するために高真空は不要となる。固体電解質型酸素センサは、マイクロ構造で形成されている場合には広い範囲で線形であり、とりわけ十分に敏感であるので、本発明による漏れ検査は、ヘリウムリークテストに匹敵し得る感度で実施することができる。さらに、酸素をテストガスとして使用することは、この漏れ検査法の使用者に、多くの使用事例において特に有利であるガス、つまり酸素の存在が直接報知されるという別の利点を有している。   By using oxygen as the test gas, the oxygen sensor can be used as a test gas detector. Advantageously, a solid electrolyte oxygen sensor is used. This solid oxide oxygen sensor has been used since a considerable amount of time, for example in exhaust gas monitoring for automotive catalysts. In the solid electrolyte oxygen sensor, a high vacuum is not required to operate the solid electrolyte oxygen sensor. Solid electrolyte oxygen sensors are linear in a wide range when formed in a microstructure and are particularly sensitive enough so that the leak test according to the present invention is carried out with a sensitivity comparable to the helium leak test. be able to. Furthermore, the use of oxygen as a test gas has the further advantage that the user of this leak test method is directly informed of the presence of a particularly advantageous gas in many use cases, namely oxygen. .

負圧下にある容器における漏れを検査しかつ漏れの箇所をつきとめるための装置を示す図である。It is a figure which shows the apparatus for test | inspecting the leak in the container under negative pressure, and pinpointing the location of a leak. 組み合わされた酸素／圧力センサを示す図である。FIG. 4 shows a combined oxygen / pressure sensor. 酸素不含のガスで充填された、正圧下にある容器における漏れを検査しかつ漏れの箇所をつきとめるための装置を示す図である。It is a figure which shows the apparatus for test | inspecting the leak in the container under the positive pressure filled with the gas which does not contain oxygen, and pinpointing the location of a leak. 酸素含有のガスで充填された試験体における漏れを積分法により検査するための装置を示す図である。It is a figure which shows the apparatus for test | inspecting the leak in the test body filled with the gas containing oxygen by the integration method.

以下に、本発明を実施するための形態を図面につき詳しく説明する。   In the following, embodiments for carrying out the present invention will be described in detail with reference to the drawings.

図１には、負圧下にある容器が符号１で示してある。この容器１には真空ポンプ２が弁３を介して接続されている。容器１内には酸素センサ４が位置している。この酸素センサ４は線路５を介して記録装置６に接続されている。付加的に容器１内には圧力センサ７が位置している。この圧力センサ７は線路８を介して記録装置９に接続されている。両装置６，９は評価ユニット１１に接続されている。この評価ユニット１１は警報器１２に接続されている。容器１の壁に位置する漏れもしくはリークは符号１３で示してある。   In FIG. 1, a container under negative pressure is indicated by reference numeral 1. A vacuum pump 2 is connected to the container 1 via a valve 3. An oxygen sensor 4 is located in the container 1. This oxygen sensor 4 is connected to a recording device 6 via a line 5. In addition, a pressure sensor 7 is located in the container 1. This pressure sensor 7 is connected to a recording device 9 via a line 8. Both devices 6 and 9 are connected to an evaluation unit 11. This evaluation unit 11 is connected to an alarm device 12. A leak or leak located on the wall of the container 1 is indicated by 13.

漏れ１３が容器１の排気された状態で発生すると、空気が容器１内に到達する。これによって、酸素分圧が変化する。このことは測定装置６によって確認される。この測定装置６自体は評価ユニット１１を介して漏れ表示を生ぜしめる。圧力センサ７と測定装置９とによって、酸素分圧と全圧との比率、すなわち酸素濃度を評価することが可能となる。酸素濃度が、たとえば１５％よりも高くなると漏れ表示が生ぜしめられ得る。   When the leak 13 occurs while the container 1 is evacuated, air reaches the container 1. This changes the oxygen partial pressure. This is confirmed by the measuring device 6. This measuring device 6 itself produces a leak indication via the evaluation unit 11. The pressure sensor 7 and the measuring device 9 can evaluate the ratio between the oxygen partial pressure and the total pressure, that is, the oxygen concentration. If the oxygen concentration is higher than 15%, for example, a leak indication can occur.

さらに、容器１の排気の間、影響を与える予め既存の漏れ１３を確認することも可能である。このことは、たとえば排気の間、規定された時点で測定された酸素分圧の値が評価ユニット１１において、密な容器１に関して収容されかつメモリされた早期の測定値と比較されることによって行うことができる。   Furthermore, it is also possible to check in advance existing leaks 13 which have an influence during the exhaust of the container 1. This is done, for example, by evacuating the value of the partial pressure of oxygen measured at a defined point in time during the evacuation in the evaluation unit 11 by comparing it with the early measurements stored and stored for the dense container 1. be able to.

さらに、図１に示した装置はスプレイガン１５を有している。このスプレイガン１５は、酸素不含のガス、たとえばＮ２を備えた圧力容器１６に接続されている。第１の測定段階で容器１の壁における漏れ１３が確認された場合には、容器１の、酸素不含のガスによる局所的な噴霧によって漏れ１３の箇所をつきとめることができる。ガス噴流が漏れ１３を通過する場合には、この時間の間、酸素は容器１内に進入しない。この結果、容器１内の酸素分圧の短時間の減少が生ぜしめられる。この減少は酸素センサ４によって記録され、測定装置６によって表示される。これによって、噴霧動作と漏れ１３の位置との直接的な相関関係が付与されているので、漏れ１３の箇所を正確につきとめることが可能となる。 Furthermore, the apparatus shown in FIG. 1 has a spray gun 15. The spray gun 15 is connected to a pressure vessel 16 equipped with an oxygen-free gas, such as N 2 . When a leak 13 on the wall of the container 1 is confirmed in the first measurement stage, the location of the leak 13 can be identified by local spraying of the container 1 with a gas containing no oxygen. If the gas jet passes through the leak 13, oxygen will not enter the container 1 during this time. As a result, the oxygen partial pressure in the container 1 is reduced in a short time. This decrease is recorded by the oxygen sensor 4 and displayed by the measuring device 6. Accordingly, since a direct correlation between the spraying operation and the position of the leak 13 is given, the location of the leak 13 can be accurately determined.

酸素分圧の減少が急勾配であればあるほどかつ／または酸素センサ４の応答時間が小さければ小さいほど、益々迅速に漏れの箇所のつきとめを実施することができる。したがって、漏れを検査しかつ漏れの箇所をつきとめることは、容器１の元々のガス充填が酸素不含である場合に特に敏感となる。さらに、分圧の減少には、酸素を消費するガスをテストガスとして使用することによって影響を与えることができる。このガス、たとえばプロパン、ブタンまたはこれに類するものでは、漏れ１３の手前の酸素押退けの他にさらに、容器１に設けられた酸素センサ４の熱い表面で酸素消費が生ぜしめられるので、測定効果が増大されている。   As the oxygen partial pressure decreases more steeply and / or as the response time of the oxygen sensor 4 is smaller, the leak location can be determined more rapidly. Therefore, checking for leaks and locating leaks are particularly sensitive when the original gas filling of the container 1 is oxygen free. Furthermore, the reduction in partial pressure can be influenced by using a gas that consumes oxygen as the test gas. In this gas, for example, propane, butane or the like, in addition to the oxygen displacement before the leak 13, the oxygen consumption is caused by the hot surface of the oxygen sensor 4 provided in the container 1. Has been increased.

図１に示した構成では、酸素センサ４と圧力センサ７とが空間的に分離されている。この分離は固体電解質型酸素センサの場合には省略することができる。なぜならば、通常、この固体電解質型酸素センサが加熱線材を装備しているからである。図２には、この種の酸素センサ４が示してある。共通の支持体１８には、酸素センサ構成素子１９（たとえば相互間に位置する固体電解質を備えた２つの白金電極）だけでなく加熱線材２１も取り付けられている。この加熱線材２１は、自体公知の形式で測定ブリッジ（図示せず）の構成部分を成していて、ひいては同時に熱伝導真空計の圧力センサの機能を有している。   In the configuration shown in FIG. 1, the oxygen sensor 4 and the pressure sensor 7 are spatially separated. This separation can be omitted in the case of a solid electrolyte oxygen sensor. This is because the solid oxide oxygen sensor is usually equipped with a heating wire. FIG. 2 shows an oxygen sensor 4 of this type. On the common support 18, not only the oxygen sensor component 19 (for example, two platinum electrodes with a solid electrolyte positioned between them) but also a heating wire 21 is attached. The heating wire 21 forms a component part of a measurement bridge (not shown) in a manner known per se, and thus has the function of a pressure sensor of a heat conduction vacuum gauge.

図３に示した実施例では、酸素不含のガスで充填された、正圧下にある容器１の漏れが検査される。この容器１は、その都度のガスに対する蓄え容器または試験体であってよい。この試験体は、漏れ検査の目的のために圧力容器２０によって酸素不含のガスで充填されている。 In the embodiment shown in FIG. 3, the container 1 under positive pressure, which is filled with oxygen-free gas, is inspected for leaks. The container 1 may be a storage container or test body for each gas. This specimen is filled with oxygen-free gas by the pressure vessel 20 for the purpose of leak testing.

漏れ検査と漏れの箇所のつきとめとはスニッファ２２によって行われる。このスニッファ２２の先端部２３は容器１にわたって案内される。スニッファ２２には管路２４が接続されている。この管路２４はフィードポンプ２５、たとえばダイヤフラムポンプの入口側に接続されている。吸い込まれたガス流は、スニッファ２２とフィードポンプ２５との間の経路に設けられたチャンバ２６に到達する。このチャンバ２６内には酸素センサ４が位置している。この酸素センサ４の信号は、図１に示した構成と同様に線路５を介して測定装置６に供給される。   The sniffer 22 performs the leak inspection and the location of the leak. The tip 23 of the sniffer 22 is guided over the container 1. A pipe line 24 is connected to the sniffer 22. This pipe line 24 is connected to an inlet side of a feed pump 25, for example, a diaphragm pump. The sucked gas flow reaches a chamber 26 provided in a path between the sniffer 22 and the feed pump 25. The oxygen sensor 4 is located in the chamber 26. The signal from the oxygen sensor 4 is supplied to the measuring device 6 through the line 5 as in the configuration shown in FIG.

スニッファ２２が空気を吸い込んでいる限り、センサ４は空気中の酸素に基づき一定の信号を供給している。スニッファ先端部２３が漏れを通過すると、酸素供給が減少させられるかまたは中断される。図１に示した実施例における漏れの箇所のつきとめに対して説明したように、酸素センサ４は酸素分圧の変化を記録するので、漏れの存在だけでなく漏れの位置も確認可能となる。この方法でも、酸素を消費するガスが容器または試験体１内に位置している場合には測定効果が増大される。   As long as the sniffer 22 is sucking air, the sensor 4 supplies a constant signal based on oxygen in the air. As the sniffer tip 23 passes through the leak, the oxygen supply is reduced or interrupted. As described with reference to the location of the leak location in the embodiment shown in FIG. 1, since the oxygen sensor 4 records the change in the oxygen partial pressure, not only the presence of the leak but also the location of the leak can be confirmed. Even in this method, when the gas that consumes oxygen is located in the container or the test body 1, the measurement effect is increased.

図４に示した構成では、酸素含有のガスで充填された試験体１の漏れが試験チャンバ３１内で積分法により検査される。自体公知の形式では、試験チャンバ３１が管路３２を介して真空ポンプ３３によって排気される。管路３２には、酸素センサ４を備えたチャンバ２６が位置している。排気の間、酸素が試験体１から流出すると、この酸素がチャンバ２６を通流しかつセンサ４と測定装置６とによって記録される。説明したように、測定結果と、密な試験体１における早期の測定との比較によって、より良好な漏れ検査結果が得られる。この目的は、試験チャンバ３１が試験体１の挿入後に酸素不含のガスで充填され、これによって、既存の大気酸素が漏れ検査を妨害しないことによっても達成される。   In the configuration shown in FIG. 4, the leakage of the test body 1 filled with the oxygen-containing gas is inspected in the test chamber 31 by the integration method. In a manner known per se, the test chamber 31 is evacuated by a vacuum pump 33 via a line 32. A chamber 26 provided with the oxygen sensor 4 is located in the pipe line 32. During the evacuation, as oxygen flows out of the specimen 1, this oxygen flows through the chamber 26 and is recorded by the sensor 4 and the measuring device 6. As explained, a better leak test result can be obtained by comparing the measurement result with the early measurement in the dense test body 1. This object is also achieved by the fact that the test chamber 31 is filled with an oxygen-free gas after insertion of the specimen 1 so that the existing atmospheric oxygen does not interfere with the leak test.

１ 容器
２ 真空ポンプ
３ 弁
４ 酸素センサ
５ 線路
６ 測定装置
７ 圧力センサ
８ 線路
９ 測定装置
１１ 評価ユニット
１２ 警報器
１３ 漏れ
１５ スプレイガン
１６ 圧力容器
１８ 支持体
１９ 酸素センサ構成素子
２０ 圧力容器
２１ 加熱線材
２２ スニッファ
２３ 先端部
２４ 管路
２５ フィードポンプ
２６ チャンバ
３１ 試験チャンバ
３２ 管路
３３ 真空ポンプ DESCRIPTION OF SYMBOLS 1 Container 2 Vacuum pump 3 Valve 4 Oxygen sensor 5 Line 6 Measuring apparatus 7 Pressure sensor 8 Line 9 Measuring apparatus 11 Evaluation unit 12 Alarm 13 Leakage 15 Spray gun 16 Pressure container 18 Support body 19 Oxygen sensor component 20 Pressure container 21 Heating Wire material 22 Sniffer 23 Tip 24 Pipe line 25 Feed pump 26 Chamber 31 Test chamber 32 Pipe line 33 Vacuum pump

Claims (8)

試験体または容器の壁における漏れを酸素センサ（４）による酸素分圧の減少の記録によって確認するための方法において、酸素不含のガスで充填された正圧下にある前記試験体または容器（１）の壁における漏れの確認を、前記ガスをスニッファ先端部（２３）によって吸い込みかつ該スニッファ先端部（２３）によって吸い込まれたガスにおける酸素の存在を酸素センサ（４）によって検査するように実施し、スニッファ（２２）に管路（２４）が接続されており、該管路（２４）が、ダイヤフラムポンプの形のフィードポンプ（２５）の入口側に接続されており、スニッファ先端部（２３）を前記試験体または容器にわたって案内することを特徴とする、試験体または容器の壁における漏れを酸素センサによる酸素分圧の減少の記録によって確認するための方法。 In a method for confirming leakage in the wall of a specimen or container by recording the decrease in oxygen partial pressure by means of an oxygen sensor (4) , said specimen or container (1 ) under a positive pressure filled with oxygen-free gas. The leakage of the gas in the wall is confirmed by inhaling the gas by the sniffer tip (23) and checking the presence of oxygen in the gas sucked by the sniffer tip (23) by the oxygen sensor (4). The pipe (24) is connected to the sniffer (22), the pipe (24) is connected to the inlet side of the feed pump (25) in the form of a diaphragm pump, and the sniffer tip (23) the characterized by guiding over the specimen or containers, recording the decrease in oxygen partial pressure by the oxygen sensor a leak in the wall of the test body or container Way to confirm me. 酸素不含のガスが、酸素を消費するガスである、請求項１記載の方法。   The method according to claim 1, wherein the oxygen-free gas is a gas that consumes oxygen. スニッファ先端部（２３）によって吸い込まれたガスを、酸素センサ（４）が位置しているチャンバ（２６）を通して通流させる、請求項１または２記載の方法。   The method according to claim 1 or 2, wherein the gas drawn by the sniffer tip (23) is passed through the chamber (26) in which the oxygen sensor (4) is located. 請求項１から３までのいずれか１項記載の方法により、試験体または容器の壁における漏れを酸素センサ（４）による酸素分圧の減少の記録によって確認するための装置において、酸素をテストガスとして使用する場合に酸素センサ（４）が設けられており、該酸素センサ（４）が、測定・評価装置（６，１１，１２）に接続されており、酸素不含のガスで充填された正圧下にある前記試験体または容器（１）の壁における漏れの確認が、前記ガスをスニッファ先端部（２３）によって吸い込みかつ該スニッファ先端部（２３）によって吸い込まれたガスにおける酸素の存在を酸素センサ（４）によって検査するように実施されることを特徴する、試験体または容器の壁における漏れを酸素センサによる酸素分圧の減少の記録によって確認するための装置。 4. A method according to any one of claims 1 to 3, wherein oxygen is detected in a test gas in an apparatus for confirming leakage in a specimen or container wall by recording a decrease in oxygen partial pressure with an oxygen sensor (4). The oxygen sensor (4) is provided when used as an oxygen sensor, and the oxygen sensor (4) is connected to the measurement / evaluation apparatus (6, 11, 12) and filled with oxygen-free gas. Confirmation of leakage in the wall of the specimen or container (1) under positive pressure is due to the presence of oxygen in the gas sucked by the sniffer tip (23) and the gas sucked by the sniffer tip (23). to characterized in that it is carried out to check the sensor (4) to confirm the recording of the reduction of the oxygen partial pressure leakage by the oxygen sensor in the wall of the test body or container Apparatus for. 酸素センサ（４）が、固体電解質型酸素センサである、請求項４記載の装置。   The device according to claim 4, wherein the oxygen sensor (4) is a solid electrolyte oxygen sensor. 酸素センサ（４）が、共通の支持体（１８）を有しており、該支持体（１８）に加熱線材（２１）が取り付けられており、該加熱線材（２１）が、圧力センサ（７）を形成している、請求項５記載の装置。   The oxygen sensor (4) has a common support (18), the heating wire (21) is attached to the support (18), and the heating wire (21) is connected to the pressure sensor (7). 6. The device according to claim 5, wherein: 請求項１から３までのいずれか１項記載の方法により、試験体または容器の壁における漏れを酸素センサ（４）による酸素分圧の減少の記録によって確認するための装置において、スニッファ先端部（２３）が、チャンバ（２６）を備えた管路（２４）に接続されており、チャンバ（２６）内に酸素センサ（４）が位置しており、酸素不含のガスで充填された正圧下にある前記試験体または容器（１）の壁における漏れの確認が、前記ガスをスニッファ先端部（２３）によって吸い込みかつ該スニッファ先端部（２３）によって吸い込まれたガスにおける酸素の存在を酸素センサ（４）によって検査するように実施されることを特徴する、試験体または容器の壁における漏れを酸素センサによる酸素分圧の減少の記録によって確認するための装置。 A device for confirming leakage in a specimen or container wall by recording the decrease in oxygen partial pressure by means of an oxygen sensor (4) according to any one of claims 1 to 3, wherein the sniffer tip ( 23) is connected to a line (24) with a chamber (26), in which an oxygen sensor (4) is located, and under a positive pressure filled with an oxygen-free gas. Confirmation of leakage in the wall of the test body or container (1) is that the gas is sucked by the sniffer tip (23) and the presence of oxygen in the gas sucked by the sniffer tip (23) is detected by an oxygen sensor ( to characterized in that it is carried out to inspect by 4), for checking by the recording of a decrease in oxygen partial pressure leakage by the oxygen sensor in the wall of the test body or container Location. ガス流れを発生させるフィードポンプ（２５）がダイヤフラムポンプである、請求項７記載の装置。 8. The device according to claim 7 , wherein the feed pump (25) for generating the gas flow is a diaphragm pump.
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Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2834066B1 (en) * 2001-12-21 2004-02-13 Air Liquide METHOD AND DEVICE FOR MEASURING THE FLOW OF OXYGEN INFILTRING INTO A CONTAINER
ITRM20030451A1 (en) * 2003-09-30 2005-04-01 Xsemisys Di Fabio La Spina & C S N C METHOD AND DEVICE FOR THE REVELATION AND THE
DE102004045803A1 (en) * 2004-09-22 2006-04-06 Inficon Gmbh Leak test method and leak tester
DE102004058606B4 (en) * 2004-12-03 2006-10-05 Eads Deutschland Gmbh Method for testing the tightness of containers
DE102004059485A1 (en) * 2004-12-10 2006-06-22 Inficon Gmbh Leak Detector
EP1836467B1 (en) * 2005-01-10 2012-04-25 Mocon, Inc. Instrument and method for detecting leaks in hermetically sealed packaging
US20070240493A1 (en) * 2006-04-18 2007-10-18 Shane Conlan Sprayer-sniffer probe
DE102006034735A1 (en) * 2006-07-27 2008-01-31 Inficon Gmbh Leak Detector
DE102007035932A1 (en) * 2007-07-31 2009-02-05 Inficon Gmbh Leak Detector
US7707871B2 (en) * 2007-09-24 2010-05-04 Raytheon Company Leak detection system with controlled differential pressure
DE102007057944A1 (en) * 2007-12-01 2009-06-04 Inficon Gmbh Method and device for leak testing
DE102008037058A1 (en) * 2008-08-08 2010-02-11 Oerlikon Leybold Vacuum Gmbh Method for determining a total leak rate of a vacuum system and a vacuum system
DE102008048625A1 (en) * 2008-09-24 2010-03-25 Inficon Gmbh Method for leak testing a vacuum process plant
FR2940834B1 (en) * 2009-01-07 2011-06-10 Commissariat Energie Atomique DEVICE FOR DETECTING MICRO-LEAKS
DE102009009370A1 (en) * 2009-02-18 2010-08-19 Inficon Gmbh Method for functional testing of a leak detector
DE102009059824A1 (en) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Method and device for determining the leak
AU2011237624B2 (en) * 2010-04-09 2015-01-22 Shell Internationale Research Maatschappij B.V. Leak detection in circulated fluid systems for heating subsurface formations
US8297109B2 (en) * 2010-04-09 2012-10-30 Inficon Gmbh Method for performing a leak test on a test object
RU2517985C2 (en) * 2010-04-19 2014-06-10 ООО "Политест" Ion current recording unit in mass-spectrometric leak detector
CN101943325B (en) * 2010-08-06 2013-07-03 胡嘉林 Device and method for actively detecting leakage of gas system and protecting gas system
DE102010048982B4 (en) * 2010-09-03 2022-06-09 Inficon Gmbh leak detector
CN102494849B (en) * 2011-11-17 2014-04-02 四川嘉宝莉涂料有限公司 Air tightness detecting device and implementation method for same
CN102384827A (en) * 2011-11-23 2012-03-21 安徽淮化股份有限公司 Leak detection device for U-shaped waste heat boiler pipe column
CN102519681A (en) * 2012-01-06 2012-06-27 重庆生竹科技发展有限公司 Detection method for quality of welding line of sealed container
CN102645305A (en) * 2012-05-11 2012-08-22 重庆市建设技术发展中心 Method for detecting installation sealing performance of door or window
CN103091055A (en) * 2013-01-14 2013-05-08 湖州剑力金属制品有限公司 Testing device for gas tightness of workpiece
RU2532232C1 (en) * 2013-06-13 2014-10-27 Общество с Ограниченной Ответственностью "НОВАТЭК-ТАРКОСАЛЕНЕФТЕГАЗ" System of localised control of combustible gas leaks by primary parameters of measuring devices
JP2015004645A (en) * 2013-06-24 2015-01-08 株式会社村田製作所 Oxygen concentration measurement device
CN103335795B (en) * 2013-07-02 2016-05-04 中国科学院光电研究院 Vacuum seal dividing potential drop leakage rate measurement system and measuring method thereof
CN103728929B (en) * 2013-09-13 2016-05-18 长春北方化工灌装设备有限公司 A kind of leakage detection method of anti-pouring process Leak Detection
CN105300625A (en) * 2014-07-12 2016-02-03 鞍钢股份有限公司 Predictive detection system for top lance coal gas leakage and detection method thereof
CN105987796A (en) * 2015-02-12 2016-10-05 广州市和晋自动化控制技术有限公司 Method and device for detecting gas concentration
DE102015219250A1 (en) * 2015-10-06 2017-04-06 Inficon Gmbh Detection of test gas fluctuations during sniffing leak detection
DE102015222554A1 (en) 2015-11-16 2017-05-18 Inficon Gmbh Leak detection with oxygen
DE102016205381B4 (en) * 2016-03-31 2023-11-30 Inficon Gmbh Gas leak detection with a test gas spray device
CN106971963B (en) * 2017-03-17 2020-02-14 武汉华星光电技术有限公司 Dry etching machine processing cavity and method for rapidly pumping bottom and pressing leakage rate thereof
DE102017217374A1 (en) * 2017-09-29 2019-04-04 Inficon Gmbh Apparatus and method for distinguishing a leaking from a leak test gas of interfering gas
CN108663167A (en) * 2018-06-22 2018-10-16 湖南耐普恩科技有限公司 A kind of detection device of ultracapacitor leak detection anti-leak
JP7072468B2 (en) * 2018-08-21 2022-05-20 東京エレクトロン株式会社 Method for identifying the location of outside air leakage in the board processing device and the board processing device
EP3719471A1 (en) * 2019-04-03 2020-10-07 Daspos A/S A leakage detector system
TWI701428B (en) * 2019-05-21 2020-08-11 吳柄村 Leak detection apparatus and leak detection method
CN110486629A (en) * 2019-08-15 2019-11-22 上海中船三井造船柴油机有限公司 Air-tightness detection device and method for double fuel host gas pipeline
WO2023077048A1 (en) * 2021-11-01 2023-05-04 Ultra Clean Holdings, Inc. Leak detection apparatus employing helium and a helium detector

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109491A (en) * 1978-02-15 1979-08-28 Nichiden Varian Kk Method and device for detecting leakage
JPS5853752A (en) * 1981-09-25 1983-03-30 Toshiba Corp Detecting element for gas leak
DE3247975A1 (en) * 1982-12-24 1984-06-28 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Method and device for detecting leaks in walls
DE3506327A1 (en) * 1984-02-23 1985-09-05 NGK Insulators Ltd., Nagoya, Aichi Oxygen sensor having a tubular solid-electrolyte body
US4591423A (en) * 1984-03-16 1986-05-27 Ngk Insulators, Ltd. Oxygen sensor
US4704897A (en) * 1985-09-30 1987-11-10 Tokyo Gas Co. Limited Locating method of and the locating unit for leaks on piping
US4768371A (en) * 1985-12-06 1988-09-06 Ceramatec, Inc. Leak detector
JPS63200032A (en) * 1987-02-16 1988-08-18 Shinkosumosu Denki Kk Detecting method of leak in vessel
JPS63214635A (en) * 1987-03-02 1988-09-07 Fujikura Ltd Gas leak detecting method
JPH0750014B2 (en) * 1988-03-05 1995-05-31 高砂熱学工業株式会社 Method and device for measuring leak rate of airtight container
JPH0786498B2 (en) * 1988-06-02 1995-09-20 日本碍子株式会社 Heating type oxygen sensor
US4890459A (en) * 1988-12-08 1990-01-02 Thermo King Corporation Monitor for refrigeration system
JPH0594745U (en) * 1992-05-29 1993-12-24 三菱電機株式会社 Leak detector for airtight container
JP2825172B2 (en) * 1992-07-10 1998-11-18 東京エレクトロン株式会社 Reduced pressure processing apparatus and reduced pressure processing method
US5293771A (en) * 1992-09-01 1994-03-15 Ridenour Ralph Gaylord Gas leak sensor system
JP2612999B2 (en) * 1992-10-26 1997-05-21 日本電信電話株式会社 Mass spectrometry type gas leak detector
JPH0712670A (en) * 1993-06-28 1995-01-17 Kokusai Electric Co Ltd Method and apparatus for detecting leakage gas of semiconductor manufacturing apparatus
DE4325419C2 (en) * 1993-07-29 2001-06-13 Ust Umweltsensortechnik Gmbh Leak detector for vacuum systems
JPH07103843A (en) * 1993-10-05 1995-04-21 Hitachi Bill Shisetsu Eng Kk Method and equipment for detecting vacuum leakage
JPH0815082A (en) * 1994-06-29 1996-01-19 Horie Metal Co Ltd Method and device for inspecting parts for leakage
JP3688083B2 (en) * 1996-12-26 2005-08-24 東洋自動機株式会社 Seal inspection method and apparatus
JP3649544B2 (en) * 1997-02-13 2005-05-18 日本碍子株式会社 Gas analyzer
US6196056B1 (en) * 1998-04-15 2001-03-06 Vacuum Instrument Corp. System for determining integrity of a gas-sealed compartment
US6286362B1 (en) * 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6432721B1 (en) * 1999-10-29 2002-08-13 Honeywell International Inc. Meso sniffer: a device and method for active gas sampling using alternating flow

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