JP4818247B2 - 酸化亜鉛膜の形成方法 - Google Patents
酸化亜鉛膜の形成方法 Download PDFInfo
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- JP4818247B2 JP4818247B2 JP2007313212A JP2007313212A JP4818247B2 JP 4818247 B2 JP4818247 B2 JP 4818247B2 JP 2007313212 A JP2007313212 A JP 2007313212A JP 2007313212 A JP2007313212 A JP 2007313212A JP 4818247 B2 JP4818247 B2 JP 4818247B2
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- zno film
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Description
また、現状では、安価に大量の膜が形成できるが、形成したZnO膜の抵抗率が、透明導電膜として使用するには高すぎるという問題を備える成膜方法もある。このような成膜方法により成膜されたZnO膜であっても、成膜後でZnO膜の抵抗率を低下させることができれば、透明導電膜への利用が可能になることが期待される。
Claims (2)
- GaがドープされたZnOからなるターゲットを用い、酸素を導入しない状態としたECRスパッタ法により、基板の上にGaがドープされたZnO膜が形成された状態とする第1の工程と、
前記ZnO膜に、アルゴンもしくはキセノンからなる不活性ガスによる電子共鳴サイクロトロンプラズマを照射する第2の工程と
を少なくとも備えることを特徴とする酸化亜鉛膜の形成方法。 - 請求項1記載の酸化亜鉛膜の形成方法において、
前記第1および第2の工程で同一のECRスパッタ装置を用い、
前記第1の工程では、前記ターゲットに高周波電力が印加された状態で、電子共鳴サイクロトロンプラズマを生成させて前記ZnO膜を形成し、
前記第2の工程では、前記ターゲットに対する前記高周波電力の印加を停止した状態で、電子共鳴サイクロトロンプラズマを照射する
ことを特徴とする酸化亜鉛膜の形成方法。
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JP2007313212A JP4818247B2 (ja) | 2007-12-04 | 2007-12-04 | 酸化亜鉛膜の形成方法 |
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JP2007313212A JP4818247B2 (ja) | 2007-12-04 | 2007-12-04 | 酸化亜鉛膜の形成方法 |
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JP2009138211A JP2009138211A (ja) | 2009-06-25 |
JP4818247B2 true JP4818247B2 (ja) | 2011-11-16 |
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Families Citing this family (2)
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JP5519393B2 (ja) * | 2010-05-10 | 2014-06-11 | 日本電信電話株式会社 | ZnO蛍光体薄膜およびその製造方法 |
JP2011241471A (ja) * | 2010-05-21 | 2011-12-01 | Mes Afty Corp | 導電性薄膜の形成方法及び導電性薄膜形成装置 |
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JP2007231304A (ja) * | 2006-02-27 | 2007-09-13 | Ykk Ap株式会社 | 薄膜の製造方法及び製造装置、並びに成形体の製造方法 |
JP2007247008A (ja) * | 2006-03-17 | 2007-09-27 | Toyama Prefecture | Ecrスパッタリング装置及び透明導電膜の製造方法 |
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