JP4816904B2 - Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high speed cutting - Google Patents
Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high speed cutting Download PDFInfo
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この発明は、特に硬質被覆層の上部層を構成する上下２層構造の酸化アルミニウム（以下、Ａｌ2Ｏ3で示す）層のうちの上位層のα型Ａｌ2Ｏ3層が、各種の鋼や鋳鉄などの切削加工を、高速で行った場合にも、すぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 In the present invention, the upper α-type Al 2 O 3 layer of the upper and lower two-layered aluminum oxide (hereinafter referred to as Al 2 O 3 ) layers constituting the upper layer of the hard coating layer is made of various steels. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent wear resistance even when cutting is performed at high speed.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、４〜１８μｍの全体平均層厚を有し、かつ、化学蒸着した状態で、結晶構造がα型の上位層と、結晶構造がκ型の下位層で構成された上下２層構造のＡｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer consisting of one or two or more layers of carbonitride oxide (hereinafter referred to as TiCNO) layers and having an overall average layer thickness of 3 to 20 μm,
(B) The upper layer has an overall average layer thickness of 4 to 18 μm, and the upper and lower layers are composed of an upper layer having a crystal structure of α-type and a lower layer having a crystal structure of κ-type in the state of chemical vapor deposition. A two-layer Al 2 O 3 layer,
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) and (b). It is well known to be used.
また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するＴｉ化合物層やＡｌ2Ｏ3層が粒状結晶組織を有し、さらに、前記Ｔｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化する傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速切削条件で用いた場合には、摩耗が急速に進行することから、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work, and along with this, cutting work tends to be further accelerated. For coated cermet tools, there is no problem when this is used for continuous or interrupted cutting under normal conditions such as steel or cast iron, but especially when this is used under high-speed cutting conditions, wear is rapid. Therefore, the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記の従来被覆サーメット工具に着目し、特に硬質被覆層の上部層を構成する上下２層構造のＡｌ2Ｏ3層のうちの上位層のα型Ａｌ2Ｏ3層の耐摩耗性向上を図るべく研究を行った結果、
（ａ）上記の従来被覆サーメット工具の硬質被覆層の上部層の上位層を構成するα型Ａｌ2Ｏ3層は、一般に、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：９５０〜１１００℃、
反応雰囲気圧力：６〜１３ｋＰａ、
の条件（以下、通常条件という）で形成されるが、この通常条件形成のα型Ａｌ2Ｏ3層（以下、従来α型Ａｌ2Ｏ3層という）について、電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成すると、図３に例示される通り、（０００１）面の測定傾斜角の分布が４５〜９０度のいずれの範囲内でも不偏的な傾斜角度数分布グラフを示すこと。
In view of the above, the inventors focused on the above-described conventional coated cermet tool, and in particular, the upper layer of the upper and lower two-layer Al 2 O 3 layers constituting the upper layer of the hard coating layer. As a result of conducting research to improve the wear resistance of the α-type Al 2 O 3 layer,
(A) The α-type Al 2 O 3 layer constituting the upper layer of the upper layer of the hard coating layer of the above-described conventional coated cermet tool is generally a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 950-1100 ° C.
Reaction atmosphere pressure: 6-13 kPa,
The α-type Al 2 O 3 layer formed under the normal conditions (hereinafter referred to as the conventional α-type Al 2 O 3 layer) is formed using a field emission scanning electron microscope. As shown in the schematic explanatory diagrams in FIGS. 1 (a) and 1 (b), each of the crystal grains having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and an electron backscattered diffraction image is obtained. Using an apparatus, the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the polished surface at an interval of 0.1 μm / step in a predetermined region , A measured inclination angle within the range of 45 to 90 degrees is divided into 0.25 degree pitches, and an inclination angle number distribution graph is created by counting the frequencies existing in each division. Then, as illustrated in FIG. 3, the distribution of the measured inclination angle of the (0001) plane. Show an unbiased inclination angle number distribution graph in any range of 45 to 90 degrees.
（ｂ）一方、α型Ａｌ2Ｏ3層を、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：２０〜３０ｋＰａ、
の相対的に低温高圧条件（反応ガス組成は上記の通常条件と同じ）で形成すると、この結果形成されたα型Ａｌ2Ｏ3層は、同じく電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に示される通り、同じく表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、図２に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り２０〜３０ｋＰａの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の７５．００〜８８．７５度の範囲内で変化すると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０〜７８％の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて７５．００〜８８．７５度の範囲内に傾斜角区分の最高ピークが現れるα型Ａｌ2Ｏ3層（以下、改質α型Ａｌ2Ｏ3層という）は、上記の通常条件形成の従来α型Ａｌ2Ｏ3層に比して、相対的に高い高温硬さを有すること。
(B) On the other hand, the α-type Al 2 O 3 layer was similarly used with a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 20-30 kPa,
The α-type Al 2 O 3 layer formed as a result is formed under the relatively low temperature and high pressure conditions (reaction gas composition is the same as the normal conditions described above), using the same field emission scanning electron microscope as shown in FIG. As shown in a) and (b), each crystal grain having a hexagonal crystal lattice, which is also present in the measurement range of the surface polished surface, is irradiated with an electron beam , and a predetermined region is defined using an electron backscatter diffraction image apparatus. At an interval of 0.1 μm / step, an inclination angle formed by a normal line of the (0001) plane, which is a crystal plane of the crystal grain, is measured with respect to a normal line of the surface-polished surface. When the measured tilt angle within the range of 45 to 90 degrees is divided into pitches of 0.25 degrees and the frequency existing in each section is tabulated, the slope angle number distribution graph is shown in FIG. As illustrated, the sharpest peak peak at a specific position in the tilt angle section Appear, according to the test results, the reaction atmosphere pressure in a chemical vapor deposition apparatus, is varied within the above range of street 20～30KPa, 75.00 position of appearance of said sharp highest peak inclination angle division to 88 with changes in the range of .75 degrees, the sum of the frequencies present in the range of 75 to 90 degrees, now accounts for 50-78% of the total power at the inclination angle frequency distribution graph, the result The α-type Al 2 O 3 layer (hereinafter referred to as a modified α-type Al 2 O 3 layer) in which the highest peak of the tilt angle section appears in the range of 75.00 to 88.75 degrees in the tilt angle number distribution graph is Compared with the conventional α-type Al 2 O 3 layer formed under the normal conditions, it has a relatively high high-temperature hardness.
（ｃ）したがって、硬質被覆層において、上下２層構造を有する上部層のうちの上位層のα型Ａｌ2Ｏ3層を、表面研磨面の測定で、７５．００〜８８．７５度の範囲内の傾斜角区分に最高ピークが存在すると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０〜７８％の割合を占める傾斜角度数分布グラフを示す改質α型Ａｌ2Ｏ3層で構成してなる被覆サーメット工具は、前記改質α型Ａｌ2Ｏ3層が上記の従来α型Ａｌ2Ｏ3層に比して相対的すぐれた高温硬さを具備することから、特に高速切削条件で切削加工を行っても、上記の従来被覆サーメット工具に比して、硬質被覆層が一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) Accordingly, in the hard coating layer, the upper α-type Al 2 O 3 layer of the upper layer having the upper and lower two-layer structure is measured in the range of 75.00 to 88.75 degrees as measured by the surface polishing surface. An inclination angle distribution graph in which the highest peak is present in the inclination angle section and the sum of the frequencies existing in the range of 75 to 90
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、工具基体の表面に、
（ａ）下部層が、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態で、結晶構造がα型にして、平均層厚が３〜１５μｍの上位層と、結晶構造がκ型にして、平均層厚が１〜３μｍの下位層で構成された上下２層構造のＡｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を化学蒸着形成してなる被覆サーメット工具において、
上記Ａｌ2Ｏ3層の上位層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、７５．００〜８８．７５度の範囲内の傾斜角区分に最高ピークが存在すると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０〜７８％の割合を占める傾斜角度数分布グラフを示す改質α型Ａｌ2Ｏ3層、
で構成してなる、硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する被覆サーメット工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the tool base,
(A) a Ti compound layer in which the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and has an overall average layer thickness of 3 to 20 μm,
(B) With the upper layer being chemically vapor-deposited, the crystal structure is α-type and the upper layer has an average layer thickness of 3 to 15 μm, and the crystal structure is κ-type and the lower layer has an average layer thickness of 1 to 3 μm An Al 2 O 3 layer with two upper and lower layers composed of layers,
In the coated cermet tool formed by chemical vapor deposition of the hard coating layer composed of (a) and (b) above,
The upper layer of the Al 2 O 3 layer is irradiated with an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope, and electron backscatter diffraction Using an imaging device, the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the surface-polished surface in a predetermined region at an interval of 0.1 μm / step. An inclination angle distribution graph obtained by classifying the measurement inclination angles within the range of 45 to 90 degrees for each pitch of 0.25 degrees and counting the frequencies existing in each of the measurement inclination angles. , The highest peak exists in the inclination angle section within the range of 75.00 to 88.75 degrees, and the total of the frequencies existing within the range of 75 to 90 degrees is 50 of the entire degrees in the inclination angle distribution graph. the inclination angle of minutes in a proportion of to 78% Reforming α type the Al 2 O 3 layer showing a graph,
The hard coating layer is characterized by a coated cermet tool that exhibits excellent wear resistance in high-speed cutting.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層に関し、上記の通りに数値限定した理由を説明する。
（ａ）Ｔｉ化合物層（下部層）
Ｔｉ化合物層は、基本的には上部層であるα型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようにするほか、工具基体と蒸着α型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
The reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Ti compound layer (lower layer)
The Ti compound layer basically exists as a lower layer of the α-type Al 2 O 3 layer which is the upper layer, and in addition to making the hard coating layer have high temperature strength by its excellent high temperature strength, The tool substrate and the deposited α-type Al 2 O 3 layer are firmly adhered to each other, and thus have an effect of improving the adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 3 μm, On the other hand, when the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation particularly in high-speed cutting with high heat generation, which causes uneven wear. The average layer thickness was determined to be 3-20 μm.
（ｂ）Ａｌ2Ｏ3層（上部層）
（ｂ−１）κ型Ａｌ2Ｏ3層（下位層）
κ型Ａｌ2Ｏ3層には、α型Ａｌ2Ｏ3層に比して、相対的に高温強度にすぐれるが、Ａｌ2Ｏ3層が本来具備する高温硬さおよび耐熱性に劣る性質があり、したがって、硬質被覆層の上部層の高温強度を、前記上部層が前記α型Ａｌ2Ｏ3層だけで構成される場合に比して向上させる作用があるが、その平均層厚が１μｍ未満では所望の高温強度向上効果を満足に確保することができず、一方、その平均層厚が３μｍを越えると、高速切削加工では耐摩耗性に低下傾向が現れるようになることから、その平均層厚を１〜３μｍと定めた。
（ｂ−２）改質α型Ａｌ2Ｏ3層（上位層）
上記の通り、改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、前記反応雰囲気圧力を２０〜３０ｋｐａとすると、最高ピークが、７５．００〜８８．７５度の範囲内の傾斜角区分に現れると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０〜７８％の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力が前記範囲から低い方に外れても、また高い方に外れても、測定傾斜角の最高ピーク位置はそれぞれ７５〜９０度の範囲から外れてしまい、このような場合には所望のすぐれた高温硬さの向上効果を確保することができないものである。
また、その平均層厚が３μｍ未満では、耐摩耗性向上効果を十分に確保することができず、一方、その平均層厚が１５μｍを越えると、チッピングが発生し易くなることから、その平均層厚を３〜１５μｍと定めた。
(B) Al 2 O 3 layer (upper layer)
(B-1) κ-type Al 2 O 3 layer (lower layer)
The κ-type Al 2 O 3 layer has relatively high temperature strength compared to the α-type Al 2 O 3 layer, but is inferior in the high-temperature hardness and heat resistance inherent to the Al 2 O 3 layer. Therefore, there is an effect of improving the high temperature strength of the upper layer of the hard coating layer as compared with the case where the upper layer is composed of only the α-type Al 2 O 3 layer, but the average layer thickness is If it is less than 1 μm, the desired high-temperature strength improvement effect cannot be ensured satisfactorily. On the other hand, if the average layer thickness exceeds 3 μm, the wear resistance tends to decrease in high-speed cutting. The average layer thickness was set to 1 to 3 μm.
(B-2) Modified α-type Al 2 O 3 layer (upper layer)
As described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the modified α-type Al 2 O 3 layer is changed by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. When the reaction atmosphere pressure is 20 to 30 kpa, the highest peak appears in the inclination angle section in the range of 75.00 to 88.75 degrees, and the total frequency existing in the range of 75 to 90 degrees is An inclination angle number distribution graph occupying a ratio of 50 to 78% of the entire frequency in the inclination angle number distribution graph is shown. Therefore, even when the reaction atmosphere pressure is out of the range, it is high. However, the maximum peak position of the measured tilt angle is out of the range of 75 to 90 degrees. In such a case, the desired excellent high temperature hardness improvement effect is confirmed. It shall not be you.
Further, if the average layer thickness is less than 3 μm, the effect of improving wear resistance cannot be sufficiently ensured. On the other hand, if the average layer thickness exceeds 15 μm, chipping tends to occur. The thickness was determined to be 3-15 μm.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明の被覆サーメット工具は、各種の鋼や鋳鉄などの切削加工を高速で行っても、硬質被覆層の上部層を構成する上下２層構造のうちの上位層が一段と高温硬さの向上した改質α型Ａｌ2Ｏ3層からなるので、すぐれた耐摩耗性を発揮し、使用寿命の一層の延命化を可能とするものである。 In the coated cermet tool of the present invention, even when various types of steel and cast iron are cut at a high speed, the upper layer of the upper and lower two-layer structures constituting the upper layer of the hard coating layer is further improved in high-temperature hardness. Since it is composed of a modified α-type Al 2 O 3 layer, it exhibits excellent wear resistance and enables further extension of the service life.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder each having an average particle diameter of 1 to 3 μm are prepared. The raw material powder is blended in the blending composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact is vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge is subjected to a honing process of R: 0.07 mm. Thus, tool bases A to F made of a WC-based cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４，５に示される目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、
ついで、同じく表３に示される条件にて、表４，５に示される目標層厚でκ型Ａｌ2Ｏ3層を上部層の下位層として蒸着形成し、
つぎに、反応ガス組成：容量％で、ＡｌＣｌ3：２．２％、ＣＯ2：５％、ＨＣｌ：２％、Ｈ2Ｓ：０．１５％、Ｈ2：残り、
反応雰囲気温度：８５０℃、
反応雰囲気圧力：２０〜３０ｋＰａの範囲内の所定の圧力、
の低温高圧条件で表４，５に示される目標層厚で、同じく上部層の上位層として改質α型Ａｌ2Ｏ3層を蒸着形成することにより本発明被覆サーメット工具１〜１２をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically grown crystal structure described in JP-A No. 6-8010, and other than that, a normal granular crystal structure is shown. The Ti compound layer having the target layer thickness shown in Tables 4 and 5 is deposited as a lower layer of the hard coating layer under the conditions shown in FIG.
Next, under the same conditions as shown in Table 3, a κ-type Al 2 O 3 layer is deposited as a lower layer of the upper layer with the target layer thickness shown in Tables 4 and 5,
Next, reaction gas composition: volume%, AlCl 3 : 2.2%, CO 2 : 5%, HCl: 2%, H 2 S: 0.15%, H 2 : remaining,
Reaction atmosphere temperature: 850 ° C.
Reaction atmosphere pressure: a predetermined pressure in the range of 20-30 kPa,
The coated cermet tools 1 to 12 of the present invention are manufactured by vapor-depositing a modified α-type Al 2 O 3 layer as an upper layer of the upper layer at the target layer thicknesses shown in Tables 4 and 5 under the low-temperature and high-pressure conditions. did.
また、比較の目的で、硬質被覆層の上部層の上位層を、表２に従来α型Ａｌ2Ｏ3層の形成条件として示される条件で、表６，７に示される通りの目標層厚で形成する以外は、上記の本発明被覆サーメット工具１〜１２と同一の条件で従来被覆サーメット工具１〜１２をそれぞれ製造した。 For comparison purposes, the upper layer of the upper layer of the hard coating layer is the target layer thickness as shown in Tables 6 and 7 under the conditions shown in Table 2 as the conditions for forming the conventional α-type Al 2 O 3 layer. The conventional coated cermet tools 1 to 12 were respectively produced under the same conditions as those of the present invention coated cermet tools 1 to 12 except that the above-described coated cermet tools 1 to 12 were formed.
ついで、上記の本発明被覆サーメット工具１〜１２と従来被覆サーメット工具１〜１２の硬質被覆層の上部層の上位層を構成する改質α型Ａｌ2Ｏ3層および従来α型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の各種のα型Ａｌ2Ｏ3層（上位層）について、表面研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, the modified α-type Al 2 O 3 layer and the conventional α-type Al 2 O 3 constituting the upper layer of the upper layer of the hard coating layer of the above-described coated cermet tools 1 to 12 of the present invention and the conventional coated cermet tools 1 to 12. About the layer, the inclination angle number distribution graph was each created using the field emission scanning electron microscope.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the various α-type Al 2 O 3 layers (upper layers) are surface polished surfaces, An electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees is applied to the polished surface with an irradiation current of 1 nA, and each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface is irradiated with electrons. Using a backscatter diffraction image apparatus, a normal of the (0001) plane which is the crystal plane of the crystal grain is made with respect to the normal of the polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step. Inclination angle is measured, and based on the measurement result, the measurement inclination angle within the range of 45 to 90 degrees is divided into 0.25 degree pitches among the measurement inclination angles, and exists in each division. Created by counting the frequency to do.
この結果得られた各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、表４〜７にそれぞれ示される通り、本発明被覆サーメット工具１〜１２の改質α型Ａｌ2Ｏ3層（上位層）は、（０００１）面の測定傾斜角の分布が、７５．００〜８８．７５度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示すのに対して、従来被覆サーメット工具１〜１２の従来α型Ａｌ2Ｏ3層（上位層）は、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示すものであった。
また表４〜７には、上記の各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、７５〜９０度の範囲内の傾斜角区分に存在する全傾斜角度数の傾斜角度数分布グラフ全体に占める割合を示した。
なお、図２は、本発明被覆サーメット工具３の改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフ、図３は従来被覆サーメット工具９の従来α型Ａｌ2Ｏ3層の４５〜９０度の傾斜角区分を示す傾斜角度数分布グラフである。
As shown in Tables 4 to 7 in the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers obtained as a result, the modified α-type Al 2 O 3 layers of the coated cermet tools 1 to 12 according to the present invention are shown. The (upper layer) shows a gradient angle distribution graph in which the distribution of the measured tilt angle of the (0001) plane shows the highest peak in the tilt angle section within the range of 75.00 to 88.75 degrees. The conventional α-type Al 2 O 3 layer (upper layer) of the conventional coated cermet tools 1 to 12 is unbiased within the range of 45 to 90 degrees of the measured inclination angle of the (0001) plane, and has no highest peak. An inclination angle number distribution graph was shown.
Tables 4 to 7 show the inclination angle number distributions of all inclination angle numbers existing in the inclination angle sections within the range of 75 to 90 degrees in the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers. The percentage of the entire graph is shown.
2 is an inclination angle number distribution graph of the modified α-type Al 2 O 3 layer of the coated cermet tool 3 of the present invention, and FIG. 3 is a graph of 45 to 90 of the conventional α-type Al 2 O 3 layer of the conventional coated
また、この結果得られた本発明被覆サーメット工具１〜１２および従来被覆サーメット工具１〜１２の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, when the thickness of the resulting present invention coated cermet tools 1 to 12 and the hard coating layer of the layers constituting the conventional coated cermet tool 1-12 was measured using a scanning electron microscope (longitudinal sectional measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜１２および従来被覆サーメット工具１〜１２の各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＮＣＭ４３９の長さ方向等間隔４本縦溝入り丸棒、
切削速度：３５０ｍ／ｍｉｎ．、
切り込み：１ｍｍ、
送り：０．２ｍｍ／ｒｅｖ．、
切削時間：４分、
の条件（切削条件Ａという）での合金鋼の乾式断続高速切削試験（通常の切削速度は１８０ｍ／ｍｉｎ．）、
被削材：ＪＩＳ・ＦＣ３００の丸棒、
切削速度：４００ｍ／ｍｉｎ．、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：８分、
の条件（切削条件Ｂという）での鋳鉄の乾式連続高速切削試験（通常の切削速度は３００ｍ／ｍｉｎ．）、さらに、
被削材：ＪＩＳ・Ｓ３５Ｃの丸棒、
切削速度：３３０ｍ／ｍｉｎ．、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：５分、
の条件（切削条件Ｃという）での炭素鋼の乾式連続高速切削試験（通常の切削速度は２５０ｍ／ｍｉｎ．）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表８に示した。
Next, for the various coated cermet tools of the present invention coated cermet tools 1 to 12 and the conventional coated cermet tools 1 to 12 , all of which are screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SNCM439 round direction bar with 4 equal intervals in the length direction,
Cutting speed: 350 m / min. ,
Cutting depth: 1mm,
Feed: 0.2 mm / rev. ,
Cutting time: 4 minutes
Dry interrupted high-speed cutting test (normal cutting speed is 180 m / min.) Of alloy steel under the following conditions (referred to as cutting condition A),
Work material: JIS / FC300 round bar,
Cutting speed: 400 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 8 minutes
A dry continuous high-speed cutting test (normal cutting speed is 300 m / min.) Of cast iron under the following conditions (referred to as cutting conditions B),
Work material: JIS / S35C round bar,
Cutting speed: 330 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 5 minutes
The dry continuous high-speed cutting test (normal cutting speed is 250 m / min.) Of carbon steel under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 8.
表４〜８に示される結果から、本発明被覆サーメット工具１〜１２は、いずれも硬質被覆層の上下２層構造を有する上部層の上位層が、（０００１）面の傾斜角度数分布グラフで７５．００〜８８．７５度の範囲内の傾斜角区分で最高ピークを示し、一段と高温硬さの向上した改質α型Ａｌ2Ｏ3層からなることから、鋼や鋳鉄の切削加工を、高速切削条件で行っても、すぐれた耐摩耗性を示すのに対して、硬質被覆層の上位層が、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来α型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具１〜１２においては、いずれも前記従来α型Ａｌ2Ｏ3層の高温硬さ不足が原因で、高速切削条件では硬質被覆層の摩耗進行が速く、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 8, in the coated cermet tools 1 to 12 of the present invention, the upper layer having an upper and lower two-layer structure of the hard coating layer is an inclination angle number distribution graph of the (0001) plane. Because it consists of a modified α-type Al 2 O 3 layer that shows the highest peak in the inclination angle range within the range of 75.00 to 88.75 degrees and is further improved in high-temperature hardness, cutting of steel and cast iron, Even when performed under high-speed cutting conditions, excellent wear resistance is exhibited, whereas the upper layer of the hard coating layer is unbiased in the range of the measured inclination angle of the (0001) plane within the range of 45 to 90 degrees. In the conventional coated cermet tools 1 to 12 composed of the conventional α-type Al 2 O 3 layer showing the inclination angle number distribution graph where the highest peak does not exist, the high-temperature hardness of the conventional α-type Al 2 O 3 layer Due to the shortage, wear of the hard coating layer progresses under high-speed cutting conditions Fast, it is clear that lead to a relatively short time service life.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に高速切削でも、すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention exhibits excellent wear resistance not only for continuous cutting and interrupted cutting under normal conditions such as various steels and cast iron, but also for high-speed cutting, and for a long time. Since it exhibits excellent cutting performance, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of cutting, and the cost reduction.
Claims (1)
（ａ）下部層が、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態で、結晶構造がα型にして、平均層厚が３〜１５μｍの上位層と、結晶構造がκ型にして、平均層厚が１〜３μｍの下位層で構成された上下２層構造の酸化アルミニウム層、
以上（ａ）および（ｂ）で構成された硬質被覆層を化学蒸着形成してなる表面被覆サーメット製切削工具において、
上記酸化アルミニウム層の上位層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、７５．００〜８８．７５度の範囲内の傾斜角区分に最高ピークが存在すると共に、７５〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の５０〜７８％の割合を占める傾斜角度数分布グラフを示す改質α型酸化アルミニウム層、
で構成したことを特徴とする硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer, and has an overall average of 3 to 20 μm. A Ti compound layer having a layer thickness,
(B) With the upper layer being chemically vapor-deposited, the crystal structure is α-type and the upper layer has an average layer thickness of 3 to 15 μm, and the crystal structure is κ-type and the lower layer has an average layer thickness of 1 to 3 μm An aluminum oxide layer having a two-layer structure composed of upper and lower layers,
In the surface-coated cermet cutting tool formed by chemical vapor deposition of the hard coating layer composed of (a) and (b) above,
The upper layer of the aluminum oxide layer is irradiated with an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope, and an electron backscatter diffraction image apparatus And measuring a tilt angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface at an interval of 0.1 μm / step in a predetermined region , In the measurement inclination angle, the measurement inclination angle in the range of 45 to 90 degrees is divided for each pitch of 0.25 degrees, and the inclination angle number distribution graph in which the frequencies existing in each division are aggregated, The highest peak exists in the inclination angle section in the range of 75.00 to 88.75 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees is 50 to 78 of the entire degrees in the inclination angle frequency distribution graph. inclination angle, which accounts for the percentage of Modified α-type aluminum oxide layer showing a frequency distribution graph,
A surface-coated cermet cutting tool that has a hard coating layer that exhibits excellent wear resistance in high-speed cutting.
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| SE502174C2 (en) * | 1993-12-23 | 1995-09-04 | Sandvik Ab | Methods and articles when coating a cutting tool with an alumina layer |
| SE522736C2 (en) * | 2001-02-16 | 2004-03-02 | Sandvik Ab | Aluminum-coated cutting tool and method for making the same |
| JP2004291162A (en) * | 2003-03-27 | 2004-10-21 | Kyocera Corp | Surface coated cutting tool |
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