JP4815872B2 - Paste applicator - Google Patents

Paste applicator Download PDF

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Publication number
JP4815872B2
JP4815872B2 JP2005147500A JP2005147500A JP4815872B2 JP 4815872 B2 JP4815872 B2 JP 4815872B2 JP 2005147500 A JP2005147500 A JP 2005147500A JP 2005147500 A JP2005147500 A JP 2005147500A JP 4815872 B2 JP4815872 B2 JP 4815872B2
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power
paste
portal frame
axis
substrate
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JP2006320855A5 (en
JP2006320855A (en
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洋平 川口
幸宏 川隅
茂 石田
伸也 山間
孝夫 村山
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Hitachi Plant Technologies Ltd
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Hitachi Plant Technologies Ltd
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Priority to JP2005147500A priority Critical patent/JP4815872B2/en
Priority to KR1020060045057A priority patent/KR100795135B1/en
Priority to TW095117877A priority patent/TW200709858A/en
Priority to CNB2006100824473A priority patent/CN100457291C/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)

Description

本発明は、フラットパネルやプリント基板および半導体組立の製造過程で、基板上に所望形状のペーストパタ−ンを塗布するペースト塗布機に関する。   The present invention relates to a paste applicator for applying a paste pattern having a desired shape on a substrate in a manufacturing process of a flat panel, a printed circuit board, and a semiconductor assembly.

従来の技術として、特許文献１に示すように、ガラス基板を固定テーブル上に載置し、ガラス基板の主面に対してＸ軸方向に移動可能な門型フレームに取り付けられたＹＺ軸方向に移動可能な塗布ヘッドのノズル吐出口に対向するようにし、ペースト収納筒に充填したペーストを該吐出口から該基板上に吐出させながら該基板と該ノズルとの相対位置関係を変化させることにより、該基板上に所望形状のペーストパターンを塗布している。この特許文献１では、ガラス基板サイズの大型化が進んでおり、塗布ヘッドの塗布範囲も拡大、塗布ヘッドを複数設ける構成としている。これにより、固定外部制御盤から門型フレームに接続される動力線、信号線などの電気配線や、空圧配管が増加し、門型フレームに追従するケーブル本数も増加している。 As a conventional technique, as shown in Patent Document 1, a glass substrate is placed on a fixed table and mounted in a YZ axis direction attached to a portal frame that can move in the X axis direction with respect to the main surface of the glass substrate By facing the nozzle discharge port of the movable coating head and changing the relative positional relationship between the substrate and the nozzle while discharging the paste filled in the paste storage cylinder onto the substrate from the discharge port, A paste pattern having a desired shape is applied on the substrate. In Patent Document 1, the size of the glass substrate is increasing, the coating range of the coating head is expanded, and a plurality of coating heads are provided. As a result, electric wiring such as power lines and signal lines connected from the fixed external control panel to the portal frame and pneumatic piping are increased, and the number of cables following the portal frame is also increased.

また、特許文献２に示すように 電力配線を非接触にして搬送車を移動させるために給電区間を複数に分割し、その連結部を搬送車に搭載してある受電コイルが移送する際に、隣接する給電区間の給電位相を同一位相で給電するようにすることが開示されている。   In addition, as shown in Patent Document 2, when the power receiving section is divided into a plurality of parts in order to move the transport vehicle without contacting the power wiring, and when the power receiving coil mounted on the transport vehicle transfers the connecting portion, It is disclosed that the feeding phases of adjacent feeding sections are fed with the same phase.

特開２００２−３４６４５２号公報JP 2002-346252 A 特開２００１−２１１５０１号公報JP 2001-211501 A

これにより、固定外部制御盤から門型フレームに接続される動力線、信号線などの電気配線や、空圧配管が増加し、門型フレームに追従するケーブル本数も増加する為、ケーブルの磨耗やケーブル同士のこすれによる発塵により、クリーン環境での使用には適さない状況にある。   As a result, the number of cables that follow the portal frame increases because of the increase in electrical wiring such as power lines and signal lines connected from the fixed external control panel to the portal frame, and pneumatic piping, and the number of cables following the portal frame increases. Due to dust generation by rubbing between cables, it is not suitable for use in a clean environment.

本発明の目的は、塗布ヘッド個数の増加により、外部電源や、外部制御部と門型フレームを接続するケーブルも長く、本数も多くなり、ケーブルの磨耗や、ケーブル同士のこすれによる発塵を少なくした、ペースト塗布機を提供することである。   The purpose of the present invention is to increase the number of coating heads and to increase the length and number of cables connecting the external power supply and the external control unit to the portal frame, thereby reducing dust generation due to cable wear and cable rubbing. And providing a paste applicator.

上記目的を達成するため、本発明のペースト塗布機は、架台上に設けられ一方向に往復動可能な門型フレームと、門型フレームの長手方向に移動可能な塗布ヘッドを複数設け、塗布ヘッドに設けてあるノズルの吐出口に対向するように設けられたテーブル上に基板を載置し、ペースト収納筒に充填したペーストを吐出口から基板上に吐出させながら基板とノズルとの相対位置関係を変化させることにより、基板上に所望形状のペーストパタ−ンを塗布するペースト塗布機において、門型フレームに２つの窓と窓の一方の上部を右回り、もう一方の窓の上部を左回りでそれぞれ集中して巻き付けられた２次巻き線とが設けられた受電コアを取り付け、架台側に高周波電源に接続されて直線状に受電コアの夫々の窓を往復して貫通するように給電線を配置して、２次巻き線で給電線から受電した電力を門型フレーム上の電気品に給電すると共に、門型フレームに設けた複数の塗布ヘッドのそれぞれに受電コアを設け、受電コアの２つの窓を往復して貫通するように、門型フレームに設けた受電コアの２次巻き線から門型フレームの長手方向に直線状に給電線を配置して各塗布ヘッドに電力を非接触給電で供給し、架台及び門型フレームの間と門型フレーム及び塗布ヘッドの間とでそれぞれ信号のやり取りを行う空間光通信手段を設けたことを特徴とする。これにより、ペースト塗布機において、現状では装置外部に設置されている塗布ヘッド駆動用モータドライバを塗布ヘッド内部に設置し、モータドライバへの給電を磁気結合による非接触給電方式に、モータドライバの入出力信号、各種センサ信号や位置補正画像診断用カメラからの画像信号を光無線通信することにより、可動ケーブルの本数を少なくし、ケーブルからの発塵を少なくすることができる。 In order to achieve the above object, a paste applicator according to the present invention is provided with a portal frame that is provided on a gantry and can reciprocate in one direction, and a plurality of application heads that can move in the longitudinal direction of the portal frame. Relative positional relationship between the substrate and the nozzle while placing the substrate on a table provided to face the nozzle outlet provided in the nozzle and discharging the paste filled in the paste storage cylinder onto the substrate from the outlet In a paste applicator that applies a paste pattern of the desired shape on the substrate, the two windows and one upper part of the window are turned clockwise and the upper part of the other window is turned counterclockwise. Attach a power receiving core provided with a secondary winding wound in a concentrated manner in each, and connect to a high-frequency power source on the gantry side to feed back and forth through each window of the power receiving core in a straight line The power received from the feeder line by the secondary winding is fed to the electrical product on the gate-type frame, and a power-receiving core is provided for each of the plurality of coating heads provided on the gate-type frame. A feed line is arranged in a straight line from the secondary winding of the power receiving core provided in the portal frame to the longitudinal direction of the portal frame so as to reciprocate through the two windows, and power is not contacted to each coating head Spatial optical communication means is provided that supplies power and exchanges signals between the gantry and the portal frame and between the portal frame and the coating head. Thus, in the paste coating machine, set up a coating head drive motor driver installed in the current in the device external to the coating head, the non-contact power supply system the power supply to the motor driver according to the magnetic coupling, the input of the motor driver By optically wirelessly communicating output signals, various sensor signals, and image signals from the position correction image diagnostic camera, the number of movable cables can be reduced and dust generation from the cables can be reduced.

本発明のペースト塗布機によれば、基板主面にペーストパターンを塗布描画する際に、門型フレームの移動に追従するケーブル本数を少なくできるため、ケーブル同士のこすれや摩耗が少なく、低発塵にすることができる。また、ケーブルを削減できることにより、門型フレームや塗布ヘッド等の移動体に加わる負荷を低減できるために、塗布ヘッドの位置精度が向上して高精度に塗布を行うことができる。更に、塗布ヘッド、門型フレーム、各ユニット毎に配線作業を完結できると共に、ケーブル長も短くできるため、配線作業工数を削減することができる。 According to the paste applicator of the present invention, when applying draw a paste pattern on a substrate main surface, it is possible to reduce the number of cables to follow the movement of the portal frame, by this between the cable and wear is small, low origination it can be in the dust. Further, the ability to reduce the cable, in order to be able to reduce the load applied to the moving body such as a portal frame or coating head, Ru can be performed applying improved positional accuracy of the coating head is a high precision. Furthermore, the coating fabric head, portal frames, can complete the wiring work for each unit Rutotomoni, since it cable length is short, Ru can reduce wiring man-hours.

本発明は、塗布ヘッド部を駆動するモータへの動力供給や、センサ信号の為に門型フレームに接続される給電線や信号配線を省配線化する為に、モータドライバをガントリ上に設置し、該ドライバへの給電方法を門型移動方向に敷設した給電線と門型フレームに取り付けられた受電ピックアップからなる非接触給電方式とし、主制御部からドライバへの信号線を光無線通信方式とすることにより、門型フレームに追従する可動ケーブルを減らし、低発塵、配線作業工数の低減を実現する方法について、以下の実施例にて詳細に説明する。   In the present invention, a motor driver is installed on the gantry in order to reduce the power supply and signal wiring connected to the portal frame for power supply to the motor that drives the coating head section and sensor signals. The power supply method to the driver is a non-contact power supply method consisting of a power supply line laid in the portal movement direction and a power receiving pickup attached to the portal frame, and a signal line from the main control unit to the driver is an optical wireless communication system A method for reducing the movable cable following the portal frame, realizing low dust generation, and reducing the man-hour for wiring work will be described in detail in the following embodiments.

以下、本発明の実施例について図面を用いて説明する。
図１は本発明を適用したペースト塗布機の斜視図である。門型フレームの伸延方向に対して垂直な方向をＸ軸、門型フレームの伸延方向をＹ軸、上下方向をＺ軸とする。門型フレームは基本的にＸ軸方向に直線的に往復移動するものであり、塗布ヘッドはＹ軸方向に往復移動するものである。装置の架台１上には、２つの門型フレーム２Ａ、２Ｂが設けてある。本図において、右側の門型フレーム２Ａと左側の門型フレーム２Ｂで同一数字のものは同一の分品を表しているため、添え字を省略して説明する場合がある。 Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view of a paste applicator to which the present invention is applied. The direction perpendicular to the extending direction of the portal frame is defined as the X axis, the extending direction of the portal frame is defined as the Y axis, and the vertical direction is defined as the Z axis. The portal frame basically reciprocates linearly in the X-axis direction, and the coating head reciprocates in the Y-axis direction. Two portal frames 2A and 2B are provided on the gantry 1 of the apparatus . In the drawing, the same numbers in the right-side portal frame 2A and the left-side portal frame 2B represent the same item, so the description may be omitted.

２つの門型フレーム２は、図示していないＸ軸リニアモータを駆動することによりそれぞれＸ軸方向に移動可能としてある。門型フレームの上部には門型フレームを覆うカバー３が設けてある。門型フレーム２には一次受電コア６が設けてあり、このコアを貫通するように一次給電線５が架台１に沿ってＸ軸方向に敷設されている。この一次給電線５は、高周波電源４に接続されており、この電源より高周波電圧が給電される。なお、一次受電コア６には、二次側巻線と門型フレーム内への給電線を兼ねた二次給電線７がそれぞれ設けてある。二次給電線７Ａは一次受電コア６Ａに巻線され、門型フレーム２Ａのカバー３Ａ上にＹ軸方向に敷設され、二次給電線７Ｂは一次受電コア６Ｂに巻線され、門型フレーム２Ｂのカバー３Ｂ上にＹ軸方向に敷設される。 The two portal frames 2 can be moved in the X-axis direction by driving an X-axis linear motor (not shown). A cover 3 for covering the portal frame is provided on the upper portion of the portal frame. The portal frame 2 is provided with a primary power receiving core 6 , and a primary power supply line 5 is laid in the X-axis direction along the gantry 1 so as to penetrate the core. The primary power supply line 5 is connected to a high frequency power supply 4, and a high frequency voltage is supplied from the power supply. The primary power receiving core 6 is provided with a secondary power supply line 7 that also serves as a secondary side winding and a power supply line to the portal frame. The secondary feed line 7A is winding the primary power receiving cores 6A, is laid in the Y-axis direction on the cover 3A of the portal frames 2A, the secondary feed line 7B are winding the primary power receiving cores 6B, portal frame 2B Is laid in the Y-axis direction on the cover 3B .

門型フレーム２Ａには４つの塗布ヘッド８Ａ〜８Ｄが支持され、門型フレーム５Ｂにも同じく４つの塗布ヘッド８Ｅ〜８Ｈが支持されている。各塗布ヘッドは後に詳述するが、Ｙ軸リニアモータを駆動することによりＹ軸方向に移動する。また塗布ヘッドに設けてある塗布ノズル等のペースト収納筒を含む一部分はＺ軸サーボモータにて、Ｚ軸方向に可動する。また、各ヘッドには二次受電コイル９が設けてあり、この受電した電源でＺ軸サーボモータ等を駆動する。   Four coating heads 8A to 8D are supported on the portal frame 2A, and four coating heads 8E to 8H are also supported on the portal frame 5B. As will be described in detail later, each coating head moves in the Y-axis direction by driving a Y-axis linear motor. Further, a part including a paste storage cylinder such as a coating nozzle provided in the coating head is moved in the Z-axis direction by a Z-axis servo motor. Each head is provided with a secondary power receiving coil 9, and a Z-axis servo motor or the like is driven by the received power.

主制御部１０は各門型フレーム２、各塗布ヘッド８の位置制御や、各種センサ信号、画像信号の処理、及び電源のＯＮ・ＯＦＦを制御を行う。図示していないが、主制御部１０の内部には、マイクロコンピュータとＲＡＭを備えている。   The main control unit 10 controls the position of each portal frame 2 and each coating head 8, processes various sensor signals and image signals, and controls power ON / OFF. Although not shown, the main control unit 10 includes a microcomputer and a RAM.

門型フレーム２と架台１との間には制御信号等の送信、受信を行う空間光通信機１１，１２が設けてある。この空間光通信機は、Ｘ軸方向に光を発信し受信する構成としてあり、架台側に設けた光通信手段１１Ａと１１Ｂと門型フレーム側に設けた光通信手段１２Ａと１２Ｂ間で通信を行う。また、この空間光通信機は、図に示すように架台側の光通信手段１１Ｂを下に、光通信手段１１Ａが上に位置するように上下に配置してある。すなわち、門型フレーム２Ｂ側の光通信手段が下側に、門型フレーム２Ａ側の光通信手段を上側に位置するように配置することで、同方向に配置しても光を遮断しないようにしてある。また、各組毎に変調周波数を変えており、互いに干渉が生じないようにしてある。   Spatial optical communication devices 11 and 12 for transmitting and receiving control signals and the like are provided between the portal frame 2 and the gantry 1. This spatial light communication device is configured to transmit and receive light in the X-axis direction, and communicates between the optical communication means 11A and 11B provided on the gantry side and the optical communication means 12A and 12B provided on the portal frame side. Do. In addition, as shown in the figure, this spatial optical communication device is arranged vertically so that the optical communication means 11B on the gantry side is located below and the optical communication means 11A is located above. That is, the optical communication means on the portal frame 2B side is arranged on the lower side and the optical communication means on the portal frame 2A side is arranged on the upper side so that the light is not blocked even if arranged in the same direction. It is. Also, the modulation frequency is changed for each group so that interference does not occur.

なお、光通信手段１１Ａと１１Ｂ及び光通信手段１２Ａと１２Ｂとの干渉を確実に避けるためには、光通信手段１１Ａを現状の位置にして、光通信手段１１Ｂを反対側の端部に設け、門型フレーム２Ｂに設ける光通信手段１２Ｂが門型フレーム２Ａの光通信手段１１Ｂと逆向きに配置すればよい。   In order to reliably avoid the interference between the optical communication units 11A and 11B and the optical communication units 12A and 12B, the optical communication unit 11A is provided at the current position, and the optical communication unit 11B is provided at the opposite end, What is necessary is just to arrange | position the optical communication means 12B provided in the portal frame 2B in the opposite direction to the optical communication means 11B of the portal frame 2A.

さらに、門型フレームと塗布ヘッド間にも空間光通信機１３，１４が塗布ヘッド毎に信号のやり取りができるように塗布ヘッドの数だけ設けてある。光通信手段１３Ａ〜１３Ｄは門型フレーム２Ａに、光通信手段１３Ｅ〜１３Ｈは門型フレーム２Ｂに設置されている。また、光通信手段１４Ａ〜Ｈは各塗布ヘッド８Ａ〜８Ｈに門型フレーム２側の光通信手段１３Ａ〜１３Ｈに対向して設置されている。光通信手段１３Ａ〜１３Ｈはそれぞれ対向する光通信手段１４Ａ〜１４Ｈと通信を行い、通信方向はＹ軸方向である。空間光通信機１３と１４間の通信においても各組毎に変調周波数を変えてある為、干渉は生じない。 Further, the space optical communication devices 13 and 14 are provided between the portal frame and the coating head as many as the number of coating heads so that signals can be exchanged for each coating head. The optical communication units 13A to 13D are installed in the portal frame 2A , and the optical communication units 13E to 13H are installed in the portal frame 2B. The optical communication means 14A to H are installed on the coating heads 8A to 8H so as to face the optical communication means 13A to 13H on the portal frame 2 side. The optical communication units 13A to 13H communicate with the opposing optical communication units 14A to 14H , respectively, and the communication direction is the Y-axis direction. Even in the communication between the spatial light communication devices 13 and 14, since the modulation frequency is changed for each group, no interference occurs.

すなわち、本実施例では架台１と門型フレーム２との間、門型フレーム２と塗布ヘッド８の間の給電に２段に非接触給電方式を採用すると共に、信号のやり取りも２段の空間光伝送方式を採用したものである。 That is, in this embodiment, a non-contact power feeding method is adopted for feeding power between the gantry 1 and the portal frame 2 and between the portal frame 2 and the coating head 8 , and signal exchange is also performed in a two-stage space. An optical transmission system is adopted.

基板１６は架台１上に設けた移動台（図示せず）上に設けた基板保持機構１５によって、吸着保持する構成としてある。この基板保持機構１５は図示していないθ軸サーボモータを回転駆動することによってＸ、Ｙ平面内での傾きを補正できる構造になっている。なお基板の移動台は基板１６を門型フレームの間に設置するために設けてあり、本図ではＸ軸方向に移動できるようにしてあるが、Ｙ軸方向としても良い。   The substrate 16 is configured to be sucked and held by a substrate holding mechanism 15 provided on a moving table (not shown) provided on the gantry 1. The substrate holding mechanism 15 has a structure capable of correcting the inclination in the X and Y planes by rotationally driving a θ-axis servo motor (not shown). In addition, although the board | substrate movement stand is provided in order to install the board | substrate 16 between portal frames, and it can move to the X-axis direction in this figure, it is good also as a Y-axis direction.

図２は図１における塗布ヘッドの部分を示す図である。図２（ａ）はＹ軸方向から見た側面図であり、図２（ｂ）は塗布ヘッド内部系統図である。煩雑を避けるために（ａ）においては機器間のケーブルを図示していない。図２は代表例として、門型フレーム２Ａの１つの塗布ヘッドについて示してあるが、他の塗布ヘッドについても同様の構成である。   FIG. 2 is a view showing a portion of the coating head in FIG. FIG. 2A is a side view seen from the Y-axis direction, and FIG. 2B is an internal system diagram of the coating head. In order to avoid complications, the cable between the devices is not shown in FIG. FIG. 2 shows one coating head of the portal frame 2A as a representative example, but the other coating heads have the same configuration.

図２（ａ）において、門型フレーム２Ａの上面にはマグネット２ａ１が設けてあり、門型フレーム２Ａの一方の側面にはリニアスケール２ａ２が設けてある。また、門型フレーム２ＡにはＹ軸用リミットセンサ２ａ３が設けてある。さらに、門型フレーム２Ａには、他方の側面に１箇所、上面２箇所にマグネット２ａ１を挟む形でリニアガイド２ａ４が設けてある。   In FIG. 2A, a magnet 2a1 is provided on the upper surface of the portal frame 2A, and a linear scale 2a2 is provided on one side surface of the portal frame 2A. The portal frame 2A is provided with a Y-axis limit sensor 2a3. Further, the portal frame 2A is provided with a linear guide 2a4 in such a manner that the magnet 2a1 is sandwiched between one location on the other side and two locations on the top surface.

塗布ヘッド８Ａには、カバー３Ａを挟む形で下面基台８ａ８と上面基台８ａ９が設けてあり上面基台と下面基台とはノズル支持部材８ａで連結してある。上面基台８ａ９上には、二次受電コイル９Ａが設けてある。 The coating head 8A is provided with a lower surface base 8a8 and an upper surface base 8a9 so as to sandwich the cover 3A, and the upper surface base and the lower surface base are connected by a nozzle support member 8a . A secondary power receiving coil 9A is provided on the upper surface base 8a9.

下面基台８ａ８の門型フレームに面する面にはリニアガイド２ａ４に沿って移動できるようにガイドが設けてある。また、下面基台８ａ８の門型フレーム２Ａの上面に設けたマグネット２ａ１に対向するようにＹ軸リニアモータ用電気子コイル８ａ４が設けてある。また、下面基台８ａ８の上部には、二次受電コイル９Ａから、塗布ヘッド部給電線９ａ１を通して供給される高周波電力を整流し、電圧調整を行う受電ユニット８ａ１が設けてある。さらに、下面基台８ａ８の上面側には、Ｙ軸リニアモータ用電気子コイル８ａ４へ流す電圧を制御してＹ軸方向の移動を制御するＹ軸モータドライバ８ａ２と、Ｚ軸サーボモータ８ａ５を制御するＺ軸モータドライバ８ａ３が設けてある。さらに、下面基台８ａ８の下面側には、門型フレーム２Ａ側に設けたリニアスケール２ａ２に対向する位置にＹ軸位置検出器８ａ６が設けてある。 The surface facing the portal frame of the lower surface base 8a8 is provided with a guide so as to be moved along the linear guide 2a4. Also, an Y-axis linear motor armature coil 8a4 is provided so as to face the magnet 2a1 provided on the upper surface of the portal frame 2A of the lower surface base 8a8 . In addition, a power receiving unit 8a1 that rectifies high-frequency power supplied from the secondary power receiving coil 9A through the coating head unit power supply line 9a1 and performs voltage adjustment is provided on the lower surface base 8a8. Furthermore, on the upper surface side of the lower surface base 8a8, a Y-axis motor driver 8a2 that controls the movement in the Y-axis direction by controlling the voltage applied to the Y-axis linear motor armature coil 8a4, and the Z-axis servomotor 8a5 are controlled. A Z-axis motor driver 8a3 is provided. Further, on the lower surface side of the lower surface base 8a8, a Y-axis position detector 8a6 is provided at a position facing the linear scale 2a2 provided on the portal frame 2A side.

ノズル支持部材８ａにはＺ軸ガイド８ａ１０が設けてあり、このＺ軸ガイド８ａ１０にはＺ軸テーブル８ａ１１が設けてあり、Ｚ軸サーボモータ８ａ５を駆動してＺ軸テーブルが移動される。このＺ軸テーブル８ａ１１の移動量はＺ軸位置検出器８ａ７により検出され、この検出結果はＺ軸モータドライバ８ａ３における制御に用いられる。このＺ軸テーブル８ａ１１にはペーストを吐出するノズル８ａ１３を備えたペースト収納筒８ａ１２と、基板とノズルとの間隔を測定する距離計８ａ１４と、基板の位置を検出するための位置認識用カメラ８ａ１５が設けてある。 The nozzle support member 8a is provided with a Z-axis guide 8a10. The Z-axis guide 8a10 is provided with a Z-axis table 8a11. The Z-axis servomotor 8a5 is driven to move the Z-axis table. The movement amount of the Z-axis table 8a11 is detected by the Z-axis position detector 8a7, and the detection result is used for control in the Z-axis motor driver 8a3. The Z-axis table 8a11 includes a paste storage cylinder 8a12 having a nozzle 8a13 for discharging paste, a distance meter 8a14 for measuring the distance between the substrate and the nozzle, and a position recognition camera 8a15 for detecting the position of the substrate. It is provided.

図２（ｂ）において、二次受電コイル二次側巻線兼塗布ヘッド部給電線９ａ１は、二次受電コイル９Ａで二次給電線７Ａより高周波電力を受電し、受電ユニット８ａ１に送電するためのものである。受電ユニット８ａ１からはＹ軸モータドライバ８ａ２に送電するＹ軸モータドライバ動力線９ａ２と、Ｚ軸モータドライバ８ａ３に送電するＺ軸モータドライバ動力線９ａ３が接続されている。Ｙ軸モータドライバ８ａ２からはＹ軸リニアモータ用電気子コイル８ａ４へ接続するＹ軸モータ動力線９ａ４と、Ｙ軸位置検出器８ａ６からの信号を受信するためにＹ軸リニアエンコーダ信号線１４ａ５が設けてある。Ｚ軸モータドライバ８ａ３からはＺ軸サーボモータ８ａ５に電力を供給するＺ軸モータ動力線９ａ５と、Ｚ軸サーボモータ８ａ５に設けてあるエンコーダからの信号を受信するためのＺ軸エンコーダ信号線１４ａ６が接続されている。また、受電ユニット８ａ１からは、距離計８ａ１４や位置認識用カメラ８ａ１５へ電力を供給するセンサ駆動用動力線９ａ６が接続されている。なお、空間光通信手段１４ＡからＹ軸モータドライバ８ａ２、Ｚ軸モータドライバ８ａ３、及び各検知センサに信号ケーブル１４ａ１〜１４ａ４，１４ａ７、１４ａ８が接続されている。このように配線することで、接続線の可動部が低減され、配線のこすれ等による発塵を防止している。また、信号のやり取りもそれぞれ、対応する機器毎に変調周波数を変えることで、混信をなくして確実に情報が伝わるようにしてある。 In FIG. 2B, a secondary power receiving coil secondary winding / coating head power supply line 9a1 receives high-frequency power from the secondary power supply line 7A by the secondary power receiving coil 9A and transmits the power to the power receiving unit 8a1. belongs to. From power reception unit 8a1 and Y-axis motor driver power lines 9a2 to transmission to the Y-axis motor driver 8a2, Z-axis motor driver power lines 9a3 to transmission to the Z-axis motor driver 8a3 is connected. A Y-axis motor power line 9a4 connected to the Y-axis linear motor armature coil 8a4 and a Y-axis linear encoder signal line 14a5 are provided to receive a signal from the Y-axis position detector 8a6 from the Y-axis motor driver 8a2. It is. A Z-axis motor power line 9a5 for supplying power to the Z-axis servo motor 8a5 from the Z-axis motor driver 8a3, and a Z-axis encoder signal line 14a6 for receiving a signal from an encoder provided in the Z-axis servo motor 8a5 It is connected. Further, a sensor driving power line 9a6 for supplying electric power to the distance meter 8a14 and the position recognition camera 8a15 is connected from the power receiving unit 8a1. Signal cables 14a1 to 14a4, 14a7, and 14a8 are connected from the spatial light communication means 14A to the Y-axis motor driver 8a2, the Z-axis motor driver 8a3, and the detection sensors. By wiring in this way, the movable part of the connection line is reduced and dust generation due to rubbing of the wiring or the like is prevented. In addition, in the exchange of signals, the modulation frequency is changed for each corresponding device, so that information can be reliably transmitted without interference.

図３は一次受電コイル部の詳細図である。一次受電コア６ａは直方体に二つ窓が開いた形状になっており、その窓部を一次給電線５が貫通する。一次給電線５は往復電線となっており高周波電源４より架台の端部に設けてある第１の給電線支持部材を通過し、一次受電コア６ａの片側の窓を通過し、架台逆端の第２の給電線支持部材にて折り返し、一次受電コア６ａのもう一方の窓を貫通し、第１の給電線支持部材を通過して、高周波電源４に戻るという構造になっている。二次給電線７となる二次側巻線７ａは、一次受電コア６ａの窓上部に巻きつける。図示したように片側の窓を右回りで巻き、もう一方の窓を左巻きで巻き直列に接続することにより、両窓の巻線に誘導される電圧を打ち消すこと無く二次給電線に伝達することが出来る。また、図３のように窓上部に集中して巻線することにより、窓部のスペースを広く使う事が出来、一次給電線５と一次受電コア６ａの接触の危険性を下げることが出来る。二次受電コイル９も一次受電コイルと同様の形状をしており、図３において５を７ａ、７ａを９ａ１と読み替えると二次受電コイル９を表す図となる。 FIG. 3 is a detailed view of the primary power receiving coil section. The primary power receiving core 6a has a shape in which two windows are opened in a rectangular parallelepiped, and the primary power supply line 5 passes through the window. The primary feed line 5 passes through the first feed line support member is provided at an end portion of the gantry from the high frequency power supply 4 has a reciprocating wire, passes through one side of the window of the primary power receiving core 6a, the gantry opposite end The structure is such that it is folded at the second power supply line support member, passes through the other window of the primary power receiving core 6a , passes through the first power supply line support member, and returns to the high frequency power supply 4 . The secondary side winding 7a which becomes the secondary feeder line 7 is wound around the upper part of the window of the primary power receiving core 6a . As shown in the figure, one side of the window is wound clockwise and the other window is wound counterclockwise and connected in series so that the voltage induced in the windings of both windows is transmitted to the secondary feeder without canceling. I can do it. Moreover, by concentrating and winding on the window upper part like FIG. 3, the space of a window part can be used widely and the danger of the contact of the primary feeder 5 and the primary power receiving core 6a can be reduced. The secondary power receiving coil 9 has the same shape as the primary power receiving coil. In FIG. 3, when 5 is read as 7 a and 7 a is read as 9 a 1, the secondary power receiving coil 9 is represented.

ペースト塗布機の動作について説明する。図４に本実施例での装置の動作フローチャートを示す。図４において、まず、電源を投入する（ステップ１００）。次に、塗布機の初期設定が実行される（ステップ２００）。この初期設定工程では、図１において、各軸移動用のモータ及びＺ軸テーブル８ａ１１を各モータドライバからの指令により駆動して、基板保持機構１５をθ方向に移動させて所定の基準位置に位置決めする。また、ノズル８ａ１３（図２）を、そのペースト吐出口がペースト塗布を開始する位置（即ち、ペースト塗布開始点）となるように、所定の原点位置に設定する。さらに、ペーストパターンデータや基板位置データ、ペースト吐出終了位置データの設定を行うものである。 The operation of the paste applicator will be described. FIG. 4 shows an operation flowchart of the apparatus in the present embodiment. In FIG. 4, first, power is turned on (step 100). Next, initial setting of the coating machine is executed (step 200). In this initial setting step, in FIG. 1, the motor for moving each axis and the Z-axis table 8a11 are driven by a command from each motor driver, and the substrate holding mechanism 15 is moved in the θ direction to be positioned at a predetermined reference position. To do. Further, the nozzle 8a13 (FIG. 2) is set to a predetermined origin position so that the paste discharge port becomes a position where paste application starts (that is, a paste application start point). Furthermore, paste pattern data, substrate position data, and paste discharge end position data are set.

かかるデータの入力は、図示しないキーボードから主制御部１０（図１）に入力され、主制御部から各モータドライバ等に指示されて行われ、これらのデータは主制御部１０内のマイクロコンピュータに内蔵されたＲＡＭに格納される。   Such data is input to the main control unit 10 (FIG. 1) from a keyboard (not shown), and is instructed to each motor driver by the main control unit. These data are input to the microcomputer in the main control unit 10. It is stored in the built-in RAM.

この初期設定工程（ステップ２００）が終了すると、次に、基板１６を基板吸着機構１５（図１）に搭載して保持させる（ステップ３００）。続いて、基板予備位置決め処理（ステップ４００）を行う。この処理では、基板保持機構１５に搭載された基板１６に設けてある位置決め用マークを位置認識用カメラ８ａ１５で撮影し、位置決め用マークの重心位置を画像処理で求めて基板１６のθ方向での傾きを検出し、これに応じて図示していないθ軸サーボモータを駆動し、このθ方向の傾きを補正する。以上により、基板予備位置決め処理（ステップ４００）を終了する。 When this initial setting step (step 200) is completed, the substrate 16 is then mounted and held on the substrate suction mechanism 15 (FIG. 1) (step 300). Subsequently, substrate preliminary positioning processing (step 400) is performed. In this processing, the positioning mark provided on the substrate 16 mounted on the substrate holding mechanism 15 is photographed by the position recognition camera 8a15, the center of gravity position of the positioning mark is obtained by image processing, and the θ direction of the substrate 16 in the θ direction is obtained. The inclination is detected, and a θ-axis servo motor (not shown) is driven in accordance with the inclination to correct the inclination in the θ direction. Thus, the substrate preliminary positioning process (step 400) is completed.

次に、ペーストパターン描画処理（ステップ５００）を行う。この処理では、基板の塗布開始位置にノズル８ａ１３の吐出口を位置移動させ、ノズル位置の比較・調整移動を行う。次に、Ｚ軸サーボモータ８ａ５でＺ軸テーブル８ａ１１を動作させてノズル８ａ１３の高さをペーストパターン描画高さに設定する。ノズルの初期移動距離データに基づいてノズル８ａ１３を初期移動距離分下降させる。続く動作では、基板表面高さを距離計８ａ１４により測定し、ノズル８ａ１３の先端がペーストパターンを描画する高さに設定されているか否かを確認する。そして、描画高さに設定できていない場合は、ノズル８ａ１３を微小距離下降させ、上記の基板１６の表面計測とノズル８ａ１３の微小距離下降の動作を繰返し行って、ノズル８ａ１３の先端の高さを、ペーストパターンを塗布描画する位置になるように設定する。 Next, paste pattern drawing processing (step 500) is performed. In this process, the discharge port of the nozzle 8a13 is moved to the substrate application start position, and the nozzle position is compared and adjusted. Next, the Z-axis servo motor 8a5 operates the Z-axis table 8a11 to set the height of the nozzle 8a13 to the paste pattern drawing height. The nozzle 8a13 is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the substrate surface height is measured by the distance meter 8a14, and it is confirmed whether or not the tip of the nozzle 8a13 is set to a height at which the paste pattern is drawn. Then, when not able to set the drawing height, the nozzle 8a13 is small distance downward, and repeat the operation of the small distance down the surface measurement and the nozzle 8a13 of the substrate 16, the height of the tip of the nozzle 8a13 Then, the paste pattern is set so as to be applied and drawn.

以上の処理が終了すると、次に、主制御部１０のマイクロコンピュータのＲＡＭに格納されたペーストパターンデータに基づいてＸ、Ｙ軸リニアモータが駆動される。これにより、ノズル８ａ１３のペースト吐出口が基板１６に対向した状態で、このペーストパターンデータに応じて、Ｘ、Ｙ方向に移動する。同時に、ペースト収納筒８ａ１２に設定した気圧を印加して、ノズル８ａ１３のペースト吐出口からのペーストの吐出を開始する。これにより、基板１６へのペーストパターンの塗布が開始される。 When the above process is completed, then, X, is Y-axis linear motors are driven on the basis of the paste pattern data stored in the microcomputer RAM of the main control unit 10. Thereby, the paste discharge port of the nozzle 8a13 moves in the X and Y directions according to the paste pattern data in a state where the paste discharge port faces the substrate 16 . At the same time, the set atmospheric pressure is applied to the paste storage cylinder 8a12, and the discharge of the paste from the paste discharge port of the nozzle 8a13 is started. Thereby, application of the paste pattern to the substrate 16 is started.

そして、先に説明したように、主制御部１０のマイクロコンピュータは距離計８ａ１４からのノズル８ａ１３のペースト吐出口と基板１６の表面との間隔の実測デ−タを入力し、基板１６の表面のうねりを測定して、この測定値に応じてＺ軸サーボモータ８ａ５を駆動して、基板１６の表面からのノズル８ａ１３の設定高さを一定に維持する。これにより、所望の塗布量でペーストパターンを塗布することができる。 As described above, the microcomputer of the main control unit 10 inputs the measured data of the distance between the paste discharge port of the nozzle 8a13 and the surface of the substrate 16 from the distance meter 8a14, and Waviness is measured, and the Z-axis servo motor 8a5 is driven according to the measured value, and the set height of the nozzle 8a13 from the surface of the substrate 16 is kept constant. Thereby, a paste pattern can be apply | coated with a desired application amount.

以上のようにして、ペーストパターンの描画が進むが、ノズル８ａ１３のペースト吐出口が基板１６上の上記ペーストパターンデータによって決まる描画パターンの終端であるか否かの判断により、終端でなければ、再び基板の表面うねりの測定処理に戻る。そして、上記の塗布描画を繰り返して、ペーストパターン形成が描画パターンの終端に達するまで継続する。描画パターンの終端に達すると、Ｚ軸サーボモータ８ａ５を駆動してノズル８ａ１３を上昇させ、ペーストパターン描画工程（ステップ５００）が終了する。   As described above, the drawing of the paste pattern proceeds. If it is determined that the paste discharge port of the nozzle 8a13 is the end of the drawing pattern determined by the paste pattern data on the substrate 16, if it is not the end, the process again. Return to the measurement process of the surface waviness of the substrate. Then, the coating drawing is repeated until the paste pattern formation reaches the end of the drawing pattern. When the end of the drawing pattern is reached, the Z-axis servo motor 8a5 is driven to raise the nozzle 8a13, and the paste pattern drawing step (step 500) is completed.

次に、基板排出処置（ステップ６００）に進み、基板１６の保持を解除し、装置外に排出する。そして、以上の全工程を停止するか否かを判定し（ステップ７００）、複数枚の基板に同じパターンでペースト膜を形成する場合には、基板搭載処理（ステップ３００）から繰り返され、全ての基板についてかかる一連の処理が終了すると、作業が全て終了（ステップ８００）となる。   Next, the process proceeds to a substrate discharge process (step 600), the holding of the substrate 16 is released, and the substrate is discharged out of the apparatus. Then, it is determined whether or not to stop all the above processes (step 700). When the paste film is formed with the same pattern on a plurality of substrates, the process is repeated from the substrate mounting process (step 300). When such a series of processes for the substrate is completed, all the operations are completed (step 800).

それでは、非接触給電を用いた動力系統の動作について説明する。図１、２、３において、一次給電線５に流れる高周波電流が一次給電線５の周囲に高周波磁界を生じさせる。その高周波磁界は高透磁率の一次受電コア６ａに集約され、コア内に磁束が生じる。この磁束は一次受電コア６ａに巻きつけられた二次給電線７ａに鎖交する。電磁誘導により、二次給電線７ａに高周波電圧が誘導され、二次給電線７ａに高周波電流が生じる。二次受電コイル９ａにおいても同様に受電コア内に高周波の磁束が生じ、電磁誘導によって、二次受電コイル二次側巻線兼塗布ヘッド部給電線９ａ１に高周波電圧が誘導され、二次受電コイル二次側巻線兼塗布ヘッド部給電線９ａ１に高周波電流が生じる。供給された高周波電力を各塗布ヘッド８Ａに備えられた受電ユニット８ａ１により、整流して直流に変換し、モータドライバの定格電圧範囲に電圧を調整する。この受電ユニット８ａ１からＹ軸モータドライバ８ａ２、Ｚ軸モータドライバ８ａ３にＹ軸モータドライバ動力線９ａ２、Ｚ軸モータドライバ動力線９ａ３を通して必要電力を供給する。各モータドライバよりＹ軸リニアモータ用電気子コイル８ａ４、Ｚ軸サーボモータ８ａ５にＹ軸モータ動力線９ａ４、Ｚ軸モータ動力線９ａ５を通して必要電力を供給する。また、位置認識用カメラ８ａ１５やレーザーの距離計８ａ１４に供給する電力は、必要電圧が低い為、受電ユニット８ａ１にてモータドライバ用電圧よりさらに電圧を下げ、周辺機器用動力線９ａ６にて供給する。このように架台−門型間、門型−塗布ヘッド間の可動部分における動力ケーブルを省配線化することができる。 Now, the operation of the power system using non-contact power feeding will be described. 1 , 2 , and 3 , the high-frequency current flowing through the primary power supply line 5 generates a high-frequency magnetic field around the primary power supply line 5. The high frequency magnetic field is concentrated on the primary power receiving core 6a having a high magnetic permeability, and a magnetic flux is generated in the core. This magnetic flux is linked to the secondary power supply line 7a wound around the primary power receiving core 6a. By electromagnetic induction, a high frequency voltage is induced in the secondary power supply line 7a, and a high frequency current is generated in the secondary power supply line 7a. Similarly, in the secondary power receiving coil 9a, a high frequency magnetic flux is generated in the power receiving core, and a high frequency voltage is induced in the secondary power receiving coil secondary winding / coating head power supply line 9a1 by electromagnetic induction. A high-frequency current is generated in the secondary winding / coating head portion feeding line 9a1 . The supplied high frequency power is rectified and converted into direct current by the power receiving unit 8a1 provided in each coating head 8A, and the voltage is adjusted to the rated voltage range of the motor driver. The power receiving unit 8a1 supplies necessary power to the Y-axis motor driver 8a2 and the Z-axis motor driver 8a3 through the Y-axis motor driver power line 9a2 and the Z-axis motor driver power line 9a3. The motor drivers from the armature coil Y-axis linear motors 8a4, Z-axis servo motor 8a5 in the Y-axis motor power line 9a4, supplies necessary power through the Z-axis motor power line 9a5. The power supplied to the position recognizing camera 8a 15 and laser rangefinder 8a14, since necessary voltage is low, by further lowering the voltage from the voltage motor driver by receiving unit 8a1, supplied at power peripherals line 9a6 To do. In this way, the power cables in the movable part between the gantry and the gate type and between the gate type and the coating head can be reduced in wiring.

次に空間光通信を用いた信号系統について説明する。まず、主制御部１０からの信号を、制御信号ケーブルＣＣを介して門型−架台間光通信機（架台側）１１Ａ、１１Ｂに送る。次に門型−架台間光通信機（架台側）１１Ａ、１１Ｂにより上記信号を光信号に変換し変調して、対向する門型−架台間光通信機（門型側）１２Ａ、１２Ｂに投光する。門型−架台間光通信機（門型側）１２Ａ、１２Ｂにおいて、受光した光信号を復調して、電気信号に変換し、門型フレーム２内の通常信号ケーブルでヘッド−門型間光通信機（門型側）１３Ａ〜１３Ｄ、１３Ｅ〜１３Ｈにモータドライバ制御信号を送る。ヘッド−門型間光通信機（門型側）１３Ａ〜１３Ｈにて受信した電気信号を光信号に変換して、対向するヘッド側光通信機１４Ａ〜１４Ｈに投光する。ヘッド側光通信機１４にて、受光した光信号を復調し、電気信号に変換して塗布ヘッド部内のモータドライバ８ａ２、８ａ３に、モータドライバ信号線１４ａ１、１４ａ２を通じて通信する。Ｙ、Ｚ軸モータドライバ８ａ２、８ａ３からのモータレディ信号、アラーム信号等の制御信号、リミットセンサ２ａ３、８ａ７の信号、位置認識用カメラ８ａ１５からの画像信号、距離計８ａ１４の距離信号を主制御部１０に戻す場合は、上記経路と逆の経路を通って主制御部４に送信される。このように架台−門型間、門型−塗布ヘッド間の通信部分における信号ケーブルを省配線化することができる。 Next, a signal system using spatial light communication will be described. First, a signal from the main control unit 10 is sent to the gate-frame-to-frame optical communication devices (base side) 11A and 11B via the control signal cable CC. Next, the above-mentioned signals are converted into optical signals by the portal-frame-to-frame optical communication devices (mounting side) 11A, 11B, modulated, and then thrown to the facing gate-frame-to-mounting optical communication devices (gate-type side) 12A, 12B . Shine. Gate-to-frame optical communication device (gate-type side) 12A and 12B demodulate the received optical signal, convert it to an electrical signal, and use the normal signal cable in the gate-type frame 2 to perform head-to-gate optical communication. Motor driver control signals are sent to the machines (gate type side) 13A to 13D and 13E to 13H . The head-to-gate type optical communication devices (gate type side) 13A to 13H convert the electrical signals received into optical signals and project them to the opposing head side optical communication devices 14A to 14H . The head-side optical communication device 14 demodulates the received optical signal, converts it into an electrical signal, and communicates with the motor drivers 8a2 and 8a3 in the coating head section through the motor driver signal lines 14a1 and 14a2. Y, the motor ready signal from the Z-axis motor driver 8a2, 8a3, control signal such as an alarm signal, the signal of the limit sensor 2a3, 8A7, image signals from the position recognizing camera 8a 15, the distance signal of the distance meter 8a 14 main When returning to the control unit 10 , it is transmitted to the main control unit 4 through a path opposite to the above path. In this way, it is possible to reduce the wiring of the signal cable in the communication part between the gantry and the gate type and between the gate type and the coating head.

以上のように、ペースト塗布装置の可動部は、Ｘ軸方向又はＹ軸方向に直線移動するために、給電線を略直線的に配置してそこを受電コアが移動できるので、可動部に追従するケーブル本数を削減できると共に、従来の信号線に変えて空間光通信機を固定部側及び可動部側に配置しても信号を遮断することなく伝送できる。このために、電源線や信号線を大幅に低減できため、ケーブル同士の摩擦により発生する塵埃の拡散を防止すると共に、可動部に追従するケーブル重量による位置制御精度の低下を防ぐことができる。これにより、基板面に塗布するペーストに塵埃が混入することなく精度の良い塗布を実現することができる。更に、本発明は、複数の可動部において非接触で給電、通信できることを特徴としているが、複数可動部を持つ装置において、一つの可動部のみに適用することが出来ることは言うまでも無い。 As described above, since the movable part of the paste application device moves linearly in the X-axis direction or the Y-axis direction, the power supply core can be moved in a substantially linear manner and the power receiving core can move there. with the number of cables to a possible reduction, can be transmitted without interrupting the even signal arranged varied spatial optical communication unit to the fixed part side and the movable portion of the conventional signal line. For this reason, since power supply lines and signal lines can be significantly reduced, it is possible to prevent diffusion of dust generated by friction between cables and to prevent a decrease in position control accuracy due to the weight of the cable following the movable part. As a result, it is possible to realize highly accurate application without dust being mixed into the paste applied to the substrate surface. Furthermore, although the present invention is characterized in that power can be fed and communicated in a plurality of movable parts in a non-contact manner, it goes without saying that it can be applied to only one movable part in an apparatus having a plurality of movable parts.

本発明によるペ−スト塗布機の一実施形態を示す斜視図である。It is a perspective view which shows one Embodiment of the paste coating device by this invention. 図１に示した実施形態での塗布ヘッドの構造を示す斜視図と、塗布ヘッド内の系統図である。It is the perspective view which shows the structure of the coating head in embodiment shown in FIG. 1, and the systematic diagram in a coating head. 一次受電コイルの詳細斜視図である。It is a detailed perspective view of a primary power receiving coil. 図１に示した実施形態での全体動作を示すフロ−チャ−トである。2 is a flowchart showing the overall operation in the embodiment shown in FIG.

符号の説明Explanation of symbols

１…架台、２Ａ、２Ｂ…門型フレーム、２ａ１…マグネット、２ａ２…リニアスケール、２ａ３…Ｙ軸リミットセンサ、２ａ４…リニアガイド、３Ａ、３Ｂ…門型カバー、４…高周波電源、５…一次給電線、６Ａ、６Ｂ…一次受電コア、７Ａ、７Ｂ…一次受電コア巻線兼二次給電線、８Ａ〜８Ｈ…塗布ヘッド、８ａ１…受電ユニット、８ａ２…Ｙ軸モータドライバ、８ａ３…Ｚ軸モータドライバ、８ａ４…Ｙ軸リニアモータ用電気子コイル、８ａ５…Ｚ軸モータ、８ａ６…Ｙ軸位置検出器、８ａ７…Ｚ軸位置検出器、８ａ８…下面基台、８ａ９…上面基台、８ａ１０…Ｚ軸ガイド、８ａ１１…Ｚ軸テーブル、８ａ１２…ペースト収納筒、８ａ１３…ノズル、８ａ１４…距離計、８ａ１５…位置認識用カメラ、９Ａ〜９Ｈ…二次受電コイル、９ａ１…二次受電コイル二次側巻線兼塗布ヘッド部給電線、９ａ２…Ｙ軸モータドライバ動力線、９ａ３…Ｚ軸モータドライバ動力線、９ａ４…Ｙ軸モータ動力線、９ａ５…Ｚ軸モータ動力線、９ａ６…周辺機器用動力線、１０…主制御部、１１…門型−架台間光通信機（架台側）、１２…門型−架台間光通信機（門型側）、１３…ヘッド−門型間光通信機（門型側）、１４…ヘッド−門型間光通信機（ヘッド側）、１４ａ１…Ｙ軸モータドライバ信号線、１４ａ２…Ｚ軸モータドライバ信号線、１４ａ３…Ｙ軸位置センサ信号線、１４ａ４…Ｚ軸位置センサ信号線、１４ａ５…Ｙ軸リニアエンコーダ信号線、１４ａ６…Ｚ軸エンコーダ信号線、１４ａ７…距離計用信号線、１４ａ８…位置認識用カメラ用信号線、１５…基板保持機構、１６…基板。 DESCRIPTION OF SYMBOLS 1 ... Base , 2A, 2B ... Portal frame, 2a1 ... Magnet, 2a2 ... Linear scale, 2a3 ... Y-axis limit sensor, 2a4 ... Linear guide, 3A, 3B ... Portal cover, 4 ... High frequency power supply, 5 ... Primary supply Electric wire, 6A, 6B ... primary power receiving core, 7A, 7B ... primary power receiving core winding and secondary power supply line, 8A to 8H ... coating head, 8a1 ... power receiving unit, 8a2 ... Y-axis motor driver, 8a3 ... Z-axis motor driver 8a4 ... Y-axis linear motor armature coil, 8a5 ... Z-axis motor, 8a6 ... Y-axis position detector, 8a7 ... Z-axis position detector, 8a8 ... Lower surface base, 8a9 ... Upper surface base, 8a10 ... Z-axis guide, 8a11 ... Z-axis table, 8A12 ... paste containing cylinder, 8a13 ... nozzle, 8a14 ... rangefinder, 8a15 ... position recognizing camera, 9a to 9h ... secondary receiving coil 9a1 ... secondary receiving coil secondary winding and the coating head feeders, 9a2 ... Y axis motor driver power lines, 9a3 ... Z-axis motor driver power lines, 9a4 ... Y-axis motor power line, 9a5 ... Z-axis motor power Power line for peripheral devices, 10a. Main control unit, 11 ... Optical communication device between gate type and gantry (mounting side), 12 ... Optical communication device between gate type and gantry (gate type side), 13 ... Head -Gate-type optical communication device (gate-type side), 14 ... Head-gate-type optical communication device (head side), 14a1 ... Y-axis motor driver signal line, 14a2 ... Z-axis motor driver signal line, 14a3 ... Y-axis Position sensor signal line, 14a4 ... Z-axis position sensor signal line, 14a5 ... Y-axis linear encoder signal line, 14a6 ... Z-axis encoder signal line, 14a7 ... Distance meter signal line, 14a8 ... Position recognition camera signal line, 15 ... Board holding mechanism, 1 ... board.

Claims (1)

架台上に設けられ一方向に往復動可能な門型フレームと、前記門型フレームの長手方向に移動可能な塗布ヘッドを複数設け、前記塗布ヘッドに設けてあるノズルの吐出口に対向するように設けられたテーブル上に基板を載置し、ペースト収納筒に充填したペーストを前記吐出口から前記基板上に吐出させながら前記基板と前記ノズルとの相対位置関係を変化させることにより、前記基板上に所望形状のペーストパタ−ンを塗布するペースト塗布機において、
前記門型フレームに２つの窓と前記窓の一方の上部を右回り、もう一方の窓の上部を左回りでそれぞれ集中して巻き付けられた２次巻き線とが設けられた受電コアを取り付け、前記架台側に高周波電源に接続されて直線状に前記受電コアの夫々の窓を往復して貫通するように給電線を配置して、前記２次巻き線で前記給電線から受電した電力を前記門型フレーム上の電気品に給電すると共に、前記門型フレームに設けた複数の塗布ヘッドのそれぞれに前記受電コアを設け、前記受電コアの２つの窓を往復して貫通するように、前記門型フレームに設けた受電コアの２次巻き線から前記門型フレームの長手方向に直線状に給電線を配置して各塗布ヘッドに電力を非接触給電で供給し、前記架台及び前記門型フレームの間と前記門型フレーム及び前記塗布ヘッドの間とでそれぞれ信号のやり取りを行う空間光通信手段を設けたことを特徴とするペースト塗布機。 A plurality of gate-type frames provided on the gantry and reciprocally movable in one direction and a plurality of application heads movable in the longitudinal direction of the portal-type frame are provided so as to be opposed to nozzle discharge ports provided in the application heads. A substrate is placed on a provided table, and the relative position relationship between the substrate and the nozzle is changed while discharging the paste filled in the paste storage cylinder onto the substrate from the discharge port. In a paste applicator for applying a paste pattern of a desired shape to
A power receiving core provided with two windows and a secondary winding wound around the upper part of the other window in a clockwise direction and an upper part of the other window in a counterclockwise direction is attached to the portal frame, A power supply line is arranged on the base side so as to be reciprocally passed through the respective windows of the power receiving core connected to a high frequency power source, and the power received from the power supply line by the secondary winding is In addition to supplying power to the electrical components on the gate-shaped frame, the power receiving core is provided in each of the plurality of coating heads provided on the gate-shaped frame, and the gate is reciprocated through the two windows of the power receiving core. A power supply line is arranged linearly in the longitudinal direction of the portal frame from the secondary winding of the power receiving core provided on the mold frame, and electric power is supplied to each coating head by non-contact power supply, and the gantry and the portal frame And the portal frame and Paste applying machine, characterized in that between the between the serial coating head provided with a space optical communication means for exchanging each signal.
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JP2001211501A (en) * 2000-01-27 2001-08-03 Hitachi Kiden Kogyo Ltd Power supplying method for conveying equipment
JP3465078B2 (en) * 2000-08-23 2003-11-10 株式会社椿本チエイン Non-contact power supply method and non-contact power supply device
JP2002345104A (en) * 2001-05-16 2002-11-29 Tsubakimoto Chain Co Non-contact power feeding system
JP3778874B2 (en) * 2001-05-23 2006-05-24 株式会社椿本チエイン Non-contact power feeding device
JP3701882B2 (en) * 2001-05-25 2005-10-05 株式会社 日立インダストリイズ Paste applicator
JP2003086441A (en) * 2001-09-10 2003-03-20 Hitachi Kiden Kogyo Ltd Non-contact power feed device
JP3828824B2 (en) * 2002-03-28 2006-10-04 株式会社 日立インダストリイズ Paste applicator

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KR20060120484A (en) 2006-11-27
KR100795135B1 (en) 2008-01-17
TW200709858A (en) 2007-03-16
CN100457291C (en) 2009-02-04
TWI296546B (en) 2008-05-11
CN1868604A (en) 2006-11-29
JP2006320855A (en) 2006-11-30

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