JP4804873B2 - Slit nozzle - Google Patents

Slit nozzle Download PDF

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Publication number
JP4804873B2
JP4804873B2 JP2005312998A JP2005312998A JP4804873B2 JP 4804873 B2 JP4804873 B2 JP 4804873B2 JP 2005312998 A JP2005312998 A JP 2005312998A JP 2005312998 A JP2005312998 A JP 2005312998A JP 4804873 B2 JP4804873 B2 JP 4804873B2
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Prior art keywords
slit nozzle
holes
slit
groove
bolt
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JP2007117877A (en
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芳明 升
真治 高瀬
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Tokyo Ohka Kogyo Co Ltd
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Tokyo Ohka Kogyo Co Ltd
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Priority to JP2005312998A priority Critical patent/JP4804873B2/en
Priority to TW095135824A priority patent/TWI346346B/en
Priority to CNB200610149985XA priority patent/CN100464873C/en
Priority to KR1020060104293A priority patent/KR100766216B1/en
Publication of JP2007117877A publication Critical patent/JP2007117877A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Nozzles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Description

本発明は、ガラス基板や半導体ウェーハ等の被処理物の表面に、所定幅でホトレジスト液やカラーフィルタとなる塗布液を塗布するスリットノズルに関する。   The present invention relates to a slit nozzle for applying a photoresist liquid or a coating liquid to be a color filter with a predetermined width on the surface of an object to be processed such as a glass substrate or a semiconductor wafer.

特許文献１に示されるように、一般的にスリットノズルは左右の半体を接合して構成される。具体的には図５に示すように、左右の半体１０１，１０２には幅方向に貫通孔１０３が形成され、この貫通孔１０３にボルト１０４を挿通して締め付けることで、スリットノズルが組立てられる。この状態では左右の半体１０１，１０２間に塗布液の貯留部１０５及びスリット状吐出部１０６が形成される。   As shown in Patent Document 1, a slit nozzle is generally configured by joining left and right halves. Specifically, as shown in FIG. 5, through holes 103 are formed in the left and right halves 101 and 102 in the width direction, and a slit nozzle is assembled by inserting and tightening bolts 104 into the through holes 103. . In this state, a coating liquid storage portion 105 and a slit-like discharge portion 106 are formed between the left and right halves 101 and 102.

また、同様の構造のスリットノズルが特許文献２及び特許文献３にも開示されている。いずれの構成も左右の半体がボルトで締め付けられることで、スリットノズルが組立てられている。   Moreover, the slit nozzle of the same structure is also disclosed by patent document 2 and patent document 3. In either configuration, the slit nozzle is assembled by tightening the left and right halves with bolts.

特開平１１−２７４０７１号公報Japanese Patent Laid-Open No. 11-274071 特開平１１−５７５３３号公報Japanese Patent Laid-Open No. 11-57533 特開２０００−３３３１２号公報JP 2000-33312 A

ところで、上述した構成のスリットノズルでは、左右の半体をボルトで締め付けた際に、ボルトに近い部分、つまりボルト挿通用の貫通孔周辺にボルトから直接応力が伝わるため、貫通孔周辺が他の部分よりも強く締め付けられ、スリット状吐出口の幅が部分的に異なり、塗布分布が不均一となる不具合がある。   By the way, in the slit nozzle configured as described above, when the left and right halves are tightened with bolts, stress is directly transmitted from the bolt to the portion close to the bolt, that is, around the through hole for inserting the bolt. There is a problem that the tightening is stronger than the part, the width of the slit-like discharge port is partially different, and the coating distribution is not uniform.

上述した点に鑑み、本発明は、ボルトから直接伝わる応力による塗布分布への影響を低減することができるスリットノズルを提供するものである。   In view of the above points, the present invention provides a slit nozzle that can reduce the influence on the coating distribution due to the stress directly transmitted from the bolt.

本発明に係るスリットノズルは、被処理物表面に所定幅で塗布液を塗布するもので、左右の半体にボルト挿通用の貫通孔が幅方向に形成され、前記左右の半体のうちの一方の半体の合わせ面には、塗布液の貯留部となる凹部、スリット状吐出部を形成する平坦部および前記ボルト挿通用の貫通孔が開口する溝が長さ方向に連続して形成されている構成とする。

The slit nozzle according to the present invention is for applying a coating liquid with a predetermined width on the surface of an object to be processed, and through holes for inserting bolts are formed in the left and right halves in the width direction . On the mating surface of one half, a recess serving as a reservoir for the coating liquid, a flat part forming a slit-like discharge part, and a groove in which the through hole for inserting the bolt opens are formed continuously in the length direction. The configuration is as follows.

本発明に係るスリットノズルによれば、左右の半体にボルト挿通用の貫通孔が幅方向に形成され、また左右の半体のうちの少なくとも一方の半体の合わせ面にはボルト挿通用の貫通孔が開口する溝が長さ方向に連続して形成されているので、ボルトを締め付けた際に、応力が貫通孔周辺に集中することなく均一に分散するため、スリット状吐出口の幅が部分的に異なるようなことはなく、塗布分布が均一となる。   According to the slit nozzle of the present invention, through holes for inserting bolts are formed in the left and right halves in the width direction, and the mating surfaces of at least one of the left and right halves are used for inserting bolts. Since the groove in which the through hole opens is formed continuously in the length direction, when the bolt is tightened, the stress is uniformly distributed without concentrating around the through hole. There is no partial difference and the coating distribution is uniform.

なお、ボルトによる締め付け箇所が上下２段の場合には、各段のボルト挿通用の貫通孔が開口する溝も上下２段に形成される。そして、上下の格段毎にボルト挿通用の貫通孔は複数個設けられ、これら複数のボルト挿通用の貫通孔が１本の溝に開口することになる。   In addition, when the bolt tightening portion is in the upper and lower two stages, the groove in which the through hole for inserting the bolt in each stage is also formed in the upper and lower two stages. A plurality of through holes for inserting bolts are provided for each of the upper and lower stages, and the plurality of through holes for inserting bolts are opened in one groove.

本発明に係るスリットノズルによれば、ボルトから直接伝わる応力を分散させて、塗布分布への影響を低減することが可能になる。
従って、塗布に対して高信頼性及び高精度を有するスリットノズルを実現することができる。 According to the slit nozzle according to the present invention, it is possible to disperse the stress transmitted directly from the bolt and reduce the influence on the coating distribution.
Therefore, it is possible to realize a slit nozzle having high reliability and high accuracy for application.

以下に本発明の実施の形態を添付図面に基づいて説明する。
図１は本発明に係るスリットノズルの一実施の形態を示す側面から見た断面図、図２は図１のＡ−Ａ方向の矢示図である。 Embodiments of the present invention will be described below with reference to the accompanying drawings.
FIG. 1 is a cross-sectional view seen from a side showing an embodiment of a slit nozzle according to the present invention, and FIG. 2 is an arrow view in the AA direction of FIG.

本実施の形態に係るスリットノズルは、左右の半体１，２から構成されている。
左右の半体１，２のそれぞれに上下２段となるように貫通孔１１，１２，２１，２２が幅方向に形成されている。これら貫通孔１１，１２，２１，２２は上下の各段において、長さ方向に離間して複数個形成され、対応する貫通孔１１と貫通孔２１、及び貫通孔１２と貫通孔２２は軸線が一致している。而して、各段の貫通孔１１と貫通孔２１、貫通孔１２と貫通孔２２に共通のボルト３１…を挿通して締め付けることで、スリットノズルが構成されている。 The slit nozzle according to the present embodiment is composed of left and right halves 1 and 2.
Through holes 11, 12, 21, 22 are formed in the width direction so that the left and right halves 1, 2 have two upper and lower stages. A plurality of these through-holes 11, 12, 21, and 22 are formed in the upper and lower stages so as to be spaced apart in the length direction, and the corresponding through-holes 11 and 21 and the through-holes 12 and 22 have axes. Match. Thus, the slit nozzle is configured by inserting and tightening the common bolts 31 through the through hole 11 and the through hole 21, and the through hole 12 and the through hole 22 of each step.

また、半体１と半体２との対向面（当接面）には塗布液の貯留部となる凹部１３、右側の半体２との間でスリット状吐出口１４を形成する平坦面１５が形成され、   In addition, a flat surface 15 that forms a slit-like discharge port 14 between a concave portion 13 that serves as a coating liquid storage portion and a right half 2 on the opposing surface (contact surface) between the half 1 and the half 2. Formed,

そして、本実施の形態においては特に、図２に示すように、半体１と半体２との対向面において、半体１の合わせ面にボルト挿通用の貫通孔１１，１２が開口する溝１６，１７が長さ方向に連続して形成されている。
具体的には、上段の溝１６には上段の貫通孔１１が開口し、下段の溝１７には下段の貫通孔１２が開口している。 In the present embodiment, as shown in FIG. 2, in the facing surfaces of the half body 1 and the half body 2, grooves in which through holes 11 and 12 for inserting bolts are opened on the mating surface of the half body 1. 16, 17 are formed continuously in the length direction.
Specifically, the upper through hole 11 is opened in the upper groove 16, and the lower through hole 12 is opened in the lower groove 17.

このようにボルト３１が挿通する貫通孔１１，１２の端部を相手方の半体２の対向面に直接押し当てることなく、長さ方向に伸びる溝１６，１７に開口せしめることで、ボルト３１による締め付け力が貫通孔１１，１２の開口周縁に集中することなく、ノズルの長さ方向に均等に分散する。その結果、スリット状吐出口１４の幅も均一になる。   In this way, the ends of the through holes 11 and 12 through which the bolts 31 are inserted are opened directly into the grooves 16 and 17 extending in the length direction without being directly pressed against the opposing surface of the other half 2. The tightening force is evenly distributed in the length direction of the nozzle without concentrating on the periphery of the opening of the through holes 11 and 12. As a result, the width of the slit-like discharge port 14 becomes uniform.

次に、本発明に係るスリットノズルの他の実施の形態を図３（ａ）〜（ｃ）に示す断面図を用いて説明する。
図３（ａ）に示す実施の形態では、貫通孔１１，１２の端部が開口する溝１８を１本とした場合である。つまり、図１及び図２に示した実施の形態のように、２本のボルト３１に対してそれぞれ溝１６，１７を形成するのではなく、２本のボルト３１に対して１つの溝１８を形成した場合である。 Next, another embodiment of the slit nozzle according to the present invention will be described with reference to cross-sectional views shown in FIGS.
In the embodiment shown in FIG. 3A, the number of the grooves 18 in which the end portions of the through holes 11 and 12 are opened is one. That is, as in the embodiment shown in FIGS. 1 and 2, grooves 16 and 17 are not formed on two bolts 31, but one groove 18 is formed on two bolts 31. This is the case.

図３（ｂ）に示す更に他の実施の形態では、溝１６，１７と対向する溝４０，４１を半体２に形成し、これら溝４０，４１に貫通孔２１，２２を開口させた場合である。
つまり、図１及び図２に示した実施の形態のように、一方の半体１のみに溝１６，１７を形成するのではなく、両方の半体１，２において、溝１６，１７，４０，４１を形成した場合である。 In another embodiment shown in FIG. 3B, grooves 40 and 41 facing the grooves 16 and 17 are formed in the half body 2, and through holes 21 and 22 are opened in these grooves 40 and 41. It is.
That is, as in the embodiment shown in FIGS. 1 and 2, the grooves 16, 17 are not formed only in one half 1, but the grooves 16, 17, 40 are formed in both halves 1, 2. , 41 are formed.

図３（ｃ）に示す更に他の実施の形態では、半体１の溝１８に対向する溝４２を半体２に形成し、溝１８には貫通孔１１，１２の端部が開口し、溝４２には貫通孔２１，２２の端部が開口するようにしている。
つまり、図３（ａ）に示した実施の形態のように、一方の半体１において、２本のボルト３１に対して１つの溝１８を形成するのではなく、両方の半体１，２において、２本のボルト３１に対する１つの溝４２を形成した場合である。 In yet another embodiment shown in FIG. 3 (c), a groove 42 facing the groove 18 of the half body 1 is formed in the half body 2, and the end portions of the through holes 11 and 12 are opened in the groove 18, The ends of the through holes 21 and 22 are opened in the groove 42.
That is, instead of forming one groove 18 for two bolts 31 in one half 1 as in the embodiment shown in FIG. This is a case where one groove 42 for the two bolts 31 is formed.

図３（ａ）〜（ｃ）に示す各実施の形態にあっても、ボルト３１で左右の半体１，２を締め付けた場合、貫通孔１１，１２，２１，２２の開口部周縁に応力が集中することなく、均一な力で締め付けることができる。   Even in the embodiments shown in FIGS. 3A to 3C, when the left and right halves 1 and 2 are tightened with the bolt 31, stress is applied to the peripheral edge of the opening of the through holes 11, 12, 21, and 22. Can be tightened with a uniform force without concentration.

図４は従来例と本願発明との効果上の差異を膜厚を基準にして判断した結果を示すグラフである。
このグラフから明らかなように、本発明に係るスリットノズルを用いることで、塗膜の厚さが従来よりも均一になることが分かる。 FIG. 4 is a graph showing the result of judging the difference in effect between the conventional example and the present invention based on the film thickness.
As is apparent from this graph, it can be seen that the use of the slit nozzle according to the present invention makes the thickness of the coating film more uniform than before.

なお、上述した各実施の形態においては、一方の半体１或いは両方の半体１，２において図２に示したような連続する溝を形成した場合を挙げて説明した。しかしながら、場合によっては、連続する溝ではなく、各ボルト位置において溝を形成するようにしても構わない。ただし連続する溝の場合は加工上が容易である。   In each of the above-described embodiments, the case where continuous grooves as shown in FIG. 2 are formed in one half 1 or both halves 1 and 2 has been described. However, in some cases, a groove may be formed at each bolt position instead of a continuous groove. However, in the case of continuous grooves, processing is easy.

また、上述した各実施の形態においては、ボルト３１が上下２段の場合を挙げて説明した。しかしながら、ボルト３１の段数はこれに限定されず様々な形態が考えられる。   Moreover, in each embodiment mentioned above, the case where the volt | bolt 31 was 2 steps | paragraphs of upper and lower sides was mentioned and demonstrated. However, the number of stages of the bolt 31 is not limited to this, and various forms are conceivable.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲でその他様々な構成が取り得る。   The present invention is not limited to the above-described embodiment, and various other configurations can be taken without departing from the gist of the present invention.

本発明に係るスリットノズルの一実施の形態を示す側方から見た断面図。The sectional view seen from the side which shows one embodiment of the slit nozzle concerning the present invention. 図１のＡ−Ａ方向矢示図。FIG. 2 is an AA arrow view of FIG. 1. （ａ）〜（ｃ）は他の実施の形態を示す図１と同様の図。(A)-(c) is a figure similar to FIG. 1 which shows other embodiment. 従来例と本発明との効果上の差異を膜厚を基準に判断した結果を示すグラフ。The graph which shows the result of having judged the difference in the effect of a prior art example and this invention on the basis of film thickness. 従来のスリットノズルの側面から見た断面図。Sectional drawing seen from the side of the conventional slit nozzle.

符号の説明Explanation of symbols

１，２…スリットノズルを構成する左右の半体、１１，１２，２１，２２…貫通孔、１３…凹部、１４…スリット状吐出口、１５…平坦面、１６，１７，１８，４０，４１，４２…溝、３１…ボルト
DESCRIPTION OF SYMBOLS 1, 2 ... The left-right half which comprises a slit nozzle, 11, 12, 21, 22 ... Through-hole, 13 ... Recessed part, 14 ... Slit-shaped discharge port, 15 ... Flat surface, 16, 17, 18, 40, 41 42 ... groove 31 ... bolt

Claims (2)

被処理物表面に所定幅で塗布液を塗布するスリットノズルにおいて、前記スリットノズルは左右の半体にボルト挿通用の貫通孔が幅方向に形成され、前記左右の半体のうちの一方の半体の合わせ面には、塗布液の貯留部となる凹部、スリット状吐出部を形成する平坦部および前記ボルト挿通用の貫通孔が開口する溝が長さ方向に連続して形成されていることを特徴とするスリットノズル。 In the slit nozzle for applying a coating solution in a predetermined width on the object surface to be treated, said slit nozzle through holes for bolt insertion are formed in the width direction halves of the right and left, the hand of the right and left halves On the mating surfaces of the half bodies, a recess serving as a reservoir for the coating liquid, a flat portion forming a slit-like discharge portion, and a groove in which the through hole for inserting the bolt opens are formed continuously in the length direction. A slit nozzle characterized by that. 請求項１に記載のスリットノズルにおいて、前記ボルト挿通用の貫通孔は上下２段に形成され、各段のボルト挿通用の貫通孔が開口する溝が上下２段に形成されていることを特徴とするスリットノズル。   2. The slit nozzle according to claim 1, wherein the through holes for inserting bolts are formed in two upper and lower stages, and grooves in which the through holes for inserting bolts in each stage are opened are formed in two upper and lower stages. A slit nozzle.
JP2005312998A 2005-10-27 2005-10-27 Slit nozzle Active JP4804873B2 (en)

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JP2005312998A JP4804873B2 (en) 2005-10-27 2005-10-27 Slit nozzle
TW095135824A TWI346346B (en) 2005-10-27 2006-09-27 Slit nozzle
CNB200610149985XA CN100464873C (en) 2005-10-27 2006-10-25 Slit nozzle
KR1020060104293A KR100766216B1 (en) 2005-10-27 2006-10-26 Slit nozzle

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JP2005312998A JP4804873B2 (en) 2005-10-27 2005-10-27 Slit nozzle

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JP2007117877A JP2007117877A (en) 2007-05-17
JP4804873B2 true JP4804873B2 (en) 2011-11-02

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JP5587531B2 (en) * 2007-07-19 2014-09-10 ノードソン コーポレーション Slot nozzle assembly, slot coat gun, and method for extruding foamable melt into wide strip

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KR100766216B1 (en) 2007-10-10
KR20070045939A (en) 2007-05-02
TW200727333A (en) 2007-07-16
CN100464873C (en) 2009-03-04
JP2007117877A (en) 2007-05-17
CN1954924A (en) 2007-05-02

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