JP4764093B2 - Cushion material - Google Patents

Cushion material Download PDF

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JP4764093B2
JP4764093B2 JP2005225617A JP2005225617A JP4764093B2 JP 4764093 B2 JP4764093 B2 JP 4764093B2 JP 2005225617 A JP2005225617 A JP 2005225617A JP 2005225617 A JP2005225617 A JP 2005225617A JP 4764093 B2 JP4764093 B2 JP 4764093B2
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sheet
mesh
rubber
cushion material
rubber sheet
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和彦 立石
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Kinyosha Co Ltd
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Description

この発明は、多層積層回路基板の熱成形に用いるクッション材に関し、特に複数回の使用が可能な多層回路基板の熱圧成形に用いられるクッション材に関するものである。   The present invention relates to a cushion material used for thermoforming a multilayer laminated circuit board, and more particularly to a cushion material used for hot press molding of a multilayer circuit board that can be used a plurality of times.

多層回路板は、回路パターンを形成した内装材とプリプレグを交互に積み重ね、これを上下熱盤の間でプレス成形しラミネート加工することによって成形されている。そしてこの場合、生産性向上のため、内装材とプリプレグを交互に積み重ねた被加圧体である被成形品は、中間に離型プレートを介して何層にも重ねて、これらを一度に加圧加熱成形することが行われている。さらに、この被成形品(被加圧体)加圧体の加圧加熱成形では、被成形品に成形圧が均一にかかるように、被成形品(被加圧体)の上下を鏡面板で挟み、その外側に成形用のクッション材を当て、これを上下の熱盤で加圧加熱することが行われている。   The multilayer circuit board is formed by alternately stacking interior materials and prepregs on which circuit patterns are formed, press-molding them between upper and lower heating plates, and laminating them. In this case, in order to improve productivity, the molded product, which is a pressed body in which interior materials and prepregs are alternately stacked, is stacked in layers through a release plate, and these are added at once. Pressure heating molding is performed. Furthermore, in the pressure heating molding of the molded product (pressurized body) pressure body, the upper and lower sides of the molded product (pressurized body) are mirror plates so that the molding pressure is uniformly applied to the molded product. A sandwiching cushioning material is applied to the outer side of the nip, and this is pressurized and heated with upper and lower hot plates.

従来、ここに用いられている成形用クッション材は、クラフト紙、芳香族ポリアミド繊維やガラス繊維などの耐熱性繊維からなる圧縮性をもった織布或いは不織布、フッ素ゴムなどを、被成形物の種類、プレス条件などに応じて適宜選択し組合わせ積層一体化したものが使用されていた。中でも、クラフト紙は圧縮特性が優れてるので好んで使用されている。そして、その使用態様は被成形品の種類、プレス条件などに応じて2枚から10数枚重ねて使用されていた。   Conventionally, the molding cushion material used here is made of craft paper, woven or nonwoven fabric having a compressibility made of heat-resistant fibers such as aromatic polyamide fiber and glass fiber, fluoro rubber, etc. A material that is appropriately selected according to the type, pressing conditions, etc., and combined and integrated has been used. Of these, kraft paper is preferred because it has excellent compression characteristics. And the use mode was used by overlapping two to ten or more sheets depending on the type of the product to be molded, press conditions and the like.

しかしながら、クラフト紙は圧縮特性は優れていいるが圧縮復元力が小さいために耐久性が乏しく、繰り返しの使用に耐えられないといった問題があった。このために、クラフト紙を圧縮材として使用する際は、一回の使用で全てを廃棄することもあるが、使用した複数枚のクラフト紙の中の一部を廃棄して新しいクラフト紙に替え、残りのクラフト紙を再度使用するようなことが行われていた。しかし、その場合でもさらにそのクラフト紙を再使用することは困難であった。従って、クッション材としてクラフト紙は圧縮特性の面では優れているが、耐久性の面で大きな問題となっていた。   However, although kraft paper has excellent compression characteristics, its compression restoring force is small, so its durability is poor and it cannot withstand repeated use. For this reason, when using kraft paper as a compression material, all of it may be discarded in one use, but some of the used kraft paper is discarded and replaced with new kraft paper. The remaining kraft paper was used again. However, even in that case, it was difficult to reuse the kraft paper. Therefore, kraft paper as a cushioning material is excellent in terms of compression characteristics, but has been a major problem in terms of durability.

さらに、芳香族ポリアミド繊維やガラス繊維などの耐熱性繊維の織布或いは不織布のクッション材、またはこれらと耐熱性合成ゴムを組合わせて積層一体化したクッション材は、クラフト紙と比較して弾性復元力がよく、また耐久性も格段に優れていた。しかしながら、この場合はクラフト紙と同等の圧縮特性をもたせるためには、耐熱繊維の織布或いは不織布の厚みをクラフト紙と比べ大きくしなければならず、クッション材を厚くしなければならないといった問題があった。   In addition, cushion materials made of woven or non-woven heat-resistant fibers such as aromatic polyamide fiber and glass fiber, or cushion materials made by combining these with heat-resistant synthetic rubber are elastically restored compared to kraft paper. It was strong and durable. However, in this case, in order to have the same compression characteristics as kraft paper, the thickness of the woven or non-woven fabric of heat-resistant fibers must be larger than that of kraft paper, and the cushion material must be thickened. there were.

しかしながら、クッション材の厚さを厚くすると、プレス成形機の熱盤と熱盤との間の間隔が狭まり、この間に挿入して成形できる被成形品の数量が少なくなって生産性が低下するといった問題があった。さらに重要なことは、厚い織布を用いたクッション材は熱盤からの熱伝導が低下し、プレス成形に際して被成形品の中心部の加熱が不十分になるといった恐れがあった。かかる場合は、回路基板にボイドが発生し不良品となることがあった。   However, when the thickness of the cushion material is increased, the space between the hot platen and the hot platen of the press molding machine is narrowed, and the number of molded products that can be inserted and formed between them is reduced, resulting in reduced productivity. There was a problem. More importantly, the cushion material using a thick woven fabric has a risk that the heat conduction from the hot platen is lowered, and the center part of the molded product is not sufficiently heated during press molding. In such a case, voids may occur on the circuit board, resulting in a defective product.

この発明は、圧縮特性がクラフト紙と実質的に同等で、しかも復元性が良く多数回の繰り返し使用が可能で、さらに厚さも従来と大差なくて熱伝導性も良好で、プレス成形で被成形品の中心部まで十分に加熱されるようにした多層積層回路基板の熱成形に用いるクッション材を得ようとするものである。   This invention has compression characteristics that are substantially the same as kraft paper, it has good resilience, can be used many times, has a thickness that is not much different from conventional ones, has good thermal conductivity, and is molded by press molding. An object of the present invention is to obtain a cushion material used for thermoforming a multilayer laminated circuit board that is sufficiently heated up to the center of the product.

この発明は、多層積層回路基板の熱成形に用いるクッション材であって、ゴムシートの両面に金属繊維の網状シートを配し、加圧成形に当たりゴムシートの加圧面のゴムの一部が変形し網状シートの網目に入り込むようにしたクッション材(請求項1)、前記網状シートが、ゴムシートと接着して一体となっている請求項1記載のクッション材(請求項2)、多層積層回路基板の熱成形に用いるクッション材であって、複数のゴムシートを、それらの両面に金属繊維の網状シートを配した状態で積層したゴムシート積層体からなり、加圧成形に当たりゴムシート積層体のゴムの一部が変形し網状シートの網目に入り込むようにしたクッション材(請求項3)、前記網状シートが、ゴムシートと接着して一体となっている請求項3記載のクッション材(請求項4)、前記ゴムシートが、中間に補強繊維を介したゴムシートである請求項1ないし4のいずれかに記載のクッション材(請求項5)及び前記網状シートが、10メッシュ〜100メッシュである請求項1ないし5のいずれかに記載のクッション材(請求項6)である。 The present invention is a cushioning material used for thermoforming a multilayer laminated circuit board, in which a metal fiber mesh sheet is disposed on both sides of a rubber sheet, and a part of the rubber on the pressure surface of the rubber sheet is deformed during pressure molding. Cushion material (Claim 1) that enters a mesh of a mesh sheet, Cushion material (Claim 2) according to claim 1, wherein the mesh sheet is bonded and integrated with a rubber sheet, Multilayer laminated circuit board A rubber sheet laminate comprising a plurality of rubber sheets laminated with metal fiber mesh sheets disposed on both sides of the rubber sheet. A cushion material (Claim 3), wherein a part of the mesh sheet is deformed to enter the mesh of the mesh sheet, and the mesh sheet is integrally bonded to a rubber sheet. The cushion material (Claim 5) and the net-like sheet according to any one of Claims 1 to 4, wherein the rubber sheet is a rubber sheet having a reinforcing fiber interposed therebetween. The cushion material according to any one of claims 1 to 5, wherein the cushion material is -100 mesh.

この発明のクッション材によれば、多層積層回路基板の熱成形において、従来から圧縮特性が良好なために好んで使用されてきたクラフト紙と実質的に同等の圧縮特性を得ることができる。また、この発明によれば、多数回繰り返し使用が可能なクッション材を得ることができる。さらに、この発明のクッション材は厚さも従来のクラフト紙と比較して厚くない上に、熱伝導性の良好な金網を用いているので、プレス成形で被成形品の中心部まで十分に加熱することが可能で、多層積層回路基板としてボイドの発生のない良好な製品を得ることができるものである。   According to the cushion material of the present invention, in the thermoforming of the multilayer laminated circuit board, it is possible to obtain a compression characteristic substantially equivalent to that of kraft paper which has been preferably used since the compression characteristic is good. Moreover, according to this invention, the cushion material which can be repeatedly used many times can be obtained. Furthermore, since the cushion material of the present invention is not thicker than conventional kraft paper and uses a wire mesh with good thermal conductivity, it is sufficiently heated to the center of the molded product by press molding. It is possible to obtain a good product free from voids as a multilayer laminated circuit board.

図1および2は、いずれもこの発明の多層積層回路基板の熱成形に用いるクッション材1である。図1で、2は耐熱性ゴムからなるゴムシートで、このゴムシート2の中に耐熱性繊維の織布からなる補強材3が挿入されている。さらに、このゴムシート2の片面(図1)或いは両面(図2)に金属繊維の網状シート4を配置したものである。ここに用いる網状シートは10〜100メッシュ、好ましくは18〜60メッシュで、線径、織物組織(平織、綾織など)などは、必要な圧縮特性を考慮して決定される。   1 and 2 are cushion materials 1 used for thermoforming the multilayer laminated circuit board of the present invention. In FIG. 1, reference numeral 2 denotes a rubber sheet made of heat-resistant rubber, and a reinforcing material 3 made of a woven fabric of heat-resistant fibers is inserted into the rubber sheet 2. Furthermore, a net-like sheet 4 of metal fibers is arranged on one side (FIG. 1) or both sides (FIG. 2) of the rubber sheet 2. The mesh sheet used here is 10 to 100 mesh, preferably 18 to 60 mesh, and the wire diameter, the woven structure (plain weave, twill weave, etc.) and the like are determined in consideration of necessary compression characteristics.

このクッション材の製法は、例えば原料ゴムとして耐熱性のフッ素ゴムを選択して、これに加硫剤、加硫促進剤、充填剤などを加えて混練してゴムコンパウンドを調製する。別に補強材として耐熱性のアラミド繊維の織布を準備する。このアラミド繊維の織布の織面に上記のゴムコンパウンドを糊引きしたものを2枚用意し、これを貼り合わせてプレスで加圧加熱する。その後冷却して脱型して積層体とし、その片面または両面に例えば金属繊維の20メッシュの網状シート4(SUS金網)を配してこの発明のクッション材とする。この網状シート4は、ゴムシート2と接着剤で接着してもよいが、別体として使用に際して重ね合わせるようにしてもよい。   For example, a heat-resistant fluororubber is selected as a raw material rubber, and a vulcanizing agent, a vulcanization accelerator, a filler, and the like are added thereto and kneaded to prepare a rubber compound. Separately, a heat-resistant aramid fiber woven fabric is prepared as a reinforcing material. Two sheets of the aramid fiber woven fabric with the above rubber compound glued are prepared, and these are bonded together and heated under pressure with a press. Thereafter, it is cooled and demolded to form a laminate, and a metal mesh 20 mesh netting sheet 4 (SUS wire netting), for example, is disposed on one or both sides to form the cushion material of the present invention. The net-like sheet 4 may be adhered to the rubber sheet 2 with an adhesive, but may be overlapped when used as a separate body.

図3は、ゴムシート2,2を2層重ねてその間に、上記と同じ網状シート5を介した別の実施例のクッション材6である。この場合は、中間の網状シートは両面に接着剤をつけて、その上下のゴムシート2,2をこれに接着する。このクッション体6は網状シート4が上下および中間にあるのでクッション性はさらに良好となるものである。 FIG. 3 shows a cushioning material 6 of another embodiment in which two rubber sheets 2 1 and 2 2 are stacked and the same net-like sheet 5 is interposed therebetween. In this case, an adhesive is attached to both sides of the intermediate net-like sheet, and the upper and lower rubber sheets 2 1 and 2 2 are adhered to this. The cushion body 6 is further improved in cushioning properties because the mesh sheet 4 is located above and below and in the middle.

図4は、この発明のクッション材を用いた多層回路基板の熱圧縮成形の一例を模式的に示したものであるが、これは従来と全く同じである。図4で10,10はプレスの熱盤である。その内側に本発明になるクッション材11,11があって、さらにその内側に外側プレート12,12がある。外側プレート12,12の間に、離型プレート13,13,13を介して製品である被加圧体である被成形品14,14がセットされるものである。 FIG. 4 schematically shows an example of heat compression molding of a multilayer circuit board using the cushion material of the present invention, which is exactly the same as in the prior art. In FIG. 4, reference numerals 10 1 and 10 2 denote press hot plates. There are cushion materials 11 1 and 11 2 according to the present invention on the inside, and outer plates 12 1 and 12 2 on the inside. Between the outer plates 12 1, 12 2, in which the release plate 13 1, 13 2, 13 3 the molded article 14 1 which is the pressure body, which is the product via, 14 2 is set.

この状態でプレス圧をかけると、クッション材11,11のゴムシートの表面の一部は網状シートの網目から膨出するようになって圧縮特性が向上し、被加圧体である被成形品の加圧が均一に行われるようになる。 When press pressure is applied in this state, a part of the surface of the rubber sheet of the cushioning material 11 1 , 11 2 bulges from the mesh of the mesh sheet, and the compression characteristics are improved. Pressurization of the molded product is performed uniformly.

図5は、この状態を一部拡大して模式的に示した。図5において、20はゴムシート、21は網状シート、22は網目、23はゴムシートの膨出部である。この図5に示されるように、加圧されたゴムシート20はその一部である膨出部23が網目22から膨出するので、ゴムシート20の圧縮が均一に行われるものである。この網状シートがない場合は、加圧されたゴムシートのうちの周辺部は外側に押出されるが、ゴムシートの中央部は逃げ場がないので、圧縮が不均一に行われる。この発明によればこうしたことがなく、加圧が全面で均一に行われるようになったものである。   FIG. 5 schematically shows this state partially enlarged. In FIG. 5, 20 is a rubber sheet, 21 is a mesh sheet, 22 is a mesh, and 23 is a bulging portion of the rubber sheet. As shown in FIG. 5, since the bulging portion 23, which is a part of the pressurized rubber sheet 20 swells from the mesh 22, the rubber sheet 20 is uniformly compressed. In the absence of the mesh sheet, the peripheral portion of the pressurized rubber sheet is pushed outward, but the central portion of the rubber sheet has no escape, so that the compression is performed unevenly. According to the present invention, this is not the case, and the pressurization is performed uniformly over the entire surface.

原料ゴムにフッ素ゴム(商品名フローレルFC-2176,住友3M社製)に、加硫剤、加硫促進剤、充填剤を混練してゴムコンパウンドとした。次に、補強層としてアラミド繊維(商品名コーネックス,帝人(株)製品)を準備し、これに前記ゴムコンパウンドを織布の両面に糊引きした。この2枚を貼り合わせ、圧力0.5 Mpa,温度160℃で5時間加圧加熱し、冷却してゴムシート積層物を得た。その後。この表面を砥石で研磨した。このものの表面粗さはRa 2μm、Rz 10μm、厚さ2mmであった。次いで、これをオーブンに入れ220℃4時間加熱した。これによって得たゴムシートをサイズ440×540mmに裁断してシートAとした。   The raw rubber was kneaded with fluororubber (trade name Florel FC-2176, manufactured by Sumitomo 3M), a vulcanizing agent, a vulcanization accelerator, and a filler to form a rubber compound. Next, an aramid fiber (trade name Conex, Teijin Limited) was prepared as a reinforcing layer, and the rubber compound was glued on both sides of the woven fabric. The two sheets were bonded together, heated under pressure at a pressure of 0.5 Mpa and a temperature of 160 ° C. for 5 hours, and cooled to obtain a rubber sheet laminate. afterwards. This surface was polished with a grindstone. The surface roughness of this was Ra 2 μm, Rz 10 μm, and thickness 2 mm. This was then placed in an oven and heated at 220 ° C. for 4 hours. The rubber sheet thus obtained was cut to a size of 440 × 540 mm to obtain a sheet A.

このシートAの片面に線径0.34mm,厚さ0.65mm,20メッシュのステンレス鋼線の金網(SUS)を接着剤で接着してクッション材A−1とした。また、このシートAの両面に上記と同じ金網を両面に接着したものをクッションクッションA−2とした。   A wire mesh (SUS) of a stainless steel wire having a wire diameter of 0.34 mm, a thickness of 0.65 mm, and 20 mesh was adhered to one side of the sheet A with an adhesive to obtain a cushion material A-1. Further, a cushion cushion A-2 was prepared by bonding the same metal mesh as described above to both sides of the sheet A.

さらに、線径0.14mm,厚さ0.26mmの60メッシュ金網(SUS)を上記と同じシートAの片面に接着したものをシートB−1とした。同じように、同じ金網をシートAの両面に接着したものをクッションB−2とした。   Further, a sheet B-1 was obtained by bonding a 60 mesh wire mesh (SUS) having a wire diameter of 0.14 mm and a thickness of 0.26 mm to one side of the same sheet A as described above. Similarly, the same wire mesh bonded to both sides of the sheet A was designated as cushion B-2.

上記の各種クッション材を、2.0 Mpa,3.0 Mpa,4.0 Mpaで圧縮して、その圧縮量を測定した。圧縮量の測定はオリエンテック(株)製テンシロンで行った。この結果を、表1に示した。また、圧縮試験を行った各種クッション材を再度(2回目)同じようにして圧縮試験を行った。この結果を表2に示した。さらに、同じようにして各種クッションを3回圧縮試験を行った。この結果を表3に示した。さらに同じようにして、10回圧縮試験を行った。この結果を表4に示した。   The various cushion materials were compressed at 2.0 Mpa, 3.0 Mpa, and 4.0 Mpa, and the amount of compression was measured. The amount of compression was measured with Tensilon manufactured by Orientec Corporation. The results are shown in Table 1. In addition, the compression test was performed in the same manner (second time) for the various cushion materials subjected to the compression test. The results are shown in Table 2. Further, various cushions were subjected to a compression test three times in the same manner. The results are shown in Table 3. Further, the compression test was performed 10 times in the same manner. The results are shown in Table 4.

比較例1は、クラフト紙(0.31mm厚,193g/m)を6枚重ね、実施例と同じようにして圧縮量を測定した。比較例2は比較例1と同様で、ただしクラフト紙を8枚重ねたものである。比較例3はシートAで網状シートを用いないものである。比較例4は、シートAの両面にアラミド繊維織布(厚さ0.14mm)を貼りあわせたものである。比較例についても圧縮試験は実施例と同じように10回を繰り返して行った。これらの結果を表1ないし4に示した。 In Comparative Example 1, six sheets of kraft paper (0.31 mm thickness, 193 g / m 2 ) were stacked, and the amount of compression was measured in the same manner as in the example. Comparative Example 2 is similar to Comparative Example 1, except that eight kraft papers are stacked. Comparative Example 3 is a sheet A that does not use a mesh sheet. In Comparative Example 4, an aramid fiber woven fabric (thickness: 0.14 mm) is bonded to both sides of the sheet A. For the comparative example, the compression test was repeated 10 times in the same manner as in the example. These results are shown in Tables 1 to 4.

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Figure 0004764093
Figure 0004764093

表1から明らかなように、実施例のクッション材はいずれもクラフト紙と実質的に同じで良好なクッション性を示していることが分かる。圧縮量が0.2mm/Mpa以上であれば、圧縮量としては一応満足したものとされる。これに対して、比較例3.4は圧縮量が少なくクッション性が良好でないことが分かる。表2は2回の圧縮を行った場合であるが、この場合はクラフト紙のへたり量が大きく、この時点でクラフト紙が使用できなくなっていることが分かる。これに対して実施例はへたり量が少なく、しかも圧縮量も十分であることが分かる。2回目以降も圧縮力を上げていくと十分な圧縮量を得ることができる。シートA,シートCも実施例と比較してへたり量が大きい。第3回の圧縮でも実施例は圧縮量が大きく、かつへたり量も小さい。第10回の圧縮でも実施例は圧縮量が大きく、かつへたり量も小さい。   As is clear from Table 1, it can be seen that the cushion materials of the examples are substantially the same as kraft paper and exhibit good cushioning properties. If the amount of compression is 0.2 mm / Mpa or more, the amount of compression is considered satisfactory. On the other hand, Comparative Example 3.4 shows that the amount of compression is small and the cushioning property is not good. Table 2 shows the case where the compression was performed twice. In this case, the amount of kraft paper is large, and it can be seen that the kraft paper cannot be used at this point. On the other hand, it can be seen that the embodiment has a small amount of sag and a sufficient amount of compression. A sufficient amount of compression can be obtained by increasing the compression force after the second time. Sheet A and sheet C also have a large amount of sag compared to the examples. Even in the third compression, the embodiment has a large amount of compression and a small amount of sag. Even in the tenth compression, the embodiment has a large amount of compression and a small amount of sag.

この発明の一実施例になるクッション材の断面図。Sectional drawing of the cushion material which becomes one Example of this invention. この発明の他の実施になるクッション材の断面図。Sectional drawing of the cushion material which becomes other implementation of this invention. この発明の他の実施になるクッション材の断面図。Sectional drawing of the cushion material which becomes other implementation of this invention. この発明のクッション材を用いて行う加圧加熱の態様を説明した説明図。Explanatory drawing explaining the aspect of the pressurization heating performed using the cushion material of this invention. この発明のクッション材を用いて行った加圧でクッション材のゴムが網目から膨出する状態を一部拡大して示した説明図。Explanatory drawing which expanded partially and showed the state which the rubber | gum of a cushion material swells from a mesh | network by the pressurization performed using the cushion material of this invention.

符号の説明Explanation of symbols

1,6,11,11…クッション材、2,2,2,20…ゴムシート、3…補強材、4,21…網状シート、10,10…熱盤、13,13…離型プレート、14,14…被成形品、22…網目、23…膨出部。 1, 6, 11 1 , 11 2 ... cushion material, 2, 2 1 , 2 2 , 20 ... rubber sheet, 3 ... reinforcing material, 4, 21 ... mesh sheet, 10 1 , 10 2 ... heating plate, 13 1 , 13 2 ... release plate, 14 1 , 14 2 ... molded article, 22 ... mesh, 23 ... bulging portion.

Claims (6)

多層積層回路基板の熱成形に用いるクッション材であって、ゴムシートの両面に金属繊維の網状シートを配し、加圧成形に当たりゴムシートの加圧面のゴムの一部が変形し網状シートの網目に入り込むようにしたクッション材。 A cushioning material used for thermoforming a multilayer laminated circuit board, wherein a mesh sheet of metal fibers is arranged on both sides of a rubber sheet, and a part of the rubber on the pressure surface of the rubber sheet is deformed during pressure molding, and the mesh of the mesh sheet Cushioning material that goes in. 前記網状シートが、ゴムシートと接着して一体となっている請求項1記載のクッション材。   The cushion material according to claim 1, wherein the mesh sheet is integrally bonded to a rubber sheet. 多層積層回路基板の熱成形に用いるクッション材であって、複数のゴムシートを、それらの両面に金属繊維の網状シートを配した状態で積層したゴムシート積層体からなり、加圧成形に当たりゴムシート積層体のゴムの一部が変形し網状シートの網目に入り込むようにしたクッション材。 A cushioning material used for thermoforming a multilayer laminated circuit board, comprising a rubber sheet laminate in which a plurality of rubber sheets are laminated with metal fiber mesh sheets arranged on both sides of the rubber sheet. A cushioning material in which a part of the rubber of the laminate is deformed and enters the mesh of the mesh sheet. 前記網状シートが、ゴムシートと接着して一体となっている請求項3記載のクッション材。   The cushion material according to claim 3, wherein the mesh sheet is integrally bonded to a rubber sheet. 前記ゴムシートが、中間に補強繊維を介したゴムシートである請求項1ないし4のいずれかに記載のクッション材。   The cushion material according to any one of claims 1 to 4, wherein the rubber sheet is a rubber sheet having a reinforcing fiber interposed therebetween. 前記網状シートが、10メッシュ〜100メッシュである請求項1ないし5のいずれかに記載のクッション材。   The cushion material according to any one of claims 1 to 5, wherein the mesh sheet is 10 mesh to 100 mesh.
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