JP4701892B2 - 粒度分布測定装置 - Google Patents
粒度分布測定装置 Download PDFInfo
- Publication number
- JP4701892B2 JP4701892B2 JP2005210362A JP2005210362A JP4701892B2 JP 4701892 B2 JP4701892 B2 JP 4701892B2 JP 2005210362 A JP2005210362 A JP 2005210362A JP 2005210362 A JP2005210362 A JP 2005210362A JP 4701892 B2 JP4701892 B2 JP 4701892B2
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- Prior art keywords
- particle size
- size distribution
- laser light
- sample
- moving
- Prior art date
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- 239000002245 particle Substances 0.000 title claims description 75
- 238000009826 distribution Methods 0.000 title claims description 63
- 238000005259 measurement Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 12
- 238000012935 Averaging Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0211—Investigating a scatter or diffraction pattern
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
1N、1R レーザ光源部
2 集光レンズ
3 空間フィルタ
4 コリメータレンズ
5 サンプル
6 集光レンズ
7 前方集光センサ
8 側方センサ
9 後方センサ
11 Xミラー
12 Yミラー
13 ガルバノミラー
14 コリメータレンズ
M 照射領域移動ユニット
Q 照射領域移動ユニット
R 照射領域移動ユニット
Claims (3)
- 被測定粒子群を含む試料にレーザ光を照射することによって得られる回折・散乱光の空間強度分布を検出部で検出し、その検出結果を用いて被測定粒子群の粒度分布を演算する粒度分布測定装置であって、前記レーザ光を発生するレーザ光源部を載置するXYステージを備え、前記試料および検出部を固定した状態で、前記XYステージを駆動することにより前記試料に対するレーザ光の照射領域をレーザ光の進行方向と直交する方向に2次元的に移動させる照射領域移動手段を備えることを特徴とする粒度分布測定装置。
- 請求項1に記載の粒度分布測定装置であって、前記照射領域移動手段によってレーザ光の照射領域を移動させて得られたそれぞれの散乱光の空間強度分布から、照射領域ごとの被測定粒子群の粒度分布を演算することを特徴とする粒度分布測定装置。
- 請求項1に記載の粒度分布測定装置であって、前記照射領域移動手段によってレーザ光の照射領域を移動させて得られたそれぞれの散乱光の空間強度分布を積算または平均した空間強度分布から照射領域全体の被測定粒子群の粒度分布を演算することを特徴とする粒度分布測定装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005210362A JP4701892B2 (ja) | 2005-07-20 | 2005-07-20 | 粒度分布測定装置 |
US11/447,202 US20070019195A1 (en) | 2005-07-20 | 2006-06-06 | Particle size distribution measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005210362A JP4701892B2 (ja) | 2005-07-20 | 2005-07-20 | 粒度分布測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007024783A JP2007024783A (ja) | 2007-02-01 |
JP4701892B2 true JP4701892B2 (ja) | 2011-06-15 |
Family
ID=37678731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005210362A Active JP4701892B2 (ja) | 2005-07-20 | 2005-07-20 | 粒度分布測定装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20070019195A1 (ja) |
JP (1) | JP4701892B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10113945B2 (en) * | 2016-05-10 | 2018-10-30 | Microtrac Inc. | Method and apparatus for combining measurements of particle characteristics using light scattering and optical imaging |
JP6590072B2 (ja) | 2017-03-30 | 2019-10-16 | Jfeスチール株式会社 | 原料の粒度分布測定装置、粒度分布測定方法および空隙率測定装置 |
JP7070797B2 (ja) * | 2019-05-29 | 2022-05-18 | 株式会社島津製作所 | 光散乱検出装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0523110U (ja) * | 1991-08-29 | 1993-03-26 | 株式会社豊田中央研究所 | レーザ光回折式粒径測定装置 |
JP2001033376A (ja) * | 1999-05-19 | 2001-02-09 | Horiba Ltd | 粒子径分布測定装置および粒子径分布測定方法 |
JP2003130783A (ja) * | 2001-10-29 | 2003-05-08 | Shimadzu Corp | 粒度分布測定装置 |
JP2003329569A (ja) * | 2002-05-14 | 2003-11-19 | Shimadzu Corp | レーザ回折・散乱式粒度分布測定装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2513109B2 (ja) * | 1992-09-28 | 1996-07-03 | 株式会社島津製作所 | 粉粒体の混合比推定方法 |
JP2664042B2 (ja) * | 1994-01-21 | 1997-10-15 | 科学技術庁航空宇宙技術研究所長 | 浮遊粒子群の濃度と粒度の空間分布の測定方法と装置 |
JPH08304259A (ja) * | 1995-05-08 | 1996-11-22 | Mitsubishi Heavy Ind Ltd | 試料検出装置 |
JPH0979967A (ja) * | 1995-09-12 | 1997-03-28 | Seiko Epson Corp | 流体中の浮遊粒子計測方法及びその装置 |
JP3697564B2 (ja) * | 1996-07-03 | 2005-09-21 | 株式会社島津製作所 | 粒度分布測定装置 |
JP2956653B2 (ja) * | 1996-12-16 | 1999-10-04 | 日本電気株式会社 | パーティクルモニター装置 |
US6236458B1 (en) * | 1998-11-20 | 2001-05-22 | Horiba, Ltd. | Particle size distribution measuring apparatus, including an array detector and method of manufacturing the array detector |
JP3415475B2 (ja) * | 1999-04-16 | 2003-06-09 | 株式会社堀場製作所 | 粒子径分布測定装置 |
JP3412606B2 (ja) * | 2000-08-04 | 2003-06-03 | 株式会社島津製作所 | レーザ回折・散乱式粒度分布測定装置 |
JP3822785B2 (ja) * | 2000-10-11 | 2006-09-20 | 株式会社堀場製作所 | 散乱式粒子径分布測定装置 |
JP3622696B2 (ja) * | 2001-07-17 | 2005-02-23 | 株式会社島津製作所 | 浮遊粒子状物質の測定方法および測定装置 |
JP2005121415A (ja) * | 2003-10-15 | 2005-05-12 | Shimadzu Corp | 粒度分布測定装置 |
-
2005
- 2005-07-20 JP JP2005210362A patent/JP4701892B2/ja active Active
-
2006
- 2006-06-06 US US11/447,202 patent/US20070019195A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0523110U (ja) * | 1991-08-29 | 1993-03-26 | 株式会社豊田中央研究所 | レーザ光回折式粒径測定装置 |
JP2001033376A (ja) * | 1999-05-19 | 2001-02-09 | Horiba Ltd | 粒子径分布測定装置および粒子径分布測定方法 |
JP2003130783A (ja) * | 2001-10-29 | 2003-05-08 | Shimadzu Corp | 粒度分布測定装置 |
JP2003329569A (ja) * | 2002-05-14 | 2003-11-19 | Shimadzu Corp | レーザ回折・散乱式粒度分布測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2007024783A (ja) | 2007-02-01 |
US20070019195A1 (en) | 2007-01-25 |
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