JP4696488B2 - Method for adjusting frequency of piezoelectric vibrator and piezoelectric vibrator - Google Patents

Method for adjusting frequency of piezoelectric vibrator and piezoelectric vibrator Download PDF

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JP4696488B2
JP4696488B2 JP2004208591A JP2004208591A JP4696488B2 JP 4696488 B2 JP4696488 B2 JP 4696488B2 JP 2004208591 A JP2004208591 A JP 2004208591A JP 2004208591 A JP2004208591 A JP 2004208591A JP 4696488 B2 JP4696488 B2 JP 4696488B2
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piezoelectric vibrator
tuning fork
groove
frequency
fork arm
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卓男 桑原
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Seiko Epson Corp
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本発明は、音叉腕が屈曲振動を行う圧電振動子の周波数調整方法および、圧電振動子、電子機器に関する。   The present invention relates to a frequency adjustment method of a piezoelectric vibrator in which a tuning fork arm performs flexural vibration, a piezoelectric vibrator, and an electronic apparatus.

近年、携帯用電子機器等の普及により、これらを構成する電子部品の小型化、高精度化の要求がある。携帯用電子機器の基準信号源として用いられる圧電振動子においても、小型化、高精度化が要求され、従来より様々な提案がされている。例えば、特許文献１に示すように、圧電振動子の音叉腕に溝部を設けることにより、振動等価回路における損失を発生させる直列抵抗を減少させ、圧電振動子の小型化を可能とする提案がされている。   In recent years, with the widespread use of portable electronic devices and the like, there is a demand for miniaturization and high accuracy of electronic components constituting them. A piezoelectric vibrator used as a reference signal source of a portable electronic device is also required to be downsized and highly accurate, and various proposals have been made conventionally. For example, as shown in Patent Document 1, by providing a groove on the tuning fork arm of a piezoelectric vibrator, it has been proposed to reduce the series resistance that causes loss in the vibration equivalent circuit and to reduce the size of the piezoelectric vibrator. ing.

また、音叉腕に溝部を形成した圧電振動子の周波数調整方法としては、特許文献１に開示されているように、圧電振動子の音叉腕先端に設けた金属膜にレーザ光を照射して、金属膜の一部を取り除くという一般的な手法により周波数調整が行われている。   In addition, as a frequency adjusting method of the piezoelectric vibrator in which the groove portion is formed in the tuning fork arm, as disclosed in Patent Document 1, a metal film provided at the tip of the tuning fork arm of the piezoelectric vibrator is irradiated with laser light, Frequency adjustment is performed by a general method of removing a part of the metal film.

特開昭５６−６５５１７号公報JP-A-56-65517

一般に、圧電振動子の周波数調整においては、音叉腕先端に質量を付加するか、あるいは質量を除去して周波数調整を行っているが、質量変化に対する周波数の変化は圧電振動子が小さくなるに従い大きくなる。このため、小型化された圧電振動子の周波数を所望の値に合わせ込むためには、蒸着などで質量を付加する場合、微量の蒸着量制御が必要であり、また、レーザ光などを照射して質量を除去するには、レーザ光のスポット径を小さくするなどの方法が必要となる。しかしながら、微量の蒸着量制御やレーザ光のスポット径を小さくすることには限界があり、小型化された圧電振動子において、周波数を所望の値に精度よく合わせ込めないという問題があった。   Generally, in frequency adjustment of a piezoelectric vibrator, mass adjustment is performed by adding mass to the tip of the tuning fork arm or removing mass, but the frequency change with respect to mass change increases as the piezoelectric vibrator becomes smaller. Become. For this reason, in order to adjust the frequency of the miniaturized piezoelectric vibrator to a desired value, when adding mass by vapor deposition or the like, it is necessary to control a very small amount of vapor deposition, and also irradiate laser light or the like. In order to remove the mass, it is necessary to reduce the spot diameter of the laser beam. However, there is a limit to controlling a very small amount of vapor deposition and reducing the spot diameter of the laser beam, and there has been a problem that in a miniaturized piezoelectric vibrator, the frequency cannot be accurately adjusted to a desired value.

本発明は上記課題を解決するためになされたものであり、その目的は、特に小型化された圧電振動子の周波数を、高精度に合わせ込める圧電振動子の周波数調整方法を提供することにある。また、他の目的として、本発明の圧電振動子の周波数調整方法で周波数調整された圧電振動子および、その圧電振動子を備えた電子機器を提供することにある。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a frequency adjustment method for a piezoelectric vibrator that can precisely match the frequency of a miniaturized piezoelectric vibrator with high accuracy. . Another object is to provide a piezoelectric vibrator frequency-adjusted by the piezoelectric vibrator frequency adjusting method of the present invention and an electronic device including the piezoelectric vibrator.

上記課題を解決するために、本発明の圧電振動子の製造方法は、音叉腕と、前記音叉腕の一方の端部を接続する音叉基部と、を有し、前記音叉腕が屈曲振動を行う圧電振動子の製造方法であって、前記音叉腕の厚さ方向に対向する面に、溝部を形成する工程と、前記音叉腕の側面、および前記溝部のそれぞれに、励振電極を形成する工程と、前記溝部に形成した前記励振電極の一部を除去する工程と、を有し、前記溝部を形成する工程は、底部および側面部を有する前記溝部を形成する工程であり、前記励振電極を形成する工程は、前記溝部の前記底部に底部電極を形成し、前記溝部の前記側面部に溝側面電極を形成する工程を含み、前記励振電極の一部を除去する工程は、前記底部電極の一部を除去する工程であることを特徴とする。 In order to solve the above problems, a method of manufacturing a piezoelectric vibrator of the present invention includes a tuning fork arm and a tuning fork base that connects one end of the tuning fork arm, and the tuning fork arm performs flexural vibration. A method of manufacturing a piezoelectric vibrator, the step of forming a groove on a surface facing the thickness direction of the tuning fork arm , and the step of forming an excitation electrode on each of the side surface of the tuning fork arm and the groove, , have a, removing a portion of the excitation electrode formed on the grooves, the step of forming the groove is a step of forming the groove having a bottom and side portions, form the excitation electrode The step of forming a bottom electrode on the bottom of the groove and forming a groove side electrode on the side of the groove. The step of removing a part of the excitation electrode It is the process of removing a part .

また、本発明の圧電振動子の製造方法は、前記溝部に形成した励振電極の一部を除去する工程は、レーザ光照射によって行うことを特徴とする。  The method for manufacturing a piezoelectric vibrator according to the present invention is characterized in that the step of removing a part of the excitation electrode formed in the groove is performed by laser light irradiation.

また、本発明の圧電振動子の製造方法は、前記溝部に形成した励振電極の一部を除去する工程は、前記音叉腕の前記先端から前記音叉基部に向かう方向に順次レーザ光を照射して、前記底部電極の一部を除去する工程であることを特徴とする。 The manufacturing method of a piezoelectric vibrator of the present invention, the step of removing a portion of the excitation electrode formed on the groove sequentially irradiated with laser light from the tip of the tuning fork arms in the direction toward the fork base characterized in that it is a step of removing a portion of the bottom electrode.

また、本発明の圧電振動子の製造方法は、前記溝部に形成した励振電極に順次レーザ光を照射するピッチが、レーザ光のスポット径より小さいことを特徴とする。 In the method for manufacturing a piezoelectric vibrator according to the present invention, a pitch for sequentially irradiating the excitation electrodes formed in the groove with laser light is smaller than a spot diameter of the laser light .

また、本発明の圧電振動子の製造方法は、前記溝部に形成した励振電極に順次レーザ光を照射するピッチは、レーザ光のスポット径より大きく、且つ前記音叉基部に向かい順次大きくなることを特徴とする。 Further, in the method for manufacturing a piezoelectric vibrator of the present invention, the pitch for sequentially irradiating the excitation electrode formed in the groove with laser light is larger than the spot diameter of the laser light and gradually increases toward the tuning fork base. And

また、本発明の圧電振動子の製造方法は、前記励振電極の一部を除去する工程よりも前に、前記音叉腕の先端に形成された重りの一部を除去する工程を有することを特徴とする。In addition, the method for manufacturing a piezoelectric vibrator according to the present invention includes a step of removing a part of the weight formed at the tip of the tuning fork arm before the step of removing a part of the excitation electrode. And

また、本発明の圧電振動子の製造方法は、前記音叉腕の先端に形成された重りの一部を除去する工程よりも前に、前記音叉腕の表面に引き回された励振電極のうち前記音叉腕の前記先端と前記溝部との間に位置する励振電極の一部を除去する工程を有することを特徴とする。 Further, the piezoelectric vibrator manufacturing method of the present invention may include the excitation electrode routed on the surface of the tuning fork arm before the step of removing a part of the weight formed on the tip of the tuning fork arm. The method includes a step of removing a part of the excitation electrode located between the tip of the tuning fork arm and the groove.

本発明の圧電振動子は、上述の圧電振動子の製造方法を用い製造されたことを特徴とする。 The piezoelectric vibrator of the present invention is manufactured using the above-described method for manufacturing a piezoelectric vibrator.

以下、本発明の実施形態について図面に従って説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（第１の実施形態）
図１（ａ）は、本発明に係る圧電振動子の構成を示す平面図、図１（ｂ）は、同図（ａ）のＡ−Ａ断線に沿う断面図である。水晶などの圧電材料からなる圧電振動子１は、２つの音叉腕２、３を有している。音叉腕２、３の一方の端部はそれぞれ音叉基部４に接続され、他方の端部は開放されている。音叉腕２、３の幅方向の中心線を挟んだ中央部には溝部５、６が形成され、この溝部５、６は音叉腕２、３の厚さ方向に対向する上下面に設けられている。また、圧電振動子１には励振電極７、８が設けられ、音叉腕２、３を屈曲振動できるように構成されている。さらに、音叉腕２、３の開放された先端部には重り９が設けられている。励振電極７、８はＡｕなどの金属膜で形成され、重り９はＡｇやＡｕなどの金属膜で形成されている。 (First embodiment)
FIG. 1A is a plan view showing a configuration of a piezoelectric vibrator according to the present invention, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. A piezoelectric vibrator 1 made of a piezoelectric material such as quartz has two tuning fork arms 2 and 3. One end of the tuning fork arms 2 and 3 is connected to the tuning fork base 4, and the other end is open. Grooves 5 and 6 are formed at the center of the tuning fork arms 2 and 3 across the center line in the width direction, and the grooves 5 and 6 are provided on the upper and lower surfaces of the tuning fork arms 2 and 3 facing in the thickness direction. Yes. The piezoelectric vibrator 1 is provided with excitation electrodes 7 and 8 so that the tuning fork arms 2 and 3 can be flexibly vibrated. Further, a weight 9 is provided at the open ends of the tuning fork arms 2 and 3. The excitation electrodes 7 and 8 are made of a metal film such as Au, and the weight 9 is made of a metal film such as Ag or Au.

図２（ａ）および図２（ｂ）は、図１（ａ）に示す音叉腕２のＢ−Ｂ断線に沿う模式断面図であり、本発明に係る圧電振動子の振動原理を説明する説明図である。音叉腕２の溝部５の側面には溝側面電極８ａおよび、溝底部には底部電極８ｂが設けられている。これらの溝側面電極８ａおよび、底部電極８ｂは、図１で示した励振電極８に含まれるものであり、励振電極８として同電極となるように構成されている。また、音叉腕２の側面には側面電極７ａ設けられている。側面電極７ａは、図１で示した励振電極７に含まれるもので、励振電極７として同電極となるように構成されている。そして、励振電極７、８はお互いに異なる電極となるように構成される。   2 (a) and 2 (b) are schematic cross-sectional views taken along the line BB of the tuning fork arm 2 shown in FIG. 1 (a), illustrating the vibration principle of the piezoelectric vibrator according to the present invention. FIG. A groove side electrode 8a is provided on the side surface of the groove 5 of the tuning fork arm 2, and a bottom electrode 8b is provided on the bottom of the groove. These groove side electrode 8a and bottom electrode 8b are included in the excitation electrode 8 shown in FIG. 1, and are configured to be the same as the excitation electrode 8. A side electrode 7 a is provided on the side surface of the tuning fork arm 2. The side electrode 7 a is included in the excitation electrode 7 shown in FIG. 1 and is configured to be the same electrode as the excitation electrode 7. The excitation electrodes 7 and 8 are configured to be different from each other.

次に、このような、音叉腕２の励振電極７、８の構成において、音叉腕２の動作について説明する。図２（ａ）に示すように、側面電極７ａに正の電圧、溝側面電極８ａおよび溝底部電極８ｂに負の電圧が印加されると、側面電極７ａから溝側面電極８ａの向き（矢印に示す向き）に電界が働く。また、図２（ｂ）に示すように、側面電極７ａに負の電圧、溝側面電極８ａおよび溝底部電極８ｂに正の電圧が印加されると、溝側面電極８ａから側面電極７ａの向き（矢印に示す向き）に電界が働く。   Next, the operation of the tuning fork arm 2 in the configuration of the excitation electrodes 7 and 8 of the tuning fork arm 2 will be described. As shown in FIG. 2A, when a positive voltage is applied to the side electrode 7a and a negative voltage is applied to the groove side electrode 8a and the groove bottom electrode 8b, the direction from the side electrode 7a to the groove side electrode 8a (in the direction of the arrow) Electric field works in the direction shown). As shown in FIG. 2B, when a negative voltage is applied to the side electrode 7a and a positive voltage is applied to the groove side electrode 8a and the groove bottom electrode 8b, the direction from the groove side electrode 8a to the side electrode 7a ( An electric field works in the direction indicated by the arrow).

このように、音叉腕２の中央から見ると、音叉腕２の右側と左側では電界の方向が逆であるため、左右の一方が伸びの歪を生ずれば、他の一方では縮みの歪が生じ、音叉腕２は屈曲する。そして、側面電極７ａと溝側面電極８ａおよび溝底部電極８ｂ（励振電極７と励振電極８）に交番電圧を印加すれば、音叉腕２が屈曲振動をする。また、この音叉腕２に働く電界は対向する側面電極７ａと溝側面電極８ａに垂直な成分のみとなる。このため、上記のような構成にすれば、音叉腕２を効率よく励振させることができ、圧電振動子の小型化を可能にする。なお、上記の説明では溝底部電極８ｂを設けた形態にて説明したが、対向する側面電極７ａと溝側面電極８ａを異なる電極として構成すれば、溝底部電極８ｂは音叉腕２の屈曲振動には直接関与しないため、溝底部電極８ｂを設けない構成としても良い。   In this way, when viewed from the center of the tuning fork arm 2, the direction of the electric field is opposite on the right and left sides of the tuning fork arm 2, so if one of the left and right produces an elongation distortion, the other one has a shrinkage distortion. As a result, the tuning fork arm 2 bends. When an alternating voltage is applied to the side electrode 7a, the groove side electrode 8a, and the groove bottom electrode 8b (excitation electrode 7 and excitation electrode 8), the tuning fork arm 2 bends and vibrates. The electric field acting on the tuning fork arm 2 has only a component perpendicular to the opposing side electrode 7a and groove side electrode 8a. For this reason, if it is set as the above structures, the tuning fork arm 2 can be excited efficiently and the piezoelectric vibrator can be miniaturized. In the above description, the groove bottom electrode 8b is provided. However, if the opposite side electrode 7a and the groove side electrode 8a are configured as different electrodes, the groove bottom electrode 8b is caused by bending vibration of the tuning fork arm 2. Is not directly involved, and the groove bottom electrode 8b may not be provided.

次に、本実施形態の圧電振動子の周波数調整方法について説明する。図３は圧電振動子の周波数調整工程を説明するフローチャートである。ステップＳ１では、図１に示したように、圧電振動子１の音叉腕２、３先端部にＡｕやＡｇを蒸着やスパッタにより、重り９を形成する。   Next, a method for adjusting the frequency of the piezoelectric vibrator of this embodiment will be described. FIG. 3 is a flowchart for explaining the frequency adjustment process of the piezoelectric vibrator. In step S1, as shown in FIG. 1, a weight 9 is formed by vapor deposition or sputtering of Au or Ag on the tips of the tuning fork arms 2 and 3 of the piezoelectric vibrator 1.

次に、圧電振動子１を収容容器に固定するマウント工程に進む（ステップＳ２）。図６（ａ）は圧電振動子を収容容器にマウントした状態を示す平面図である。セラミックスなどで形成した収容容器２１は、一面が開放されて凹部が設けられている。凹部には台座２２が形成され、この台座２２に圧電振動子１が導電性接着剤２３にて接着固定される。また、図示しないが、圧電振動子１の励振電極と収容容器２１に配置された回路配線とが、導電性接着剤２３を介して電気的な接続がなされている。   Next, it progresses to the mounting process which fixes the piezoelectric vibrator 1 to a storage container (step S2). FIG. 6A is a plan view showing a state in which the piezoelectric vibrator is mounted on the storage container. The storage container 21 formed of ceramics or the like is open on one side and is provided with a recess. A pedestal 22 is formed in the recess, and the piezoelectric vibrator 1 is bonded and fixed to the pedestal 22 with a conductive adhesive 23. Although not shown, the excitation electrode of the piezoelectric vibrator 1 and the circuit wiring arranged in the housing container 21 are electrically connected via the conductive adhesive 23.

次に、ステップＳ３に進み、封止工程となる。図６（ｂ）は封止工程後の状態を示す概略断面図である。収容容器２１の上部から、透明なガラス材で形成されたリッド２４を配置し、収容容器２１内を真空雰囲気に保持して封止され、圧電振動子１がパッケージされた状態となる。   Next, it progresses to step S3 and becomes a sealing process. FIG.6 (b) is a schematic sectional drawing which shows the state after a sealing process. A lid 24 formed of a transparent glass material is disposed from the upper portion of the storage container 21, and the storage container 21 is sealed in a vacuum atmosphere so that the piezoelectric vibrator 1 is packaged.

その後、ステップＳ４からステップＳ６で圧電振動子の周波数調整が行われる。これらの周波数調整では、図６（ｂ）に示したパッケージされた圧電振動子１の透明なリッド２４ごしにレーザ光を照射して、音叉腕に形成した重りや電極を除去して行う。周波数調整前の圧電振動子１の周波数は、重り９の付加により、所望の周波数より低く設定されており、重りや電極を除去することにより、周波数を高くする方向で周波数調整が行われる。図４は圧電振動子の周波数の調整方法を説明する平面図であり、図４（ａ）は周波数調整１、図４（ｂ）は周波数調整２、図４（ｃ）は周波数調整３の工程に対応する平面図である。   Thereafter, frequency adjustment of the piezoelectric vibrator is performed in steps S4 to S6. These frequency adjustments are performed by irradiating the transparent lid 24 of the packaged piezoelectric vibrator 1 shown in FIG. 6B with laser light and removing the weights and electrodes formed on the tuning fork arm. The frequency of the piezoelectric vibrator 1 before the frequency adjustment is set lower than a desired frequency by adding the weight 9, and the frequency adjustment is performed in the direction of increasing the frequency by removing the weight and the electrode. FIG. 4 is a plan view for explaining a method of adjusting the frequency of the piezoelectric vibrator. FIG. 4 (a) is a frequency adjustment 1, FIG. 4 (b) is a frequency adjustment 2, and FIG. 4 (c) is a frequency adjustment 3 process. It is a top view corresponding to.

ステップＳ４の周波数調整１の工程では、図４（ａ）に示すように、圧電振動子１の音叉腕２、３先端に形成された重り９にレーザ光スポット１０ａを照射して、重り９の一部を除去する。この工程では、圧電振動子１の周波数が周波数調整１として決められた所定の値になるまで、数回、音叉腕２、３の重り９にレーザ光スポット１０ａを照射して、重り９の一部を除去する。また、重り９の一部の除去は、振動のバランスを考慮して音叉腕２、３でほぼ同量になるように設定されている。周波数調整１の工程での調整では、除去した重り９の質量効果により、圧電振動子１の周波数変化は大きく、周波数を粗く調整する。   In the step of frequency adjustment 1 in step S4, as shown in FIG. 4A, the weight 9 formed at the tip of the tuning fork arm 2 and 3 of the piezoelectric vibrator 1 is irradiated with the laser beam spot 10a, and the weight 9 Remove some. In this step, the weight 9 of the tuning fork arms 2 and 3 is irradiated with the laser light spot 10a several times until the frequency of the piezoelectric vibrator 1 reaches a predetermined value determined as the frequency adjustment 1, and Remove the part. Further, the removal of part of the weight 9 is set so that the tuning fork arms 2 and 3 have substantially the same amount in consideration of the balance of vibration. In the adjustment in the frequency adjustment 1 step, due to the mass effect of the removed weight 9, the frequency change of the piezoelectric vibrator 1 is large and the frequency is adjusted roughly.

次にステップＳ５の、周波数調整２の工程に進む。周波数調整２の工程では、図４（ｂ）に示すように、音叉腕２、３の先端から少し音叉基部４に近づいた部分にレーザ光スポット１０ｂを照射する。この部分には、圧電振動子１表面に引き回された励振電極７、８の一部が配設されており、レーザ光スポット１０ｂを照射することにより、励振電極７、８の一部を除去する。この工程では、圧電振動子１の周波数が周波数調整２として決められた所定の値になるまで、数回、音叉腕２、３の励振電極７、８にレーザ光スポット１０ｂを照射して、励振電極７、８の一部を除去する。また、励振電極７、８の一部の除去は、振動のバランスを考慮して音叉腕２、３でほぼ同量になるように設定されている。   Next, the process proceeds to the step of frequency adjustment 2 in step S5. In the step of frequency adjustment 2, as shown in FIG. 4 (b), a laser beam spot 10b is irradiated to a portion slightly closer to the tuning fork base 4 from the tips of the tuning fork arms 2 and 3. In this portion, a part of the excitation electrodes 7 and 8 routed on the surface of the piezoelectric vibrator 1 is disposed, and a part of the excitation electrodes 7 and 8 is removed by irradiating the laser beam spot 10b. To do. In this process, the excitation electrodes 7 and 8 of the tuning fork arms 2 and 3 are irradiated with the laser beam spot 10b several times until the frequency of the piezoelectric vibrator 1 reaches a predetermined value determined as the frequency adjustment 2, and excitation is performed. A part of the electrodes 7 and 8 is removed. The removal of a part of the excitation electrodes 7 and 8 is set so that the tuning fork arms 2 and 3 have substantially the same amount in consideration of the balance of vibration.

周波数調整２の工程での調整では、除去した励振電極７、８の質量効果により、圧電振動子１の周波数を調整できる。励振電極７、８の厚みは重り９の厚みに比べて充分に薄く形成されており、１回のレーザ光スポットの照射における周波数の変化は、周波数調整１に比べて小さい。このように、周波数調整２は周波数調整１に比べて、精度の高い調整が可能である。次に、小型化された圧電振動子など、さらに精度の高い周波数調整が必要な場合には、本発明の要旨であるステップＳ６の周波数調整３を行う。   In the adjustment in the step of frequency adjustment 2, the frequency of the piezoelectric vibrator 1 can be adjusted by the mass effect of the excitation electrodes 7 and 8 removed. The thicknesses of the excitation electrodes 7 and 8 are formed sufficiently thinner than the thickness of the weight 9, and the frequency change in one laser beam spot irradiation is smaller than that in the frequency adjustment 1. As described above, the frequency adjustment 2 can be adjusted with higher accuracy than the frequency adjustment 1. Next, when a more precise frequency adjustment is required, such as a miniaturized piezoelectric vibrator, the frequency adjustment 3 in step S6 which is the gist of the present invention is performed.

ステップＳ６の周波数調整３の工程では、図４（ｃ）に示すように、音叉腕２、３に設けられた溝部５、６にレーザ光スポット１０ｃを照射する。この部分には、圧電振動子１表面に引き回された励振電極７、８の一部である溝底部電極７ｂ、８ｂが配設されており、レーザ光スポット１０ｃを照射することにより、溝底部電極７ｂ、８ｂの一部を除去する。この工程では、圧電振動子１の周波数が周波数調整３として決められた所定の値（所望の最終周波数）になるまで、音叉腕２、３の溝底部電極７ｂ、８ｂにレーザ光スポット１０ｃを照射して、溝底部電極７ｂ、８ｂの一部を除去する。このとき、複数回のレーザ光スポット１０ｃを照射する必要があるときには、音叉腕２、３の先端から音叉基部４に向かう方向に、順次レーザ光スポット１０ｃを照射していく。また、溝底部電極７ｂ、８ｂの一部の除去は、振動のバランスを考慮して音叉腕２、３でほぼ同量であることが望ましい。   In the step of frequency adjustment 3 in step S6, as shown in FIG. 4C, the groove portions 5 and 6 provided in the tuning fork arms 2 and 3 are irradiated with the laser beam spot 10c. In this portion, groove bottom electrodes 7b and 8b, which are part of the excitation electrodes 7 and 8 routed around the surface of the piezoelectric vibrator 1, are disposed. By irradiating the laser beam spot 10c, the groove bottom portion is provided. A part of the electrodes 7b and 8b is removed. In this step, the laser beam spot 10c is applied to the groove bottom electrodes 7b and 8b of the tuning fork arms 2 and 3 until the frequency of the piezoelectric vibrator 1 reaches a predetermined value (desired final frequency) determined as the frequency adjustment 3. Then, a part of the groove bottom electrodes 7b and 8b is removed. At this time, when it is necessary to irradiate the laser beam spot 10c a plurality of times, the laser beam spot 10c is sequentially irradiated in the direction from the tips of the tuning fork arms 2 and 3 toward the tuning fork base 4. Further, it is desirable that the removal of a part of the groove bottom electrodes 7b and 8b is almost the same amount in the tuning fork arms 2 and 3 in consideration of the balance of vibration.

周波数調整３の工程での調整では、除去した溝底部電極７ｂ、８ｂの質量効果により、圧電振動子１の周波数を調整できる。溝底部電極７ｂ、８ｂの厚みは周波数調整２で除去する励振電極７、８と同じであるが、周波数調整３で除去する位置が、音叉基部４に近いため、１回のレーザ光スポットの照射における周波数の変化は小さい。このように、周波数調整３は周波数調整２に比べて、精度の高い調整が可能である。また、周波数調整３では、音叉腕２、３の先端から音叉基部４に向かう方向に、順次レーザ光スポット１０ｃを照射することに従い、レーザ光スポット１０ｃの照射位置は音叉基部４に近づいていく。このことは、微量ではあるが、１回のレーザ光スポットの照射における周波数の変化は小さくなっていく。このことからも、精度の高い周波数調整が可能となる。また、溝底部電極７ｂ、８ｂは音叉腕２、３の屈曲振動には直接影響を与えないため、溝底部電極７ｂ、８ｂを除去しても圧電振動子１の特性には影響を与えず、周波数の調整ができる。   In the adjustment in the frequency adjustment 3 step, the frequency of the piezoelectric vibrator 1 can be adjusted by the mass effect of the removed groove bottom electrodes 7b and 8b. The thicknesses of the groove bottom electrodes 7b and 8b are the same as those of the excitation electrodes 7 and 8 to be removed by the frequency adjustment 2, but the position to be removed by the frequency adjustment 3 is close to the tuning fork base 4, so that the laser beam spot is irradiated once. The frequency change at is small. As described above, the frequency adjustment 3 can be adjusted with higher accuracy than the frequency adjustment 2. In the frequency adjustment 3, the irradiation position of the laser light spot 10 c approaches the tuning fork base 4 as the laser light spot 10 c is sequentially irradiated in the direction from the tip of the tuning fork arms 2 and 3 toward the tuning fork base 4. Although this is a very small amount, the change in frequency in one irradiation with a laser beam spot becomes smaller. This also makes it possible to adjust the frequency with high accuracy. Further, since the groove bottom electrodes 7b and 8b do not directly affect the bending vibration of the tuning fork arms 2 and 3, even if the groove bottom electrodes 7b and 8b are removed, the characteristics of the piezoelectric vibrator 1 are not affected. The frequency can be adjusted.

上記の実施形態で説明したレーザ光としては、ＹＡＧレーザ、ＹＶＯ4レーザ、ＹＬＦレーザなどのレーザ光を利用できる。また、レーザ光スポット径はφ１５μｍからφ５μｍ程度のものが使用される。なお、上記実施形態では、周波数調整前の圧電振動子１の周波数を、所望の周波数より低く設定しておき、重りや電極などの質量を除去することにより、周波数を高くする方向で周波数調整を行ったが、周波数調整前の圧電振動子１の周波数を、所望の周波数より高く設定しておき、質量を除去する位置と同様な位置に質量を付加して、周波数を低くする方向で周波数調整をすることもできる。   Laser light such as YAG laser, YVO4 laser, and YLF laser can be used as the laser light described in the above embodiment. Also, a laser beam spot diameter of about φ15 μm to φ5 μm is used. In the above embodiment, the frequency of the piezoelectric vibrator 1 before the frequency adjustment is set lower than the desired frequency, and the frequency adjustment is performed in the direction of increasing the frequency by removing masses such as weights and electrodes. Although performed, the frequency of the piezoelectric vibrator 1 before frequency adjustment is set higher than the desired frequency, the mass is added to the same position as the position where the mass is removed, and the frequency is adjusted in the direction of decreasing the frequency. You can also

以上のように、音叉腕２、３に形成された溝部５、６の質量を調整することにより、音叉腕２、３の先端部の質量調整に比べて、質量変化に対する周波数の変化が小さく、精度の良い圧電振動子の周波数調整が可能となる。このことから、特に小型の圧電振動子において、周波数調整の最終調整工程にこの方法を用いれば、高精度に周波数を合わせ込みをすることができる。   As described above, by adjusting the mass of the groove portions 5 and 6 formed in the tuning fork arms 2 and 3, the change in frequency with respect to the mass change is small compared to the mass adjustment of the tip portions of the tuning fork arms 2 and 3, It is possible to adjust the frequency of the piezoelectric vibrator with high accuracy. For this reason, particularly in a small piezoelectric vibrator, if this method is used in the final adjustment process of frequency adjustment, the frequency can be adjusted with high accuracy.

（変形例）
図５は、本発明の実施形態の変形例を示す説明図である。図５（ａ）では、周波数調整３の工程において、音叉腕２の底部電極８ｂには２回のレーザ光スポット１０ｃを照射し、音叉腕３の底部電極７ｂには１回のレーザ光スポット１０ｃを照射して周波数調整を終了している。つまり、音叉腕２と３では異なる質量で圧電振動子１の周波数が調整されている。２つの音叉腕２、３の質量は微量には異なるが、周波数調整量は２つの音叉腕を同質量で調整した場合のほぼ半分となり、周波数調整の精度を上げることができる。特に最終の周波数調整であれば、音叉腕の質量差は微量であり、圧電振動子１の振動に対して特性に影響をすることはない。 (Modification)
FIG. 5 is an explanatory diagram showing a modification of the embodiment of the present invention. In FIG. 5A, in the step of frequency adjustment 3, the bottom electrode 8b of the tuning fork arm 2 is irradiated with two laser beam spots 10c, and the bottom electrode 7b of the tuning fork arm 3 is irradiated with one laser beam spot 10c. The frequency adjustment is finished. That is, the tuning fork arms 2 and 3 adjust the frequency of the piezoelectric vibrator 1 with different masses. Although the masses of the two tuning fork arms 2 and 3 are slightly different, the frequency adjustment amount is almost half that when the two tuning fork arms are adjusted with the same mass, and the frequency adjustment accuracy can be improved. Particularly in the final frequency adjustment, the mass difference between the tuning fork arms is very small and does not affect the characteristics of the vibration of the piezoelectric vibrator 1.

図５（ｂ）では、周波数調整３の工程において、音叉腕２、３の底部電極７ｂ、８ｂに順次レーザ光スポット１０ｃを照射するピッチが、レーザ光のスポット径より小さく設定されている。このようにすると、レーザ光スポット１０ｃが重なり合い、２回目のレーザ光スポット１０ｃ照射以降、底部電極７ｂ、８ｂを除去する面積を小さくすることができる。このことから、除去する質量が少なくなり、圧電振動子１の周波数変化を小さくでき、精度の良い周波数調整が可能となる。   In FIG. 5B, in the step of frequency adjustment 3, the pitch for sequentially irradiating the bottom electrodes 7b and 8b of the tuning fork arms 2 and 3 with the laser beam spot 10c is set smaller than the spot diameter of the laser beam. In this way, the laser beam spots 10c overlap, and the area where the bottom electrodes 7b and 8b are removed after the second laser beam spot 10c irradiation can be reduced. Accordingly, the mass to be removed is reduced, the frequency change of the piezoelectric vibrator 1 can be reduced, and the frequency can be adjusted with high accuracy.

図５（ｃ）では、周波数調整３の工程において、音叉腕２、３の底部電極７ｂ、８ｂにレーザ光スポット１０ｃを照射するピッチを音叉基部４に向かい、順次大きくなるよう設定されている。このように、音叉基部４に近くなるに従い、１回のレーザ光スポット１０ｃの照射における周波数の変化は小さくなるため、精度の良い周波数調整が可能となる。   In FIG. 5 (c), in the step of frequency adjustment 3, the pitch at which the bottom electrodes 7b and 8b of the tuning fork arms 2 and 3 are irradiated with the laser beam spot 10c is set to gradually increase toward the tuning fork base 4. In this way, as the tuning fork base 4 is approached, the frequency change in one irradiation with the laser beam spot 10c becomes smaller, so that the frequency can be adjusted with high accuracy.

（第２の実施形態）
次に、本発明に係る圧電振動子の実施形態について説明する。図６（ｂ）はパッケージされた圧電振動子の構成を示す概略断面図である。収容容器２１内には圧電振動子１が接着固定され、収容容器２１内を真空雰囲気に保持し、リッド２４により封止され、パッケージされた圧電振動子２０となる。パッケージされた圧電振動子２０の周波数は第１の実施形態で述べた、周波数調整方法を用いて、精度よく調整されている。このように、第１の実施形態の圧電振動子の周波数調整方法を用いて、周波数を高精度に合わせ込んだ圧電振動子２０を提供できる。 (Second Embodiment)
Next, an embodiment of a piezoelectric vibrator according to the present invention will be described. FIG. 6B is a schematic cross-sectional view showing the configuration of the packaged piezoelectric vibrator. The piezoelectric vibrator 1 is bonded and fixed in the housing container 21, the inside of the housing container 21 is held in a vacuum atmosphere, and sealed with a lid 24 to form a packaged piezoelectric vibrator 20. The frequency of the packaged piezoelectric vibrator 20 is accurately adjusted using the frequency adjusting method described in the first embodiment. As described above, the piezoelectric vibrator 20 in which the frequency is adjusted with high accuracy can be provided by using the piezoelectric vibrator frequency adjusting method of the first embodiment.

（第３の実施形態）
次に、本発明に係る電子機器の実施形態について説明する。 (Third embodiment)
Next, an embodiment of an electronic device according to the present invention will be described.

図７は電子機器の構成を示す概略構成図である。電子機器３０には上記の第２の実施形態で説明した圧電振動子２０を備えている。上記の実施形態の圧電振動子２０を用いた電子機器３０として、携帯電話やデジタルカメラ、ビデオカメラなどの携帯用電子機器が挙げられる。これらの電子機器３０において圧電振動子２０は、基準信号源として用いられ、小型で精度の良い圧電振動子２０を備えることにより、小型で携帯性に優れ、特性の良好な電子機器を提供できる。   FIG. 7 is a schematic configuration diagram showing the configuration of the electronic device. The electronic device 30 includes the piezoelectric vibrator 20 described in the second embodiment. Examples of the electronic device 30 using the piezoelectric vibrator 20 of the above embodiment include portable electronic devices such as a mobile phone, a digital camera, and a video camera. In these electronic devices 30, the piezoelectric vibrator 20 is used as a reference signal source. By providing the piezoelectric vibrator 20 with a small size and high accuracy, an electronic device with a small size, excellent portability, and good characteristics can be provided.

（ａ）は第１の実施形態の圧電振動子の平面図、（ｂ）は同図（ａ）のＡ−Ａ断線に沿う断面図。(A) is a top view of the piezoelectric vibrator of 1st Embodiment, (b) is sectional drawing which follows the AA disconnection of the same figure (a). 圧電振動子の動作原理を説明する模式断面図。FIG. 3 is a schematic cross-sectional view illustrating the operating principle of a piezoelectric vibrator. 周波数調整工程を説明するフローチャート。The flowchart explaining a frequency adjustment process. 圧電振動子の周波数調整の調整方法を説明する平面図であり、（ａ）は周波数調整１、（ｂ）は周波数調整２、（ｃ）は周波数調整３に対応する平面図。It is a top view explaining the adjustment method of the frequency adjustment of a piezoelectric vibrator, (a) is frequency adjustment 1, (b) is frequency adjustment 2, (c) is a top view corresponding to frequency adjustment 3. （ａ）、（ｂ）、（ｃ）は第１の実施形態の変形例を示す平面図。(A), (b), (c) is a top view which shows the modification of 1st Embodiment. （ａ）は圧電振動子を収容容器に配置した平面図、（ｂ）はパッケージされた圧電振動子の概略断面図。FIG. 4A is a plan view in which a piezoelectric vibrator is disposed in a container, and FIG. 4B is a schematic cross-sectional view of a packaged piezoelectric vibrator. 電子機器の構成を示す構成図。The block diagram which shows the structure of an electronic device.

符号の説明Explanation of symbols

１…圧電振動子、２、３…音叉腕、４…音叉基部、５、６…溝部、７、８…励振電極、７ａ…側面電極、７ｂ…溝底部電極、８ａ…溝側面電極、８ｂ…溝底部電極、９…重り、１０ａ、１０ｂ、１０ｃ…レーザ光スポット、２０…パッケージされた圧電振動子、３０…電子機器。   DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibrator, 2, 3 ... Tuning fork arm, 4 ... Tuning fork base, 5, 6 ... Groove, 7, 8 ... Excitation electrode, 7a ... Side electrode, 7b ... Groove bottom electrode, 8a ... Groove side electrode, 8b ... Groove bottom electrode, 9 ... weight, 10a, 10b, 10c ... laser beam spot, 20 ... packaged piezoelectric vibrator, 30 ... electronic device.

Claims (7)

音叉腕と、前記音叉腕の一方の端部を接続する音叉基部と、を有し、前記音叉腕が屈曲振動を行う圧電振動子の製造方法であって、
前記音叉腕の厚さ方向に対向する面に、溝部を形成する工程と、
前記音叉腕の側面、および前記溝部のそれぞれに、励振電極を形成する工程と、
前記溝部に形成した前記励振電極の一部を除去する工程と、
を有し、
前記溝部を形成する工程は、底部および側面部を有する前記溝部を形成する工程であり、 前記励振電極を形成する工程は、前記溝部の前記底部に底部電極を形成し、前記溝部の前記側面部に溝側面電極を形成する工程を含み、
前記励振電極の一部を除去する工程は、前記底部電極の一部を除去する工程であることを特徴とする圧電振動子の製造方法。 A tuning fork arm and a tuning fork base that connects one end of the tuning fork arm, and a method of manufacturing a piezoelectric vibrator in which the tuning fork arm performs flexural vibration,
Forming a groove on a surface facing the thickness direction of the tuning fork arm;
Forming an excitation electrode on each of the side surface of the tuning fork arm and the groove;
Removing a part of the excitation electrode formed in the groove;
Have
The step of forming the groove portion is a step of forming the groove portion having a bottom portion and a side surface portion, and the step of forming the excitation electrode includes forming a bottom electrode on the bottom portion of the groove portion, and Forming a groove side electrode in
The method of manufacturing a piezoelectric vibrator, wherein the step of removing a part of the excitation electrode is a step of removing a part of the bottom electrode. 前記溝部に形成した励振電極の一部を除去する工程は、レーザ光照射によって行うことを特徴とする請求項１に記載の圧電振動子の製造方法。   The method for manufacturing a piezoelectric vibrator according to claim 1, wherein the step of removing a part of the excitation electrode formed in the groove is performed by laser light irradiation. 前記溝部に形成した励振電極の一部を除去する工程は、前記音叉腕の前記先端から前記音叉基部に向かう方向に順次レーザ光を照射して、前記底部電極の一部を除去する工程であることを特徴とする請求項２に記載の圧電振動子の製造方法。   The step of removing a part of the excitation electrode formed in the groove is a step of removing a part of the bottom electrode by sequentially irradiating a laser beam in a direction from the tip of the tuning fork arm to the tuning fork base. The method for manufacturing a piezoelectric vibrator according to claim 2. 前記溝部に形成した励振電極に順次レーザ光を照射するピッチが、レーザ光のスポット径より小さいことを特徴とする請求項３に記載の圧電振動子の製造方法。   The method for manufacturing a piezoelectric vibrator according to claim 3, wherein a pitch for sequentially irradiating the excitation electrode formed in the groove with the laser beam is smaller than a spot diameter of the laser beam. 前記溝部に形成した励振電極に順次レーザ光を照射するピッチは、レーザ光のスポット径より大きく、且つ前記音叉基部に向かい順次大きくなることを特徴とする請求項３に記載の圧電振動子の製造方法。   4. The piezoelectric vibrator according to claim 3, wherein a pitch for sequentially irradiating the excitation electrode formed in the groove with the laser beam is larger than a spot diameter of the laser beam and gradually increases toward the tuning fork base. Method. 前記励振電極の一部を除去する工程よりも前に、前記音叉腕の先端に形成された重りの一部を除去する工程を有することを特徴とする請求項１乃至５のいずれかに記載の圧電振動子の製造方法。   6. The method according to claim 1, further comprising a step of removing a part of a weight formed at a tip of the tuning fork arm before a step of removing a part of the excitation electrode. A method of manufacturing a piezoelectric vibrator. 請求項１乃至６のいずれか一項に記載の圧電振動子の製造方法を用い製造されたことを特徴とする圧電振動子。 The piezoelectric vibrator is characterized in that is manufactured using the manufacturing method of the piezoelectric vibrator according to any one of claims 1 to 6.
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