JP4683537B2 - Flammable gas sensor - Google Patents

Flammable gas sensor Download PDF

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JP4683537B2
JP4683537B2 JP2005081448A JP2005081448A JP4683537B2 JP 4683537 B2 JP4683537 B2 JP 4683537B2 JP 2005081448 A JP2005081448 A JP 2005081448A JP 2005081448 A JP2005081448 A JP 2005081448A JP 4683537 B2 JP4683537 B2 JP 4683537B2
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sensor
case
sensor body
gas
recess
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JP2006266714A (en
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昌英 安田
晴一 大谷
徹 石地
晃 赤松
幸男 中村
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Riken Keiki KK
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Description

本発明は、可燃性ガスと触媒層の触媒反応による発熱を電気信号として出力するガス検出センサに関するものである。   The present invention relates to a gas detection sensor that outputs heat generated by a catalytic reaction between a combustible gas and a catalyst layer as an electrical signal.

燃料電池の普及に伴ない、水素等の可燃性ガス用のセンサとして、特許文献１に記載されているように基板に、可燃性ガスとの接触により発熱する触媒層と、発熱部と、触媒層での温度変化を検出する検出部とを形成したものが提案されている。
このセンサーは、発熱部での熱損失を抑えるため、基板の発熱部、触媒層の領域が他の領域に比較して薄膜化され、消費電力を抑えるように構成されている。
特開平7-198646号公報 With the spread of fuel cells, as a sensor for a flammable gas such as hydrogen, as described in Patent Document 1, a catalyst layer that generates heat upon contact with a flammable gas, a heat generating portion, and a catalyst as described in Patent Document 1 A device in which a detection unit for detecting a temperature change in a layer is formed has been proposed.
In order to suppress heat loss at the heat generating portion, this sensor is configured so that the heat generating portion of the substrate and the area of the catalyst layer are made thinner than other regions to reduce power consumption.
JP-A-7-198646

しかしながら、基板に一部が薄膜化されているため、中心方向への外力により薄膜化された領域の境界に応力が集中し、この部分に割れが生じるなどの不都合があり、実用化への障害となっている。
本発明はこのような事情に鑑みてなされたものであってその目的とするところは、一部が薄膜化された熱型センサーを実用化するためのケース構造を備えた可燃性ガス検出センサを提供することである。 However, since a part of the substrate is thinned, stress concentrates on the boundary of the thinned region due to the external force toward the center, and there is a disadvantage such as cracking in this part. It has become.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a combustible gas detection sensor having a case structure for putting a thermal sensor partially thinned into practical use. Is to provide.

このような課題を達成するために本発明においては、被検ガスと接触して電気信号を発生する検出領域が基板に形成された平板状のセンサ本体と、前記センサ本体に前記被検ガスを接触させるように前記センサ本体を収容するケースとからなる可燃性ガスセンサーにおいて、前記ケースが、前記センサー本体を固定するとともに外部に信号を出力するリードを備えたケース本体と、前記ケース本体に装着可能で被検出ガス流入口が形成されている筒型状のカバーとからなり、前記ケース本体には前記センサ本体の角部の裏面を支持する環状部を有する凹部が形成され、前記センサー本体が裏面との間に空間を確保するように少なくともその対角となる２隅を前記環状部により支持され、かつ前記凹部の内周面との間に弾性層を介して固定されている In order to achieve such a problem, in the present invention, a flat sensor body in which a detection region that generates an electrical signal in contact with a test gas is formed on the substrate, and the test gas is supplied to the sensor body. In a combustible gas sensor comprising a case for housing the sensor body so as to come into contact with the case, the case includes a case body having a lead for fixing the sensor body and outputting a signal to the outside, and the case body A cylindrical cover having a gas inlet to be detected is formed, and the case main body is formed with a recess having an annular portion that supports the back surface of the corner of the sensor main body. the two corners to be at least a diagonal so as to secure a space between the back is supported by the annular portion, and is fixed via an elastic layer between the inner peripheral surface of said recess Are

本発明によれば、センサー基板の対角となる２隅が弾性層を介してケース本体に固定されているため、センサー基板を確実に保持しつつ、しかもセンサー基板に掛る応力を弾性層で吸収して薄膜部の損傷を防止ことができる。   According to the present invention, since the two diagonal corners of the sensor substrate are fixed to the case body via the elastic layer, the sensor substrate is securely held and the stress applied to the sensor substrate is absorbed by the elastic layer. Thus, damage to the thin film portion can be prevented.

そこで以下に本発明の詳細を図示した実施例に基づいて説明する。
図１は、本発明のケース構造が適用されるセンサー本体の一実施例を示すものであって、センサー本体１は、高い精度で凹部の形成が可能な材料、例えば異方性エッチングが容易なシリコン単結晶基板のセンサー基板２にエッチングにより検出部３の裏面側に凹部４を形成し、検出部３には蒸着などによりヒータ５と、その表面に可燃性ガスを酸化させるための触媒層６とを形成して構成されている。 Therefore, details of the present invention will be described below based on the illustrated embodiment.
FIG. 1 shows an embodiment of a sensor body to which the case structure of the present invention is applied. The sensor body 1 is made of a material capable of forming a recess with high accuracy, for example, anisotropic etching is easy. A recess 4 is formed on the back side of the detection unit 3 by etching in the sensor substrate 2 of a silicon single crystal substrate. The detection unit 3 has a heater 5 by vapor deposition or the like, and a catalyst layer 6 for oxidizing a combustible gas on the surface. And is formed.

なお、図中符号７、８は、リード部９、１０を介してヒータ５に接続する端子をそれぞれ示す。   In addition, the code | symbols 7 and 8 in a figure show the terminal connected to the heater 5 via the lead parts 9 and 10, respectively.

このように構成されたセンサー本体１は、ヒータ５が凹部４によりセンサー基板２の薄く形成された領域に配置されてるため、熱伝導による熱損失が可及的に小さくなる。   In the sensor body 1 configured as described above, the heater 5 is arranged in the thinly formed region of the sensor substrate 2 by the recess 4, so that heat loss due to heat conduction is minimized.

すなわち、端子７、８に通電してヒータ５を所定の温度に加熱すると、ヒータ５が所定の抵抗値を維持する一方、水素などの可燃性ガスが触媒層６に接触した場合には可燃性ガスが接触燃焼してヒータ５の温度が上昇してヒータ５の抵抗値が上昇する。端子７、８からヒータ５の抵抗値を検出することにより、可燃性ガスの濃度を知ることができる。   That is, when the heaters 5 are heated to a predetermined temperature by energizing the terminals 7 and 8, the heater 5 maintains a predetermined resistance value, but is combustible when a combustible gas such as hydrogen comes into contact with the catalyst layer 6. Gas contacts and burns, the temperature of the heater 5 rises, and the resistance value of the heater 5 rises. By detecting the resistance value of the heater 5 from the terminals 7 and 8, the concentration of the combustible gas can be known.

なお、上述の実施例においては、水素を検出する場合について説明したが、炭化水素など他の可燃性ガスを同様に検出することができる。   In the above-described embodiment, the case of detecting hydrogen has been described, but other combustible gases such as hydrocarbons can be detected in the same manner.

図２は、上述のセンサー本体１をセンサーとして実用的に使用可能とするための本発明の要部をなすケース構造の一実施例を示すものであって、ケース２０は、センサー本体１を固定するとともに外部に信号を出力するリード２１を備えたケース本体２２と、ケース本体２２に装着可能な筒型状のカバー２３とから構成されている。   FIG. 2 shows an embodiment of a case structure that forms a main part of the present invention so that the sensor body 1 described above can be used practically as a sensor. The case 20 fixes the sensor body 1. In addition, the case body 22 includes a lead 21 that outputs a signal to the outside, and a cylindrical cover 23 that can be attached to the case body 22.

ケース本体２２にはセンサー本体１の少なくとも対角となる２隅を固定可能で、かつセンサー本体の発熱領域、つまりヒータが形成されている領域の表裏面との間に空間２４を確保するように環状部２５が形成され、外部にカバー２３が係合する凸部２６を形成して構成されている。   At least two diagonal corners of the sensor body 1 can be fixed to the case body 22, and a space 24 is secured between the heat generation area of the sensor body, that is, the front and back surfaces of the area where the heater is formed. An annular portion 25 is formed, and a convex portion 26 with which the cover 23 engages is formed outside.

一方、カバー２３は一端に被検出ガス流入口となる開口２７を有する筒状に形成され、開口２７には通気性を備えた消炎フィルタ、この実施例では金属粉末の焼結板２８が装着されている。   On the other hand, the cover 23 is formed in a cylindrical shape having an opening 27 serving as a gas inlet to be detected at one end. The opening 27 is fitted with a flame extinguishing filter having air permeability, in this embodiment a sintered plate 28 of metal powder. ing.

このように構成されたケース本体１にセンサー本体１を固定する場合には、センサー本体１の複数の隅、好ましくは３隅以上を点線Ｃで示すようにケース本体１の内周面２９のサイズに合わせて切り欠く一方、内周面２９に接着剤層３０を形成する（図４）。   When the sensor main body 1 is fixed to the case main body 1 configured in this way, the size of the inner peripheral surface 29 of the case main body 1 is indicated by dotted lines C at a plurality of corners of the sensor main body 1, preferably three or more corners. The adhesive layer 30 is formed on the inner peripheral surface 29 (FIG. 4).

この状態でセンサー本体１の検出面側を上面とするようにして内周面２９に軽く押し込むと、センサー本体１の角部の裏面が環状部２５に支持され、また角部が接着剤層３０で保持される。この状態で図示しないリード線によりセンサー本体１と端子とケース本体２２のリード２１とを接続し、最後にカバー２３を装着することによりセンサーが完成する。   In this state, when the sensor body 1 is lightly pushed into the inner peripheral surface 29 with the detection surface side as the upper surface, the back surface of the corner portion of the sensor body 1 is supported by the annular portion 25 and the corner portion is the adhesive layer 30. Held in. In this state, the sensor body 1, the terminal, and the lead 21 of the case body 22 are connected by a lead wire (not shown), and finally the cover 23 is attached to complete the sensor.

もとより接着剤層は、若干の弾性を有するからセンサー本体１の温度変化による膨張を吸収するから検出部３の境界への応力集中を緩和することができる。   Of course, since the adhesive layer has some elasticity, it absorbs the expansion due to the temperature change of the sensor body 1, so that the stress concentration at the boundary of the detection unit 3 can be reduced.

本発明においては、センサー本体を固定するケース本体と、ケース本体に装着可能なカバーとに分離して構成したので、センサーを配置する場所や、必要とする応答速度に応じてカバーの内容積を変更したり、また図５に示したように開口２７の面積を絞るように内壁２３ａ’をテーパ状に形成したカバーを装着することによりセンサーの特性を、カバーの変更だけで対応することができる。   In the present invention, since the case main body for fixing the sensor main body and the cover that can be attached to the case main body are separated, the internal volume of the cover is set according to the location where the sensor is arranged and the required response speed. By changing the cover or by attaching a cover having an inner wall 23a ′ formed in a tapered shape so as to reduce the area of the opening 27 as shown in FIG. 5, the characteristics of the sensor can be dealt with only by changing the cover. .

図(イ)、(ロ)は、それぞれセンサー本体の一実施例を示す上面図と、センサー本体を構成する基板の断面構造を示す図である。FIGS. 1A and 1B are a top view showing an embodiment of the sensor main body and a cross-sectional structure of a substrate constituting the sensor main body, respectively. 図(イ)乃至(ハ)は、それぞれ同上センサー本体を収容するケース全体、ケース本体、及びカバーを示す図である。FIGS. 1A to 1C are views showing the entire case, the case main body, and the cover for accommodating the sensor main body, respectively. 図(イ)、(ロ)は、それぞれカバーを外して示す上面図と、断面図である。FIGS. 1A and 1B are a top view and a cross-sectional view, respectively, with the cover removed. 図３(ロ)における領域Ａを拡大して示す図である。It is a figure which expands and shows the area | region A in FIG. 本発明の他の実施例を示す断面図である。It is sectional drawing which shows the other Example of this invention.

符号の説明Explanation of symbols

１ センサー本体１
２ センサー基板
３ 検出領域
６ 触媒層
２０ ケース
２２ ケース本体２２
２３ カバー
２４ 空間
２５ 環状部
２７ 被検出ガス流入口となる開口
２８ 金属粉末の焼結板
３０ 接着剤層 1 Sensor body 1
2 sensor substrate 3 detection area 6 catalyst layer 20 case 22 case body 22
DESCRIPTION OF SYMBOLS 23 Cover 24 Space 25 Annular part 27 Opening used as detected gas inflow port 28 Sintered plate of metal powder 30 Adhesive layer

Claims (1)

被検ガスと接触して電気信号を発生する検出領域が基板に形成された平板状のセンサ本体と、前記センサ本体に前記被検ガスを接触させるように前記センサ本体を収容するケースとからなる可燃性ガスセンサーにおいて、
前記ケースが、前記センサー本体を固定するとともに外部に信号を出力するリードを備えたケース本体と、前記ケース本体に装着可能で被検出ガス流入口が形成されている筒型状のカバーとからなり、
前記ケース本体には前記センサ本体の角部の裏面を支持する環状部を有する凹部が形成され、前記センサー本体が裏面との間に空間を確保するように少なくともその対角となる２隅を前記環状部により支持され、かつ前記凹部の内周面との間に弾性層を介して固定されている可燃性ガスセンサー。 It comprises a flat sensor body having a detection region formed on a substrate in contact with a test gas and generating an electrical signal, and a case for housing the sensor body so that the test gas is brought into contact with the sensor body. In flammable gas sensor,
The case includes a case body having a lead for fixing the sensor body and outputting a signal to the outside, and a cylindrical cover that can be attached to the case body and has a gas inlet to be detected. ,
The case body is formed with a recess having an annular portion that supports the back surface of the corner of the sensor body, and at least two corners that are opposite to each other so as to secure a space between the sensor body and the back surface. A combustible gas sensor supported by an annular portion and fixed via an elastic layer between the inner peripheral surface of the recess .
JP2005081448A 2005-03-22 2005-03-22 Flammable gas sensor Expired - Fee Related JP4683537B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12007302B2 (en) 2020-10-14 2024-06-11 Hyundai Kefico Corporation Gas sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5403695B2 (en) * 2010-09-30 2014-01-29 フィガロ技研株式会社 Gas sensor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553449U (en) * 1978-10-06 1980-04-10
JPS5970951A (en) * 1982-10-15 1984-04-21 Toshiba Corp Gas sensitive element
JPH0282148A (en) * 1988-09-19 1990-03-22 Chino Corp Holding structure for element substrate
JPH02157643A (en) * 1988-12-10 1990-06-18 Fujikura Ltd Electronic component and lead wire connecting method for device incorporating this electronic component
JPH0283459U (en) * 1988-12-16 1990-06-28
JPH07198646A (en) * 1993-12-04 1995-08-01 Lg Electron Inc Low power-consumption-type thin film gas sensor and preparation thereof
JP2002174608A (en) * 2000-12-06 2002-06-21 Figaro Eng Inc Gas sensor and its manufacturing method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553449U (en) * 1978-10-06 1980-04-10
JPS5970951A (en) * 1982-10-15 1984-04-21 Toshiba Corp Gas sensitive element
JPH0282148A (en) * 1988-09-19 1990-03-22 Chino Corp Holding structure for element substrate
JPH02157643A (en) * 1988-12-10 1990-06-18 Fujikura Ltd Electronic component and lead wire connecting method for device incorporating this electronic component
JPH0283459U (en) * 1988-12-16 1990-06-28
JPH07198646A (en) * 1993-12-04 1995-08-01 Lg Electron Inc Low power-consumption-type thin film gas sensor and preparation thereof
JP2002174608A (en) * 2000-12-06 2002-06-21 Figaro Eng Inc Gas sensor and its manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12007302B2 (en) 2020-10-14 2024-06-11 Hyundai Kefico Corporation Gas sensor

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