JP4676260B2 - 光スイッチ内で使用される光シャトルシステム - Google Patents
光スイッチ内で使用される光シャトルシステム Download PDFInfo
- Publication number
- JP4676260B2 JP4676260B2 JP2005182821A JP2005182821A JP4676260B2 JP 4676260 B2 JP4676260 B2 JP 4676260B2 JP 2005182821 A JP2005182821 A JP 2005182821A JP 2005182821 A JP2005182821 A JP 2005182821A JP 4676260 B2 JP4676260 B2 JP 4676260B2
- Authority
- JP
- Japan
- Prior art keywords
- shuttle
- optical
- beams
- electrical terminal
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Description
Claims (4)
- 通信システム内で信号をルーティングする光シャトルシステムであって、
電源に接続された複数の端子と、
前記信号をルーティングする導波路を含み、所定の位置に駆動されるシャトルと、
前記各端子及び前記シャトルに接続され、前記シャトルを懸架するシリコンで形成される複数のビームと、を備え、
前記複数のビームの前記シャトルと接続される側の各端部位置は、前記電源から前記各端子に電圧が印加されない平衡状態で前記複数のビームがそれぞれ接続されている各端子側の端部位置よりも前記シャトルが駆動される方向にオフセットした位置となっており、
前記複数の端子は、正の電気端子群と負の電気端子群とを含み、
前記各電気端子群の間に前記電源から電圧が印加されると、電流は前記正の電気端子群から前記複数のビームを通って前記負の電気端子群に向かって流れて前記複数のビームを熱膨張させ、前記シャトルを前記所定の位置に駆動する、光シャトルシステム。 - 請求項1に記載の光シャトルシステムであって、
電流は前記正の電気端子群から一部の前記複数のビームを通って前記シャトルに向かって流れると共に、残余の前記複数のビームを通って前記シャトルから前記負の電気端子群に向かって流れて前記複数のビームを熱膨張させること、
を特徴とする光シャトルシステム。 - 前記シャトルは、前記複数のビームの長手方向と略垂直な方向に駆動される請求項1または2に記載の光シャトルシステム。
- シャトルを駆動した後に、シャトルをラッチするラッチを有することを特徴とする、請求項1から3のいずれか1項に記載の光シャトルシステム。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/879,094 US7116855B2 (en) | 2004-06-30 | 2004-06-30 | Optical shuttle system and method used in an optical switch |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006018264A JP2006018264A (ja) | 2006-01-19 |
JP4676260B2 true JP4676260B2 (ja) | 2011-04-27 |
Family
ID=35514005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005182821A Expired - Fee Related JP4676260B2 (ja) | 2004-06-30 | 2005-06-23 | 光スイッチ内で使用される光シャトルシステム |
Country Status (3)
Country | Link |
---|---|
US (1) | US7116855B2 (ja) |
JP (1) | JP4676260B2 (ja) |
CN (1) | CN100426029C (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2162801A4 (en) * | 2007-06-08 | 2011-03-30 | Res Triangle Inst | OPTICAL SWITCH |
US8686951B2 (en) * | 2009-03-18 | 2014-04-01 | HJ Laboratories, LLC | Providing an elevated and texturized display in an electronic device |
US8447148B1 (en) | 2010-03-29 | 2013-05-21 | Sandia Corporation | Latching micro optical switch |
JP2011248960A (ja) * | 2010-05-26 | 2011-12-08 | Hitachi Ltd | 磁気ディスク装置 |
DE102014217798A1 (de) | 2014-09-05 | 2016-03-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanische piezoelektrische Aktuatoren zur Realisierung hoher Kräfte und Auslenkungen |
CA2990937C (en) * | 2015-03-23 | 2021-01-12 | Aeponyx Inc. | Photonic switches, photonic switching fabrics and methods for data centers |
CN107678097B (zh) * | 2016-08-01 | 2019-11-12 | 华为技术有限公司 | 光开关和光交换*** |
CN107678096B (zh) | 2016-08-01 | 2019-11-29 | 华为技术有限公司 | 光开关和光交换*** |
CN109384191B (zh) * | 2018-09-26 | 2020-09-08 | 郑州轻工业学院 | 抑制位移输出端温升的电热微驱动器 |
JP7296743B2 (ja) * | 2019-02-26 | 2023-06-23 | 住友精密工業株式会社 | 位置調整機構及びそれを用いた光学装置 |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01502782A (ja) * | 1987-04-02 | 1989-09-21 | ブリテツシユ・テレコミユニケイシヨンズ・パブリツク・リミテツド・カンパニー | 放射線偏向アセンブリ |
JPH08248335A (ja) * | 1995-01-10 | 1996-09-27 | Commiss Energ Atom | オプトメカニカルの光学装置 |
JPH0990249A (ja) * | 1995-09-25 | 1997-04-04 | Olympus Optical Co Ltd | 光偏向子及びその製造方法 |
JPH10227986A (ja) * | 1997-02-17 | 1998-08-25 | Hitachi Ltd | 光スイッチとその製造方法及び光スイッチを用いた光通信機器 |
JPH1184277A (ja) * | 1997-06-23 | 1999-03-26 | Lucent Technol Inc | 自己整合機械式m×n光スイッチ |
US6463190B1 (en) * | 1998-10-16 | 2002-10-08 | Japan Aviation Electronics Industry Limited | Optical switch and method of making the same |
JP2004025437A (ja) * | 2002-05-10 | 2004-01-29 | Xerox Corp | 双安定微小電子機械システムに基づくシステム、その作動方法及びその製造方法 |
JP2004037717A (ja) * | 2002-07-02 | 2004-02-05 | Sony Corp | 熱駆動マイクロミラーおよび電子機器 |
US20040179768A1 (en) * | 2000-09-19 | 2004-09-16 | Newport Opticom, Inc. | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
JP2004287429A (ja) * | 2003-03-19 | 2004-10-14 | Xerox Corp | Memsウェーブガイド・シャトル光ラッチング・スイッチ |
US6832016B2 (en) * | 2000-04-13 | 2004-12-14 | Shipley Company, L.L.C. | Fiber array switch having micromachined front face with roller balls |
JP2004538507A (ja) * | 2001-07-05 | 2004-12-24 | インターナショナル・ビジネス・マシーンズ・コーポレーション | マイクロシステム・スイッチ |
US6853765B1 (en) * | 2003-03-31 | 2005-02-08 | The United States Of America As Represented By The Secretary Of The Navy | MEMS optical switch with thermal actuator |
US6898342B2 (en) * | 2002-08-08 | 2005-05-24 | Intel Corporation | Fiber-aligning optical switch |
US7054519B1 (en) * | 2003-03-10 | 2006-05-30 | Active Optical Networks, Inc. | Reconfigurable optical add drop multiplexers with integrated power equalization |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6990264B2 (en) * | 2000-09-19 | 2006-01-24 | Telkamp Arthur R | 1×N or N×1 optical switch having a plurality of movable light guiding microstructures |
JP3062881B2 (ja) * | 1998-05-12 | 2000-07-12 | 株式会社日立製作所 | 光スイッチ |
US20040027029A1 (en) * | 2002-08-07 | 2004-02-12 | Innovative Techology Licensing, Llc | Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS |
KR100558438B1 (ko) * | 2003-06-25 | 2006-03-10 | 삼성전기주식회사 | 광 스위치의 제조 방법 |
-
2004
- 2004-06-30 US US10/879,094 patent/US7116855B2/en not_active Expired - Fee Related
-
2005
- 2005-06-23 JP JP2005182821A patent/JP4676260B2/ja not_active Expired - Fee Related
- 2005-06-30 CN CNB2005100809924A patent/CN100426029C/zh not_active Expired - Fee Related
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01502782A (ja) * | 1987-04-02 | 1989-09-21 | ブリテツシユ・テレコミユニケイシヨンズ・パブリツク・リミテツド・カンパニー | 放射線偏向アセンブリ |
JPH08248335A (ja) * | 1995-01-10 | 1996-09-27 | Commiss Energ Atom | オプトメカニカルの光学装置 |
JPH0990249A (ja) * | 1995-09-25 | 1997-04-04 | Olympus Optical Co Ltd | 光偏向子及びその製造方法 |
JPH10227986A (ja) * | 1997-02-17 | 1998-08-25 | Hitachi Ltd | 光スイッチとその製造方法及び光スイッチを用いた光通信機器 |
JPH1184277A (ja) * | 1997-06-23 | 1999-03-26 | Lucent Technol Inc | 自己整合機械式m×n光スイッチ |
US6463190B1 (en) * | 1998-10-16 | 2002-10-08 | Japan Aviation Electronics Industry Limited | Optical switch and method of making the same |
US6832016B2 (en) * | 2000-04-13 | 2004-12-14 | Shipley Company, L.L.C. | Fiber array switch having micromachined front face with roller balls |
US20040179768A1 (en) * | 2000-09-19 | 2004-09-16 | Newport Opticom, Inc. | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
JP2004538507A (ja) * | 2001-07-05 | 2004-12-24 | インターナショナル・ビジネス・マシーンズ・コーポレーション | マイクロシステム・スイッチ |
JP2004025437A (ja) * | 2002-05-10 | 2004-01-29 | Xerox Corp | 双安定微小電子機械システムに基づくシステム、その作動方法及びその製造方法 |
JP2004037717A (ja) * | 2002-07-02 | 2004-02-05 | Sony Corp | 熱駆動マイクロミラーおよび電子機器 |
US6898342B2 (en) * | 2002-08-08 | 2005-05-24 | Intel Corporation | Fiber-aligning optical switch |
US7054519B1 (en) * | 2003-03-10 | 2006-05-30 | Active Optical Networks, Inc. | Reconfigurable optical add drop multiplexers with integrated power equalization |
JP2004287429A (ja) * | 2003-03-19 | 2004-10-14 | Xerox Corp | Memsウェーブガイド・シャトル光ラッチング・スイッチ |
US6853765B1 (en) * | 2003-03-31 | 2005-02-08 | The United States Of America As Represented By The Secretary Of The Navy | MEMS optical switch with thermal actuator |
Also Published As
Publication number | Publication date |
---|---|
JP2006018264A (ja) | 2006-01-19 |
CN100426029C (zh) | 2008-10-15 |
US20060002652A1 (en) | 2006-01-05 |
CN1715977A (zh) | 2006-01-04 |
US7116855B2 (en) | 2006-10-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4676260B2 (ja) | 光スイッチ内で使用される光シャトルシステム | |
US6996306B2 (en) | Electrostatically operated micro-optical devices and method for manufacturing thereof | |
JP5138144B2 (ja) | 双安定微小電子機械システムに基づくシステム、その作動方法及びその製造方法 | |
Yeow et al. | MEMS optical switches | |
US6360033B1 (en) | Optical switch incorporating therein shallow arch leaf springs | |
US6533947B2 (en) | Microelectromechanical mirror and mirror array | |
EP1486999B1 (en) | Seesaw MEMS switch for radio frequency and its manufacturing method | |
US7477812B2 (en) | System and method for providing fast, low voltage integrated optical elements | |
JP2005536031A (ja) | 電熱作動を使用する座屈梁双安定マイクロ電子機械スイッチ | |
JP2006159356A (ja) | 圧電駆動型mems装置 | |
KR100871268B1 (ko) | 써멀 마이크로 전기 기계 액추에이터 및 이를 위한 평면외 액추에이션 방법 | |
US8203775B1 (en) | MEMS bistable optical switch and methods for use thereof | |
JP2005519784A (ja) | 絶縁物質に具現されたmemsコームアクチュエータとその製造方法 | |
EP1346947A2 (en) | Electrostatically operated optical switching or attenuating devices | |
Freudenreich et al. | Simulation and realization of a novel micromechanical bi-stable switch | |
Michael et al. | A novel bistable two-way actuated out-of-plane electrothermal microbridge | |
US6591027B2 (en) | Bi-stable micro-actuator and optical switch | |
Biswas et al. | MEMS‐based Optical Switches | |
Takahashi et al. | A Silicon Micromachined $ f $-$\theta $ Microlens Scanner Array by Double-Deck Device Design Technique | |
KR20040103977A (ko) | 마이크로 압전 액추에이터 및 그 제조 방법 | |
JP2006221956A (ja) | ヒューズ | |
US6621184B1 (en) | Substrate based pendulum motor | |
WO2004072705A1 (en) | Bi-stable micro-actuator and optical switch | |
Fujita | OS06W0426 MEMS device characterization for repeated cyclic operation | |
ISHIKAWA et al. | Electrostatically actuated micromirror array assembled by using solder flip chip bonding and electro-thermal fuse-away tethers |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080618 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100601 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100811 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100831 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101126 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110104 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110127 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140204 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |