JP4654901B2 - Optical waveguide device, temperature measuring device, and temperature measuring method - Google Patents

Optical waveguide device, temperature measuring device, and temperature measuring method Download PDF

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JP4654901B2
JP4654901B2 JP2005360721A JP2005360721A JP4654901B2 JP 4654901 B2 JP4654901 B2 JP 4654901B2 JP 2005360721 A JP2005360721 A JP 2005360721A JP 2005360721 A JP2005360721 A JP 2005360721A JP 4654901 B2 JP4654901 B2 JP 4654901B2
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智恵 福田
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Sumitomo Electric Industries Ltd
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本発明は、温度を計測する装置および方法、ならびに、この温度計測に用いられる光導波路型デバイスに関するものである。   The present invention relates to an apparatus and method for measuring temperature, and an optical waveguide device used for temperature measurement.

光ファイバ等の光導波路を用いた温度計測技術として例えば特許文献１，２に開示されたものが知られている。特許文献１に開示された技術は、終端部に無反射処理を施した光ファイバの一端に光を入射させ、その光ファイバにおいて生じる後方散乱光のうち特定波長の光パワーを検出することで、その光ファイバにおける長手方法の温度分布を計測するものである。また、特許文献２に開示された技術は、測定対象からの放射光を光ファイバにより導光し、その導光した放射光のうちの互いに異なる２つの波長帯それぞれにおいて光パワーを検出して、これら２つの光パワーに基づいて測定対象の温度を計測するものである。
特許第２７２４２４６号公報 特許第３３２５７００号公報 As a temperature measurement technique using an optical waveguide such as an optical fiber, for example, those disclosed in Patent Documents 1 and 2 are known. The technique disclosed in Patent Document 1 allows light to be incident on one end of an optical fiber that has been subjected to non-reflective treatment at the terminal portion, and detects the optical power of a specific wavelength among the backscattered light generated in the optical fiber. The temperature distribution of the longitudinal method in the optical fiber is measured. In addition, the technique disclosed in Patent Document 2 guides the radiated light from the measurement target through an optical fiber, detects the optical power in each of two different wavelength bands of the guided radiated light, The temperature of the measurement object is measured based on these two optical powers.
Japanese Patent No. 2724246 Japanese Patent No. 3325700

これらの文献に記載された温度測定技術は、何れも、比較的広い温度範囲で温度を計測することができるものの、正確な温度の計測が困難である。本発明は、上記問題点を解消する為になされたものであり、より正確に温度を計測することができる温度計測装置および温度計測方法、ならびに、これらの装置または方法において好適に用いられ得る光導波路型デバイスを提供することを目的とする。   Any of the temperature measurement techniques described in these documents can measure the temperature in a relatively wide temperature range, but it is difficult to measure the temperature accurately. The present invention has been made to solve the above-described problems, and is a temperature measuring device and a temperature measuring method capable of measuring temperature more accurately, and an optical beam that can be suitably used in these devices or methods. An object is to provide a waveguide device.

本発明に係る温度計測装置または温度計測方法において用いられる光導波路型デバイスは、基板上に第１光導波路および第２光導波路が形成され、第１光導波路と第２光導波路とが第１光カプラおよび第２光カプラそれぞれにおいて光結合されて１個のマッハツェンダ干渉計を構成し、第１光カプラと第２光カプラとの間において第２光導波路の一部区間のクラッドの屈折率の温度依存性が他の光導波路部分と異なる、ことを特徴とする。また、第２光導波路の一部区間のクラッドが樹脂からなり、第１光導波路のコアおよびクラッド、第２光導波路のコア、ならびに、第２光導波路の一部区間以外のクラッドが石英ガラスを主成分とすることを特徴とする。
An optical waveguide device used in a temperature measuring apparatus or a temperature measuring method according to the present invention has a first optical waveguide and a second optical waveguide formed on a substrate, and the first optical waveguide and the second optical waveguide are the first light. Each of the coupler and the second optical coupler is optically coupled to constitute one Mach-Zehnder interferometer, and the temperature of the refractive index of the cladding in a partial section of the second optical waveguide between the first optical coupler and the second optical coupler. The dependency is different from other optical waveguide portions. Further, the clad in a partial section of the second optical waveguide is made of resin, and the core and clad of the first optical waveguide, the core of the second optical waveguide, and the clad other than the partial section of the second optical waveguide are made of quartz glass. It is characterized by having a main component.

本発明に係る光導波路型デバイスでは、第１光導波路および第２光導波路の何れか一方の一端に光が入射すると、マッハツェンダ干渉計を経て第１光導波路および第２光導波路それぞれの他端から光が出射されるが、第２光導波路の一部区間のクラッドの屈折率の温度依存性が他の光導波路部分と異なることから、そのときの各々の光透過特性は温度により変化する。このような光導波路型デバイスの特性を利用することで、正確に温度を計測することが可能となる。   In the optical waveguide device according to the present invention, when light is incident on one end of either the first optical waveguide or the second optical waveguide, the other end of each of the first optical waveguide and the second optical waveguide passes through the Mach-Zehnder interferometer. Although light is emitted, since the temperature dependence of the refractive index of the cladding in a partial section of the second optical waveguide is different from that of other optical waveguide portions, each light transmission characteristic at that time varies depending on the temperature. By utilizing the characteristics of such an optical waveguide device, the temperature can be accurately measured.

本発明に係る温度計測装置は、(1) 上記の光導波路型デバイスと、(2) 単色のレーザ光を出力する光源部と、(3) 光源部から出力された光を光導波路型デバイスの第１光導波路および第２光導波路の何れか一方の一端に入射させる入射光学系と、(4) 光導波路型デバイスの第１光導波路および第２光導波路それぞれの他端から出射される光のパワーを検出する検出部と、(5) 光導波路型デバイスの第１光導波路および第２光導波路それぞれの他端から検出部へ光を導く出射光学系と、(6) 検出部による検出結果に基づいて光導波路型デバイスの温度を求める解析部と、を備えることを特徴とする。また、光導波路デバイスが、第２光導波路の一部区間の長さが所定の温度範囲において、一端から第１光導波路の他端までの光の透過損失α １ および一端から第２光導波路の他端までの光の透過損失α ２ のうち一方が単調に増加し他方が単調に減少するように設定されており、解析部が、検出部による検出結果に基づいて透過損失α １ ，α ２ を求め、この求めた透過損失α １ ，α ２ に基づいて光導波路型デバイスの温度を求めることを特徴とする。また、入射光学系および出射光学系それぞれが、光導波路型デバイスに対して光を入出射する光ファイバを含むのが好適である。また、光源部が半導体レーザ素子を含むように構成してもよい。
A temperature measurement apparatus according to the present invention includes (1) the above-described optical waveguide device, (2) a light source unit that outputs monochromatic laser light, and (3) light output from the light source unit of the optical waveguide device. An incident optical system that enters one end of either the first optical waveguide or the second optical waveguide; and (4) light emitted from the other end of each of the first optical waveguide and the second optical waveguide of the optical waveguide device. A detection unit for detecting power, (5) an output optical system for guiding light from the other end of each of the first optical waveguide and the second optical waveguide of the optical waveguide device to the detection unit, and (6) a detection result by the detection unit And an analysis unit for determining the temperature of the optical waveguide device. Further, in the optical waveguide device, the transmission loss α1 from one end to the other end of the first optical waveguide and the second optical waveguide from the one end to the other end of the first optical waveguide in a predetermined temperature range of the length of a part of the second optical waveguide. One of the light transmission losses α 2 up to the other end is set so as to increase monotonously and the other decreases monotonously, and the analysis unit transmits the transmission losses α 1 , α 2 based on the detection result by the detection unit. And the temperature of the optical waveguide device is obtained based on the obtained transmission losses α 1 and α 2 . In addition, it is preferable that each of the incident optical system and the output optical system includes an optical fiber that inputs and outputs light with respect to the optical waveguide device. Moreover, you may comprise so that a light source part may include a semiconductor laser element.

本発明に係る温度計測方法は、(1) 上記の光導波路型デバイスを用い、(2) 第１光導波路および第２光導波路の何れか一方の一端に単色のレーザ光を入射させて、マッハツェンダ干渉計を経て第１光導波路の他端から出射する光のパワーＰ１を検出するとともに、マッハツェンダ干渉計を経て第２光導波路の他端から出射する光のパワーＰ２を検出し、(3) 光導波路デバイスにおいて、第２光導波路の一部区間の長さが所定の温度範囲において、一端から第１光導波路の他端までの光の透過損失α １ および一端から第２光導波路の他端までの光の透過損失α ２ のうち一方が単調に増加し他方が単調に減少するように設定しておき、(4) あらかじめ第１光導波路の光透過損失および第２光導波路の光透過損失と温度との関係を取得しておき、２つの光パワーＰ１，Ｐ２に基づいて透過損失α １ ，α ２ を求め、この求めた透過損失α １ ，α ２ に基づいて温度を計測する、ことを特徴とする。また、光ファイバを用いて光導波路型デバイスに対して光を入出射するのが好適である。 A temperature measurement method according to the present invention includes (1) using the above-described optical waveguide device, (2) making a monochromatic laser beam incident on one end of either the first optical waveguide or the second optical waveguide, The power P 1 of light emitted from the other end of the first optical waveguide through the interferometer is detected, and the power P 2 of light emitted from the other end of the second optical waveguide through the Mach-Zehnder interferometer is detected. ) In the optical waveguide device, the transmission loss α 1 from one end to the other end of the first optical waveguide and the other end of the second optical waveguide from one end to the other end of the second optical waveguide in a predetermined temperature range. and one is monotonically increasing of transmission loss alpha 2 of the light to the edge may be set as the other decreases monotonically, (4) advance first optical waveguide of the light transmission loss and the second optical waveguide of the light transmission Obtain the relationship between loss and temperature Transmission losses α 1 and α 2 are obtained based on the powers P 1 and P 2 , and the temperature is measured based on the obtained transmission losses α 1 and α 2 . In addition, it is preferable to use an optical fiber to input / output light to / from the optical waveguide device.

本発明によれば、より正確に温度を計測することができる。   According to the present invention, the temperature can be measured more accurately.

以下、添付図面を参照して、本発明を実施するための最良の形態を詳細に説明する。なお、図面の説明において同一の要素には同一の符号を付し、重複する説明を省略する。   The best mode for carrying out the present invention will be described below in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

図１は、本実施形態に係る温度計測装置１の構成図である。この図に示される温度計測装置１は、光導波路型デバイス１０、光源部２０、検出部３０、解析部４０、入射用光ファイバ５１および出射用光ファイバ６１，６２を備える。   FIG. 1 is a configuration diagram of a temperature measuring apparatus 1 according to the present embodiment. The temperature measurement apparatus 1 shown in this figure includes an optical waveguide device 10, a light source unit 20, a detection unit 30, an analysis unit 40, an incident optical fiber 51, and outgoing optical fibers 61 and 62.

光導波路型デバイス１０は、基板１００に第１光導波路１１１および第２光導波路１１２が形成されたものである。第１光導波路１１１と第２光導波路１１２とは、各々の光路の途中の２箇所において互いに光結合し得る間隔になっていて第１光カプラ１２１および第２光カプラ１２２を構成している。すなわち、第１光導波路１１１と第２光導波路１１２とは、第１光カプラ１２１および第２光カプラ１２２それぞれにおいて光結合されていて、マッハツェンダ干渉計を構成している。   In the optical waveguide device 10, a first optical waveguide 111 and a second optical waveguide 112 are formed on a substrate 100. The first optical waveguide 111 and the second optical waveguide 112 form a first optical coupler 121 and a second optical coupler 122 at an interval where they can be optically coupled to each other at two locations in the middle of each optical path. That is, the first optical waveguide 111 and the second optical waveguide 112 are optically coupled in the first optical coupler 121 and the second optical coupler 122, respectively, and constitute a Mach-Zehnder interferometer.

光源部２０は、光導波路型デバイス１０の第１光導波路１１１の一端（入射端）に入射させるべき光を出力する。光ファイバ５１は、光源部２０から出力された光を一端に入射し、その一端に入射した光を他端まで導光し、その他端から光を出射して光導波路型デバイス１０の第１光導波路１１１の入射端に入射させる。   The light source unit 20 outputs light to be incident on one end (incident end) of the first optical waveguide 111 of the optical waveguide device 10. The optical fiber 51 enters the light output from the light source unit 20 at one end, guides the light incident on the one end to the other end, emits the light from the other end, and outputs the first light of the optical waveguide device 10. The light is incident on the incident end of the waveguide 111.

検出部３０は、光導波路型デバイス１０の第１光導波路１１１および第２光導波路１１２それぞれの他端（出射端）から出射される光のパワーを検出する。光ファイバ６１は、光導波路型デバイス１０の第１光導波路１１１の出射端から出射された光を一端に入射し、その一端に入射した光を他端まで導光し、その他端から光を出射して検出部３０の受光素子に入射させる。また、光ファイバ６２は、光導波路型デバイス１０の第２光導波路１１２の出射端から出射された光を一端に入射し、その一端に入射した光を他端まで導光し、その他端から光を出射して検出部３０の受光素子に入射させる。   The detection unit 30 detects the power of light emitted from the other end (exit end) of each of the first optical waveguide 111 and the second optical waveguide 112 of the optical waveguide device 10. The optical fiber 61 enters light emitted from the emission end of the first optical waveguide 111 of the optical waveguide device 10 at one end, guides light incident on the one end to the other end, and emits light from the other end. Then, the light is incident on the light receiving element of the detection unit 30. Further, the optical fiber 62 enters light emitted from the emission end of the second optical waveguide 112 of the optical waveguide device 10 at one end, guides the light incident on the one end to the other end, and transmits light from the other end. Is incident on the light receiving element of the detection unit 30.

解析部４０は、光源部２０から出射され光導波路型デバイス１０の第１光導波路１１１の入射端に入射された光のパワーＰ１,in、光導波路型デバイス１０の第１光導波路１１１の出射端から出射され検出部３０により検出された光のパワーＰ１,out、および、光導波路型デバイス１０の第２光導波路１１２の出射端から出射され検出部３０により検出された光のパワーＰ２,outを入力する。 The analysis unit 40 outputs the power P 1, in of the light emitted from the light source unit 20 and incident on the incident end of the first optical waveguide 111 of the optical waveguide device 10, and the output of the first optical waveguide 111 of the optical waveguide device 10. The light power P 1, out emitted from the end and detected by the detection unit 30 and the light power P 2 emitted from the emission end of the second optical waveguide 112 of the optical waveguide device 10 and detected by the detection unit 30 Enter , out .

さらに、解析部４０は、入力光パワーＰ１,inおよび出力光パワーＰ１,outに基づいて第１光導波路１１１の入射端から第１光導波路１１１の出射端までの光の透過損失α１を求め、また、入力光パワーＰ１,inおよび出力光パワーＰ２,outに基づいて第１光導波路１１１の入射端から第２光導波路１１２の出射端までの光の透過損失α２を求める。そして、解析部４０は、上記の透過損失α１，α２に基づいて、光導波路型デバイス１０の温度を求める。 Further, the analyzing unit 40 transmits light loss α 1 from the incident end of the first optical waveguide 111 to the output end of the first optical waveguide 111 based on the input optical power P 1, in and the output optical power P 1, out. And a transmission loss α 2 of light from the incident end of the first optical waveguide 111 to the output end of the second optical waveguide 112 based on the input optical power P 1, in and the output optical power P 2, out. . And the analysis part 40 calculates | requires the temperature of the optical waveguide device 10 based on said transmission loss (alpha) 1 , (alpha) 2 .

なお、光ファイバ５１，６１，６２については、例えば４芯の光ファイバテープ心線を用いることができる。このようなテープファイバを用いると、各光ファイバの局所的な曲げなどによって各光ファイバの損失が変動したとしても、３本の光ファイバにほぼ同じ変動が加わることになる。   For the optical fibers 51, 61, 62, for example, a four-core optical fiber ribbon can be used. When such a tape fiber is used, even if the loss of each optical fiber fluctuates due to local bending of each optical fiber, substantially the same fluctuation is applied to the three optical fibers.

図２は、本実施形態に係る光導波路型デバイス１０の平面図である。光導波路型デバイス１０は、基板１００に第１光導波路１１１および第２光導波路１１２が形成されていて、第１光導波路１１１と第２光導波路１１２とが第１光カプラ１２１および第２光カプラ１２２それぞれにおいて光結合されていてマッハツェンダ干渉計を構成している。さらに、マッハツェンダ干渉計において第１光カプラ１２１と第２光カプラ１２２との間で、第２光導波路１１２の一部区間１１２Ｂのクラッドの屈折率の温度依存性は、第１光導波路１１１および第２光導波路１１２の他の光導波路部分１１２Ａ，１１２Ｃと異なる。このような光導波路型デバイス１０は、好適には、第２光導波路１１２の一部区間１１２Ｂを除く部分については、石英ガラスを主成分として、各々のコアに屈折率上昇材（例えばＧｅＯ２）が添加されたものである。一方、第２光導波路１１２の一部区間１１２Ｂのオーバークラッドは樹脂からなるのが好適である。 FIG. 2 is a plan view of the optical waveguide device 10 according to the present embodiment. In the optical waveguide device 10, the first optical waveguide 111 and the second optical waveguide 112 are formed on the substrate 100, and the first optical waveguide 111 and the second optical waveguide 112 are the first optical coupler 121 and the second optical coupler. Each of 122 is optically coupled to constitute a Mach-Zehnder interferometer. Further, in the Mach-Zehnder interferometer, the temperature dependence of the refractive index of the cladding in the partial section 112B of the second optical waveguide 112 between the first optical coupler 121 and the second optical coupler 122 is the first optical waveguide 111 and the first optical coupler 111. 2 Different from the other optical waveguide portions 112A and 112C of the optical waveguide 112. In such an optical waveguide device 10, preferably, the portion except the second section 112 </ b> B of the second optical waveguide 112 is mainly composed of quartz glass and has a refractive index increasing material (for example, GeO 2 ) in each core. Is added. On the other hand, the overcladding in the partial section 112B of the second optical waveguide 112 is preferably made of resin.

図３は、本実施形態に係る光導波路型デバイス１０における各所の光導波路の断面図である。同図（ａ）は、第２光導波路１１２の一部区間１１２Ｂを除く各所の光導波路（代表例として第１光導波路１１１）の断面図を示す。この図に示されるように、基板１００の上に矩形断面のコアが形成され、これらの上にオーバークラッド１３０が形成されて、光導波路が構成されている。これら各領域は石英ガラスを主成分とする。   FIG. 3 is a cross-sectional view of optical waveguides at various points in the optical waveguide device 10 according to the present embodiment. FIG. 4A is a cross-sectional view of an optical waveguide (a first example is the first optical waveguide 111 as a representative example) excluding a partial section 112 </ b> B of the second optical waveguide 112. As shown in this figure, a core having a rectangular cross section is formed on a substrate 100, and an over clad 130 is formed thereon, thereby forming an optical waveguide. Each of these regions is mainly composed of quartz glass.

同図（ｂ）は、第２光導波路１１２の一部区間１１２Ｂの断面図（図２中のＡ−Ａ’断面）を示す。この図に示されるように、基板１００の上に矩形断面のコアが形成され、これらの上にオーバークラッド１３１が形成されて、第２光導波路１１２の一部区間１１２Ｂが構成されている。基板１００は石英ガラスを主成分する。一方、オーバークラッド１３１は樹脂からなる。   FIG. 2B shows a cross-sectional view (A-A ′ cross section in FIG. 2) of a partial section 112 </ b> B of the second optical waveguide 112. As shown in this figure, a core having a rectangular cross section is formed on a substrate 100, and an over clad 131 is formed thereon, so that a partial section 112B of the second optical waveguide 112 is formed. The substrate 100 is mainly composed of quartz glass. On the other hand, the over clad 131 is made of resin.

次に、光導波路型デバイス１０の製造方法の一例を説明する。図４は、本実施形態に係る光導波路型デバイス１０の製造方法を説明する工程図である。初めに、石英ガラスからなる基板１００を用意し、プラズマＣＶＤ、ＦＨＤまたはスパッタ等の方法で、コアとなるべき所定厚のＧｅ添加石英ガラス膜１１０を基板１００上に堆積する（同図（ａ））。１回目のフォトリソグラフィーとリアクティブイオンエッチングで、このＧｅ添加石英ガラス膜１１０を所定幅および所定高になるように加工して、第１光導波路１１１および第２光導波路１１２それぞれのコアを形成する（同図（ｂ））。この上に更に、プラズマＣＶＤまたはＦＨＤにより、所定厚のオーバークラッド１３０を堆積する（図４（ｃ））。さらに、２回目のフォトリソグラフィーとリアクティブイオンエッチングで、第２光導波路１１２の一部区間上に、所定幅，所定長および所定深さの溝１３１Ａを形成する（図４（ｄ））。この溝１３１Ａに樹脂のモノマー（液状）を満たし、紫外線照射で硬化させて樹脂クラッド１３１を得る（図４（ｅ））。   Next, an example of a method for manufacturing the optical waveguide device 10 will be described. FIG. 4 is a process diagram illustrating a method for manufacturing the optical waveguide device 10 according to the present embodiment. First, a substrate 100 made of quartz glass is prepared, and a Ge-added quartz glass film 110 having a predetermined thickness to serve as a core is deposited on the substrate 100 by a method such as plasma CVD, FHD, or sputtering ((a) in the figure). ). In the first photolithography and reactive ion etching, this Ge-added quartz glass film 110 is processed so as to have a predetermined width and a predetermined height, thereby forming cores of the first optical waveguide 111 and the second optical waveguide 112, respectively. (Drawing (b)). Further, an over clad 130 having a predetermined thickness is deposited by plasma CVD or FHD (FIG. 4C). Further, a groove 131A having a predetermined width, a predetermined length, and a predetermined depth is formed on a partial section of the second optical waveguide 112 by the second photolithography and reactive ion etching (FIG. 4D). The groove 131A is filled with a resin monomer (liquid) and cured by ultraviolet irradiation to obtain a resin clad 131 (FIG. 4E).

次に、本実施形態に係る温度計測装置１および光導波路型デバイス１０の具体的構成および動作の一例について説明する。基板１００およびオーバークラッド１３０それぞれは石英ガラスからなる。第１光導波路１１１および第２光導波路１１２それぞれのコアは、Ｇｅが添加された石英ガラスからなる。第２光導波路１１２の一部区間１１２Ｂのオーバークラッド１３１は樹脂からなる。   Next, an example of a specific configuration and operation of the temperature measurement apparatus 1 and the optical waveguide device 10 according to the present embodiment will be described. Each of the substrate 100 and the overclad 130 is made of quartz glass. The cores of the first optical waveguide 111 and the second optical waveguide 112 are made of quartz glass to which Ge is added. The overclad 131 in the partial section 112B of the second optical waveguide 112 is made of resin.

純石英ガラスの屈折率は１.４４４である。Ｇｅ添加石英ガラスコアの屈折率は１.４４７である。オーバークラッド１３１の樹脂の屈折率は１.４５である。なお、これらの屈折率は、何れも、温度２５℃で波長１.５５μｍにおける値である。Ｇｅ添加石英ガラスおよび石英ガラスそれぞれの屈折率の温度依存性は８×１０−６ ／℃である。オーバークラッド１３１の樹脂の屈折率の温度依存性は−０.０００２／℃である。 The refractive index of pure quartz glass is 1.444. The refractive index of the Ge-added quartz glass core is 1.447. The refractive index of the resin of the over clad 131 is 1.45. These refractive indexes are all values at a temperature of 25 ° C. and a wavelength of 1.55 μm. The temperature dependence of the refractive index of each of the Ge-added quartz glass and quartz glass is 8 × 10 −6 / ° C. The temperature dependency of the refractive index of the resin of the over clad 131 is −0.0002 / ° C.

光導波路１１１，１１２それぞれのコアの断面形状は、７.５μｍ×７.５μｍの正方形である。光導波路１１１，１１２それぞれの曲線部分の最小曲率半径は２.５ｍｍである。光カプラ１２１，１２２ぞれぞれの波長１.５５μｍにおける分岐比は１：１である。第１光カプラ１２１と第２光カプラ１２２との間における第１光導波路１１１および第２光導波路１１２それぞれの直線部分の長さは５ｍｍである。第２光導波路１１２の一部区間１１２Ｂの長さは０.５ｍｍまたは５ｍｍである。   The cross-sectional shape of the core of each of the optical waveguides 111 and 112 is a square of 7.5 μm × 7.5 μm. The minimum curvature radius of the curved portion of each of the optical waveguides 111 and 112 is 2.5 mm. Each of the optical couplers 121 and 122 has a branching ratio of 1: 1 at a wavelength of 1.55 μm. The lengths of the straight portions of the first optical waveguide 111 and the second optical waveguide 112 between the first optical coupler 121 and the second optical coupler 122 are 5 mm. The length of the partial section 112B of the second optical waveguide 112 is 0.5 mm or 5 mm.

このように構成される光導波路型デバイス１０を用いて、図１に示されるような温度計測装置１を構成する。光源部２０は、波長１.５５μｍのレーザ光を出力する半導体レーザ素子を含む。また、検出部３０は受光素子としてフォトダイオードを含む。   A temperature measuring apparatus 1 as shown in FIG. 1 is configured using the optical waveguide device 10 configured as described above. The light source unit 20 includes a semiconductor laser element that outputs laser light having a wavelength of 1.55 μm. The detection unit 30 includes a photodiode as a light receiving element.

光源部２０から出力された波長１.５５μｍのレーザ光は、光ファイバ５１により導かれて光導波路型デバイス１０の第１光導波路１１１の入射端に入射する。光導波路型デバイス１０の第１光導波路１１１の入射端に入射した光は、マッハツェンダ干渉計を経て、第１光導波路１１１の出射端および第２光導波路１１２の出射端それぞれから出力される。第１光導波路１１１の出射端から出力された光は、光ファイバ６１により導かれて、検出部３０によりパワーが検出される。第２光導波路１１２の出射端から出力された光は、光ファイバ６２により導かれて、検出部３０によりパワーが検出される。   The laser light having a wavelength of 1.55 μm output from the light source unit 20 is guided by the optical fiber 51 and enters the incident end of the first optical waveguide 111 of the optical waveguide device 10. Light incident on the incident end of the first optical waveguide 111 of the optical waveguide device 10 is output from the exit end of the first optical waveguide 111 and the exit end of the second optical waveguide 112 through a Mach-Zehnder interferometer. The light output from the emission end of the first optical waveguide 111 is guided by the optical fiber 61 and the power is detected by the detection unit 30. The light output from the emission end of the second optical waveguide 112 is guided by the optical fiber 62 and the power is detected by the detection unit 30.

そして、解析部４０により、第１光導波路１１１の入射端に入射された光のパワーＰ１,in、第１光導波路１１１の出射端から出射された光のパワーＰ１,out、および、第２光導波路１１２の出射端から出射された光のパワーＰ２,outに基づいて、第１光導波路１１１の入射端から第１光導波路１１１の出射端までの光の透過損失α１、および、第１光導波路１１１の入射端から第２光導波路１１２の出射端までの光の透過損失α２、が求められ、さらに、これら透過損失α１，α２に基づいて光導波路型デバイス１０の温度が求められる。 Then, the analysis unit 40 causes the power P1 , in of the light incident on the incident end of the first optical waveguide 111, the power P1 , out of the light emitted from the output end of the first optical waveguide 111, and the first A transmission loss α 1 of light from the incident end of the first optical waveguide 111 to the emission end of the first optical waveguide 111 based on the power P 2, out of the light emitted from the emission end of the two optical waveguides 112, and A transmission loss α 2 of light from the incident end of the first optical waveguide 111 to the output end of the second optical waveguide 112 is obtained, and the temperature of the optical waveguide device 10 is further calculated based on these transmission losses α 1 and α 2. Is required.

図５は、本実施形態に係る光導波路型デバイス１０における透過損失α１，α２それぞれの温度依存性を示すグラフである。ここでは、第２光導波路１１２の一部区間１１２Ｂの長さは０.５ｍｍである。なお、この関係は、あらかじめ温度のわかった炉などを用いて測定しておく。温度を測定したい場所に光導波路型デバイス１０を設置して温度計測を行う。この場所の温度が５０℃〜８０℃の範囲にあることは、他の簡易な温度計によってわかっている。例えば、透過損失α１が８.８２ｄＢであって透過損失α２が０.７２ｄＢであるとき、温度が６６.５℃であることがわかる。 FIG. 5 is a graph showing the temperature dependence of the transmission losses α 1 and α 2 in the optical waveguide device 10 according to the present embodiment. Here, the length of the partial section 112B of the second optical waveguide 112 is 0.5 mm. This relationship is measured in advance using a furnace whose temperature is known. The optical waveguide device 10 is installed at a place where the temperature is to be measured, and the temperature is measured. It is known by other simple thermometers that the temperature of this place is in the range of 50 ° C. to 80 ° C. For example, when the transmission loss α 1 is 8.82 dB and the transmission loss α 2 is 0.72 dB, it can be seen that the temperature is 66.5 ° C.

図６は、本実施形態に係る光導波路型デバイス１０における透過損失α１，α２それぞれの温度依存性を示すグラフである。ここでは、第２光導波路１１２の一部区間１１２Ｂの長さは５ｍｍである。なお、この関係も、あらかじめ温度のわかった炉などを用いて測定しておく。温度を測定したい場所に光導波路型デバイス１０を設置して温度計測を行う。この場所の温度が５０℃〜８０℃の範囲にあることは、他の簡易な温度計によってわかっている。例えば、透過損失α１が２.８６ｄＢであって透過損失α２が３.３５ｄＢであるとき、温度が５９.９℃であることがわかる。 FIG. 6 is a graph showing the temperature dependence of the transmission losses α 1 and α 2 in the optical waveguide device 10 according to the present embodiment. Here, the length of the partial section 112B of the second optical waveguide 112 is 5 mm. This relationship is also measured in advance using a furnace whose temperature is known. The optical waveguide device 10 is installed at a place where the temperature is to be measured, and the temperature is measured. It is known by other simple thermometers that the temperature of this place is in the range of 50 ° C. to 80 ° C. For example, when the transmission loss α 1 is 2.86 dB and the transmission loss α 2 is 3.35 dB, it can be seen that the temperature is 59.9 ° C.

光ファイバ５１，６１，６２に、局所的な曲げなどによって過剰な損失が加わったとき、前述のごとく、出力光パワーＰ１,out，Ｐ２,outともに略同じだけの損失が加わり、図５の二つ透過損失α１，α１の曲線が上側に同じ損失量だけシフトする。しかし、透過損失α１，α１の曲線の傾きや損失差は変化しない。二つの透過損失α１，α１を測定しているので、このシフトは容易に補正することができる。 When excessive loss is applied to the optical fibers 51, 61, and 62 due to local bending or the like, as described above, almost the same loss is applied to the output optical powers P 1, out , P 2, out , as shown in FIG. The two transmission losses α 1 and α 1 are shifted upward by the same amount of loss. However, the slope of the transmission loss α 1 , α 1 curve and the loss difference do not change. Since the two transmission losses α 1 and α 1 are measured, this shift can be easily corrected.

本実施形態に係る温度計測装置１の構成図である。It is a lineblock diagram of temperature measuring device 1 concerning this embodiment. 本実施形態に係る光導波路型デバイス１０の平面図である。1 is a plan view of an optical waveguide device 10 according to the present embodiment. 本実施形態に係る光導波路型デバイス１０における各所の光導波路の断面図である。It is sectional drawing of the optical waveguide of each place in the optical waveguide device 10 which concerns on this embodiment. 本実施形態に係る光導波路型デバイス１０の製造方法を説明する工程図である。It is process drawing explaining the manufacturing method of the optical waveguide device 10 which concerns on this embodiment. 本実施形態に係る光導波路型デバイス１０における透過損失α１，α２それぞれの温度依存性を示すグラフである。It is a graph which shows the temperature dependence of each of transmission loss (alpha) 1 , (alpha) 2 in the optical waveguide device 10 which concerns on this embodiment. 本実施形態に係る光導波路型デバイス１０における透過損失α１，α２それぞれの温度依存性を示すグラフである。It is a graph which shows the temperature dependence of each of transmission loss (alpha) 1 , (alpha) 2 in the optical waveguide device 10 which concerns on this embodiment.

符号の説明Explanation of symbols

１…温度計測装置、１０…光導波路型デバイス、２０…光源部、３０…検出部、４０…解析部、５１…入射用光ファイバ、６１，６２…出射用光ファイバ、１００…基板、１１１…第１光導波路、１１２…第２光導波路、１２１…第１光カプラ、１２２…第２光カプラ、１３０…オーバークラッド。
DESCRIPTION OF SYMBOLS 1 ... Temperature measuring device, 10 ... Optical waveguide type device, 20 ... Light source part, 30 ... Detection part, 40 ... Analysis part, 51 ... Optical fiber for incidence, 61, 62 ... Optical fiber for output, 100 ... Substrate, 111 ... 1st optical waveguide, 112 ... 2nd optical waveguide, 121 ... 1st optical coupler, 122 ... 2nd optical coupler, 130 ... Over clad.

Claims (5)

基板上に第１光導波路および第２光導波路が形成され、前記第１光導波路と前記第２光導波路とが第１光カプラおよび第２光カプラそれぞれにおいて光結合されて１個のマッハツェンダ干渉計を構成し、前記第１光カプラと前記第２光カプラとの間において前記第２光導波路の一部区間のクラッドの屈折率の温度依存性が他の光導波路部分と異なり、前記第２光導波路の前記一部区間のクラッドが樹脂からなり、前記第１光導波路のコアおよびクラッド、前記第２光導波路のコア、ならびに、前記第２光導波路の前記一部区間以外のクラッドが石英ガラスを主成分とする光導波路型デバイスと、
単色のレーザ光を出力する光源部と、
前記光源部から出力された光を前記光導波路型デバイスの前記第１光導波路および前記第２光導波路の何れか一方の一端に入射させる入射光学系と、
前記光導波路型デバイスの前記第１光導波路および前記第２光導波路それぞれの他端から出射される光のパワーを検出する検出部と、
前記光導波路型デバイスの前記第１光導波路および前記第２光導波路それぞれの他端から前記検出部へ光を導く出射光学系と、
前記検出部による検出結果に基づいて前記光導波路型デバイスの温度を求める解析部と、
を備え、
前記光導波路デバイスが、前記第２光導波路の前記一部区間の長さが所定の温度範囲において、前記一端から前記第１光導波路の前記他端までの光の透過損失α １ および前記一端から前記第２光導波路の前記他端までの光の透過損失α ２ のうち一方が単調に増加し他方が単調に減少するように設定されており、
前記解析部が、前記検出部による検出結果に基づいて前記透過損失α １ ，α ２ を求め、この求めた透過損失α １ ，α ２ に基づいて前記光導波路型デバイスの温度を求める、
ことを特徴とする温度計測装置。 A first optical waveguide and a second optical waveguide are formed on a substrate, and the first optical waveguide and the second optical waveguide are optically coupled in the first optical coupler and the second optical coupler, respectively, so that one Mach-Zehnder interferometer is formed. And the temperature dependence of the refractive index of the cladding in a partial section of the second optical waveguide between the first optical coupler and the second optical coupler differs from the other optical waveguide portions, and the second optical The cladding of the partial section of the waveguide is made of resin, and the core and cladding of the first optical waveguide, the core of the second optical waveguide, and the cladding other than the partial section of the second optical waveguide are made of quartz glass. An optical waveguide device as a main component;
A light source unit that outputs monochromatic laser light;
An incident optical system that makes light output from the light source unit incident on one end of either the first optical waveguide or the second optical waveguide of the optical waveguide device;
A detector for detecting the power of light emitted from the other end of each of the first optical waveguide and the second optical waveguide of the optical waveguide device;
An emission optical system for guiding light from the other end of each of the first optical waveguide and the second optical waveguide of the optical waveguide device to the detection unit;
An analysis unit for obtaining a temperature of the optical waveguide device based on a detection result by the detection unit;
Bei to give a,
In the optical waveguide device, the length of the partial section of the second optical waveguide is within a predetermined temperature range, and light transmission loss α 1 from the one end to the other end of the first optical waveguide One of the light transmission losses α 2 to the other end of the second optical waveguide is set so as to increase monotonously and the other decreases monotonously.
The analysis unit obtains the transmission losses α 1 and α 2 based on the detection result by the detection unit , and obtains the temperature of the optical waveguide device based on the obtained transmission losses α 1 and α 2 .
A temperature measuring device characterized by that. 前記光源部が半導体レーザ素子を含むことを特徴とする請求項１記載の温度計測装置。   The temperature measuring apparatus according to claim 1, wherein the light source unit includes a semiconductor laser element. 前記入射光学系および前記出射光学系それぞれが、前記光導波路型デバイスに対して光を入出射する光ファイバを含む、ことを特徴とする請求項１または２記載の温度計測装置。   The temperature measuring apparatus according to claim 1, wherein each of the incident optical system and the output optical system includes an optical fiber that inputs and outputs light to and from the optical waveguide device. 基板上に第１光導波路および第２光導波路が形成され、前記第１光導波路と前記第２光導波路とが第１光カプラおよび第２光カプラそれぞれにおいて光結合されて１個のマッハツェンダ干渉計を構成し、前記第１光カプラと前記第２光カプラとの間において前記第２光導波路の一部区間のクラッドの屈折率の温度依存性が他の光導波路部分と異なり、前記第２光導波路の前記一部区間のクラッドが樹脂からなり、前記第１光導波路のコアおよびクラッド、前記第２光導波路のコア、ならびに、前記第２光導波路の前記一部区間以外のクラッドが石英ガラスを主成分とする光導波路型デバイスを用い、
前記第１光導波路および前記第２光導波路の何れか一方の一端に単色のレーザ光を入射させて、前記マッハツェンダ干渉計を経て前記第１光導波路の他端から出射する光のパワーＰ１を検出するとともに、前記マッハツェンダ干渉計を経て前記第２光導波路の他端から出射する光のパワーＰ２を検出し、
前記光導波路デバイスにおいて、前記第２光導波路の前記一部区間の長さが所定の温度範囲において、前記一端から前記第１光導波路の前記他端までの光の透過損失α １ および前記一端から前記第２光導波路の前記他端までの光の透過損失α ２ のうち一方が単調に増加し他方が単調に減少するように設定しておき、
あらかじめ前記第１光導波路の光透過損失および前記第２光導波路の光透過損失と温度との関係を取得しておき、２つの光パワーＰ１，Ｐ２に基づいて前記透過損失α １ ，α ２ を求め、この求めた透過損失α １ ，α ２ に基づいて温度を計測する、
ことを特徴とする温度計測方法。 A first optical waveguide and a second optical waveguide are formed on a substrate, and the first optical waveguide and the second optical waveguide are optically coupled in the first optical coupler and the second optical coupler, respectively, so that one Mach-Zehnder interferometer is formed. And the temperature dependence of the refractive index of the cladding in a partial section of the second optical waveguide between the first optical coupler and the second optical coupler differs from the other optical waveguide portions, and the second optical The cladding of the partial section of the waveguide is made of resin, and the core and cladding of the first optical waveguide, the core of the second optical waveguide, and the cladding other than the partial section of the second optical waveguide are made of quartz glass. Using an optical waveguide device as the main component,
A monochromatic laser beam is incident on one end of one of the first optical waveguide and the second optical waveguide, and a power P 1 of light emitted from the other end of the first optical waveguide via the Mach-Zehnder interferometer is obtained. and detects detects the power P 2 of the light emitted from the other end of said second optical waveguide via said Mach-Zehnder interferometer,
In the optical waveguide device, in the length predetermined temperature range of a partial section of the second optical waveguide, from the transmission loss alpha 1 and the one end of the light to the other end of the first optical waveguide from said one end One of the light transmission losses α 2 to the other end of the second optical waveguide is set so that one increases monotonously and the other monotonously decreases.
The relationship between the light transmission loss of the first optical waveguide and the light transmission loss of the second optical waveguide and the temperature is acquired in advance, and the transmission losses α 1 and α are based on the two optical powers P 1 and P 2. 2 and the temperature is measured based on the obtained transmission losses α 1 and α 2 .
A temperature measurement method characterized by that. 光ファイバを用いて前記光導波路型デバイスに対して光を入出射することを特徴とする請求項４記載の温度計測方法。
5. The temperature measuring method according to claim 4, wherein light is incident on and emitted from the optical waveguide device using an optical fiber.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02171629A (en) * 1988-12-23 1990-07-03 Matsushita Electric Works Ltd Light waveguide type temperature sensor
JPH08334639A (en) * 1995-06-07 1996-12-17 Hitachi Cable Ltd Mach-zehnder optical circuit
JPH0961609A (en) * 1995-08-25 1997-03-07 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide type wavelength filter
JPH10227930A (en) * 1997-02-13 1998-08-25 Nippon Telegr & Teleph Corp <Ntt> Temperature-independent optical waveguide and its manufacture
JP2000066252A (en) * 1998-08-13 2000-03-03 Lucent Technol Inc Polymer and method material for optical switching and modulation
WO2001027689A1 (en) * 1999-10-15 2001-04-19 Hitachi, Ltd. Optically functional element and production method and application therefor
JP2004333158A (en) * 2003-04-30 2004-11-25 Alps Electric Co Ltd Mach-zehnder interferometer type temperature sensor
JP2005525594A (en) * 2002-05-13 2005-08-25 ティーム、フォトニクス Integrated optical element including optical cladding and method of manufacturing the same

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02171629A (en) * 1988-12-23 1990-07-03 Matsushita Electric Works Ltd Light waveguide type temperature sensor
JPH08334639A (en) * 1995-06-07 1996-12-17 Hitachi Cable Ltd Mach-zehnder optical circuit
JPH0961609A (en) * 1995-08-25 1997-03-07 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide type wavelength filter
JPH10227930A (en) * 1997-02-13 1998-08-25 Nippon Telegr & Teleph Corp <Ntt> Temperature-independent optical waveguide and its manufacture
JP2000066252A (en) * 1998-08-13 2000-03-03 Lucent Technol Inc Polymer and method material for optical switching and modulation
WO2001027689A1 (en) * 1999-10-15 2001-04-19 Hitachi, Ltd. Optically functional element and production method and application therefor
JP2005525594A (en) * 2002-05-13 2005-08-25 ティーム、フォトニクス Integrated optical element including optical cladding and method of manufacturing the same
JP2004333158A (en) * 2003-04-30 2004-11-25 Alps Electric Co Ltd Mach-zehnder interferometer type temperature sensor

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