JP4654738B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP4654738B2 JP4654738B2 JP2005108385A JP2005108385A JP4654738B2 JP 4654738 B2 JP4654738 B2 JP 4654738B2 JP 2005108385 A JP2005108385 A JP 2005108385A JP 2005108385 A JP2005108385 A JP 2005108385A JP 4654738 B2 JP4654738 B2 JP 4654738B2
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- JP
- Japan
- Prior art keywords
- porous plate
- plasma
- stage
- plasma processing
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
Description
孔質板43をその厚み方向(上下方向)に貫通して形成されている。多孔質板43の直径が220mm又は320mm程度の場合、スリットSの長さL1は望ましくは3〜10mm程度、巾L2は0.5mm〜1.0mm程度であり、また望ましくは、スリットSは120mm以下のピッチL3で形成されている。
2 処理室
3 下部電極
4 上部電極(対向電極)
31 ステージ
41 本体部
43 多孔質板
45 支持部材
45’ 突出部
A プラズマ発生空間(プラズマ処理空間)
S スリット
T ガス供給口
W 処理対象物
Claims (1)
- 下部電極であるステージと、このステージの上方にあってこのステージに対向する上部電極である対向電極と、このステージと対向電極が配設される処理室とを備え、前記ステージと前記対向電極の間のプラズマ処理空間にプラズマ発生用ガスを供給してプラズマを発生させて前記ステージに載置された処理対象物のプラズマ処理を行うプラズマ処理装置であって、
前記対向電極が、ガス供給口が形成された本体部と、このガス供給口を塞ぐようにこの本体部の下側に配設されたセラミックス粒子の焼結体から成る通気性を有する円板状の多孔質板と、この多孔質板の外周縁部を支持する支持部材とを備え、前記多孔質板の前記外周縁部にその厚み方向に貫通するスリットを前記多孔質板の半径方向を長手方向にしてピッチをおいて複数形成し、かつ前記多孔質板の前記外周縁部の前記本体部との間には平面視してリング状の弾性材から成る緩衝部材を配設し、
前記支持部材は前記多孔質板をその内部に収納する収納体であって、内方へ突出する突出部を備え、この突出部により前記多孔質板の前記外周縁部を下方から支持し、
前記突出部は、前記支持部材に収納された前記多孔質板の前記スリットよりも内方へ張り出して前記スリットを閉塞することを特徴とするプラズマ処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005108385A JP4654738B2 (ja) | 2005-04-05 | 2005-04-05 | プラズマ処理装置 |
EP06731469A EP1869692A1 (en) | 2005-04-05 | 2006-04-04 | Plasma processing apparatus |
TW095111954A TW200701346A (en) | 2005-04-05 | 2006-04-04 | Plasma processing apparatus |
KR1020077021575A KR101198543B1 (ko) | 2005-04-05 | 2006-04-04 | 플라즈마 처리 장치 |
CN200680010657XA CN101151703B (zh) | 2005-04-05 | 2006-04-04 | 等离子体处理设备 |
PCT/JP2006/307522 WO2006107114A1 (en) | 2005-04-05 | 2006-04-04 | Plasma processing apparatus |
US11/887,758 US20090266488A1 (en) | 2005-04-05 | 2006-04-04 | Plasma Processing Apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005108385A JP4654738B2 (ja) | 2005-04-05 | 2005-04-05 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006287152A JP2006287152A (ja) | 2006-10-19 |
JP4654738B2 true JP4654738B2 (ja) | 2011-03-23 |
Family
ID=36646036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005108385A Active JP4654738B2 (ja) | 2005-04-05 | 2005-04-05 | プラズマ処理装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090266488A1 (ja) |
EP (1) | EP1869692A1 (ja) |
JP (1) | JP4654738B2 (ja) |
KR (1) | KR101198543B1 (ja) |
CN (1) | CN101151703B (ja) |
TW (1) | TW200701346A (ja) |
WO (1) | WO2006107114A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE602006011140D1 (de) * | 2005-04-05 | 2010-01-28 | Krosaki Harima Corp | Gas-show-erplatte für eine plasmaverarbeitungsvorrichtung |
KR101380861B1 (ko) * | 2007-11-09 | 2014-04-03 | 참엔지니어링(주) | 플라즈마 에칭 챔버 |
JP4590597B2 (ja) * | 2008-03-12 | 2010-12-01 | 国立大学法人東北大学 | シャワープレートの製造方法 |
WO2011139598A2 (en) * | 2010-04-27 | 2011-11-10 | Cummins Filtration Ip, Inc. | High water content fuel detection system |
JP5809396B2 (ja) * | 2010-06-24 | 2015-11-10 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
US9129778B2 (en) | 2011-03-18 | 2015-09-08 | Lam Research Corporation | Fluid distribution members and/or assemblies |
US11637002B2 (en) * | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
KR101776430B1 (ko) * | 2015-12-14 | 2017-09-07 | 현대자동차주식회사 | 차세대 연료펌프 일체형 디젤 연료필터 |
CN112673450A (zh) * | 2018-07-30 | 2021-04-16 | 诺信公司 | 用于利用等离子体的工件加工的*** |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06206015A (ja) * | 1993-01-07 | 1994-07-26 | Nippon Seisen Co Ltd | 流体分散エレメント |
WO1996031997A1 (fr) * | 1995-04-07 | 1996-10-10 | Seiko Epson Corporation | Equipement de traitement de surface |
JP2002231638A (ja) * | 2001-01-31 | 2002-08-16 | Kyocera Corp | シャワーヘッド及びその製造方法 |
JP2003007682A (ja) * | 2001-06-25 | 2003-01-10 | Matsushita Electric Ind Co Ltd | プラズマ処理装置用の電極部材 |
JP2003073839A (ja) * | 2001-08-27 | 2003-03-12 | Mitsubishi Heavy Ind Ltd | 膜評価用基板ホルダ及び膜評価方法 |
JP2003282462A (ja) * | 2002-03-27 | 2003-10-03 | Kyocera Corp | シャワープレートとその製造方法及びそれを用いたシャワーヘッド |
JP2004059990A (ja) * | 2002-07-29 | 2004-02-26 | Matsushita Electric Ind Co Ltd | 成膜装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4595452A (en) * | 1985-03-11 | 1986-06-17 | Oerlikon-Buhrle U.S.A. Inc. | Method and apparatus for plasma etching |
JPH01103828A (ja) * | 1987-10-16 | 1989-04-20 | Fuji Electric Corp Res & Dev Ltd | プラズマcvd装置 |
JPH02101740A (ja) * | 1988-10-11 | 1990-04-13 | Anelva Corp | プラズマエッチング装置 |
JP3220619B2 (ja) * | 1995-05-24 | 2001-10-22 | 松下電器産業株式会社 | ガス伝熱プラズマ処理装置 |
US6159297A (en) * | 1996-04-25 | 2000-12-12 | Applied Materials, Inc. | Semiconductor process chamber and processing method |
US6051286A (en) * | 1997-02-12 | 2000-04-18 | Applied Materials, Inc. | High temperature, high deposition rate process and apparatus for depositing titanium layers |
US6364957B1 (en) * | 1997-10-09 | 2002-04-02 | Applied Materials, Inc. | Support assembly with thermal expansion compensation |
JP3637827B2 (ja) * | 2000-01-26 | 2005-04-13 | 松下電器産業株式会社 | プラズマ処理装置 |
US6444040B1 (en) * | 2000-05-05 | 2002-09-03 | Applied Materials Inc. | Gas distribution plate |
JP4540250B2 (ja) * | 2001-04-25 | 2010-09-08 | 信越化学工業株式会社 | プラズマ装置用電極板 |
US6942753B2 (en) * | 2003-04-16 | 2005-09-13 | Applied Materials, Inc. | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition |
DE602006011140D1 (de) * | 2005-04-05 | 2010-01-28 | Krosaki Harima Corp | Gas-show-erplatte für eine plasmaverarbeitungsvorrichtung |
-
2005
- 2005-04-05 JP JP2005108385A patent/JP4654738B2/ja active Active
-
2006
- 2006-04-04 WO PCT/JP2006/307522 patent/WO2006107114A1/en active Application Filing
- 2006-04-04 CN CN200680010657XA patent/CN101151703B/zh not_active Expired - Fee Related
- 2006-04-04 EP EP06731469A patent/EP1869692A1/en not_active Withdrawn
- 2006-04-04 KR KR1020077021575A patent/KR101198543B1/ko not_active IP Right Cessation
- 2006-04-04 TW TW095111954A patent/TW200701346A/zh unknown
- 2006-04-04 US US11/887,758 patent/US20090266488A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06206015A (ja) * | 1993-01-07 | 1994-07-26 | Nippon Seisen Co Ltd | 流体分散エレメント |
WO1996031997A1 (fr) * | 1995-04-07 | 1996-10-10 | Seiko Epson Corporation | Equipement de traitement de surface |
JP2002231638A (ja) * | 2001-01-31 | 2002-08-16 | Kyocera Corp | シャワーヘッド及びその製造方法 |
JP2003007682A (ja) * | 2001-06-25 | 2003-01-10 | Matsushita Electric Ind Co Ltd | プラズマ処理装置用の電極部材 |
JP2003073839A (ja) * | 2001-08-27 | 2003-03-12 | Mitsubishi Heavy Ind Ltd | 膜評価用基板ホルダ及び膜評価方法 |
JP2003282462A (ja) * | 2002-03-27 | 2003-10-03 | Kyocera Corp | シャワープレートとその製造方法及びそれを用いたシャワーヘッド |
JP2004059990A (ja) * | 2002-07-29 | 2004-02-26 | Matsushita Electric Ind Co Ltd | 成膜装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200701346A (en) | 2007-01-01 |
US20090266488A1 (en) | 2009-10-29 |
CN101151703A (zh) | 2008-03-26 |
EP1869692A1 (en) | 2007-12-26 |
KR20080005360A (ko) | 2008-01-11 |
WO2006107114A1 (en) | 2006-10-12 |
JP2006287152A (ja) | 2006-10-19 |
CN101151703B (zh) | 2010-11-10 |
KR101198543B1 (ko) | 2012-11-06 |
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