JP4653789B2 - Surface coated cubic boron nitride sintered body tool - Google Patents
Surface coated cubic boron nitride sintered body tool Download PDFInfo
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- JP4653789B2 JP4653789B2 JP2007208271A JP2007208271A JP4653789B2 JP 4653789 B2 JP4653789 B2 JP 4653789B2 JP 2007208271 A JP2007208271 A JP 2007208271A JP 2007208271 A JP2007208271 A JP 2007208271A JP 4653789 B2 JP4653789 B2 JP 4653789B2
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Description
本発明は、立方晶窒化硼素（ｃＢＮ）を主成分とした焼結体（以下、ｃＢＮ焼結体と称する）を母材とする切削工具材料の改良に関し、耐摩耗性および靭性の双方に優れる表面被覆ｃＢＮ焼結体工具に関するものである。 The present invention relates to improvement of a cutting tool material based on a sintered body mainly composed of cubic boron nitride (cBN) (hereinafter referred to as a cBN sintered body), and is excellent in both wear resistance and toughness. The present invention relates to a surface-coated cBN sintered body tool.
従来のｃＢＮ焼結体工具は、ダイヤモンドに次ぐ高硬度と高熱伝導率により、過酷な切削条件下で使用されてきた。しかし、工具刃先の熱的・機械的な摩耗・欠損により、高速・高能率の分野において十分な寿命を達成できていないのが現状である。 Conventional cBN sintered tools have been used under severe cutting conditions due to their high hardness and high thermal conductivity after diamond. However, due to thermal and mechanical wear and chipping of the tool edge, the current situation is that a sufficient life is not achieved in the field of high speed and high efficiency.
そしてｃＢＮ焼結体での切削において、耐摩耗性および耐欠損性をさらに向上させるため、たとえば特開平８−１１９７７４号公報、特開平１−９６０８３号公報、特開平１−９６０８４号公報などに開示されているように、ｃＢＮ焼結体にＴｉＮ、ＴｉＡｌＮなどを被覆する方法が提案されている。
しかし、被覆膜に高耐摩耗性を要求すると靭性が低下し、靭性を要求すると耐摩耗性が低下するということから、断続切削時に被覆膜が初期に剥離・欠損するという問題が生じている。 However, if high wear resistance is required for the coating film, the toughness is reduced, and if toughness is required, the wear resistance is reduced. Yes.
それゆえ、本発明の目的は、良好な耐摩耗性および靭性を有し、断続切削時においても被覆膜の剥離および欠損を抑制できる表面被覆ｃＢＮ焼結体工具を提供することである。 Therefore, an object of the present invention is to provide a surface-coated cBN sintered body tool that has good wear resistance and toughness and can suppress peeling and chipping of the coating film even during intermittent cutting.
本願発明者らは、被覆膜の耐摩耗性の向上と靭性の向上との両立を実現するため、被覆膜中の内部応力について研究した。一般に、イオンプレーティング法により形成された被覆膜中には、圧縮応力が発生する。このような残留圧縮応力は被覆膜の耐摩耗性に悪影響を及ぼすことが問題であるが、残留圧縮応力を低下させると靭性が低下するということが判明した。さらに、種々検討した結果、被覆膜中の圧縮応力を膜内で変化させることにより、耐摩耗性および靭性の双方が向上することがわかった。 The inventors of the present application have studied internal stress in the coating film in order to realize both improvement in wear resistance and improvement in toughness of the coating film. Generally, compressive stress is generated in a coating film formed by an ion plating method. Although it is a problem that such residual compressive stress adversely affects the wear resistance of the coating film, it has been found that reducing the residual compressive stress reduces toughness. Furthermore, as a result of various studies, it was found that both wear resistance and toughness are improved by changing the compressive stress in the coating film within the film.
特に、靭性を必要とする場合には、被覆膜中の圧縮応力を母材側から表面側に向かって連続的あるいは段階的に増加させることが効果的であり、耐摩耗性を必要とする場合には被覆膜中の圧縮応力を母材側から表面側に向けて連続的あるいは段階的に低下させることが効果的であることが判明した。 In particular, when toughness is required, it is effective to increase the compressive stress in the coating film continuously or stepwise from the base material side to the surface side, and wear resistance is required. In some cases, it has been found effective to reduce the compressive stress in the coating film continuously or stepwise from the base material side to the surface side.
また、被覆膜中の圧縮応力が大きくなるほど靭性が良好となり、圧縮応力が小さくなるほど耐摩耗性が良好となることが判明した。 Further, it has been found that as the compressive stress in the coating film increases, the toughness becomes better, and as the compressive stress decreases, the wear resistance becomes better.
それゆえ、本発明の一の表面被覆ｃＢＮ焼結体工具は、ｃＢＮを２０体積％以上有するｃＢＮ焼結体からなる部分を有する母材と、母材のｃＢＮ焼結体上に形成された被覆膜とを備え、その被覆膜は、ＩＶａ、Ｖａ、ＶＩａ族元素、Ａｌ（アルミニウム）、Ｂ（ボロン）およびＧｅ（ゲルマニウム）よりなる群から選ばれる１種以上の窒化物、炭化物、炭窒化物および酸化物のいずれかを含む材質を有し、かつ−１０ＧＰａ以上０ＧＰａ以下の内部応力を有し、かつ表面側と裏面側である母材側とで１ＧＰａ以上の応力差を有し、かつ被覆膜の内部応力は表面側から母材側へ向けて圧縮応力が増加するよう変化している。なお、内部応力において「−」の記号は圧縮応力であることを示している。
本発明の他の表面被覆ｃＢＮ焼結体工具は、焼入れ鋼切削用の表面被覆ｃＢＮ焼結体工具であって、ｃＢＮを２０体積％以上有するｃＢＮ焼結体からなる部分を有する母材と、母材のｃＢＮ焼結体上に形成された被覆膜とを備え、その被覆膜は、ＩＶａ、Ｖａ、ＶＩａ族元素、Ａｌ、ＢおよびＧｅよりなる群から選ばれる１種以上の窒化物、炭化物、炭窒化物および酸化物のいずれかを含む材質を有し、かつ−１０ＧＰａ以上０ＧＰａ以下の内部応力を有し、かつ表面側と裏面側である母材側とで１ＧＰａ以上の応力差を有し、かつ被覆膜の内部応力は母材側から表面側へ向けて圧縮応力が増加するよう変化している。
Therefore, one surface-coated cBN sintered body tool of the present invention includes a base material having a portion made of a cBN sintered body having 20% by volume or more of cBN, and a substrate formed on the cBN sintered body of the base material. A covering film, and the covering film includes at least one nitride, carbide, charcoal selected from the group consisting of IVa, Va, VIa group elements, Al (aluminum), B (boron), and Ge (germanium) It has a material containing any of nitride and oxide, has an internal stress of -10 GPa or more and 0 GPa or less, and has a stress difference of 1 GPa or more between the surface side and the back side of the base material side , The internal stress of the coating film changes so that the compressive stress increases from the surface side toward the base material side . In the internal stress, the symbol “−” indicates a compressive stress.
Another surface-coated cBN sintered body tool of the present invention is a surface-coated cBN sintered body tool for cutting hardened steel, and a base material having a portion made of a cBN sintered body having 20% by volume or more of cBN, A coating film formed on the base material cBN sintered body, and the coating film is one or more nitrides selected from the group consisting of IVa, Va, VIa group elements, Al, B and Ge , Having a material containing any of carbide, carbonitride, and oxide, having an internal stress of −10 GPa to 0 GPa, and having a stress difference of 1 GPa or more between the front side and the back side of the base material The internal stress of the coating film changes so that the compressive stress increases from the base material side to the surface side.
このように被覆膜の表面側と母材側とで１ＧＰａ以上の応力差を有するよう内部応力を変化させたことにより、耐摩耗性および靭性の双方に優れた表面被覆ｃＢＮ焼結体工具を得ることができる。なお、応力差が１ＧＰａ未満では、被覆膜中で内部応力を変化させる効果が十分に得られない。また、ｃＢＮの含有率を２０体積％以上としたのは、２０体積％未満では欠損が生じやすくなるからである。 Thus, by changing the internal stress so as to have a stress difference of 1 GPa or more between the surface side of the coating film and the base material side, a surface-coated cBN sintered body tool excellent in both wear resistance and toughness is obtained. Obtainable. If the stress difference is less than 1 GPa, the effect of changing the internal stress in the coating film cannot be obtained sufficiently. The reason why the content of cBN is set to 20% by volume or more is that defects are likely to occur when the content is less than 20% by volume.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、被覆膜の膜厚は０．５μｍ以上１０μｍ以下である。これは被覆膜の厚みが０．５μｍ未満では被覆の効果が少なく、１０μｍを超えると被覆膜が剥離しやすくなるからである。 In the above surface-coated cBN sintered body tool, the thickness of the coating film is preferably 0.5 μm or more and 10 μm or less. This is because when the thickness of the coating film is less than 0.5 μm, the coating effect is small, and when it exceeds 10 μm, the coating film tends to peel off.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、被覆膜の内部応力は、母材側から表面側へ向けて連続的あるいは段階的に圧縮応力が増加するよう変化している。これにより、靭性が顕著に向上する。これは、表面側ほど高い内部圧縮応力が導入されることにより、表面に入った微小クラックの進展が抑えられるため、チッピングなどの欠けを防ぐことができるためと考えられる。 In the above surface-coated cBN sintered body tool, the internal stress of the coating film preferably changes so that the compressive stress increases continuously or stepwise from the base material side to the surface side. Thereby, toughness improves notably. This is presumably because chipping and other chipping can be prevented because the introduction of higher internal compressive stress toward the surface side suppresses the progress of microcracks that enter the surface.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、被覆膜の内部応力は、表面側から母材側へ向けて連続的あるいは段階的に圧縮応力が増加するよう変化している。これにより、耐摩耗性が顕著に向上する。これは、表面側ほど低い内部圧縮応力を導入することで膜表面が柔らかくなり、切削時の溶着が剥がれるときに膜全体が剥がれなくなる（膜の表面近傍のみが剥がれる）ため耐摩耗性が向上するものと考えられる。 In the above surface-coated cBN sintered body tool, the internal stress of the coating film preferably changes so that the compressive stress increases continuously or stepwise from the surface side toward the base material side. Thereby, abrasion resistance improves notably. This is because the surface of the film becomes softer by introducing lower internal compressive stress on the surface side, and the entire film cannot be peeled off when the welding at the time of cutting is peeled off (only the vicinity of the surface of the film is peeled off), thereby improving the wear resistance. It is considered a thing.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、母材と被覆膜との間に、ＩＶａ族元素の窒化物、炭化物、炭窒化物および酸化物のいずれかの材質を有する第１の薄膜がさらに備えられている。これにより、被覆膜と母材との付着強度が向上するため、より高性能が期待される。 Preferably, in the above surface-coated cBN sintered body tool, the first thin film having a material of any of the group IVa element nitride, carbide, carbonitride, and oxide between the base material and the coating film Is further provided. Thereby, since the adhesion strength between the coating film and the base material is improved, higher performance is expected.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、被覆膜の表面上に、ＩＶａ族元素の窒化物、炭化物、炭窒化物および酸化物のいずれかの材質を有する第２の薄膜がさらに備えられている。これにより、より高性能が期待される。 In the above-mentioned surface-coated cBN sintered body tool, preferably, a second thin film having a material of any of group IVa element nitride, carbide, carbonitride and oxide is further provided on the surface of the coating film. It has been. As a result, higher performance is expected.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、ｃＢＮ焼結体は、ｃＢＮを３５体積％以上８５体積％以下含み、かつｃＢＮ粒子同士を結合するための結合材を含み、結合材は以下のａ、ｂ、ｃ、ｄおよびｅよりなる群から選ばれる１種以上とＡｌ化合物と不可避不純物とを含む。 Preferably in the above-mentioned surface-coated cBN sintered body tool, the cBN sintered body includes 35% by volume to 85% by volume of cBN, and includes a binder for bonding the cBN particles. 1 or more types chosen from the group which consists of a, b, c, d, and e, Al compound, and an unavoidable impurity are included.
ａ：ＩＶａ、Ｖａ、ＶＩａ族元素
ｂ：ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物
ｃ：ＩＶａ、Ｖａ、ＶＩａ族元素の硼化物
ｄ：ＩＶａ、Ｖａ、ＶＩａ族元素の炭化物
ｅ：ＩＶａ、Ｖａ、ＶＩａ族元素、ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物、硼化物、炭化物よりなる群から選ばれる２種以上からなる固溶体
このように母材の材料を適切に選択することにより、切削性能の著しい向上を図ることができる。ｃＢＮの含有率が８５体積％を超えると、母材の耐摩耗性が悪くなり、これが被覆膜の耐摩耗性に影響を与えるため、耐摩耗性の向上が妨げられる。またｃＢＮの含有率が３５体積％未満となると、ｃＢＮ焼結体の特徴が高い硬度であるにもかかわらず、その硬度が低下してしまい、たとえば焼入れ鋼のような高い硬度の被削材を高速で切削するための強度が不足してしまう。
a: group IVa, Va, VIa element b: nitride of group IVa, Va, VIa element c: boride of group IVa, Va, VIa element d: carbide of group IVa, Va, VIa element e: IVa, Va, Solid solution consisting of two or more kinds selected from the group consisting of nitrides, borides and carbides of group VIa elements, IVa, Va, and group VIa elements. Improvements can be made. When the content of cBN exceeds 85% by volume, the wear resistance of the base material is deteriorated, which affects the wear resistance of the coating film, so that the improvement of the wear resistance is hindered. Further, when the content of cBN is less than 35% by volume, the hardness of the cBN sintered body is reduced despite the fact that the hardness is high. For example, a high hardness work material such as hardened steel is used. Insufficient strength to cut at high speed.
上記の表面被覆ｃＢＮ焼結体工具において好ましくは、ｃＢＮ粒子の平均粒径が４μｍ以下である。 In the above surface-coated cBN sintered body tool, the average particle size of the cBN particles is preferably 4 μm or less.
これにより、切削性能の著しい向上を図ることができる。ｃＢＮ粒子の平均粒径が４μｍを超えると、ｃＢＮ粒子と結合材との接触面積が減少し、ｃＢＮ粒子と結合材との結合力が弱まることにより、たとえば焼入れ鋼のような高い硬度の被削材を高速で切削するための強度が不足する。 Thereby, the remarkable improvement of cutting performance can be aimed at. When the average particle size of the cBN particles exceeds 4 μm, the contact area between the cBN particles and the binder is reduced, and the bonding force between the cBN particles and the binder is weakened. Insufficient strength to cut material at high speed.
以上説明したように本発明の表面被覆ｃＢＮ焼結体工具では、被覆膜の表面側と母材側とで−１０ＧＰａ以上０ＧＰａ以下の範囲内で１ＧＰａ以上の応力差を有するように内部応力を変化させたことにより、耐摩耗性および靭性の双方に優れた表面被覆ｃＢＮ焼結体工具を得ることができる。これにより、本発明の表面被覆ｃＢＮ焼結体工具は、ドリル、エンドミル、フライス用スローアウェイチップ、切削用刃先交換型チップ、メタルソー、刃切り工具、リーマー、タップなどの切削工具などに良好に適用することが可能である。 As described above, in the surface-coated cBN sintered body tool of the present invention, internal stress is applied so that the surface side of the coating film and the base material side have a stress difference of 1 GPa or more within a range of −10 GPa to 0 GPa. By changing it, a surface-coated cBN sintered body tool excellent in both wear resistance and toughness can be obtained. As a result, the surface-coated cBN sintered body tool of the present invention is well applied to cutting tools such as drills, end mills, milling throwaway inserts, cutting edge replaceable inserts, metal saws, cutting tools, reamers, taps, and the like. Is possible.
以下、本発明の実施の形態について図に基づいて説明する。
図１は、本発明の一実施の形態における表面被覆ｃＢＮ焼結体工具の部分断面図である。図１を参照して、母材２は、工具刃先の少なくとも切削に関与する部分においてｃＢＮを２０体積％以上有するｃＢＮ焼結体よりなっている。この母材２のｃＢＮ焼結体部分の表面上に被覆膜１が形成されている。この被覆膜１は、ＩＶａ、Ｖａ、ＶＩａ族元素、Ａｌ、ＢおよびＧｅならびにこれらの任意の組合せの合金の窒化物、炭化物、炭窒化物および酸化物から選ばれた１種以上を含む化合物よりなり、かつ−１０ＧＰａ以上０ＧＰａ以下の内部応力を有し、かつ表面側と裏面側である母材側とで１ＧＰａ以上の応力差を有している。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a partial cross-sectional view of a surface-coated cBN sintered body tool according to an embodiment of the present invention. Referring to FIG. 1,
なお、被覆膜１の内部応力は、たとえばＸ線回折法により測定される。この測定方法の詳細は、たとえば「ＰＶＤ・ＣＶＤ皮膜の基礎と応用」、（社）表面技術協会編、山本恒雄発行、ｐｐ．１５６−１６４に記載されている。
The internal stress of the
また被覆膜１の膜厚は、０．５μｍ以上１０μｍ以下であることが好ましい。
被覆膜１の内部応力は、母材側から表面側へ向けて図２に示すように連続的に、または図３に示すように段階的に圧縮応力が増加するよう変化していてもよい。これにより、表面被覆ｃＢＮ焼結体工具の靭性の向上が著しくなる。また被覆膜１の内部応力は、母材側から表面側に向けて図４に示すように連続的に、または図５に示すように段階的に圧縮応力が減少するように変化していてもよい。これにより、表面被覆ｃＢＮ焼結体工具の耐摩耗性の向上が顕著となる。
Moreover, it is preferable that the film thickness of the
The internal stress of the
また図６に示すように母材２と被覆膜１との間には、ＩＶａ族元素の窒化物、炭化物、炭窒化物および酸化物のいずれかの材質を有する付着強化層３ａが設けられていることが好ましい。また図７に示すように被覆膜１の表面上に、ＩＶａ族元素の窒化物、炭化物、炭窒化物および酸化物のいずれかの材質を有する薄膜３ｂが形成されていてもよい。
Further, as shown in FIG. 6, an adhesion strengthening layer 3a having any one of a nitride, carbide, carbonitride, and oxide of an IVa group element is provided between the
母材２のｃＢＮ焼結体部分は、ｃＢＮを３５体積％以上８５体積％以下含み、かつｃＢＮ粒子同士を結合するための結合材を含んでおり、結合材は、以下のａ、ｂ、ｃ、ｄおよびｅよりなる群から選ばれる１種以上とＡｌ化合物と不可避不純物とを含んでいることが好ましい。
The cBN sintered body portion of the
ａ：ＩＶａ、Ｖａ、ＶＩａ族元素
ｂ：ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物
ｃ：ＩＶａ、Ｖａ、ＶＩａ族元素の硼化物
ｄ：ＩＶａ、Ｖａ、ＶＩａ族元素の炭化物
ｅ：ＩＶａ、Ｖａ、ＶＩａ族元素、ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物、硼化物、炭化物よりなる群から選ばれる２種以上からなる固溶体
またｃＢＮ粒子の平均粒径は４μｍ以下であることが好ましい。
a: group IVa, Va, VIa element b: nitride of group IVa, Va, VIa element c: boride of group IVa, Va, VIa element d: carbide of group IVa, Va, VIa element e: IVa, Va, Solid solution consisting of two or more selected from the group consisting of nitrides, borides and carbides of group VIa elements, IVa, Va, and group VIa elements. The average particle size of the cBN particles is preferably 4 μm or less.
以下、本発明の実施例について詳細に述べる。
（実施例１）
まず、超硬合金製ポットおよびボールを用いて、結合材材料であるＴｉＮ、Ｔｉ、Ａｌを混合し、結合材粉末を得た。次に、結合材粉末とｃＢＮ粉末を混ぜ合わせ、Ｍｏ（モリブデン）製容器に充填し、圧力５ＧＰａ、温度１４００℃で２０分間焼結した。この焼結体を、ＩＳＯ規格ＳＮＧＮ１２０４０８の形状に加工し、ｃＢＮ焼結体母材を得た。そのｃＢＮ焼結体母材のｃＢＮ含有率は６５体積％であり、ｃＢＮ粒子の平均粒径は２．５μｍであった。
Examples of the present invention will be described in detail below.
Example 1
First, using a cemented carbide pot and balls, TiN, Ti, and Al, which are binder materials, were mixed to obtain a binder powder. Next, the binder powder and the cBN powder were mixed, filled in a Mo (molybdenum) container, and sintered at a pressure of 5 GPa and a temperature of 1400 ° C. for 20 minutes. This sintered body was processed into the shape of ISO standard SNGN120408 to obtain a cBN sintered body base material. The cBN content of the cBN sintered body base material was 65% by volume, and the average particle size of the cBN particles was 2.5 μm.
その母材に表３に示す膜厚３．５μｍの各種のＴｉＣＮの被覆を、公知のアーク式イオンプレーティング法を用いて施した。また、その被覆を施した各サンプルを使って高炭素クロム軸受鋼丸棒の切削を表１の条件で行ない、切削後の各サンプルの逃げ面摩耗量を測定した。 The base material was coated with various types of TiCN having a film thickness of 3.5 μm shown in Table 3 using a known arc ion plating method. Further, the high carbon chromium bearing steel round bar was cut under the conditions shown in Table 1 using each of the coated samples, and the flank wear amount of each sample after cutting was measured.
次に、上記各サンプルと同条件で被覆を施したサンプルの靭性試験を行なった。靭性試験は、合金工具鋼丸棒で６本のＶ字形状の溝を有する被削材の外周切削を表２の条件で行ない、被覆膜が正常摩耗以外に剥離するまでの時間を測定することで、靭性の評価とした。 Next, a toughness test was performed on the samples coated under the same conditions as the above samples. The toughness test is performed by cutting the outer periphery of a work material having six V-shaped grooves with an alloy tool steel round bar under the conditions shown in Table 2, and measuring the time until the coating film peels in addition to normal wear. Therefore, it was set as evaluation of toughness.
表３に、各サンプルの被覆膜の応力分布と、切削試験を行なった場合の逃げ面摩耗量（耐摩耗性）および膜剥離までの切削時間（靭性）を評価した結果とを示す。 Table 3 shows the stress distribution of the coating film of each sample and the results of evaluating the flank wear amount (wear resistance) and the cutting time (toughness) until film peeling when a cutting test is performed.
表３の結果より、ＴｉＣＮ層内で内部応力を−１０ＧＰａ以上０ＧＰａ以下の範囲内で１ＧＰａ以上変化させた本発明例のサンプル１〜４では、耐摩耗性および靭性の双方において優れていることがわかる。一方、内部応力の変化のないサンプル５〜９および本発明の応力範囲と異なる範囲で内部応力を変化させたサンプル１０、１１では、耐摩耗性および靭性の少なくともいずれかが低い値を示すことがわかる。 From the results of Table 3, samples 1-4 of the present invention in which the internal stress in the TiCN layer was changed by 1 GPa or more within a range of −10 GPa or more and 0 GPa or less were excellent in both wear resistance and toughness. Recognize. On the other hand, Samples 5 to 9 having no change in internal stress and Samples 10 and 11 in which the internal stress was changed in a range different from the stress range of the present invention may show a low value of at least one of wear resistance and toughness. Recognize.
今回開示された実施の形態および実施例はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 It should be understood that the embodiments and examples disclosed herein are illustrative and non-restrictive in every respect. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
１ 被覆膜、２ 母材、３ａ 付着強化層、３ｂ 薄膜。 1 coating film, 2 base material, 3a adhesion strengthening layer, 3b thin film.
Claims (11)
前記母材の前記立方晶窒化硼素焼結体上に形成された被覆膜とを備え、
前記被覆膜は、ＩＶａ、Ｖａ、ＶＩａ族元素、Ａｌ、ＢおよびＧｅよりなる群から選ばれる１種以上の窒化物、炭化物、炭窒化物および酸化物のいずれかを含む材質を有し、かつ−１０ＧＰａ以上０ＧＰａ以下の内部応力を有し、かつ表面側と裏面側である前記母材側とで１ＧＰａ以上の応力差を有し、かつ前記被覆膜の内部応力は前記表面側から前記母材側へ向けて圧縮応力が増加するよう変化している、表面被覆立方晶窒化硼素焼結体工具。 A base material having a portion made of a cubic boron nitride sintered body having 20% by volume or more of cubic boron nitride;
A coating film formed on the cubic boron nitride sintered body of the base material,
The coating film has a material including any one or more of nitrides, carbides, carbonitrides and oxides selected from the group consisting of IVa, Va, VIa group elements, Al, B and Ge, And having an internal stress of -10 GPa or more and 0 GPa or less , and having a stress difference of 1 GPa or more between the surface side and the base material side which is the back surface side , and the internal stress of the coating film from the surface side A surface-coated cubic boron nitride sintered body tool that changes so that the compressive stress increases toward the base material side .
立方晶窒化硼素を２０体積％以上有する立方晶窒化硼素焼結体からなる部分を有する母材と、A base material having a portion made of a cubic boron nitride sintered body having 20% by volume or more of cubic boron nitride;
前記母材の前記立方晶窒化硼素焼結体上に形成された被覆膜とを備え、A coating film formed on the cubic boron nitride sintered body of the base material,
前記被覆膜は、ＩＶａ、Ｖａ、ＶＩａ族元素、Ａｌ、ＢおよびＧｅよりなる群から選ばれる１種以上の窒化物、炭化物、炭窒化物および酸化物のいずれかを含む材質を有し、かつ−１０ＧＰａ以上０ＧＰａ以下の内部応力を有し、かつ表面側と裏面側である前記母材側とで１ＧＰａ以上の応力差を有し、かつ前記被覆膜の内部応力は前記母材側から前記表面側へ向けて圧縮応力が増加するよう変化している、表面被覆立方晶窒化硼素焼結体工具。The coating film has a material including any one or more of nitrides, carbides, carbonitrides and oxides selected from the group consisting of IVa, Va, VIa group elements, Al, B and Ge, And having an internal stress of -10 GPa or more and 0 GPa or less, and having a stress difference of 1 GPa or more between the front surface side and the back surface side of the base material side, and the internal stress of the coating film from the base material side A surface-coated cubic boron nitride sintered body tool that changes so that compressive stress increases toward the surface side.
以下のａ、ｂ、ｃ、ｄおよびｅにおいて、
ａ：ＩＶａ、Ｖａ、ＶＩａ族元素、
ｂ：ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物、
ｃ：ＩＶａ、Ｖａ、ＶＩａ族元素の硼化物、
ｄ：ＩＶａ、Ｖａ、ＶＩａ族元素の炭化物、
ｅ：ＩＶａ、Ｖａ、ＶＩａ族元素、ＩＶａ、Ｖａ、ＶＩａ族元素の窒化物、硼化物、炭化物よりなる群から選ばれる２種以上からなる固溶体、
前記結合材の材質はａ、ｂ、ｃ、ｄおよびｅよりなる群から選ばれる１種以上とアルミニウム化合物と不可避不純物とを含む、請求項１〜９のいずれかに記載の表面被覆立方晶窒化硼素焼結体工具。 The cubic boron nitride sintered body contains 35% by volume to 85% by volume of the cubic boron nitride, and includes a binder for binding the cubic boron nitride particles.
In the following a, b, c, d and e:
a: IVa, Va, VIa group element,
b: nitride of group IVa, Va, VIa element,
c: boride of group IVa, Va, VIa elements,
d: Carbide of IVa, Va, VIa group element,
e: a solid solution composed of two or more selected from the group consisting of group IVa, Va, VIa group elements, nitrides, borides and carbides of group IVa, Va, VIa elements,
The surface-coated cubic nitriding according to any one of claims 1 to 9 , wherein a material of the binder includes one or more selected from the group consisting of a, b, c, d, and e, an aluminum compound, and inevitable impurities. Boron sintered tool.
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