JP4630313B2 - X線分析装置 - Google Patents
X線分析装置 Download PDFInfo
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- JP4630313B2 JP4630313B2 JP2007191557A JP2007191557A JP4630313B2 JP 4630313 B2 JP4630313 B2 JP 4630313B2 JP 2007191557 A JP2007191557 A JP 2007191557A JP 2007191557 A JP2007191557 A JP 2007191557A JP 4630313 B2 JP4630313 B2 JP 4630313B2
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Description
2 分析室
3 X線源(X線管)
7 試料照明手段
8 撮像手段
40 撮像窓
41 窓材(鉛ガラス板)
71 発光部
72 拡散照明部
81 撮像部(CCDカメラ)
82 フード
S 試料
Claims (1)
- 試料を外部から撮像するために照射光を透過する窓材を有する撮像窓を備える分析室内でX線源からのX線を試料に照射して試料の分析を行うX線分析装置であって、
試料の表面を照明するための円錐状の導光拡散板内を均一に照射するように配置されている発光部を有し、前記窓材を透過する照射光で試料を照明する試料照明手段と、
試料を前記分析室の外部から撮像する撮像手段であって、前記撮像窓に対し遠位側に配置されて試料を撮像する撮像部および前記撮像窓に対し遠位側に位置する窓遠位部が前記撮像部のレンズ外筒と組み合わされ、前記撮像窓に対し近位側に位置している窓近位部が前記撮像窓に延伸している筒状のフードを有し、前記試料照明手段から照射されて前記窓材の試料側の面で反射する反射光が前記撮像部内に入射しないように形成されている撮像手段と、
を有し、前記試料照明手段が前記フードを取り囲むように配置され、前記フードの窓近位部の端部が前記撮像窓に近接し、前記撮像手段が前記窓材を有する撮像窓を通して試料を撮像するX線分析装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007191557A JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
Applications Claiming Priority (1)
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JP2007191557A JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009025262A JP2009025262A (ja) | 2009-02-05 |
JP4630313B2 true JP4630313B2 (ja) | 2011-02-09 |
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ID=40397189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007191557A Active JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
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JP (1) | JP4630313B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5407075B2 (ja) * | 2009-04-23 | 2014-02-05 | 公立大学法人兵庫県立大学 | X線分析装置 |
JP5956730B2 (ja) * | 2011-08-05 | 2016-07-27 | 株式会社日立ハイテクサイエンス | X線分析装置及び方法 |
WO2018110265A1 (ja) * | 2016-12-15 | 2018-06-21 | 株式会社堀場製作所 | 放射線検出装置 |
CN107589130B (zh) * | 2017-09-05 | 2020-05-29 | 成都理工大学 | 海底原位x荧光测量影响监管方法及装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062047A (ja) * | 1983-09-16 | 1985-04-10 | Seiko Instr & Electronics Ltd | X線分析装置 |
JP2001249090A (ja) * | 2000-03-07 | 2001-09-14 | Rigaku Industrial Co | 試料表面の観察機構を持つx線分析装置 |
JP2003161707A (ja) * | 2001-11-27 | 2003-06-06 | Toshiba It & Control Systems Corp | X線透視検査装置 |
JP2006194835A (ja) * | 2005-01-17 | 2006-07-27 | Uni-Hite System Corp | X線検査方法及びその装置 |
-
2007
- 2007-07-24 JP JP2007191557A patent/JP4630313B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062047A (ja) * | 1983-09-16 | 1985-04-10 | Seiko Instr & Electronics Ltd | X線分析装置 |
JP2001249090A (ja) * | 2000-03-07 | 2001-09-14 | Rigaku Industrial Co | 試料表面の観察機構を持つx線分析装置 |
JP2003161707A (ja) * | 2001-11-27 | 2003-06-06 | Toshiba It & Control Systems Corp | X線透視検査装置 |
JP2006194835A (ja) * | 2005-01-17 | 2006-07-27 | Uni-Hite System Corp | X線検査方法及びその装置 |
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JP2009025262A (ja) | 2009-02-05 |
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