JP4612556B2

JP4612556B2 - Filter cleaning method

Info

Publication number: JP4612556B2
Application number: JP2006044038A
Authority: JP
Inventors: 真中村; 和也田村; 明鈴木
Original assignee: National Institute of Advanced Industrial Science and Technology AIST; Dai Dan Co Ltd
Current assignee: National Institute of Advanced Industrial Science and Technology AIST; Dai Dan Co Ltd
Priority date: 2006-02-21
Filing date: 2006-02-21
Publication date: 2011-01-12
Anticipated expiration: 2026-02-21
Also published as: JP2007222715A

Description

本発明は、超臨界流体または亜臨界流体から形成された高圧洗浄流体を利用してフィルタを洗浄するフィルタ洗浄方法に関する。 The present invention relates to a filter cleaning method for cleaning a filter using a high-pressure cleaning fluid formed from a supercritical fluid or a subcritical fluid.

洗浄かごの中に収容された被洗浄物に超臨界流体を噴霧する耐圧洗浄容器がある（特許文献１参照）。洗浄かごは、洗浄容器の内部に吊り下げられている。洗浄容器の内部における洗浄かごの上方には超臨界流体を放出するノズルが設置され、洗浄容器の内部における洗浄かごの下方には回転翼と超音波発生装置とが設置されている。この洗浄容器では、超臨界流体がノズルから洗浄かごに噴霧され、洗浄かごに収容された被洗浄物に超臨界流体を通流させることで、使用済みの被洗浄物を洗浄する。
特開平１０−１６３１５２号公報 There is a pressure-resistant cleaning container that sprays a supercritical fluid onto an object to be cleaned contained in a cleaning basket (see Patent Document 1). The washing basket is suspended inside the washing container. A nozzle that discharges a supercritical fluid is installed above the cleaning basket inside the cleaning container, and a rotating blade and an ultrasonic generator are installed below the cleaning basket inside the cleaning container. In this cleaning container, the supercritical fluid is sprayed from the nozzle onto the cleaning basket, and the supercritical fluid is allowed to flow through the cleaning target accommodated in the cleaning basket, thereby cleaning the used cleaning target.
JP-A-10-163152

前記公報に開示の洗浄容器は、超臨界流体が洗浄かごのみならず洗浄容器の内部全体を流動するから、被洗浄物を通流せずに被洗浄物の洗浄に寄与しない超臨界流体が存在し、超臨界流体の無駄な消費につながる。また、この洗浄容器は、超臨界流体がノズルから被洗浄物に直接噴霧されることはなく、洗浄かごに向かって噴霧された超臨界流体が洗浄かごを通過した後、四方へ広がりながら被洗浄物に向かうから、被洗浄物全域に流体を満遍なく通流させることが難しく、被洗浄物の汚れを落とすことができない場合がある。 In the cleaning container disclosed in the above publication, since the supercritical fluid flows not only in the cleaning basket but also in the entire interior of the cleaning container, there is a supercritical fluid that does not contribute to cleaning the object to be cleaned without passing the object to be cleaned. , Leading to wasted consumption of supercritical fluids. This cleaning container does not spray the supercritical fluid directly from the nozzle onto the object to be cleaned, and the supercritical fluid sprayed toward the cleaning basket passes through the cleaning basket and then spreads in all directions. Since it goes to the object, it is difficult to evenly flow the fluid throughout the object to be cleaned, and the object to be cleaned may not be cleaned.

本発明の目的は、超臨界流体または亜臨界流体から形成された高圧洗浄流体の無駄な消費を防ぐことができるフィルタ洗浄方法を提供することにある。本発明の他の目的は、高圧洗浄流体をフィルタの略全域に通流させることができ、フィルタに対する高い洗浄機能を有するフィルタ洗浄方法を提供することにある。 An object of the present invention is to provide a filter cleaning method capable of preventing wasteful consumption of a high-pressure cleaning fluid formed from a supercritical fluid or a subcritical fluid. Another object of the present invention is to provide a filter cleaning method that allows a high-pressure cleaning fluid to flow through substantially the entire area of the filter and has a high cleaning function for the filter.

前記課題を解決するための本発明の第１の前提は、超臨界流体と亜臨界流体との一方から形成された高圧洗浄流体を利用してフィルタを洗浄する気密構造洗浄室と、洗浄室へ洗浄流体を流入させる流入口と、洗浄室から洗浄流体を流出させる流出口とを備えたフィルタ洗浄容器を利用し、洗浄流体を洗浄室に収容されたフィルタの第１面から第２面に向かって通流させることでそのフィルタを洗浄するフィルタ洗浄方法である。 The first premise of the present invention for solving the above-mentioned problems is that the filter is cleaned using a high-pressure cleaning fluid formed from one of a supercritical fluid and a subcritical fluid; Using a filter cleaning container having an inlet for allowing the cleaning fluid to flow in and an outlet for allowing the cleaning fluid to flow out of the cleaning chamber, the cleaning fluid is directed from the first surface to the second surface of the filter accommodated in the cleaning chamber. Te is a filter cleaning method for cleaning the filter by causing flow through.

前記第１の前提における本発明の第１の特徴として、フィルタ洗浄方法では、フィルタの第１および第２面のいずれか一方の面の略全域を覆う傘状の被覆材が洗浄室に設置されているとともに、被覆材から延びていて流出口につながる管材が洗浄室に設置され、被覆材がフィルタの面の周縁部に当接かつ密着する周縁部とフィルタの面から離間して管材につながる中央部とを有し、フィルタの第１面から第２面に向かって通流した洗浄流体を捕集してその洗浄流体を管材に導くスペースがフィルタの面と被覆材の中央部との間に形成されている。 As a first feature of the present invention according to the first premise, in the filter cleaning method, an umbrella-shaped covering material that covers substantially the entire area of one of the first and second surfaces of the filter is installed in the cleaning chamber. In addition , a pipe material extending from the coating material and connected to the outlet is installed in the cleaning chamber, and the coating material is separated from the peripheral surface portion of the filter surface and the peripheral surface portion of the filter surface and separated from the filter surface. lead and a central portion, from the first surface of the filter toward the second surface to collect the cleaning fluid was passed by directing the wash fluid in tubing space between the central portion of the surface of the filter dressing It is formed between.

前記第１の特徴を有する本発明の一例として、フィルタ洗浄方法では、フィルタが第１面と第２面との間に四角形の４つの側面が延びる六面体の立体構造を有し、被覆材の平面形状が四角形を呈するとともにその周縁部がフィルタの第１および第２面のいずれか一方の面の周縁部に当接かつ密着している。 As an example of the present invention having the first feature, in the filter cleaning method, the filter has a hexahedral three-dimensional structure in which four sides of a quadrangle extend between the first surface and the second surface, and the flat surface of the covering material. The shape of the filter is a quadrangle, and its peripheral edge is in contact with and in close contact with the peripheral edge of one of the first and second surfaces of the filter.

前記課題を解決するための本発明の第２の前提は、超臨界流体と亜臨界流体との一方から形成された高圧洗浄流体を利用してフィルタを洗浄する気密構造洗浄室と、洗浄室へ洗浄流体を流入させる流入口と、洗浄室から洗浄流体を流出させる流出口とを備えたフィルタ洗浄容器を利用し、フィルタが第１面と第２面との間に四角形の４つの側面が延びる六面体の立体構造を有し、洗浄流体を洗浄室に収容されたフィルタの第１面から第２面に向かって通流させることでそのフィルタを洗浄するフィルタ洗浄方法である。前記第２の前提における本発明の第２の特徴として、フィルタ洗浄方法では、フィルタを覆う被覆材が洗浄室に設置されているとともに、被覆材から延びていて流出口につながる管材が洗浄室に設置され、被覆材がフィルタの第１および第２面のいずれか一方の面から離間して面全域を覆う中央部とフィルタのそれら側面の周方向外方に位置して側面全域を覆う周縁部とを有し、フィルタの第１面から第２面に向かって通流した洗浄流体を捕集してその洗浄流体を管材に導くスペースがフィルタの面と被覆材の中央部との間に形成され、被覆材の周縁部とフィルタのそれら側面との間に隙間がない。 The second premise of the present invention for solving the above problems is that the filter is cleaned using a high-pressure cleaning fluid formed from one of a supercritical fluid and a subcritical fluid; Using a filter cleaning container having an inlet for allowing the cleaning fluid to flow in and an outlet for allowing the cleaning fluid to flow out of the cleaning chamber, the filter has four rectangular side surfaces extending between the first surface and the second surface. It has a hexahedral three-dimensional structure is a filter cleaning method for cleaning the filter by causing flow through toward the second surface from the first surface of the housing a cleaning fluid to the cleaning chamber filter. As a second feature of the present invention based on the second premise, in the filter cleaning method, a coating material covering the filter is installed in the cleaning chamber, and a pipe material extending from the coating material and connected to the outlet is the cleaning chamber. A central portion that covers the entire surface of the filter and is separated from either one of the first and second surfaces of the filter, and a peripheral edge that covers the entire side surface of the filter in the circumferential direction. and a part, between the first surface of the filter toward the second surface to collect the cleaning fluid was passed by directing the wash fluid in tubing space between the central portion of the surface of the filter dressing Formed and there is no gap between the peripheral edge of the covering and the sides of the filter.

前記第２の特徴を有する本発明の一例として、フィルタ洗浄方法では、管材が流出口の側に位置する第１部分と第１部分から複数に分岐して被覆材の複数箇所につながる第２部分とから形成されている。 As an example of the present invention having the second feature described above, in the filter cleaning method, a first part located on the outlet side and a second part branched from the first part into a plurality of parts and connected to a plurality of locations of the covering material And is formed from.

前記第１および第２の特徴を有する本発明の一例として、フィルタ洗浄方法では、フィルタの第１および第２面のいずれか他方の面を当接させた状態でそのフィルタを載せる通気性の台座が洗浄室に設置され、フィルタが被覆材と台座との間に位置し、高圧洗浄流体が台座の整流作用によってフィルタの略全域を通流する。 As an example of the present invention having the first and second features, in the filter cleaning method, a breathable pedestal on which the filter is placed with either one of the first and second surfaces of the filter being in contact with each other. Is installed in the cleaning chamber , the filter is positioned between the covering material and the pedestal, and the high-pressure cleaning fluid flows through substantially the entire area of the filter by the rectifying action of the pedestal.

前記第１および第２の特徴を有する本発明の一例として、フィルタ洗浄方法では、フィルタ洗浄容器の洗浄室へ洗浄流体を流入させる流入口が複数形成されている。 As an example of the present invention having the first and second features, in the filter cleaning method, a plurality of inflow ports are formed to allow the cleaning fluid to flow into the cleaning chamber of the filter cleaning container.

前記第１の特徴を有する本発明のフィルタ洗浄方法によれば、フィルタ洗浄容器の洗浄室にフィルタの面の略全域を覆う傘状の被覆材と被覆材から延びていて流出口につながる管材とが設置され、被覆材がフィルタの面の周縁部に当接かつ密着する周縁部とフィルタの面から離間して管材につながる中央部とを有し、高圧洗浄流体を捕集してその洗浄流体を管材に導くスペースがフィルタの面と被覆材の中央部との間に形成されているから、流入口から流入する洗浄流体をフィルタの第１面から第２面に向かって確実に通流させることができる。ゆえに、この洗浄容器は、フィルタを通流しない洗浄流体の発生を防ぐことができ、高圧洗浄流体の無駄な消費を防ぐことができる。 According to the filter cleaning method of the present invention having the first feature, the umbrella-shaped covering material covering substantially the entire area of the filter surface in the cleaning chamber of the filter cleaning container, and the pipe material extending from the covering material and connected to the outlet Is installed, and has a peripheral portion where the covering material contacts and closely contacts the peripheral portion of the surface of the filter and a central portion which is separated from the surface of the filter and is connected to the pipe material, and collects the high-pressure cleaning fluid Is formed between the surface of the filter and the central portion of the covering material, the cleaning fluid flowing in from the inlet is surely passed from the first surface to the second surface of the filter. be able to. Therefore, this cleaning container can prevent generation of the cleaning fluid that does not flow through the filter, and can prevent wasteful consumption of the high-pressure cleaning fluid.

フィルタが第１面と第２面との間に四角形の４つの側面が延びる六面体の立体構造を有し、被覆材の平面形状が四角形を呈するとともにその周縁部がフィルタの第１および第２面のいずれか一方の面の周縁部に当接かつ密着しているフィルタ洗浄方法は、被覆材の周縁部がフィルタの面の周縁部に当接かつ密着することで、被覆材がフィルタの面の略全域を確実に覆い、六面体の立体構造を有するフィルタであっても、洗浄流体をそのフィルタに確実に通流させることができ、高圧洗浄流体の無駄な消費を防ぐことができるのみならず、フィルタに対する高い洗浄機能を有する。 The filter has a hexahedral structure in which four side surfaces of a quadrangle extend between the first surface and the second surface, the planar shape of the covering material is a quadrangle, and the periphery thereof is the first and second surfaces of the filter. The filter cleaning method is in contact with and in close contact with the peripheral edge of any one of the surfaces, so that the covering material is in contact with and close to the peripheral edge of the filter surface. Even with a filter that covers almost the entire area reliably and has a hexahedral structure, not only can the cleaning fluid flow through the filter reliably, but wasteful consumption of the high-pressure cleaning fluid can be prevented, High cleaning function for filters.

前記第２の特徴を有する本発明のフィルタ洗浄方法によれば、フィルタ洗浄容器の洗浄室にフィルタを覆う被覆材と被覆材から延びていて流出口につながる管材とが設置され、被覆材がフィルタの面から離間して面全域を覆う中央部とフィルタのそれら側面の周方向外方に位置して側面全域を覆う周縁部とを有し、高圧洗浄流体を捕集してその洗浄流体を管材に導くスペースがフィルタの面と被覆材の中央部との間に形成され、被覆材の周縁部とフィルタのそれら側面との間に隙間がないから、流入口から流入する洗浄流体をフィルタの第１面から第２面に向かって確実に通流させることができる。ゆえに、この洗浄容器は、フィルタを通流しない洗浄流体の発生を防ぐことができ、高圧洗浄流体の無駄な消費を防ぐことができる。 According to the filter cleaning method of the present invention having the second feature, a covering material covering the filter and a pipe extending from the covering material and connected to the outlet are installed in the cleaning chamber of the filter cleaning container. A central portion that is separated from the surface of the filter and covers the entire surface of the filter, and a peripheral portion that is positioned on the outer periphery in the circumferential direction of the filter and covers the entire surface of the filter. A space leading to the filter is formed between the surface of the filter and the central portion of the covering material, and there is no gap between the peripheral portion of the covering material and the side surfaces of the filter. It is possible to surely flow from the first surface to the second surface. Therefore, this cleaning container can prevent generation of the cleaning fluid that does not flow through the filter, and can prevent wasteful consumption of the high-pressure cleaning fluid.

管材が流出口の側に位置する第１部分と第１部分から複数に分岐して被覆材の複数箇所につながる第２部分とから形成されているフィルタ洗浄方法は、フィルタを通流した洗浄流体を被覆材の複数箇所から管材に捕集することができるから、フィルタの略全域に略均一の流量の洗浄流体を通流させることができ、洗浄流体をフィルタの略全域に確実に通流させることができる。また、洗浄流体を管材から流入させる場合は、洗浄流体を被覆材の複数箇所から放出して洗浄流体をフィルタの複数部分に満遍なく当てることができ、洗浄流体をフィルタの略全域に確実に通流させることができる。 A filter cleaning method in which a pipe material is formed from a first part located on the outlet side and a second part branched from the first part into a plurality of parts and connected to a plurality of parts of the covering material is a cleaning fluid that flows through the filter. Can be collected from a plurality of locations of the covering material into the pipe material, so that a substantially uniform flow rate of the cleaning fluid can be passed through substantially the entire area of the filter, and the cleaning fluid can be reliably passed through the entire area of the filter. be able to. In addition, when the cleaning fluid is allowed to flow from the pipe material, the cleaning fluid can be discharged from multiple locations of the coating material so that the cleaning fluid can be uniformly applied to multiple portions of the filter, and the cleaning fluid can be surely passed through almost the entire area of the filter. Can be made.

フィルタ洗浄容器の洗浄室にフィルタの第１および第２面のいずれか他方の面を当接させた状態でそのフィルタを載せる通気性の台座が設置され、フィルタが被覆材と台座との間に位置し、高圧洗浄流体が台座の整流作用によってフィルタの略全域を通流するフィルタ洗浄方法は、台座の流体抵抗により、洗浄流体を台座全域に満遍なく分布させつつ、洗浄流体をフィルタに通流させることができるから、洗浄流体のフィルタにおける非通流箇所の発生を防ぐことができる。この洗浄方法は、洗浄流体をフィルタの略全域に確実に通流させることができるから、高圧洗浄流体の無駄な消費を防ぐことができるのみならず、フィルタに対する高い洗浄機能を有する。 A breathable pedestal for placing the filter in a state where one of the first and second surfaces of the filter is in contact with the cleaning chamber of the filter cleaning container is installed, and the filter is interposed between the covering material and the pedestal. The filter cleaning method in which the high-pressure cleaning fluid flows through substantially the entire area of the filter by the rectifying action of the pedestal allows the cleaning fluid to flow through the filter while the cleaning fluid is evenly distributed throughout the pedestal due to the fluid resistance of the pedestal. Therefore, it is possible to prevent the occurrence of a non-flow point in the cleaning fluid filter. In this cleaning method , the cleaning fluid can surely flow through substantially the entire area of the filter, so that not only wasteful consumption of the high-pressure cleaning fluid can be prevented, but also a high cleaning function for the filter.

フィルタ洗浄容器の洗浄室へ洗浄流体を流入させる流入口が複数形成されているフィルタ洗浄方法は、洗浄流体を複数の流入口から放出して洗浄流体をフィルタの複数部分に満遍なく当てることができるから、フィルタの略全域に略均一の流量の洗浄流体を通流させることができ、洗浄流体をフィルタの略全域に確実に通流させることができる。 In the filter cleaning method in which a plurality of inflow ports for allowing the cleaning fluid to flow into the cleaning chamber of the filter cleaning container are formed, the cleaning fluid can be evenly applied to a plurality of parts of the filter by discharging the cleaning fluid from the plurality of inflow ports. The cleaning fluid having a substantially uniform flow rate can be passed through substantially the entire area of the filter, and the cleaning fluid can be reliably passed through the entire area of the filter.

添付の図面を参照し、本発明に係るフィルタ洗浄容器を利用したフィルタ洗浄方法の詳細を説明すると、以下のとおりである。図１，２は、フィルタ洗浄容器１９Ａを使用したフィルタ洗浄方法を実施するフィルタ洗浄設備１０の概念図と、蓋２５を省略して示す洗浄容器１９Ａの上面図とである。図３，４は、蓋２５を取り付けた状態で示す図２の３−３線矢視断面図と、台座３８と被覆材３９と管材４０とを示すそれらの斜視図とである。図２，３では、縦方向を矢印Ａで示し（図３のみ）、径方向を矢印Ｂで示すとともに、周方向を矢印Ｃで示す（図２のみ）。図２，３に示す洗浄容器１９Ａでは、その洗浄室３２に後記する使用済みのエアフィルタ１１または使用済みのリキッドフィルタ１１が収容されている。 The details of the filter cleaning method using the filter cleaning container according to the present invention will be described with reference to the accompanying drawings. 1 and 2 are a conceptual diagram of a filter cleaning facility 10 that performs a filter cleaning method using the filter cleaning container 19A, and a top view of the cleaning container 19A with the lid 25 omitted. 3 and 4 are a cross-sectional view taken along line 3-3 in FIG. 2 with the lid 25 attached, and perspective views showing the pedestal 38, the covering material 39, and the pipe material 40. FIG. 2 and 3, the vertical direction is indicated by an arrow A (only in FIG. 3), the radial direction is indicated by an arrow B, and the circumferential direction is indicated by an arrow C (only in FIG. 2). In the cleaning container 19 A shown in FIGS. 2 and 3, a used air filter 11 or a used liquid filter 11 described later is accommodated in the cleaning chamber 32.

フィルタ洗浄方法を実施するフィルタ洗浄設備１０は、気体を濾過した後の使用済みのエアフィルタ１１の洗浄や液体を濾過した後の使用済みのリキッドフィルタ１１の洗浄に好適に利用される。それらフィルタ１１は、気体中や液体中に存在する不純物を除去する機能を有し、気体や液体を浄化する。それらフィルタ１１を性能別に分類すると、粗大な不純物を除去するプレフィルタ、微細な不純物を除去する中性能フィルタまたは高性能フィルタ、極めて微細な不純物を除去するＨＥＰＡ（ヘパ）フィルタやＵＬＰＡ（ウルパ）フィルタ、化学物質を除去するケミカルフィルタがある。エアフィルタ１１には、セパレータ型エアフィルタやミニプリーツ型エアフィルタ等がある。エアフィルタ１１は、主に空調用フィルタや空気清浄用フィルタ、排気処理用フィルタ、車両用エアコンフィルタとして使用される。リキッドフィルタ１１は、浄水装置用フィルタや浸透圧を利用する膜装置用フィルタとして使用される。 The filter cleaning equipment 10 for performing the filter cleaning method is suitably used for cleaning the used air filter 11 after filtering the gas and cleaning the used liquid filter 11 after filtering the liquid. These filters 11 have a function of removing impurities present in the gas or liquid, and purify the gas or liquid. When these filters 11 are classified by performance, a pre-filter that removes coarse impurities, a medium-performance filter or a high-performance filter that removes fine impurities, a HEPA filter or a ULPA filter that removes extremely fine impurities There is a chemical filter that removes chemical substances. Examples of the air filter 11 include a separator type air filter and a mini-pleat type air filter. The air filter 11 is mainly used as an air conditioning filter, an air cleaning filter, an exhaust treatment filter, or a vehicle air conditioner filter. The liquid filter 11 is used as a filter for a water purifier or a filter for a membrane device using osmotic pressure.

図示のエアフィルタ１１やリキッドフィルタ１１は、ガラス繊維や吸着剤、合成樹脂繊維を濾材とし、フィルタハウジングまたはフィルタカートリッジに収納して使用される。図示のエアフィルタ１１やリキッドフィルタ１１は、蛇腹に折り畳まれた立体構造を有し（図３参照）、四角形の上面１２（第２面）および下面１３（第１面）と、上下面１２，１３の間に延びる四角形の４つの側面１４（周面）とを有する６面体である。なお、この洗浄設備１０で洗浄されるフィルタには、立体構造を有するものの他に、略扁平のものも含まれ、さらに、上下面の形状が円形や楕円形、多角形のものも含まれる。吸着剤には、活性炭やセラミック多孔体等がある。合成樹脂繊維には、ポプロピレン、ポリエステル、ポリエーテルスルフォン、ポリスルホン、ナイロン６、ポリフェニレンサルファイド等がある。濾材としては、繊維間に粒状活性炭や粒状セラミック多孔体等の吸着剤を担持させたもの、重なり合う繊維集合物の間に粒状活性炭や粒状セラミック多孔体等の吸着剤を介在させたものも含まれる。 The illustrated air filter 11 and liquid filter 11 are used by being housed in a filter housing or a filter cartridge using glass fiber, adsorbent, or synthetic resin fiber as a filter medium. The illustrated air filter 11 and liquid filter 11 have a three-dimensional structure folded in a bellows (see FIG. 3), a rectangular upper surface 12 (second surface) and a lower surface 13 (first surface), and upper and lower surfaces 12, 13 is a hexahedron having four rectangular side surfaces 14 (peripheral surfaces) extending between 13. In addition, the filter cleaned by the cleaning facility 10 includes a substantially flat filter in addition to a three-dimensional structure, and further includes a filter whose upper and lower surfaces are circular, elliptical, or polygonal. Examples of the adsorbent include activated carbon and a ceramic porous body. Synthetic resin fibers include polypropylene, polyester, polyether sulfone, polysulfone, nylon 6, polyphenylene sulfide, and the like. Examples of the filter medium include those in which an adsorbent such as granular activated carbon or granular ceramic porous material is supported between fibers, and those in which an adsorbent such as granular activated carbon or porous porous ceramic body is interposed between overlapping fiber aggregates. .

フィルタ洗浄設備１０は、図１に示すように、液化二酸化炭素を収容したボンベ１５と、ボンベ１５に管路１６を介して連結されたポンプ１７と、ポンプ１７に管路１６を介して連結された温度調節器１８と、温度調節器１８に管路１６を介して連結されたフィルタ洗浄容器１９Ａとから形成されている。ボンベ１５とポンプ１７との間に延びる管路１６には流量計２０が取り付けられている。温度調節器１８と洗浄容器１９Ａとの間に延びる管路１６には圧力調節弁２１Ａが取り付けられ、洗浄容器１９Ａとポンプ１７との間に延びる管路１６には圧力調節弁２１Ｂが取り付けられている。洗浄容器１９Ａには、温度計２２と圧力計２３とが取り付けられている。洗浄設備１０では、ポンプ１７を介してボンベ１５から供給される二酸化炭素ガスを７．３８ＭＰａ以上の気圧とし、７．３８ＭＰａ以上の気圧とした二酸化炭素ガスを温度調節器１８を介して３０〜６０℃に加熱することで、二酸化炭素ガスが超臨界流体または亜臨界流体（以下、高圧洗浄流体という）となる。高圧洗浄流体は、気体と液体との性質を有し、フィルタ１１を形成する濾材の微細な間隙に容易に進入かつ濾材内部に容易に浸透し、濾材に付着または濾材に滲入した汚れを容易に溶かし込む。高圧洗浄流体は、ポンプ１７を介して強制的に温度調節器１８からフィルタ洗浄容器１９Ａに供給され、洗浄容器１９Ａに流入する。洗浄容器１９Ａから流出した高圧洗浄流体は減圧装置（図示せず）で減圧されて非超臨界または非亜臨界の通常流体に戻り、通常流体が管路１６を通って再びポンプ１７へ進入する。フィルタ洗浄設備１０の稼働中は、高圧洗浄流体と通常流体とが設備１０を循環する。なお、洗浄設備１０には、図示はしていないが、循環中の洗浄流体または二酸化炭素ガスに含まれる不純物を濾過する濾過装置が取り付けられている。 As shown in FIG. 1, the filter cleaning facility 10 is connected to a cylinder 15 containing liquefied carbon dioxide, a pump 17 connected to the cylinder 15 via a pipe line 16, and a pump 17 connected to the pump 17 via a pipe line 16. The temperature controller 18 and a filter cleaning container 19A connected to the temperature controller 18 via a pipe line 16 are formed. A flow meter 20 is attached to a pipe line 16 extending between the cylinder 15 and the pump 17. A pressure control valve 21A is attached to the pipe line 16 extending between the temperature controller 18 and the cleaning container 19A, and a pressure control valve 21B is attached to the pipe line 16 extending between the cleaning container 19A and the pump 17. Yes. A thermometer 22 and a pressure gauge 23 are attached to the cleaning container 19A. In the cleaning facility 10, the carbon dioxide gas supplied from the cylinder 15 via the pump 17 is set to a pressure of 7.38 MPa or more, and the carbon dioxide gas set to a pressure of 7.38 MPa or more is set to 30 to 60 via the temperature controller 18. By heating to 0 ° C., carbon dioxide gas becomes a supercritical fluid or a subcritical fluid (hereinafter referred to as a high-pressure cleaning fluid). The high-pressure cleaning fluid has a property of gas and liquid, and easily enters the fine gaps of the filter medium forming the filter 11 and easily penetrates into the filter medium, and easily adheres to the filter medium or contaminates the filter medium. Melt. The high-pressure cleaning fluid is forcibly supplied from the temperature controller 18 to the filter cleaning container 19A via the pump 17, and flows into the cleaning container 19A. The high-pressure cleaning fluid that has flowed out of the cleaning container 19 A is decompressed by a decompression device (not shown) to return to a non-supercritical or non-subcritical normal fluid, and the normal fluid enters the pump 17 again through the pipe line 16. During operation of the filter cleaning facility 10, the high-pressure cleaning fluid and the normal fluid circulate through the facility 10. Although not shown, the cleaning facility 10 is provided with a filtration device for filtering impurities contained in the circulating cleaning fluid or carbon dioxide gas.

ポンプ１７や温度調節器１８、流量計２０、圧力調節弁２１Ａ，２１Ｂ、温度計２２、圧力計２３、減圧装置は、制御装置（図示せず）に接続されている。ポンプ１７や温度調節器１８、流量計２０、圧力調節弁２１、温度計２２、圧力計２３、減圧装置は、制御装置とともに洗浄流体の流量や温度、圧力を目標値の範囲に一致させるフィードバック制御の制御要素を形成する。設備１０の稼働中、制御装置には、流量計２９を介して洗浄流体の流量が常時入力され、温度計２２を介して洗浄流体の温度が常時入力されるとともに、圧力計２３を介して洗浄流体の圧力が常時入力される。制御装置は、設備１０を循環する洗浄流体の流量が目標値の範囲から外れると、ポンプ１７の出力を調節して洗浄流体の流量を目標値の範囲内に復帰させる。制御装置は、設備１０を循環する洗浄流体の温度が目標値の範囲から外れると、温度調節器１８の熱量を調節して洗浄流体の温度を目標値の範囲内に復帰させる。制御装置は、設備１０を循環する洗浄流体の圧力が目標値の範囲から外れると、圧力調節弁２１Ａ，２１Ｂの弁機構を作動させて洗浄流体の圧力を目標値の範囲内に復帰させる。 The pump 17, the temperature controller 18, the flow meter 20, the pressure control valves 21A and 21B, the thermometer 22, the pressure gauge 23, and the pressure reducing device are connected to a control device (not shown). The pump 17, the temperature controller 18, the flow meter 20, the pressure control valve 21, the thermometer 22, the pressure gauge 23, and the pressure reducing device, together with the control device, feedback control for matching the flow rate, temperature and pressure of the cleaning fluid to the target value range Forming the control elements. During operation of the facility 10, the flow rate of the cleaning fluid is constantly input to the control device via the flow meter 29, the temperature of the cleaning fluid is always input via the thermometer 22, and cleaning is performed via the pressure gauge 23. Fluid pressure is always input. When the flow rate of the cleaning fluid circulating through the facility 10 deviates from the target value range, the control device adjusts the output of the pump 17 to return the flow rate of the cleaning fluid within the target value range. When the temperature of the cleaning fluid circulating in the facility 10 deviates from the target value range, the control device adjusts the amount of heat of the temperature regulator 18 to return the temperature of the cleaning fluid to the target value range. When the pressure of the cleaning fluid circulating through the facility 10 deviates from the target value range, the control device operates the valve mechanisms of the pressure control valves 21A and 21B to return the cleaning fluid pressure to the target value range.

洗浄容器１９Ａは、容器本体２４および蓋２５と、本体２４に蓋２５を固定するクランプ２６とから形成されている。容器本体２４は、縦方向へ長い略円柱状を呈し、底壁２７と、底壁２７の周縁から上方へ延びる周壁２８と、円形の上部開口２９とを有する。周壁２８の上部外周面には、周方向へ交互に並ぶ凹部３０と凸部３１とが形成されている。容器本体２４の内部には、底壁２７と周壁２８とに囲繞された気密構造洗浄室３２が形成されている。底壁２７には、気密構造洗浄室３２に洗浄流体を流入させる４つの流入口３３（出入口）と、洗浄室３２から洗浄流体を流出させる流出口３４（出入口）とが形成されている。流入口３３と流出口３４とは、底壁２７を貫通して洗浄室３２から容器本体２４の外側に通じている。流入口３３は圧力調節弁２１Ａから延びる管路１６につながり、流出口３４は容器本体２４から延びる管路１６につながっている。蓋２５は、その平面形状が円形を呈し、上下面と上下面の間に延びる周面とを有する。蓋２５の周面には、容器本体２４と同様に、周方向へ交互に並ぶ凹部（図示せず）と凸部３５とが形成されている。蓋２５を容器本体２４に乗せると、蓋２５の周縁部が周壁２８の上部に当接し、本体２４の上部開口２９が蓋２５によって閉塞される。クランプ２６は、リング状を呈し、その内周面に周方向へ交互に並ぶ凹部３６と凸部３７とが形成されている。 The cleaning container 19 A is formed of a container main body 24 and a lid 25, and a clamp 26 that fixes the lid 25 to the main body 24. The container body 24 has a substantially cylindrical shape that is long in the vertical direction, and includes a bottom wall 27, a peripheral wall 28 that extends upward from the periphery of the bottom wall 27, and a circular upper opening 29. Concave portions 30 and convex portions 31 that are alternately arranged in the circumferential direction are formed on the upper outer peripheral surface of the peripheral wall 28. Inside the container main body 24, an airtight structure cleaning chamber 32 surrounded by a bottom wall 27 and a peripheral wall 28 is formed. The bottom wall 27 is formed with four inlets 33 (entrance / exit) for allowing the cleaning fluid to flow into the airtight structure cleaning chamber 32 and an outlet 34 (entrance / exit) for allowing the cleaning fluid to flow out of the cleaning chamber 32. The inflow port 33 and the outflow port 34 pass through the bottom wall 27 and communicate with the outside of the container body 24 from the cleaning chamber 32. The inlet 33 is connected to the pipeline 16 extending from the pressure control valve 21 A, and the outlet 34 is connected to the pipeline 16 extending from the container body 24. The lid 25 has a circular planar shape, and has an upper and lower surface and a peripheral surface extending between the upper and lower surfaces. On the peripheral surface of the lid 25, similarly to the container body 24, concave portions (not shown) and convex portions 35 that are alternately arranged in the circumferential direction are formed. When the lid 25 is placed on the container main body 24, the peripheral edge of the lid 25 comes into contact with the upper portion of the peripheral wall 28, and the upper opening 29 of the main body 24 is closed by the lid 25. The clamp 26 has a ring shape, and is formed with concave portions 36 and convex portions 37 that are alternately arranged in the circumferential direction on the inner peripheral surface thereof.

気密構造洗浄室３２は、円筒状を呈し、フィルタ１１を収容可能な所定の容積を有する。洗浄室３２には、フィルタ１１を乗せる台座３８と、フィルタ１１を覆う被覆材３９と、洗浄流体が流れる中空の管材４０とが設置されている。台座３８や被覆材３９、管材４０は、ステンレスやアルミ、鉄等の金属から作られている。台座３８は、複数の貫通孔５６が等間隔で形成された四角形の整流板４１と、整流板４１の周縁から下方へ延びる脚部４２とから形成されている。脚部４２は、底壁２７に当接している。整流板４１には、フィルタ１１の下面１３（第１面）が当接している。整流板４１は底壁２７から上方へ離間した状態にあり、底壁２７と整流板４１との間には空間４３が形成されている。４つの流入口３３は、台座３８を挟んでフィルタ１１の下方に位置し、空間４３に突出している。それら流入口３３は、台座３８にフィルタ１１を乗せたときに、フィルタ１１の四隅の内側に位置する。なお、台座３８は、洗浄流体が容易に通過する四角形の金網と、金網の周縁から下方へ延びる脚部とから形成されていてもよい。 The airtight structure cleaning chamber 32 is cylindrical and has a predetermined volume that can accommodate the filter 11. In the cleaning chamber 32, a pedestal 38 on which the filter 11 is placed, a covering material 39 that covers the filter 11, and a hollow tube material 40 through which the cleaning fluid flows are installed. The pedestal 38, the covering material 39, and the pipe material 40 are made of a metal such as stainless steel, aluminum, or iron. The pedestal 38 is formed of a rectangular rectifying plate 41 having a plurality of through holes 56 formed at equal intervals, and leg portions 42 extending downward from the periphery of the rectifying plate 41. The leg portion 42 is in contact with the bottom wall 27. The lower surface 13 (first surface) of the filter 11 is in contact with the rectifying plate 41. The rectifying plate 41 is spaced upward from the bottom wall 27, and a space 43 is formed between the bottom wall 27 and the rectifying plate 41. The four inflow ports 33 are located below the filter 11 with the pedestal 38 interposed therebetween and project into the space 43. The inflow ports 33 are located inside the four corners of the filter 11 when the filter 11 is placed on the pedestal 38. The pedestal 38 may be formed of a rectangular wire mesh through which the cleaning fluid easily passes and leg portions extending downward from the periphery of the wire mesh.

被覆材３９は、その平面形状が四角形の傘状を呈し、その平面面積がフィルタ１１の上面１２（第２面）のそれと略同一であり、フィルタ１１の上面１２の略全域を覆っている。被覆材３９は、フィルタ１１の上面１２の周縁部４４（周囲）に当接する周縁部４５と、フィルタ１１の上面１２から上方へ離間して管材４０につながる中央部４６とを有する。フィルタ１１の上面１２と被覆材３９の中央部４６との間にはフィルタ１１を通流した洗浄流体を捕集して流体を管材４０に導くスペース４７が形成され、洗浄室３２にはスペース４７を除く空間４８が形成されている。スペース４７は、洗浄流体の流路となる。管材４０は、流出口３４につながり、流出口３４から上方へ延びた後、被覆材３９の中央部４６の中心部分に向かって径方向へ水平に延び、さらに、下方へわずかに延びて中央部４６の中心部分に連結されている。 The covering material 39 has a quadrangular umbrella shape in plan view, and has a planar area substantially the same as that of the upper surface 12 (second surface) of the filter 11 and covers substantially the entire area of the upper surface 12 of the filter 11. The covering material 39 has a peripheral edge portion 45 that contacts the peripheral edge portion 44 (periphery) of the upper surface 12 of the filter 11 and a central portion 46 that is spaced upward from the upper surface 12 of the filter 11 and is connected to the tube material 40. A space 47 is formed between the upper surface 12 of the filter 11 and the central portion 46 of the covering material 39 to collect the cleaning fluid flowing through the filter 11 and guide the fluid to the tube 40. A space 48 is formed except for. The space 47 serves as a flow path for the cleaning fluid. The pipe member 40 is connected to the outlet port 34, extends upward from the outlet port 34, then extends horizontally in the radial direction toward the central portion 46 of the central portion 46 of the covering material 39, and further extends slightly downward to the central portion. 46 is connected to the central portion.

この洗浄容器１９Ａを使用して使用済みのエアフィルタ１１やリキッドフィルタ１１を洗浄する手順の一例は、以下のとおりである。フィルタ１１を気密構造洗浄室３２に入れ、フィルタ１１の下面１３（第１面）を金網４１に当接させた状態でフィルタ１１を台座３８（整流板４１の上）に乗せた後、被覆材３９をフィルタ１１に被せ、被覆材３９によってフィルタ１１の上面１２（第２面）を覆う。フィルタ１１は、台座３８と被覆材３９との間に位置し、台座３８と被覆材３９と挟まれた状態で洗浄室３２に設置される。フィルタ１１を洗浄室３２に設置した後は、容器本体２４の凸部３１と蓋２５の凸部３５とを互いに一致させた状態で蓋２５を本体２４の周壁２８の上部に乗せ、蓋２５によって容器２４の上部開口２９を閉じる。次に、容器本体２４の凹部３０と蓋２５の凹部との間にクランプ２６の凸部３７を差し込み、クランプ２６を本体２４の周壁２８と蓋２５の周面とに嵌め込んだ後、クランプ２６を周方向へ回して本体２４および蓋２５の凸部３１，３５とクランプ２６の凸部３７とを縦方向へ並べる。容器本体２４および蓋２４の凸部３１，３５とクランプ２６の凸部３７とが縦方向へ並ぶと、蓋２５の下面が本体２４の周壁２８の上部に圧接し、蓋２５を本体２４に密着させることができ、洗浄室３２を密閉することができる。 An example of the procedure for cleaning the used air filter 11 and liquid filter 11 using the cleaning container 19A is as follows. The filter 11 is placed in the airtight structure cleaning chamber 32, and the filter 11 is placed on the base 38 (on the current plate 41) in a state where the lower surface 13 (first surface) of the filter 11 is in contact with the wire mesh 41, and then the covering material 39 is covered with the filter 11, and the upper surface 12 (second surface) of the filter 11 is covered with the covering material 39. The filter 11 is located between the pedestal 38 and the covering material 39, and is installed in the cleaning chamber 32 while being sandwiched between the pedestal 38 and the covering material 39. After the filter 11 is installed in the cleaning chamber 32, the lid 25 is placed on the upper part of the peripheral wall 28 of the main body 24 with the convex portion 31 of the container main body 24 and the convex portion 35 of the lid 25 aligned with each other. The upper opening 29 of the container 24 is closed. Next, the convex portion 37 of the clamp 26 is inserted between the concave portion 30 of the container main body 24 and the concave portion of the lid 25, and the clamp 26 is fitted into the peripheral wall 28 of the main body 24 and the peripheral surface of the lid 25, and then the clamp 26. Is rotated in the circumferential direction so that the convex portions 31 and 35 of the main body 24 and the lid 25 and the convex portion 37 of the clamp 26 are arranged in the vertical direction. When the convex portions 31 and 35 of the container main body 24 and the lid 24 and the convex portion 37 of the clamp 26 are arranged in the vertical direction, the lower surface of the lid 25 is pressed against the upper portion of the peripheral wall 28 of the main body 24, and the lid 25 is in close contact with the main body 24. The cleaning chamber 32 can be sealed.

蓋２５によって容器本体２４の上部開口２９を閉塞した後、洗浄設備１０を起動させ、高圧洗浄流体を洗浄容器１９Ａに流入させる。洗浄設備１０を起動させると、図３に矢印Ｌ１で示すように、洗浄流体が流入口３３から洗浄室３２に流入するとともに、管材４０を通って流出口３４から洗浄容器１９Ａの外側に流出する。流入口３３から洗浄室３２に流入した洗浄流体は、台座３８の整流板４１に当たり、整流板４１の流体抵抗により、整流板４１全域に満遍なく分布した後、貫通孔５６を通り抜け、さらに、フィルタ１１の下面１３の略全域からフィルタ１１の内部（濾材内部）に進入し、下面１３から上面１２に向かって通流する。洗浄流体は、フィルタ１１を形成する濾材の間隙を通って濾材に付着した汚れを落とし、さらに、濾材の内部に浸透して濾材に滲入した汚れを落とし、フィルタ１１を洗浄する。フィルタ１１の上面１２から流出した洗浄流体は、それの流路となるスペース４７に捕集され、図３に矢印Ｌ２で示すように、スペース４７を通って管材４０に向かって流れ、管材４０に吸引される。洗浄流体は、管材４０を通って流出口３４に達し、流出口３４から洗浄容器１９Ａの外側に流出した後、減圧装置で減圧されて通常流体に戻る。この設備１０では、１つのフィルタ１１の洗浄時間が約５０〜７０分であり、高圧洗浄流体や通常流体をその時間だけ循環させる。 After the upper opening 29 of the container main body 24 is closed by the lid 25, the cleaning equipment 10 is activated, and the high-pressure cleaning fluid flows into the cleaning container 19A. When the cleaning facility 10 is activated, as indicated by an arrow L1 in FIG. 3, the cleaning fluid flows into the cleaning chamber 32 from the inlet 33 and flows out of the cleaning container 19A from the outlet 34 through the pipe 40. . The cleaning fluid flowing into the cleaning chamber 32 from the inflow port 33 hits the rectifying plate 41 of the pedestal 38, and evenly distributed over the entire rectifying plate 41 due to the fluid resistance of the rectifying plate 41, passes through the through holes 56, and further passes through the filter 11. Enters the inside of the filter 11 (inside the filter medium) from substantially the entire area of the lower surface 13, and flows from the lower surface 13 toward the upper surface 12. The cleaning fluid cleans the filter 11 by removing the dirt attached to the filter medium through the gap between the filter medium forming the filter 11, and further removing the dirt that penetrates into the filter medium and penetrates the filter medium. The cleaning fluid flowing out from the upper surface 12 of the filter 11 is collected in a space 47 serving as a flow path thereof, and flows toward the pipe member 40 through the space 47 as indicated by an arrow L2 in FIG. Sucked. The cleaning fluid reaches the outlet 34 through the pipe member 40, flows out of the cleaning container 19 A from the outlet 34, and then is decompressed by the decompression device to return to the normal fluid. In this equipment 10, the cleaning time of one filter 11 is about 50 to 70 minutes, and a high-pressure cleaning fluid or a normal fluid is circulated for that time.

フィルタ洗浄容器１９Ａを利用したフィルタ洗浄方法は、被覆材３９がフィルタ１１の上面１２の略全域を覆い、フィルタ１１を通流した高圧洗浄流体の流路となるスペース４７がフィルタ１１の上面１２と被覆材３９の中央部４６との間に形成されているから、洗浄流体をフィルタ１１の下面１３から上面１２に向かって確実に通流させることができる。フィルタ洗浄方法は、フィルタ１１を通流しない洗浄流体の発生を防ぐことができ、洗浄流体の無駄な消費を防ぐことができる。フィルタ洗浄方法は、整流作用を有する整流板４１の流体抵抗により、高圧洗浄流体を整流板４１全域に満遍なく分布させつつ、洗浄流体をフィルタ１１に通流させることができるから、洗浄流体をフィルタ１１の下面１３の略全域から上面１２の略全域に向かって確実に通流させることができ、フィルタ１１に対する高い洗浄機能を有する。 In the filter cleaning method using the filter cleaning container 19 A, the covering material 39 covers substantially the entire area of the upper surface 12 of the filter 11, and a space 47 serving as a flow path for the high-pressure cleaning fluid flowing through the filter 11 is formed between the upper surface 12 of the filter 11. Since it is formed between the central portion 46 of the covering material 39, the cleaning fluid can be reliably passed from the lower surface 13 of the filter 11 toward the upper surface 12. The filter cleaning method can prevent the generation of cleaning fluid that does not flow through the filter 11, and can prevent wasteful consumption of the cleaning fluid. The filter cleaning method allows the cleaning fluid to flow through the filter 11 while evenly distributing the high-pressure cleaning fluid over the entire rectifying plate 41 due to the fluid resistance of the rectifying plate 41 having a rectifying action. Thus, it is possible to surely flow from substantially the entire lower surface 13 toward the entire upper surface 12 and has a high cleaning function for the filter 11.

フィルタ洗浄容器１９Ａを利用したフィルタ洗浄方法は、フィルタ１１の上面１２の周縁部４４が被覆材３９の周縁部４５に密着することで、洗浄容器１９Ａに流入する洗浄流体の全てがフィルタ１１を通流するから、フィルタ１１の洗浄に利用されずに設備を循環する洗浄流体の発生を防ぐことができる。また、被覆材３９の周縁部４５がフィルタ１１の上面１２の周縁部４４に当接することで、被覆材３９がフィルタ１１の上面１２の略全域を確実に覆い、立体構造を有するフィルタ１１であっても、洗浄流体をその略全域に確実に通流させることができる。フィルタ洗浄方法は、洗浄流体の流入口３３がフィルタ１１の四隅の下方に４つ形成され、洗浄流体を４つの流入口３３から放出してフィルタ１１の複数部分に満遍なく当てることができるから、フィルタ１１の略全域に略均一の流量の洗浄流体を通流させることができる。 In the filter cleaning method using the filter cleaning container 19A , the peripheral portion 44 of the upper surface 12 of the filter 11 is in close contact with the peripheral portion 45 of the covering material 39, so that all of the cleaning fluid flowing into the cleaning container 19A passes through the filter 11. Therefore, it is possible to prevent generation of a cleaning fluid that circulates through the equipment without being used for cleaning the filter 11. In addition, since the peripheral portion 45 of the covering material 39 abuts on the peripheral portion 44 of the upper surface 12 of the filter 11, the covering material 39 reliably covers substantially the entire area of the upper surface 12 of the filter 11, and the filter 11 has a three-dimensional structure. However, the cleaning fluid can be surely passed through substantially the entire area. In the filter cleaning method , four cleaning fluid inlets 33 are formed below the four corners of the filter 11, and the cleaning fluid can be discharged from the four inlets 33 and uniformly applied to a plurality of portions of the filter 11. The cleaning fluid having a substantially uniform flow rate can be passed through substantially the entire area 11.

図５，６は、蓋２５を省略して示す他の一例の洗浄容器１９Ｂの上面図と、蓋２５を取り付けた状態で示す図５の６−６線矢視断面図とである。図７は、台座３８と被覆材４９と管材５０とを示すそれらの斜視図である。図５，６では、縦方向を矢印Ａで示し（図６のみ）、径方向を矢印Ｂで示すとともに、周方向を矢印Ｃで示す（図５のみ）。この洗浄容器１９Ｂは、図２のそれと同様に、図１に示す洗浄設備１０において使用される。洗浄容器１９Ｂでは、その洗浄室３２に使用済みのエアフィルタ１１や使用済みのリキッドフィルタ１１が収容され、フィルタ１１が台座３８（整流板４１）に乗せられている。この洗浄容器１９Ｂが図２のそれと異なるところは被覆材４９や管材５０、流入口５１（出入口）の構成であり、それらを除くその他の構成は図２の洗浄容器１９Ａと同一であるから、図２と同一の符号を付すことで、被覆材４９や管材５０、流入口５１を除くこの洗浄容器１９Ｂのその他の構成の説明は省略する。 5 and 6 are a top view of another example of the cleaning container 19B with the lid 25 omitted, and a cross-sectional view taken along line 6-6 in FIG. 5 with the lid 25 attached. FIG. 7 is a perspective view showing the pedestal 38, the covering material 49, and the pipe material 50. 5 and 6, the vertical direction is indicated by an arrow A (only in FIG. 6), the radial direction is indicated by an arrow B, and the circumferential direction is indicated by an arrow C (only in FIG. 5). This cleaning container 19B is used in the cleaning facility 10 shown in FIG. 1, similarly to that of FIG. In the cleaning container 19B, the used air filter 11 and the used liquid filter 11 are accommodated in the cleaning chamber 32, and the filter 11 is placed on the pedestal 38 (rectifying plate 41). The cleaning container 19B is different from that of FIG. 2 in the configuration of the covering material 49, the pipe material 50, and the inlet 51 (entrance / exit), and other configurations are the same as those of the cleaning container 19A in FIG. The same reference numerals as those in FIG. 2 are used to omit the description of other configurations of the cleaning container 19B excluding the covering material 49, the pipe material 50, and the inflow port 51.

被覆材４９は、フィルタ１１の４つの側面１４（周面）の周方向外方に位置する周縁部５２と、フィルタ１１の上面１２（第２面）から上方へ離間する中央部５３とを有する。中央部５３は、その平面形状が四角形を呈し、その面積がフィルタ１１の上面１２のそれと略同一またはフィルタ１１の上面１２のそれよりもわずかに大きく、フィルタ１１の上面１２全域を覆っている。周縁部５２は、中央部５３の周縁から下方へ延び、縦方向の寸法がフィルタ１１の側面１４のそれよりも大きく、フィルタ１１の側面１４全域を覆っている。被覆材４９の周縁部５２とフィルタ１１のそれら側面１４との間に隙間がないことが好ましいが、フィルタ１１の大きさによってはわずかに隙間が形成される場合もある。フィルタ１１の上面１２と被覆材４９の中央部５３との間にはフィルタ１１を通流した洗浄流体を捕集して流体を管材５０に導くスペース４７が形成され、洗浄室３２にはスペース４７を除く空間４８が形成されている。 The covering material 49 has a peripheral edge portion 52 located on the outer side in the circumferential direction of the four side surfaces 14 (peripheral surfaces) of the filter 11 and a central portion 53 spaced upward from the upper surface 12 (second surface) of the filter 11. . The central portion 53 has a square shape in plan view, and its area is substantially the same as that of the upper surface 12 of the filter 11 or slightly larger than that of the upper surface 12 of the filter 11 and covers the entire upper surface 12 of the filter 11. The peripheral portion 52 extends downward from the peripheral edge of the central portion 53, has a vertical dimension larger than that of the side surface 14 of the filter 11, and covers the entire side surface 14 of the filter 11. Although it is preferable that there is no gap between the peripheral edge portion 52 of the covering material 49 and those side surfaces 14 of the filter 11, a slight gap may be formed depending on the size of the filter 11. A space 47 is formed between the upper surface 12 of the filter 11 and the central portion 53 of the covering material 49 to collect the cleaning fluid flowing through the filter 11 and guide the fluid to the pipe member 50. A space 48 is formed except for.

管材５０は、流出口３４の側に位置する第１部分５４と、第１部分５４から５本に分岐する第２部分５５とから形成されている。第１部分５４は、流出口３４につながり、流出口３４から上方へ延びた後、被覆材４９の中央部５３の中心部分に向かって径方向へ水平に延び、さらに、中央部５３の中心部分で下方へわずかに延びている。第２部分５５は、被覆材４９の中央部５３の中心部分につながるとともに、中央部５３の４つの角部分（複数箇所）につながっている。第２部分５５は、第１部分５４から中央部５３の角部分に向かって径方向へ水平に延びた後、中央部５３の角部分で下方に延びている。流入口５１は、５つのそれらが台座３８を挟んでフィルタ１１の下方に位置し、底壁２７と台座３８との間に形成された空間４３に突出している。それら流入口５１は、被覆材４９の中央部５３の中心部分の下方に形成され、さらに、管材５０の第２部分５５の間であって、被覆材４９の周縁部５２の一辺の長さ寸法を二分した位置の下方に形成されている。 The pipe member 50 is formed of a first portion 54 located on the outlet 34 side and a second portion 55 branched from the first portion 54 into five. The first portion 54 is connected to the outflow port 34, extends upward from the outflow port 34, and then extends horizontally in the radial direction toward the central portion 53 of the central portion 53 of the covering material 49. It extends slightly downward. The second portion 55 is connected to the central portion of the central portion 53 of the covering material 49 and is connected to four corner portions (a plurality of locations) of the central portion 53. The second portion 55 extends horizontally in the radial direction from the first portion 54 toward the corner portion of the central portion 53, and then extends downward at the corner portion of the central portion 53. The five inflow ports 51 are located below the filter 11 with the pedestal 38 interposed therebetween, and protrude into a space 43 formed between the bottom wall 27 and the pedestal 38. The inflow ports 51 are formed below the center portion of the central portion 53 of the covering material 49, and further between the second portions 55 of the pipe material 50, and the length dimension of one side of the peripheral edge portion 52 of the covering material 49. It is formed below the position that is divided into two.

この洗浄容器１９Ｂを使用して使用済みのエアフィルタ１１やリキッドフィルタ１１を洗浄する手順の一例は、以下のとおりである。フィルタ１１を気密構造洗浄室３２に入れ、フィルタ１１の下面１３（第１面）を整流板４１に当接させた状態でフィルタ１１を台座３８に乗せた後、被覆材４９をフィルタ１１に被せ、被覆材４９によってフィルタ１１の上面１２（第２面）と側面１４（周面）とを覆う。フィルタ１１は、その上面１２全域と側面１４全域とが被覆材４９に覆われ、台座３８と被覆材４９との間に位置する。フィルタ１１を洗浄室３２に設置した後は、容器本体２４の凸部３１と蓋２５の凸部３５とを互いに一致させた状態で蓋２５を本体２４の周壁２８の上部に乗せ、蓋２５を介して本体２４の上部開口２９を閉じ、図２の洗浄容器１９Ａと同様にクランプ２６によって蓋２５を本体２４に密着させ、洗浄室３２を密閉する。 An example of the procedure for cleaning the used air filter 11 and liquid filter 11 using the cleaning container 19B is as follows. The filter 11 is placed in the airtight structure cleaning chamber 32, the filter 11 is placed on the pedestal 38 with the lower surface 13 (first surface) of the filter 11 being in contact with the rectifying plate 41, and then the covering material 49 is put on the filter 11. The upper surface 12 (second surface) and the side surface 14 (circumferential surface) of the filter 11 are covered with the covering material 49. The entire upper surface 12 and the entire side surface 14 of the filter 11 are covered with the covering material 49, and are located between the base 38 and the covering material 49. After the filter 11 is installed in the cleaning chamber 32, the lid 25 is placed on the upper part of the peripheral wall 28 of the main body 24 with the convex portion 31 of the container main body 24 and the convex portion 35 of the lid 25 aligned with each other. The upper opening 29 of the main body 24 is closed, and the lid 25 is brought into close contact with the main body 24 by the clamp 26 in the same manner as the cleaning container 19A of FIG.

蓋２５によって容器本体２４の上部開口２９を閉塞した後、洗浄設備１０を起動させ、高圧洗浄流体を洗浄容器１９Ｂに流入させる。洗浄設備１０を起動させると、図６に矢印Ｌ１で示すように、洗浄流体が流入口５１から洗浄室３２に流入するとともに、管材５０を通って流出口３４から洗浄容器１９Ｂの外側に流出する。流入口３３から洗浄室３２に流入した洗浄流体は、台座３８の整流板４１に当たり、整流板４１の流体抵抗により、整流板４１全域に満遍なく分布した後、貫通孔５６を通り抜け、さらに、フィルタ１１の下面１３の略全域からフィルタ１１の内部（濾材間隙）に進入し、下面１３から上面１２に向かって通流する。洗浄流体は、フィルタ１１を形成する濾材の間隙を通って濾材に付着した汚れを落とし、さらに、濾材の内部に浸透して濾材に滲入した汚れを落とし、フィルタ１１を洗浄する。フィルタ１１の上面１２から流出した洗浄流体は、それの流路となるスペース４７に捕集され、図６に矢印Ｌ２で示すように、スペース４７を通って管材５０に向かって流れ、管材５０に吸引される。洗浄流体は、管材５０を通って流出口３４に達し、流出口３４から洗浄容器１９Ｂの外側に流出した後、減圧装置で減圧されて通常流体に戻る。フィルタ１１の洗浄時間は、図２の洗浄容器１９Ａのそれと同一である。 After the upper opening 29 of the container main body 24 is closed by the lid 25, the cleaning equipment 10 is activated, and the high-pressure cleaning fluid flows into the cleaning container 19B. When the cleaning facility 10 is activated, as indicated by an arrow L1 in FIG. 6, the cleaning fluid flows into the cleaning chamber 32 from the inlet 51 and flows out of the cleaning container 19B from the outlet 34 through the pipe 50. . The cleaning fluid flowing into the cleaning chamber 32 from the inflow port 33 hits the rectifying plate 41 of the pedestal 38, and evenly distributed over the entire rectifying plate 41 due to the fluid resistance of the rectifying plate 41, passes through the through holes 56, and further passes through the filter 11. It enters the inside of the filter 11 (filter medium gap) from substantially the entire area of the lower surface 13 and flows from the lower surface 13 toward the upper surface 12. The cleaning fluid cleans the filter 11 by removing the dirt attached to the filter medium through the gap between the filter medium forming the filter 11, and further removing the dirt that penetrates into the filter medium and penetrates the filter medium. The cleaning fluid that has flowed out of the upper surface 12 of the filter 11 is collected in a space 47 that becomes a flow path thereof, and flows toward the pipe 50 through the space 47 as indicated by an arrow L2 in FIG. Sucked. The cleaning fluid reaches the outlet 34 through the pipe member 50, flows out of the cleaning container 19 B from the outlet 34, and then is decompressed by the decompression device to return to the normal fluid. The cleaning time of the filter 11 is the same as that of the cleaning container 19A of FIG.

フィルタ洗浄容器１９Ｂを利用したフィルタ洗浄方法は、被覆材４９がフィルタ１１の上面１２全域と側面１４全域とを覆い、フィルタ１１を通流した高圧洗浄流体の流路となるスペース４７がフィルタ１１の上面１２と被覆材４９の中央部５３との間に形成されているから、洗浄流体をフィルタ１１の下面１３から上面１２に向かって確実に通流させることができる。フィルタ洗浄方法は、フィルタ１１を通流しない洗浄流体の発生を防ぐことができ、洗浄流体の無駄な消費を防ぐことができる。フィルタ洗浄方法は、整流作用を有する整流板４１の流体抵抗により、高圧洗浄流体を整流板４１全域に満遍なく分布させつつ、洗浄流体をフィルタ１１に通流させることができるから、洗浄流体をフィルタ１１の下面１３の略全域から上面１２の略全域に向かって確実に通流させることができ、フィルタ１１に対する高い洗浄機能を有する。 In the filter cleaning method using the filter cleaning container 19 B, the covering material 49 covers the entire upper surface 12 and the entire side surface 14 of the filter 11, and the space 47 serving as a flow path for the high-pressure cleaning fluid that has flowed through the filter 11 Since it is formed between the upper surface 12 and the central portion 53 of the covering material 49, the cleaning fluid can surely flow from the lower surface 13 of the filter 11 toward the upper surface 12. The filter cleaning method can prevent the generation of cleaning fluid that does not flow through the filter 11, and can prevent wasteful consumption of the cleaning fluid. The filter cleaning method allows the cleaning fluid to flow through the filter 11 while evenly distributing the high-pressure cleaning fluid over the entire rectifying plate 41 due to the fluid resistance of the rectifying plate 41 having a rectifying action. Thus, it is possible to surely flow from substantially the entire lower surface 13 toward the entire upper surface 12 and has a high cleaning function for the filter 11.

フィルタ洗浄容器１９Ｂを利用したフィルタ洗浄方法は、被覆材４９の周縁部５２が立体構造を有するフィルタ１１の側面１４（周面）の周方向外方に位置して側面１４全域を覆っているから、立体構造を有するフィルタ１１であっても、洗浄流体をその略全域に確実に通流させることができる。フィルタ洗浄方法は、管材５０がその第１部分５４から５本に分岐して被覆材４９の中央部５３の複数箇所につながる第２部分５５を有するから、フィルタ１１を通流した洗浄流体を被覆材４９の複数箇所から管材５０に捕集することができ、フィルタ１１の全域に略均一の流量の洗浄流体を通流させることができる。フィルタ洗浄方法は、洗浄流体の流入口５１が被覆材４９の中央部５３の中心部分の下方に形成され、さらに、被覆材４９の周縁部５２の一辺の長さ寸法を二分した位置の下方に形成され、洗浄流体を５つのそれら流入口５１から放出してフィルタ１１の複数部分に満遍なく当てることができるから、フィルタ１１の略全域に略均一の流量の洗浄流体を通流させることができる。 In the filter cleaning method using the filter cleaning container 19B , the peripheral edge 52 of the covering material 49 is located on the outer side in the circumferential direction of the side surface 14 (circumferential surface) of the filter 11 having a three-dimensional structure and covers the entire side surface 14 region. Even in the filter 11 having a three-dimensional structure, the cleaning fluid can be surely passed through substantially the entire area. In the filter cleaning method , since the pipe material 50 has the second portion 55 branched from the first portion 54 into five portions and connected to a plurality of locations in the central portion 53 of the covering material 49, the cleaning fluid flowing through the filter 11 is covered. The pipe material 50 can be collected from a plurality of locations of the material 49, and a substantially uniform flow rate of the cleaning fluid can be passed through the entire area of the filter 11. In the filter cleaning method , the cleaning fluid inlet 51 is formed below the central portion of the central portion 53 of the covering material 49, and further, below the position where the length of one side of the peripheral edge 52 of the covering material 49 is divided into two. Thus, the cleaning fluid can be discharged from the five inlets 51 and uniformly applied to a plurality of portions of the filter 11, so that the cleaning fluid having a substantially uniform flow rate can be passed over substantially the entire area of the filter 11.

図２の洗浄容器１９Ａでは、図５のそれと同様に、管材４０が第１部分と第１部分から複数に分岐して被覆材３９につながる第２部分とから形成され、それら第２部分が被覆材３９の中央部４６の複数箇所につながっていてもよい。図５の洗浄容器１９Ｂでは、図２のそれと同様に、管材５０が分岐することなく、管材５０が被覆材４９の中央部５３の中心部分につながっていてもよい。また、図５の洗浄容器１９Ｂでは、管材５０の４本の第２部分５５が被覆材４９の周縁部５２につながっていてもよい。図２および図５の洗浄容器１９Ａ，１９Ｂでは、台座３８の下方に４つまたは５つの流入口３３，５１が形成されているが、流入口３３，５１を４つまたは５つに限定するものではなく、流入口が１つだけ形成されていてもよく、６つ以上の流入口が形成されていてもよい。 In the cleaning container 19A of FIG. 2, the tube material 40 is formed of a first part and a second part branched from the first part into a plurality of parts and connected to the covering material 39, as in FIG. 5, and these second parts are covered. You may connect with the multiple places of the center part 46 of the material 39. In the cleaning container 19 B of FIG. 5, the tube material 50 may be connected to the central portion of the central portion 53 of the covering material 49 without branching the tube material 50, similar to that of FIG. 2. In the cleaning container 19 B of FIG. 5, the four second portions 55 of the pipe material 50 may be connected to the peripheral edge 52 of the covering material 49. In the cleaning containers 19A and 19B of FIGS. 2 and 5, four or five inlets 33 and 51 are formed below the pedestal 38, but the inlets 33 and 51 are limited to four or five. Instead, only one inlet may be formed, and six or more inlets may be formed.

また、図２および図５の洗浄容器１９Ａ，１９Ｂでは、洗浄流体の流入口３３，５１が流体の流出口（出入口）になり、洗浄流体の流出口３４が流体の流入口（出入口）になっていてもよい。この場合は、管材４０，５０からフィルタ１１の上面１２（第１面）に洗浄流体が放出され、洗浄流体がフィルタ１１１の上面１２から下面１３（第２面）に向かってフィルタ１１を通流する。 Further, in the cleaning containers 19A and 19B of FIGS. 2 and 5, the cleaning fluid inlets 33 and 51 are fluid outlets (entrances / exits), and the cleaning fluid outlet 34 is a fluid inlet (entrance / exits). It may be. In this case, the cleaning fluid is discharged from the pipe members 40 and 50 to the upper surface 12 (first surface) of the filter 11, and the cleaning fluid flows through the filter 11 from the upper surface 12 of the filter 111 toward the lower surface 13 (second surface). To do.

この洗浄設備１０では高圧洗浄流体の原料として二酸化炭素ガスを使用しているが、高圧洗浄流体の原料として、二酸化炭素ガスの他に、水やメタノールを使用することができる。高圧洗浄流体の原料に水を使用する場合は、ポンプ１７を介して気圧が２２０ＭＰａ以上に昇圧されるとともに、温度調節器１８を介して温度が３７４℃以上に加熱される。また、高圧洗浄流体の原料にメタノールを使用する場合は、ポンプ１７を介して気圧が７９ＭＰａ以上に昇圧されるとともに、温度調節器１８を介して温度が２３９℃以上に加熱される。 In this cleaning facility 10, carbon dioxide gas is used as a raw material for the high-pressure cleaning fluid, but water or methanol can be used as the raw material for the high-pressure cleaning fluid in addition to the carbon dioxide gas. When water is used as the raw material for the high-pressure cleaning fluid, the atmospheric pressure is increased to 220 MPa or higher via the pump 17 and the temperature is heated to 374 ° C. or higher via the temperature controller 18. When methanol is used as the raw material for the high-pressure cleaning fluid, the atmospheric pressure is increased to 79 MPa or higher via the pump 17 and the temperature is heated to 239 ° C. or higher via the temperature controller 18.

フィルタ洗浄容器を使用したフィルタ洗浄方法を実施するフィルタ洗浄設備の概念図。The conceptual diagram of the filter cleaning equipment which implements the filter cleaning method using a filter cleaning container. 蓋を省略して示す洗浄容器の上面図。The top view of the washing container which abbreviate | omits and shows a lid | cover. 蓋を取り付けた状態で示す図２の３−３線矢視断面図。FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. 2 with the lid attached. 台座と被覆材と管材とを示すそれらの斜視図。The perspective view which shows a base, a coating | covering material, and a pipe material. 蓋を省略して示す他の一例の洗浄容器の上面図。The top view of the washing container of another example which abbreviate | omits a lid | cover and shows. 蓋を取り付けた状態で示す図５の６−６線矢視断面図。FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 5 with the lid attached. 台座と被覆材と管材とを示すそれらの斜視図。The perspective view which shows a base, a coating | covering material, and a pipe material.

１０フィルタ洗浄設備
１１フィルタ
１２上面（第１または第２面）
１３下面（第１または第２面）
１４側面（周面）
１９Ａフィルタ洗浄容器
１９Ｂフィルタ洗浄容器
２４容器本体
２５蓋
２６クランプ
２７底壁
２８周壁
２９上部開口
３２気密構造洗浄室
３３流入口（第１または第２出入口）
３４流出口（第１または第２出入口）
３８台座
３９被覆材
４０管材
４１整流板
４２脚部
４４周縁部（周囲）
４５周縁部
４６中央部
４７スペース
４８空間
４９被覆材
５０管材
５１流入口（第１または第２出入口）
５２周縁部
５３中央部
５４第１部分
５５第２部分
10 Filter cleaning equipment 11 Filter 12 Upper surface (first or second surface)
13 Lower surface (first or second surface)
14 Side (peripheral surface)
19A Filter cleaning container 19B Filter cleaning container 24 Container body 25 Lid 26 Clamp 27 Bottom wall 28 Peripheral wall 29 Top opening 32 Airtight structure cleaning chamber 33 Inlet (first or second inlet / outlet)
34 Outlet (first or second entrance)
38 Pedestal 39 Covering material 40 Pipe material 41 Current plate 42 Leg part 44 Peripheral part (around)
45 Peripheral part 46 Central part 47 Space 48 Space 49 Coating material 50 Pipe material 51 Inlet (first or second inlet / outlet)
52 peripheral portion 53 central portion 54 first portion 55 second portion

Claims

超臨界流体と亜臨界流体との一方から形成された高圧洗浄流体を利用してフィルタを洗浄する気密構造洗浄室と、前記洗浄室へ前記洗浄流体を流入させる流入口と、前記洗浄室から前記洗浄流体を流出させる流出口とを備えたフィルタ洗浄容器を利用し、前記洗浄流体を前記洗浄室に収容された前記フィルタの第１面から第２面に向かって通流させることで該フィルタを洗浄するフィルタ洗浄方法において、
前記フィルタ洗浄方法では、前記フィルタの第１および第２面のいずれか一方の面の略全域を覆う傘状の被覆材が前記洗浄室に設置されているとともに、前記被覆材から延びていて前記流出口につながる管材が前記洗浄室に設置され、前記被覆材が前記フィルタの面の周縁部に当接かつ密着する周縁部と前記フィルタの面から離間して前記管材につながる中央部とを有し、前記フィルタの第１面から第２面に向かって通流した前記洗浄流体を捕集して該洗浄流体を前記管材に導くスペースが前記フィルタの面と前記被覆材の中央部との間に形成されていることを特徴とする前記フィルタ洗浄方法。 An airtight structure cleaning chamber that cleans the filter using a high-pressure cleaning fluid formed from one of a supercritical fluid and a subcritical fluid; an inlet that allows the cleaning fluid to flow into the cleaning chamber; A filter cleaning container provided with an outlet through which the cleaning fluid flows out is used to flow the cleaning fluid from the first surface to the second surface of the filter accommodated in the cleaning chamber. In the filter cleaning method for cleaning,
In the filter cleaning method, an umbrella-shaped coating material that covers substantially the entire area of one of the first and second surfaces of the filter is installed in the cleaning chamber and extends from the coating material. A pipe material connected to the outflow port is installed in the cleaning chamber, and a peripheral part where the covering material abuts and adheres to a peripheral part of the surface of the filter and a central part which is separated from the surface of the filter and connected to the pipe material. A space for collecting the cleaning fluid flowing from the first surface of the filter toward the second surface and guiding the cleaning fluid to the pipe member is formed between the surface of the filter and the central portion of the covering material. The said filter cleaning method characterized by being formed in between.

前記フィルタ洗浄方法では、前記フィルタが前記第１面と前記第２面との間に四角形の４つの側面が延びる六面体の立体構造を有し、前記被覆材の平面形状が四角形を呈するとともにその周縁部が前記フィルタの第１および第２面のいずれか一方の面の周縁部に当接かつ密着している請求項１に記載のフィルタ洗浄方法。 In the filter cleaning method, the filter has a hexahedral three-dimensional structure in which four sides of a quadrangle extend between the first surface and the second surface, and the planar shape of the covering material exhibits a quadrangle and the periphery thereof The filter cleaning method according to claim 1, wherein the portion is in contact with and in close contact with a peripheral portion of one of the first and second surfaces of the filter.

超臨界流体と亜臨界流体との一方から形成された高圧洗浄流体を利用してフィルタを洗浄する気密構造洗浄室と、前記洗浄室へ前記洗浄流体を流入させる流入口と、前記洗浄室から前記洗浄流体を流出させる流出口とを備えたフィルタ洗浄容器を利用し、前記フィルタが前記第１面と前記第２面との間に四角形の４つの側面が延びる六面体の立体構造を有し、前記洗浄流体を前記洗浄室に収容された前記フィルタの第１面から第２面に向かって通流させることで該フィルタを洗浄するフィルタ洗浄方法において、
前記フィルタ洗浄方法では、前記フィルタを覆う被覆材が前記洗浄室に設置されているとともに、前記被覆材から延びていて前記流出口につながる管材が前記洗浄室に設置され、前記被覆材が前記フィルタの第１および第２面のいずれか一方の面から離間して該面全域を覆う中央部と前記フィルタのそれら側面の周方向外方に位置して該側面全域を覆う周縁部とを有し、前記フィルタの第１面から第２面に向かって通流した前記洗浄流体を捕集して該洗浄流体を前記管材に導くスペースが前記フィルタの面と前記被覆材の中央部との間に形成され、前記被覆材の周縁部と前記フィルタのそれら側面との間に隙間がないことを特徴とする前記フィルタ洗浄方法。 An airtight structure cleaning chamber that cleans the filter using a high-pressure cleaning fluid formed from one of a supercritical fluid and a subcritical fluid; an inlet that allows the cleaning fluid to flow into the cleaning chamber; A filter cleaning container having an outlet for allowing the cleaning fluid to flow out, wherein the filter has a hexahedral three-dimensional structure in which four sides of a quadrangle extend between the first surface and the second surface; In the filter cleaning method for cleaning the filter by allowing a cleaning fluid to flow from the first surface to the second surface of the filter housed in the cleaning chamber,
In the filter cleaning method, a covering material that covers the filter is installed in the cleaning chamber, and a pipe member that extends from the coating material and leads to the outlet is installed in the cleaning chamber, and the covering material is A central portion that covers the entire area of the filter and is spaced apart from one of the first and second surfaces of the filter and a peripheral edge that is located on the outer side in the circumferential direction of the side surface of the filter and covers the entire area of the side surface. And a space for collecting the cleaning fluid flowing from the first surface to the second surface of the filter and guiding the cleaning fluid to the pipe member is between the surface of the filter and the central portion of the covering material. The filter cleaning method is characterized in that there is no gap between the peripheral edge of the covering material and the side surfaces of the filter.

前記フィルタ洗浄方法では、前記管材が前記流出口の側に位置する第１部分と前記第１部分から複数に分岐して前記被覆材の複数箇所につながる第２部分とから形成されている請求項３記載のフィルタ洗浄方法。 The said filter cleaning method WHEREIN: The said pipe material is formed from the 1st part located in the said outflow port side, and the 2nd part branched into several from the said 1st part and connected to the several places of the said coating | covering material. 3. The filter cleaning method according to 3.

前記フィルタ洗浄方法では、前記フィルタの第１および第２面のいずれか他方の面を当接させた状態で該フィルタを載せる通気性の台座が前記洗浄室に設置され、前記フィルタが前記被覆材と前記台座との間に位置し、前記高圧洗浄流体が前記台座の整流作用によって前記フィルタの略全域を通流する請求項１ないし請求項４いずれかに記載のフィルタ洗浄方法。 In the filter cleaning method, a breathable pedestal on which the filter is placed in a state in which either one of the first and second surfaces of the filter is in contact is installed in the cleaning chamber, and the filter is the covering material The filter cleaning method according to any one of claims 1 to 4, wherein the filter is located between the base and the pedestal, and the high-pressure cleaning fluid flows through substantially the entire area of the filter by a rectifying action of the pedestal.

前記フィルタ洗浄方法では、前記フィルタ洗浄容器の前記洗浄室へ前記洗浄流体を流入させる流入口が複数形成されている請求項１ないし請求項５いずれかに記載のフィルタ洗浄方法。 The filter cleaning method, the filter cleaning method according to the inlet port for flowing said cleaning fluid to the cleaning chamber to any one of claims 1 to claim 5 formed with a plurality of said filter cleaning vessel.