JP4573027B2 - Excimer lamp lighting device - Google Patents

Excimer lamp lighting device Download PDF

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JP4573027B2
JP4573027B2 JP2004247316A JP2004247316A JP4573027B2 JP 4573027 B2 JP4573027 B2 JP 4573027B2 JP 2004247316 A JP2004247316 A JP 2004247316A JP 2004247316 A JP2004247316 A JP 2004247316A JP 4573027 B2 JP4573027 B2 JP 4573027B2
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excimer lamp
power transmission
transmission cable
lighting device
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JP2006066224A (en
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正 稲田
雅規 中村
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Ushio Denki KK
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Description

この発明は、エキシマランプを用いたエキシマランプ点灯装置に係わり、特に、給電装置からエキシマランプに高周波高電圧を給電する送電ケーブルの改良に係わるエキシマランプ点灯装置に関する。   The present invention relates to an excimer lamp lighting device using an excimer lamp, and more particularly to an excimer lamp lighting device related to improvement of a power transmission cable for feeding a high frequency high voltage from a power feeding device to an excimer lamp.

近年、半導体の製造工程や液晶基板の洗浄処理等にエキシマランプから放射されるエキシマ光を利用した乾式処理が利用されるようになってきた。エキシマランプからエキシマ光を放射するためには、エキシマランプに、例えば、数ｋＨｚから数百ｋＨｚ程度の高周波で、且つ数ｋＶ以上の高電圧を印加して点灯する必要がある。このような高周波高電圧を用いてエキシマランプを点灯する場合は、エキシマランプと高周波高電圧を発生する給電装置間、特に、エキシマランプと給電装置に設けられる高周波高電圧を出力する昇圧トランス間に設けられる送電ケーブルを短くする必要があった。これは、高周波高電圧の送電時に、送電ケーブルから電磁ノイズが漏れるため送電ケーブルの静電容量による漏洩電流の増加により効率的にエキシマランプを点灯することができないことによるとともに、耐コロナ対応ができないため安全上問題があったためである。   In recent years, dry processing using excimer light emitted from an excimer lamp has been used for semiconductor manufacturing processes, liquid crystal substrate cleaning processing, and the like. In order to emit excimer light from an excimer lamp, it is necessary to light the excimer lamp by applying a high voltage of several kHz to several hundred kHz and a high voltage of several kV or more. When an excimer lamp is lit using such a high frequency high voltage, between the excimer lamp and the power supply device that generates the high frequency high voltage, in particular, between the excimer lamp and the step-up transformer that outputs the high frequency high voltage provided in the power supply device. It was necessary to shorten the transmission cable provided. This is because electromagnetic noise leaks from the power transmission cable during high-frequency and high-voltage power transmission, so that the excimer lamp cannot be turned on efficiently due to an increase in leakage current due to the capacitance of the power transmission cable, and it cannot cope with corona resistance. This is because there was a safety problem.

特開平７−１６９４４４号公報には、高周波高電圧を出力する昇圧トランスとエキシマランプ間に設けられる送電ケーブルの距離を極力短くして電磁ノイズの漏れを小さくする技術が開示されている。   Japanese Patent Laid-Open No. 7-169444 discloses a technique for reducing leakage of electromagnetic noise by minimizing the distance between a power transmission cable provided between a step-up transformer that outputs a high-frequency high voltage and an excimer lamp.

図８は、従来技術に係るエキシマランプ点灯装置の一例を示す図である。同図に示すように、放電空間に希ガスを封入したエキシマランプ１００がランプハウス１０１内に配置されており、さらにランプハウス１０１内には、エキシマランプ１００から放射されたエキシマ光を反射して窓部１０３から放射させる反射鏡１０２と、エキシマランプ１００に高周波高電圧を供給する昇圧トランス１０４とが配置されている。昇圧トランス１０４には、ランプハウス１０１外部に配置された給電装置１０５から高周波電圧が高周波ケーブル１０６によって昇圧トランス１０４に供給され、昇圧トランス１０４からは昇圧された高周波高電圧が送電ケーブル１０７によってエキシマランプ１００に供給されている。   FIG. 8 is a diagram illustrating an example of an excimer lamp lighting device according to the related art. As shown in the figure, an excimer lamp 100 in which a rare gas is sealed in a discharge space is disposed in a lamp house 101, and the excimer light emitted from the excimer lamp 100 is reflected in the lamp house 101. A reflecting mirror 102 that radiates from the window 103 and a step-up transformer 104 that supplies a high-frequency high voltage to the excimer lamp 100 are disposed. The step-up transformer 104 is supplied with a high-frequency voltage from a power supply device 105 arranged outside the lamp house 101 to the step-up transformer 104 through a high-frequency cable 106. 100.

特開平７−１６９４４４号公報JP-A-7-169444

しかし、図８に示すようなエキシマランプ点灯装置では、昇圧トランス１０４をランプハウス１０１内に配置するために、ランプハウス１０１が非常に重いものとなり、ランプハウス１０１が大型化してしまうといった問題があった。また昇圧トランス１０４をランプハウス１０１の外部に配置した場合は、高周波高電圧を送電する際に、送電ケーブル１０７から電磁ノイズが発生するため、送電ケーブル１０７を長い距離引き回すことが出来ないといった問題があった。また昇圧トランス１０４からエキシマランプ１００までの送電ケーブル１０７の距離を短くしようとすると、エキシマランプ点灯装置に種々の制約が発生し、装置自身の構成が複雑になったり、取り扱いが困難になるといった問題があった。   However, in the excimer lamp lighting device as shown in FIG. 8, since the step-up transformer 104 is arranged in the lamp house 101, there is a problem that the lamp house 101 becomes very heavy and the lamp house 101 becomes large. It was. Further, when the step-up transformer 104 is arranged outside the lamp house 101, when transmitting high frequency high voltage, electromagnetic noise is generated from the power transmission cable 107, so that the power transmission cable 107 cannot be routed for a long distance. there were. Further, if it is attempted to shorten the distance of the power transmission cable 107 from the step-up transformer 104 to the excimer lamp 100, various restrictions occur in the excimer lamp lighting device, and the configuration of the device itself becomes complicated or difficult to handle. was there.

また、送電ケーブル１０７から漏れる電磁ノイズの対策として、シールド線に代表されるように、導電線の周囲を金属製の網状体等で覆った電磁シールドを設けることが行われている。しかし、高周波高電圧を送電する場合は、このようなシールド技術を採用した場合には、導電線と電磁シールドとの間でコロナ放電等の絶縁破壊が発生し、電磁シールド線を採用しても、高周波高電圧を送電することが出来ないという問題があった。   Further, as a countermeasure against electromagnetic noise leaking from the power transmission cable 107, as represented by a shield wire, an electromagnetic shield in which the periphery of the conductive wire is covered with a metal net or the like is provided. However, when transmitting high-frequency and high-voltage, when such shielding technology is adopted, dielectric breakdown such as corona discharge occurs between the conductive wire and the electromagnetic shield, and even if the electromagnetic shielding wire is adopted. There was a problem that high frequency high voltage could not be transmitted.

本発明の目的は、上記の問題点に鑑み、給電装置とエキシマランプ間に配設される送電ケーブルに、電磁シールドを施すことによって、電磁ノイズの漏れを抑制又は防止するとともに、導電線と電磁シールド間にコロナ放電のような放電が発生しないようにすることにより、長距離にわたって効率的に高周波高電圧を供給することを可能にしたエキシマランプ点灯装置を提供することにある。   In view of the above problems, an object of the present invention is to suppress or prevent leakage of electromagnetic noise by applying an electromagnetic shield to a power transmission cable disposed between a power feeding device and an excimer lamp, and to prevent a conductive wire and an electromagnetic wave. An object of the present invention is to provide an excimer lamp lighting device that can efficiently supply a high-frequency high voltage over a long distance by preventing discharge such as corona discharge between shields.

本発明は、上記の課題を解決するために、次のような手段を採用した。
第１の手段は、放電空間内に希ガスを封入したエキシマランプと、昇圧トランスにより高周波高電圧を発生する給電装置と、前記エキシマランプと前記給電装置との間に、前記昇圧トランスからの高周波高電圧を供給する送電ケーブルを配設したエキシマランプ点灯装置において、前記送電ケーブルが、導電線と該導電線の周囲を被覆する絶縁性材料とからなる導電層と、前記高周波高電圧の給電時に前記導電層から発生する電磁ノイズの放射を防止するシールド層と、前記導電層と前記シールド層との間に設けられ、前記導電層と前記シールド層間の放電を抑制する空隙層とから構成されたことを特徴とするエキシマランプ点灯装置である。 The present invention employs the following means in order to solve the above problems.
First means, and an excimer lamp filled with a rare gas in the discharge space, a power supply device for generating a high-frequency high voltage by a step-up transformer, between the excimer lamp and the power supply device, a high frequency from the step-up transformer In an excimer lamp lighting device provided with a power transmission cable for supplying a high voltage, the power transmission cable includes a conductive layer made of a conductive wire and an insulating material covering the periphery of the conductive wire, and at the time of feeding the high frequency high voltage. The shield layer is configured to prevent radiation of electromagnetic noise generated from the conductive layer, and a gap layer provided between the conductive layer and the shield layer to suppress discharge between the conductive layer and the shield layer . This is an excimer lamp lighting device.

第２の手段は、第１の手段において、前記空隙層を、蛇腹状の絶縁性樹脂で構成したことを特徴とするエキシマランプ点灯装置である。   A second means is an excimer lamp lighting device according to the first means, wherein the gap layer is made of an accordion-like insulating resin.

請求項１に記載の発明によれば、放電空間内に希ガスを封入したエキシマランプと、昇圧トランスにより高周波高電圧を発生する給電装置と、前記エキシマランプと前記給電装置との間に、前記昇圧トランスからの高周波高電圧を供給する送電ケーブルを配設したエキシマランプ点灯装置において、前記送電ケーブルが、導電線と該導電線の周囲を被覆する絶縁性材料とからなる導電層と、前記高周波高電圧の給電時に前記導電層から発生する電磁ノイズの放射を防止するシールド層と、前記導電層と前記シールド層との間に設けられ、前記導電層と前記シールド層間の放電を抑制する空隙層とから構成したので、高周波高電圧の送電時、送電ケーブルの周囲を覆うようにシールド層を形成しても、導電層とシールド層間の放電を抑制できる。またシールド層が設けられているので、高周波高電圧の送電時に発生する電磁ノイズが送電ケーブルの外部に漏れ出すのを充分防止することができる。また送電ケーブルから電磁ノイズが外部に放射されず、且つ高周波高電圧を長い距離に渡って効率的に送電できるため、ランプハウスと昇圧トランスを含む給電装置とを別々に構成することができるとともに、エキシマランプ点灯装置の配置構成に様々な形態をとることが可能となる。

According to the invention described in claim 1, an excimer lamp in which a rare gas is sealed in a discharge space, a power supply device that generates a high-frequency high voltage by a step-up transformer , and between the excimer lamp and the power supply device , In an excimer lamp lighting device provided with a power transmission cable for supplying a high frequency high voltage from a step-up transformer , the power transmission cable includes a conductive layer made of a conductive wire and an insulating material covering the periphery of the conductive wire, and the high frequency A shield layer that prevents radiation of electromagnetic noise generated from the conductive layer when a high voltage is supplied, and a gap layer that is provided between the conductive layer and the shield layer and suppresses discharge between the conductive layer and the shield layer Therefore, even when a shield layer is formed so as to cover the periphery of the transmission cable during high-frequency and high-voltage power transmission, discharge between the conductive layer and the shield layer can be suppressed. In addition, since the shield layer is provided, it is possible to sufficiently prevent electromagnetic noise generated during high-frequency and high-voltage power transmission from leaking outside the power transmission cable. In addition, electromagnetic noise is not radiated to the outside from the power transmission cable, and high frequency high voltage can be efficiently transmitted over a long distance, so that the lamp house and the power feeding device including the step-up transformer can be configured separately, It becomes possible to take various forms for the arrangement configuration of the excimer lamp lighting device.

請求項２に記載の発明によれば、前記空隙層を、蛇腹状の絶縁性樹脂で構成したので、シールド層と導電層との間隔を一定に保持した状態で、送電ケーブルの軸方向に対する柔軟性を簡便な構成で容易に確保することができる。   According to the second aspect of the present invention, since the gap layer is made of an accordion-like insulating resin, the gap between the shield layer and the conductive layer is kept constant, and the flexibility with respect to the axial direction of the power transmission cable is maintained. Can be easily secured with a simple configuration.

本発明の実施形態を図１乃至図７を用いて説明する。
図１は、本実施形態の発明に係るエキシマランプの一例を示す図である。
同図に示すように、このエキシマランプ１は、例えば、放電容器２が合成石英ガラスで構成され、内側管３と外側管４を同軸に配置して中空円筒状の放電空間５を形成したものである。外側管４はエキシマ光を取り出すための光取り出し窓部材を兼用しており、その外面に光を透過する導電性網からなる電極６が設けられている。内側管３の外面には反射板とエキシマ放電の電極を兼ねた薄膜電極７が設けられている。放電容器２の両端には絶縁性の口金８，９が設けられている。また放電容器２の放電空間５に放電用ガスとしてキセノンガスが封入され、高周波高電圧電源１０からはエキシマランプ１に高周波高電圧が印加されるように構成されている。 An embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a diagram showing an example of an excimer lamp according to the invention of this embodiment.
As shown in the figure, this excimer lamp 1 has a discharge vessel 2 made of synthetic quartz glass, for example, and an inner tube 3 and an outer tube 4 are arranged coaxially to form a hollow cylindrical discharge space 5. It is. The outer tube 4 also serves as a light extraction window member for extracting excimer light, and an electrode 6 made of a conductive net that transmits light is provided on the outer surface thereof. On the outer surface of the inner tube 3, a thin film electrode 7 serving as a reflector and an excimer discharge electrode is provided. Insulating bases 8 and 9 are provided at both ends of the discharge vessel 2. Further, xenon gas is sealed as a discharge gas in the discharge space 5 of the discharge vessel 2, and a high frequency high voltage is applied to the excimer lamp 1 from the high frequency high voltage power source 10.

図２は、本実施形態の発明に係るエキシマランプ点灯装置の概略の構成を示す図である。
同図に示すように、このエキシマランプ点灯装置は、ランプハウス１１内に、図１に示すようなエキシマランプ１が複数個並列に配列して収納されているとともに、エキシマランプ１から放射されたエキシマ光を反射し、窓部１２から放射させる反射鏡１３とが設けられている。給電装置１４内には高周波高電圧を発生する昇圧トランス１５が備えられており、昇圧トランス１５とランプハウス１１間には、昇圧トランス１５から出力された高周波高電圧を各エキシマランプ１に送電するための送電ケーブル１６が配設されている。 FIG. 2 is a diagram showing a schematic configuration of an excimer lamp lighting device according to the invention of the present embodiment.
As shown in the figure, this excimer lamp lighting device has a plurality of excimer lamps 1 as shown in FIG. 1 arranged in parallel in a lamp house 11 and radiated from the excimer lamp 1. A reflecting mirror 13 that reflects excimer light and emits it from the window 12 is provided. The power supply device 14 includes a step-up transformer 15 that generates a high-frequency high voltage. The high-frequency high voltage output from the step-up transformer 15 is transmitted to each excimer lamp 1 between the step-up transformer 15 and the lamp house 11. A power transmission cable 16 is provided.

図３は、図２に示した送電ケーブル１６の軸方向の拡大断面図の一例を示す図である。
同図に示すように、この送電ケーブル１６は、中心に銅等からなる導電線１７がシリコン樹脂等からなる絶縁性材料１８で被覆された導電層１９と、Ｎｉ等からなる網状のシールド材２０を絶縁シート２１と外皮２２とで挟み込んだシールド層２３と、導電層１９とシールド層２３との間を軸方向全体に渡って一定間隔に形成する空隙層２４とから構成されている。ここで、空隙層２４は、例えば、ポリプロピレン製の絶縁シートからなる、軸方向の断面が連続した略コ字状の蛇腹状絶縁性樹脂２５によって形成されている。 FIG. 3 is a diagram illustrating an example of an enlarged cross-sectional view in the axial direction of the power transmission cable 16 illustrated in FIG. 2.
As shown in the figure, the power transmission cable 16 includes a conductive layer 19 in which a conductive wire 17 made of copper or the like is covered with an insulating material 18 made of silicon resin or the like, and a net-like shield material 20 made of Ni or the like. Is composed of a shield layer 23 sandwiched between the insulating sheet 21 and the outer skin 22, and a gap layer 24 formed between the conductive layer 19 and the shield layer 23 at regular intervals across the entire axial direction. Here, the gap layer 24 is formed of a substantially U-shaped bellows-like insulating resin 25 made of, for example, an insulating sheet made of polypropylene and having a continuous axial cross section.

本発明のエキシマランプ点灯装置によれば、導電層１９とシールド層２３との間に空隙層２４を設けたので、高周波高電圧の伝送時、送電ケーブル１６の周囲を覆うようにシールド層２３を形成しても、導電層１９とシールド層２３間の放電を抑制できる。またシールド層２３が設けられているので、高周波高電圧の伝送時に発生する電磁ノイズが送電ケーブル１６の外部に漏れ出すのを充分防止することができる。また送電ケーブル１６から電磁ノイズが外部に放射されず、且つ電磁ノイズ放射による送電時の損失が少ないため、高周波高電圧を長い距離に渡って効率的に送電できるので、図２に示したランプハウス１１と昇圧トランス１５を含む給電装置１４とを別々に構成することができるとともに、エキシマランプ点灯装置の配置構成に様々な形態をとることが可能となる。   According to the excimer lamp lighting device of the present invention, since the gap layer 24 is provided between the conductive layer 19 and the shield layer 23, the shield layer 23 is formed so as to cover the periphery of the power transmission cable 16 during transmission of high frequency high voltage. Even if formed, discharge between the conductive layer 19 and the shield layer 23 can be suppressed. Further, since the shield layer 23 is provided, it is possible to sufficiently prevent electromagnetic noise generated during transmission of high frequency and high voltage from leaking outside the power transmission cable 16. Further, since electromagnetic noise is not radiated to the outside from the power transmission cable 16 and loss during power transmission due to electromagnetic noise radiation is small, high-frequency high voltage can be efficiently transmitted over a long distance, so that the lamp house shown in FIG. 11 and the power supply device 14 including the step-up transformer 15 can be configured separately, and the arrangement configuration of the excimer lamp lighting device can take various forms.

図４は、図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。
同図において、空隙層２４は、例えば、ポリプロピレン製の絶縁シートからなる、軸方向の断面が連続した略コ字状の蛇腹状絶縁性樹脂２５１，２５２を２重に構成したものである。なお、その他の構成は図３に示した同符号の構成に対応する。
空隙層２４をこのような２重の蛇腹状絶縁性樹脂２５１，２５２によって形成しても、図３に示した送電ケーブル１６と同様の作用効果を奏することができる。 FIG. 4 is a diagram illustrating another example of an enlarged sectional view in the axial direction of the power transmission cable 16 illustrated in FIG. 2.
In the same figure, the gap layer 24 is constituted by, for example, double-layered substantially U-shaped bellows-like insulating resins 251 and 252 made of an insulating sheet made of polypropylene and having a continuous axial cross section. Other configurations correspond to the configurations of the same reference numerals shown in FIG.
Even if the gap layer 24 is formed of such double bellows-like insulating resins 251 and 252, the same operational effects as those of the power transmission cable 16 shown in FIG. 3 can be obtained.

図５は、図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。
同図に示すように、空隙層２４は、例えば、ポリプロピレン製の絶縁シートからなる、軸方向の断面が連続した略コ字状の蛇腹状絶縁性樹脂２５１，２５２を２重に構成したものであるが、各蛇腹状絶縁性樹脂２５１，２５２は、互いに軸方向にずれるように配置される。蛇腹状絶縁性樹脂２５１，２５２を互いに軸方向にずれるように配置することによって、図３に示した蛇腹状絶縁性樹脂２５１，２５２と比べて、蛇腹状絶縁性樹脂２５１，２５２の軸方向に対する垂直方向への立ち上がり部が重ならないので、蛇腹状絶縁性樹脂２５１，２５２によって軸方向全体に渡って一様に空隙性を確保することができる。なお、その他の構成は図３に示した同符号の構成に対応する。
空隙層２４をこのような２重の蛇腹状絶縁性樹脂２５１，２５２によって形成しても、図３に示した送電ケーブル１６と同様の作用効果を奏することができる。 FIG. 5 is a diagram illustrating another example of an enlarged cross-sectional view in the axial direction of the power transmission cable 16 illustrated in FIG. 2.
As shown in the figure, the gap layer 24 is composed of, for example, double-layered substantially U-shaped bellows-like insulating resins 251 and 252 made of an insulating sheet made of polypropylene and having a continuous axial cross section. However, the respective bellows-like insulating resins 251 and 252 are arranged so as to be displaced from each other in the axial direction. By arranging the bellows-like insulating resins 251 and 252 so as to be offset from each other in the axial direction, compared to the bellows-like insulating resins 251 and 252 shown in FIG. Since the vertical rising portions do not overlap with each other, the bellows-like insulating resins 251 and 252 can ensure the air gap uniformly throughout the entire axial direction. Other configurations correspond to the configurations of the same reference numerals shown in FIG.
Even if the gap layer 24 is formed of such double bellows-like insulating resins 251 and 252, the same operational effects as those of the power transmission cable 16 shown in FIG. 3 can be obtained.

図６は、図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。
同図において、空隙層２４は、例えば、ポリプロピレン製の絶縁シートからなる、軸方向の断面が略正弦波状の蛇腹状絶縁性樹脂２６によって形成されたものである。蛇腹状絶縁性樹脂２６を略正弦波状に形成することによって、蛇腹状絶縁性樹脂２６によって軸方向全体に渡って一様に空隙性を確保することができる。なお、その他の構成は図３に示した同符号の構成に対応する。
空隙層２４をこのような略正弦波状の蛇腹状絶縁性樹脂２６によって形成しても、図３に示した送電ケーブル１６と同様の作用効果を奏することができる。 FIG. 6 is a diagram illustrating another example of an enlarged cross-sectional view in the axial direction of the power transmission cable 16 illustrated in FIG. 2.
In the figure, the gap layer 24 is formed of an accordion-like insulating resin 26 having an axial cross section that is substantially sinusoidal, for example, made of an insulating sheet made of polypropylene. By forming the accordion-like insulating resin 26 in a substantially sine wave shape, the accordion-like insulating resin 26 can ensure uniform voids throughout the entire axial direction. Other configurations correspond to the configurations of the same reference numerals shown in FIG.
Even when the gap layer 24 is formed of such a substantially sinusoidal bellows-like insulating resin 26, the same effect as the power transmission cable 16 shown in FIG. 3 can be obtained.

図７は、図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。
同図において、空隙層２４は、例えば、ポリプロピレン製の絶縁シートからなる、軸方向の断面が、全体としては連続した略コ字状に形成されるが、軸方向に対する垂直方向への立ち上がり部が三角波形状に形成された蛇腹状絶縁性樹脂２７によって形成される。蛇腹状絶縁性樹脂２７をこのような形状とすることによって軸方向全体に渡って一様に空隙性を確保することができる。なお、その他の構成は図３に示した同符号の構成に対応する。
空隙層２４をこのような蛇腹状絶縁性樹脂２７によって形成しても、図３に示した送電ケーブル１６と同様の作用効果を奏することができる。 FIG. 7 is a diagram illustrating another example of an enlarged sectional view in the axial direction of the power transmission cable 16 illustrated in FIG. 2.
In the same figure, the gap layer 24 is made of, for example, an insulating sheet made of polypropylene, and the axial cross section is formed in a substantially U-shape that is continuous as a whole, but the rising portion in the direction perpendicular to the axial direction is formed. It is formed by the bellows-like insulating resin 27 formed in a triangular wave shape. By forming the bellows-like insulating resin 27 in such a shape, the air gap property can be ensured uniformly over the entire axial direction. Other configurations correspond to the configurations of the same reference numerals shown in FIG.
Even if the gap layer 24 is formed of such a bellows-like insulating resin 27, the same effect as the power transmission cable 16 shown in FIG. 3 can be obtained.

本発明に係るエキシマランプの一例を示す図である。It is a figure which shows an example of the excimer lamp which concerns on this invention. 本発明に係るエキシマランプ点灯装置の概略の構成を示す図である。It is a figure which shows the schematic structure of the excimer lamp lighting device which concerns on this invention. 図２に示した送電ケーブル１６の軸方向の拡大断面図の一例を示す図である。It is a figure which shows an example of the expanded sectional view of the axial direction of the power transmission cable 16 shown in FIG. 図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。It is a figure which shows another example of the expanded sectional view of the axial direction of the power transmission cable 16 shown in FIG. 図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。It is a figure which shows another example of the expanded sectional view of the axial direction of the power transmission cable 16 shown in FIG. 図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。It is a figure which shows another example of the expanded sectional view of the axial direction of the power transmission cable 16 shown in FIG. 図２に示した送電ケーブル１６の軸方向の拡大断面図の他の一例を示す図である。It is a figure which shows another example of the expanded sectional view of the axial direction of the power transmission cable 16 shown in FIG. 従来技術に係るエキシマランプ点灯装置の一例を示す図である。It is a figure which shows an example of the excimer lamp lighting device which concerns on a prior art.

符号の説明Explanation of symbols

１ エキシマランプ
２ 放電容器
３ 内側管
４ 外側管
５ 放電空間
６ 電極
７ 薄膜電極
８，９ 口金
１０ 高周波高電圧電源
１１ ランプハウス
１２ 窓部
１３ 反射鏡
１４ 給電装置
１５ 昇圧トランス
１６ 送電ケーブル
１７ 導電線
１８ 絶縁性材料
１９ 導電層
２０ シールド材
２１ 絶縁シート
２２ 外皮
２３ シールド層
２４ 空隙層
２５ 軸方向の断面が連続した略コ字状の蛇腹状絶縁性樹脂
２５１，２５２ 軸方向の断面が連続した略コ字状の蛇腹状絶縁性樹脂
２６ 軸方向の断面が略正弦波状の蛇腹状絶縁性樹脂
２７ 軸方向の断面が、全体として連続した略コ字状に形成され、軸方向に対する垂直方向への立ち上がり部が三角波形状に形成された蛇腹状絶縁性樹脂 DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Discharge vessel 3 Inner tube 4 Outer tube 5 Discharge space 6 Electrode 7 Thin film electrode 8, 9 Base 10 High frequency high voltage power supply 11 Lamp house 12 Window part
DESCRIPTION OF SYMBOLS 13 Reflector 14 Feeding device 15 Step-up transformer 16 Power transmission cable 17 Conductive wire 18 Insulating material 19 Conductive layer 20 Shielding material 21 Insulating sheet 22 Outer skin 23 Shielding layer 24 Air gap layer 25 A substantially U-shaped bellows having a continuous axial section Insulating resin 251, 252 A substantially U-shaped bellows-like insulating resin 26 having a continuous axial cross section A bellows-like insulating resin 27 having a substantially sinusoidal cross section in the axial direction As a whole, the cross section in the axial direction is continuous A bellows-like insulating resin that is formed in a substantially U-shape and has a rising portion in the triangular direction perpendicular to the axial direction.

Claims (2)

放電空間内に希ガスを封入したエキシマランプと、昇圧トランスにより高周波高電圧を発生する給電装置と、前記エキシマランプと前記給電装置との間に、前記昇圧トランスからの高周波高電圧を供給する送電ケーブルを配設したエキシマランプ点灯装置において、
前記送電ケーブルが、導電線と該導電線の周囲を被覆する絶縁性材料とからなる導電層と、前記高周波高電圧の給電時に前記導電層から発生する電磁ノイズの放射を防止するシールド層と、前記導電層と前記シールド層との間に設けられ、前記導電層と前記シールド層間の放電を抑制する空隙層とから構成されたことを特徴とするエキシマランプ点灯装置。 An excimer lamp in which a rare gas is sealed in a discharge space, a power supply device that generates a high-frequency high voltage by a step-up transformer , and power transmission that supplies a high-frequency high voltage from the step-up transformer between the excimer lamp and the power supply device In excimer lamp lighting device with cable,
The power transmission cable is a conductive layer made of a conductive wire and an insulating material covering the periphery of the conductive wire; a shield layer for preventing radiation of electromagnetic noise generated from the conductive layer when the high frequency high voltage is fed ; An excimer lamp lighting device, comprising: a gap layer provided between the conductive layer and the shield layer and suppressing discharge between the conductive layer and the shield layer . 前記空隙層を、蛇腹状の絶縁性樹脂で構成したことを特徴とする請求項１に記載のエキシマランプ点灯装置。   The excimer lamp lighting device according to claim 1, wherein the gap layer is made of a bellows-like insulating resin.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03505503A (en) * 1988-03-24 1991-11-28 ダブリュ．エル．ゴア アンド アソシエイツ，インコーポレイティド Low dielectric constant reinforced coaxial electrical cable
JPH07169444A (en) * 1993-12-17 1995-07-04 Ushio Inc Dielectric barrier electric discharge lamp apparatus
JPH07272800A (en) * 1993-10-22 1995-10-20 Eurocopter Fr Electrical connection element and connection
JPH08124431A (en) * 1994-10-25 1996-05-17 Komatsu Ltd Cable for torch of plasma working machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03505503A (en) * 1988-03-24 1991-11-28 ダブリュ．エル．ゴア アンド アソシエイツ，インコーポレイティド Low dielectric constant reinforced coaxial electrical cable
JPH07272800A (en) * 1993-10-22 1995-10-20 Eurocopter Fr Electrical connection element and connection
JPH07169444A (en) * 1993-12-17 1995-07-04 Ushio Inc Dielectric barrier electric discharge lamp apparatus
JPH08124431A (en) * 1994-10-25 1996-05-17 Komatsu Ltd Cable for torch of plasma working machine

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