JP4535991B2 - Static pressure slider - Google Patents

Static pressure slider Download PDF

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JP4535991B2
JP4535991B2 JP2005343734A JP2005343734A JP4535991B2 JP 4535991 B2 JP4535991 B2 JP 4535991B2 JP 2005343734 A JP2005343734 A JP 2005343734A JP 2005343734 A JP2005343734 A JP 2005343734A JP 4535991 B2 JP4535991 B2 JP 4535991B2
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movable body
static pressure
pressure slider
support
movable
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JP2007146995A (en
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小林　　隆
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Kyocera Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

本発明は、例えば電子線描画装置といった半導体素子の製造装置および検査装置に用いられ、高精度な走行性能および高精度な位置決めを可能とする流体静圧軸受を用いた静圧スライダに関する。   The present invention relates to a hydrostatic slider using a hydrostatic bearing that is used in, for example, a semiconductor device manufacturing apparatus and an inspection apparatus such as an electron beam drawing apparatus and enables high-precision running performance and high-precision positioning.

従来より、半導体素子（集積回路）の製造または検査する装置には種々のステージ装置が用いられている。また、半導体素子が露光、描画されるウェハの大型化にともなってウェハを搭載するステージ装置も大型化し、かつ移動距離も増大化しており、ステージ装置の重量は増加の一途をたどっている。   Conventionally, various stage apparatuses are used as apparatuses for manufacturing or inspecting semiconductor elements (integrated circuits). In addition, as the size of a wafer on which a semiconductor element is exposed and drawn is increased, the stage apparatus for mounting the wafer is also increased in size and the moving distance is increased, and the weight of the stage apparatus is steadily increasing.

かかるステージ装置では、更なる生産性向上を目的に高速、高加速化と高精度化が要求されており、この要求を満たすため圧縮流体を用いた流体静圧軸受による非接触案内を行う静圧スライダが提案されている。   In such a stage device, high speed, high acceleration, and high precision are required for further productivity improvement. To meet this requirement, static pressure that performs non-contact guidance with a hydrostatic bearing using a compressed fluid is required. A slider has been proposed.

また近年では、電子線描画装置やＳＥＭ用といった真空チャンバ内での動作を要求される半導体素子の製造および検査装置にも、圧縮流体を回収し真空チャンバ外へ排出する差動排気機構を採用するにより静圧スライダが用いられている。   In recent years, a differential pumping mechanism that collects compressed fluid and discharges it outside the vacuum chamber has also been adopted in semiconductor device manufacturing and inspection devices that require operation in a vacuum chamber such as an electron beam lithography system or SEM. A static pressure slider is used.

図６は、従来の静圧スライダ５００の斜視図を示し、一対の固定体１０１（１０１ａ、１０１ｂ）が略平行に配置され、各々の固定体１０１に一対の可動体１０２（１０２ａ、１０２ｂ）が囲繞され、さらに可動体１０２ａ、１０２ｂを連結するように支持体１０３が配置されており、さらに使用目的に応じて支持体１０３に試料載置部１０４が囲繞されている。この静圧スライダ５００は、可動体１０２が固定体１０１によって往復に移動可能であり、支持体１０３上にウェハ等の試料を載置するものである。   FIG. 6 is a perspective view of a conventional static pressure slider 500, in which a pair of fixed bodies 101 (101a, 101b) are arranged substantially in parallel, and a pair of movable bodies 102 (102a, 102b) are arranged on each fixed body 101. A support body 103 is arranged so as to be connected and further connect the movable bodies 102a and 102b, and the sample mounting portion 104 is surrounded by the support body 103 according to the purpose of use. In the static pressure slider 500, the movable body 102 can reciprocate by the fixed body 101, and a sample such as a wafer is placed on the support body 103.

ここで、図６におけるＤ−Ｄ断面図を図７（ａ）、（ｂ）に示す。静圧スライダ５００は、固定体１０１と可動体１０２との間に加圧した圧縮流体を送り込み、非接触で可動体を固定体に対して相対移動させるため、各種装置の高速、高加速化及び高精度化に対応可能である。そのため、安定した静圧を受けているときは、図７（ａ）に示すように固定体１０１ａと可動体１０２ｂの間隔はほぼ均一に保たれており、固定体１０１の案内面１２２と可動体１０２の静圧面１２３の平行度も保たれた状態にある。一方、図７（ｂ）に示すように、例えば支持体１０３に重量の大きな試料が搭載されたり、支持体１０３が大型化した際の支持体１０３の自重により支持体１０３に偏荷重（モーメント）がかかると、基準となる固定体１０１の案内面１２２に対して可動体１０２が傾斜浮上し、さらに浮上量の少ない側では静圧剛性低下に伴い前記固定体１０１と可動体１０２が接触しやすく、安定した移動が困難となるという課題を有していた。   Here, DD sectional views in FIG. 6 are shown in FIGS. The static pressure slider 500 feeds a pressurized compressed fluid between the fixed body 101 and the movable body 102 and moves the movable body relative to the fixed body in a non-contact manner. High accuracy can be supported. For this reason, when receiving a stable static pressure, the distance between the fixed body 101a and the movable body 102b is kept substantially uniform as shown in FIG. The parallelism of the static pressure surface 123 of 102 is also maintained. On the other hand, as shown in FIG. 7B, for example, a heavy sample is mounted on the support 103, or an unbalanced load (moment) is applied to the support 103 due to the weight of the support 103 when the support 103 is enlarged. As a result, the movable body 102 is inclined and floated with respect to the guide surface 122 of the fixed body 101 serving as a reference, and the stationary body 101 and the movable body 102 easily come into contact with a decrease in static pressure rigidity on the side where the flying height is small. The problem was that stable movement would be difficult.

そこで、静圧スライダの静圧面に対する案内面の傾斜を制御する提案が種々行われている。   Therefore, various proposals have been made to control the inclination of the guide surface with respect to the static pressure surface of the static pressure slider.

静圧スライダ５００を真空チャンバ（不図示）内に配置し、ステージ装置として利用する場合は、静圧スライダ５００から真空チャンバへ流出する流体のリークを低減するためにも案内面１２２と静圧面１２３は十分な平行度を保つ必要がある。この平行度を保つ手段として、可動体１０２を連結する支持体１０３は可動体１０２に偏荷重がかからないように、例えば図８に示すように可動体１０２の上面の略中心に支持体１０３を締結して、可動体１０２にかかる荷重が静圧面全面に均等にかかるようにする必要がある。   When the static pressure slider 500 is disposed in a vacuum chamber (not shown) and used as a stage device, the guide surface 122 and the static pressure surface 123 are also used to reduce leakage of fluid flowing out from the static pressure slider 500 to the vacuum chamber. Must maintain sufficient parallelism. As a means for maintaining the parallelism, the support 103 connecting the movable body 102 is fastened to the approximate center of the upper surface of the movable body 102, for example, as shown in FIG. Thus, it is necessary to apply the load applied to the movable body 102 evenly over the entire surface of the static pressure surface.

また、図９に示すように、可動体１０２の下部に、取り付け部品１２６、予圧用ネジ１２７、予圧用バネ１２８を介してラビリンス部１２９が接続されており、さらに、ラビリンス部１２９には、静圧パッド１２１と、静圧パッド１２１の外周に設けられた流体排気溝（不図示）が配置されている。ラビリンス部１２９は、固定体１０１の案内面１２２は、所定のクリアランスを保ったまま可動体１０２が移動する静圧スライダ５１０が提案されている（特許文献１参照）。
特開２００２−３４９５６９号公報 Further, as shown in FIG. 9, a labyrinth portion 129 is connected to the lower portion of the movable body 102 via an attachment component 126, a preloading screw 127, and a preloading spring 128. A pressure pad 121 and a fluid exhaust groove (not shown) provided on the outer periphery of the static pressure pad 121 are arranged. As the labyrinth portion 129, a static pressure slider 510 in which the movable body 102 moves while the guide surface 122 of the fixed body 101 maintains a predetermined clearance has been proposed (see Patent Document 1).
Japanese Patent Application Laid-Open No. 2002-349569

しかし、図８に示すように可動体１０２の上面に支持体１０３を締結するような方法では、不図示の駆動手段、位置検出手段、制御手段とを備えることにより高速化、高加速化に加え、高い位置制御性能（位置決め性能）が要求される静圧スライダ５００では、可動体１０２の駆動中心と可動体１０２を連結している支持体１０３を含めた可動部の重心位置とが異なるため、位置決めの際に大きな振動を発生させやすく、高精度に位置決めすることができないという課題があった。また、位置決め性能の低下を抑制するために前記支持体１０３を可動体１０２の上面ではなく側面にて連結するのがよいが、可動体１０２の傾斜浮上を助長しやすいという課題があった。   However, in the method of fastening the support body 103 to the upper surface of the movable body 102 as shown in FIG. 8, the driving means, the position detection means, and the control means (not shown) are provided to increase the speed and acceleration. In the static pressure slider 500 in which high position control performance (positioning performance) is required, the drive center of the movable body 102 and the gravity center position of the movable portion including the support body 103 connecting the movable body 102 are different. There has been a problem that large vibrations are easily generated during positioning, and positioning cannot be performed with high accuracy. Further, in order to suppress a decrease in positioning performance, it is preferable to connect the support body 103 not on the upper surface of the movable body 102 but on the side surface, but there is a problem that it is easy to promote the inclined floating of the movable body 102.

また、角柱状の固定体１０１に対して可動体１０２が囲繞し、この固定体１０１に沿って可動体１０２が移動する静圧スライダの場合、固定体１０１と可動体１０２は角柱の４面の間隔を均一に保つ必要があるが、特許文献１に示す方法を用いた場合、固定体１０１の案内面１２２と可動体１０２の静圧面１２３との任意の対向面の間隔を均一に保つことは可能であるものの、他の対向面の間隔が不均一になり、固定体１０１と可動体１０２が接触したり、かじりを起こしやすいという課題があった。   Further, in the case of a static pressure slider in which the movable body 102 surrounds the prismatic fixed body 101 and the movable body 102 moves along the fixed body 101, the fixed body 101 and the movable body 102 have four surfaces of the prism. Although it is necessary to keep the interval uniform, when the method shown in Patent Document 1 is used, it is necessary to keep the interval between any facing surfaces of the guide surface 122 of the fixed body 101 and the static pressure surface 123 of the movable body 102 uniform. Although it is possible, there is a problem that the distance between the other facing surfaces becomes non-uniform, and the fixed body 101 and the movable body 102 come into contact with each other and galling easily occurs.

本発明はこれらの問題を鑑み、高精度な位置決めを可能とし、かつ第１可動体と固定体の平行度が保たれ、さらに、真空中においてもリークが抑制された非接触で駆動可能な静圧スライダを提供することを目的として、本発明の静圧スライダは、略平行に配置された一対の固定体と、各固定体を囲繞して配置され、固定体に沿って移動する一対の第１可動体と、該一対の第１可動体を連結する支持体と、を備え、前記支持体の少なくとも一端に、固定体に対する第１可動体の傾斜角度を検出する検出手段と、該検出手段により検出された角度に対応して第１可動体の角度を調整する調整手段を備えたことを特徴としている。   In view of these problems, the present invention enables high-accuracy positioning, maintains the parallelism between the first movable body and the fixed body, and further can be driven in a non-contact manner in which leakage is suppressed even in a vacuum. For the purpose of providing a pressure slider, a static pressure slider according to the present invention includes a pair of fixed bodies arranged substantially in parallel and a pair of first fixed bodies arranged around each fixed body and moving along the fixed bodies. A detecting means for detecting an inclination angle of the first movable body with respect to the fixed body at at least one end of the supporting body; and the detecting means It is characterized by comprising adjusting means for adjusting the angle of the first movable body corresponding to the angle detected by.

また本発明は、前記調整手段は、圧電素子であることを特徴とする。   Further, the invention is characterized in that the adjusting means is a piezoelectric element.

さらに本発明は、前記調整手段は、電磁モータであることを特徴とする。   Furthermore, the invention is characterized in that the adjusting means is an electromagnetic motor.

またさらに本発明は、前記検出手段は、非接触型変位計であることを特徴とする。   Furthermore, the present invention is characterized in that the detection means is a non-contact displacement meter.

さらにまた本発明は、前記検出手段である非接触型変位計は、静電容量型であることを特徴とする。   Furthermore, the present invention is characterized in that the non-contact displacement meter as the detecting means is a capacitance type.

また本発明は、前記検出手段である非接触型変位計は、レーザ測長型であることを特徴とする。   In the invention, it is preferable that the non-contact displacement meter as the detection means is a laser length measurement type.

さらに本発明は、前記支持体の少なくとも一端に弾性体を配置することを特徴とする。   Furthermore, the present invention is characterized in that an elastic body is disposed on at least one end of the support.

またさらに本発明は、前記支持体の平面度が１０μｍ以下であることを特徴とする。   Furthermore, the present invention is characterized in that the flatness of the support is 10 μm or less.

さらに本発明は、前記支持体に囲繞して配置され、支持体に沿って移動する第２可動体を備えたことも特徴とする。   Furthermore, the present invention is characterized in that a second movable body that is disposed so as to surround the support and moves along the support is provided.

また本発明は、真空チャンバ内にて、加圧噴出される圧縮流体を回収するための流体排気溝が形成されている前記第１第２可動体と、前記流体排気溝より回収された流体を真空チャンバ外へ排出するための真空排気管路が形成されている前記固定体及び前記支持体を備えたことを特徴とする。   The present invention also provides the first and second movable bodies in which a fluid exhaust groove for recovering the compressed fluid ejected under pressure is formed in the vacuum chamber, and the fluid recovered from the fluid exhaust groove. It is characterized by comprising the fixed body and the support body in which an evacuation pipe for discharging out of the vacuum chamber is formed.

本発明の静圧スライダによれば、前記支持体の少なくとも一端に、固定体に対する第１可動体の傾斜角度を検出する検出手段と、該検出手段により検出された角度に対応して第１可動体の角度を調整する調整手段を備えたことから、高精度な位置決めを可能とし、かつ可動体と固定体の平行度が保たれるために、支持体の平行度を向上させることができる。さらに、真空中においてもリークが抑制された非接触で駆動可能な静圧スライダを実現できる。   According to the static pressure slider of the present invention, at least one end of the support body, the detection means for detecting the inclination angle of the first movable body with respect to the fixed body, and the first movable body corresponding to the angle detected by the detection means. Since the adjusting means for adjusting the angle of the body is provided, highly accurate positioning is possible, and the parallelism between the movable body and the fixed body is maintained, so that the parallelism of the support body can be improved. Furthermore, it is possible to realize a non-contact driven hydrostatic slider in which leakage is suppressed even in a vacuum.

さらに、調整手段として、圧電素子もしくは電磁モータを用いることから、真空環境下での使用が可能であるので、本発明の静圧スライダを真空中で使用することが可能となる。また、圧電素子の場合、指令電圧に対して、ナノメートルオーダーでの調整が可能であるので、固定体と第１可動体の平行度を高い精度で制御することが可能となり、さらに高速応答が可能であるため高精度な位置決めが可能となる
また、検出手段が非接触型変位計であることから、発熱を伴わない測定が可能であり、パーティクルの発生も防止することができる。 Furthermore, since a piezoelectric element or an electromagnetic motor is used as the adjusting means, it can be used in a vacuum environment, so that the static pressure slider of the present invention can be used in a vacuum. In the case of a piezoelectric element, the adjustment in nanometer order with respect to the command voltage is possible, so that the parallelism between the fixed body and the first movable body can be controlled with high accuracy, and the high-speed response can be achieved. Therefore, since the detection means is a non-contact type displacement meter, measurement without heat generation is possible and generation of particles can be prevented.

以下、本発明の静圧スライダについて詳細に説明する。   Hereinafter, the static pressure slider of the present invention will be described in detail.

図１（ａ）は、本発明の静圧スライダの一実施形態を示す斜視図であり、図１（ｂ）は図１（ａ）におけるＡ−Ａ線の断面図である。   FIG. 1A is a perspective view showing an embodiment of a static pressure slider of the present invention, and FIG. 1B is a cross-sectional view taken along line AA in FIG.

本発明の静圧スライダ５０は、固定体１（１ａ、１ｂ）が略平行に配置され、各々の固定体１に一対の第１可動体２（２ａ、２ｂ）が囲繞され、さらに第１可動体２ａ、２ｂを連結するように支持体３が配置されている。さらに、第１可動体２ａの案内面２２に対向する静圧面２３には、圧縮流体を噴出する静圧パッド２１が配置されており、静圧パッド２１から噴出された圧縮流体の案内面２２と静圧面２３との間の静圧（いわゆる隙間内圧力）により、第１可動体２ａは固定体１ａに数μｍ程度のクリアランスを介して非接触で浮上支持されている。固定体１は可動体２の貫通孔に通過されており、可動体２のレールの作用をなし、この状態で第１可動体１ａは固定体１の案内面２２に沿って非接触で移動可能となる。   In the static pressure slider 50 of the present invention, the fixed bodies 1 (1a, 1b) are arranged substantially in parallel, and a pair of first movable bodies 2 (2a, 2b) are surrounded by the respective fixed bodies 1, and the first movable body is further moved. The support body 3 is arrange | positioned so that the body 2a, 2b may be connected. Further, a static pressure pad 21 that ejects a compressed fluid is disposed on a static pressure surface 23 that faces the guide surface 22 of the first movable body 2a, and a guide surface 22 of the compressed fluid that is ejected from the static pressure pad 21 and The first movable body 2a is levitated and supported by the fixed body 1a in a non-contact manner with a clearance of about several μm by a static pressure (so-called clearance pressure) between the hydrostatic surface 23 and the static pressure surface 23. The fixed body 1 is passed through the through hole of the movable body 2 and functions as a rail of the movable body 2. In this state, the first movable body 1 a can move in a non-contact manner along the guide surface 22 of the fixed body 1. It becomes.

なお、固定体１を構成する一対の固定体１ａ、１ｂが略平行とは、固定体１ａ、１ｂとの距離がほぼ一定であればよく、支持体３により連結された可動体２ａ、２ｂが固定体１ａ、１ｂの静圧面２３に沿って非接触で移動可能であればよい。   The pair of fixed bodies 1a and 1b constituting the fixed body 1 is substantially parallel as long as the distance from the fixed bodies 1a and 1b is substantially constant, and the movable bodies 2a and 2b connected by the support 3 are What is necessary is just to be able to move non-contacting along the static pressure surface 23 of the fixed bodies 1a and 1b.

第１可動体２ａ、２ｂが対向する側面には、各第１可動体２ａ、２ｂを連結する支持体３と支持体３を２次元的に拘束する拘束体５ａ、５ｂが配置されていてもよく、支持体３は各第１可動体２ａ、２ｂと拘束体５ａ、５ｂを介して同時に移動可能となる。支持体３の端部３ａ、３ｂと第１可動体２ａ、２ｂとの間には０．５ｍｍ以下のクリアランスがあり、第１可動体２ａ、２ｂは、配置された支持体３、拘束体５ａ、５ｂ及びその搭載物の重量のモーメント荷重により、固定体１に接触するまでの範囲内で傾斜している。   Even if the support bodies 3 that connect the first movable bodies 2a and 2b and the restraints 5a and 5b that two-dimensionally restrain the support bodies 3 are arranged on the side surfaces where the first movable bodies 2a and 2b face each other. The support body 3 can be moved simultaneously through the first movable bodies 2a and 2b and the restraining bodies 5a and 5b. There is a clearance of 0.5 mm or less between the end portions 3a and 3b of the support body 3 and the first movable bodies 2a and 2b. The first movable bodies 2a and 2b are arranged on the support body 3 and the restraint body 5a. 5b and the load of the mounted object, the load is inclined within a range until it contacts the fixed body 1.

本発明の静圧スライダ５０は、支持体３の少なくとも一端に固定体１に対する第１可動体２の傾斜角度を検出する一対の検出手段１２（１２ａ、１２ｂ）と、検出手段１２より検出された角度に応じて第１可動体１の角度を調整する調整手段１１（１１ａ、１１ｂ）を備え、この調整手段１１によって固定体１に対する第１可動体２の傾斜を調整することができる。また、調整手段１１は静圧スライダ５０外に配置された圧電素子用ドライバーなどからの配線を通じて電圧を供給され、供給された電圧に応じて伸縮することにより可動体２の傾斜角度を調整する。   The static pressure slider 50 of the present invention is detected by a pair of detection means 12 (12a, 12b) for detecting the inclination angle of the first movable body 2 with respect to the fixed body 1 at at least one end of the support body 3, and the detection means 12. The adjusting means 11 (11a, 11b) for adjusting the angle of the first movable body 1 according to the angle is provided, and the inclination of the first movable body 2 with respect to the fixed body 1 can be adjusted by the adjusting means 11. Further, the adjusting means 11 is supplied with a voltage through wiring from a piezoelectric element driver or the like disposed outside the static pressure slider 50, and adjusts the inclination angle of the movable body 2 by expanding and contracting according to the supplied voltage.

したがって、固定体１と第１可動体２の非接触状態を保つことが可能となり、固定体１と第１可動体２の摩擦熱による材料の膨張収縮が起きず、第１可動体２の移動および停止の位置精度の向上、および第１可動体２の走行精度を高くすることができる。また、半導体素子の製造および検査工程において欠陥の原因となるパーティクルの発生を防止するとともに、パーティクルが固定体１と第１可動体２のすき間に挟み込むことかないので、固定体１と第１可動体２のかじりを防止することが可能となる。   Therefore, it is possible to keep the stationary body 1 and the first movable body 2 in a non-contact state, and the expansion and contraction of the material due to frictional heat between the stationary body 1 and the first movable body 2 does not occur, and the first movable body 2 moves. In addition, the positional accuracy of the stop can be improved, and the traveling accuracy of the first movable body 2 can be increased. In addition, since the generation of particles that cause defects in the manufacturing and inspection processes of the semiconductor element is prevented and the particles are not sandwiched between the fixed body 1 and the first movable body 2, the fixed body 1 and the first movable body. 2 can be prevented.

また、固定体１と第１可動体２の平行度を保つことが可能となるので、静圧面２３の軸受剛性を上げることができる。これにより、第１可動体２の走行性能を高精度に保つことができるので高精度な位置決めが可能となる。さらに、支持体３の位置を低くすることができるので、静圧スライダ５０の重心位置を下げることが可能となり、第１可動体２の位置決め時に振動の発生が無く高精度な位置決めが可能となる。   Further, since the parallelism between the fixed body 1 and the first movable body 2 can be maintained, the bearing rigidity of the hydrostatic surface 23 can be increased. Thereby, since the traveling performance of the 1st movable body 2 can be maintained with high precision, highly accurate positioning is attained. Further, since the position of the support 3 can be lowered, the position of the center of gravity of the static pressure slider 50 can be lowered, and no vibration is generated when the first movable body 2 is positioned, so that highly accurate positioning is possible. .

前記検出手段１２は、第１可動体２の走行性能および位置決め精度に影響を及ぼさないために、非接触型変位計であることが好ましい。非接触型変位計であることから、発熱を伴わない測定が可能であり、パーティクルの発生も防止することができる。非接触型変位計としては、静電容量型、レーザ側長型、渦電流型、エアセンサ型などが挙げられるが、本発明の静圧スライダ５０では、静電容量型もしくはレーザ側長型であることが好ましい。これらの変位計は、測定値の分解能が高く、固定体１に対する第１可動体２の傾きを精度よく検出することができる。また、レーザ側長型は、応答性が高いために、第１可動体２の移動中でも検出が可能であり、検出時に装置を停止する必要が無いという利点を有する。   The detection means 12 is preferably a non-contact displacement meter so as not to affect the running performance and positioning accuracy of the first movable body 2. Since it is a non-contact displacement meter, measurement without heat generation is possible, and generation of particles can also be prevented. Examples of the non-contact type displacement meter include a capacitance type, a laser side long type, an eddy current type, and an air sensor type. The static pressure slider 50 of the present invention is a capacitance type or a laser side long type. It is preferable. These displacement meters have high measurement value resolution, and can accurately detect the inclination of the first movable body 2 with respect to the fixed body 1. Further, since the laser-side long type has high responsiveness, it can be detected even while the first movable body 2 is moving, and has an advantage that it is not necessary to stop the apparatus at the time of detection.

さらに静電容量型は、検出中の自己発熱がないために、静圧スライダ５０自体に影響を及ぼすことが無く、温度変化による測定値の変化（ドリフト）を抑えることができ、高精度と安定した測定値を得ることができる。このことから、固定体１に対する第１可動体２の傾きを精度よく検出することができる。また、非磁性体であることから、ＥＢ装置などでの利用も可能となる。また、高額なミラーなどを必要としない。   Furthermore, since the capacitance type has no self-heating during detection, it does not affect the static pressure slider 50 itself, can suppress the change (drift) of the measured value due to temperature change, and is highly accurate and stable. Measured values can be obtained. From this, the inclination of the first movable body 2 with respect to the fixed body 1 can be detected with high accuracy. Further, since it is a non-magnetic material, it can be used in an EB device or the like. In addition, expensive mirrors are not required.

本発明では、検出手段１２を用いて固定体１に対する第１可動体２の傾斜角度を検出することが重要であり、これにより固定体２ａに対する第１可動体１ａの傾斜角度を検出することができるとともに、検出された角度をフィードバックして調整手段１１の制御量を決定することにより、第１可動体１の静圧面２３と固定体２の案内面２２との平行度を高精度に保持することができる。   In the present invention, it is important to detect the inclination angle of the first movable body 2 with respect to the fixed body 1 using the detection means 12, and thereby the inclination angle of the first movable body 1a with respect to the fixed body 2a can be detected. In addition, the parallelism between the static pressure surface 23 of the first movable body 1 and the guide surface 22 of the fixed body 2 is maintained with high accuracy by determining the control amount of the adjusting means 11 by feeding back the detected angle. be able to.

具体的に、一方の第１可動体２ａの傾斜角度を検出する手段を例に説明する。先ず図２（ａ）に示すように、一方の第１可動体２ａを固定体１ａに静置させた状態で、第１可動体２ａのそれぞれの側面に検出手段１２ａ、信号（α、β）を照射し、反射してきた信号を検出手段１２ａで受信しこれを基準とする。次に同図（ｂ）に示すように、第１可動体２ａを静圧により固定体１ａより浮上させ、第１可動体２ａの側面に検出信号１２ａより信号（α’、β’）を照射し、反射してきた信号を検出手段１２ａで受信し、この信号（α、β）、（α’、β’）の差より傾斜角度θを算出、測定することが可能となる。また、他方の第１可動体２ｂ、固定体１ｂについても検出手段１２ｂにより同様に検出する。   Specifically, a means for detecting the inclination angle of one first movable body 2a will be described as an example. First, as shown in FIG. 2A, in a state where one first movable body 2a is left stationary on the fixed body 1a, the detection means 12a and signals (α, β) are provided on the respective side surfaces of the first movable body 2a. , And the reflected signal is received by the detecting means 12a and used as a reference. Next, as shown in FIG. 6B, the first movable body 2a is floated from the fixed body 1a by static pressure, and the side surface of the first movable body 2a is irradiated with signals (α ′, β ′) from the detection signal 12a. Then, the reflected signal is received by the detection means 12a, and the inclination angle θ can be calculated and measured from the difference between the signals (α, β) and (α ′, β ′). The other first movable body 2b and fixed body 1b are similarly detected by the detecting means 12b.

なお、第１可動体２ａの上面もしくは下面より検出しても構わない。また、検出手段１２ａより出力される信号は、２箇所以上であればよい。   In addition, you may detect from the upper surface or lower surface of the 1st movable body 2a. Moreover, the signal output from the detection means 12a should just be two or more places.

この検出手段１２により検出された傾斜角度θを基に、調整手段１１ａ、１１ｂを用いて第１可動体２ａ、２ｂの傾斜角度θを調整する。図３、図４に示すように、この調整手段１１ａ、１１ｂは、可動体２ａ、２ｂの側面のうち支持体３側の側面の上部に設けられており、圧電素子、電磁モータ、エアシリンダ、油圧シリンダなどの伸縮可能な手段から成るため、傾斜角度θの大きさに対応してこの調整手段の伸縮度合いを種々変化させるものである。   Based on the inclination angle θ detected by the detection means 12, the inclination angles θ of the first movable bodies 2a and 2b are adjusted using the adjustment means 11a and 11b. As shown in FIGS. 3 and 4, the adjusting means 11 a and 11 b are provided at the upper part of the side surface of the movable body 2 a and 2 b on the support body 3 side, and include a piezoelectric element, an electromagnetic motor, an air cylinder, Since it consists of means that can be expanded and contracted, such as a hydraulic cylinder, the degree of expansion and contraction of this adjusting means is changed variously according to the magnitude of the inclination angle θ.

前記圧電素子、電子モータにおいては、供給される電流・電圧を通じて、また、エアシリンダ、油圧シリンダにおいては、エア、油等の媒体を通じて各手段が伸縮することにより、第１可動体２ａを回転方向に移動させて、浮上した第１可動体２ａが固定体１ａに対して平行になるように、即ち第１可動体２ａが固定体１ａに静置された時の初期状態になるように調整するものである。   In the piezoelectric element and the electronic motor, each means expands and contracts through the supplied current / voltage, and in the air cylinder and hydraulic cylinder through a medium such as air and oil, so that the first movable body 2a is rotated. So that the first movable body 2a that floats is parallel to the fixed body 1a, that is, the first movable body 2a is adjusted to the initial state when it is placed on the fixed body 1a. Is.

なお、この調整手段１１による調整は、第１可動体２ｂについても同様に調整手段１１ｂにより行われる。   The adjustment by the adjusting unit 11 is similarly performed by the adjusting unit 11b for the first movable body 2b.

特に、調整手段１１は圧電素子もしくは電磁モータを用いることが好ましい。圧電素子は非磁性体であるため、半導体製造装置の電子線描画装置にも影響を及ぼすことがない。さらに、検出手段１１から入力される指令電圧に対して、ナノメートルオーダーでの調整が可能であるので、固定体１と第１可動体２の平行度を高い精度で制御することが可能となり、さらに高速応答が可能であり、重量当たりの出力が大きく小型軽量であるため、第１可動体２の走行性能を高精度に保つことができるので高精度な位置決めが可能となる。また、動作に伴う発熱が少ないことから静圧スライダ５０の精度に悪影響を及ぼしにくいなどの利点も有している。一方、電磁モータは、ストロークが長く、調整範囲が広いので、固定体１に対し第１可動体２の傾斜角度θが大きいときに特に好適である。加えて、剛性が高く応答性も高いのでリニアに第１可動体２の傾斜角度θを調整することができる。また、圧電素子、電磁モータともに真空環境下での利用が可能であるので、例えば、静圧スライダ５０を電子線描画装置等に用いることもできる。また、図中の調整手段１１は支持体端部の３ａ、３ｂの上部中央部に配置されているが、下部中央部に配置されてもよく、さらに複数個用いても構わない。   In particular, the adjusting means 11 preferably uses a piezoelectric element or an electromagnetic motor. Since the piezoelectric element is a non-magnetic material, it does not affect the electron beam drawing apparatus of the semiconductor manufacturing apparatus. Furthermore, since it is possible to adjust the command voltage input from the detection means 11 in the nanometer order, it becomes possible to control the parallelism between the fixed body 1 and the first movable body 2 with high accuracy. Furthermore, since high-speed response is possible, the output per weight is large, and the size and weight are small, the traveling performance of the first movable body 2 can be maintained with high accuracy, so that highly accurate positioning is possible. Further, since the heat generated by the operation is small, there is an advantage that the accuracy of the static pressure slider 50 is hardly adversely affected. On the other hand, the electromagnetic motor is particularly suitable when the tilt angle θ of the first movable body 2 is large with respect to the fixed body 1 because the stroke is long and the adjustment range is wide. In addition, since the rigidity is high and the response is high, the inclination angle θ of the first movable body 2 can be adjusted linearly. Further, since both the piezoelectric element and the electromagnetic motor can be used in a vacuum environment, for example, the static pressure slider 50 can be used in an electron beam drawing apparatus or the like. Moreover, although the adjustment means 11 in the drawing is arranged at the upper central part of the support body end portions 3a and 3b, it may be arranged at the lower central part, or a plurality of adjustment means 11 may be used.

固定体１に対する第１可動体２の傾きを逐次調整する必要がない場合は、調整手段１１として不図示のネジを用いてもよい。ネジは調整手段１１として簡便であり、一度調整してしまえば経時変化がなく、圧電素子や電磁モータのように故障が発生する可能性が低いといった特徴がある。   If it is not necessary to sequentially adjust the inclination of the first movable body 2 with respect to the fixed body 1, a screw (not shown) may be used as the adjusting means 11. The screw is simple as the adjusting means 11 and has a feature that once adjusted, there is no change with time, and there is a low possibility of failure like a piezoelectric element or an electromagnetic motor.

また、本発明の静圧スライダ５０は、図３に示すように支持体３の少なくとも一端に弾性体６を配置することが好ましく、調整手段１１で第１可動体２の角度を調整する際に第１可動体２の回転の支点となり、容易に第１可動体２の傾きを修正することが可能となるためである。   Further, in the static pressure slider 50 of the present invention, it is preferable to dispose the elastic body 6 at at least one end of the support body 3 as shown in FIG. 3, and when the angle of the first movable body 2 is adjusted by the adjusting means 11. This is because it becomes a fulcrum of rotation of the first movable body 2 and the inclination of the first movable body 2 can be easily corrected.

図３におけるＢ部の拡大図を示す図４（ａ）、（ｂ）を用いて弾性体６が第１可動体２ａに配置された場合について詳細を説明する。図４（ａ）に示すように一方の第１可動体２ａが固定体１ａに対して傾いた場合、支持体端面３ａに配置された調整手段１１ａによって、第１可動体２ａの側面上部に圧力をかけ、第１可動体２ａの傾きを調整する。この際、一方の弾性体６ａの上部が第１可動体１ａの回転の支点になるため、第１可動体２ａの調整がスムーズにでき、図４（ｂ）に示すように第１可動体２ａと固定体１ａの平行度を保つことができる。   The case where the elastic body 6 is arrange | positioned at the 1st movable body 2a is demonstrated using FIG. 4 (a), (b) which shows the enlarged view of the B section in FIG. When one of the first movable bodies 2a is inclined with respect to the fixed body 1a as shown in FIG. 4 (a), the adjustment means 11a disposed on the support body end surface 3a applies pressure to the upper side surface of the first movable body 2a. To adjust the inclination of the first movable body 2a. At this time, since the upper part of one elastic body 6a becomes a fulcrum of rotation of the first movable body 1a, the first movable body 2a can be adjusted smoothly, and the first movable body 2a as shown in FIG. 4B. And the parallelism of the fixed body 1a can be maintained.

また、弾性体６ａに環状形状を用いた場合、支持体端部３ａと可動体２ａの互いの側面は、環状の弾性体６ａの内径側で密閉された空間を有することになる。そこで、図５（ａ）に示すように、支持体３にも第２可動体７を配置することも可能となり、ここで環状の弾性体６ａは、支持体３ａおよび第１可動体２ａに形成した回収経路と真空チャンバとの間の封止材としての作用を有することになる。弾性体６ａの材質としては、フッ素系ゴム、シリコン系ゴムが選択される。特に、本発明の静圧スライダ５１を真空中で使用する場合は、弾性体６ａから発生するアウトガスが少ないという観点からシリコン系ゴムが、また、高真空度中においてもアウトガスがシリコン系ゴムより少ないという観点から、フッ素系ゴムを用いることが好ましい。   When an annular shape is used for the elastic body 6a, the side surfaces of the support body end 3a and the movable body 2a have a space sealed on the inner diameter side of the annular elastic body 6a. Therefore, as shown in FIG. 5 (a), the second movable body 7 can also be arranged on the support 3, and the annular elastic body 6a is formed on the support 3a and the first movable body 2a. Thus, it acts as a sealant between the collected recovery path and the vacuum chamber. Fluorine rubber or silicon rubber is selected as the material of the elastic body 6a. In particular, when the static pressure slider 51 of the present invention is used in a vacuum, silicon rubber is used from the viewpoint that less outgas is generated from the elastic body 6a, and outgas is less than silicon rubber even in a high degree of vacuum. From this point of view, it is preferable to use fluorine-based rubber.

なお、他方の第１可動体２ｂにも同様に弾性体６ｂが配置されており同じ作用を成す。   In addition, the elastic body 6b is similarly arrange | positioned also at the other 1st movable body 2b, and the same effect | action is comprised.

また、本発明は、図５（ａ）、（ｂ）に示すように、支持体３に囲繞して配置され、支持体３に沿って移動する第２可動体７を備えることが好ましい。図５（ａ）は支持体３に第２可動体７を配置した場合の斜視図であり、図５（ｂ）は図５（ａ）のＣ−Ｃ線における断面図である。   In addition, as shown in FIGS. 5A and 5B, the present invention preferably includes a second movable body 7 that is disposed so as to be surrounded by the support 3 and moves along the support 3. FIG. 5A is a perspective view in the case where the second movable body 7 is arranged on the support body 3, and FIG. 5B is a cross-sectional view taken along the line CC in FIG.

これにより、支持体３上に載置する試料を第２可動体７に載置することにより、試料を２次元方向に円滑に移動させることが可能となる。   As a result, by placing the sample placed on the support 3 on the second movable body 7, the sample can be smoothly moved in the two-dimensional direction.

詳細には、真空チャンバ（不図示）内にて第１可動体２および第２可動体７には、加圧噴出される圧縮流体を回収するための流体排気溝２４が形成されており、さらに支持体３および固定体２には、流体排気溝２４より回収された流体を真空チャンバ（不図示）外へ排出するための真空排気管路２５が形成されている。また、第２可動体７は支持体３に囲繞して配置されており、支持体３には第２可動体７を案内するための案内面２７を有している。この案内面２７は高精度に加工されており、支持体３が第１可動体２に配置された状態で案内面２７の平面度は５μｍ以下になるように設定されている。   Specifically, a fluid exhaust groove 24 is formed in the first movable body 2 and the second movable body 7 in a vacuum chamber (not shown) for collecting the compressed fluid that is pressurized and ejected. The support 3 and the fixed body 2 are formed with a vacuum exhaust line 25 for discharging the fluid recovered from the fluid exhaust groove 24 to the outside of the vacuum chamber (not shown). The second movable body 7 is disposed so as to be surrounded by the support body 3, and the support body 3 has a guide surface 27 for guiding the second movable body 7. The guide surface 27 is processed with high accuracy, and the flatness of the guide surface 27 is set to 5 μm or less in a state where the support body 3 is disposed on the first movable body 2.

第２可動体７の案内面２７に対向する静圧面２８には、圧縮流体を噴出する静圧パッド２６が配置されており、静圧パッド２６から噴出された圧縮流体の案内面２７と静圧面２８との間の静圧により、第２可動体７は支持体３に数μｍ程度のクリアランスを介して非接触で支持されており、案内面２７に沿って非接触で移動可能である。   A static pressure pad 26 that ejects the compressed fluid is disposed on the static pressure surface 28 that faces the guide surface 27 of the second movable body 7, and the guide surface 27 and the static pressure surface of the compressed fluid ejected from the static pressure pad 26. Due to the static pressure between the second movable body 7 and the second movable body 7, the second movable body 7 is supported in a non-contact manner on the support body 3 with a clearance of about several μm, and can move in a non-contact manner along the guide surface 27.

静圧スライダ５０を本構成にすることにより、不図示の駆動源により駆動される第１可動体２の駆動中心と第１可動体２を連結している支持体３を含めた可動部の鉛直方向の重心位置が同一となり、位置決めする際に大きな振動を発生することなく、良好な位置決めが可能となる。   By adopting this configuration for the static pressure slider 50, the vertical position of the movable part including the drive center of the first movable body 2 driven by a drive source (not shown) and the support body 3 connecting the first movable body 2 is included. The center-of-gravity position in the direction is the same, and good positioning is possible without generating large vibrations when positioning.

第２可動体７の静圧面２８には、静圧パッド２６が配置され、さらにその周囲には噴出された流体を回収するための流体排気溝２９が形成されている。また、支持体３には流体排気溝２９に接続した真空排気管路３０が形成されており、真空排気管路３０は第１可動体１の流体排気溝２４と接続されている。静圧パッド２６から供給された流体は流体排気溝２９と真空排気管路３０を通して流体排気溝２４へと流れ、以降は静圧パッド２１から噴出した流体と同様に真空ポンプ（不図示）により真空チャンバ外の周囲へ排出される。   A static pressure pad 26 is arranged on the static pressure surface 28 of the second movable body 7, and a fluid exhaust groove 29 for collecting the ejected fluid is formed around the static pressure pad 26. In addition, a vacuum exhaust pipe 30 connected to the fluid exhaust groove 29 is formed in the support 3, and the vacuum exhaust pipe 30 is connected to the fluid exhaust groove 24 of the first movable body 1. The fluid supplied from the static pressure pad 26 flows to the fluid exhaust groove 24 through the fluid exhaust groove 29 and the vacuum exhaust pipe 30, and thereafter the vacuum is pumped by a vacuum pump (not shown) in the same manner as the fluid ejected from the static pressure pad 21. It is discharged to the outside of the chamber.

このことから、高精度な走行性能を有し、高精度な位置決めが可能であり、高速、高加速に対応可能な非接触の静圧スライダ５０を真空中で使用することができる。また、第１可動体１の流体排気溝２４および第２可動体７の流体排気溝２９により流体を回収し、さらに、固定体１および支持体３に対して、第１可動体２および第２可動体７は囲繞して配置されており、流体を真空チャンバ外へ放出するので、真空チャンバ内の真空度の低下を抑制することができる。   Therefore, the non-contact hydrostatic slider 50 that has high-precision running performance, high-precision positioning, and can cope with high speed and high acceleration can be used in a vacuum. Further, the fluid is recovered by the fluid exhaust groove 24 of the first movable body 1 and the fluid exhaust groove 29 of the second movable body 7, and further, the first movable body 2 and the second movable body 2 with respect to the fixed body 1 and the support body 3. Since the movable body 7 is disposed so as to be surrounded and discharges the fluid to the outside of the vacuum chamber, a decrease in the degree of vacuum in the vacuum chamber can be suppressed.

また、流体は、固定体１および支持体３などを循環しているので真空中においても静圧スライダ５０に蓄熱が起こらず、第１可動体２および第２可動体７の走行精度を高く保つことができる。さらに、第１可動体１の角度を調整手段１１で調整することから、案内面２２と静圧面２３のクリアランスが一定に保てるので、このクリアランスから真空チャンバ内への流体の漏出を抑制することができ真空チャンバ内の真空度を保つことが可能になる。   Further, since the fluid circulates through the fixed body 1 and the support body 3 and the like, heat accumulation does not occur in the static pressure slider 50 even in a vacuum, and the traveling accuracy of the first movable body 2 and the second movable body 7 is kept high. be able to. Furthermore, since the angle of the first movable body 1 is adjusted by the adjusting means 11, the clearance between the guide surface 22 and the static pressure surface 23 can be kept constant, so that leakage of fluid from the clearance into the vacuum chamber can be suppressed. This makes it possible to maintain the degree of vacuum in the vacuum chamber.

また、前記固定体１（１ａ、１ｂ）及び支持体３の材質は、高精度な加工が可能で良好な平面度や平行度を得られ、比剛性が高く自重や搭載物の荷重による変形量が少ないアルミナ質セラミックスや、比剛性がアルミナ質セラミックスより高く第１可動体２や第２可動体７を駆動するための不図示の駆動源から発生する熱をすみやかに排熱するために、熱伝導率の高い炭化珪素質セラミックスを用いることが好ましい。   In addition, the material of the fixed body 1 (1a, 1b) and the support body 3 can be processed with high accuracy to obtain good flatness and parallelism, has high specific rigidity, and is deformed by its own weight and load of the load. In order to quickly exhaust heat generated from a drive source (not shown) for driving the first movable body 2 and the second movable body 7 having a lower specific rigidity than alumina ceramics and having a higher specific rigidity than alumina ceramics. It is preferable to use silicon carbide ceramics having high conductivity.

また、第１可動体２(２ａ、２ｂ)および第２可動体７の材質も同様に、高精度な加工が可能で良好な平面度や平行度を得られ、比剛性の高いアルミナ質セラミックスや、固定体１や支持体２の場合と同様に排熱の理由から炭化珪素質セラミックスとしてもよい。   Similarly, the materials of the first movable body 2 (2a, 2b) and the second movable body 7 can be processed with high accuracy, and can have good flatness and parallelism, and can be made of alumina ceramics having high specific rigidity. As in the case of the fixed body 1 and the support body 2, silicon carbide ceramics may be used for the reason of exhaust heat.

また、不図示の駆動源が発生する熱が伝熱しても変形することなく、搭載物の変形を誘発しないことから線膨張係数が１×１０−６［１℃］以下の低熱膨張セラミックスとしてもよい。 Further, without heat driving source (not shown) is generated to deform even conducts the heat, even a low thermal expansion ceramics linear expansion coefficient of 1 × 10 -6 [1 ℃] or less since it does not induce deformation of the payload Good.

なお、本発明は、本実施形態に限定されるものではなく要旨を逸脱しない範囲であれば、種々の変更は可能である。   Note that the present invention is not limited to the present embodiment, and various modifications can be made without departing from the spirit of the present invention.

（ａ）は本発明の静圧スライダの一実施形態を示す斜視図であり、（ｂ）は同図（ａ）のＡ−Ａ線における断面図である(A) is a perspective view which shows one Embodiment of the static pressure slider of this invention, (b) is sectional drawing in the AA line of the same figure (a). （ａ）、（ｂ）は本発明の静圧スライダの第１可動体の傾斜角度の検出方法を示す概念図である。(A), (b) is a conceptual diagram which shows the detection method of the inclination-angle of the 1st movable body of the static pressure slider of this invention. 本発明の静圧スライダの他の実施形態を示す断面図である。It is sectional drawing which shows other embodiment of the static pressure slider of this invention. （ａ）、（ｂ）は図３のＢ部の拡大図であり、（ａ）は固定体に対して可動体が傾いた状態を示し、（ｂ）は固定体と可動体の平行度が保たれている状態を示す。(A), (b) is the enlarged view of the B section of FIG. 3, (a) shows a state in which the movable body is inclined with respect to the fixed body, and (b) shows the parallelism between the fixed body and the movable body. Indicates the state that is maintained. （ａ）は本発明の静圧スライダの他の実施形態を示す斜視図であり、（ｂ）は同図（ａ）のＣ−Ｃ線における断面図である。(A) is a perspective view which shows other embodiment of the static pressure slider of this invention, (b) is sectional drawing in CC line of the figure (a). 従来の静圧スライダを示す斜視図である。It is a perspective view which shows the conventional static pressure slider. （ａ）、（ｂ）は図６のＤ−Ｄ線における断面図であり、（ａ）は固定体と可動体の平行度が保たれている状態を示し、（ｂ）は固定体に対して可動体が傾いた状態を示す。(A), (b) is sectional drawing in the DD line of FIG. 6, (a) shows the state with which the parallelism of a fixed body and a movable body is maintained, (b) is with respect to a fixed body. The movable body is tilted. 従来の静圧スライダの別の実施形態を示す斜視図である。It is a perspective view which shows another embodiment of the conventional static pressure slider. 従来の静圧スライダのさらに別の実施形態を示す側面図である。It is a side view which shows another embodiment of the conventional static pressure slider.

符号の説明Explanation of symbols

５０、５００、５１０：静圧スライダ
１、１ａ、１ｂ、１０１：固定体
２、２ａ、２ｂ、１０２：可動体
３：支持体
４ａ、４ｂ、４ｃ、４ｄ：台座
５ａ、５ｂ：拘束体
６、６ａ、６ｂ：弾性体
７：第２可動体
１１、１１１：調整手段
１２、１２１：検出手段
２１、２６、１２１：静圧パッド
２２、２７、１２２：案内面
２３、２８、１２３：静圧面
２４、２９：流体排気溝
２５、３０：真空排気管
１２６：取り付け部品
１２７：予圧用ネジ
１２８：予圧用バネ
１２９：ラビリンス部 50, 500, 510: Static pressure slider 1, 1a, 1b, 101: Fixed body 2, 2a, 2b, 102: Movable body 3: Support bodies 4a, 4b, 4c, 4d: Base 5a, 5b: Restraining body 6, 6a, 6b: Elastic body 7: Second movable body 11, 111: Adjustment means 12, 121: Detection means 21, 26, 121: Static pressure pads 22, 27, 122: Guide surfaces 23, 28, 123: Static pressure surface 24 29: Fluid exhaust groove 25, 30: Vacuum exhaust pipe 126: Mounting part 127: Preload screw 128: Preload spring 129: Labyrinth part

Claims (9)

略平行に配置された一対の固定体と、各固定体を囲繞して配置され、固定体に沿って移動する一対の第１可動体と、該一対の第１可動体を連結する支持体と、を備え、前記支持体の少なくとも一端に、固定体に対する第１可動体の傾斜角度を検出する検出手段と、該検出手段により検出された傾斜角度に対応して第１可動体の傾斜角度を調整する調整手段を備えたことを特徴とする静圧スライダ。 A pair of fixed bodies arranged substantially in parallel; a pair of first movable bodies arranged surrounding each fixed body and moving along the fixed bodies; and a support body connecting the pair of first movable bodies; Detecting means for detecting an inclination angle of the first movable body relative to the fixed body, and an inclination angle of the first movable body corresponding to the inclination angle detected by the detection means. A hydrostatic slider comprising an adjusting means for adjusting. 前記検出手段は、非接触型変位計であることを特徴とする請求項１に記載の静圧スライダ。 The static pressure slider according to claim 1, wherein the detection unit is a non-contact displacement meter. 前記検出手段である非接触型変位計は、静電容量型であることを特徴とする
請求項２に記載の静圧スライダ。 The static pressure slider according to claim 2, wherein the non-contact displacement meter as the detection means is a capacitance type. 前記検出手段である非接触型変位計は、レーザ測長型であることを特徴とする請求項２に記載の静圧スライダ。 The static pressure slider according to claim 2, wherein the non-contact displacement meter as the detection means is a laser length measurement type. 前記調整手段は、圧電素子であることを特徴とする請求項１〜４の何れかに記載の静圧スライダ。 The static pressure slider according to claim 1, wherein the adjusting unit is a piezoelectric element. 前記調整手段は、電磁モータであることを特徴とする請求項１〜４の何れかに記載の静圧スライダ。 The static pressure slider according to claim 1, wherein the adjusting unit is an electromagnetic motor. 前記支持体の少なくとも一端に弾性体を配置したことを特徴とする請求項１〜６の何れかに記載の静圧スライダ。 The static pressure slider according to claim 1, wherein an elastic body is disposed at at least one end of the support body. 前記支持体に囲繞して配置され、支持体に沿って移動する第２可動体を備えたことを特徴とする請求項１〜７の何れかに記載の静圧スライダ。 The static pressure slider according to claim 1, further comprising a second movable body that is disposed so as to surround the support and moves along the support. 前記固定体、支持体および可動体は、セラミックスから成ることを特徴とする請求項１〜８の何れかに記載の静圧スライダ。 The static pressure slider according to claim 1, wherein the fixed body, the support body, and the movable body are made of ceramics.
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