JP4534801B2 - Substrate storage container - Google Patents

Substrate storage container Download PDF

Info

Publication number
JP4534801B2
JP4534801B2 JP2005062230A JP2005062230A JP4534801B2 JP 4534801 B2 JP4534801 B2 JP 4534801B2 JP 2005062230 A JP2005062230 A JP 2005062230A JP 2005062230 A JP2005062230 A JP 2005062230A JP 4534801 B2 JP4534801 B2 JP 4534801B2
Authority
JP
Japan
Prior art keywords
substrate
storage container
shelf
substrate storage
fixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005062230A
Other languages
Japanese (ja)
Other versions
JP2006245470A (en
Inventor
保良 北澤
靖理 三重野
巧 溝河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sinfonia Technology Co Ltd
Original Assignee
Sinfonia Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sinfonia Technology Co Ltd filed Critical Sinfonia Technology Co Ltd
Priority to JP2005062230A priority Critical patent/JP4534801B2/en
Publication of JP2006245470A publication Critical patent/JP2006245470A/en
Application granted granted Critical
Publication of JP4534801B2 publication Critical patent/JP4534801B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Description

本発明は、基板を収納して搬送される基板収納容器に関するものである。   The present invention relates to a substrate storage container that stores and transports a substrate.

基板を有する表示パネルの製造工程において、基板を搬送する際に、基板を内部に収納できる収納体として、基板収納用トレイが用いられている。この基板収納用トレイについては、搬送時における基板の破損を防止するために、種々の提案がなされている。例えば、基板を基板収納用トレイに収納し、これら基板収納用トレイを積み重ねることにより、基板を基板収納用トレイ間に収容することで、搬送時における基板の破損を防止している（特許文献１〜３参照）。
特開２００２−３５３３０２号公報 特開２００４−０５９１１６号公報 特開２００４−０７５１７５号公報 In a manufacturing process of a display panel having a substrate, a substrate storage tray is used as a storage body that can store a substrate when the substrate is transported. Various proposals have been made for the substrate storage tray in order to prevent the substrate from being damaged during transportation. For example, the substrate is stored in the substrate storage tray, and the substrate storage trays are stacked to store the substrate between the substrate storage trays, thereby preventing the substrate from being damaged during transportation (Patent Document 1). To 3).
JP 2002-353302 A Japanese Patent Laid-Open No. 2004-059116 Japanese Patent Laid-Open No. 2004-075175

しかしながら、前記従来の基板収納容器にあっては、基板収納用トレイ間に基板を収容することで、搬送時における基板の破損を防止できるものの、基板と同数の基板収納用トレイを必要とするため、各基板収納用トレイの分だけ全体の重量が増加する。また、基板を支持するための基板収納用トレイの厚さが嵩み、それらを積み重ねたときの全高が高くなる。その結果、基板収納用トレイを含む基板を一度に少量しか搬送することができず、すなわち基板の搬送効率が悪化してしまう。
また、基板を基板収納用トレイに収納する際、および収納された基板を基板収納用トレイから排出する際、これら基板収納用トレイを順次積み重ねたり積み崩したりする作業を要するため、このような作業に手間がかかる。 However, in the conventional substrate storage container, by storing the substrates between the substrate storage trays, the substrate can be prevented from being damaged during transportation, but the same number of substrate storage trays as the substrates are required. The total weight increases by the amount of each substrate storage tray. In addition, the thickness of the substrate storage tray for supporting the substrate is increased, and the total height when the trays are stacked is increased. As a result, only a small amount of the substrate including the substrate storage tray can be transferred at a time, that is, the substrate transfer efficiency deteriorates.
In addition, when storing substrates in the substrate storage tray and when discharging the stored substrates from the substrate storage tray, it is necessary to sequentially stack and unload these substrate storage trays. It takes time and effort.

本発明は、このような事情を考慮してなされたもので、搬送時における基板の破損を防止するとともに、基板の搬送効率を向上でき、かつ基板を収納および排出する効率を向上できる基板収納容器を提供することを目的とする。   The present invention has been made in consideration of such circumstances, and can prevent damage to the substrate during transportation, improve the efficiency of transporting the substrate, and improve the efficiency of storing and discharging the substrate. The purpose is to provide.

本発明は、上記課題を解決するため、以下の手段を採用する。すなわち本発明の基板収納容器は、収納容器本体の内部に、複数の基板をそれぞれ支持する複数の棚が形成され、前記棚は、所定間隔をおいて前記収納容器本体の対向する側面間をつなぐ複数の支持材で構成され、前記収納容器本体の正面および背面が前記基板を前記棚に搬入出可能となるように開口され、前記棚に搬入された前記基板の端部及び前記支持部材を共に把持して固定する固定具が前記収納容器本体に取り付けられていることを特徴とする。 The present invention employs the following means in order to solve the above problems. That substrate storage container of the present invention, the interior of the storage container main body, a plurality of shelves for supporting a plurality of substrates each formed, said shelf connecting between opposite sides of the container body at predetermined intervals It is composed of a plurality of support materials, and the front and back surfaces of the storage container main body are opened so that the substrate can be carried into and out of the shelf, and both the end portion of the substrate carried into the shelf and the support member are combined. A fixture for gripping and fixing is attached to the storage container body .

このような構成とすることで、基板収納容器の重量が削減されるとともに、全高が低くなるため、基板を基板収納容器に収納して大量に搬送可能となる。また、基板の搬入出時に従来のように基板収納用トレイを順次積み重ねたり積み崩したりする作業を必要としないため、基板の搬入出する作業の簡略化が図れることとなる。さらに、固定具によって基板とともに支持材を固定することで、搬送時における基板および支持材の固定が解除されにくくなるため、基板収納容器からの基板の脱落を防止するとともに、基板と支持材とのずれを防止することとなる。 With such a configuration, the weight of the substrate storage container is reduced and the overall height is lowered, so that the substrate can be stored in the substrate storage container and transported in large quantities. In addition, since the operation of sequentially stacking and unloading the substrate storage trays is not required when loading and unloading the substrates, the work of loading and unloading the substrates can be simplified. Furthermore, by fixing the support material together with the substrate by the fixing tool, it becomes difficult to release the fixation of the substrate and the support material at the time of transportation, so that the substrate is prevented from falling off from the substrate storage container, and the substrate and the support material are This will prevent deviation.

また、本発明の基板収納容器において、前記固定具は、前記棚に搬入された前記基板の少なくとも一対の対角の角部を固定するものであることを特徴とする。 Further, the substrate storage container of the present invention, the fixture is characterized in that it is intended to secure the corners of at least one pair of diagonal of the substrate carried on the shelf.

固定具が基板の少なくとも一対の対角の角部あるいはその近傍を固定することで、搬送時における基板の固定がより強固となるため、基板収納容器からの基板の脱落を防止することとなる。   Since the fixing tool fixes at least one pair of diagonal corners of the substrate or the vicinity thereof, the substrate is more firmly fixed during transport, and thus the substrate is prevented from falling off from the substrate storage container.

また、本発明の基板収納容器において、複数の基板の各固定具が連結されていることを特徴とする。   In the substrate storage container of the present invention, each fixture of a plurality of substrates is connected.

複数の基板の各固定具が連結されていることで、搬送時における基板の固定が解除されにくくなるため、基板収納容器からの基板の脱落を防止することとなる。   Since the fixtures of the plurality of substrates are connected to each other, it becomes difficult to release the substrates from being fixed at the time of transportation, so that the substrates are prevented from falling off from the substrate storage container.

また、本発明の基板収納容器において、前記固定具は、前記基板を固定している固定位置と、該基板を固定していない非固定位置との間で変位可能に、前記収納容器本体に可動自在に取付けられていることを特徴とする。 In the substrate storage container of the present invention, the fixture is movable to the storage container body so as to be displaceable between a fixed position where the substrate is fixed and a non-fixed position where the substrate is not fixed. characterized in that mounted freely.

固定具が可動自在に取付けられ、基板の固定あるいは非固定を行うことにより、棚に搬入された基板が固定具を移動させて容易にかつ迅速に固定されるとともに、基板が棚から搬出されるときに固定具を移動させて容易にかつ迅速に固定を解除されることとなる。   A fixture is movably attached, and by fixing or unfixing the substrate, the substrate carried into the shelf is easily and quickly fixed by moving the fixture, and the substrate is carried out of the shelf. Sometimes the fixture is moved and released easily and quickly.

本発明の基板収納容器によれば、基板を収納容器本体に収納して大量に搬送可能となるとともに、基板の搬入出する作業の簡略化が図れることとなるので、搬送時における基板の破損を防止するとともに、基板の搬送効率を向上させることができ、かつ基板を収納および排出する効率を向上させることができる。   According to the substrate storage container of the present invention, the substrate can be stored in the storage container main body and transferred in large quantities, and the work of loading and unloading the substrate can be simplified. In addition to preventing the substrate, the efficiency of transporting the substrate can be improved, and the efficiency of storing and discharging the substrate can be improved.

また、本発明の基板収納容器によれば、搬送時における基板の固定がより強固となり、基板収納容器からの基板の脱落を防止するので、基板の搬送を安全かつ確実に行うことができる。   In addition, according to the substrate storage container of the present invention, the substrate is more firmly fixed during transport and the substrate is prevented from falling off the substrate storage container, so that the substrate can be transported safely and reliably.

また、本発明の基板収納容器によれば、搬送時における基板の固定が解除されにくくなり、基板収納容器からの基板の脱落を防止するので、基板の搬送を安全かつ確実に行うことができる。   In addition, according to the substrate storage container of the present invention, it becomes difficult to release the substrate from being fixed at the time of transport, and the substrate is prevented from falling off from the substrate storage container, so that the substrate can be transported safely and reliably.

また、本発明の基板収納容器によれば、搬送時における基板および支持材の固定が解除されにくくなるため、基板収納容器からの基板の脱落を防止するとともに、基板と支持材とのずれを防止するので、基板の搬送を安全かつ確実に行うことができる。   In addition, according to the substrate storage container of the present invention, since the fixation of the substrate and the support material during transportation is difficult to be released, the substrate is prevented from falling off from the substrate storage container, and the substrate and the support material are prevented from being displaced. Therefore, the substrate can be transported safely and reliably.

また、本発明の基板収納容器によれば、棚に搬入された基板が固定具を移動させて容易にかつ迅速に固定されるとともに、基板が棚から搬出されるときに固定具を移動させて容易にかつ迅速に固定を解除されるので、棚に対する基板の搬入出作業効率を向上させることができる。   Further, according to the substrate storage container of the present invention, the substrate carried into the shelf is easily and quickly fixed by moving the fixture, and the fixture is moved when the substrate is unloaded from the shelf. Since the fixation can be easily and quickly released, it is possible to improve the efficiency of carrying the substrate in and out of the shelf.

以下、本発明の実施の形態について、図面を用いて詳細に説明する。
図１は本発明の一実施形態である基板収納容器１０の斜視図である。
基板収納容器１０は、収納容器本体１１と、収納容器本体１１の内部に形成される棚１２とを備えている。この基板収納容器１０の内部には、外部から搬入される複数の基板Ｐを棚１２で多段支持しながら収納できるようになっている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view of a substrate storage container 10 according to an embodiment of the present invention.
The substrate storage container 10 includes a storage container main body 11 and a shelf 12 formed inside the storage container main body 11. Inside the substrate storage container 10, a plurality of substrates P carried from the outside can be stored while being supported in multiple stages by the shelf 12.

収納容器本体１１は、後述する複数の棒状部材によって枠状で直方体形状に形成されたものである。収納容器本体１１の底面部分は、それぞれ対向する２本の第１棒状部材１３と２本の第２棒状部材１４とで矩形に形成されており、これら第２棒状部材１４と同方向に延び、その両端が第１棒状部材１３に取付けられた複数、例えば９本の第３棒状部材１５が所定の間隔をおいて設けられている。これら第１棒状部材１３、第２棒状部材１４および第３棒状部材１５は、基板収納容器１０の底面１６を構成する。   The storage container main body 11 is formed in a frame shape and a rectangular parallelepiped shape by a plurality of rod-like members described later. The bottom portion of the storage container main body 11 is formed in a rectangular shape with two first rod members 13 and two second rod members 14 facing each other, and extends in the same direction as the second rod members 14. A plurality of, for example, nine third rod-like members 15 whose both ends are attached to the first rod-like member 13 are provided at a predetermined interval. The first rod-shaped member 13, the second rod-shaped member 14, and the third rod-shaped member 15 constitute a bottom surface 16 of the substrate storage container 10.

この底面１６の各角部には、鉛直上方に延びた４本の第１柱部１７がそれぞれ立設されている。また、これら第１柱部１７の上端には、底面１６と同様に第１棒状部材１３、第２棒状部材１４および第３棒状部材１５で構成され、これら第１柱部１７の上端に各角部を支持された上面１８が設けられている。また、これら底面１６及び上面１８の第１棒状部材１３の間には、所定の間隔をおいて配置された複数、例えば３つの第１棒状部材１３が設けられている。そして、これら底面１６及び上面１８の第２棒状部材１４の間には、所定の間隔をおいて配置された複数、例えば３つの第２棒状部材１４が設けられ、これら底面１６及び上面１８の第３棒状部材１５の間には、所定の間隔をおいて配置された複数、例えば３つの第２棒状部材１５が設けられている。   At each corner of the bottom surface 16, four first pillars 17 extending vertically upward are respectively erected. Further, the upper ends of the first column portions 17 are constituted by the first rod-shaped member 13, the second rod-shaped member 14, and the third rod-shaped member 15, similarly to the bottom surface 16. An upper surface 18 that supports the part is provided. In addition, a plurality of, for example, three first rod-shaped members 13 arranged at a predetermined interval are provided between the first rod-shaped members 13 on the bottom surface 16 and the top surface 18. A plurality of, for example, three second rod-shaped members 14 arranged at a predetermined interval are provided between the bottom surface 16 and the second rod-shaped members 14 on the top surface 18. Between the three rod-shaped members 15, a plurality of, for example, three second rod-shaped members 15 arranged at a predetermined interval are provided.

また、上下方向に隣接するそれぞれの第１棒状部材１３の間には、複数、例えば９本の第２柱部２０が所定の間隔をおいて設けられている。
これら第１棒状部材１３、第２柱部２０および第１柱部１７は、収納容器本体１１の長手方向に沿った側面１９および側面２１を構成する。なお、これら側面１９および側面２１は、図１における手前側および奥側に対向する面である。
また、第２棒状部材１４および第１柱部１７は、収納容器本体１１の長手方向と交差する方向に沿って対向する正面２２および背面２２’を構成する。 In addition, a plurality of, for example, nine second column parts 20 are provided at predetermined intervals between the first rod-like members 13 adjacent in the vertical direction.
The first rod-shaped member 13, the second column portion 20, and the first column portion 17 constitute a side surface 19 and a side surface 21 along the longitudinal direction of the storage container body 11. The side surface 19 and the side surface 21 are surfaces facing the near side and the far side in FIG.
Further, the second rod-shaped member 14 and the first pillar portion 17 constitute a front surface 22 and a back surface 22 ′ that face each other along a direction intersecting the longitudinal direction of the storage container body 11.

棚１２は、所定の間隔をおいて複数のワイヤ１２ａ（支持材）で構成され、対向する収納容器本体１１の側面１９および側面２１の間、すなわち対向する第１柱部１７間または対向する第２柱部２０間をつなぐように設けられている。これら棚１２は、収納される１枚の基板Ｐを１段ごとに支持できるように、基板Ｐを収納できる段数分のワイヤ１２ａが、対向する第１柱部１７間および対向する各第２柱部２０間に配置されている。
また、収納容器本体１１の正面２２および背面２２’は、基板Ｐを棚１２に搬入出可能となるように開口されている。 The shelf 12 is composed of a plurality of wires 12a (support materials) at a predetermined interval, and is between the side surface 19 and the side surface 21 of the opposing storage container main body 11, that is, between the first columnar portions 17 facing each other or the first side facing each other. It is provided so as to connect between the two pillar portions 20. These shelves 12 are arranged so that the number of stages of wires 12a that can accommodate the substrates P is between the opposing first pillar portions 17 and the opposing second pillars so that the individual substrates P to be accommodated can be supported in each stage. Arranged between the portions 20.
Further, the front surface 22 and the rear surface 22 ′ of the storage container body 11 are opened so that the substrate P can be carried in and out of the shelf 12.

また、各第１柱部１７には、棚１２に搬入された基板Ｐの端部を固定する固定具２３ａを各段ごとに配置した固定具ユニット２３が、搬入された基板Ｐの固定あるいは非固定を行えるように、可動自在に取付けられている。これら固定具ユニット２３は、基板Ｐを収納する段ごとに配置されており、その段ごとに収納された基板Ｐとともにワイヤ１２ａを固定できるようになっている。また、これら固定具ユニット２３は、図２に示すように、隣接する第２棒状部材１４間において各固定具２３ａが第１柱部１７に沿って連結された構成となっている。   In addition, in each first column portion 17, a fixture unit 23 in which fixtures 23 a that fix the end portions of the substrates P carried into the shelf 12 are arranged for each stage is fixed or non-fixed to the substrates P that are carried in. It is mounted movably so that it can be fixed. These fixture units 23 are arranged for each stage in which the substrate P is stored, and the wire 12a can be fixed together with the substrate P stored in each stage. In addition, as shown in FIG. 2, these fixture units 23 are configured such that each fixture 23 a is connected along the first column portion 17 between adjacent second rod-shaped members 14.

固定具ユニット２３は、図３〜図５に示すように、固定部２４と、可動部２５とからなっている。固定部２４は、第１柱部１７に取付けられ第１柱部１７の長手方向に沿うように延びており、その内部に第１柱部１７の長手方向に沿うように延びた円筒状の軸部２６を備えている。また、可動部２５は、軸部２６を貫通された貫通孔２７を備えており、この貫通孔２７を介して軸部２６に誘導されながら、収納容器本体１１に収納された基板Ｐを開放する非固定位置から９０°回動し、その回動位置から基板Ｐまで直進して基板Ｐを固定する固定位置まで移動できるようになっている。また、この貫通孔２７は、上記方向と逆方向、すなわち固定位置から回動位置を経て非固定位置にも移動できるようになっている。
また、可動部２５には、固定位置に移動したときにワイヤ１２ａを把持できるワイヤ把持部２８と、このときに基板Ｐを把持できる基板把持部２９とが設けられている。 As shown in FIGS. 3 to 5, the fixture unit 23 includes a fixed portion 24 and a movable portion 25. The fixed portion 24 is attached to the first pillar portion 17 and extends along the longitudinal direction of the first pillar portion 17, and a cylindrical shaft extending along the longitudinal direction of the first pillar portion 17 therein. A portion 26 is provided. In addition, the movable portion 25 includes a through hole 27 that penetrates the shaft portion 26, and opens the substrate P stored in the storage container body 11 while being guided to the shaft portion 26 through the through hole 27. It is rotated 90 ° from the non-fixed position, and can move straight from the rotated position to the substrate P to a fixed position where the substrate P is fixed. Further, the through hole 27 can be moved in the direction opposite to the above-described direction, that is, from the fixed position to the non-fixed position through the rotation position.
The movable portion 25 is provided with a wire gripping portion 28 that can grip the wire 12a when moved to a fixed position, and a substrate gripping portion 29 that can grip the substrate P at this time.

次に、上記の構成からなる基板収納容器１０の機能および作用について説明する。
外部から搬入された基板Ｐを基板収納容器１０の内部に収納し、その基板Ｐを棚１２に収納した後、基板Ｐを固定具ユニット２３によって固定する。また、固定具ユニット２３によって固定され棚１２に収納された基板Ｐを固定解除した後、基板収納容器１０の内部から外部に搬出する。すなわち、以下の手順を用いて基板Ｐを搬入出する。 Next, the function and operation of the substrate storage container 10 having the above configuration will be described.
The substrate P loaded from the outside is stored in the substrate storage container 10 and stored in the shelf 12, and then the substrate P is fixed by the fixture unit 23. Further, after the substrate P fixed by the fixture unit 23 and stored in the shelf 12 is released, the substrate P is carried out from the inside of the substrate storage container 10 to the outside. That is, the board | substrate P is carried in / out using the following procedures.

外部から搬入された基板Ｐを基板収納容器１０の内部に収納する際、図６に示すように、搬送装置３０の上部に設けられた複数のローラ３１上に基板Ｐを搭載する。一方、複数のローラ４１を有する基板搬入出装置４０の端部には、平坦な載置部４３を上端に有し鉛直上下方向に移動可能な複数の支持部４２が設けられている。これら支持部４２の載置部４３に、図示しない搬送台車に搬送された基板収納容器１０を載置する。なお、この基板搬入出装置４０には、基板収納容器１０の第２棒状部材１５を挿入可能な凹部４４が所定の間隔をおいて形成されるため、載置部４３以外の位置で基板収納容器１０と接触しない。   When the substrate P loaded from the outside is stored in the substrate storage container 10, the substrate P is mounted on a plurality of rollers 31 provided on the upper part of the transfer device 30 as shown in FIG. 6. On the other hand, a plurality of support portions 42 having a flat placement portion 43 at the upper end and movable in the vertical vertical direction are provided at the end portion of the substrate carry-in / out device 40 having the plurality of rollers 41. The substrate storage container 10 transported to a transport carriage (not shown) is placed on the placement part 43 of the support part 42. In this substrate carry-in / out device 40, the concave portions 44 into which the second rod-like members 15 of the substrate storage container 10 can be inserted are formed at predetermined intervals, so that the substrate storage container is located at a position other than the mounting portion 43. No contact with 10.

基板収納容器１０を載置部４３に載置した後、基板Ｐを収納する棚１２と搬送装置３０上の基板Ｐとの高さが一致するまで支持部４２を下降させ、搬送装置３０から複数のローラ３１を回動させて、基板収納容器１０の最上段の棚１２に基板Ｐを搬入する。そして、次の基板Ｐを収納するために支持部４２を１段の棚１２に相当する分だけ上昇させて、１段下の棚１２に基板Ｐを搬入する。このようにして、各段の棚１２に基板Ｐを順次搬入する。そして、固定具ユニット２３を非固定位置から回動位置に回動させた後、固定位置に移動させて、ワイヤ把持部２８によってワイヤ１２ａを把持するとともに基板把持部２９によって基板Ｐを固定する。
基板収納容器１０に対して基板Ｐの収納が終了した後、搬送台車に設けられた爪が入る分だけさらに支持部４２を上昇させ、その爪を基板収納容器１０の下部に押入して基板収納容器１０を載置部４３から持ち上げ、所定の位置まで移動させる。 After placing the substrate storage container 10 on the placement unit 43, the support unit 42 is lowered until the height of the shelf 12 storing the substrate P and the substrate P on the transfer device 30 coincide with each other. The substrate 31 is carried into the uppermost shelf 12 of the substrate storage container 10 by rotating the roller 31. Then, in order to store the next substrate P, the support portion 42 is raised by an amount corresponding to the first shelf 12, and the substrate P is carried into the first shelf 12. In this way, the substrates P are sequentially carried into the shelves 12 of each stage. Then, after the fixture unit 23 is rotated from the non-fixed position to the rotational position, the fixture unit 23 is moved to the fixed position, and the wire gripping portion 28 grips the wire 12a and the substrate gripping portion 29 fixes the substrate P.
After the storage of the substrate P in the substrate storage container 10 is completed, the support portion 42 is further raised by the amount of the nail provided on the transport carriage, and the nail is pushed into the lower portion of the substrate storage container 10 to store the substrate. The container 10 is lifted from the placement unit 43 and moved to a predetermined position.

また、基板収納容器１０の内部に収納された基板Ｐを外部に搬出する際、爪を基板収納容器１０の下部に押入された状態で搬送し、搬送台車の爪を下げながら基板収納容器１０を載置部４３に載置する。そして、固定具ユニット２３を固定位置から回動位置に移動させた後、非固定位置に回動させて、ワイヤ把持部２８によって把持されたワイヤ１２ａを固定解除するとともに基板把持部２９によって固定された基板Ｐを固定解除する。その後、図７に示すように、最下段の棚１２に収納された基板Ｐを搬送装置３０のローラ３１に接触させ、ローラ３１を回転して搬出する。そして、次の基板Ｐを搬出するために支持部４２を１段の棚１２に相当する分だけ下降させて、１段上の棚１２に収納された基板Ｐを搬出する。このようにして、図７に示すように、各段の棚１２に収納された基板Ｐを順次搬出する。
基板収納容器１０から基板Ｐを搬出した後、爪が入る分だけさらに支持部４２を上昇させ、搬送台車の爪を基板収納容器１０の下部に押入して基板収納容器１０を載置部４３から持ち上げ、所定の位置まで移動させる。 Further, when the substrate P stored inside the substrate storage container 10 is carried out to the outside, the claw is transferred while being pushed into the lower part of the substrate storage container 10, and the substrate storage container 10 is lowered while lowering the claw of the transfer carriage. It is placed on the placement unit 43. Then, after moving the fixture unit 23 from the fixed position to the rotational position, the fixture unit 23 is rotated to the non-fixed position, so that the wire 12a grasped by the wire grasping portion 28 is released and fixed by the substrate grasping portion 29. The fixed substrate P is released. After that, as shown in FIG. 7, the substrate P stored in the lowest shelf 12 is brought into contact with the roller 31 of the transport device 30, and the roller 31 is rotated and carried out. Then, in order to carry out the next substrate P, the support portion 42 is lowered by an amount corresponding to the first shelf 12, and the substrate P stored in the first shelf 12 is carried out. In this way, as shown in FIG. 7, the substrates P stored in the shelves 12 of each stage are sequentially carried out.
After unloading the substrate P from the substrate storage container 10, the support portion 42 is further raised as much as the nail enters, the nail of the transport carriage is pushed into the lower portion of the substrate storage container 10, and the substrate storage container 10 is removed from the placement portion 43. Lift and move to a predetermined position.

この場合、基板収納容器１０が収納容器本体１１とワイヤ１２ａで構成された棚１２とからなることにより、基板収納容器１０の重量が削減されるとともに、収納容器本体１１の全高が低くなるため、基板Ｐを基板収納容器１０に収納して大量に搬送可能となる。また、基板Ｐの搬入出時には、従来のように基板収納用トレイを順次積み重ねたり積み崩したりする作業を必要としないため、基板Ｐの搬入出する作業の簡略化が図れることとなる。したがって、搬送時における基板Ｐの破損を防止するとともに、基板Ｐの搬送効率を向上させることができ、かつ基板Ｐを収納および排出する効率を向上させることができる。   In this case, since the substrate storage container 10 includes the storage container main body 11 and the shelf 12 composed of the wires 12a, the weight of the substrate storage container 10 is reduced and the overall height of the storage container main body 11 is reduced. The substrate P can be stored in the substrate storage container 10 and transferred in large quantities. Further, when loading / unloading the substrate P, it is not necessary to sequentially stack and unload the substrate storage trays as in the prior art, so that the work of loading / unloading the substrate P can be simplified. Therefore, the substrate P can be prevented from being damaged during transportation, the transportation efficiency of the substrate P can be improved, and the efficiency of storing and discharging the substrate P can be improved.

また、固定具ユニット２３が隣接する第２棒状部材１４間において第１柱部１７に沿って連結された構成となっていることで、搬送時における基板Ｐの固定が解除されにくくなるため、基板収納容器１０からの基板Ｐの脱落を防止することとなる。したがって、基板Ｐの搬送を安全かつ確実に行うことができる。   In addition, since the fixture unit 23 is configured to be connected along the first column portion 17 between the adjacent second rod-like members 14, the fixation of the substrate P during transportation is difficult to be released. This prevents the substrate P from falling off the storage container 10. Therefore, the substrate P can be transported safely and reliably.

また、固定具ユニット２３によって基板Ｐとともにワイヤ１２ａを固定することで、搬送時における基板Ｐおよびワイヤ１２ａの固定が解除されにくくなるため、基板収納容器１０からの基板Ｐの脱落を防止するとともに、基板Ｐとワイヤ１２ａとのずれを防止することとなる。したがって、基板Ｐの搬送を安全かつ確実に行うことができる。   Further, by fixing the wire 12a together with the substrate P by the fixture unit 23, it becomes difficult to release the fixation of the substrate P and the wire 12a at the time of transport, so that the substrate P is prevented from dropping from the substrate storage container 10, A shift between the substrate P and the wire 12a is prevented. Therefore, the substrate P can be transported safely and reliably.

また、固定具ユニット２３が可動自在に取付けられ、基板Ｐの固定あるいは非固定を行うことにより、棚１２に搬入された基板Ｐが固定具ユニット２３を移動させて容易にかつ迅速に固定されるとともに、基板Ｐが棚１２から搬出されるときに固定具ユニット２３を移動させて容易にかつ迅速に固定を解除されることとなる。したがって、棚１２に対する基板Ｐの搬入出作業効率を向上させることができる。   In addition, the fixture unit 23 is movably attached, and by fixing or non-fixing the substrate P, the substrate P carried into the shelf 12 is fixed easily and quickly by moving the fixture unit 23. At the same time, when the substrate P is unloaded from the shelf 12, the fixing unit 23 is moved so that the fixation is released easily and quickly. Accordingly, it is possible to improve the work efficiency of loading and unloading the substrate P with respect to the shelf 12.

なお、上記実施の形態において、固定具ユニット２３は、棚１２に搬入された基板Ｐの少なくとも一対の対角の角部あるいはその近傍を固定するものであればよい。固定具ユニット２３が基板Ｐの少なくとも一対の対角の角部あるいはその近傍を固定することで、搬送時における基板Ｐの固定がより強固となるため、基板収納容器１０からの基板Ｐの脱落を防止することとなる。したがって、基板Ｐの搬送を安全かつ確実に行うことができる。   In the above embodiment, the fixture unit 23 only needs to fix at least a pair of diagonal corners of the substrate P carried into the shelf 12 or the vicinity thereof. Since the fixture unit 23 fixes at least a pair of diagonal corners of the substrate P or the vicinity thereof, the substrate P is more firmly fixed during transport. Therefore, the substrate P is removed from the substrate storage container 10. Will be prevented. Therefore, the substrate P can be transported safely and reliably.

また、上記実施の形態において、収納容器本体１１の正面２２および背面２２’は、基板Ｐを棚１２に搬入出可能となるように開口されているが、正面２２および背面２２’の少なくともいずれか一方が開口されていればよい。   Moreover, in the said embodiment, although the front 22 and back 22 'of the storage container main body 11 are opened so that the board | substrate P can be carried in / out of the shelf 12, at least any one of the front 22 and back 22' One side should just be opened.

また、上記実施の形態において、各固定具２３ａを第１柱部１７に沿って連結して固定具ユニット２３を構成しなくてもよい。すなわち、各固定具２３ａがそれぞれ独立に第１柱部１７に取付けられてもよい。また、基板Ｐとともにワイヤ１２ａを固定しなくてもよく、基板Ｐのみを固定するものであってもよい。
また、この固定具ユニット２３は、上記実施の形態のように、回動させた後基板Ｐに接近する方向に移動させて基板Ｐを固定または非固定するものでなくてもよい。例えば図８に示すように、複数、例えば２個の磁石５１を取付けた固定部５０と、これら磁石５１それぞれに着脱可能な金属製の平板５２を取付け、固定部５０に回動可能に取付けられた可動部５３とを備えて構成され、固定部５０を基板Ｐの方向に回動させた後磁石５１と平板５２とが磁力により接合することで固定具ユニット２３の回動を防止しながら基板Ｐを固定具ユニット２３で固定するものであってもよい。 Moreover, in the said embodiment, each fixing tool 23a may be connected along the 1st pillar part 17, and the fixing device unit 23 does not need to be comprised. That is, each fixing tool 23a may be independently attached to the first pillar portion 17. Further, the wire 12a may not be fixed together with the substrate P, and only the substrate P may be fixed.
In addition, the fixture unit 23 does not have to be fixed or unfixed by rotating the fixture unit 23 in a direction approaching the substrate P after being rotated. For example, as shown in FIG. 8, a fixed portion 50 to which a plurality of, for example, two magnets 51 are attached, and a detachable metal flat plate 52 are attached to each of the magnets 51 and attached to the fixed portion 50 so as to be rotatable. The movable portion 53 is configured to rotate the fixing portion 50 in the direction of the substrate P, and then the magnet 51 and the flat plate 52 are joined by magnetic force to prevent the fixing unit 23 from rotating. P may be fixed by the fixture unit 23.

本発明の実施の形態に係る基板収納容器の斜視図である。It is a perspective view of the substrate storage container concerning an embodiment of the invention. 本発明の実施の形態に係る固定具ユニットの部分拡大図である。It is the elements on larger scale of the fixture unit which concerns on embodiment of this invention. 非固定位置に位置する固定具ユニットの部分拡大図である。It is the elements on larger scale of the fixture unit located in an unfixed position. 回動位置に位置する固定具ユニットの部分拡大図である。It is the elements on larger scale of the fixture unit located in a rotation position. 固定位置に位置する固定具ユニットの部分拡大図である。It is the elements on larger scale of the fixture unit located in a fixed position. 基板収納容器に対する基板の搬入出を説明する図である。It is a figure explaining carrying in / out of the board | substrate with respect to a board | substrate storage container. 基板収納容器に対する基板の搬入出を説明する図である。It is a figure explaining carrying in / out of the board | substrate with respect to a board | substrate storage container. 別の固定具ユニットの斜視図である。It is a perspective view of another fixing tool unit.

符号の説明Explanation of symbols

１０ 基板収納容器
１１ 収納容器本体
１２ 棚
１２ａ ワイヤ（支持材）
１６ 底面
１８ 上面
１９ 側面
２１ 側面
２２ 正面
２２’ 背面
２３ 固定具
２３ａ 固定具ユニット DESCRIPTION OF SYMBOLS 10 Substrate storage container 11 Storage container main body 12 Shelf 12a Wire (support material)
16 bottom surface 18 top surface 19 side surface 21 side surface 22 front surface 22 'back surface 23 fixing device 23a fixing device unit

Claims (4)

収納容器本体の内部に、複数の基板をそれぞれ支持する複数の棚が形成され、
前記棚は、所定間隔をおいて前記収納容器本体の対向する側面間をつなぐ複数の支持材で構成され、
前記収納容器本体の正面および背面が前記基板を前記棚に搬入出可能となるように開口され、
前記棚に搬入された前記基板の端部及び前記支持部材を共に把持して固定する固定具が前記収納容器本体に取り付けられていることを特徴とする基板収納容器。 Inside the storage container main body, a plurality of shelves for supporting a plurality of substrates each formed,
The shelf is composed of a plurality of support members that connect between opposing side surfaces of the storage container body at a predetermined interval,
The front and back of the storage container body are opened so that the substrate can be carried in and out of the shelf,
A substrate storage container, wherein a fixture for gripping and fixing both the end portion of the substrate carried into the shelf and the support member is attached to the storage container body . 前記固定具は、前記棚に搬入された前記基板の少なくとも一対の対角の角部を固定するものであることを特徴とする請求項１記載の基板収納容器。 The fixture substrate storage container according to claim 1, characterized in that for fixing the corners of at least one pair of diagonal of the substrate carried on the shelf. 複数の基板の各固定具が連結されていることを特徴とする請求項１または２記載の基板収納容器。   3. The substrate storage container according to claim 1, wherein the fixtures of the plurality of substrates are connected. 前記固定具は、前記基板を固定している固定位置と、該基板を固定していない非固定位置との間で変位可能に、前記収納容器本体に可動自在に取付けられていることを特徴とする請求項１から３のいずれか一項に記載の基板収納容器。 The fixture, features and fixed position that secures the substrate, to be displaceable between an unlocked position without immobilized substrate, that is mounted movably in the storage container main body The substrate storage container according to any one of claims 1 to 3 .
JP2005062230A 2005-03-07 2005-03-07 Substrate storage container Expired - Fee Related JP4534801B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005062230A JP4534801B2 (en) 2005-03-07 2005-03-07 Substrate storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005062230A JP4534801B2 (en) 2005-03-07 2005-03-07 Substrate storage container

Publications (2)

Publication Number Publication Date
JP2006245470A JP2006245470A (en) 2006-09-14
JP4534801B2 true JP4534801B2 (en) 2010-09-01

Family

ID=37051524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005062230A Expired - Fee Related JP4534801B2 (en) 2005-03-07 2005-03-07 Substrate storage container

Country Status (1)

Country Link
JP (1) JP4534801B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5273479B2 (en) * 2009-10-23 2013-08-28 株式会社ダイフク Substrate storage container and transport equipment for transporting the same
KR101212889B1 (en) * 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 Cassette for loading Glasses

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004075203A (en) * 2002-08-09 2004-03-11 Dainippon Printing Co Ltd Buffer device
JP2004165657A (en) * 2002-11-13 2004-06-10 Foxsemicon Intergated Technology Inc Substrate cassette

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004075203A (en) * 2002-08-09 2004-03-11 Dainippon Printing Co Ltd Buffer device
JP2004165657A (en) * 2002-11-13 2004-06-10 Foxsemicon Intergated Technology Inc Substrate cassette

Also Published As

Publication number Publication date
JP2006245470A (en) 2006-09-14

Similar Documents

Publication Publication Date Title
TWI450850B (en) Storage, storage set and transporting system
JPH03297705A (en) Device for arrangement or reception of flat article in cassette provided with intermediate rack
JP2004186249A (en) Substrate transfer apparatus, substrate takeout method, and substrate accommodation method
JP2011178563A (en) Storage rack
JP2010143599A (en) Pallet for packing glass plate
JP4534801B2 (en) Substrate storage container
JP4964438B2 (en) Container loading and unloading equipment in automatic warehouse
JP4222007B2 (en) Transport system
JP2006347753A (en) Conveyance system
JP6705227B2 (en) Picking system
JP2007070103A (en) Automated warehouse for storing roll body and method for storing roll body
JPH05294410A (en) Load storage equipment
JP2010241547A (en) Traveling vehicle system
KR101509188B1 (en) Ssd tray and ssd loading and unloading apparatus
JP2010235213A (en) Traveling vehicle system
JP2005170682A (en) Retrieving mechanism for display substrate and retrieving method for display substrate
JP5583516B2 (en) Work loader
JP4961866B2 (en) Conveying method of wire coil
JP5366668B2 (en) Transport stand
JP4557619B2 (en) Tray stacking apparatus and stacking tray transfer method using the same
JP2010047259A (en) Accommodating method and accommodating device for load pallet and load pallet holding member used therefor
JP2003292159A (en) Member for positioning article and article-placing apparatus such as truck
JP4269222B2 (en) Tray transport system
WO2021100337A1 (en) Stacker crane
JP2008061789A (en) Frame component storage device for pinball game machine and container carrier having the same

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080306

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100223

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100302

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100506

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100525

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130625

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100607

LAPS Cancellation because of no payment of annual fees