JP4519463B2 - 圧電センサの診断 - Google Patents
圧電センサの診断 Download PDFInfo
- Publication number
- JP4519463B2 JP4519463B2 JP2003524019A JP2003524019A JP4519463B2 JP 4519463 B2 JP4519463 B2 JP 4519463B2 JP 2003524019 A JP2003524019 A JP 2003524019A JP 2003524019 A JP2003524019 A JP 2003524019A JP 4519463 B2 JP4519463 B2 JP 4519463B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric sensor
- signal
- diagnostic
- circuit
- leakage resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/325—Means for detecting quantities used as proxy variables for swirl
- G01F1/3259—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations
- G01F1/3266—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations by sensing mechanical vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/22—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using conversion of ac into dc
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/325—Means for detecting quantities used as proxy variables for swirl
- G01F1/3287—Means for detecting quantities used as proxy variables for swirl circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/20—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of apparatus for measuring liquid level
- G01F25/24—Testing proper functioning of electronic circuits
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Volume Flow (AREA)
Description
Claims (17)
- 漏れ抵抗と、これに並列に接続された、キャパシタと電圧源の直列接続を等価回路として有する圧電センサを診断するための診断装置であって、
少なくとも2つの異なった周波数でAC信号を前記圧電センサへ印加するように構成されたAC電源と、
前記圧電センサに結合され、印加されたAC信号に応答して発生された、前記圧電センサの応答信号を測定し、これに応じて前記圧電センサの等価回路における漏れ抵抗の抵抗値およびキャパシタのキャパシタンスに関連する測定出力を与えるように構成された測定回路と、
前記AC信号が印加された時の、2つの周波数のAC信号それぞれでの前記圧電センサへのAC信号の入力電圧と前記測定出力の出力電圧の比の関数として前記圧電センサの等価回路における漏れ抵抗およびキャパシタの値をそれぞれ計算し、これらの値に基づいて前記圧電センサの等価回路における漏れ抵抗およびキャパシタの状態を示す診断出力を与える診断回路とを具備する診断装置。 - 前記AC電源は、2つだけの異なった周波数でAC信号を適用する請求項1に記載の診断装置。
- 前記AC電源および前記圧電センサに結合されたテスト・キャパシタンスを含む請求項1に記載の診断装置。
- 前記診断回路を前記圧電センサに選択的に結合するスイッチを含む請求項1に記載の診断装置。
- 前記測定回路は、前記圧電センサの応答信号を増幅する増幅器を含む請求項1に記載の診断装置。
- 前記測定回路は、前記圧電センサの応答信号をデジタル化するアナログ・デジタル変換器を含む請求項1に記載の診断装置。
- 前記診断回路は、前記アナログ・デジタル変換器に結合されたマイクロプロセッサを含む請求項6に記載の診断装置。
- 前記マイクロプロセッサは、デジタル化された応答信号を用いて前記圧電センサの等価回路における漏れ抵抗およびキャパシタの値をそれぞれ計算し、それらの値を閾値と比較して診断出力を与える請求項7に記載の診断装置。
- 前記マイクロプロセッサは、デジタル化された応答信号をデジタル処理して診断出力を与える請求項7に記載の診断装置。
- 前記診断回路は、閾値比較回路を含む請求項1に記載の診断装置。
- ブラフボディに結合された前記圧電センサを有し、請求項1の診断装置を含む渦流量計。
- 漏れ抵抗と、これに並列に接続された、キャパシタと電圧源の直列接続をを等価回路として有する圧電センサを診断する方法であって、
少なくとも2つの異なった周波数でAC信号を前記圧電センサへ印加し、
印加されたAC信号に応答して発生された、前記圧電センサの等価回路における漏れ抵抗の抵抗値およびキャパシタのキャパシタンスに関連する応答信号を測定し、
前記AC信号が印加された時の、2つの周波数のAC信号それぞれでの前記圧電センサへのAC信号の入力電圧と前記測定出力の出力電圧の比の関数として前記圧電センサの等価回路における漏れ抵抗およびキャパシタの値をそれぞれ計算し、これらの値に基づいて前記圧電センサの等価回路における漏れ抵抗およびキャパシタの状態を診断することを含む方法。 - 前記圧電センサへAC信号を印加することが、2つだけの異なった周波数でAC信号を適用することからなる請求項12に記載の方法。
- 前記圧電センサへAC信号を印加することが、異なった周波数を順次に適用することからなる請求項12に記載の方法。
- 前記応答信号を測定することが、該応答信号を増幅することを含む請求項12に記載の方法。
- 前記応答信号を測定することが、該応答信号をデジタル化することを含む請求項12に記載の方法。
- 前記圧電センサの状態を診断することが、前記応答信号を用いて前記圧電センサの等価回路における漏れ抵抗およびキャパシタの値をそれぞれ計算し、それらの値を閾値と比較することを含む請求項12に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/940,329 US6531884B1 (en) | 2001-08-27 | 2001-08-27 | Diagnostics for piezoelectric sensor |
PCT/US2002/026266 WO2003019205A1 (en) | 2001-08-27 | 2002-08-16 | Diagnostics for piezoelectric sensor |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005526228A JP2005526228A (ja) | 2005-09-02 |
JP2005526228A5 JP2005526228A5 (ja) | 2006-01-05 |
JP4519463B2 true JP4519463B2 (ja) | 2010-08-04 |
Family
ID=25474640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003524019A Expired - Fee Related JP4519463B2 (ja) | 2001-08-27 | 2002-08-16 | 圧電センサの診断 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6531884B1 (ja) |
EP (1) | EP1423715B1 (ja) |
JP (1) | JP4519463B2 (ja) |
CN (1) | CN1280639C (ja) |
DE (1) | DE60213258T2 (ja) |
WO (1) | WO2003019205A1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10323062A1 (de) | 2003-05-20 | 2004-12-09 | Endress + Hauser Gmbh + Co. Kg | Meßgerät |
ES2293438T3 (es) * | 2005-07-22 | 2008-03-16 | Delphi Technologies, Inc. | Procedimiento y dispositivo para controlar y analizar el funcionamiento de un actuador piezoelectrico. |
US7236113B1 (en) * | 2006-01-26 | 2007-06-26 | Emerson Process Management | Capacitance-to-digital modulator with sensor failure-mode detection |
US20100045311A1 (en) * | 2008-08-20 | 2010-02-25 | Jaycee Howard Chung | Dual Electrical Current Sourcing-piezoresistive Material Self-Sensing (DEC-PMSS) System |
US8217667B2 (en) * | 2009-01-16 | 2012-07-10 | Hill-Rom Services, Inc. | Method and apparatus for piezoelectric sensor status assessment |
AT11169U3 (de) * | 2009-10-22 | 2010-12-15 | Avl List Gmbh | Verfahren zum betreiben eines elektromechanischen wandlersystems, sowie elektromechanisches wandlersystem |
FR2953295B1 (fr) * | 2009-12-02 | 2012-05-18 | Sagem Defense Securite | Procede de detection de panne d'un capteur frequentiel et circuit pour la mise en oeuvre de ce procede |
US8788233B2 (en) * | 2011-01-18 | 2014-07-22 | General Electric Company | Diagnostic system and method for a thermistor amplifier circuit |
LU92090B1 (en) | 2012-10-29 | 2014-04-30 | Iee Sarl | Piezoelectric and/or electret sensing device |
PL2915255T3 (pl) * | 2012-10-31 | 2017-06-30 | Diehl Ako Stiftung & Co. Kg | Układ wyczuwający klawisz piezoelektryczny i sposób testowania układu wyczuwającego klawisz piezoelektryczny |
RU2524743C2 (ru) * | 2012-11-06 | 2014-08-10 | Закрытое акционерное общество "Вибро-прибор" | Способ бездемонтажной поверки пьезоэлектрического вибропреобразователя на месте эксплуатации |
RU2556743C1 (ru) * | 2014-03-28 | 2015-07-20 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Устройство для дистанционного измерения параметров сигнала пьезодатчика |
DE102018111380A1 (de) | 2017-05-24 | 2018-11-29 | HELLA GmbH & Co. KGaA | Verfahren zur Kalibrierung mindestens eines Sensors |
US11029181B2 (en) | 2018-06-22 | 2021-06-08 | Micro Motion, Inc. | Vortex flowmeter with flow instability detection |
EP3627574B1 (en) * | 2018-09-21 | 2021-02-17 | TE Connectivity Norge AS | Method and apparatus for detecting an open circuit state in a piezoelectric element connection |
CN112415292B (zh) * | 2019-08-20 | 2022-03-18 | 北京钛方科技有限责任公司 | 压电器件在线检测装置及方法 |
US11959797B2 (en) | 2019-08-20 | 2024-04-16 | Beijing Taifang Technology Co., Ltd. | Online detection device and method for piezoelectric device |
CN112912805A (zh) | 2019-09-25 | 2021-06-04 | 罗斯蒙特公司 | 压电换能器状态监测 |
DE102019129177A1 (de) * | 2019-10-29 | 2021-04-29 | Krohne Messtechnik Gmbh | Wirbeldurchflussmessgerät und Verfahren zum Betreiben eines Wirbeldurchflussmessgeräts |
JP7400690B2 (ja) * | 2020-10-22 | 2023-12-19 | 横河電機株式会社 | 診断装置及び診断方法、並びにフィールド機器 |
DE102020134066A1 (de) * | 2020-12-17 | 2022-06-23 | Endress+Hauser Flowtec Ag | Vortex-Durchflussmessgerät und Verfahren zum Überprüfen eines Vortex-Durchflussmessgeräts |
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-
2001
- 2001-08-27 US US09/940,329 patent/US6531884B1/en not_active Expired - Lifetime
-
2002
- 2002-08-16 JP JP2003524019A patent/JP4519463B2/ja not_active Expired - Fee Related
- 2002-08-16 WO PCT/US2002/026266 patent/WO2003019205A1/en active IP Right Grant
- 2002-08-16 CN CNB028170008A patent/CN1280639C/zh not_active Expired - Lifetime
- 2002-08-16 EP EP02757209A patent/EP1423715B1/en not_active Expired - Lifetime
- 2002-08-16 DE DE60213258T patent/DE60213258T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1423715B1 (en) | 2006-07-19 |
DE60213258T2 (de) | 2007-06-06 |
US6531884B1 (en) | 2003-03-11 |
WO2003019205A1 (en) | 2003-03-06 |
DE60213258D1 (de) | 2006-08-31 |
CN1280639C (zh) | 2006-10-18 |
JP2005526228A (ja) | 2005-09-02 |
EP1423715A1 (en) | 2004-06-02 |
CN1549929A (zh) | 2004-11-24 |
US20030038644A1 (en) | 2003-02-27 |
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