JP4504344B2 - X線源 - Google Patents
X線源 Download PDFInfo
- Publication number
- JP4504344B2 JP4504344B2 JP2006326831A JP2006326831A JP4504344B2 JP 4504344 B2 JP4504344 B2 JP 4504344B2 JP 2006326831 A JP2006326831 A JP 2006326831A JP 2006326831 A JP2006326831 A JP 2006326831A JP 4504344 B2 JP4504344 B2 JP 4504344B2
- Authority
- JP
- Japan
- Prior art keywords
- electron
- transmission target
- optical system
- ray
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 claims description 55
- 238000010894 electron beam technology Methods 0.000 claims description 53
- 230000003287 optical effect Effects 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 230000009471 action Effects 0.000 claims description 11
- 238000004846 x-ray emission Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 4
- 230000004075 alteration Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 8
- 229910010271 silicon carbide Inorganic materials 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- 238000007689 inspection Methods 0.000 description 6
- 230000035515 penetration Effects 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000005405 multipole Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- 229910002794 Si K Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
Landscapes
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
12 真空容器
13 透過ターゲット
14 絶縁体としての絶縁筒
16 電子ビーム
17 電子源
19 電子光学系
20 覆い部
21 駆動電源
25 スリーブ
28 磁界型電子光学系
29 制御電源
32 基板
33 コーティング材
Claims (5)
- 内部が真空保持されかつ接地電位とされる真空容器と、
この真空容器の一端に配設されX線を外部に放出するX線放出窓を兼ねかつ接地電位とされる透過ターゲットと、
前記真空容器内に接地電位から絶縁して収納され、電子ビームを発生する電子源と、
前記真空容器内に接地電位から絶縁されるとともに前記透過ターゲットに離間対向する面が開口された覆い部で覆われて収納され、電子源が発生した電子ビームを収束させる静電型の電子光学系と、
前記電子源および電子光学系を前記透過ターゲットおよび真空容器の接地電位から絶縁する絶縁体と、
前記電子光学系で収束される電子ビームが前記接地電位の透過ターゲットへ入射する直前に減速作用を受けるように電位配分する駆動電源と
を具備していることを特徴とするX線源。 - 真空容器内に接地電位から絶縁して収納された電子光学系で収束されて透過ターゲットへ向かう電子ビームが通過するスリーブと、
このスリーブの位置で真空容器の外側に配置された磁界型電子光学系と、
この磁界型電子光学系を制御する制御電源と
を具備していることを特徴とする請求項1記載のX線源。 - 透過ターゲットは、1μm以下の厚さでSiCおよびSiNのいずれか一方を材料とする基板を備えている
ことを特徴とする請求項1または2記載のX線源。 - 透過ターゲットは、表面にコーティング材が施されていない導電性のSiCを材料とする基板を備えている
ことを特徴とする請求項1または2記載のX線源。 - 透過ターゲットは、基板およびこの基板の表面に設けられた特性X線を放出するコーティング材を備えている
ことを特徴とする請求項1または2記載のX線源。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006326831A JP4504344B2 (ja) | 2006-12-04 | 2006-12-04 | X線源 |
GB0723631A GB2444624B (en) | 2006-12-04 | 2007-12-03 | x-ray source |
US11/950,167 US7649980B2 (en) | 2006-12-04 | 2007-12-04 | X-ray source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006326831A JP4504344B2 (ja) | 2006-12-04 | 2006-12-04 | X線源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008140687A JP2008140687A (ja) | 2008-06-19 |
JP4504344B2 true JP4504344B2 (ja) | 2010-07-14 |
Family
ID=38962538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006326831A Expired - Fee Related JP4504344B2 (ja) | 2006-12-04 | 2006-12-04 | X線源 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7649980B2 (ja) |
JP (1) | JP4504344B2 (ja) |
GB (1) | GB2444624B (ja) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101449352A (zh) * | 2006-05-22 | 2009-06-03 | 皇家飞利浦电子股份有限公司 | 与旋转阳极移动同步地操纵电子束的x射线管 |
US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
US20110121179A1 (en) * | 2007-06-01 | 2011-05-26 | Liddiard Steven D | X-ray window with beryllium support structure |
EP2167632A4 (en) * | 2007-07-09 | 2013-12-18 | Univ Brigham Young | METHOD AND DEVICES FOR MANIPULATING LOADED MOLECULES |
US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
US8498381B2 (en) | 2010-10-07 | 2013-07-30 | Moxtek, Inc. | Polymer layer on X-ray window |
WO2009045915A2 (en) * | 2007-09-28 | 2009-04-09 | Brigham Young University | Carbon nanotube assembly |
US20100239828A1 (en) * | 2009-03-19 | 2010-09-23 | Cornaby Sterling W | Resistively heated small planar filament |
US8247971B1 (en) | 2009-03-19 | 2012-08-21 | Moxtek, Inc. | Resistively heated small planar filament |
JP2011033396A (ja) * | 2009-07-30 | 2011-02-17 | Hamamatsu Photonics Kk | 窓構造体、電子線出射装置及びx線出射装置 |
US7983394B2 (en) * | 2009-12-17 | 2011-07-19 | Moxtek, Inc. | Multiple wavelength X-ray source |
US8995621B2 (en) | 2010-09-24 | 2015-03-31 | Moxtek, Inc. | Compact X-ray source |
US8526574B2 (en) | 2010-09-24 | 2013-09-03 | Moxtek, Inc. | Capacitor AC power coupling across high DC voltage differential |
JP2012104272A (ja) * | 2010-11-08 | 2012-05-31 | Hamamatsu Photonics Kk | X線発生装置 |
US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
US8897419B1 (en) | 2011-02-14 | 2014-11-25 | Science Research Laboratory, Inc. | Systems and methods for accelerating charged particle beams |
US8750458B1 (en) | 2011-02-17 | 2014-06-10 | Moxtek, Inc. | Cold electron number amplifier |
US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
US8792619B2 (en) | 2011-03-30 | 2014-07-29 | Moxtek, Inc. | X-ray tube with semiconductor coating |
US8831179B2 (en) | 2011-04-21 | 2014-09-09 | Carl Zeiss X-ray Microscopy, Inc. | X-ray source with selective beam repositioning |
US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
US9076628B2 (en) | 2011-05-16 | 2015-07-07 | Brigham Young University | Variable radius taper x-ray window support structure |
US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
US8817950B2 (en) | 2011-12-22 | 2014-08-26 | Moxtek, Inc. | X-ray tube to power supply connector |
US8761344B2 (en) | 2011-12-29 | 2014-06-24 | Moxtek, Inc. | Small x-ray tube with electron beam control optics |
JP5763032B2 (ja) * | 2012-10-02 | 2015-08-12 | 双葉電子工業株式会社 | X線管 |
CN102938359B (zh) * | 2012-10-31 | 2015-04-08 | 丹东奥龙射线仪器集团有限公司 | X射线管电子束聚焦装置 |
US9072154B2 (en) | 2012-12-21 | 2015-06-30 | Moxtek, Inc. | Grid voltage generation for x-ray tube |
US9177755B2 (en) | 2013-03-04 | 2015-11-03 | Moxtek, Inc. | Multi-target X-ray tube with stationary electron beam position |
US9184020B2 (en) | 2013-03-04 | 2015-11-10 | Moxtek, Inc. | Tiltable or deflectable anode x-ray tube |
US9984847B2 (en) * | 2013-03-15 | 2018-05-29 | Mars Tohken Solution Co., Ltd. | Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same |
US9173623B2 (en) | 2013-04-19 | 2015-11-03 | Samuel Soonho Lee | X-ray tube and receiver inside mouth |
JP6268021B2 (ja) * | 2014-03-27 | 2018-01-24 | 株式会社日立製作所 | X線管装置およびct装置 |
KR101966794B1 (ko) * | 2017-07-12 | 2019-08-27 | (주)선재하이테크 | 전자 집속 개선용 엑스선관 |
CN110534388B (zh) * | 2019-08-30 | 2021-11-09 | 中国科学院国家空间科学中心 | 一种微型微焦斑x射线管的阴极光学结构 |
CN111446141A (zh) * | 2020-03-05 | 2020-07-24 | 中国电子科技集团公司第三十八研究所 | 一种多路高精度高压电源 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6334588B2 (ja) * | 1979-06-01 | 1988-07-11 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
JP2001319605A (ja) * | 2000-05-12 | 2001-11-16 | Shimadzu Corp | X線管及びx線発生装置 |
JP2002170513A (ja) * | 2000-12-04 | 2002-06-14 | Nikon Corp | 試料評価装置における収差補正方法及び半導体デバイスの製造方法 |
JP2002352754A (ja) * | 2001-05-29 | 2002-12-06 | Shimadzu Corp | 透過型x線ターゲット |
JP2006004855A (ja) * | 2004-06-21 | 2006-01-05 | Topcon Corp | 走査電子顕微鏡および類似装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU748577A1 (ru) * | 1978-04-06 | 1980-07-15 | Предприятие П/Я Х-5263 | Импульсна рентгеновска трубка |
US5199054A (en) * | 1990-08-30 | 1993-03-30 | Four Pi Systems Corporation | Method and apparatus for high resolution inspection of electronic items |
JP4772212B2 (ja) * | 2001-05-31 | 2011-09-14 | 浜松ホトニクス株式会社 | X線発生装置 |
JP2004028845A (ja) | 2002-06-27 | 2004-01-29 | Japan Science & Technology Corp | 高輝度・高出力微小x線発生源とそれを用いた非破壊検査装置 |
JP3965691B2 (ja) * | 2003-01-30 | 2007-08-29 | 株式会社島津製作所 | 走査電子顕微鏡 |
-
2006
- 2006-12-04 JP JP2006326831A patent/JP4504344B2/ja not_active Expired - Fee Related
-
2007
- 2007-12-03 GB GB0723631A patent/GB2444624B/en not_active Expired - Fee Related
- 2007-12-04 US US11/950,167 patent/US7649980B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6334588B2 (ja) * | 1979-06-01 | 1988-07-11 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
JP2001319605A (ja) * | 2000-05-12 | 2001-11-16 | Shimadzu Corp | X線管及びx線発生装置 |
JP2002170513A (ja) * | 2000-12-04 | 2002-06-14 | Nikon Corp | 試料評価装置における収差補正方法及び半導体デバイスの製造方法 |
JP2002352754A (ja) * | 2001-05-29 | 2002-12-06 | Shimadzu Corp | 透過型x線ターゲット |
JP2006004855A (ja) * | 2004-06-21 | 2006-01-05 | Topcon Corp | 走査電子顕微鏡および類似装置 |
Also Published As
Publication number | Publication date |
---|---|
GB2444624A (en) | 2008-06-11 |
GB2444624B (en) | 2009-03-25 |
JP2008140687A (ja) | 2008-06-19 |
US20080304624A1 (en) | 2008-12-11 |
US7649980B2 (en) | 2010-01-19 |
GB0723631D0 (en) | 2008-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4504344B2 (ja) | X線源 | |
JP6114981B2 (ja) | X線発生装置 | |
JP6224580B2 (ja) | X線発生装置及びx線発生方法 | |
TWI435362B (zh) | 帶電粒子裝置 | |
JP6341680B2 (ja) | 集束イオン・ビームの低kV強化 | |
EP2727129B1 (en) | Multiple-column electron beam apparatus and methods | |
US10559446B2 (en) | Vacuum closed tube and X-ray source including the same | |
JP2012015130A (ja) | 電子ビーム装置 | |
JPS6213789B2 (ja) | ||
EP2869327A1 (en) | X-ray tube | |
US8742342B2 (en) | Electron microscope | |
US8669535B2 (en) | Electron gun | |
JP5458472B2 (ja) | X線管 | |
JP6445867B2 (ja) | 小型高電圧電子銃 | |
JP6816921B2 (ja) | X線管 | |
KR20240028342A (ko) | X선 발생 장치 | |
JP4091217B2 (ja) | X線管 | |
WO2020136912A1 (ja) | 電子銃、x線発生装置およびx線撮像装置 | |
JP7167196B2 (ja) | X線発生管、x線発生装置およびx線撮影システム | |
US20230065039A1 (en) | Particle beam column | |
US10381189B2 (en) | X-ray tube | |
JP2009009949A (ja) | 走査形電子顕微鏡 | |
JP2023006196A (ja) | X線発生装置 | |
JPH0374038A (ja) | 光電子顕微鏡を備えた透過電子顕微鏡 | |
CZ2016597A3 (cs) | Objektivová čočka pro zařízení využívající nejméně jednoho svazku nabitých částic |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081114 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090508 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090513 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090713 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090812 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20091111 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100212 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100210 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20100305 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100331 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100422 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130430 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130430 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140430 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |