JP4498378B2 - 基板およびその製造方法、回路装置およびその製造方法 - Google Patents
基板およびその製造方法、回路装置およびその製造方法 Download PDFInfo
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- JP4498378B2 JP4498378B2 JP2007094574A JP2007094574A JP4498378B2 JP 4498378 B2 JP4498378 B2 JP 4498378B2 JP 2007094574 A JP2007094574 A JP 2007094574A JP 2007094574 A JP2007094574 A JP 2007094574A JP 4498378 B2 JP4498378 B2 JP 4498378B2
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- wiring
- substrate
- region
- roughened region
- plating film
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/383—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by microetching
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- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09727—Varying width along a single conductor; Conductors or pads having different widths
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09772—Conductors directly under a component but not electrically connected to the component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/0989—Coating free areas, e.g. areas other than pads or lands free of solder resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0307—Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/049—Wire bonding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0542—Continuous temporary metal layer over metal pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1152—Replicating the surface structure of a sacrificial layer, e.g. for roughening
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Structure Of Printed Boards (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
図1から図5を参照して、先ず、本実施の形態の回路装置10の構造を説明する。図1は回路装置10の全体的な構造を示す図であり、図2は配線14の粗度を示す図であり、図3は配線14の表面の状態を撮影した画像であり、図4は配線表面とメッキ表面の状態を撮影した画像であり、図5は配線14の他の構造を示す図である。
本実施の形態では、図6から図15を参照して、上記構成の回路装置10の製造方法を説明する。これらの各図に於いて、(A)は断面図であり、(B)は平面図である。
12 基材
14 配線
14A 第1接続部
14B 第2接続部
14C 配線部
16 半導体素子
18 被覆層
20 基板
22 封止樹脂
24 開口部
26 金属細線
28 メッキ膜
30 貫通電極
32 裏面電極
34 接続電極
36 第1粗化領域
38 第2粗化領域
40 凹部
42 無電解メッキ膜
44 開口部
46 エッチングレジスト
48 メッキレジスト
50 開口部
Claims (9)
- 基材の一主面上に、この基材の内側から外側に延在する配線部が形成され、
前記配線部は、第1粗化領域と前記第1粗化領域よりも前記基材の外側の第2粗化領域とに分別され、
前記第2粗化領域の表面の凹凸の幅は、前記第1粗化領域の凹凸の幅よりも大きく、
前記配線部の前記第1粗化領域と前記第2粗化領域とが、前記配線部とは熱膨張係数が異なる被覆層で被覆されたことを特徴とする基板。 - 基材と、前記基材の一主面上に形成された配線と、
を備え、
前記配線は、第1接続部と、第2接続部と、前記第1接続部と前記第2接続部との間に設けられた配線部とを含み、
前記第2接続部は、前記第1接続部よりも前記基材の内側に形成され、
前記配線部は、第1粗化領域と前記第1粗化領域よりも前記基材の外側の第2粗化領域とに分別され、
前記第2粗化領域の表面の凹凸の幅は、前記第1粗化領域の凹凸の幅よりも大きく、
前記配線部の前記第1粗化領域と前記第2粗化領域とが、前記配線部とは熱膨張係数が異なる被覆層で被覆されたことを特徴とする基板。 - 前記配線は、前記基材上に複数設けられていることを特徴とする請求項2に記載の基板。
- 前記第1接続部は、メッキ膜により被覆され、このメッキ膜の端部が前記被覆層により被覆されることを特徴とする請求項2または3に記載の基板。
- 請求項2〜4のうちいずれか1項に記載の基板に実装され、前記配線に電気的に接続された回路素子を有することを特徴とする回路装置。
- 前記回路素子を封止する封止樹脂を更に備え、
前記被覆層は前記配線の一部を露出させるとともに、
前記封止樹脂は、前記被覆層から露出した前記配線の表面に接していることを特徴とする請求項5に記載の回路装置。 - 前記回路素子を封止する封止樹脂を更に備え、
前記第1接続部は、その一部が前記メッキ膜に被覆されており、
前記封止樹脂は、前記第1接続部および前記メッキ膜の表面に接していることを特徴とする請求項5に記載の回路装置。 - 基材の一主面上に、この基材の内側から外側に延在した配線部を形成する第1の工程と、
前記配線部の途中から前記基材の内側の領域に、表面に凹凸を有する第1粗化領域を形成するとともに、前記第1粗化領域よりも前記基材の外側の領域に、前記第1粗化領域の凹凸の幅よりも大きな幅の凹凸を有する第2粗化領域を形成する第2の工程と、
前記配線部の前記第1粗化領域と前記第2粗化領域とを、前記配線部とは熱膨張係数が異なる被覆層で被覆する第3の工程と、
を備えたことを特徴とする基板の製造方法。 - 前記第2の工程は、前記第2粗化領域は第1エッチャントを用いてエッチングすることで凹凸を形成し、前記第1粗化領域は第2エッチャントを用いてエッチングすることで凹凸を形成するものであり、
前記第1エッチャントは、前記第2エッチャントよりも、前記配線の表面を均一にエッチングさせる性質を有していることを特徴とする請求項8に記載の基板の製造方法。
Priority Applications (4)
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JP2007094574A JP4498378B2 (ja) | 2007-03-30 | 2007-03-30 | 基板およびその製造方法、回路装置およびその製造方法 |
US12/058,040 US8258409B2 (en) | 2007-03-30 | 2008-03-28 | Circuit board and circuit device |
CN2008100884666A CN101604675B (zh) | 2007-03-30 | 2008-03-31 | 基板及其制造方法、电路装置及其制造方法 |
CN201110148119XA CN102281720A (zh) | 2007-03-30 | 2008-03-31 | 基板及其制造方法、电路装置及其制造方法 |
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JP2010251483A (ja) * | 2009-04-14 | 2010-11-04 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP2011146588A (ja) * | 2010-01-15 | 2011-07-28 | Dainippon Printing Co Ltd | 電子部品内蔵配線板、電子部品内蔵配線板の製造方法 |
JP6223909B2 (ja) * | 2013-07-11 | 2017-11-01 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
JP6131135B2 (ja) * | 2013-07-11 | 2017-05-17 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
US9633924B1 (en) * | 2015-12-16 | 2017-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structure and method for forming the same |
JP2019096577A (ja) * | 2017-11-28 | 2019-06-20 | 株式会社ジャパンディスプレイ | 表示装置 |
CN108922981B (zh) | 2018-07-19 | 2021-02-23 | 上海天马微电子有限公司 | 显示面板和显示装置 |
JP7382170B2 (ja) * | 2019-08-02 | 2023-11-16 | ローム株式会社 | 半導体装置 |
CN117015132A (zh) * | 2022-04-28 | 2023-11-07 | 奥特斯奥地利科技与***技术有限公司 | 部件承载件、部件承载件的制造方法和金属迹线的用途 |
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- 2008-03-28 US US12/058,040 patent/US8258409B2/en not_active Expired - Fee Related
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JPH08222828A (ja) * | 1994-12-12 | 1996-08-30 | Ibiden Co Ltd | プリント配線板及びその製造方法 |
JPH10340925A (ja) * | 1997-06-09 | 1998-12-22 | Matsushita Electron Corp | 半導体装置およびその製造方法 |
JP2004179578A (ja) * | 2002-11-29 | 2004-06-24 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
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JP2007043186A (ja) * | 2006-09-21 | 2007-02-15 | Ibiden Co Ltd | プリント配線板及びその製造方法 |
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US8258409B2 (en) | 2012-09-04 |
JP2008252016A (ja) | 2008-10-16 |
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