JP4483466B2 - 異物検査装置 - Google Patents
異物検査装置 Download PDFInfo
- Publication number
- JP4483466B2 JP4483466B2 JP2004224222A JP2004224222A JP4483466B2 JP 4483466 B2 JP4483466 B2 JP 4483466B2 JP 2004224222 A JP2004224222 A JP 2004224222A JP 2004224222 A JP2004224222 A JP 2004224222A JP 4483466 B2 JP4483466 B2 JP 4483466B2
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- JP
- Japan
- Prior art keywords
- mask
- foreign matter
- inspection
- displacement
- displacement meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Preparing Plates And Mask In Photomechanical Process (AREA)
- Electron Beam Exposure (AREA)
Description
Claims (2)
- 複数の矩形状の開口部を有し、該矩形状の一辺が平行に並ぶように一定の間隔で該開口部が配列された開口パターンを備えたステンシルマスクの表面に存在する異物を検査する異物検査装置であって、
前記ステンシルマスクが載置されるステージ部と、
前記ステンシルマスク表面にレーザスポットを走査し、前記ステンシルマスクの高さの変位を測定するレーザ変位計と、
前記高さの変位が所定のしきい値を超えた揚合に前記ステンシルマスクの表面に異物が存在すると認識する手段と、を備え、
前記ステンシルマスク表面にレーザスポットを走査するにあたり、レーザスポットの進行方向が矩形状の開口部の一辺に対し垂直に入射するように、前記レーザスポットと前記ステージ部との相対位置を制御すること
を特徴とする異物検査装置。 - 前記高さの変位は、変位に対応する電庄として出力すること
を特徴とする請求項1に記載の異物検査装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004224222A JP4483466B2 (ja) | 2004-07-30 | 2004-07-30 | 異物検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004224222A JP4483466B2 (ja) | 2004-07-30 | 2004-07-30 | 異物検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006047375A JP2006047375A (ja) | 2006-02-16 |
JP4483466B2 true JP4483466B2 (ja) | 2010-06-16 |
Family
ID=36026039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004224222A Expired - Fee Related JP4483466B2 (ja) | 2004-07-30 | 2004-07-30 | 異物検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4483466B2 (ja) |
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2004
- 2004-07-30 JP JP2004224222A patent/JP4483466B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2006047375A (ja) | 2006-02-16 |
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