JP4454356B2 - Light irradiation device and head for light irradiation device - Google Patents
Light irradiation device and head for light irradiation device Download PDFInfo
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Description
本発明は、製品等の光照射対象（ワーク）にむらなく拡散光を照射し、その欠陥やマーク等を検出するために用いられる製品検査等のための光照射装置及びそれに用いられるヘッドに関するものである。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light irradiation apparatus for product inspection, etc. used for irradiating a light irradiation object (work) such as a product uniformly with diffuse light and detecting defects, marks, etc., and a head used therefor It is.
従来、光照射装置を用いてワークの上部から光を照射し、その反射光を目視あるいは撮影して、そのワークの表面検査やアラインメントマークの検出を行う方法が知られている。例えば基板に取り付けられた電子部品の半田検査のような場合、表面の微妙な凹凸に起因する陰影や反射ムラが生じたりすると、半田不良の検出ができないため、この種の光照射装置ではワークにあらゆる方向から一様な光を照射できる機能が求められる。 2. Description of the Related Art Conventionally, there has been known a method of irradiating light from the upper part of a work using a light irradiating device, visually or photographing the reflected light, and performing surface inspection of the work or alignment mark detection. For example, in the case of solder inspection of electronic components mounted on a substrate, if a shadow or reflection unevenness due to subtle irregularities on the surface occurs, it is not possible to detect solder failure. A function capable of emitting uniform light from all directions is required.
そこでＬＥＤ等の発光デバイスを複数周設してそこから上方に光を射出させ、その光を光拡散面で拡散反射させてワークに照射するようにしたものや、特許文献１、２に示すように、ＬＥＤからの光を光拡散用の透明体（光拡散ブロック）を透過させて均一化し、その光をワークに照射するようにしたもの等が開発されている。
ところで、前述のように発光デバイスから出た光を光拡散面で拡散反射させる方式のものの場合は、拡散反射する際の効率がよいという利点はあるものの、各発光デバイスの大きさからそれらを如何に密に配置したとしても、周設した場合の大きさを所定以上に小さくすることはできず、それに応じて拡散反射面の大きさも最低限が定まってしまう。 By the way, in the case of the system that diffuses and reflects the light emitted from the light emitting device on the light diffusion surface as described above, there is an advantage in that the efficiency at the time of diffuse reflection is good, but depending on the size of each light emitting device Even if they are arranged densely, the size of the surroundings cannot be made smaller than a predetermined size, and accordingly, the size of the diffuse reflection surface is determined to a minimum.
しかしながら、半導体チップにおける半田検査のように、必要とされる光照射領域が数ｍｍから十数ｍｍの大きさであると、その光照射領域に比べて拡散反射面が必要以上に大きくなってしまい、設置スペースが大きくなりすぎるという問題が生じる。また不必要なところにも光が照射されることとなって、無駄な光が生じる。その結果、無用な供給電力を必要としたり排熱の点での問題が生じたり、或いは必要な領域に十分な光量を供給できないといった問題も生じ得る。 However, if the required light irradiation area is several mm to several tens of mm in size as in solder inspection on a semiconductor chip, the diffuse reflection surface becomes larger than necessary compared to the light irradiation area. The problem arises that the installation space becomes too large. In addition, unnecessary light is emitted to unnecessary places, and unnecessary light is generated. As a result, there may be a problem that unnecessary power supply is required, a problem in terms of exhaust heat occurs, or a sufficient amount of light cannot be supplied to a necessary area.
そこで発光デバイスの代わりに光ファイバを用い、その光ファイバからでた光を光拡散面に照射するという態様も考えられるが、光ファイバの出力端面を、光照射領域に対向する光拡散面に向かうように配置しなければならない、すなわち光照射領域と逆向きに配置しなければならないことから、光照射領域に向かって延ばしてきた光ファイバの先端部分を途中で９０°から１８０°近く曲げる必要が生じる。そのため、光ファイバを装置内部で湾曲させるための取り回しスペースが必要になってコンパクト化に難が生じるうえ、光ファイバを強く曲げすぎるとそこで損失が生じるという懸念もある。 Therefore, it is possible to use an optical fiber instead of the light emitting device and irradiate the light diffusing surface with light emitted from the optical fiber, but the output end face of the optical fiber is directed to the light diffusing surface facing the light irradiating region. In other words, it is necessary to bend the end portion of the optical fiber extending toward the light irradiation area in the middle of 90 ° to 180 ° in the middle. Arise. For this reason, a handling space for bending the optical fiber inside the apparatus is required, which makes it difficult to make the optical fiber compact. In addition, there is a concern that if the optical fiber is bent excessively, a loss occurs.
一方、光拡散ブロックによる透過拡散方式のものでは、光拡散ブロックでの表面反射や乱反射、吸収が生じるため、前述の拡散反射方式のものに比して効率が悪いという欠点がある。さらに、均一な光を得るためには、デバイスと光拡散ブロックとの距離をとる必要があるが、このようにするとコンパクト化が図れない。かといってその距離を近づけると、光拡散ブロック中の拡散体の濃度を濃くする必要が生じ、効率や光量の低下がより顕著になる。 On the other hand, the transmission diffusion method using the light diffusion block has surface defects, irregular reflection, and absorption at the light diffusion block, and thus has a disadvantage that the efficiency is lower than that of the diffusion reflection method described above. Furthermore, in order to obtain uniform light, it is necessary to keep a distance between the device and the light diffusing block. However, when the distance is reduced, it is necessary to increase the concentration of the diffuser in the light diffusion block, and the reduction in efficiency and light quantity becomes more remarkable.
そこで本発明は、効率や光量の低下を招くことなくコンパクト化が可能で、特に小径ワークに対して、周囲からむらなく非常に好適な光照射を行える光照射装置を提供することをその主たる所期課題としたものである。 Accordingly, the main object of the present invention is to provide a light irradiation apparatus that can be made compact without causing a reduction in efficiency and light quantity, and that can perform very suitable light irradiation from the surroundings, particularly on a small-diameter workpiece. This is an initial task.
すなわち本発明に係る光照射装置は、光照射領域に光を照射してその表面検査又はマーク検出を行うためのものであって、一端面を光導入面とし他端面を光導出面とした円筒状をなす導光部材と、前記光導入面に軸線を一致させて接続した二重構造をなす外円筒管及び内円筒管と、出力端面を前記導光部材の光導入面に対向配置した複数の光ファイバとを備えてなり、前記外円筒管を内円筒管よりも短い長さに設定するとともに、内円筒管と外円筒管との間に形成される円筒状の凹溝に前記光ファイバを挿入してそれらの出力端面を円形状に一列に密に並べ、それら出力端面が光導入面に対向して密着又は略密着するように保持させていることを特徴とする。
That is, the light irradiation apparatus according to the present invention is for irradiating light to a light irradiation region to perform surface inspection or mark detection, and has a cylindrical shape with one end surface as a light introduction surface and the other end surface as a light extraction surface. A plurality of light guide members, and outer and inner cylindrical tubes having a double structure connected to the light introduction surface with their axes aligned, and a plurality of output end faces opposed to the light introduction surface of the light guide member The outer cylindrical tube is set to a length shorter than that of the inner cylindrical tube, and the optical fiber is inserted into a cylindrical concave groove formed between the inner cylindrical tube and the outer cylindrical tube. The output end faces are inserted and closely arranged in a line in a circular shape, and the output end faces are held so as to be in close contact or substantially in close contact with the light introduction surface .
好ましくは前記光導出面を中心に向かうほど凹む凹面形状にしているものがよい。Preferably, the light-emitting surface has a concave shape that is recessed toward the center.
前記光導出面を中央に向かうに連れ突出する湾曲した膨出面形状にしているものでも構わない。このようなものであれば前述した構成に比べ、光照射領域の中心位置に向かう光量をより増加できる。さらに係る構成で光照射領域を覆うとともにより多様な角度で光を照射できるようにするには、内周面を反射面とする円筒体を前記光導出面の外周縁から軸方向に延出させているものが好ましい。The light derivation surface may have a curved bulging surface shape that protrudes toward the center. If it is such, the light quantity which goes to the center position of a light irradiation area | region can be increased more compared with the structure mentioned above. Further, in order to cover the light irradiation region and to irradiate light at various angles with such a configuration, a cylindrical body having an inner peripheral surface as a reflecting surface is extended in the axial direction from the outer peripheral edge of the light guide surface. Is preferred.
光照射領域によりむらなく光を照射するには、前記光導出面を光拡散面にしているものが好ましい。In order to irradiate light uniformly by the light irradiation region, it is preferable that the light derivation surface is a light diffusion surface.
光照射領域によりむらなく光を照射するためには、前記円筒体の内周面で光の拡散が行われるように構成しているものでも構わない。In order to irradiate light uniformly by the light irradiation region, the light may be diffused on the inner peripheral surface of the cylindrical body.
また、本発明に係る光照射装置用ヘッドは、光照射領域に光を照射してその表面検査又はマーク検出を行うためのものであって、一端面を光導入面とし他端面を光導出面とした円筒状をなす透明な導光部材と、前記光導入面に軸線を一致させて接続した二重構造をなす外円筒管及び内円筒管と、出力端面を前記導光部材の光導入面に対向配置した複数の光ファイバとを備えてなり、前記外円筒管を内円筒管よりも短い長さに設定するとともに、内円筒管と外円筒管との間に形成される円筒状の凹溝に前記光ファイバを挿入してそれらの出力端面を円形状に一列に密に並べ、それら出力端面が光導入面に対向して密着又は略密着するように保持させていることを特徴とする。 A head for a light irradiation apparatus according to the present invention is for irradiating light to a light irradiation region to perform surface inspection or mark detection, wherein one end surface is a light introduction surface and the other end surface is a light extraction surface. A transparent light guide member having a cylindrical shape, an outer cylindrical tube and an inner cylindrical tube having a double structure connected to the light introduction surface with an axial line aligned, and an output end surface of the light guide member as a light introduction surface of the light guide member A cylindrical concave groove formed between the inner cylindrical tube and the outer cylindrical tube , wherein the outer cylindrical tube is set to be shorter than the inner cylindrical tube. And the output end faces thereof are closely arranged in a line in a circular shape, and the output end faces are held in close contact or substantially in close contact with the light introduction surface .
このようなものであれば、光ファイバを介して光導入面から導光部材内部に導入された光は、その内周面及び外周面で外に漏れることなく反射を繰り返し、互いに混ざり合って凹面形状をなす光導出面から均一に射出されることになる。したがって、光照射領域を上方から、あるいはさらにこれを覆ってむら無く照明することができる。 If it is such, the light introduced into the light guide member from the light introduction surface via the optical fiber repeats reflection without leaking outside on the inner peripheral surface and the outer peripheral surface, and mixes with each other to form a concave surface. The light is uniformly emitted from the light guide surface having the shape. Therefore, it is possible to illuminate the light irradiation region uniformly from above or further over the light irradiation region.
しかも、光ファイバを介しているので導光部材の径を非常に小さくすることができ、半導体チップにおける半田検査のように、必要とされる光照射領域が数ｍｍ程度の大きさであっても、それにマッチした大きさの光導出面を無理なく形成でき、無駄な領域を照射することがないようにすることができる。 In addition, since the optical fiber is interposed, the diameter of the light guide member can be made very small, and even if the required light irradiation area is as small as several millimeters as in the case of solder inspection on a semiconductor chip. Therefore, it is possible to easily form a light-exiting surface having a size matching that, and to avoid irradiating a useless region.
また、導光部材が透明であるため、光拡散ブロックを用いた場合のように内部で光損失が生じることもほとんど無い。そして無駄な領域を照射することがないという上述した点と併せて、極めて高効率なものを提供することができる。 Moreover, since the light guide member is transparent, there is almost no loss of light internally as in the case where the light diffusion block is used. In addition to the above-described point that a useless area is not irradiated, it is possible to provide a highly efficient one.
さらに、光ファイバの出力端面を光照射領域に向けて配置すればよいため、光ファイバを途中で大きく湾曲させることなく、装置内部でコンパクトかつ無理のない取り回しが可能になる。 Furthermore, since the output end face of the optical fiber only needs to be disposed toward the light irradiation region, the optical fiber can be compactly and easily handled without being greatly bent in the middle.
かかる効果は、前記光導出面の外周縁から内周面を反射面とする円筒体を軸方向に延出させているものでも同様に得ることができる。 Such an effect can be similarly obtained even when a cylindrical body having an inner peripheral surface as a reflection surface is extended in the axial direction from the outer peripheral edge of the light guide surface.
以下に本発明の一実施形態について図面を参照して説明する。
本実施形態に係る光照射装置１は、図１〜図６に示すように、ワークＷの光照射領域ＡＲに光を照射してその表面検査又はマーク検出を行うためのものであって、特に半導体チップにおける半田検査のように、必要とされる光照射領域ＡＲが数ｍｍから十数ｍｍの大きさのものに好適に使用されるものである。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 to 6, the light irradiation device 1 according to the present embodiment is for irradiating light to a light irradiation area AR of a workpiece W to perform surface inspection or mark detection, and in particular, As in the case of solder inspection on a semiconductor chip, the light irradiation area AR required is preferably used in a size of several mm to several tens of mm.
なお、以下の記述において上下方向が示されるが、この上下方向はワークＷの上方にこの光照射装置１を設置した場合の便宜的なものである。すなわち下方向とは光照射装置１からみてワークＷ方向のことであり、上方向とは光照射装置１からみて反ワークＷ方向のことである。したがってワークＷと光照射装置１の相対的な位置関係や姿勢が変わればその方向が変わるのは言うまでもない。 In the following description, the vertical direction is indicated, but this vertical direction is convenient for the case where the light irradiation device 1 is installed above the workpiece W. That is, the downward direction refers to the workpiece W direction as viewed from the light irradiation device 1, and the upward direction refers to the anti-work W direction as viewed from the light irradiation device 1. Therefore, it goes without saying that the direction changes if the relative positional relationship or posture between the workpiece W and the light irradiation device 1 changes.
具体的にこの光照射装置１は、図１、図６等に示すように光源装置１０、ヘッド１１、及びそれらを接続する多数の光ファイバ２を備えている。 Specifically, the light irradiation device 1 includes a light source device 10, a head 11, and a large number of optical fibers 2 connecting them as shown in FIGS.
各部を説明する。光ファイバ２は例えばプラスティック製のもので、複数（多数）をフレキシブルチューブＴＢで束ねてある。光ファイバ２の入力側は、光源装置１０に接続してあり、出力側はヘッド１１に接続するようにしている。 Each part will be described. The optical fiber 2 is made of plastic, for example, and a plurality (many) are bundled with a flexible tube TB. The input side of the optical fiber 2 is connected to the light source device 10, and the output side is connected to the head 11.
光源装置１０は、図７に示すように、ケーシング１０１内に１個のパワーＬＥＤ１０２と、レンズ機構１０３とを収容してなるものであり、そのケーシング１０１の先端部において取付具Ｂ１、Ｂ２を介して前記複数の光ファイバ２の入力端面２２を密に束ねた状態で保持する。そして、前記パワーＬＥＤ１０２からでた光は、レンズ機構１０３を介して光軸とのなす角度が所定角度以内（例えば６０°以内）で進む光にされて集光され、前記各光ファイバ２の入力端面２２に可及的均一に導入されるように構成してある。なお、前記パワーＬＥＤ１０２とは連続して約２００ｍＡ以上の電流を流せるものをいう。またこの図６でのレンズ機構１０３は、光進行方向に向かって拡がる概略円錐形状をなす中実透明な第１レンズ１０３ａと、その第１レンズ１０３ａからでた光をさらに集光する第２レンズである凸レンズ１０３ｂとからなる。第１レンズ１０３ａは、若干膨出するその外周面で前記ＬＥＤ１０２から所定角度以上拡がる光を内方に反射し、ほぼ全ての光を漏れなく第２レンズ１０３ｂ、ひいては各光ファイバ２の入力端面２２に導くためのものである。ケーシング１０１は、互いに螺合する第１ケーシング要素１０１ａ及び第２ケーシング要素１０１ｂからなり、これらを締め付けていくことにより、前記ＬＥＤ１０２の底面がケーシング１０１に密着し、放熱性を担保するとともに、ＬＥＤ１０２、レンズ機構１０３及び各光ファイバ２の入力端面２２のラジアル方向の位置決めがなされるように構成してある。なお、前述した位置決めの構成は一例であり、例えばビス止めでＬＥＤ１０２の位置決めを行ってもよいし、レンズ機構１０３をＯリングで押圧することによりＬＥＤ１０３の位置決めをしてもよい。 As shown in FIG. 7, the light source device 10 is configured by housing a single power LED 102 and a lens mechanism 103 in a casing 101, and a fixture B <b> 1, B <b> 2 at the tip of the casing 101. Thus, the input end faces 22 of the plurality of optical fibers 2 are held in a tightly bundled state. Then, the light emitted from the power LED 102 is condensed through the lens mechanism 103 as light that travels within a predetermined angle (for example, within 60 °) with the optical axis, and is input to each of the optical fibers 2. It is configured to be introduced into the end face 22 as uniformly as possible. The power LED 102 is a device that can continuously pass a current of about 200 mA or more. The lens mechanism 103 in FIG. 6 includes a first lens 103a having a substantially conical shape that expands in the light traveling direction, and a second lens that further collects light emitted from the first lens 103a. And a convex lens 103b. The first lens 103a reflects inward the light spreading from the LED 102 by a predetermined angle or more on its outer peripheral surface that slightly bulges, and leaks almost all light without leaking the second lens 103b, and hence the input end face 22 of each optical fiber 2. It is to lead to. The casing 101 includes a first casing element 101a and a second casing element 101b that are screwed together. By tightening these, the bottom surface of the LED 102 is in close contact with the casing 101, ensuring heat dissipation, and the LED 102, The lens mechanism 103 and the input end face 22 of each optical fiber 2 are positioned in the radial direction. Note that the positioning configuration described above is an example. For example, the LED 102 may be positioned by screwing, or the LED 103 may be positioned by pressing the lens mechanism 103 with an O-ring.
ヘッド１１は、ブロック体状の保持部材３と、光ファイバ２の出力端面２１から射出される光を光導入面４１から内部に導き光導出面４２から外部に照射する導光部材４とを備え、前記保持部材３によって前記光ファイバ２の出力端面２１及び導光部材４を保持してそれらを接続させている。 The head 11 includes a block-shaped holding member 3 and a light guide member 4 that guides light emitted from the output end surface 21 of the optical fiber 2 from the light introduction surface 41 to the inside and irradiates the light from the light extraction surface 42 to the outside. The holding member 3 holds the output end face 21 and the light guide member 4 of the optical fiber 2 and connects them.
導光部材４は、一端面を光導入面４１とし他端面を光導出面４２とした円筒状をなすもので、透明な樹脂やガラスを素材として形成してある。この導光部材４の内径は、光照射領域ＡＲの大きさに対応させてあり、この実施形態では例えば数ｍｍから十数ｍｍである。光導入面４１は軸線と垂直な円環状をなすものであり、光導出面４２は中心に向かうほど凹む円錐状の凹面である。この実施形態では、光導出面４２に例えばサンドブラスト処理を施して荒れた面にし、この光導出面４２で光拡散作用が営まれるように構成しているが、この処理は必ずしも必要であるとは限らない。 The light guide member 4 has a cylindrical shape in which one end surface is a light introduction surface 41 and the other end surface is a light extraction surface 42, and is formed of a transparent resin or glass as a material. The inner diameter of the light guide member 4 corresponds to the size of the light irradiation area AR, and is, for example, several mm to several tens mm in this embodiment. The light introduction surface 41 has an annular shape perpendicular to the axis, and the light extraction surface 42 is a conical concave surface that is recessed toward the center. In this embodiment, the light derivation surface 42 is made rough by, for example, sandblasting, and the light derivation surface 42 is configured to perform a light diffusion action. However, this treatment is not always necessary. .
保持部材３は、図１、図２に示すように、上ブロック３１、中ブロック３２、下ブロック３３を接合した内部空間３ａを有するブロック体状のもので、内部空間３ａを貫く上下貫通孔が設けてある。そして下ブロック３３に形成した上下貫通孔３ｂの下部分３３ｂ（下ブロック３３に形成してある）に前記導光部材４を嵌め込み、当該導光部材４の光導出面４２を含む一部が外部に露出するようにこれを側方からの止めねじによって保持させている。またこの上下貫通孔３ｂの上部分３１ｂ（上ブロック３１に形成してある）にはスリーブ５を内部空間３ａに一部が突出するように取り付けている。 As shown in FIGS. 1 and 2, the holding member 3 is a block body having an internal space 3a in which an upper block 31, a middle block 32, and a lower block 33 are joined, and upper and lower through holes penetrating the internal space 3a. It is provided. Then, the light guide member 4 is fitted into a lower portion 33b (formed in the lower block 33) of the upper and lower through holes 3b formed in the lower block 33, and a part including the light guide surface 42 of the light guide member 4 is exposed to the outside. This is held by a set screw from the side so as to be exposed. A sleeve 5 is attached to an upper portion 31b (formed on the upper block 31) of the upper and lower through holes 3b so that a part of the sleeve 5 protrudes into the internal space 3a.
この導光部材４には、図１、図３、図４に示すように、その光導入面４１に二重構造の円筒管６１、６２を軸線を一致させて接続している。そのうちの内円筒管６１は、その内周面６１ａを前記導光部材４の内周面４ａに連続させるとともに、その上端が前記スリーブ５の内側にまで至るように上下の長さを設定してある。一方、外円筒管６２はその外周面６２ａを前記導光部材４の外周面４ｂに連続させるとともに、内円筒管６１よりも短い長さに設定してある。そしてこの内円筒管６１と外円筒管との間に形成されるファイバ保持部である円筒状の凹溝７に上から光ファイバ２を挿入してそれらの出力端面２１を円形状に一列に密に並べ、それらが光導入面４１に対向して密着又は略密着するように保持させている。 As shown in FIGS. 1, 3, and 4, double-structured cylindrical tubes 61 and 62 are connected to the light guide member 4 so that the axes thereof coincide with each other. Among them, the inner cylindrical tube 61 has its inner peripheral surface 61 a made continuous with the inner peripheral surface 4 a of the light guide member 4, and its upper and lower lengths are set so that its upper end reaches the inside of the sleeve 5. is there. On the other hand, the outer cylindrical tube 62 has an outer peripheral surface 62 a continuous with the outer peripheral surface 4 b of the light guide member 4 and is set to a length shorter than the inner cylindrical tube 61. Then, the optical fiber 2 is inserted from above into the cylindrical groove 7 which is a fiber holding portion formed between the inner cylindrical tube 61 and the outer cylindrical tube, and their output end faces 21 are densely arranged in a row in a circular shape. Are arranged so as to be in close contact or substantially in close contact with the light introduction surface 41.
なお、光ファイバ２は、この保持部材３の内部空間３ａに側方から貫通させたファイバ束保持孔３ｃを介して導入するようにしている。 The optical fiber 2 is introduced through a fiber bundle holding hole 3c that is penetrated from the side into the internal space 3a of the holding member 3.
かかる構成の光照射装置１の作用について図５等を参照して以下に説明する。 The operation of the light irradiation apparatus 1 having such a configuration will be described below with reference to FIG.
光源装置１０から射出された光は光ファイバ２を通って導光部材４の光導入面４１からその内部に導かれる。各光ファイバ２には、光軸に対しての角度が略６０°以内の光が導入されるため、各光ファイバ２から出るときもその拡がり角度が維持される。この光は、導光部材４の内周面４ａ及び外周面４ｂで外部との屈折率差によって全反射されながらほとんどロス無く光導出面４２に向かって進む。この点で導光部材４の内周面４ａ及び外周面４ｂは光を全反射する反射面としての役割を担う。 The light emitted from the light source device 10 is guided to the inside through the optical fiber 2 from the light introduction surface 41 of the light guide member 4. Since each optical fiber 2 is introduced with light having an angle with respect to the optical axis of approximately 60 ° or less, the spread angle is maintained even when exiting from each optical fiber 2. The light travels toward the light guide surface 42 with almost no loss while being totally reflected by the inner peripheral surface 4a and the outer peripheral surface 4b of the light guide member 4 due to the difference in refractive index from the outside. In this respect, the inner peripheral surface 4a and the outer peripheral surface 4b of the light guide member 4 serve as reflecting surfaces that totally reflect light.
各光ファイバ２からの光は、前記反射等によって導光部材４の内部で混ぜ合わされたうえで光導出面４２における拡散作用でさらに均一化され外部に射出される。しかして光導出面４２は円錐凹面状をなし、光照射領域ＡＲを上方から囲むように配置されるため、光照射領域ＡＲにはほぼ全天から非常に均一化された光が照射されることとなる。 The light from each optical fiber 2 is mixed inside the light guide member 4 by the reflection or the like, and then made uniform by the diffusion action on the light guide surface 42 and emitted to the outside. Thus, since the light guide surface 42 has a conical concave shape and is disposed so as to surround the light irradiation area AR from above, the light irradiation area AR is irradiated with very uniform light from almost all the sky. Become.
観測者は、このようにして光を照射された光照射領域ＡＲを上下貫通孔３ｂを介して保持部材３の上方から観察すればよい。また、観測者の代わりに撮像装置を用いて表面検査システムを構成してもよい。 The observer should just observe the light irradiation area AR irradiated with light from above the holding member 3 through the upper and lower through holes 3b. Moreover, you may comprise a surface inspection system using an imaging device instead of an observer.
したがってこのような構成の光照射装置１によれば、光照射領域ＡＲをその光導出面４２で周囲上方から覆って均一化された光をむら無く照明することができる。しかも、光ファイバ２を介しているので導光部材４の径を非常に小さくすることができ、半導体チップにおける半田検査のように、必要とされる光照射領域ＡＲが数ｍｍから十数ｍｍの大きさであっても、それにマッチした大きさの光導出面４２を無理なく形成でき、無駄な領域を照射することがないようにすることができる。 Therefore, according to the light irradiation apparatus 1 having such a configuration, the light irradiation region AR can be illuminated uniformly by covering the light irradiation area AR with the light guide surface 42 from above the periphery. Moreover, since the optical fiber 2 is interposed, the diameter of the light guide member 4 can be made very small, and the required light irradiation area AR is several mm to several tens of mm as in the solder inspection in the semiconductor chip. Even if the size is large, the light guide surface 42 having a size matched to the size can be formed without difficulty, and a useless area can be prevented from being irradiated.
また、導光部材４が透明であるため、光拡散ブロックを用いた場合のように内部で光損失が生じることもほとんど無い。そして無駄な領域を照射することがないという上述した点と併せて、極めて高効率なものを提供することができる。 Moreover, since the light guide member 4 is transparent, there is almost no light loss internally as in the case where the light diffusion block is used. In addition to the above-described point that a useless area is not irradiated, it is possible to provide a highly efficient one.
さらに、光ファイバ２の出力端面２１を光照射領域ＡＲに向けて配置すればよいため、光ファイバ２を途中で大きく湾曲させることなく、装置内部でコンパクトかつ無理のない取り回しが可能になる。 Furthermore, since the output end face 21 of the optical fiber 2 only needs to be disposed toward the light irradiation area AR, the optical fiber 2 can be compactly and easily handled inside the apparatus without being greatly bent in the middle.
なお、本発明は前記実施形態に限られるものではない。
例えば、図７に他の実施形態を示す。この光照射装置１では、内周面８ａを鏡面状の反射面とする円筒体８を前記光導出面４２の外周縁から軸方向に延出させている。また光導出面４２を、中央に向かうに連れ突出する若干湾曲した膨出面形状にしている。その他の構成は第１実施形態とほぼ同一であり、対応する部材には同一の符号を付している。
The present invention is not limited to the above embodiment.
For example, FIG. 7 shows another embodiment. In the light irradiation device 1, the cylindrical body 8 having the inner peripheral surface 8 a as a mirror-like reflection surface is extended in the axial direction from the outer peripheral edge of the light guide surface 42. Further, the light guide surface 42 has a slightly curved bulging surface shape that protrudes toward the center. Other configurations are almost the same as those of the first embodiment, and corresponding members are denoted by the same reference numerals.
このようなものであれば、光導出面４２から出た光は最初外側に拡がり、円筒体内周面４ａで反射されて、第１実施形態同様光照射領域ＡＲにほぼ全天から非常に均一化されて照射されることとなる。かかる構成によっても前記実施形態同様あるいはそれ以上の効果を奏することができる。なお、光導出面４２や円筒体内周面８ａに光拡散作用を営ませるよう、荒れた面にしても構わない。 In such a case, the light emitted from the light derivation surface 42 first spreads outward, is reflected by the cylindrical inner circumferential surface 4a, and is very uniform from almost all the sky in the light irradiation area AR as in the first embodiment. Will be irradiated. Even with this configuration, the same effects as those in the above embodiment or more can be obtained. In addition, you may make it the rough surface so that the light-diffusion surface 42 and the cylindrical inner peripheral surface 8a may perform a light-diffusion action.
また、光源装置に、パワーＬＥＤのみならず通常のＬＥＤを用いてもよいし、ＬＥＤを複数個用いて１つのＬＥＤに一本乃至複数本のＬＥＤを接続するようにしてもよい。もちろん、ＬＥＤ以外の光源を用いることも可能である。ＬＥＤは単色でもよいし、複数色のものでもよいのは言うまでもない。
加えて光導出面は、断面が直線状をなしてもよいし湾曲していても構わない。
In addition, not only power LEDs but also ordinary LEDs may be used for the light source device, and one or a plurality of LEDs may be connected to one LED by using a plurality of LEDs. Of course, it is also possible to use light sources other than LEDs. It goes without saying that the LED may be a single color or a plurality of colors.
In addition, the light extraction surface may have a cross section that is linear or curved.
さらに、導光部材の内周面及び外周面は屈折率差を利用した全反射面とするのが効率上最も好ましいが、メッキ等を施して鏡面を形成してもよいし、荒れた面にして若干の光拡散作用を奏するようなものとしてもよい。
また導光部材は、例えば径の異なる薄肉円筒体を軸線を一致させて配置し、外側円筒体の内周面及び内側円筒体の外周面間で光を１又は複数回反射させながら光導入面から光導出面に向かって光を導くものであってもよい。この場合、外側円筒体と内側円筒体との間には何も存在しない（空気のみ）であってもよいし、樹脂等の透明体を充填してもよい（樹脂等を充填した場合には、前述したメッキを施したものと同等のものとなる）。
Furthermore, it is most preferable in terms of efficiency that the inner and outer peripheral surfaces of the light guide member are total reflection surfaces using a difference in refractive index. However, a mirror surface may be formed by plating or the like to make a rough surface. It is also possible to have a slight light diffusion effect.
The light guide member is, for example, a thin cylindrical body having different diameters arranged with the axis line aligned, and the light introduction surface while reflecting light one or more times between the inner peripheral surface of the outer cylindrical body and the outer peripheral surface of the inner cylindrical body. The light may be guided from the light toward the light output surface. In this case, nothing may exist between the outer cylindrical body and the inner cylindrical body (only air), or a transparent body such as a resin may be filled (when filled with a resin or the like) , Equivalent to the above-mentioned plating).
すなわち、これらをまとめて大きな概念で言えば、導光部材は、内向きの円筒状反射面と、その内側に軸線を一致させて配置した外向きの円筒状反射面とを備えていればよい。前記実施形態で言えば、導光部材４の外周面４ｂが、この内向きの円筒状反射面に相当し、導光部材４の内周面４ａが、外向きの円筒状反射面に相当する。 That is, when these are put together in a large concept, the light guide member only needs to have an inward cylindrical reflection surface and an outward cylindrical reflection surface arranged with its axis line aligned inside thereof. . In the embodiment, the outer peripheral surface 4b of the light guide member 4 corresponds to the inward cylindrical reflection surface, and the inner peripheral surface 4a of the light guide member 4 corresponds to the outward cylindrical reflection surface. .
もちろん、上述した各実施形態や変形例の一部構成同士を適宜組み合わせてもよいのは言うまでもない。例えば図１に示した導光部材に図６で示した円筒体を取り付けても構わない。 Of course, it goes without saying that the partial configurations of the above-described embodiments and modifications may be combined as appropriate. For example, the cylindrical body shown in FIG. 6 may be attached to the light guide member shown in FIG.
その他、本発明はその趣旨を逸脱しない範囲で種々変形が可能である。 In addition, the present invention can be variously modified without departing from the spirit of the present invention.
ＡＲ・・・光照射領域
１・・・光照射装置
１１・・・ヘッド
２・・・光ファイバ
２１・・・出力端面
４・・・導光部材
４１・・・光導入面
４２・・・光導出面
４ａ・・・内周面
４ｂ・・・外周面
７・・・凹溝（ファイバ保持部）
８・・・円筒体
８ａ・・・円筒体の内周面
AR ... light irradiation region 1 ... light irradiation device 11 ... head 2 ... optical fiber 21 ... output end face 4 ... light guide member 41 ... light introduction surface 42 ... light Output surface 4a ... inner peripheral surface 4b ... outer peripheral surface 7 ... concave groove (fiber holding part)
8 ... cylindrical body 8a ... inner peripheral surface of the cylindrical body
Claims (9)
一端面を光導入面とし他端面を光導出面とした円筒状をなす導光部材と、
前記光導入面に軸線を一致させて接続した二重構造をなす外円筒管及び内円筒管と、
出力端面を前記導光部材の光導入面に対向配置した複数の光ファイバとを備えてなり、
前記外円筒管を内円筒管よりも短い長さに設定するとともに、内円筒管と外円筒管との間に形成される円筒状の凹溝に前記光ファイバを挿入してそれらの出力端面を円形状に一列に密に並べ、それら出力端面が光導入面に対向して密着又は略密着するように保持させていることを特徴とする光照射装置。 For irradiating light to the light irradiation area to perform surface inspection or mark detection,
A cylindrical light guide member having one end surface as a light introduction surface and the other end surface as a light extraction surface;
An outer cylindrical tube and an inner cylindrical tube having a double structure connected to the light introduction surface with the axis line aligned, and
A plurality of optical fibers having output end faces opposed to the light introduction surface of the light guide member;
The outer cylindrical tube is set to a length shorter than that of the inner cylindrical tube, and the optical fiber is inserted into a cylindrical groove formed between the inner cylindrical tube and the outer cylindrical tube so that their output end faces are A light irradiation apparatus characterized by being arranged in a circle and densely in a line, and holding the output end faces so as to be in close contact or substantially in close contact with the light introduction surface .
一端面を光導入面とし他端面を光導出面とした円筒状をなす導光部材と、
前記光導入面に軸線を一致させて接続した二重構造をなす外円筒管及び内円筒管と、
出力端面を前記導光部材の光導入面に対向配置した複数の光ファイバとを備えてなり、
前記外円筒管を内円筒管よりも短い長さに設定するとともに、内円筒管と外円筒管との間に形成される円筒状の凹溝に前記光ファイバを挿入してそれらの出力端面を円形状に一列に密に並べ、それら出力端面が光導入面に対向して密着又は略密着するように保持させていることを特徴とする光照射装置用ヘッド。 For irradiating light to the light irradiation area to perform surface inspection or mark detection,
A cylindrical light guide member having one end surface as a light introduction surface and the other end surface as a light extraction surface;
An outer cylindrical tube and an inner cylindrical tube having a double structure connected to the light introduction surface with the axis line aligned, and
A plurality of optical fibers having output end faces opposed to the light introduction surface of the light guide member;
The outer cylindrical tube is set to a length shorter than that of the inner cylindrical tube, and the optical fiber is inserted into a cylindrical groove formed between the inner cylindrical tube and the outer cylindrical tube so that their output end faces are A head for a light irradiating apparatus, characterized in that the heads are arranged in a circular shape densely in a line and their output end faces are held in close contact or substantially in close contact with the light introduction surface .
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