JP4435556B2 - Canned motor - Google Patents

Canned motor Download PDF

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Publication number
JP4435556B2
JP4435556B2 JP2003420854A JP2003420854A JP4435556B2 JP 4435556 B2 JP4435556 B2 JP 4435556B2 JP 2003420854 A JP2003420854 A JP 2003420854A JP 2003420854 A JP2003420854 A JP 2003420854A JP 4435556 B2 JP4435556 B2 JP 4435556B2
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stator
rotor
opening
core
flange portion
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JP2005184958A (en
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芳郎 篠田
正志 川本
禎夫 森崎
弘明 川瀬
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Toshiba Industrial Products and Systems Corp
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Toshiba Industrial Products Manufacturing Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A30/00Adapting or protecting infrastructure or their operation
    • Y02A30/14Extreme weather resilient electric power supply systems, e.g. strengthening power lines or underground power cables

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Description

本発明は、ステータとロータとの間に両者を隔離するキャンを備えたキャンドモータに関する。   The present invention relates to a canned motor including a can that separates both between a stator and a rotor.

例えば、真空ポンプの駆動源としてはキャンドモータが用いられる。図10にキャンドモータの断面図を示す。即ち、ステータ100はポンプ本体101に取り付けられ、ロータ102のシャフト103はポンプ本体101内に導入されて図示しない軸受に支承されている。ステータ100とロータ102との間には、両者を隔離するキャン104が配設されている(例えば特許文献1参照)。
特開2001−304162号公報
For example, a canned motor is used as a driving source of the vacuum pump. FIG. 10 shows a cross-sectional view of the canned motor. That is, the stator 100 is attached to the pump body 101, and the shaft 103 of the rotor 102 is introduced into the pump body 101 and supported by a bearing (not shown). A can 104 is disposed between the stator 100 and the rotor 102 (see, for example, Patent Document 1).
JP 2001-304162 A

従来より、キャン104としては、強度を保つために、ステンレス等の金属製キャンか或いは射出成形により肉厚に形成された樹脂製キャンが用いられている。
しかしながら、従来の金属製のキャンの場合には、ステータ100からの磁束が作用することにより表面に渦電流が発生し、これによる損失のためにモータ効率が悪くなる問題がある。
Conventionally, as the can 104, a metal can such as stainless steel or a resin can formed thick by injection molding is used in order to maintain strength.
However, in the case of a conventional metal can, there is a problem that an eddy current is generated on the surface by the magnetic flux from the stator 100 and the motor efficiency is deteriorated due to the loss caused by this.

又、従来の樹脂製キャンの場合には、ステータ100とロータ102との間に肉厚の樹脂製キャンが配置されるので、ステータ100とロータ102との間のエアギャップが大きくなり、所望の出力を得るには、ステータに巻装されるコイルに流す電流値を増すか或いはコイルの巻回数を増すか等の対応が必要で、これにより損失が増大してやはりモータ効率が悪くなる問題がある。   In the case of a conventional resin can, a thick resin can is disposed between the stator 100 and the rotor 102, so that an air gap between the stator 100 and the rotor 102 is increased, and a desired can is obtained. In order to obtain an output, it is necessary to increase the value of the current passed through the coil wound around the stator or increase the number of turns of the coil. This causes a problem that the loss increases and the motor efficiency also deteriorates. is there.

本発明は上記事情に鑑みてなされたもので、その目的は、キャンの渦電流の発生を防止し、又、キャンの肉厚化を抑制して、モータ効率の向上を図ることができるキャンドモータを提供するにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a can motor that can prevent the generation of eddy currents in the can and suppress the thickening of the can to improve motor efficiency. To provide.

本発明のキャンドモータは、真空ポンプ用であって、一端部を閉塞した円筒状をなし開口部に外方に突出するフランジ部を有するステータフレーム内に、コイルが巻装されたステータコアを嵌め込み固定してなるステータと、前記ステータコアの内周部に回転自在に位置するロータコアを有するロータと、このロータと前記ステータとの間に配置され、そのステータとロータとを隔離する一端部を閉塞した円筒状をなし開口部に外方に突出する円形状のフランジ部を有するキャンとを具備し、前記キャンは、前記ステータコアとロータコアとの間のエアギャップ部分に位置する胴部及び閉塞部がフランジ部より肉厚が薄くなるように樹脂の圧縮成形により形成されていることを特徴とする。 The canned motor of the present invention is for a vacuum pump, and has a cylindrical shape with one end closed and has a flange portion projecting outwardly from an opening, and a stator core around which a coil is wound is fitted and fixed. And a rotor having a rotor core that is rotatably positioned on the inner peripheral portion of the stator core, and a cylinder that is disposed between the rotor and the stator and that closes one end portion that isolates the stator and the rotor. And a can having a circular flange portion projecting outwardly from the opening , wherein the can has a body portion and a closing portion located in an air gap portion between the stator core and the rotor core. It is characterized by being formed by compression molding of resin so that the wall thickness becomes thinner.

本発明のキャンドモータによれば、キャンは樹脂により形成されているので、渦電流の発生を防止でき、又、キャンは、樹脂の圧縮成形により形成されているので、ステータコアとロータコアとの間のエアギャップ部分に位置する胴部の肉厚を薄く且つ強靭にすることができ、従って、ステータコアとロータコアとの間のエアギャップが大きくなることを極力抑制でき、以て、モータ効率の向上を図ることができる。   According to the canned motor of the present invention, since the can is made of resin, generation of eddy current can be prevented, and the can is formed by resin compression molding, so that the can is formed between the stator core and the rotor core. The thickness of the body portion located in the air gap portion can be made thin and strong, and accordingly, the increase in the air gap between the stator core and the rotor core can be suppressed as much as possible, thereby improving the motor efficiency. be able to.

(第1の実施例)
以下、本発明を真空ポンプに適用した第1の実施例について、図1乃至図4を参照しながら説明する。
図1において、ステータ1は、一端部を閉塞した円筒状のステータフレーム2の内周部にステータコア3を嵌め込み固定してなるもので、ステータフレーム2の開口部には外方に突出するフランジ部2aが形成されている。ステータコア3は、多数の円環状の珪素鋼板を積層してなるもので、これには、図2に示すように、内周部側に開口する開口部(半閉形)4aを有する多数のスロット4が形成されているとともに、これらのスロット4内にスロット絶縁物5を介して収納されるようにしてコイル6が巻装されている。図1及び図3には、コイル6のエンド部6aのみが示されている。
(First embodiment)
A first embodiment in which the present invention is applied to a vacuum pump will be described below with reference to FIGS.
In FIG. 1, a stator 1 is formed by fitting and fixing a stator core 3 to an inner peripheral portion of a cylindrical stator frame 2 whose one end is closed, and a flange portion protruding outward from an opening of the stator frame 2. 2a is formed. The stator core 3 is formed by laminating a large number of annular silicon steel plates. As shown in FIG. 2, the stator core 3 includes a large number of slots 4 each having an opening (semi-closed shape) 4a that opens to the inner peripheral side. The coil 6 is wound so as to be accommodated in the slots 4 via the slot insulators 5. Only the end portion 6a of the coil 6 is shown in FIGS.

図1において、ロータ7は、棒状導体(図示せず)を埋設したロータコア8にシャフト9を挿通固定してなるもの(かご形回転子)であり、そのシャフト9の一端部(負荷側端部)は、ポンプ本体10に形成された貫通口10aに挿通されて軸受に支承されているとともに、負荷たるロータ若しくはインペラに連結されている(いずれも図示せず)。
しかして、ステータ1は、ステータフレーム2のフランジ部2aをポンプ本体10の側壁にねじ止めされることによりそのポンプ本体10に取付けられており、この場合に、ロータコア8がステータコア3の内周部内に該内周部との間に所定のエアギャップG(図3参照)を存するようにして位置するようになっている。
In FIG. 1, a rotor 7 is formed by inserting and fixing a shaft 9 into a rotor core 8 in which a rod-shaped conductor (not shown) is embedded (cage-shaped rotor), and one end portion (load side end portion) of the shaft 9. ) Is inserted through a through hole 10a formed in the pump body 10 and supported by a bearing, and is connected to a rotor or an impeller as a load (both not shown).
Thus, the stator 1 is attached to the pump body 10 by screwing the flange portion 2a of the stator frame 2 to the side wall of the pump body 10, and in this case, the rotor core 8 is attached to the inner peripheral portion of the stator core 3. Further, a predetermined air gap G (see FIG. 3) exists between the inner peripheral portion and the inner peripheral portion.

尚、図1に示すように、ステータコア3に巻装されたコイル6には電源コード11が電気的に接続されており、この電源コード11の先端部にはステータフレーム2の外部に位置してコネクタ12が電気的に接続されている。
キャン13は、円筒状の胴部13a及びこの胴部13aの一方の端部を閉塞する閉塞部13bからなる有底円筒状をなすもので、その胴部13aの他方の端部たる開口部に外方に突出する円形状のフランジ部13cが形成されている。このキャン13は、樹脂例えば熱硬化性樹脂の圧縮成形により一体成形されたものである。熱硬化性樹脂は、加熱すると硬化する性質を有し、圧縮成形用の金型内で加熱・加圧することにより所望の形状に成形できる。
As shown in FIG. 1, a power cord 11 is electrically connected to the coil 6 wound around the stator core 3, and the tip of the power cord 11 is located outside the stator frame 2. The connector 12 is electrically connected.
The can 13 has a cylindrical shape with a bottom consisting of a cylindrical body portion 13a and a closed portion 13b that closes one end portion of the body portion 13a. The can 13 has an opening at the other end portion of the body portion 13a. A circular flange portion 13c protruding outward is formed. The can 13 is integrally formed by compression molding of a resin such as a thermosetting resin. The thermosetting resin has a property of being cured when heated, and can be formed into a desired shape by heating and pressing in a compression molding die.

この圧縮成形法の特徴は、金型内で圧力が直接熱硬化性樹脂に加わることであり、これにより、高い成形圧力が均一に加わった強靭な樹脂成形品得ることが可能であり、特に、薄肉部をもつ樹脂成型品に適した成形法である。この圧縮成形法で成形されたキャン13は、薄肉部たる高い成形圧力が均一に加わった胴部13a及び閉塞部13bが他の部分たるそれ程高い成形圧力が加わらないフランジ部13cよりも著しく肉厚が薄くなるように形成されている。 A feature of this compression molding method is that pressure is directly applied to the thermosetting resin in the mold, which makes it possible to obtain a tough resin molded product in which high molding pressure is uniformly applied. This is a molding method suitable for resin molded products having thin portions. The can 13 molded by this compression molding method is significantly thicker than the flange portion 13c where the molding portion 13a to which the high molding pressure as the thin portion is uniformly applied and the molding portion 13b to which the molding pressure as high as other portions are not applied are applied. Is formed to be thin.

そして、キャン13は、ステータ1がポンプ本体10に取付けられる以前に、ステータ1内に嵌め込まれて、そのフランジ部13cの外周部がステータフレーム2の開口部内周に接着材14にて接着固定されるようになっている。従って、前述したように、ステータ1がポンプ本体10に取付けられたときには、胴部13aがステータコア3とロータコア8とのなすエアギャップG内に位置し、閉塞部13bがシャフト9の反負荷側端部を覆うようになる。即ち、キャン13は、ステータ1とロータ7とを隔離するのである。かくして、キャン11を熱硬化性樹脂の圧縮成形にて形成することにより、図3で示すように、エアギャップG内に位置する胴部13aの厚み寸法hを必要最小限にすることができ、エアギャップGの寸法pを最小限にすることができる。 The can 13 is fitted into the stator 1 before the stator 1 is attached to the pump body 10, and the outer periphery of the flange portion 13 c is bonded and fixed to the inner periphery of the opening of the stator frame 2 with the adhesive 14. It has become so. Therefore, as described above, when the stator 1 is attached to the pump body 10, the body portion 13 a is located in the air gap G formed by the stator core 3 and the rotor core 8, and the closing portion 13 b is the end on the side opposite to the load of the shaft 9. Covers the part. That is, the can 13 separates the stator 1 and the rotor 7 from each other. Thus, by forming the can 11 by compression molding of a thermosetting resin, as shown in FIG. 3, the thickness dimension h of the body portion 13a located in the air gap G can be minimized. The dimension p of the air gap G can be minimized.

このように本実施例によれば、キャン13を樹脂製としたので、渦電流の発生を防止することができて、モータ効率の向上を図ることができる。又、キャン13を熱硬化性樹脂の圧縮成形により形成するようにしたので、ステータコア3とロータコア8とのなすエアギャップG内に位置する胴部13aを、その厚み寸法hが必要最小限となる薄肉に形成でき、従って、エアギャップGの寸法pを最小限に抑制することができ、モータ効率の向上を図ることができる。この場合、キャン13は圧縮成形により強靭に形成されるので、強度的にも問題はない。
しかも、キャン13は、フランジ部13cの外周部をステータフレーム2に接着材14にて接着することによりステータ1に固定するようにしているので、キャン13のステータ1に対する取付けを容易に行なうことができる。
Thus, according to the present embodiment, since the can 13 is made of resin, the generation of eddy current can be prevented, and the motor efficiency can be improved. Further, since the can 13 is formed by compression molding of a thermosetting resin, the thickness dimension h of the body portion 13a located in the air gap G formed by the stator core 3 and the rotor core 8 is minimized. Therefore, the thickness p of the air gap G can be minimized, and the motor efficiency can be improved. In this case, since the can 13 is formed tough by compression molding, there is no problem in strength.
Moreover, since the can 13 is fixed to the stator 1 by adhering the outer peripheral portion of the flange portion 13c to the stator frame 2 with the adhesive material 14, the can 13 can be easily attached to the stator 1. it can.

(第2の実施例)
図5及び図6は本発明の第2の実施例を示すものであり、以下、第1の実施例と異なる部分について説明する。
(Second embodiment)
FIGS. 5 and 6 show a second embodiment of the present invention. Hereinafter, parts different from the first embodiment will be described.

即ち、キャン13の胴部13aの外周部には、ステータコア3における多数のスロット4の開口部4aに対応して多数の凸部たる突条部13dが軸方向に延びるように一体に形成されており、これらが各スロット4の開口部4aに挿入されている。尚、これらの突条部13dもキャン13の圧縮成形に同時に形成される。
この第2の実施例によれば、前記第1の実施例と同様の作用効果を得ることができ、特に、突条部13dがスロット4の開口部4a挿入されることにより、キャン13の強度を増すことができる利点がある。
尚、第2の実施例では、突部として連続した突条部13dを示したが、例えば断続した突起列でもよい。
In other words, on the outer peripheral portion of the body portion 13a of the can 13, protrusions 13d, which are a number of protrusions, are integrally formed so as to extend in the axial direction corresponding to the openings 4a of the number of slots 4 in the stator core 3. These are inserted into the openings 4 a of the slots 4. These protrusions 13 d are also formed simultaneously with the compression molding of the can 13.
According to this second embodiment, the can obtain the same effects as the first embodiment, in particular, by the projecting portion 13d is inserted into the opening 4a of the slot 4, the can 13 There is an advantage that the strength can be increased.
In the second embodiment, the continuous protrusion 13d is shown as the protrusion, but an intermittent protrusion row may be used, for example.

(第3の実施例)
図7は本発明の第3の実施例を示すものであり、以下、第1の実施例と異なる部分について説明する。
(Third embodiment)
FIG. 7 shows a third embodiment of the present invention. The following description will be focused on differences from the first embodiment.

即ち、ステータ1とキャン13とのなす空間部に樹脂が充填されて樹脂層15が形成されている。この樹脂層15は、ステータ1に型成形により形成されたものであり、キャン13とは別体のものである。従って、キャン13は、樹脂層15が形成された後にステータ1内に嵌め込み固定されるようになる。
この第3の実施例によれば、前記第1の実施例と同様の作用効果を得ることができることは勿論のこと、その上に、樹脂層15を介してステータコア3及びコイル6の熱をステータフレーム2に伝達して外部に放散させることができ、冷却効果の向上を図ることができる利点がある。
That is, the resin layer 15 is formed by filling the space formed by the stator 1 and the can 13 with resin. The resin layer 15 is formed on the stator 1 by molding and is separate from the can 13. Therefore, the can 13 will be fixed narrowing fitted in the stator 1 after the resin layer 15 is formed.
According to the third embodiment, the same effects as those of the first embodiment can be obtained. In addition, the heat of the stator core 3 and the coil 6 is transferred to the stator via the resin layer 15. There is an advantage that it can be transmitted to the frame 2 and diffused to the outside, and the cooling effect can be improved.

(第4の実施例)
図8は本発明の第4の実施例を示すものであり、以下、第1の実施例と異なる部分について説明する。
即ち、第1の実施例では、キャン13のフランジ部13cをステータフレーム2の開口部内周に接着材14にて接着固定するようにしたが、この実施例においては、キャン13のフランジ部13cをステータフレーム2の開口部にねじ16にて固定(ねじ止め)するようにしたものである。
(Fourth embodiment)
FIG. 8 shows a fourth embodiment of the present invention, and only the parts different from the first embodiment will be described below.
That is, in the first embodiment, the flange portion 13c of the can 13 is bonded and fixed to the inner periphery of the opening of the stator frame 2 with the adhesive material 14, but in this embodiment, the flange portion 13c of the can 13 is fixed. This is fixed (screwed) to the opening of the stator frame 2 with screws 16.

このような第4の実施例によれば、前記第1の実施例と同様の作用効果を得ることができることは勿論のこと、その上に、ねじ16を螺脱させればキャン13をステータ1から取外すことができるようになるので、キャン13が損傷、劣化した場合には、ステータ1全体を交換することなくキャン13のみを交換することができるという利点がある。   According to the fourth embodiment, the same effect as that of the first embodiment can be obtained. In addition, if the screw 16 is unscrewed, the can 13 can be connected to the stator 1. Therefore, when the can 13 is damaged or deteriorated, there is an advantage that only the can 13 can be replaced without replacing the entire stator 1.

(第5の実施例)
図9は本発明の第5の実施例を示すものであり、以下、第3の実施例と異なる部分について説明する。
(Fifth embodiment)
FIG. 9 shows a fifth embodiment of the present invention, and only the parts different from the third embodiment will be described below.

即ち、第3の実施例では、キャン13のフランジ部13cをステータフレーム2の開口部内周に接着剤14にて接着固定するようにしたが、この実施例においては、キャン13のフランジ部13cをステータフレーム2の開口部にねじ17にて固定(ねじ止め)するようにしたものである。
このような第5の実施例によれば、前記第1及び第4の実施例と同様の作用効果を得ることができる。
That is, in the third embodiment, the flange portion 13c of the can 13 is bonded and fixed to the inner periphery of the opening portion of the stator frame 2 with the adhesive 14. However, in this embodiment, the flange portion 13c of the can 13 is It is fixed (screwed) to the opening of the stator frame 2 with screws 17.
According to such a 5th Example, the effect similar to the said 1st and 4th Example can be acquired.

尚、上記実施例では、キャンドモータとしてかご形回転子を有する誘導電動機に適用したが、これに限らず、例えば永久磁石形電動機に適用してもよい。
又、上記実施例では、本発明を真空ポンプに適用した場合について述べたが、例えば水中ポンプに適用してもよい。
その他、本発明は上記し且つ図面に示す実施例にのみ限定されるものではなく、要旨を逸脱しない範囲内で種々変形して実施し得ることは勿論である。
In the above embodiment, the present invention is applied to an induction motor having a squirrel-cage rotor as a canned motor. However, the present invention is not limited to this, and may be applied to, for example, a permanent magnet motor.
In the above embodiment, the case where the present invention is applied to a vacuum pump has been described. However, the present invention may be applied to, for example, a submersible pump.
In addition, the present invention is not limited to the embodiments described above and shown in the drawings, and it is needless to say that various modifications can be made without departing from the scope of the invention.

本発明の第1の実施例を示す縦断側面図1 is a longitudinal side view showing a first embodiment of the present invention. 部分拡大縦断正面図Partially enlarged longitudinal front view 部分拡大縦断側面図Partially enlarged vertical side view キャンの拡大斜視図Expanded perspective view of the can 本発明の第2の実施例を示す図2相当図FIG. 2 equivalent view showing a second embodiment of the present invention 図4相当図4 equivalent figure 本発明の第3の実施例を示す図1相当図FIG. 1 equivalent view showing a third embodiment of the present invention. 本発明の第4の実施例を示す図1相当図FIG. 1 equivalent view showing a fourth embodiment of the present invention. 本発明の第5の実施例を示す図1相当図FIG. 1 equivalent view showing a fifth embodiment of the present invention. 従来例を示す図1相当図1 equivalent diagram showing a conventional example

符号の説明Explanation of symbols

図面中、1はステータ、2はステータフレーム、3はステータコア、4はスロット、4aは開口部、6はコイル、7はロータ、8はロータコア、13はキャン、13aは胴部、13dは突条部(突部)、13cはフランジ部(他の部分)、14は接着材、15は樹脂層、16及び17はねじを示す。
In the drawings, 1 is a stator, 2 is a stator frame, 3 is a stator core, 4 is a slot, 4a is an opening, 6 is a coil, 7 is a rotor, 8 is a rotor core, 13 is a can, 13a is a trunk, and 13d is a protrusion. Portions (projections), 13c are flange portions (other portions), 14 is an adhesive, 15 is a resin layer, and 16 and 17 are screws.

Claims (5)

一端部を閉塞した円筒状をなし開口部に外方に突出するフランジ部を有するステータフレーム内に、コイルが巻装されたステータコアを嵌め込み固定してなるステータと、
前記ステータコアの内周部に回転自在に位置するロータコアを有するロータと、
このロータと前記ステータとの間に配置され、そのステータとロータとを隔離する一端部を閉塞した円筒状をなし開口部に外方に突出する円形状のフランジ部を有するキャンとを具備し、
前記キャンは、前記ステータコアとロータコアとの間のエアギャップ部分に位置する胴部及び閉塞部がフランジ部より肉厚が薄くなるように樹脂の圧縮成形により形成されていることを特徴とする真空ポンプ用のキャンドモータ。
A stator formed by fitting a stator core around which a coil is wound into a stator frame having a flange portion projecting outwardly in an opening and having a cylindrical shape with one end closed ;
A rotor having a rotor core that is rotatably positioned on an inner periphery of the stator core;
A cylindrical member disposed between the rotor and the stator, having a cylindrical shape with one end closed to separate the stator and the rotor, and having a circular flange projecting outwardly from the opening ;
The can is a vacuum pump, wherein the body portion and the closed portion positioned in the air gap portion is formed by compression molding of a resin to a thickness greater than that of the flange portion is thinner between the stator core and the rotor core canned motor of use.
キャンの胴部の外周部にステータコアのスロットの開口部に挿入される突部が形成されていることを特徴とする請求項1記載のキャンドモータ。   2. A can motor according to claim 1, wherein a protrusion inserted into the opening of the slot of the stator core is formed on the outer periphery of the can body. ステータとキャンとのなす空間部に樹脂が充填されていることを特徴とする請求項1又は2記載のキャンドモータ。   3. A canned motor according to claim 1, wherein the space formed by the stator and the can is filled with resin. キャンのフランジ部外周部はステータフレームの内周に接着にて固定されていることを特徴とする請求項1乃至3のいずれかに記載のキャンドモータ。 4. The can motor according to claim 1, wherein an outer peripheral portion of the flange portion of the can is fixed to an inner periphery of the stator frame by adhesion. キャンのフランジ部はステータフレームの開口部に開口部方向からねじ止めにて固定されていることを特徴とする請求項1乃至3のいずれかに記載のキャンドモータ。 4. A can motor according to claim 1 , wherein the flange portion of the can is fixed to the opening portion of the stator frame by screws from the opening direction .
JP2003420854A 2003-12-18 2003-12-18 Canned motor Expired - Fee Related JP4435556B2 (en)

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DE102020126408A1 (en) 2020-10-08 2022-04-14 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Process for producing a can for sealing a rotor space from a stator space of an electrical machine, can, electrical machine, process for producing an electrical machine, motor vehicle
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CN103595165A (en) * 2012-08-16 2014-02-19 株式会社荏原制作所 Sealing structure, vacuum pump motor including same sealing structure, and vacuum pump
KR20140023859A (en) 2012-08-16 2014-02-27 가부시키가이샤 에바라 세이사꾸쇼 Sealing structure, vacuum pump motor including same sealing structure, and vacuum pump
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US9429166B2 (en) 2012-08-16 2016-08-30 Ebara Corporation Sealing structure, vacuum pump motor including same sealing structure, and vacuum pump
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US20220235772A1 (en) * 2018-07-19 2022-07-28 Agilent Technologies, Inc. Vacuum pumping system having an oil-lubricated vacuum pump
DE102020126408A1 (en) 2020-10-08 2022-04-14 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Process for producing a can for sealing a rotor space from a stator space of an electrical machine, can, electrical machine, process for producing an electrical machine, motor vehicle

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