JP4396317B2 - 液体吐出ヘッド及びその製造方法 - Google Patents
液体吐出ヘッド及びその製造方法 Download PDFInfo
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- JP4396317B2 JP4396317B2 JP2004049590A JP2004049590A JP4396317B2 JP 4396317 B2 JP4396317 B2 JP 4396317B2 JP 2004049590 A JP2004049590 A JP 2004049590A JP 2004049590 A JP2004049590 A JP 2004049590A JP 4396317 B2 JP4396317 B2 JP 4396317B2
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- pressure chamber
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- piezoelectric body
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- 239000010408 film Substances 0.000 description 37
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 33
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 238000003384 imaging method Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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- 239000011882 ultra-fine particle Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
また、エアロゾルデポジション法を使用することにより、膜厚が数μm〜数十μm程度の圧電体の積層構造化が可能になる。また、高耐圧ゆえに高電圧印加が可能となるため、高粘度インクにも対応可能なトルクアップを図ることができるとともに、許容電圧が高いことで圧電体の経時耐久の向上にも大きく寄与する。
更に、振動板の両面にエアロゾルデポジション法によって形成される第1の圧電体と圧力室隔壁との原材料を同一にすることにより、更なる反りの発生を防止するようにしている。
まず、本発明に係る液体吐出ヘッドを適用するインクジェット記録装置の概要について説明する。
次に、本発明に係る液体吐出ヘッドの製造に使用するAD法による成膜方法について説明する。
次に、本発明に係る液体吐出ヘッドの製造方法について説明する。
Claims (5)
- 振動板と、この振動板の第1面に形成され、該振動板を駆動するための第1の圧電体と、前記振動板の前記第1面と反対側の第2面に形成された圧力室隔壁とを備え、
前記第1の圧電体及び圧力室隔壁は、それぞれエアロゾルデポジション法によって形成され、
前記圧力室隔壁は、圧電材料によって形成されていることを特徴とする液体吐出ヘッド。 - 前記圧力室隔壁は、前記圧電材料に電極が形成された第2の圧電体であることを特徴とする請求項1に記載の液体吐出ヘッド。
- 前記第1の圧電体及び第2の圧電体は、それぞれ独立して駆動可能に電極が形成されていることを特徴とする請求項2に記載の液体吐出ヘッド。
- 前記第1の圧電体はd31モードで変位し、前記第2の圧電体はd33モードで変位するものであることを特徴とする請求項2に記載の液体吐出ヘッド。
- エアロゾルデポジション法により原料の粉体を含むエアロゾルを振動板に噴射し、該振動板に粉体を堆積させて液体吐出ヘッドを製造する液体吐出ヘッドの製造方法であって、 前記振動板の第1面にエアロゾルデポジション法により圧電体を形成する工程と、
前記圧電体上にエアロゾルデポジション法により個別電極を形成する工程と、
前記振動板の前記第1面と反対側の第2面にエアロゾルデポジション法により圧力室隔壁を形成する工程と、を含み、
前記圧力室隔壁を形成する工程は、圧電材料の粉体の堆積によって圧電体を形成する工程と、導電材料の粉体の堆積によって電極を形成する工程とを含むことを特徴とする液体吐出ヘッドの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004049590A JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
US11/063,572 US20050185027A1 (en) | 2004-02-25 | 2005-02-24 | Liquid discharge head and manufacturing method thereof |
US13/249,389 US20120019603A1 (en) | 2004-02-25 | 2011-09-30 | Liquid discharge head and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004049590A JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005238568A JP2005238568A (ja) | 2005-09-08 |
JP4396317B2 true JP4396317B2 (ja) | 2010-01-13 |
Family
ID=34858263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004049590A Expired - Fee Related JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20050185027A1 (ja) |
JP (1) | JP4396317B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005246789A (ja) * | 2004-03-04 | 2005-09-15 | Fuji Photo Film Co Ltd | 液体吐出ヘッド及びその製造方法 |
JP4747389B2 (ja) * | 2006-02-27 | 2011-08-17 | 富士フイルム株式会社 | 液体吐出ヘッドの製造方法 |
WO2008016035A1 (en) * | 2006-08-01 | 2008-02-07 | Panasonic Corporation | Camera device, liquid lens and image pickup method |
US8178285B2 (en) * | 2008-03-06 | 2012-05-15 | Ngk Insulators, Ltd. | Method for manufacturing piezoelectric/electrostrictive film type element |
JP4973678B2 (ja) * | 2009-03-16 | 2012-07-11 | ブラザー工業株式会社 | 圧電アクチュエータの製造方法、及び、液体移送装置の製造方法 |
JP2014041112A (ja) * | 2012-07-27 | 2014-03-06 | Nec Tokin Corp | 焦電型赤外線センサ |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993022140A1 (en) * | 1992-04-23 | 1993-11-11 | Seiko Epson Corporation | Liquid jet head and production thereof |
IT1268870B1 (it) * | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
JP3366146B2 (ja) * | 1995-03-06 | 2003-01-14 | セイコーエプソン株式会社 | インク噴射ヘッド |
JP3379479B2 (ja) * | 1998-07-01 | 2003-02-24 | セイコーエプソン株式会社 | 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、 |
JP3328609B2 (ja) * | 1998-12-30 | 2002-09-30 | 三星電子株式会社 | インクジェットプリンタヘッドアクチュエータ及びその製造方法 |
EP1116590B1 (en) * | 2000-01-11 | 2003-09-17 | Samsung Electronics Co., Ltd. | Ink-jet head device with multi-stacked PZT actuator |
-
2004
- 2004-02-25 JP JP2004049590A patent/JP4396317B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-24 US US11/063,572 patent/US20050185027A1/en not_active Abandoned
-
2011
- 2011-09-30 US US13/249,389 patent/US20120019603A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2005238568A (ja) | 2005-09-08 |
US20120019603A1 (en) | 2012-01-26 |
US20050185027A1 (en) | 2005-08-25 |
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