JP4380926B2 - Auto handler for COF - Google Patents

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JP4380926B2
JP4380926B2 JP2001020478A JP2001020478A JP4380926B2 JP 4380926 B2 JP4380926 B2 JP 4380926B2 JP 2001020478 A JP2001020478 A JP 2001020478A JP 2001020478 A JP2001020478 A JP 2001020478A JP 4380926 B2 JP4380926 B2 JP 4380926B2
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光弘 古田
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Yokogawa Electric Corp
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    • G—PHYSICS
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    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N21/84—Systems specially adapted for particular applications
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Description

【０００１】
【発明の属する技術分野】
本発明は、ＣＯＦ（Chip on film）を試験・分類するオートハンドラに関する。
【０００２】
【従来の技術】
ＣＯＦ用オートハンドラは、周知のＴＡＢ（Tape Automated Bonding）用オートハンドラと同様、テープ上に実装したＩＣデバイスを搬送し、ＩＣテスタからの分類信号に従って、ＩＣデバイスを、例えば、良品、不良品に分類する装置である。
ここで、ＣＯＦは、従来のＴＡＢと比較し、下記の特徴を備えている。
（１）ＴＡＢのテープ厚さは７５ｕｍ以上であったのに対し、ＣＯＦは、テープの厚さが４０ｕｍ以下で薄く半透明なものがある。
（２）ＴＡＢではパターン裏面よりの実装が主流であったのに対し、ＣＯＦは、ＩＣチップ実装とパターン面が同一である。
（３）ＴＡＢでは折り曲げ窓での短絡があったのに対し、ＣＯＦは、折り曲げ用の窓が無く、裏面での電気的な短絡がない。
このような特徴を備えるＣＯＦは、例えば、ＬＣＤ（液晶ディスプレイ）の駆動用ＩＣ等に利用されている。
【０００３】
図４はＣＯＦの一般な構成例を示したもので、１はＣＯＦ、１ａはリード、１ｂはＩＣチップ、１ｃはテストパッド、１ｄはレジスト、１ｅは位置決めマークである。
ＣＯＦ１において、リード１ａでＩＣチップ１ｂとテストパッド１ｃが電気的接続され、ＩＣチップ１ｂの周辺には、リード１ａとＩＣチップ１ｂを保護するためのレジスト１ｄと位置決めマーク１ｅが形成されている。
【０００４】
図５は従来のＣＯＦ用オートハンドラと撮像装置及び照明装置の概略構成を正面から示したもので、２はプッシャー（測定部）、２ａはプッシャープレート、３はプローブカード、４はテストヘッド、４ａは穴部、５はカメラユニット（撮像装置）、６は照明装置、１１は供給リール、１２は収容リール、１３と１４はスプロケット、１５はパンチ（分類部）である。
このＣＯＦ用オートハンドラは、具体的には、ＣＯＦ１を供給リール１１から測定部（プッシャー）２、分類部（パンチ）１５に搬送し、収容リール１２まで搬送して、実装したＩＣデバイス（ＩＣチップ１ｂ）を分類する。例えば、不良品はパンチ１５による穴あけ処理により分類される。
なお、供給リール１１及び収容リール１２の近傍において、ＣＯＦ１が一定以上たるむと、図示しない光センサにより検出され、それぞれスプロケット１３・１４が必要に応じ駆動されることで、ＣＯＦ１の一定以上のたるみが取り除かれる。
【０００５】
そして、測定部（プッシャー）２において、ＣＯＦ１はプローブカード３に遮られることなく照明装置６により照明され、その画像がカメラユニット５により撮像される。
ここで、プッシャープレート２ａは、ＣＯＦ１の裏面に密着し、ＣＯＦ１を平坦に保持している。また、カメラユニット５及び照明装置６は、プッシャー２に対しテストヘッド４の対向側に配置されており、テストヘッド４の中央の穴部４ａを通して照明・撮像される。すなわち、ＣＯＦ１に対してほぼ平行となるように配置されたカメラユニット５によって、照明装置６により照射されたＣＯＦ１がテストヘッド４中央の穴部４ａを通してＣＯＦ１表面の位置決めマーク１ｅやテストパッド１ｃ、リード１ａが撮像される。
撮像後は、図示しない画像処理装置において、予め登録されている位置決めマーク１ｅの画像データと、現在の画像データの位置決めマーク１ｅの位置関係を計算し、その差分だけプッシャー２を動かし、プローブカード３とＣＯＦ１を位置決めする。
【０００６】
【発明が解決しようとする課題】
しかし、照明時において、半透明のＣＯＦ１は光を透過するため、その表面と裏面のプッシャープレート２ａで反射する光が交錯し、図６に示したように、乱反射が発生する。この乱反射の状態を撮像すると、ＣＯＦ１のパターンは、その裏面側のプッシャープレート２ａの表面と混じりあった状態となり、目視でも確認できない状態となる。
従って、画像処理装置においても、特定のパターンの登録、検出ができなかった。
【０００７】
本発明の課題は、オートハンドラにおいて、ＣＯＦ撮像の際に、光の反射量を押さえ、更には、乱反射を防止し、画像処理可能な安定したＣＯＦの画像が取り込めるようにすることである。
【０００８】
【課題を解決するための手段】
以上の課題を解決すべく請求項１記載の発明は、
例えば、図１及び図２に示すように、
半透明のＣＯＦ１を供給リール１１からプッシャー２を経て収容リール１２まで搬送し、ＣＯＦ１に対しプッシャー２と反対側に配置され、ＣＯＦ１を照射する撮像用照明装置７を備え、ＣＯＦ１に対しプッシャー２と反対側に配置され、ＣＯＦ１を撮像する撮像装置５を有し、撮像装置５によりＣＯＦ表面を撮像し、プッシャー２を動かしてプローブカード３とＣＯＦ１を位置決めするＣＯＦ用オートハンドラにおいて、
プッシャー２とＣＯＦ１との間に浮き部分が生じた場合においても、鮮明なＣＯＦ画像が得られるようにするために、前記プッシャー２の前記ＣＯＦ１の背面に当接する面を、前記撮像用照明装置７から照射され、ＣＯＦ１を通過した光を吸収する光吸収色部２ｂとしたことを特徴とする。
【０００９】
請求項１記載の発明によれば、オートハンドラのプッシャーにおいて、撮像時の照明光がＣＯＦ背面に当接する面の光吸収色となる黒色の表面部で吸収されるので、プッシャー表面での反射光が微小なものとなる。
従って、光の反射量を押さえて、画像処理可能な安定したＣＯＦ画像が取り込めるようになる。
【００１０】
請求項２記載の発明は、
請求項１記載のＣＯＦ用オートハンドラであって、
前記撮像用照明装置７は前記ＣＯＦ１の表面と照射がなす角が鋭角な照明部７ｂを有することを特徴とする。
【００１１】
請求項２記載の発明によれば、請求項１記載の撮像用照明装置による鋭角な入射角をもった照明光がＣＯＦ表面とプッシャー表面とで鋭角な斜め方向に抜けるので、ＣＯＦ表面及びプッシャー表面での反射光は撮像装置には直接戻らない。
従って、光の反射量を押さえて、画像処理可能な安定したＣＯＦ画像が取り込めるようになる。
【００１２】
請求項３記載の発明は、
請求項２記載のＣＯＦ用オートハンドラであって、
前記撮像用照明装置７は散乱光を照射することを特徴とする。
【００１３】
請求項３記載の発明によれば、請求項２記載の撮像用照明装置による散乱光の照射によって、乱反射を防止でき、より安定したＣＯＦ画像が取り込める。
【００１４】
請求項４記載の発明は、
請求項１〜３のいずれかに記載のＣＯＦ用オートハンドラであって、
前記光吸収色部は黒色メッキが施されていることを特徴とする。
【００１５】
請求項５記載の発明は、
請求項１〜４のいずれかに記載のＣＯＦ用オートハンドラであって、
前記プッシャーは前記ＣＯＦを平坦に密着保持することを特徴とする。
【００１６】
請求項６記載の発明は、
請求項１〜５のいずれかに記載のＣＯＦ用オートハンドラであって、
前記ＣＯＦは位置決めマークを有し、
前記ＣＯＦに対し前記プッシャーと反対側に配置された撮像装置により前記位置決めマークを含んで前記ＣＯＦ表面を撮像し、
その位置決めマークを含んだ画像を取り込んだ画像処理装置において、予め登録されている位置決めマークの画像データと現在の画像データの位置決めマークの位置関係を計算し、
その位置決めマークの位置の差分だけ前記プッシャーを動かして、前記ＣＯＦとその表面側に配置されたプローブカードの位置決めを行うことを特徴とする。
【００１７】
【発明の実施の形態】
以下、図を参照して本発明の実施の形態を詳細に説明する。
まず、図１及び図２において、１はＣＯＦ、２はプッシャー（測定部）、２ａはプッシャープレート、３はプローブカード、４はテストヘッド、４ａは穴部、５はカメラユニット（撮像装置）、７は照明装置、１１は供給リール、１２は収容リール、１３・１４はスプロケット、１５はパンチ（分類部）である。
本発明は、プッシャープレート２ａ及び照明装置７に変更を施したものである。
【００１８】
すなわち、プッシャー２には、ＣＯＦ１の種類に応じて製作されたプッシャープレート２ａが装着されている。
このプッシャープレート２ａのＣＯＦ１の裏面に平坦に密着する部分は、例えば、黒色メッキが施された黒色表面部２ｂとなっている。すなわち、この黒色表面部２ｂは、光の反射を防止する光吸収機能を有している。
【００１９】
そして、照明装置７は、プッシャー２に対しテストヘッド４の手前側に配置されており、例えば、ＬＥＤ照明のような散乱光を発する中央照明部７ａ及び側方照明部７ｂからなる。
これら中央照明部７ａ及び側方照明部７ｂは、図示のように、プローブカード３とテストヘッド４の間に配置され、プローブカード３に遮られない位置でＣＯＦ１を照射する。特に、中央照明部７ａの両側の側方照明部７ｂは、ＣＯＦ１の表面と照射がなす角が浅い角度（鋭角）で照射する配置となっている。
【００２０】
以上のようにＣＯＦ用オートハンドラにおいて、黒色表面部２ｂを有するプッシャープレート２ａと、ＣＯＦ１の表面と照射がなす角が鋭角に照射する側方照明部７ｂを有する照明装置７とを備えたことで、測定部（プッシャー）２でのＣＯＦ撮像時に以下の作用効果が得られる。
測定部（プッシャー）２において、プッシャープレート２ａの黒色表面部２ｂにより背面を平坦に密着保持されたＣＯＦ１が、照明装置７のＬＥＤ照明のような散乱光により照射された状態で、カメラユニット５により良好に撮像される。
【００２１】
すなわち、照明装置７の中央照明部７ａ及び側方照明部７ｂからそれぞれ照射された散乱光は、半透明のＣＯＦ１を通過してプッシャープレート２ａに達するが、その黒色表面部２ｂで吸収される。このため、プッシャープレート２ａ表面での反射光は、図３に矢印で示したように、ＣＯＦ１表面のレジスト１ｄ及び位置決めマーク１ｅでの反射光と同様、微小な反射光となる。
そして、側方照明部７ｂから照射された散乱光は、図３に矢印で示したように、ＣＯＦ１表面とプッシャープレート２ａ表面とで鋭角な斜め方向に抜け、プッシャープレート２ａ表面に対し直角方向のカメラユニット５には直接戻らない。
以上の結果、図３に小さな矢印で示したように、ＣＯＦ１表面の位置決めマーク１ｅで代表される光沢面で反射した散乱光のみがカメラユニット５に戻るだけとなる。
【００２２】
従って、カメラユニット５によりＣＯＦ１表面の位置決めマーク１ｅを含んで撮像し、その位置決めマーク１ｅを含んだ画像を図示しない画像処理装置に取り込んで、乱反射が生じない鮮明な画像が得られる。
その結果、画像処理装置において、予め登録されている位置決めマーク１ｅの画像データと現在の画像データの位置決めマーク１ｅの位置関係を計算後、その差分だけプッシャー２を動かしてプローブカード３とＣＯＦ１を正確に位置決めできる。また、同様に、ＣＯＦ１のテストパッド１ｃとプローブカード３のプローブの初期の位置合わせも正確にできる。
【００２３】
なお、プッシャープレート２ａの黒色表面部（光吸収色部）２ｂの形成、照明装置７の散乱光用の光源、その側方照明部７ｂの配置角度等については、実施形態に限らず任意であることは勿論である。
【００２４】
【発明の効果】
請求項１記載の発明によれば、ＣＯＦ背面に当接する面の光吸収色による黒色の表面部で照明光を吸収して、プッシャー表面での反射光を微小にできるため、光の反射量を押さえて安定したＣＯＦ画像の取り込みが可能になる。
請求項２記載の発明によれば、請求項１記載の発明により得られる効果に加え、ＣＯＦ表面とプッシャー表面で照明光を鋭角な斜め方向に反射させて、反射光を撮像装置に直接戻らなくできるため、光の反射量を押さえて安定したＣＯＦ画像の取り込みが可能になる。
請求項３記載の発明によれば、請求項２記載の発明により得られる効果に加え、撮像用照明装置による散乱光による照射により乱反射を防止して、より安定したＣＯＦ画像を撮像できる。
従って、本発明によれば、オートハンドラにおいて、乱反射が生じない鮮明なＣＯＦ画像を得て、プローブカードとＣＯＦを正確に位置決めできる。
【図面の簡単な説明】
【図１】本発明を適用した一例としてのＣＯＦ用オートハンドラと撮像装置及び照明装置の概略構成を正面から見た模式図である。
【図２】図１の測定部及び照明装置部分の拡大図である。
【図３】図１及び図２の照明装置による照明光の反射状態を示した図である。
【図４】ＣＯＦの一般な構成例を示した平面図である。
【図５】従来のＣＯＦ用オートハンドラと撮像装置及び照明装置の概略構成を正面から見た模式図である。
【図６】図５の照明装置による照明光の反射状態を示した図である。
【符号の説明】
１ ＣＯＦ
１ａ リード
１ｂ ＩＣチップ
１ｃ テストパッド
１ｄ レジスト
１ｅ 位置決めマーク
２ プッシャー（測定部）
２ａ プッシャープレート
２ｂ 黒色表面部（光吸収色部）
４ テストヘッド
４ａ 穴部
５ 撮像装置
７ 照明装置
７ａ 中央照明部
７ｂ 側方照明部
１１ 供給リール
１２ 収容リール
１５ パンチ（分類部）[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an auto handler that tests and classifies COF (Chip on film).
[0002]
[Prior art]
Similar to the well-known TAB (Tape Automated Bonding) auto handler, the COF auto handler transports IC devices mounted on a tape, and converts the IC devices into, for example, good products and defective products according to the classification signal from the IC tester. It is a device to classify.
Here, the COF has the following characteristics as compared with the conventional TAB.
(1) The tape thickness of TAB was 75 um or more, whereas COF is thin and translucent with a tape thickness of 40 um or less.
(2) In TAB, mounting from the back side of the pattern was the mainstream, whereas in COF, the IC chip mounting and the pattern surface are the same.
(3) In TAB, there was a short circuit in the folding window, whereas in COF, there was no folding window and there was no electrical short circuit on the back surface.
The COF having such a feature is used in, for example, a driving IC for an LCD (liquid crystal display).
[0003]
FIG. 4 shows a general configuration example of the COF, where 1 is a COF, 1a is a lead, 1b is an IC chip, 1c is a test pad, 1d is a resist, and 1e is a positioning mark.
In the COF 1, the IC chip 1b and the test pad 1c are electrically connected by the lead 1a, and a resist 1d and a positioning mark 1e for protecting the lead 1a and the IC chip 1b are formed around the IC chip 1b.
[0004]
FIG. 5 shows a schematic configuration of a conventional COF auto-handler, imaging device and illumination device from the front. 2 is a pusher (measurement unit), 2a is a pusher plate, 3 is a probe card, 4 is a test head, 4a Is a hole portion, 5 is a camera unit (imaging device), 6 is an illumination device, 11 is a supply reel, 12 is a receiving reel, 13 and 14 are sprockets, and 15 is a punch (classification portion).
More specifically, this COF autohandler transports COF 1 from a supply reel 11 to a measurement unit (pusher) 2 and a classification unit (punch) 15, transports it to a storage reel 12, and mounts an IC device (IC chip). 1b) is classified. For example, defective products are classified by a punching process using the punch 15.
In the vicinity of the supply reel 11 and the receiving reel 12, if the COF 1 sags more than a certain value, it is detected by an optical sensor (not shown), and the sprockets 13 and 14 are driven as necessary, so that the COF 1 sags more than a certain value. Removed.
[0005]
In the measurement unit (pusher) 2, the COF 1 is illuminated by the illumination device 6 without being blocked by the probe card 3, and the image is captured by the camera unit 5.
Here, the pusher plate 2a is in close contact with the back surface of the COF 1 and holds the COF 1 flat. The camera unit 5 and the illumination device 6 are disposed on the opposite side of the test head 4 with respect to the pusher 2, and are illuminated and imaged through the central hole 4 a of the test head 4. That is, the COF 1 irradiated by the illuminating device 6 by the camera unit 5 arranged so as to be substantially parallel to the COF 1 passes through the hole 4a in the center of the test head 4 and the positioning marks 1e, test pads 1c, leads on the COF 1 surface. 1a is imaged.
After imaging, an image processing apparatus (not shown) calculates the positional relationship between the image data of the registration mark 1e registered in advance and the positioning mark 1e of the current image data, moves the pusher 2 by the difference, and moves the probe card 3 And COF1 are positioned.
[0006]
[Problems to be solved by the invention]
However, since the translucent COF 1 transmits light during illumination, the light reflected by the front and back pusher plates 2a intersects, and irregular reflection occurs as shown in FIG. When this irregular reflection state is imaged, the pattern of COF1 is mixed with the surface of the pusher plate 2a on the back side, and cannot be confirmed visually.
Therefore, the specific pattern cannot be registered and detected even in the image processing apparatus.
[0007]
SUMMARY OF THE INVENTION An object of the present invention is to suppress the amount of light reflection during COF imaging in an auto handler, and further to prevent irregular reflection so that a stable COF image capable of image processing can be captured.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the invention described in claim 1
For example, as shown in FIGS.
The translucent COF 1 is transported from the supply reel 11 through the pusher 2 to the receiving reel 12, and is provided on the opposite side of the pusher 2 with respect to the COF 1, and includes an imaging illumination device 7 that irradiates the COF 1. In the COF auto handler, which is disposed on the opposite side and has the imaging device 5 that images the COF 1, images the COF surface by the imaging device 5, and moves the pusher 2 to position the probe card 3 and the COF 1.
Even when a floating portion is generated between the pusher 2 and the COF 1, in order to obtain a clear COF image , the surface of the pusher 2 that is in contact with the back surface of the COF 1 is placed on the imaging illumination device 7. The light-absorbing color portion 2b absorbs the light that has been irradiated through and passes through the COF1.
[0009]
According to the invention of claim 1, wherein, in the pusher of the automatic handler, since the illumination light at the time of imaging is absorbed by the surface portion of the black as the light absorption color of surface abutting the COF back reflected light at the pusher surface Is very small.
Accordingly, it is possible to capture a stable COF image capable of image processing while suppressing the amount of reflected light.
[0010]
The invention according to claim 2
An auto handler for COF according to claim 1,
The imaging illumination device 7 includes an illumination unit 7b having an acute angle formed by irradiation with the surface of the COF1.
[0011]
According to the second aspect of the present invention, since the illumination light having an acute angle of incidence of the imaging illumination apparatus according to claim 1, wherein the exit at an acute angle oblique direction in the COF surface and pusher surface, COF surface and the pusher surface The reflected light does not return directly to the imaging device.
Accordingly, it is possible to capture a stable COF image capable of image processing while suppressing the amount of reflected light.
[0012]
The invention described in claim 3
An auto handler for COF according to claim 2,
The imaging illumination device 7 irradiates scattered light.
[0013]
According to the invention described in claim 3, irregular reflection can be prevented by irradiation of scattered light by the imaging illumination device according to claim 2, and a more stable COF image can be captured.
[0014]
The invention according to claim 4
The auto handler for COF according to any one of claims 1 to 3 ,
The light absorbing color portion is black-plated .
[0015]
The invention according to claim 5
An auto handler for COF according to any one of claims 1 to 4 ,
The pusher is characterized in that the COF is held in close contact with the flat surface .
[0016]
The invention described in claim 6
A COF auto handler according to any one of claims 1 to 5 ,
The COF has a positioning mark,
The COF surface including the positioning mark is imaged by an imaging device arranged on the opposite side of the pusher with respect to the COF,
In the image processing apparatus that captures the image including the positioning mark, calculate the positional relationship between the registration mark image data registered in advance and the current image data positioning mark,
The pusher is moved by the difference between the positions of the positioning marks to position the COF and the probe card disposed on the surface thereof.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 and 2, 1 is a COF, 2 is a pusher (measurement unit), 2a is a pusher plate, 3 is a probe card, 4 is a test head, 4a is a hole, 5 is a camera unit (imaging device), 7 is an illumination device, 11 is a supply reel, 12 is a receiving reel, 13 and 14 are sprockets, and 15 is a punch (classification unit).
In the present invention, the pusher plate 2a and the lighting device 7 are modified.
[0018]
In other words, the pusher plate 2 a manufactured according to the type of the COF 1 is attached to the pusher 2.
The portion of the pusher plate 2a that is in close contact with the back surface of the COF 1 is, for example, a black surface portion 2b that is black-plated. That is, the black surface portion 2b has a light absorbing function for preventing light reflection.
[0019]
And the illuminating device 7 is arrange | positioned in front of the test head 4 with respect to the pusher 2, and consists of the center illumination part 7a and the side illumination part 7b which emit scattered light like LED illumination, for example.
The central illumination unit 7a and the side illumination unit 7b are arranged between the probe card 3 and the test head 4 and irradiate the COF 1 at a position not blocked by the probe card 3 as illustrated. In particular, the side illumination units 7b on both sides of the central illumination unit 7a are arranged to irradiate at a shallow angle (acute angle) between the surface of the COF 1 and the irradiation .
[0020]
As described above, the COF auto handler includes the pusher plate 2a having the black surface portion 2b and the illumination device 7 having the side illumination portion 7b that irradiates the surface of the COF 1 with an acute angle. The following functions and effects can be obtained at the time of COF imaging at the measurement unit (pusher) 2.
In the measurement unit (pusher) 2, the COF 1 whose back surface is flatly held tightly by the black surface portion 2 b of the pusher plate 2 a is irradiated by scattered light such as LED illumination of the illumination device 7, and is irradiated by the camera unit 5. Good image is taken.
[0021]
That is, scattered light emitted from the central illumination unit 7a and the side illumination unit 7b of the illumination device 7 passes through the translucent COF 1 and reaches the pusher plate 2a, but is absorbed by the black surface portion 2b. For this reason, the reflected light on the surface of the pusher plate 2a becomes a minute reflected light like the reflected light on the resist 1d and the positioning mark 1e on the surface of the COF 1 as indicated by arrows in FIG.
Then, as shown by the arrows in FIG. 3, the scattered light emitted from the side illumination unit 7b passes through the COF1 surface and the pusher plate 2a surface in an acute oblique direction, and is perpendicular to the pusher plate 2a surface. It does not return directly to the camera unit 5.
As a result, as shown by the small arrows in FIG. 3, only the scattered light reflected by the glossy surface represented by the positioning mark 1e on the surface of the COF 1 is returned to the camera unit 5.
[0022]
Accordingly, the camera unit 5 captures an image including the positioning mark 1e on the surface of the COF 1, and an image including the positioning mark 1e is taken into an image processing device (not shown), thereby obtaining a clear image free from irregular reflection.
As a result, in the image processing apparatus, after calculating the positional relationship between the image data of the registration mark 1e registered in advance and the positioning mark 1e of the current image data, the pusher 2 is moved by the difference and the probe card 3 and the COF 1 are accurately set. Can be positioned. Similarly, the initial alignment of the test pad 1c of the COF 1 and the probe of the probe card 3 can be accurately performed.
[0023]
In addition, about formation of the black surface part (light absorption color part) 2b of the pusher plate 2a, the light source for the scattered light of the illuminating device 7, the arrangement | positioning angle of the side illumination part 7b, etc., it is arbitrary. Of course.
[0024]
【The invention's effect】
According to the first aspect of the present invention, the illumination light is absorbed by the black surface portion of the light absorptive color of the surface abutting on the COF back surface, and the reflected light on the pusher surface can be made minute. A stable COF image can be captured by pressing.
According to the second aspect of the invention, in addition to the effect obtained by the first aspect of the invention , the reflected light is not returned directly to the imaging device by reflecting the illumination light in an acute oblique direction on the COF surface and the pusher surface. Therefore, it is possible to capture a stable COF image while suppressing the amount of reflected light.
According to the invention described in claim 3, in addition to the effect obtained by the invention described in claim 2, irregular reflection can be prevented by irradiation with scattered light from the imaging illumination device, and a more stable COF image can be captured.
Therefore, according to the present invention, the auto handler can obtain a clear COF image in which irregular reflection does not occur, and can accurately position the probe card and the COF.
[Brief description of the drawings]
FIG. 1 is a schematic view of a schematic configuration of a COF autohandler, an imaging apparatus, and an illumination apparatus as an example to which the present invention is applied as viewed from the front.
FIG. 2 is an enlarged view of a measurement unit and a lighting device portion of FIG.
3 is a view showing a reflection state of illumination light by the illumination device of FIGS. 1 and 2. FIG.
FIG. 4 is a plan view showing a general configuration example of a COF.
FIG. 5 is a schematic view of a schematic configuration of a conventional COF auto handler, an imaging device, and an illumination device as viewed from the front.
6 is a view showing a reflection state of illumination light by the illumination device of FIG. 5. FIG.
[Explanation of symbols]
1 COF
1a Lead 1b IC chip 1c Test pad 1d Resist 1e Positioning mark 2 Pusher (measurement part)
2a Pusher plate 2b Black surface part (light absorption color part)
4 Test Head 4a Hole 5 Imaging Device 7 Illumination Device 7a Central Illumination Unit 7b Side Illumination Unit 11 Supply Reel 12 Storage Reel 15 Punch (Classification Unit)

Claims (6)

半透明のＣＯＦを供給リールからプッシャーを経て収容リールまで搬送し、ＣＯＦに対しプッシャーと反対側に配置され、ＣＯＦを照射する撮像用照明装置を備え、ＣＯＦに対しプッシャーと反対側に配置され、ＣＯＦを撮像する撮像装置を有し、撮像装置によりＣＯＦ表面を撮像し、プッシャーを動かしてプローブカードとＣＯＦを位置決めするＣＯＦ用オートハンドラにおいて、
前記プッシャーと前記ＣＯＦとの間に浮き部分が生じた場合においても、鮮明なＣＯＦ画像が得られるようにするために、前記プッシャーの前記ＣＯＦの背面に当接する面を、前記撮像用照明装置から照射され、ＣＯＦを通過した光を吸収する光吸収色部としたことを特徴とするＣＯＦ用オートハンドラ。The translucent COF is transported from the supply reel to the receiving reel through the pusher, and is disposed on the opposite side of the pusher with respect to the COF, and includes an imaging illumination device that irradiates the COF, and is disposed on the opposite side of the pusher with respect to the COF . In a COF auto handler that has an imaging device that images a COF, images the surface of the COF by the imaging device, and moves the pusher to position the probe card and the COF.
Even when a floating portion is generated between the pusher and the COF, in order to obtain a clear COF image, the surface of the pusher that is in contact with the back surface of the COF is separated from the imaging illumination device. An auto handler for COF, characterized in that a light-absorbing color portion that absorbs light that has been irradiated and passed through the COF is formed. 前記撮像用照明装置は前記ＣＯＦの表面と照射がなす角が鋭角な照明部を有することを特徴とする請求項１記載のＣＯＦ用オートハンドラ。2. The COF auto handler according to claim 1, wherein the imaging illumination device includes an illumination unit that forms an acute angle with the surface of the COF. 前記撮像用照明装置は散乱光を照射することを特徴とする請求項２記載のＣＯＦ用オートハンドラ。  3. The COF autohandler according to claim 2, wherein the imaging illumination device irradiates scattered light. 前記光吸収色部は黒色メッキが施されていることを特徴とする請求項１〜３のいずれかに記載のＣＯＦ用オードハンドラ。  The COF aud handler according to any one of claims 1 to 3, wherein the light absorption color portion is black-plated. 前記プッシャーは前記ＣＯＦを平坦に密着保持することを特徴とする請求項１〜４のいずれかに記載のＣＯＦ用オートハンドラ。  The COF autohandler according to any one of claims 1 to 4, wherein the pusher holds the COF flatly and closely. 前記ＣＯＦは位置決めマークを有し、
前記ＣＯＦに対し前記プッシャーと反対側に配置された撮像装置により前記位置決めマークを含んで前記ＣＯＦ表面を撮像し、
その位置決めマークを含んだ画像を取り込んだ画像処理装置において、予め登録されている位置決めマークの画像データと現在の画像データの位置決めマークの位置関係を計算し、
その位置決めマークの位置の差分だけ前記プッシャーを動かして、前記ＣＯＦとその表面側に配置されたプローブカードの位置決めを行うことを特徴とする請求項１〜５のいずれかに記載のＣＯＦ用オートハンドラ。The COF has a positioning mark,
The COF surface including the positioning mark is imaged by an imaging device arranged on the opposite side of the pusher with respect to the COF,
In the image processing apparatus that captures the image including the positioning mark, calculate the positional relationship between the registration mark image data registered in advance and the current image data positioning mark,
6. The COF auto-handler according to claim 1, wherein the pusher is moved by the difference between the positions of the positioning marks to position the COF and the probe card disposed on the surface thereof. .
JP2001020478A 2001-01-29 2001-01-29 Auto handler for COF Expired - Lifetime JP4380926B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001020478A JP4380926B2 (en) 2001-01-29 2001-01-29 Auto handler for COF
TW090131729A TW571376B (en) 2001-01-29 2001-12-20 Auto handler for COF and lighting system and method for COF image pickup
KR1020020003530A KR100622791B1 (en) 2001-01-29 2002-01-22 Autohandler for cof and lighting device for cof photographing and method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001020478A JP4380926B2 (en) 2001-01-29 2001-01-29 Auto handler for COF

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JP4380926B2 true JP4380926B2 (en) 2009-12-09

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Publication number Priority date Publication date Assignee Title
KR100751584B1 (en) * 2003-02-21 2007-08-27 니혼 하츠쵸 가부시키가이샤 Chip-mounting tape inspecting method and probe unit used for inspection
JPWO2008132934A1 (en) * 2007-04-19 2010-07-22 株式会社アドバンテスト TCP handling equipment
WO2008132935A1 (en) * 2007-04-19 2008-11-06 Advantest Corporation Tcp handling apparatus

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