JP4365721B2 - 電子顕微鏡 - Google Patents
電子顕微鏡 Download PDFInfo
- Publication number
- JP4365721B2 JP4365721B2 JP2004114513A JP2004114513A JP4365721B2 JP 4365721 B2 JP4365721 B2 JP 4365721B2 JP 2004114513 A JP2004114513 A JP 2004114513A JP 2004114513 A JP2004114513 A JP 2004114513A JP 4365721 B2 JP4365721 B2 JP 4365721B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- image
- objective
- energy filter
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000004075 alteration Effects 0.000 description 8
- 238000009826 distribution Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000001000 micrograph Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/05—Arrangements for energy or mass analysis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/25—Tubes for localised analysis using electron or ion beams
- H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
- H01J2237/2516—Secondary particles mass or energy spectrometry
- H01J2237/2522—Secondary particles mass or energy spectrometry of electrons (ESCA, XPS)
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Lenses (AREA)
Description
Claims (4)
- 試料の拡大像を生成する主対物レンズと、
対物ミニレンズと、
中間レンズ群と、
エネルギーフィルタと、
を備え、
前記対物ミニレンズは、前記主対物レンズによって生成された拡大像を縮小すると共に、前記中間レンズ群の前方にクロスオーバを形成し、
前記中間レンズ群は、前記対物ミニレンズによって縮小された像に基づいてエネルギーフィルタの入射窓面にクロスオーバ像を生成すること
を特徴とする電子顕微鏡。 - 前記エネルギーフィルタの出力像を最終像面に結像する投影レンズ群を備えることを特徴とする請求項1記載の電子顕微鏡。
- 前記主対物レンズの生成した拡大像は、前記主対物レンズと前記対物ミニレンズとの間にクロスオーバを形成して生成されたことを特徴とする請求項1又は2のいずれかに記載の電子顕微鏡。
- 前記中間レンズ群の直前であって前記対物ミニレンズによって形成される像のクロスオーバ位置に視野絞りを設けることを特徴とする請求項1乃至3のいずれかに記載の電子顕微鏡。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004114513A JP4365721B2 (ja) | 2004-04-08 | 2004-04-08 | 電子顕微鏡 |
DE602005023370T DE602005023370D1 (de) | 2004-04-08 | 2005-04-08 | Elektronenmikroskop |
US11/102,483 US7977630B2 (en) | 2004-04-08 | 2005-04-08 | Electron microscope |
EP05252228A EP1585165B1 (en) | 2004-04-08 | 2005-04-08 | Electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004114513A JP4365721B2 (ja) | 2004-04-08 | 2004-04-08 | 電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005302438A JP2005302438A (ja) | 2005-10-27 |
JP4365721B2 true JP4365721B2 (ja) | 2009-11-18 |
Family
ID=34909525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004114513A Expired - Fee Related JP4365721B2 (ja) | 2004-04-08 | 2004-04-08 | 電子顕微鏡 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7977630B2 (ja) |
EP (1) | EP1585165B1 (ja) |
JP (1) | JP4365721B2 (ja) |
DE (1) | DE602005023370D1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8598526B2 (en) * | 2010-03-01 | 2013-12-03 | Carl Zeiss Microscopy Gmbh | Transmission electron microscope |
JP5934513B2 (ja) * | 2012-02-09 | 2016-06-15 | 日本電子株式会社 | 透過電子顕微鏡 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149363A (ja) | 1984-08-16 | 1986-03-11 | Internatl Precision Inc | 電子顕微鏡の結像系 |
US4789787A (en) * | 1987-05-27 | 1988-12-06 | Microbeam Inc. | Wien filter design |
US5414261A (en) * | 1993-07-01 | 1995-05-09 | The Regents Of The University Of California | Enhanced imaging mode for transmission electron microscopy |
JP3790646B2 (ja) * | 1999-09-01 | 2006-06-28 | 日本電子株式会社 | 低エネルギー反射電子顕微鏡 |
US6720558B2 (en) * | 2000-02-02 | 2004-04-13 | Jeol Ltd. | Transmission electron microscope equipped with energy filter |
JP3814149B2 (ja) * | 2000-02-02 | 2006-08-23 | 日本電子株式会社 | エネルギーフィルタを備えた透過型電子顕微鏡 |
US6770887B2 (en) * | 2002-07-08 | 2004-08-03 | Ondrej L. Krivanek | Aberration-corrected charged-particle optical apparatus |
-
2004
- 2004-04-08 JP JP2004114513A patent/JP4365721B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-08 EP EP05252228A patent/EP1585165B1/en active Active
- 2005-04-08 DE DE602005023370T patent/DE602005023370D1/de active Active
- 2005-04-08 US US11/102,483 patent/US7977630B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP1585165A2 (en) | 2005-10-12 |
US20050242284A1 (en) | 2005-11-03 |
EP1585165A3 (en) | 2008-03-12 |
US7977630B2 (en) | 2011-07-12 |
DE602005023370D1 (de) | 2010-10-21 |
JP2005302438A (ja) | 2005-10-27 |
EP1585165B1 (en) | 2010-09-08 |
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