JP4345071B2 - 積層セラミックコンデンサ、及び該積層セラミックコンデンサの製造方法 - Google Patents
積層セラミックコンデンサ、及び該積層セラミックコンデンサの製造方法 Download PDFInfo
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- 239000003985 ceramic capacitor Substances 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000919 ceramic Substances 0.000 claims description 107
- 239000002245 particle Substances 0.000 claims description 86
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 27
- 238000010304 firing Methods 0.000 claims description 25
- 239000012298 atmosphere Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 19
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- 239000001301 oxygen Substances 0.000 claims description 19
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 229910052748 manganese Inorganic materials 0.000 claims description 16
- 229910052712 strontium Inorganic materials 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 6
- 238000011282 treatment Methods 0.000 claims description 6
- 229910052788 barium Inorganic materials 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 230000006866 deterioration Effects 0.000 description 14
- 239000002994 raw material Substances 0.000 description 11
- 229910002480 Cu-O Inorganic materials 0.000 description 10
- 238000009413 insulation Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910002482 Cu–Ni Inorganic materials 0.000 description 1
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
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Description
2 内部電極
3a 外部電極
3b 外部電極
Claims (7)
- CaZrO3系化合物を主成分とする主相粒子と少なくともMnを含有した二次相粒子とを含むセラミック素体と、該セラミック素体に埋設されたCuを主成分とする内部電極と、前記セラミック素体の両端部に形成されて前記内部電極の一方の端部と電気的に接続された外部電極とを備えた積層セラミックコンデンサにおいて、
Mn及びSiが、前記セラミック素体中で前記主成分100モル部に対し、それぞれ2モル部以上、及び0.69モル部以上含有されると共に、前記セラミック素体の断面における前記二次相粒子の占める面積率が、0.1%以上であり、
かつ、前記二次相粒子中の粒径が0.1μm以上の粒子のうち、67%以上がCu及びSiを含んでいることを特徴とする積層セラミックコンデンサ。 - 前記二次相粒子中の粒径が0.1μm以上の粒子のうち、85%以上がCu及びSiを含んでいることを特徴とする請求項1記載の積層セラミックコンデンサ。
- 前記CaZrO3系化合物は、Caの一部がSr及びBaで置換されZrの一部がTiで置換されていることを特徴とする請求項1又は請求項2記載の積層セラミックコンデンサ。
- 前記CaZrO3系化合物は、一般式〔(Ca1-a-bSraBab)m(Zr1-cTic)O3〕(ただし、0≦a≦0.45、0≦b≦0.10、0≦c≦0.10、0.98≦m≦1.02)で表される複合酸化物であることを特徴とする請求項1乃至請求項3のいずれかに記載の積層セラミックコンデンサ。
- 前記セラミック素体が、Mg、Ca、Sr、Ba、Li、B、Al、及びTiから選択された少なくとも1種の成分を含有していることを特徴とする請求項1乃至請求項4のいずれかに記載の積層セラミックコンデンサ。
- CaZrO3系化合物からなる主成分に副成分として少なくともMn及びSiを含有した化合物を、前記Mn及び前記Siが前記主成分100モル部に対しそれぞれ2モル部以上及び0.69モル部以上となるように添加してセラミックグリーンシートを作製し、Cuを主成分とする内部電極用導電性ペーストを前記セラミックグリーンシートの表面に塗布して導電パターンを形成し、該導電パターンの形成されたセラミックグリーンシートを複数枚積層してセラミック積層体を形成した後、焼成処理を施してセラミック素体を形成し、該セラミック素体の両端部に外部電極用導電性ペーストを塗布して焼付け処理を施し、その後、酸素分圧が10-8.5MPa以下の還元雰囲気下、700℃以上の温度で熱処理を行うことを特徴とする積層セラミックコンデンサの製造方法。
- CaZrO3系化合物からなる主成分に副成分として少なくともMn及びSiを含有した化合物を、前記Mn及び前記Siが前記主成分100モル部に対しそれぞれ2モル部以上及び0.69モル部以上となるように添加してセラミックグリーンシートを作製し、Cuを主成分とする内部電極用導電性ペーストを前記セラミックグリーンシートの表面に塗布して導電パターンを形成し、該導電パターンの形成されたセラミックグリーンシートを複数枚積層してセラミック積層体を形成した後、該セラミック積層体の両端部に外部電極用導電性ペーストを塗布し、次いで焼成処理を施し、その後、酸素分圧が10-8.5MPa以下の還元雰囲気下、700℃以上の温度で熱処理を行うことを特徴とする積層セラミックコンデンサの製造方法。
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JP2012059742A (ja) * | 2010-09-06 | 2012-03-22 | Murata Mfg Co Ltd | 積層セラミックコンデンサ |
JP5751259B2 (ja) * | 2011-01-21 | 2015-07-22 | 株式会社村田製作所 | 積層セラミックコンデンサおよび積層セラミックコンデンサの製造方法 |
JP5478672B2 (ja) | 2012-06-27 | 2014-04-23 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
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JP7306251B2 (ja) * | 2019-12-12 | 2023-07-11 | Tdk株式会社 | 誘電体組成物および電子部品 |
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