JP4324617B2 - スパッタ成膜方法及びスパッタ成膜装置 - Google Patents
スパッタ成膜方法及びスパッタ成膜装置 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 51
- 238000004544 sputter deposition Methods 0.000 title claims description 36
- 239000011572 manganese Substances 0.000 claims description 78
- 238000012545 processing Methods 0.000 claims description 71
- 229910052751 metal Inorganic materials 0.000 claims description 64
- 239000002184 metal Substances 0.000 claims description 64
- 239000000956 alloy Substances 0.000 claims description 53
- 229910045601 alloy Inorganic materials 0.000 claims description 53
- 239000010949 copper Substances 0.000 claims description 50
- 239000000654 additive Substances 0.000 claims description 22
- 230000000996 additive effect Effects 0.000 claims description 22
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 229910052748 manganese Inorganic materials 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 5
- 239000002923 metal particle Substances 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 34
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- 230000015572 biosynthetic process Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 230000006698 induction Effects 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910016978 MnOx Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- -1 or in other words Substances 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
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- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
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Description
本発明の他の目的は、スパッタにより被処理体上に合金層を形成するにあたり、合金層の添加金属の濃度を容易にコントロールすることのできる技術を提供することである。
前記処理容器内にプラズマ発生用のガスを供給すると共にこのガスに電力を供給してプラズマ化し、そのプラズマによりスパッタされた金属ターゲットの粒子により第1の合金膜を被処理体に成膜する第1の成膜工程と、
この第1の成膜工程とは処理容器内の圧力及び前記電力の少なくとも一つを異ならせてプラズマを発生させ、そのプラズマによりスパッタされた前記金属ターゲットの粒子により、添加金属の濃度が第1の合金膜の添加金属の濃度よりも低い第2の合金膜を第1の合金膜に積層する第2の成膜工程と、を含むことを特徴とする。
第1の合金膜と処理容器内の圧力及び電力を含む各パラメータの値とを対応付けると共に添加金属の濃度が第1の合金膜の添加金属の濃度よりも低い第2の合金膜と処理容器内の圧力及び電力を含む各パラメータの値とを対応付け、第1の合金膜及び第2の合金膜の間で処理容器内の圧力及び電力のうちの少なくとも一つが互いに異なるデータベースを記憶する記憶部と、
前記第1の合金膜及び第2の合金膜に応じたパラメータの値を前記データベースから読み出し、読み出したパラメータ値に基づいて第1の合金膜及び第2の合金膜がこの順でスパッタ成膜されるように制御信号を出力する制御部と、を備えたことを特徴とする。
この例においては、オペレータがデータベース38に記憶された膜種1〜膜種nの中の1つを選択して、その膜種に対応する圧力、各電力値のパラメータが読み出されて、それらのパラメータに基づいて成膜が行われる。このような場合、処理容器11内の金属ターゲットを異なる添加金属濃度を有するターゲットに変更しなくてもよいため、所望の添加金属濃度を有する合金膜の成膜を容易に行うことができる。
先ず2原子%のMnを含むCuMnターゲット26を備えた既述のCuMnスパッタ成膜装置1により、直径300mmのSiO2からなる1枚のウエハWに、処理容器11内の圧力を12Pa(90mTorr)にして既述の実施形態の手順に従って処理を行い、膜厚50nmのCuMn膜を成膜してサンプル1−1とした。続いて処理容器11内の圧力を0.67Pa(5mTorr)にした他はサンプル1−1と同じ処理条件で成膜を行い、サンプル1−2を作成した。これらサンプル1−1、1−2について二次イオン質量分析計(SIMS)により、膜の厚さ方向におけるMn、Cuの濃度について夫々測定した
続いて処理容器内の圧力、高周波電源の電力、可変直流電源の電力が及ぼす影響を調べるために、これらのパラメータを変更して成膜を行い、成膜されたCuMn膜を評価した。具体的に、先ず6原子%のMnを含むCuMnターゲット26を備えた既述のCuMnスパッタ成膜装置1により、直径300mmのSiO2からなるウエハWに、処理容器11内の圧力を1.33×103Pa(1.0×104mTorr)、可変直流電源27の電力を10kW、プラズマ発生用の高周波電源24の電力を6kWとして既述の実施形態の手順に従って処理を行い、膜厚50nmのCuMn膜を成膜してサンプル2−1とした。続いて処理容器11内の圧力を0.133Pa(1.0mTorr)にした他はサンプル2−1と同じ処理条件でCuMn膜の成膜を行い、サンプル2−2を作成し、また高周波電源24の電力を0.1kW(100W)とした他はサンプル2−1と同じ処理条件で成膜してサンプル2−3を作成した。また可変直流電源27の電力を20kWとした他は、サンプル2−1と同様の処理条件で成膜を行ったものをサンプル2−4、可変直流電源の電力を1kWとした他はサンプル2−1と同様の処理条件で成膜したものをサンプル2−5とした。下記の表1は、各サンプルの処理条件をまとめて示したものである。そしてサンプル2−1〜2−5のCuMn膜について抵抗値を測定した
SIMSにより、上記のサンプル2−1〜2−5について膜の厚さ方向におけるMn、Cu、Oの濃度について夫々測定した。図11は、SIMSによるMnの濃度の測定結果を示したものであり、縦軸はMn濃度を、横軸はCuMn膜表面からの深さを夫々示している。グラフ中においてサンプル2−1は細い実線、サンプル2−2は太い実線、サンプル2−3は一点鎖線、サンプル2−4は二点鎖線、サンプル2−5は点線で夫々示している。
11 処理容器
15 ガス制御部
12 プラズマ発生源
26 CuMnターゲット
27 可変直流電源
30 制御部
50 CuMn膜
51 下層膜
52 上層膜
Claims (8)
- 添加金属と主金属とを含む合金からなる金属ターゲットを備えた処理容器内に被処理体を搬入する工程と、
前記処理容器内にプラズマ発生用のガスを供給すると共にこのガスに電力を供給してプラズマ化し、そのプラズマによりスパッタされた金属ターゲットの粒子により第1の合金膜を被処理体に成膜する第1の成膜工程と、
この第1の成膜工程とは処理容器内の圧力及び前記電力の少なくとも一つを異ならせてプラズマを発生させ、そのプラズマによりスパッタされた前記金属ターゲットの粒子により、添加金属の濃度が第1の合金膜の添加金属の濃度よりも低い第2の合金膜を第1の合金膜に積層する第2の成膜工程と、を含むことを特徴とするスパッタ成膜方法。 - 前記第1成膜工程及び第2の成膜工程は、金属ターゲットにプラズマ中のイオンを引き込むためのバイアス電圧を印加して行われ、
前記第2の成膜工程は、前記圧力、前記電力及び前記バイアス電圧の少なくとも一つを前記第1の成膜工程と異ならせることを特徴とする請求項1記載のスパッタ成膜方法。 - バイアス電圧は1kW〜20kWの範囲に含まれる負の直流電力であることを特徴とする請求項2記載のスパッタ成膜方法。
- 前記電力は前記高周波電源から供給される0.1kW〜6kWの範囲に含まれる電力であることを特徴とする請求項1ないし3のいずれか一に記載のスパッタ成膜方法。
- 前記処理容器内の圧力値は0.133Pa〜1.33×103Paの範囲に含まれることを特徴とする請求項1ないし4のいずれか一に記載のスパッタ成膜方法。
- 前記主金属は銅であり、添加金属はマンガンであることを特徴とする請求項1ないし5のいずれか一に記載のスパッタ成膜方法。
- 添加金属と主金属とを含む合金からなる金属ターゲットを備えた処理容器内にプラズマ発生用のガスを供給すると共にこのガスに電力を供給してプラズマ化し、そのプラズマによりスパッタされた金属ターゲットの粒子により合金膜を被処理体に成膜する装置において、
第1の合金膜と処理容器内の圧力及び電力を含む各パラメータの値とを対応付けると共に添加金属の濃度が第1の合金膜の添加金属の濃度よりも低い第2の合金膜と処理容器内の圧力及び電力を含む各パラメータの値とを対応付け、第1の合金膜及び第2の合金膜の間で処理容器内の圧力及び電力のうちの少なくとも一つが互いに異なるデータベースを記憶する記憶部と、
前記第1の合金膜及び第2の合金膜に応じたパラメータの値を前記データベースから読み出し、読み出したパラメータ値に基づいて第1の合金膜及び第2の合金膜がこの順でスパッタ成膜されるように制御信号を出力する制御部と、を備えたことを特徴とするスパッタ成膜装置。 - 前記金属ターゲットには、プラズマ中のイオンを引き込むためのバイアス電圧を印加する電源が接続され、
前記データベースは、前記第1の合金膜及び第2の合金膜の間で前記圧力、前記電力及び前記バイアス電圧の少なくとも一つが互いに異なることを特徴とする請求項7記載のスパッタ成膜装置。
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