JP4324504B2 - Defect detection method and apparatus for transparent plate - Google Patents
Defect detection method and apparatus for transparent plate Download PDFInfo
- Publication number
- JP4324504B2 JP4324504B2 JP2004114674A JP2004114674A JP4324504B2 JP 4324504 B2 JP4324504 B2 JP 4324504B2 JP 2004114674 A JP2004114674 A JP 2004114674A JP 2004114674 A JP2004114674 A JP 2004114674A JP 4324504 B2 JP4324504 B2 JP 4324504B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent plate
- light
- defect
- detection method
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
本発明は、板ガラスなどの透明板状体に生ずる欠陥の検出方法および欠陥の検出装置に関する。 The present invention relates to a detection method and a detection device for a defect occurring in a transparent plate-like body such as a plate glass.
ガラスなどの透明板状体の欠陥は、表面のキズや汚れ等の表面に存在する欠陥と、板状体中の異物等の欠陥とがあり、板状体が透明であるため、例えば、特許文献1のように、透明板状体の面に対して垂直に近い方向と平行に近い方向とから透明板状体を照明し、欠陥をCCDカメラで検出するといった光学的な手段が多用されてきた。 The defects of transparent plate-like bodies such as glass include defects existing on the surface such as scratches and dirt on the surface and defects such as foreign matter in the plate-like body, and the plate-like body is transparent. As described in Reference 1, optical means such as illuminating the transparent plate from a direction close to perpendicular to the surface of the transparent plate and a direction parallel to it and detecting defects with a CCD camera have been frequently used. It was.
特許文献1に示す光学的な方法では、透明板状体の照明に多くの光源が必要である。さらに、透明板状体の表面のキズや、透明板状体中の異物や泡などの欠陥と、透明板状体の表面の汚れや表面に付着したほこりなどの異物との判別ができず、透明板状体を洗浄した後でないと検査が困難であった。すなわち、洗浄しないで検査を行った場合、単に汚れているだけの透明板状体を製品とせずに捨ててしまう可能性が生じてしまう。 In the optical method shown in Patent Document 1, many light sources are required for illumination of the transparent plate-like body. In addition, it is not possible to distinguish between scratches on the surface of the transparent plate-like body, defects such as foreign matter and bubbles in the transparent plate-like body, and foreign matters such as dirt on the surface of the transparent plate-like body and dust attached to the surface, Inspection was difficult only after the transparent plate was washed. That is, when the inspection is performed without cleaning, there is a possibility that the transparent plate-like body that is simply soiled is discarded as a product.
従って、透明板状体の表面の汚れやほこりなど洗浄によって除去可能な欠陥は、キズや異物などの洗浄しても無くならない欠陥と区別するため、ガラス等の透明板状体は、洗浄を行った後、透明板状体を清浄に保つことによって、埃や汚れの影響を受けずに欠陥のみを検出していた。あるいは、汚れたままでも検出可能な特定の欠陥のみに的を絞って検査を実施する等の方法を採用する必要があった。 Therefore, in order to distinguish defects that can be removed by cleaning such as dirt and dust on the surface of the transparent plate from defects that cannot be removed by cleaning such as scratches and foreign matter, the transparent plate such as glass must be cleaned. After that, only the defect was detected without being affected by dust and dirt by keeping the transparent plate-like body clean. Alternatively, it is necessary to adopt a method such as inspecting only a specific defect that can be detected even when it is dirty.
前述するような洗浄によって除去できる汚れ等とキズや異物などの欠陥を区別して検出する方法が特許文献2に、開示されている。しかしながら、この方法では、表面にあるほこりや汚れと表面なるキズとを明確に区別することが困難であり、欠陥の検出を確実に行うためには検出する透明板状体を洗浄する必要があった。 Patent Document 2 discloses a method for distinguishing and detecting stains that can be removed by cleaning as described above and defects such as scratches and foreign matters. However, with this method, it is difficult to clearly distinguish between dust and dirt on the surface and scratches on the surface, and it is necessary to clean the transparent plate-like body to be detected in order to reliably detect defects. It was.
特許文献3にエッジから光を透明板状体中に伝播させる方法が開示されているが、吸収の大きいガラスでは透明板状体の中心部までに光が届かず、また、厚みの小さい透明板状体ではエッジから光を入射することが困難であった。
従来技術の、板状体を透過する光と表面で反射する光とを用いる欠陥の検出方法では、表面の欠陥と汚れの区別が困難であった。 In the conventional defect detection method using light transmitted through the plate and light reflected from the surface, it is difficult to distinguish surface defects from dirt.
本発明は、汚れと欠陥とを容易に区別することができる欠陥検出方法を提供するものである。 The present invention provides a defect detection method capable of easily distinguishing between dirt and defects.
本発明の欠陥検出方法およびその検出装置は、ガラスの清浄度に関わらず、欠陥のみを効率良く検出する方法として、欠陥を検出するため の受光素子に入力した信号の中でも、欠陥のみに輝度差が生じ、埃、汚れには輝度差が生じ ない検査方法を提供するものである。 The defect detection method and the detection apparatus according to the present invention is a method for efficiently detecting only defects regardless of the cleanliness of the glass. Among the signals input to the light receiving element for detecting defects, the luminance difference is only detected in the defects. This provides an inspection method that does not cause a difference in brightness between dust and dirt.
具体的には、ガラスに照射した光をガラス内部に導き、これを全反射させることによって、 ガラス表面及び内部に存在する欠陥のみを光らせ、それに対してガラス表面に付着した埃、 汚れは光らない方法とすることによって、ガラスの清浄度の影響を受けずに、欠陥のみを確 実に検出する方法を採用する。 Specifically, the light irradiated to the glass is guided to the inside of the glass and is totally reflected, so that only the glass surface and the defects existing in the glass are shined, and the dust and dirt adhering to the glass surface are not shining. By adopting this method, we will adopt a method that reliably detects only defects without being affected by the cleanliness of the glass.
すなわち、本発明は、透明板状体を照明して透明板状体の欠陥を検出する欠陥検出方法において、該透明板状体の表面に、照明光を散乱させる散乱手段を設け、該散乱手段が、透明板状体の表面に付着させた液滴、あるいは、樹脂中に光を散乱させる粒子を分散させて成形されているローラー状の散乱反射体であり、該散乱手段を照明し、透明板状体中を全反射して伝搬する該散乱させた照明光で透明板状体の欠陥を照明することを特徴とする欠陥検出方法である。 That is, the present invention provides a defect detection method for detecting defects in transparent plate-shaped object by illuminating the transparent plate-shaped body, the surface of the transparent plate-shaped object is provided with a scattering device for scattering illumination light, scattered means Is a roller-like scattering reflector formed by dispersing droplets attached to the surface of a transparent plate-like body or particles that scatter light in a resin, and illuminates the scattering means to make it transparent A defect detection method characterized by illuminating a defect in a transparent plate with the scattered illumination light that propagates by being totally reflected in the plate.
また、本発明は、前記欠陥検出方法に用いる欠陥検出装置であって、透明板状体を照明する光源と、液滴を透明板状体に付着させるための噴霧器と、欠陥からの光を検出するためのCCDカメラでなることを特徴とする欠陥検出装置である。 The present invention is also a defect detection apparatus used in the defect detection method, wherein the light source illuminates the transparent plate, a sprayer for attaching droplets to the transparent plate, and light from the defect is detected. It is a defect detection apparatus characterized by comprising a CCD camera.
また、本発明は、前記欠陥検出方法に用いる欠陥検出装置であって、透明板状体を照明する光源と、樹脂中に光を散乱させる粒子を分散させて成形されているローラー状の散乱反射体と、欠陥からの光を検出するためのCCDカメラとでなることを特徴とする欠陥検出装置である。 The present invention also provides a defect detection apparatus used in the defect detection method, wherein a light source that illuminates a transparent plate-like body and a roller-like scattering reflection formed by dispersing particles that scatter light in a resin. A defect detection apparatus comprising a body and a CCD camera for detecting light from the defect.
本発明の透明板の欠陥検出方法およびその装置は、表面の汚れやほこりなどの洗浄によって除去できる欠陥と、透明板状体中の異物や表面のキズなどの除去できない欠陥とを区別できる欠陥検出方法およびその装置を提供し、検出前に透明板状体を洗浄する工程を省き、さらには、欠陥の検出を、清浄な雰囲気が保たれている場所で行う必要性がないので、作業性の向上と製造コストの低減となる。 The transparent plate defect detection method and apparatus according to the present invention can detect defects that can be removed by cleaning such as dirt and dust on the surface and defects that cannot be removed such as foreign matter in the transparent plate and scratches on the surface. A method and an apparatus thereof are provided, the step of cleaning the transparent plate-like body before detection is omitted, and furthermore, there is no need to detect defects in a place where a clean atmosphere is maintained. Improvement and reduction of manufacturing cost.
本発明の透明板状体の欠点検出方法は、特に限定するものではないが、例えば、図1に示すような光学系で、透明板状体の欠点を検出する装置に適用することができる。図1に示す光学系において、照明器1は、図2示すように、透明板状体3をライン状に照明することが望ましい。帯状の照明範囲に対し、CCDカメラ4でライン状の範囲を撮影する。
照明器1にはハロゲンランプ、キセノンランプ、高圧水銀灯、ナトリウムランプあるいはLEDランプなどの光源を用い、光源の光を遮光したり、板状あるいはロッド状の光ガイドを用いて、透明板状体3を、図2に示すようにライン状に照明する。透明板状体3に入射する光は散乱の少ない光を用いることが望ましいが、磨りガラスなどのディフューザーを用いたり、照明光を光ガイドで照射して、光ガイドの射出側に凹凸処理をして散乱光にしてもよい。また光源に棒状の蛍光灯を用いることもできる。
The defect detection method of the transparent plate-shaped body of the present invention is not particularly limited, but can be applied to, for example, an apparatus for detecting defects of the transparent plate-shaped body with an optical system as shown in FIG. In the optical system shown in FIG. 1, the illuminator 1 desirably illuminates the transparent plate-like body 3 in a line shape as shown in FIG. A linear range is photographed by the CCD camera 4 with respect to the strip-shaped illumination range.
The illuminator 1 uses a light source such as a halogen lamp, a xenon lamp, a high-pressure mercury lamp, a sodium lamp, or an LED lamp. Are illuminated in a line as shown in FIG. Although it is desirable to use light with little scattering as the light incident on the transparent plate-like body 3, a diffuser such as frosted glass is used, or illumination light is irradiated with a light guide, and unevenness processing is performed on the exit side of the light guide. And may be scattered light. A rod-like fluorescent lamp can also be used as the light source.
全反射光6は、臨界角θ以上の角度で、透明板状体中を伝搬する光である。図3は、スネルの法則を示す図である。入射光20は透明板状体3と空気との界面で屈折して、屈折光21となる。このとき、入射光20の入射角θ1と屈折光21の屈折角θ2は、空気の屈折率n1、透明板状体の屈折率n2を用いて、スネルの法則は、n1sinθ1=n2sinθ2となる。 The total reflected light 6 is light that propagates through the transparent plate at an angle equal to or greater than the critical angle θ. FIG. 3 is a diagram illustrating Snell's law. The incident light 20 is refracted at the interface between the transparent plate-like body 3 and air to become refracted light 21. At this time, the incident angle θ1 of the incident light 20 and the refraction angle θ2 of the refracted light 21 use the refractive index n1 of air and the refractive index n2 of the transparent plate, and Snell's law is n1sinθ1 = n2sinθ2.
空気の屈折率n1を1とすると、sinθ1=n2sinθ2となり、屈折角θ2は、θ2=sin―1(sinθ1/n2)で求められる。θ1は90°が最大であり、θ1=90°としたときの屈折角θ2も最大となる。θ1=90°とすると、θ2は、θ2=sin―1(1/n2)で求められ、θ1=90°の場合のθ2が臨界角θである。また、透明板状体がフロートガラス等のソーダライムガラスの場合は、n2=1.52として、臨界角θは41.8°となる。 When the refractive index n1 of air is 1, sin θ1 = n2sin θ2, and the refraction angle θ2 is obtained by θ2 = sin− 1 (sin θ1 / n2). The maximum θ1 is 90 °, and the refraction angle θ2 when θ1 = 90 ° is also maximum. If θ1 = 90 °, θ2 is obtained by θ2 = sin− 1 (1 / n2), and θ2 when θ1 = 90 ° is the critical angle θ. When the transparent plate is soda lime glass such as float glass, n2 = 1.52 and the critical angle θ is 41.8 °.
図4は、透明板状体の照明器1と同じ側の表面に、照明光の散乱手段として液滴8を用いる場合である。液滴8は、図示しない噴霧装置を用い、霧状の液滴を透明板状体3に吹き付けて、透明板状体3の照明光2で照明される範囲に形成させる。照明光2の透明板状体3への入射角は、図4に示すように、必ずしも垂直である必要はなく、照明しやすい角度で照明すればよい。 FIG. 4 shows a case where a droplet 8 is used as a means for scattering illumination light on the same surface as the illuminator 1 of the transparent plate-like body. The droplets 8 are formed in a range illuminated by the illumination light 2 of the transparent plate 3 by spraying mist-like droplets onto the transparent plate 3 using a spray device (not shown). As shown in FIG. 4, the incident angle of the illumination light 2 to the transparent plate-like body 3 does not necessarily have to be vertical, and may be illuminated at an angle that facilitates illumination.
透明板状体の表面に付着させた液滴は、表面張力により、曲面形状となるため、照明光は透明板状体中に散乱させられる。透明板状体中に散乱される照明光は、その一部が、透明板状体の法線に対して臨界角θ以上の角度で散乱され、全反射して透明板状体中を伝搬する。 Since the droplets attached to the surface of the transparent plate-like body have a curved surface shape due to surface tension, the illumination light is scattered in the transparent plate-like body. A part of the illumination light scattered in the transparent plate is scattered at an angle greater than the critical angle θ with respect to the normal of the transparent plate, and is totally reflected and propagates in the transparent plate. .
透明板状体の表面に付着させる液滴は、水滴が好ましく、粒径はなるべく小さい方が望ましい。電動の霧吹きや噴霧器を使用し、発生させた霧を透明板状体の表面に吹き付けて、透明板状体の表面に水滴を付着させる。 The droplets attached to the surface of the transparent plate are preferably water droplets and desirably have a particle size as small as possible. Using an electric sprayer or sprayer, the generated mist is sprayed on the surface of the transparent plate-like body, and water droplets are attached to the surface of the transparent plate-like body.
全反射光6は、透明板状体3の表面に付着する汚れ、ほこり、ゴミなどにほとんど影響されずに透明板状体3中を伝搬し、透明板状体3の中に存在する欠陥7や表面のキズ等で散乱する。 The totally reflected light 6 propagates through the transparent plate 3 almost without being affected by dirt, dust, dust, etc. adhering to the surface of the transparent plate 3, and a defect 7 existing in the transparent plate 3. Scattered due to scratches on the surface.
透明板状体3の中に存在する欠陥7や表面のキズ等で散乱した光を検出器4を用いて検出することにより、透明板状体3の表面に付着する汚れ、ほこり、ゴミなどを検出することなく、透明板状体3の中に存在する欠陥7や表面のキズ等のみを検出することができる。 By detecting light scattered by defects 7 and scratches on the surface of the transparent plate 3 using the detector 4, dirt, dust, dust, etc. adhering to the surface of the transparent plate 3 are removed. Without detection, it is possible to detect only the defects 7 and the scratches on the surface existing in the transparent plate-like body 3.
検出器4には、CCDカメラを用いることが望ましい。さらに、CCDカメラは通常のカメラでもよいが、明るさの均一な画像をデータ処理した方が好ましく、1本の走査線のみを撮影するようにしたラインカメラを用いることが望ましい。 The detector 4 is desirably a CCD camera. Further, the CCD camera may be a normal camera, but it is preferable to perform data processing on an image with uniform brightness, and it is desirable to use a line camera that captures only one scanning line.
検出器4による欠陥の検出は、全反射光6によって行うので、図5に示す、照明光2が透明板状体3に入射する位置a、検出器4が検出する位置b、位置aと位置bとの間隔dに対して、透明板状体3の厚みをtとして、図4のような、照明器1と同じ側の透明板状体3の表面に液滴8を付着させて照明光2を散乱させる場合は、間隔dを、2t×tanθ以上とすることが好ましい。 Since the detection of the defect by the detector 4 is performed by the total reflection light 6, the position a shown in FIG. 5 where the illumination light 2 enters the transparent plate 3, the position b detected by the detector 4, the position a and the position With respect to the distance d from b, the thickness of the transparent plate 3 is t, and the droplet 8 is attached to the surface of the transparent plate 3 on the same side as the illuminator 1 as shown in FIG. In the case of scattering 2, it is preferable that the distance d is 2 t × tan θ or more.
図6のように、照明光2の散乱を、照明器1と反対側の透明板状体3の表面に液滴8を付着させる場合は、間隔dを、t×tanθ以上とすることが好ましい。
透明板状体を移動させて欠陥を検出する場合は、透明板状体の表面に付着させた液滴が検出器の検出位置に移動して、検出を妨害しないように、透明板状体の進行方向に向かって検出器、照明器の順に配置することが望ましい。
As shown in FIG. 6, when the droplet 8 is attached to the surface of the transparent plate 3 opposite to the illuminator 1 for scattering of the illumination light 2, the interval d is preferably t × tan θ or more. .
When detecting defects by moving the transparent plate, the droplets attached to the surface of the transparent plate move to the detection position of the detector and do not interfere with the detection. It is desirable to arrange the detector and the illuminator in this order in the traveling direction.
図7は、弾力性を有する樹脂中に光を散乱させる粒子を分散させて光散乱体9を成形し、該光散乱体9を照明光の散乱手段として用いる場合を示すものである。図7は、円筒に成形した光散乱体9をローラー状に構成して透明板状体3の表面に接触させ、透明板状体3の移動に合わせて、光散乱体9を回転するようにしたものである。光散乱体9はローラー状にして回転できるようにすることが望ましいが、シート状にして用いてもよい。 FIG. 7 shows a case where a light scattering body 9 is formed by dispersing particles that scatter light in an elastic resin, and the light scattering body 9 is used as a means for scattering illumination light. In FIG. 7 , the light scatterer 9 formed into a cylinder is configured in a roller shape and brought into contact with the surface of the transparent plate 3, and the light scatterer 9 is rotated in accordance with the movement of the transparent plate 3. It is a thing. The light scatterer 9 is preferably in the form of a roller so that it can be rotated, but it may also be used in the form of a sheet.
光散乱体9を成形する樹脂は、弾力性を有するものが望ましく、さらに、透明性を有するもの、あるいは乳白色であるものが好ましく、アクリル系やシリコーン系の弾力性のあるゴム状の樹脂を用いることができる。なお、樹脂に不透明な樹脂を用いてもよい。
樹脂に混入させる粒子としては、ポリカーボネートやポリスチレン等の屈折率が比較的に大きい樹脂を粉体にして用いるとよい。
The resin that molds the light scatterer 9 is preferably elastic, and is preferably transparent or milky white, and uses an acrylic or silicone elastic rubber-like resin. be able to. An opaque resin may be used as the resin.
As the particles to be mixed into the resin, it is preferable to use a resin having a relatively high refractive index such as polycarbonate or polystyrene in powder form.
欠陥で散乱される光以外の光が、検出器に入射しないように、検出器1の周囲を遮光板5で囲い、遮光することが望ましい。 It is desirable to surround the detector 1 with a light shielding plate 5 so that light other than the light scattered by the defect does not enter the detector.
透明板状体3が連続的に生産される場合は、透明板状体の進行する方向に向かって、検出器、噴霧装置の順に配置することが望ましい。 When the transparent plate-shaped body 3 is continuously produced, it is desirable to arrange the detector and the spraying device in this order in the direction in which the transparent plate-shaped body proceeds.
以下、図面を参照しながら本発明の実施例を詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
図1は、本実施例の光学系を示すものである。 FIG. 1 shows an optical system of this embodiment.
実施例1
フロートガラスの製造ラインで連続的に生産されている、厚み5mmのフロートガラス3に本発明の欠陥検出方法を用いた。検査は除冷室から出てきた場所を暗幕で囲い、照明器1以外の光のない状態にした。
Example 1
The defect detection method of the present invention was used for a float glass 3 having a thickness of 5 mm that is continuously produced in a float glass production line. In the inspection, the place that came out of the cooling room was surrounded by a black screen, so that there was no light other than the illuminator 1.
図示しない電動式噴霧器により、フロートガラスの下面に霧を吹き付け、図5に示すように、水滴でなる液滴8´を透明板状体3の下面側に付着させた。液滴8´が付着した部分を、照明器1の照明光2で照明した。照明器1にはハロゲンランプを用いた。 フロートガラスの屈折率をn2=1.52として、臨界角は41.8°となり、t=5mmとして、t×tan(θ)=5×tan(41.8°)=4.5mmとなる。この数値から、フロートガラスの進行方向に向かって、検出器4、照明器1の順に設置し、図5に示す、検出器4が検出する位置bと照明光2が透明板状体3に入射する位置bとの距離dを、4.5mmの約1.5倍の7mmとした。 Fog was sprayed on the lower surface of the float glass with an electric sprayer (not shown), and a droplet 8 ′ composed of water droplets was attached to the lower surface side of the transparent plate-like body 3 as shown in FIG. 5. The portion to which the droplet 8 ′ was attached was illuminated with the illumination light 2 from the illuminator 1. The illuminator 1 was a halogen lamp. When the refractive index of the float glass is n2 = 1.52, the critical angle is 41.8 °, and when t = 5 mm, t × tan (θ) = 5 × tan (41.8 °) = 4.5 mm. From this numerical value, the detector 4 and the illuminator 1 are installed in this order in the direction of movement of the float glass, and the position b and the illuminating light 2 detected by the detector 4 shown in FIG. The distance d to the position b to be set was 7 mm, which is about 1.5 times 4.5 mm.
検出器4にはCCDカメラ10を用いた。CCDカメラの焦点を透明板状体3の表面付近の、図8に示すライン11上の範囲に合わせた。 A CCD camera 10 was used as the detector 4. The focus of the CCD camera was adjusted to the area on the line 11 shown in FIG. 8 near the surface of the transparent plate-like body 3.
散乱した照明光6の中の全反射して伝搬する光は、透明板状体中の異物や表面のキズで散乱し、欠陥として検出できた。また、透明板状体の表面の汚れやほこりを欠陥として検出することが無かった。 The light that is totally reflected and propagated in the scattered illumination light 6 was scattered by a foreign matter in the transparent plate or a scratch on the surface, and could be detected as a defect. Further, there was no detection of dirt or dust on the surface of the transparent plate as a defect.
実施例2
透明なシリコーン樹脂にポリスチレン樹脂の粉体を混入させ、円筒状に成形して、図7に示す散乱反射体9として用いた。散乱反射体9はローラー状として回転できるように支持して透明板状体3に接触させ、接触する部分を照明光2で照明した。
Example 2
By mixing polystyrene resin powder in a transparent silicone resin, and molded into a cylindrical shape, it was used as the scattering reflector 9 shown in FIG. The scattering reflector 9 was supported so as to be able to rotate as a roller and was brought into contact with the transparent plate 3, and the contacted portion was illuminated with the illumination light 2.
照明光を散乱させる手段に散乱反射体9を用いた他は、全て実施例1と同様にした。
本実施例においても、実施例1と同様に、散乱した照明光6の中の全反射して伝搬する光は、透明板状体中の異物や表面のキズで散乱し、欠陥として検出できた。また、透明板状体の表面の汚れやほこりを欠陥として検出することが無かった。
The same procedure as in Example 1 was performed except that the scattering reflector 9 was used as means for scattering the illumination light.
Also in the present embodiment, as in the first embodiment, the light that is totally reflected and propagated in the scattered illumination light 6 is scattered by the foreign matter in the transparent plate or scratches on the surface, and can be detected as a defect. . Moreover, the dirt and dust on the surface of the transparent plate were not detected as defects.
1 照明器
2 照明光
3 透明板状体
4 検出器
5 遮光板
6 全反射光
7 欠陥
8、8´ 液滴
9 散乱反射体
DESCRIPTION OF SYMBOLS 1 Illuminator 2 Illumination light 3 Transparent plate-like body 4 Detector 5 Light-shielding plate 6 Total reflection light 7 Defect 8, 8 'Droplet 9 Scattering reflector
Claims (2)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004114674A JP4324504B2 (en) | 2004-04-08 | 2004-04-08 | Defect detection method and apparatus for transparent plate |
PCT/JP2005/006340 WO2005098399A1 (en) | 2004-04-08 | 2005-03-31 | Method for detecting transparent board defect and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004114674A JP4324504B2 (en) | 2004-04-08 | 2004-04-08 | Defect detection method and apparatus for transparent plate |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009104663A Division JP4877355B2 (en) | 2009-04-23 | 2009-04-23 | Defect detection method and apparatus for transparent plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005300275A JP2005300275A (en) | 2005-10-27 |
JP4324504B2 true JP4324504B2 (en) | 2009-09-02 |
Family
ID=35125192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004114674A Expired - Fee Related JP4324504B2 (en) | 2004-04-08 | 2004-04-08 | Defect detection method and apparatus for transparent plate |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4324504B2 (en) |
WO (1) | WO2005098399A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4989453B2 (en) * | 2006-12-25 | 2012-08-01 | パナソニック株式会社 | Defect detection device for light transmissive film |
JPWO2009031420A1 (en) * | 2007-09-04 | 2010-12-09 | 旭硝子株式会社 | Method and apparatus for detecting minute foreign matter inside transparent plate |
JP6121758B2 (en) * | 2013-03-13 | 2017-04-26 | 倉敷紡績株式会社 | Crack and appearance inspection apparatus and crack and appearance inspection method |
JP5877171B2 (en) * | 2013-03-22 | 2016-03-02 | 富士フイルム株式会社 | Edge position detection device and edge position detection method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1062354A (en) * | 1996-08-20 | 1998-03-06 | Nachi Fujikoshi Corp | Device and method of inspecting transparent plate for defect |
JPH11337496A (en) * | 1998-03-24 | 1999-12-10 | Ngk Insulators Ltd | Detection of flaw of transparent object and production of transparent object |
-
2004
- 2004-04-08 JP JP2004114674A patent/JP4324504B2/en not_active Expired - Fee Related
-
2005
- 2005-03-31 WO PCT/JP2005/006340 patent/WO2005098399A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2005098399A1 (en) | 2005-10-20 |
JP2005300275A (en) | 2005-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101318483B1 (en) | Inspection system and method for identifying surface and body defects in a glass sheet | |
KR100907247B1 (en) | Device and method for detecting scratches | |
JP2007078581A (en) | Illumination device for visual inspection | |
US8396281B2 (en) | Apparatus and method for inspecting substrate internal defects | |
WO2006029536A1 (en) | Optical inspection of flat media using direct image technology | |
JP2015040835A (en) | Defect inspection device and defect inspection method for transparent tabular body | |
JP4154523B2 (en) | Container foreign matter detection device | |
CN110809731A (en) | Glass processing apparatus and method | |
JP4324504B2 (en) | Defect detection method and apparatus for transparent plate | |
JP2007333563A (en) | Inspection device and inspection method for light transmitting sheet | |
KR20130143226A (en) | Apparatus for inspecting light guide plate | |
JP3677133B2 (en) | Transparency inspection device | |
JP2017166903A (en) | Defect inspection device and defect inspection method | |
WO2019099285A1 (en) | Methods and apparatus for detecting surface defects on glass sheets | |
JP4877355B2 (en) | Defect detection method and apparatus for transparent plate | |
JPS63165738A (en) | Flaw inspection apparatus for transparent substrate | |
JPH11316195A (en) | Surface defect detecting device of transparent plate | |
TW200702658A (en) | Illumination device for visual inspection based on reflected light and transmitted light | |
KR20200089416A (en) | Inspection system for cover glass of display panel | |
KR20080019395A (en) | A defect detecting apparatus for flat panel display | |
JP5471157B2 (en) | Method and apparatus for detecting adhering matter on glass plate surface | |
JPH10185829A (en) | Method and device for inspecting defect on surface of transparent flat body | |
KR20160032576A (en) | System and Method for Analyzing Image Using High-Speed Camera and Infrared Optical System | |
JP2009192304A (en) | Bottle inspection device and bottle inspection method | |
JPH10185828A (en) | Method and device for inspecting defect of transparent flat body surface |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20060424 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070202 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080805 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090310 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090423 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090602 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090608 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120612 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120612 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120612 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120612 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130612 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130612 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130612 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |