JP4269189B2 - 光学素子、光学膜平面化方法及び光学素子の製造方法 - Google Patents
光学素子、光学膜平面化方法及び光学素子の製造方法 Download PDFInfo
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- JP4269189B2 JP4269189B2 JP2007067901A JP2007067901A JP4269189B2 JP 4269189 B2 JP4269189 B2 JP 4269189B2 JP 2007067901 A JP2007067901 A JP 2007067901A JP 2007067901 A JP2007067901 A JP 2007067901A JP 4269189 B2 JP4269189 B2 JP 4269189B2
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- 239000012788 optical film Substances 0.000 title claims description 121
- 230000003287 optical effect Effects 0.000 title claims description 56
- 238000000034 method Methods 0.000 title claims description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000010408 film Substances 0.000 claims description 164
- 239000000758 substrate Substances 0.000 claims description 98
- 239000002245 particle Substances 0.000 claims description 44
- 238000005498 polishing Methods 0.000 claims description 29
- 230000003746 surface roughness Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 description 37
- 230000000694 effects Effects 0.000 description 16
- 238000006073 displacement reaction Methods 0.000 description 15
- 239000010409 thin film Substances 0.000 description 14
- 238000005452 bending Methods 0.000 description 10
- 239000010410 layer Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000011362 coarse particle Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000007812 deficiency Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000000384 rearing effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Filters (AREA)
Description
10R 被摺面 10S 被成膜面
12 反射多層膜 13 摺面
Claims (12)
- 基板の表面と裏面とで面の粗さに差を持たせて、前記表面又は前記裏面のうち粗さの細かい方の面に光学膜を形成し、前記光学膜の応力を緩和させることを特徴とする光学素子。
- 請求項1記載の光学素子であって、
前記粗さの細かい方の面は鏡面研磨により仕上げて成膜面となし、この成膜面とは反対の面を摺面に形成することを特徴とする光学素子。 - 請求項2記載の光学素子であって、
前記摺面は、前記光学膜が平面化されるような粒度で摺られていることを特徴とする光学素子。 - 請求項1乃至3何れか1項に記載の光学素子であって、
前記光学膜は、所定の波長域の光を反射する反射多層膜であることを特徴とする光学素子。 - 基板の少なくとも1面を鏡面研磨する鏡面研磨工程と、
鏡面研磨した1面の反対の面を摺ることにより摺面を形成する摺面形成工程と、
前記摺面形成工程の後に行われる工程であって、前記鏡面研磨された1面に光学膜を形成する光学膜形成工程と、を有し、
前記基板に対する前記光学膜の応力を、前記摺面が緩和して、前記光学膜を平面化することを特徴とする光学膜平面化方法。 - 基板の少なくとも1面を鏡面研磨する鏡面研磨工程と、
鏡面研磨した1面に光学膜を形成する光学膜形成工程と、
前記光学膜形成工程の後に行われる工程であって、前記光学膜が形成される面の反対の面を摺ることにより摺面を形成する摺面形成工程と、を有し、
前記基板に対する前記光学膜の応力を、前記摺面が緩和して、前記光学膜を平面化することを特徴とする光学膜平面化方法。 - 請求項5又は6記載の光学膜平面化方法であって、
前記摺面を形成するときには、前記基板が平面化されるような粒度で摺ることを特徴とする光学膜平面化方法。 - 請求項7記載の光学膜平面化方法であって、
前記摺面形成工程で摺面を形成した粒度よりも粗い粒度又は細かい粒度で、前記摺面を摺ることにより、前記成膜面をさらに平面に近づけるような微調整を行う微調整工程を行うことを特徴とする光学膜平面化方法。 - 基板の鏡面研磨された1面に光学膜が形成され、この光学膜が形成された面の反対の面に摺面を形成することにより前記光学膜の応力を緩和した光学素子を製造する光学素子の製造方法であって、
前記基板の少なくとも1面を鏡面研磨する鏡面研磨工程と、
鏡面研磨した1面の反対の面に摺面を形成する摺面形成工程と、
前記摺面形成工程の後に行われる工程であって、前記鏡面研磨された1面に光学膜を形成する光学膜形成工程と、を有することを特徴とする光学素子の製造方法。 - 基板の鏡面研磨された1面に光学膜が形成され、この光学膜が形成された面の反対の面を摺ることにより摺面を形成することにより前記光学膜の応力を緩和した光学素子を製造する光学素子の製造方法であって、
基板の少なくとも1面を鏡面研磨する鏡面研磨工程と、
鏡面研磨した1面に光学膜を形成する光学膜形成工程と、
前記光学膜形成工程の後に行われる工程であって、前記光学膜が形成される面の反対の面に摺面を形成する摺面形成工程と、を有し、
前記基板に対する前記光学膜の応力を、前記摺面が緩和して、前記光学膜を平面化することを特徴とする光学素子の製造方法。 - 請求項9又は10記載の光学素子の製造方法であって、
前記摺面を形成するときには、前記基板が平面化されるような粒度で摺ることを特徴とする光学素子の製造方法。 - 請求項11記載の光学素子の製造方法であって、
前記摺面形成工程で摺面を形成した粒度よりも粗い粒度又は細かい粒度で、前記摺面を摺ることにより、前記光学膜による応力を緩和して、前記成膜面をさらに平面に近づけるような微調整を行う微調整工程を行うことを特徴とする光学素子の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007067901A JP4269189B2 (ja) | 2007-03-16 | 2007-03-16 | 光学素子、光学膜平面化方法及び光学素子の製造方法 |
KR1020080020277A KR100998500B1 (ko) | 2007-03-16 | 2008-03-05 | 광학 소자, 광학막 평면화 방법 및 광학 소자의 제조 방법 |
TW097109321A TW200909884A (en) | 2007-03-16 | 2008-03-17 | Optical element, optical film complanation method and method for manufacturing optical element |
CN200810082989XA CN101266308B (zh) | 2007-03-16 | 2008-03-17 | 光学元件、光学膜平面化方法及光学元件的制造方法 |
Applications Claiming Priority (1)
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JP2007067901A JP4269189B2 (ja) | 2007-03-16 | 2007-03-16 | 光学素子、光学膜平面化方法及び光学素子の製造方法 |
Publications (2)
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JP2008225421A JP2008225421A (ja) | 2008-09-25 |
JP4269189B2 true JP4269189B2 (ja) | 2009-05-27 |
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JP2007067901A Active JP4269189B2 (ja) | 2007-03-16 | 2007-03-16 | 光学素子、光学膜平面化方法及び光学素子の製造方法 |
Country Status (4)
Country | Link |
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JP (1) | JP4269189B2 (ja) |
KR (1) | KR100998500B1 (ja) |
CN (1) | CN101266308B (ja) |
TW (1) | TW200909884A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102014201622A1 (de) * | 2014-01-30 | 2015-08-20 | Carl Zeiss Smt Gmbh | Verfahren zum Herstellen eines Spiegelelements |
JP6862154B2 (ja) * | 2016-11-22 | 2021-04-21 | キヤノン株式会社 | 光学素子、露光装置、および物品の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS58113901A (ja) | 1981-12-26 | 1983-07-07 | Nippon Kogaku Kk <Nikon> | 積層型光学構体 |
CN86211077U (zh) * | 1986-12-31 | 1987-12-16 | 长春光学精密机械研究所 | 石基底反射镜 |
US6964880B2 (en) * | 2003-06-27 | 2005-11-15 | Intel Corporation | Methods for the control of flatness and electron mobility of diamond coated silicon and structures formed thereby |
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2007
- 2007-03-16 JP JP2007067901A patent/JP4269189B2/ja active Active
-
2008
- 2008-03-05 KR KR1020080020277A patent/KR100998500B1/ko not_active IP Right Cessation
- 2008-03-17 CN CN200810082989XA patent/CN101266308B/zh active Active
- 2008-03-17 TW TW097109321A patent/TW200909884A/zh unknown
Also Published As
Publication number | Publication date |
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KR100998500B1 (ko) | 2010-12-06 |
JP2008225421A (ja) | 2008-09-25 |
CN101266308A (zh) | 2008-09-17 |
KR20080084611A (ko) | 2008-09-19 |
CN101266308B (zh) | 2012-06-06 |
TWI377372B (ja) | 2012-11-21 |
TW200909884A (en) | 2009-03-01 |
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