JP4263072B2 - Hydraulic drive device - Google Patents

Hydraulic drive device Download PDF

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JP4263072B2
JP4263072B2 JP2003375007A JP2003375007A JP4263072B2 JP 4263072 B2 JP4263072 B2 JP 4263072B2 JP 2003375007 A JP2003375007 A JP 2003375007A JP 2003375007 A JP2003375007 A JP 2003375007A JP 4263072 B2 JP4263072 B2 JP 4263072B2
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pressure
volume
hydraulic
hydraulic pump
displacement
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JP2005140175A (en
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教正 小椋
真樹 花井
典幸 石丸
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Toyooki Kogyo Co Ltd
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Toyooki Kogyo Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205—Systems with pumps
    • F15B2211/2053—Type of pump
    • F15B2211/20546—Type of pump variable capacity
    • F15B2211/20553—Type of pump variable capacity with pilot circuit, e.g. for controlling a swash plate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205—Systems with pumps
    • F15B2211/2053—Type of pump
    • F15B2211/20561—Type of pump reversible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/63—Electronic controllers
    • F15B2211/6303—Electronic controllers using input signals
    • F15B2211/6306—Electronic controllers using input signals representing a pressure
    • F15B2211/6313—Electronic controllers using input signals representing a pressure the pressure being a load pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/60—Circuit components or control therefor
    • F15B2211/63—Electronic controllers
    • F15B2211/6303—Electronic controllers using input signals
    • F15B2211/6336—Electronic controllers using input signals representing a state of the output member, e.g. position, speed or acceleration

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  • Servomotors (AREA)
  • Fluid-Pressure Circuits (AREA)

Description

本発明は、回転数を制御可能な電動モータにより回転する液圧ポンプから吐出する圧液により液圧アクチュエータを駆動する液圧駆動装置に関し、特に、液圧アクチュエータを高圧小流量と低圧大流量とで制御する液圧駆動装置に関する。   The present invention relates to a hydraulic drive device that drives a hydraulic actuator by pressure liquid discharged from a hydraulic pump that is rotated by an electric motor capable of controlling the number of rotations. It is related with the hydraulic-pressure drive device controlled by.

この種の液圧駆動装置は、回転数を制御可能な電動モータとしてのサーボモータに正逆回転可能な２個の固定容量形の液圧ポンプを同軸に結合し、一方の液圧ポンプを圧力制御用に充当し、圧力制御用以外の他方の液圧ポンプの吐出口を絞り弁、方向切換弁を介し低圧側としてのタンクへ連通可能としてアンロード手段を構成し、また、他方の液圧ポンプの吐出口を逆止め弁を介して負荷回路に接続し、逆止弁の自由流れの方向を負荷回路方向とすると共に、逆止め弁の出口に圧力制御用とした一方の液圧ポンプの吐出口を接続する。そして、方向切換弁が他方の液圧ポンプの吐出口をタンクへ連通するのを遮断した状態では、両方の液圧ポンプの流量が合流して負荷回路へ流入し、サーボモータの回転数を操作して流量を制御し、この場合が前記低圧大流量で制御する状態となる。また、方向切換弁が他方の液圧ポンプの吐出口をタンクへ連通した状態では、サーボモータは低速で回転して圧力制御用とした一方の液圧ポンプの必要トルクを発生し、この場合が前記高圧小流量で制御する状態となる。このようにして、圧力制御用とした一方の液圧ポンプを押しのけ容積の小さなものにできてサーボモータを出力の小さい小形のものにできる。この液圧駆動装置は、例えば下記の特許文献に開示されている。
特開平１０−１５９８０６号公報（２−３頁、図１） This type of hydraulic drive unit is coaxially connected to a servo motor as an electric motor capable of controlling the number of rotations, and two fixed capacity type hydraulic pumps that can rotate in the forward and reverse directions. Appropriate for control, the discharge port of the other hydraulic pump other than for pressure control can be connected to a tank on the low pressure side via a throttle valve and a direction switching valve to constitute an unloading means. The discharge port of the pump is connected to the load circuit via a check valve, and the direction of free flow of the check valve is set to the load circuit direction. Connect the discharge port. When the direction switching valve blocks the other hydraulic pump discharge port from communicating with the tank, the flow rates of both hydraulic pumps merge and flow into the load circuit to control the rotation speed of the servo motor. Then, the flow rate is controlled, and in this case, the control is performed with the low pressure and large flow rate. In addition, when the direction switching valve communicates the discharge port of the other hydraulic pump to the tank, the servo motor rotates at a low speed and generates the necessary torque of one hydraulic pump for pressure control. It will be in the state controlled by the said high voltage | pressure small flow volume. In this way, one hydraulic pump used for pressure control can be made to have a small displacement volume, and the servo motor can be made to a small one with a small output. This hydraulic driving device is disclosed in, for example, the following patent document.
JP-A-10-159806 (page 2-3, FIG. 1)

ところが、かかる従来の液圧駆動装置では、高圧小流量の制御で用いる押しのけ容積の小さな一方の液圧ポンプと、低圧大流量の制御で一方の液圧ポンプと共に用いる押しのけ容積の大きな他方の液圧ポンプとを備えなければならず、液圧ポンプが２台となって、装置全体が大型化してしまう問題があった。   However, in such a conventional hydraulic pressure drive device, one hydraulic pump having a small displacement volume used for controlling a high pressure and a small flow rate, and the other hydraulic pressure having a large displacement volume used together with one hydraulic pressure pump for controlling a low pressure and a large flow rate. There is a problem that the number of hydraulic pumps becomes two and the entire apparatus becomes large.

本発明の課題は、回転数制御可能な電動モータにより回転する液圧ポンプを、低圧大流量の制御と高圧小流量の制御とを可能にする単一の液圧ポンプで構成し、装置全体のコンパクト化を図り得る液圧駆動装置を提供することにある。   An object of the present invention is to configure a hydraulic pump that is rotated by an electric motor capable of controlling the number of revolutions, with a single hydraulic pump that enables control of a low pressure and a large flow rate and a control of a high pressure and a small flow rate. An object of the present invention is to provide a hydraulic drive device that can be made compact.

かかる課題を達成すべく、本発明は課題を解決するため次の手段をとった。即ち、
回転数を制御可能な電動モータと、二つのポートを有し電動モータによる正回転で一方のポートから圧液を吐出すると共に逆回転で他方のポートから圧液を吐出する正逆回転可能な液圧ポンプと、二つのポートを有し液圧ポンプから吐出する圧液によって駆動される液圧アクチュエータと、この液圧アクチュエータ側からフィードバックされる実際値を目標値に一致するよう前記電動モータの回転数を制御する制御部とを備え、前記液圧ポンプの両ポートと前記液圧アクチュエータの両ポートとを接続し、前記液圧ポンプは、斜板の傾斜角度を変更自在とし、斜板を最大傾斜角度にして押しのけ容積を最も大きくした最大容積と、斜板を最小傾斜角度にして押しのけ容積を前記最大容積より小さくかつ零より大きくした最小容積とに切換可能に設けて圧力制御弁を備え、斜板の最大傾斜角度を調整ねじ軸の回動操作で調整自在にすると共に、斜板の最小傾斜角度を斜板の設定部材への当接で設定して設け、前記圧力制御弁は前記液圧ポンプから吐出する圧液の圧力と調整自在にしたばねのばね力に基づく設定圧力とを対向作用し、前記液圧ポンプから前記液圧アクチュエータに吐出する圧液の圧力が前記設定圧力未満で押しのけ容積を前記最大容積に切換えると共に、前記液圧ポンプから前記液圧アクチュエータに吐出する圧液の圧力が前記設定圧力以上で押しのけ容積を前記最小容積に切換え、前記液圧ポンプを前記設定圧力未満で押しのけ容積を前記最大容積に切換えた状態で、前記液圧アクチュエータ側から位置の実際値を前記制御部へフィードバックし、前記液圧ポンプを前記設定圧力以上で押しのけ容積を前記最小容積に切換えた状態で、前記液圧アクチュエータ側から圧力若しくは荷重の実際値を前記制御部へフィードバックし、前記制御部は位置の実際値を位置の目標値に一致するよう前記電動モータの回転数を制御すると共に、圧力若しくは荷重の実際値を圧力若しくは荷重の目標値に一致するよう前記電動モータの回転数を制御することを特徴とする液圧駆動装置がそれである。 In order to achieve this problem, the present invention has taken the following measures in order to solve the problem. That is,
An electric motor capable of controlling the number of rotations, and a fluid that has two ports and can be rotated forward and backward by discharging pressure liquid from one port by forward rotation by the electric motor and discharging pressure liquid from the other port by reverse rotation A pressure pump, a hydraulic actuator having two ports and driven by pressure fluid discharged from the hydraulic pump, and rotation of the electric motor so that the actual value fed back from the hydraulic actuator side matches the target value A control unit for controlling the number of ports, and connecting both ports of the hydraulic pump and both ports of the hydraulic actuator, the hydraulic pump can change the inclination angle of the swash plate, and the maximum volume to the inclination angle and the greatest volume displacement which was, switchable volume displacement by the swash plate to the minimum inclination angle and the minimum volume, which was greater than and zero less than the maximum volume Provided with a pressure control valve, as well as to freely adjust the maximum inclination angle of the swash plate in the rotating operation of the adjusting screw shaft, by setting the minimum inclination angle of the swash plate in abutment against the swash plate of the setting member is provided The pressure control valve opposes the pressure of the hydraulic fluid discharged from the hydraulic pump and a set pressure based on the spring force of an adjustable spring, and discharges the hydraulic fluid from the hydraulic pump to the hydraulic actuator. together with the pressure switch the volume displacement of less than the set pressure to the maximum volume, switching the volume displacement at a pressure of liquid to be discharged to the hydraulic actuator from the hydraulic pump is the set pressure above the minimum volume, the In a state where the displacement of the hydraulic pump is less than the set pressure and the displacement volume is switched to the maximum volume, the actual value of the position is fed back from the hydraulic actuator side to the control unit, and the hydraulic pump is In the state where the displacement volume is switched to the minimum volume above the set pressure, the actual value of pressure or load is fed back to the control unit from the hydraulic actuator side, and the control unit returns the actual position value to the target position value. And the rotational speed of the electric motor is controlled so that the actual value of the pressure or load matches the target value of the pressure or load. That is it.

以上詳述したように、請求項１に記載の発明は、回転数を制御可能な電動モータで回転する液圧ポンプとして、液圧アクチュエータに吐出する圧液の圧力が設定圧力未満で押しのけ容積を最大容積に切換えると共に、液圧アクチュエータに吐出する圧液の圧力が設定圧力以上で押しのけ容積を最小容積に切換える液圧ポンプを備えている。このため、前記設定圧力未満の前記最大容積で前記液圧アクチュエータを低圧大流量で制御できると共に、前記設定圧力以上の前記最小容積で前記液圧アクチュエータを高圧小流量で制御できるから、低圧大流量の制御と高圧小流量の制御とを単一の液圧ポンプで可能にできて装置全体のコンパクト化を図ることができる。また、液圧ポンプは設定圧力以上で押しのけ容積を最小容積に切換えるため、従来の高圧小流量の制御で使用する一方の液圧ポンプと比較して、必要トルクを増加することなくでき、液圧ポンプを回転する回転数制御可能な電動モータを大型で高価格なものとすることなく、出力の小さい小型のものを維持できる。   As described above in detail, the invention according to claim 1 is a hydraulic pump that is rotated by an electric motor capable of controlling the number of rotations, and the displacement of the hydraulic fluid discharged to the hydraulic actuator is less than the set pressure and the displacement volume is reduced. A hydraulic pump is provided for switching to the maximum volume and switching the displacement volume to the minimum volume when the pressure of the hydraulic fluid discharged to the hydraulic actuator is equal to or higher than the set pressure. Therefore, the hydraulic actuator can be controlled with a low pressure and a large flow rate with the maximum volume less than the set pressure, and the hydraulic actuator can be controlled with a high pressure and a small flow rate with the minimum volume equal to or higher than the set pressure. And a high pressure and small flow rate can be controlled by a single hydraulic pump, and the entire apparatus can be made compact. Also, since the hydraulic pump switches the displacement volume to the minimum volume when the pressure is higher than the set pressure, compared with one hydraulic pump used in the conventional high pressure and small flow rate control, the required torque can be increased without increasing the hydraulic pressure. A small motor with a small output can be maintained without making the electric motor capable of controlling the rotational speed of rotating the pump large and expensive.

また、液圧アクチュエータ側からフィードバックした圧力若しくは荷重の実際値を圧力若しくは荷重の目標値に一致するよう制御部で電動モータの回転数を制御しているため、液圧アクチュエータを高圧小流量で精度良く圧力制御又は荷重制御することができる。 Moreover, because of the control the rotational speed of the electric motor in the control unit to match the actual value of the pressure or load that is fed back from the hydraulic actuator side to the target value of the pressure or load, precision hydraulic actuator in a high pressure low flow rate Pressure control or load control can be performed well.

また、設定圧力を調整自在にしているため、この設定圧力の変更に伴い液圧アクチュエータを高圧小流量制御で圧力制御又は荷重制御を開始する値を自動的に変更することができる。 Moreover, because of the freely adjust the pressure control setting, you can change the value to initiate pressure control or load control fluid pressure actuator according to the change of the set pressure in the high pressure small flow rate control automatically.

以下、本発明を実施するための一実施形態を図面に基づき説明する。
図１において、１は正逆回転可能な液圧ポンプで、一方のポート１Ａと他方のポート１Ｂとを有し、正回転したときには他方のポート１Ｂから吸入した作動液を一方のポート１Ａから圧液として吐出すると共に、逆回転したときには一方のポート１Ａから吸入した作動液を他方のポート１Ｂから圧液として吐出する。２は回転数を制御可能な電動モータとしてのサーボモータで、液圧ポンプ１を回転するよう液圧ポンプ１と結合する。３は液圧アクチュエータとしての複動シリンダで、ピストンロッド３Ａを有し、キャップ側ポート４Ａへの圧液の供給でピストンロッド３Ａを図１下方向へワークＷに向けて駆動し、ピストンロッド３Ａの先端に取付けた図示しない加工具によりワークＷを加圧加工する。また、複動シリンダ３はヘッド側ポート４Ｂへの圧液の供給でピストンロッド３Ａを図１上方向へワークＷから離間する方向に駆動し、原位置に復帰する。 Hereinafter, an embodiment for carrying out the present invention will be described with reference to the drawings.
In FIG. 1, 1 is a hydraulic pump capable of rotating forward and reverse, and has one port 1A and the other port 1B. When forwardly rotating, hydraulic fluid sucked from the other port 1B is pressurized from one port 1A. In addition to discharging as a liquid, the hydraulic fluid sucked from one port 1A is discharged as a pressurized liquid from the other port 1B when rotating in the reverse direction. A servo motor 2 as an electric motor capable of controlling the number of rotations is coupled to the hydraulic pump 1 to rotate the hydraulic pump 1. Reference numeral 3 denotes a double-acting cylinder as a hydraulic actuator, which has a piston rod 3A, and is driven toward the workpiece W downward in FIG. 1 by supplying pressurized liquid to the cap side port 4A. The workpiece W is pressed by a processing tool (not shown) attached to the tip of the workpiece. Further, the double acting cylinder 3 drives the piston rod 3A in the direction away from the workpiece W in the upward direction of FIG. 1 by supplying the pressurized liquid to the head side port 4B, and returns to the original position.

５は第１流路で、複動シリンダ３のキャップ側ポート４Ａと液圧ポンプ１の一方のポート１Ａとを接続する。６は第２流路で、複動シリンダ３のヘッド側ポート４Ｂと液圧ポンプ１の他方のポート１Ｂとを接続する。第１流路５は第１逆止め弁７を介し低圧側としての作動液を貯蔵するタンクＴに接続すると共に、第２流路６は第２逆止め弁８を介しタンクＴに接続する。第１逆止め弁７はタンクＴから第１流路５への流れを許容すると共に第１流路５からタンクＴへの流れを阻止する向きに設ける。第２逆止め弁８はタンクＴから第２流路６への流れを許容すると共に第２流路６からタンクＴへの流れを阻止する向きに設ける。両逆止め弁７、８は接続ロッド９を介して接続し、液圧ポンプ１を正回転して一方のポート１Ａから圧液を吐出した際には第１流路５より第１逆止め弁７に圧液が作用して第１逆止め弁７を閉じると共に第２逆止め弁８を接続ロッド９を介して押圧して開作動し、また、液圧ポンプ１を逆回転して他方のポート１Ｂから圧液を吐出した際には第２流路６より第２逆止め弁８に圧液が作用して第２逆止め弁８を閉じると共に第１逆止め弁７を接続ロッド９を介して押圧して開作動自在に設ける。     Reference numeral 5 denotes a first flow path that connects the cap-side port 4A of the double-acting cylinder 3 and one port 1A of the hydraulic pump 1. Reference numeral 6 denotes a second flow path that connects the head side port 4B of the double acting cylinder 3 and the other port 1B of the hydraulic pump 1. The first flow path 5 is connected via a first check valve 7 to a tank T storing hydraulic fluid as a low pressure side, and the second flow path 6 is connected to the tank T via a second check valve 8. The first check valve 7 is provided in a direction that allows the flow from the tank T to the first flow path 5 and prevents the flow from the first flow path 5 to the tank T. The second check valve 8 is provided in a direction that allows the flow from the tank T to the second flow path 6 and prevents the flow from the second flow path 6 to the tank T. Both check valves 7 and 8 are connected via a connecting rod 9, and when the hydraulic pump 1 rotates forward and pressure fluid is discharged from one port 1 </ b> A, the first check valve 5 is connected to the first check valve 5. 7 pressurizes the second check valve 8 via the connecting rod 9 to open and closes the first check valve 7, and opens the other one by rotating the hydraulic pump 1 in the reverse direction. When the pressure fluid is discharged from the port 1B, the pressure fluid acts on the second check valve 8 from the second flow path 6 to close the second check valve 8 and connect the first check valve 7 to the connecting rod 9. It is provided so that it can be opened by pressing.

１０は第１流路５から分岐してタンクＴに接続する第１排出流路、１１は第２流路６から分岐してタンクＴに接続する第２排出流路である。１２は第１排出流路１０に配設した第１リリーフ弁で、第１流路５の圧力が異常上昇して設定圧力を越えると第１流路５の圧液をタンクＴに排出する。１３は第２排出流路１１に配設した第２リリーフ弁で、設定圧力を第１リリーフ弁１２と同一に設定し、第２流路６の圧力が異常上昇して設定圧力を越えると第２流路６の圧液をタンクＴに排出する。   Reference numeral 10 denotes a first discharge flow path branched from the first flow path 5 and connected to the tank T. Reference numeral 11 denotes a second discharge flow path branched from the second flow path 6 and connected to the tank T. Reference numeral 12 denotes a first relief valve disposed in the first discharge channel 10, which discharges the pressurized liquid in the first channel 5 to the tank T when the pressure in the first channel 5 abnormally rises and exceeds the set pressure. Reference numeral 13 denotes a second relief valve disposed in the second discharge passage 11. The set pressure is set to be the same as that of the first relief valve 12. If the pressure in the second passage 6 rises abnormally and exceeds the set pressure, The pressure liquid in the two flow paths 6 is discharged to the tank T.

１４はサーボモータ２の回転数を検出するロータリエンコーダ等の回転数検出センサで、検出したサーボモータ２の実際の回転数をフィードバック配線１５でサーボモータドライバ１６にフィードバックする。１７は第１流路５に配設した圧力検出センサで、複動シリンダ３のキャップ側ポート４Ａに供給する圧液の圧力を検出し、検出した圧力の実際値をフィードバック配線１８でコントローラ１９にフィードバックする。２０は複動シリンダ３のピストンロッド３Ａの位置を検出する位置検出センサで、ここでは位置の変位に応じたパルスを出力するリニアスケールを用い、検出した位置の実際値をフィードバック配線２１でコントローラ１９にフィードバックする。コントローラ１９はフィードバック配線２１よりフィードバックされる位置の実際値を動作指令として入力する位置の目標値に一致するようサーボモータドライバ１６に位置指令（回転数を指令する）を出力すると共に、フィードバック配線１８よりフィードバックされる圧力の実際値を動作指令として入力する圧力の目標値に一致するようサーボモータドライバ１６に圧力指令（回転数を指令する）を出力する。サーボモータドライバ１６はフィードバック配線１５よりフィードバックされるサーボモータ２の回転数がコントローラ１９より入力される位置指令または圧力指令に一致するようサーボモータ２の回転数を制御する。そして、サーボモータドライバ１６とコントローラ１９とで制御部を構成する。   A rotational speed detection sensor 14 such as a rotary encoder that detects the rotational speed of the servo motor 2 feeds back the detected actual rotational speed of the servo motor 2 to the servo motor driver 16 through the feedback wiring 15. Reference numeral 17 denotes a pressure detection sensor disposed in the first flow path 5, which detects the pressure of the pressurized liquid supplied to the cap side port 4 </ b> A of the double acting cylinder 3, and sends the detected actual value to the controller 19 via the feedback wiring 18. provide feedback. Reference numeral 20 denotes a position detection sensor for detecting the position of the piston rod 3A of the double acting cylinder 3. Here, a linear scale that outputs a pulse corresponding to the displacement of the position is used. To give feedback. The controller 19 outputs a position command (commands the number of rotations) to the servo motor driver 16 so that the actual value of the position fed back from the feedback wiring 21 matches the target value of the position input as an operation command, and also feeds back the feedback wiring 18. A pressure command (commanding the number of revolutions) is output to the servo motor driver 16 so that the actual value of the pressure fed back further matches the target value of the pressure inputted as the operation command. The servo motor driver 16 controls the rotation speed of the servo motor 2 so that the rotation speed of the servo motor 2 fed back from the feedback wiring 15 matches the position command or pressure command input from the controller 19. The servo motor driver 16 and the controller 19 constitute a control unit.

液圧ポンプ１は、ばね１Ｄで最大傾斜角度方向に付勢される斜板１Ｃの傾斜角度を変更自在とし、斜板１Ｃを最大傾斜角度にして押しのけ容積を最も大きくした最大容積と、斜板１Ｃを最小傾斜角度にして押しのけ容積を前記最大容積より小さくかつ零より大きくした最小容積とに切換可能に設けた可変容量形ピストンポンプであり、圧力制御弁２２を備える。圧力制御弁２２は、液圧ポンプ１の正回転で一方のポート１Ａから吐出する圧液の一部をパイロット圧液として斜板１Ｃに作用する第１位置Ａと、斜板１Ｃに作用したパイロット圧液をタンクＴに排出する第２位置Ｂとを有する。圧力制御弁２２は、液圧ポンプ１の一方のポート１Ａから吐出する圧液の圧力と調整自在にしたばね２３のばね力とを対向作用し、液圧ポンプ１の一方のポート１Ａから吐出する圧液の圧力がばね２３のばね力に基づく設定圧力未満で第２位置Ｂに切換ると共に、液圧ポンプ１の一方のポート１Ａから吐出する圧液の圧力がばね２３のばね力に基づく設定圧力以上で第１位置Ａに切換るよう設けている。液圧ポンプ１は圧力制御弁２２の第１位置Ａで斜板１Ｃにパイロット圧液を作用して押しのけ容積を最小容積に切換えると共に、圧力制御弁２２の第２位置Ｂで斜板１Ｃに作用したパイロット圧液をタンクＴに排出して押しのけ容積を最大容積に切換える。   The hydraulic pump 1 can change the inclination angle of the swash plate 1C urged by the spring 1D in the direction of the maximum inclination angle, the maximum volume with the maximum displacement volume with the swash plate 1C being the maximum inclination angle, and the swash plate This is a variable displacement piston pump provided with a pressure control valve 22 that can be switched to a minimum volume that is smaller than the maximum volume and greater than zero with 1C as the minimum inclination angle. The pressure control valve 22 includes a first position A that acts on the swash plate 1C by using a part of the pressure liquid discharged from one port 1A by the forward rotation of the hydraulic pump 1 as a pilot pressure liquid, and a pilot that acts on the swash plate 1C. And a second position B for discharging the pressurized liquid to the tank T. The pressure control valve 22 opposes the pressure of the hydraulic fluid discharged from one port 1 A of the hydraulic pump 1 and the spring force of the adjustable spring 23, and discharges it from one port 1 A of the hydraulic pump 1. The pressure of the hydraulic fluid is switched to the second position B below the set pressure based on the spring force of the spring 23, and the pressure of the hydraulic fluid discharged from one port 1A of the hydraulic pump 1 is set based on the spring force of the spring 23. It is provided to switch to the first position A above the pressure. The hydraulic pump 1 applies pilot pressure liquid to the swash plate 1C at the first position A of the pressure control valve 22 to switch the displacement volume to the minimum volume, and acts on the swash plate 1C at the second position B of the pressure control valve 22. The pilot pressure liquid thus discharged is discharged to the tank T and the displacement volume is switched to the maximum volume.

次に、液圧ポンプ１の内部構成を、図２及び図３に基づき説明する。
３０はポンプ本体で、一端面に開口して中空孔３１を穿設し、中空孔３１の開口を閉塞するよう蓋部材３２を複数の締結ボルト３３により一端面に固定する。３４は図１のサーボモータ２に連結する駆動軸で、ポンプ本体３０及び蓋部材３２に軸受を介し回転駆動自在に設け、中間部にはスプラインから成る係合手段３５を介し中空孔３１内へ収装したシリンダブロック３６を一体的に回転するよう支持する。シリンダブロック３６は軸心の周りに間隙を有して複数のシリンダ孔３７を軸方向に貫通して形成し、このシリンダ孔３７にピストン３８を摺動自在に嵌挿してシリンダ室３９を区画形成する。ピストン３８はシリンダブロック３６の軸方向一端面より軸方向に突出し、この突出した先端部にはシュー４０を回転自在に枢支する。シュー４０はリティナ４１で支持され、ピストン３８はシュー４０を介して斜板１Ｃと当接する。シリンダブロック３６は軸方向他端面を蓋部材３２に固定した弁板４２と摺接自在に設け、弁板４２にはシリンダブロック３６の回転でシリンダ室３９が交互に連通するよう一方のポート１Ａと他方のポート１Ｂとを略対向位置に円弧状に貫通形成する。一方のポート１Ａは蓋部材３２に穿設の流路４３Ａを介して図１の第１流路５に接続し、他方のポート１Ｂは蓋部材３２に穿設の流路４３Ｂを介して図１の第２流路６に接続する。 Next, the internal configuration of the hydraulic pump 1 will be described with reference to FIGS.
Reference numeral 30 denotes a pump body, which opens to one end surface and has a hollow hole 31, and a lid member 32 is fixed to the one end surface by a plurality of fastening bolts 33 so as to close the opening of the hollow hole 31. 1 is a drive shaft connected to the servo motor 2 in FIG. 1, and is provided on the pump body 30 and the lid member 32 via a bearing so as to be rotatable. The intermediate portion is inserted into the hollow hole 31 via an engagement means 35 formed of a spline. The accommodated cylinder block 36 is supported to rotate integrally. The cylinder block 36 is formed with a plurality of cylinder holes 37 penetrating in the axial direction with a gap around the shaft center, and a piston 38 is slidably inserted into the cylinder hole 37 to form a cylinder chamber 39. To do. The piston 38 protrudes in the axial direction from one axial end surface of the cylinder block 36, and a shoe 40 is rotatably supported on the protruding tip. The shoe 40 is supported by a retainer 41, and the piston 38 contacts the swash plate 1C via the shoe 40. The cylinder block 36 is slidably contacted with a valve plate 42 whose other axial end surface is fixed to the lid member 32. One port 1A is connected to the valve plate 42 so that cylinder chambers 39 are alternately communicated by the rotation of the cylinder block 36. The other port 1B is formed in a circular arc shape at a substantially opposite position. One port 1A is connected to the first flow path 5 in FIG. 1 through a flow path 43A formed in the lid member 32, and the other port 1B is connected to the first flow path 43B in the cover member 32 through FIG. To the second flow path 6.

斜板１Ｃは中空孔３１内でシリンダブロック３６と同軸上に一定の角度範囲内において傾斜角度を変更自在にポンプ本体３０に支承し、ピストン３８の往復摺動量を変更自在に設ける。斜板１Ｃを最大傾斜角度方向に付勢するばね１Ｄは、中空孔３１内で斜板１Ｃのシュー４０が当接する面の背面にばね力を付与するよう設ける。４４はばね１Ｄのばね力に抗して斜板１Ｃを最小傾斜角度方向へ押圧可能にする操作ピストンで、蓋部材３２よりポンプ本体３０の中空孔３１内へ突設した軸部４５に外嵌し、背面側に形成した作用室４６へ圧力制御弁２２の第１位置Ａで前記パイロット圧液を導入したり圧力制御弁２２の第２位置Ｂで作用室４６へ導入したパイロット圧液をタンクＴに排出したりして軸方向へ摺動自在に設ける。４７は斜板１Ｃの最大傾斜角度を調整する調整ねじ軸で、蓋部材３２へ液密に螺合し、軸方向一端部を作用室４６内に突出して操作ピストン４４の背面に当接すると共に、軸方向他端部を蓋部材３２より外部に突出し、軸方向他端部の回動操作により軸方向へ進退自在にして斜板１Ｃの最大傾斜角度を調整自在にする。４８は斜板１Ｃの最小傾斜角度を設定する設定部材で、斜板１Ｃの背面と対向して中空孔３１内に設置し、斜板１Ｃ背面の当接により斜板１Ｃの最小傾斜角度を設定する。   The swash plate 1C is supported on the pump main body 30 so that the inclination angle can be changed within a predetermined angle range coaxially with the cylinder block 36 in the hollow hole 31, and the reciprocating sliding amount of the piston 38 can be changed. The spring 1D that urges the swash plate 1C in the direction of the maximum inclination angle is provided so as to apply a spring force to the back surface of the surface of the swash plate 1C that contacts the shoe 40 in the hollow hole 31. Reference numeral 44 denotes an operation piston that can press the swash plate 1C in the direction of the minimum inclination angle against the spring force of the spring 1D, and is fitted on the shaft portion 45 that protrudes from the lid member 32 into the hollow hole 31 of the pump body 30. The pilot pressure liquid is introduced into the working chamber 46 formed on the back side at the first position A of the pressure control valve 22 or the pilot pressure liquid introduced into the working chamber 46 at the second position B of the pressure control valve 22 is tanked. It is discharged to T or provided so as to be slidable in the axial direction. 47 is an adjustment screw shaft that adjusts the maximum inclination angle of the swash plate 1C. The adjustment screw shaft is fluid-tightly screwed into the lid member 32, protrudes one end in the axial direction into the working chamber 46, contacts the back surface of the operation piston 44, and The other end in the axial direction protrudes to the outside from the lid member 32, and the maximum inclination angle of the swash plate 1C can be adjusted by moving the other end in the axial direction so as to advance and retract in the axial direction. 48 is a setting member for setting the minimum inclination angle of the swash plate 1C, and is installed in the hollow hole 31 so as to face the back surface of the swash plate 1C, and sets the minimum inclination angle of the swash plate 1C by contact with the back surface of the swash plate 1C. To do.

圧力制御弁２２は蓋部材３２に備え、蓋部材３２には弁孔４９と弁孔４９より大径のばね孔５０とを連設する。弁孔４９には作用室４６へ接続する負荷流路５１を内周面に開口し、負荷流路５１の開口箇所よりばね孔５０連設側へ離間した軸方向一方側の内周面にタンクＴへ接続する排出流路５２を開口すると共に、負荷流路５１の開口箇所より軸方向他方側に離間した内周面に導入流路５３を開口する。導入流路５３は流路４３Ａを介して一方のポート１Ａに接続し、一方のポート１Ａから吐出する圧液の一部をパイロット圧液として導入する。５４はスプール形状の弁体で、弁孔４９へ軸方向摺動自在に嵌挿し、導入孔５３のパイロット圧液が軸方向一端に作用してばね孔５０側に向けて付勢される。設定圧力を設定するばね２３は、ばね孔５０に収装し、ばね受け５５を介して弁体５４をパイロット圧液の圧力に抗して付勢する。５６はばね２３のばね力を調整自在にする調整ねじで、ばね孔５０に螺合して外部からの回動操作により軸方向へ進退自在にしてばね２３力を調整自在にする。スプール５４は軸方向の略中央にランド部５４Ａを有し、導入路５３より軸方向一端に作用するパイロット圧液の圧力がばね２３のばね力に基づく設定圧力未満では、ランド部５４Ａが負荷流路５１と導入流路５３との間に位置し、負荷流路５１を排出流路５２に切換連通すると共に導入流路５３を遮断する（図１の第２位置Ｂ）。また、スプール５４は軸方向一端に作用するパイロット圧液の圧力がばね２３のばね力に基づく設定圧力以上では、ランド部５４Ａが図４に示す如き、負荷流路５１と排出流路５２との間に位置し、負荷流路５１を導入流路５３に切換連通すると共に排出流路５２を遮断する（図１の第１位置Ａ）。斜板１Ｃは圧力制御弁２２の第１位置Ａで、導入流路５３のパイロット圧液が負荷流路５１より作用室４６へ導入されることで、操作ピストン４４に押圧されて背面が設定部材４８に当接する図５に示す最小傾斜角度となり、シリンダ室３９の押しのけ容積を最小容積に切換える。また、斜板１Ｃは圧力制御弁２２の第２位置Ｂで、作用室４６へ導入したパイロット圧液が負荷流路５１より排出流路５２を流れてタンクＴに排出されることで、ばね１Ｄにより付勢されて図２に示す最大傾斜角度となり、シリンダ室３９の押しのけ容積を最大容積に切換える。   The pressure control valve 22 is provided in the lid member 32, and a valve hole 49 and a spring hole 50 having a larger diameter than the valve hole 49 are connected to the lid member 32. In the valve hole 49, a load channel 51 connected to the working chamber 46 is opened on the inner circumferential surface, and a tank is formed on the inner circumferential surface on one axial side separated from the opening portion of the load channel 51 toward the spring hole 50 continuous side. The discharge flow path 52 connected to T is opened, and the introduction flow path 53 is opened on the inner peripheral surface separated from the opening portion of the load flow path 51 on the other side in the axial direction. The introduction flow path 53 is connected to one port 1A through the flow path 43A, and introduces a part of the pressure liquid discharged from the one port 1A as a pilot pressure liquid. A spool-shaped valve body 54 is fitted into the valve hole 49 so as to be slidable in the axial direction, and the pilot pressure liquid in the introduction hole 53 acts on one end in the axial direction and is urged toward the spring hole 50 side. The spring 23 for setting the set pressure is accommodated in the spring hole 50 and urges the valve body 54 against the pressure of the pilot pressure fluid via the spring receiver 55. Reference numeral 56 denotes an adjustment screw that allows the spring force of the spring 23 to be adjusted. The adjustment screw 56 is screwed into the spring hole 50 so as to advance and retreat in the axial direction by a rotation operation from the outside so that the spring 23 force can be adjusted. The spool 54 has a land portion 54A substantially in the center in the axial direction. If the pressure of the pilot pressure fluid acting on one end in the axial direction from the introduction path 53 is less than the set pressure based on the spring force of the spring 23, the land portion 54A It is located between the path 51 and the introduction flow path 53, switches the load flow path 51 to the discharge flow path 52 and shuts off the introduction flow path 53 (second position B in FIG. 1). Further, when the pressure of the pilot pressure fluid acting on one end in the axial direction of the spool 54 is equal to or higher than the set pressure based on the spring force of the spring 23, the land portion 54A has a load flow path 51 and a discharge flow path 52 as shown in FIG. The load channel 51 is switched between the introduction channel 53 and the discharge channel 52 is blocked (first position A in FIG. 1). The swash plate 1C is in the first position A of the pressure control valve 22, and the pilot pressure liquid in the introduction flow path 53 is introduced into the working chamber 46 from the load flow path 51, so that the operation piston 44 is pressed and the back surface is set as a setting member. The minimum inclination angle shown in FIG. 5 is brought into contact with 48, and the displacement volume of the cylinder chamber 39 is switched to the minimum volume. Further, the swash plate 1C is in the second position B of the pressure control valve 22, and the pilot pressure liquid introduced into the working chamber 46 flows from the load flow path 51 through the discharge flow path 52 and is discharged to the tank T, whereby the spring 1D. 2 and the maximum inclination angle shown in FIG. 2 is obtained, and the displacement volume of the cylinder chamber 39 is switched to the maximum volume.

次に、かかる構成の作動を説明する。
複動シリンダ３のピストンロッド３Ａが上方の原位置に停止している図１の状態で、コントローラ１９への動作指令によりサーボモータ２で液圧ポンプ１を正回転すると、液圧ポンプ１は他方のポート１Ｂから吸入した作動液を一方のポート１Ａから圧液として吐出し、この圧液は第１流路５を流れて複動シリンダ３のキャップ側ポート４Ａに供給され、複動シリンダ３はピストンロッド３Ａを下方向へ駆動し、ヘッド側ポート４Ｂの作動液は第２流路６を流れて液圧ポンプ１の他方のポート１Ｂに吸入される。このとき、液圧ポンプ１は、一方のポート１Ａから吐出する圧液の圧力がばね２３のばね力に基づく設定圧力未満で、圧力制御弁２２が第２位置Ｂに位置し、斜板１Ｃがばね１Ｄで付勢されて図２に示す最大傾斜角度であり、シリンダ室３９の押しのけ容積を最大容積に切換えており、図６にＸで示す低圧大流量で複動シリンダ３を制御する。また、ヘッド側ポート４Ｂから排出される作動液量は、キャップ側ポート４Ａに供給される圧液量と比較してピストンロッド３Ａの体積に相当する分少なく、この不足分の作動液は逆止め弁８が接続ロッド９に押圧されて開作動することでタンクＴから補給される。 Next, the operation of this configuration will be described.
When the piston rod 3A of the double acting cylinder 3 is stopped at the upper original position, when the hydraulic pump 1 is rotated forward by the servo motor 2 in response to an operation command to the controller 19, the hydraulic pump 1 The hydraulic fluid sucked in from the port 1B is discharged as pressure fluid from one port 1A, and this pressure fluid flows through the first flow path 5 and is supplied to the cap side port 4A of the double acting cylinder 3. The piston rod 3A is driven downward, and the hydraulic fluid in the head side port 4B flows through the second flow path 6 and is sucked into the other port 1B of the hydraulic pump 1. At this time, in the hydraulic pump 1, the pressure of the hydraulic fluid discharged from one port 1A is less than the set pressure based on the spring force of the spring 23, the pressure control valve 22 is located at the second position B, and the swash plate 1C is The maximum tilt angle shown in FIG. 2 is urged by the spring 1D, the displacement volume of the cylinder chamber 39 is switched to the maximum volume, and the double-acting cylinder 3 is controlled with a low pressure and a large flow rate indicated by X in FIG. The amount of hydraulic fluid discharged from the head side port 4B is smaller than the amount of hydraulic fluid supplied to the cap side port 4A by an amount corresponding to the volume of the piston rod 3A. The valve 8 is replenished from the tank T by being pressed by the connecting rod 9 and opening.

ピストンロッド３Ａの下方向への駆動で、位置検出センサ２０がピストンロッド３Ａの実際の位置を検出し、コントローラ１９はフィードバック配線２１よりフィードバックされる位置の実際値を位置の目標値に一致させるよう位置指令をサーボモータドライバ１６へ出力し、サーボモータドライバ１６はフィードバック配線１５よりフィードバックされるサーボモータ２の回転数がコントローラ１９より入力される位置指令に一致するようサーボモータ２の回転数を制御する。   When the piston rod 3A is driven downward, the position detection sensor 20 detects the actual position of the piston rod 3A, and the controller 19 matches the actual value of the position fed back from the feedback wiring 21 with the target position value. The position command is output to the servo motor driver 16, and the servo motor driver 16 controls the rotation speed of the servo motor 2 so that the rotation speed of the servo motor 2 fed back from the feedback wiring 15 matches the position command input from the controller 19. To do.

ピストンロッド３ＡがワークＷの近傍まで下方に駆動して位置の実際値が位置の目標値に一致すると、ピストンロッド３Ａの位置制御が完了し、引き続き、ピストンロッド３Ａを下方へ駆動する。そして、ピストンロッド３ＡがワークＷに当接すると、一方のポート１Ａから吐出してキャップ側ポート４Ａに供給される圧液の圧力が上昇し、この圧液の圧力がばね２３のばね力に基づく設定圧力以上になると、液圧ポンプ１は、圧力制御弁２２が第１位置Ａに切換り図４に示す状態となり、導入路５３のパイロット圧液が負荷流路５１より作用室４６に導入され、斜板１Ｃが操作ピストン４４で押圧されて設定部材４８に当接する図５に示す最小傾斜角度になり、シリンダ室３９の押しのけ容積を最小容積に切換え、図６にＹで示す高圧小流量で複動シリンダ３を制御する。   When the piston rod 3A is driven downward to the vicinity of the workpiece W and the actual position value matches the target position value, the position control of the piston rod 3A is completed, and the piston rod 3A is subsequently driven downward. When the piston rod 3A comes into contact with the workpiece W, the pressure of the pressure liquid discharged from the one port 1A and supplied to the cap side port 4A increases. The pressure of the pressure liquid is based on the spring force of the spring 23. When the pressure becomes higher than the set pressure, the hydraulic pump 1 switches the pressure control valve 22 to the first position A and enters the state shown in FIG. 4, and the pilot pressure fluid in the introduction passage 53 is introduced into the working chamber 46 from the load passage 51. 5, the swash plate 1C is pressed by the operating piston 44 to abut against the setting member 48, the minimum inclination angle shown in FIG. 5 is reached, the displacement volume of the cylinder chamber 39 is switched to the minimum volume, and the high pressure and small flow rate indicated by Y in FIG. The double acting cylinder 3 is controlled.

そして、複動シリンダ３のキャップ側ポート４Ａに供給する圧液の圧力の実際値を圧力検出センサ１７で検出してフィードバック配線１８よりコントローラ１９にフィードバックし、コントローラ１９は圧力の実際値を圧力の目標値に一致させるよう圧力指令をサーボモータドライバ１６へ出力し、サーボモータドライバ１６はフィードバック配線１５よりフィードバックされるサーボモータ２の回転数がコントローラ１９より入力される圧力指令に一致するようサーボモータ２の回転数を制御し、ピストンロッド３ＡによるワークＷの加圧を圧力制御する。   Then, the actual pressure value of the pressure fluid supplied to the cap side port 4A of the double acting cylinder 3 is detected by the pressure detection sensor 17 and fed back to the controller 19 from the feedback wiring 18, and the controller 19 converts the actual pressure value to the pressure value. A pressure command is output to the servo motor driver 16 so as to match the target value, and the servo motor driver 16 causes the servo motor 2 so that the rotation speed of the servo motor 2 fed back from the feedback wiring 15 matches the pressure command inputted from the controller 19. 2 to control the pressurization of the workpiece W by the piston rod 3A.

ワークＷの加圧加工が完了すると、コントローラ１９への動作指令によりサーボモータ２で液圧ポンプ１を逆回転し、液圧ポンプ１は一方のポート１Ａから吸入した作動液を他方のポート１Ｂから圧液として吐出し、この圧液は第２流路６を流れて複動シリンダ３のヘッド側ポート４Ｂに供給され、複動シリンダ３はピストンロッド３Ａを上方へ駆動し、キャップ側ポート４Ａの作動液は第１流路５を流れ、液圧ポンプ１の一方のポート１Ａに吸入される。このとき、液圧ポンプ１は一方のポート１Ａが吸入側となって低圧であるため、圧力制御弁２２がばね２３のばね力で第２位置Ｂに切換り、斜板１Ｃがばね１Ｄで付勢されて図２に示す最大傾斜角度になり、シリンダ室３９の押しのけ容積を最大容積に切換え、低圧大流量で複動シリンダ３を制御する。また、キャップ側ポート４Ａから排出される作動液量は、ヘッド側ポート４Ｂに供給される圧液量と比較してピストンロッド３Ａの体積に相当する分多く、この余分な作動液は逆止め弁７が接続ロッド９に押圧されて開作動することでタンクＴに排出される。   When the pressurization of the workpiece W is completed, the hydraulic pump 1 is reversely rotated by the servo motor 2 according to an operation command to the controller 19, and the hydraulic pump 1 draws the hydraulic fluid sucked from one port 1A from the other port 1B. Discharged as pressure fluid, this pressure fluid flows through the second flow path 6 and is supplied to the head-side port 4B of the double-acting cylinder 3. The double-acting cylinder 3 drives the piston rod 3A upward, and the cap-side port 4A The hydraulic fluid flows through the first flow path 5 and is sucked into one port 1A of the hydraulic pump 1. At this time, since one port 1A is at the suction side and the hydraulic pump 1 is at a low pressure, the pressure control valve 22 is switched to the second position B by the spring force of the spring 23, and the swash plate 1C is attached by the spring 1D. 2, the maximum tilt angle shown in FIG. 2 is reached, the displacement volume of the cylinder chamber 39 is switched to the maximum volume, and the double-action cylinder 3 is controlled with a low pressure and a large flow rate. Further, the amount of hydraulic fluid discharged from the cap side port 4A is larger than the amount of hydraulic fluid supplied to the head side port 4B by an amount corresponding to the volume of the piston rod 3A. 7 is pressed by the connecting rod 9 to open, and discharged to the tank T.

ピストンロッド３Ａを図１の原位置まで復帰すると、コントローラ１９はサーボモータドライバ１６に停止指令を出力して液圧ポンプ１を停止し、ピストンロッド３Ａを図１の原位置で停止する。   When the piston rod 3A is returned to the original position in FIG. 1, the controller 19 outputs a stop command to the servo motor driver 16 to stop the hydraulic pump 1 and stop the piston rod 3A at the original position in FIG.

かかる作動で、一方のポート１Ａから複動シリンダ３に吐出する圧液の圧力が圧力制御弁２２のばね２３のばね力に基づく設定圧力未満でシリンダ室３９の押しのけ容積を最大容積に切換えると共に、一方のポート１Ａから複動シリンダ３に吐出する圧液の圧力がばね２３のばね力に基づく設定圧力以上でシリンダ室３９の押しのけ容積を最小容積に切換える液圧ポンプ１を備えているため、ばね２３のばね力に基づく設定圧力未満の最大容積で複動シリンダ３を図６にＸで示す低圧大流量で制御できると共に、ばね２３のばね力に基づく設定圧力以上の最小容積で複動シリンダ３を図６にＹで示す高圧小流量で制御できるから、低圧大流量の制御と高圧小流量の制御とを単一の液圧ポンプ１で可能にできて装置全体のコンパクト化を図ることができる。また、液圧ポンプ１はばね２３のばね力に基づく設定圧力以上でシリンダ室３９の押しのけ容積を最小容積に切換えるため、従来の高圧小流量の制御で使用する一方の液圧ポンプと比較して、必要トルクを増加することなくでき、液圧ポンプ１を回転するサーボモータ２を大型で高価格なものとすることなく、出力の小さい小型のものを維持できる。   With this operation, the displacement of the cylinder chamber 39 is switched to the maximum volume when the pressure of the hydraulic fluid discharged from the one port 1A to the double acting cylinder 3 is less than the set pressure based on the spring force of the spring 23 of the pressure control valve 22, and Since the hydraulic pump 1 is provided that switches the displacement volume of the cylinder chamber 39 to the minimum volume when the pressure of the hydraulic fluid discharged from the one port 1A to the double acting cylinder 3 is equal to or higher than the set pressure based on the spring force of the spring 23, the spring The double acting cylinder 3 can be controlled with a low pressure and a large flow rate indicated by X in FIG. 6 with a maximum volume less than a set pressure based on the spring force of 23, and a double volume cylinder 3 with a minimum volume greater than or equal to the set pressure based on the spring force of the spring 23. 6 can be controlled by a high pressure and a small flow rate indicated by Y in FIG. 6, so that the control of the low pressure and the large flow rate and the control of the high pressure and the small flow rate can be performed by a single hydraulic pump 1 and the overall apparatus can be made compact. Can. Further, since the hydraulic pump 1 switches the displacement volume of the cylinder chamber 39 to the minimum volume at a set pressure or more based on the spring force of the spring 23, it is compared with one hydraulic pump used in the conventional high pressure / small flow rate control. The required torque can be increased without increasing the servo motor 2 that rotates the hydraulic pump 1, and the small output with a small output can be maintained without making the servo motor 2 large and expensive.

また、複動シリンダ３側からフィードバックした圧力の実際値を圧力の目標値に一致するようサーボモータドライバ１６、コントローラ１９でサーボモータ２の回転数を制御しているため、複動シリンダ３を高圧小流量で精度良く圧力制御することができる。さらにまた、圧力制御弁２２のばね２３のばね力を調整ねじ５６の回動操作により調整することで設定圧力を調整自在にしているため、この設定圧力の変更に伴い複動シリンダ３を高圧小流量制御で圧力制御を開始する値を自動的に変更することができる。   Further, since the servo motor driver 16 and the controller 19 control the rotational speed of the servo motor 2 so that the actual pressure value fed back from the double acting cylinder 3 side matches the target pressure value, the double acting cylinder 3 has a high pressure. The pressure can be accurately controlled with a small flow rate. Furthermore, since the set pressure can be adjusted by adjusting the spring force of the spring 23 of the pressure control valve 22 by rotating the adjusting screw 56, the double-acting cylinder 3 is made small in accordance with the change in the set pressure. The value at which pressure control is started in the flow rate control can be automatically changed.

なお、一実施形態では、回転数を制御可能な電動モータとしてサーボモータ２を用いたが、三相誘導電動モータをインバータ制御で回転数を制御可能としたりインバータモータやステッピングモータを用いたりしても良い。また、一実施形態で設けた圧力検出センサ１７に替えて、ピストンロッド３Ａの先端に圧電式のロードセル等の荷重検出センサを設け、ピストンロッド３ＡでワークＷを加圧加工する際に、荷重検出センサで検出した荷重の実際値をフィードバックして荷重の目標値と一致するようサーボモータ２の回転数を制御する荷重制御としても良い。 In the embodiment, the servo motor 2 is used as an electric motor capable of controlling the rotation speed. However, the rotation speed of the three-phase induction electric motor can be controlled by inverter control, or an inverter motor or a stepping motor is used. Also good. Further, in place of the pressure detection sensor 17 provided in the embodiment, a load detection sensor such as a piezoelectric load cell is provided at the tip of the piston rod 3A, and the load detection is performed when the workpiece W is pressed by the piston rod 3A. Load control for controlling the number of revolutions of the servo motor 2 so as to match the target value of the load by feeding back the actual value of the load detected by the sensor may be adopted .

本発明の一実施形態を示し、液圧駆動装置の一部をブロックで示した液圧回路図である。FIG. 3 is a hydraulic circuit diagram showing a block of a part of the hydraulic driving device according to the embodiment of the present invention. 本発明の一実施形態で、液圧駆動装置を構成する液圧ポンプの縦断面図である。It is a longitudinal cross-sectional view of the hydraulic pump which comprises the hydraulic drive apparatus by one Embodiment of this invention. 図２の線Ａ−Ａに沿った断面図である。FIG. 3 is a cross-sectional view taken along line AA in FIG. 2. 図３と異なる作動状態を示す図３に相当する断面図である。FIG. 4 is a cross-sectional view corresponding to FIG. 3 showing an operating state different from FIG. 3. 図２と異なる作動状態を示す図２に相当する縦断面図である。It is a longitudinal cross-sectional view equivalent to FIG. 2 which shows the operation state different from FIG. 本発明の一実施形態を示し、液圧ポンプの圧力−流量特性を示すグラフである。It is a graph which shows one Embodiment of this invention and shows the pressure-flow rate characteristic of a hydraulic pump.

符号の説明Explanation of symbols

１：液圧ポンプ
１Ａ：一方のポート
１Ｂ：他方のポート
２：サーボモータ（電動モータ）
３：複動シリンダ（液圧アクチュエータ）
１６：サーボモータドライバ（制御部）
１７：圧力検出センサ
１９：コントローラ（制御部）
２２：圧力制御弁 1: Hydraulic pump 1A: One port 1B: The other port 2: Servo motor (electric motor)
3: Double acting cylinder (hydraulic actuator)
16: Servo motor driver (control unit)
17: Pressure detection sensor 19: Controller (control unit)
22: Pressure control valve

Claims (1)

回転数を制御可能な電動モータと、二つのポートを有し電動モータによる正回転で一方のポートから圧液を吐出すると共に逆回転で他方のポートから圧液を吐出する正逆回転可能な液圧ポンプと、二つのポートを有し液圧ポンプから吐出する圧液によって駆動される液圧アクチュエータと、この液圧アクチュエータ側からフィードバックされる実際値を目標値に一致するよう前記電動モータの回転数を制御する制御部とを備え、前記液圧ポンプの両ポートと前記液圧アクチュエータの両ポートとを接続し、前記液圧ポンプは、斜板の傾斜角度を変更自在とし、斜板を最大傾斜角度にして押しのけ容積を最も大きくした最大容積と、斜板を最小傾斜角度にして押しのけ容積を前記最大容積より小さくかつ零より大きくした最小容積とに切換可能に設けて圧力制御弁を備え、斜板の最大傾斜角度を調整ねじ軸の回動操作で調整自在にすると共に、斜板の最小傾斜角度を斜板の設定部材への当接で設定して設け、前記圧力制御弁は前記液圧ポンプから吐出する圧液の圧力と調整自在にしたばねのばね力に基づく設定圧力とを対向作用し、前記液圧ポンプから前記液圧アクチュエータに吐出する圧液の圧力が前記設定圧力未満で押しのけ容積を前記最大容積に切換えると共に、前記液圧ポンプから前記液圧アクチュエータに吐出する圧液の圧力が前記設定圧力以上で押しのけ容積を前記最小容積に切換え、前記液圧ポンプを前記設定圧力未満で押しのけ容積を前記最大容積に切換えた状態で、前記液圧アクチュエータ側から位置の実際値を前記制御部へフィードバックし、前記液圧ポンプを前記設定圧力以上で押しのけ容積を前記最小容積に切換えた状態で、前記液圧アクチュエータ側から圧力若しくは荷重の実際値を前記制御部へフィードバックし、前記制御部は位置の実際値を位置の目標値に一致するよう前記電動モータの回転数を制御すると共に、圧力若しくは荷重の実際値を圧力若しくは荷重の目標値に一致するよう前記電動モータの回転数を制御することを特徴とする液圧駆動装置。 An electric motor capable of controlling the number of rotations, and a fluid that has two ports and can be rotated forward and backward by discharging pressure liquid from one port by forward rotation by the electric motor and discharging pressure liquid from the other port by reverse rotation A pressure pump, a hydraulic actuator having two ports and driven by pressure fluid discharged from the hydraulic pump, and rotation of the electric motor so that the actual value fed back from the hydraulic actuator side matches the target value A control unit for controlling the number of ports, and connecting both ports of the hydraulic pump and both ports of the hydraulic actuator, the hydraulic pump can change the inclination angle of the swash plate, and the maximum volume to the inclination angle and the greatest volume displacement which was, switchable volume displacement by the swash plate to the minimum inclination angle and the minimum volume, which was greater than and zero less than the maximum volume Provided with a pressure control valve, as well as to freely adjust the maximum inclination angle of the swash plate in the rotating operation of the adjusting screw shaft, by setting the minimum inclination angle of the swash plate in abutment against the swash plate of the setting member is provided The pressure control valve opposes the pressure of the hydraulic fluid discharged from the hydraulic pump and a set pressure based on the spring force of an adjustable spring, and discharges the hydraulic fluid from the hydraulic pump to the hydraulic actuator. together with the pressure switch the volume displacement of less than the set pressure to the maximum volume, switching the volume displacement at a pressure of liquid to be discharged to the hydraulic actuator from the hydraulic pump is the set pressure above the minimum volume, the In a state where the displacement of the hydraulic pump is less than the set pressure and the displacement volume is switched to the maximum volume, the actual value of the position is fed back from the hydraulic actuator side to the control unit, and the hydraulic pump is In the state where the displacement volume is switched to the minimum volume above the set pressure, the actual value of pressure or load is fed back to the control unit from the hydraulic actuator side, and the control unit returns the actual position value to the target position value. And the rotational speed of the electric motor is controlled so that the actual value of the pressure or load matches the target value of the pressure or load. .
JP2003375007A 2003-11-04 2003-11-04 Hydraulic drive device Expired - Fee Related JP4263072B2 (en)

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