JP4243686B2 - レーザモニタ - Google Patents
レーザモニタ Download PDFInfo
- Publication number
- JP4243686B2 JP4243686B2 JP2003403766A JP2003403766A JP4243686B2 JP 4243686 B2 JP4243686 B2 JP 4243686B2 JP 2003403766 A JP2003403766 A JP 2003403766A JP 2003403766 A JP2003403766 A JP 2003403766A JP 4243686 B2 JP4243686 B2 JP 4243686B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- processing
- container
- laser light
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 238000000427 thin-film deposition Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
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- Physical Vapour Deposition (AREA)
Description
Claims (1)
- 真空容器内に、該容器外よりレーザ光を導入し、該レーザ光を利用して処理を行う装置のレーザモニタにおいて、薄膜堆積前又は加工前には、該容器内のレーザ光路上に挿入されてターゲット直前での光強度を測定し、成膜時又は加工時には、容器側面に設置された待避室に退避しゲートバルブにより容器と遮断されるレーザ光強度測定装置を設けたことを特徴とするレーザモニタ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003403766A JP4243686B2 (ja) | 2003-12-02 | 2003-12-02 | レーザモニタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003403766A JP4243686B2 (ja) | 2003-12-02 | 2003-12-02 | レーザモニタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005163113A JP2005163113A (ja) | 2005-06-23 |
JP4243686B2 true JP4243686B2 (ja) | 2009-03-25 |
Family
ID=34726971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003403766A Expired - Lifetime JP4243686B2 (ja) | 2003-12-02 | 2003-12-02 | レーザモニタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4243686B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114481040A (zh) * | 2021-12-23 | 2022-05-13 | 北京科技大学 | 一种可真空原位监测激光工艺参数的激光脉冲沉积***及方法 |
-
2003
- 2003-12-02 JP JP2003403766A patent/JP4243686B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005163113A (ja) | 2005-06-23 |
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