JP4229793B2 - Optical distance measuring device - Google Patents

Optical distance measuring device Download PDF

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JP4229793B2
JP4229793B2 JP2003332875A JP2003332875A JP4229793B2 JP 4229793 B2 JP4229793 B2 JP 4229793B2 JP 2003332875 A JP2003332875 A JP 2003332875A JP 2003332875 A JP2003332875 A JP 2003332875A JP 4229793 B2 JP4229793 B2 JP 4229793B2
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徳康 小林
成彦 向井
綾一 佐伯
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Description

本発明は、低コヒーレンス光を用いて非接触で距離を計測する光学式距離計測装置に関する。 The present invention relates to an optical rangefinder HakaSo location for measuring a distance without contact with the low-coherence light.

従来、計測用光源として低コヒーレンス光源を用い、計測光と参照光の干渉を利用して計測ヘッドから計測対象面の間の距離を計測する場合、計測用低コヒーレンス光源として赤外光源を用いている（下記非特許文献１参照）。
「レーザー研究」第３０巻第１１号Ｐ６４８、「機能的ＯＣＴによる脳機能イメージング」ラジャゴパラン ウママヘスワリ、谷藤学（２００２年１１月レーザー学会編） Conventionally, when a low-coherence light source is used as a measurement light source and the distance between the measurement head and the measurement target surface is measured using interference between the measurement light and the reference light, an infrared light source is used as the measurement low-coherence light source. (See Non-Patent Document 1 below).
“Laser Research,” Volume 30, No. 11, P648, “Functional OCT Brain Functional Imaging” Rajagoparan Umahaswari, Manabu Tanifuji (November 2002, Laser Society)

上記の従来の光学式距離計測装置においては、一般的に計測用の低コヒーレンス光源の波長が赤外領域であるため計測対象面上の計測点を視認することができない。また、同様に波長領域の観点から計測用低コヒーレンス光源からの光は水中での透過性が悪いため、水中での距離計測が困難である。   In the above conventional optical distance measuring device, since the wavelength of the low-coherence light source for measurement is generally in the infrared region, the measurement point on the measurement target surface cannot be visually recognized. Similarly, from the viewpoint of the wavelength region, the light from the low-coherence light source for measurement is difficult to measure the distance in water because of its poor permeability in water.

本発明はかかる従来の事情に対処してなされたものであり、計測対象面上の計測点の視認性が良く、水中でも距離計測を行うことができ、計測感度および精度の高い光学式距離計測装置を提供することを目的とする。 The present invention has been made in response to such a conventional situation, and has excellent visibility of measurement points on a measurement target surface, can perform distance measurement even in water, and has high measurement sensitivity and accuracy. an object of the present invention is to provide a HakaSo location.

請求項１の発明の光学式距離計測装置は、距離計測用の低コヒーレンス光を発生する低コヒーレンス光源と、可視光を発生する可視光源と、前記低コヒーレンス光と前記可視光を同一光路に合成する波長合成器と、前記波長合成器に接続され前記同一光路に合成された光を計測用光路と参照用光路に分割する光分配器と、前記計測用光路の末端に接続され計測対象面に対向して設けられる計測ヘッドと、前記参照用光路に順次接続された周期的光路長変化素子および遅延光学系および全反射素子と、前記光分配器に接続され前記計測用光路を戻った光および前記参照用光路を戻った光が合成された光から低コヒーレンス光と可視光を分離する波長分離器と、前記波長分離器に接続され低コヒーレンス光を検出して前記計測用光路からの低コヒーレンス光と前記参照用光路からの低コヒーレンス光の干渉による光強度変化を電気信号に変換する光検出器と、前記光検出器に接続され前記電気信号を電気強度変化信号に変換する信号検出部と、前記信号検出部に接続され前記電気強度変化信号により前記干渉による光強度変化が最大になるように前記遅延光学系の変位量を調節して前記計測用光路の光路長と前記参照用光路の光路長を等しくするとともに前記遅延光学系の遅延光路長から前記計測ヘッドと前記計測対象面の間の距離を求める信号処理制御部と、前記信号処理制御部に接続され前記距離を表示する距離表示部とを備え、前記低コヒーレンス光源は水中透過率の高い波長の光を発生する光源であり、前記計測ヘッドは水密構造であり、前記信号処理制御部は水の屈折率によって光路長を補正する屈折率補正部を備えている構成とする。 An optical distance measuring device according to a first aspect of the present invention is a low-coherence light source that generates low-coherence light for distance measurement, a visible light source that generates visible light, and combines the low-coherence light and the visible light in the same optical path. A wavelength synthesizer, a light distributor that is connected to the wavelength synthesizer and combined in the same optical path, and divides the light into a measurement optical path and a reference optical path, and is connected to an end of the measurement optical path and is connected to a measurement target surface. Opposing measuring head, periodic optical path length changing element and delay optical system and total reflection element sequentially connected to the reference optical path, light returning to the measuring optical path connected to the optical distributor, and A wavelength separator that separates low-coherence light and visible light from the combined light returning from the reference optical path, and a low-coherence light from the measurement optical path that is connected to the wavelength separator and detects the low-coherence light. A photodetector that converts a change in light intensity due to interference between the lens light and the low-coherence light from the reference optical path into an electrical signal, and a signal detector that is connected to the photodetector and converts the electrical signal into an electrical intensity change signal. And the optical path length of the measurement optical path and the reference optical path by adjusting the amount of displacement of the delay optical system so that the change in the optical intensity due to the interference is maximized by the electrical intensity change signal connected to the signal detection unit A signal processing control unit for obtaining a distance between the measurement head and the measurement target surface from the delay optical path length of the delay optical system, and a distance connected to the signal processing control unit for displaying the distance The low coherence light source is a light source that generates light having a high wavelength in water, the measurement head has a watertight structure, and the signal processing control unit is based on the refractive index of water. Te a configuration that has a refractive index correcting unit for correcting the optical path length.

請求項２の発明は、前記信号検出部は、前記電気強度変化信号を整流してエンベロープを求める振幅復調部と、信号レベルを高め所定レベルの信号を出力する自動利得制御部とを備えている構成とする。 According to a second aspect of the present invention, the signal detection unit includes an amplitude demodulation unit that rectifies the electrical intensity change signal to obtain an envelope, and an automatic gain control unit that increases the signal level and outputs a signal of a predetermined level. The configuration.

請求項３の発明は、前記信号処理制御部は、前記周期的光路長変化素子の光路長変化周波数を持つ信号で前記信号検出部からの電気強度変化信号を同期検波し、前記電気強度変化信号の周波数成分のうち支配的周波数成分が前記周期的光路長変化素子の周波数の２倍高調波成分となるように前記遅延光学系を制御する構成とする。 According to a third aspect of the present invention, the signal processing control unit synchronously detects an electric intensity change signal from the signal detection unit with a signal having an optical path length change frequency of the periodic optical path length changing element, and the electric intensity change signal The delay optical system is controlled such that a dominant frequency component of the frequency components is a second harmonic component of the frequency of the periodic optical path length changing element.

請求項４の発明は、前記光分配器の後段に第２の光分配器を備え、前記計測ヘッドからの反射光と前記計測対象面からの反射光および散乱光との干渉を利用する構成とする。
請求項５の発明は、前記計測ヘッドから前記計測対象面に照射される計測光を、集束照射型あるいは平行照射型とした構成とする。 According to a fourth aspect of the present invention, a second light distributor is provided at a subsequent stage of the light distributor, and the interference between the reflected light from the measurement head and the reflected light and scattered light from the measurement target surface is used. To do.
According to a fifth aspect of the present invention, the measurement light emitted from the measurement head to the measurement target surface is a focused irradiation type or a parallel irradiation type.

請求項６の発明は、前記遅延光学系は多重反射素子を備えている構成とする。
請求項７の発明は、前記全反射素子は、全反射ミラーと、前記全反射ミラーを光軸の方向に微小振動させる微小振動機構と、前記全反射ミラーを光軸の方向に移動させる移動機構とを備えている構成とする。 According to a sixth aspect of the present invention, the delay optical system includes a multiple reflection element.
According to a seventh aspect of the present invention, the total reflection element includes a total reflection mirror, a minute vibration mechanism that minutely vibrates the total reflection mirror in the direction of the optical axis, and a moving mechanism that moves the total reflection mirror in the direction of the optical axis. It is set as the structure provided with.

請求項８の発明は、前記低コヒーレンス光源は、変調されたレーザ光源あるいはスーパールミネッセントダイオード光源あるいはフラッシュランプ光源あるいはＸ線光源である構成とする。
請求項９の発明は、前記計測用光路は、複数の計測ヘッドと、前記複数の計測ヘッドに光路を切り替える光路切替え器とを備えている構成とする。 According to an eighth aspect of the present invention, the low coherence light source is a modulated laser light source, a super luminescent diode light source, a flash lamp light source, or an X-ray light source.
According to a ninth aspect of the present invention, the measurement optical path includes a plurality of measurement heads and an optical path switch that switches the optical paths to the plurality of measurement heads.

請求項１０の発明は、前記各光学部品間の光路あるいはその一部が光ファイバーあるいは導波管で構成されている構成とする。
請求項１１の発明は、前記光ファイバーのコネクタ端面からの反射光が計測光と参照光の光路差内に存在しないように光路長設定された位置に前記コネクタが設置されている構成とする。 The invention of claim 10 is configured such that an optical path between the optical components or a part thereof is constituted by an optical fiber or a waveguide.
According to an eleventh aspect of the present invention, the connector is installed at a position where the optical path length is set so that reflected light from the connector end face of the optical fiber does not exist within the optical path difference between the measurement light and the reference light.

本発明によれば、計測対象面上の計測点の視認性が良く、水中でも距離計測を行うことができ、計測感度および精度の高い光学式距離計測装置を提供することができる。 According to the present invention, good visibility of the measurement point on the measurement target surface, it can be performed even if the distance measurement in water, it is possible to provide a high measurement sensitivity and accuracy optical rangefinder HakaSo location.

以下、図面を参照して本発明の第１〜第10の実施例を説明する。   Hereinafter, first to tenth embodiments of the present invention will be described with reference to the drawings.

本発明に係る光学式距離計測装置の第１の実施例を図１，２，３を参照して説明する。
本発明の第１の実施例の光学式距離計測装置は、図１に示すように、低コヒーレンス光源１、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２、計測ヘッド４、参照用光路１３、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１から構成されている。 A first embodiment of an optical distance measuring device according to the present invention will be described with reference to FIGS.
As shown in FIG. 1, the optical distance measuring device according to the first embodiment of the present invention includes a low coherence light source 1, an isolator 2, a visible light source 16, a wavelength synthesizer 17, an optical distributor 3, an optical path for measurement 12, Measuring head 4, reference optical path 13, periodic optical path length changing element 5, delay optical system 6, total reflection element 7, wavelength separator 18, photodetector 8, signal detector 9, signal processing controller 10, and distance display The unit 11 is configured.

低コヒーレンス光源１、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２および計測ヘッド４が計測用光学系を構成し、光分配器３、参照用光路１３、周期的光路長変化素子５、遅延光学系６および全反射素子７が参照用光学系を構成し、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１が信号検出演算部を構成する。   The low coherence light source 1, isolator 2, visible light source 16, wavelength synthesizer 17, light distributor 3, measuring optical path 12 and measuring head 4 constitute a measuring optical system, and the optical distributor 3, reference optical path 13, period The optical path length changing element 5, the delay optical system 6 and the total reflection element 7 constitute a reference optical system, and a wavelength separator 18, a photodetector 8, a signal detection unit 9, a signal processing control unit 10 and a distance display unit 11. Constitutes a signal detection calculation unit.

このように構成された本実施例の光学式距離計測装置において、低コヒーレンス光源１から発せられた光はアイソレータ２を通過した後、波長合成器１７に入射する。また、このとき可視光源１６から発せられた可視光も波長合成器１７に入射し、ここで、低コヒーレンス光と可視光が同一光路に合成される。合成された光は、ハーフミラーなどからなる光分配器３により計測用光路１２と参照用光路１３に分けられる。   In the optical distance measuring device of the present embodiment configured as described above, the light emitted from the low coherence light source 1 passes through the isolator 2 and then enters the wavelength synthesizer 17. At this time, the visible light emitted from the visible light source 16 also enters the wavelength synthesizer 17, where the low-coherence light and the visible light are combined in the same optical path. The combined light is divided into a measurement optical path 12 and a reference optical path 13 by an optical distributor 3 including a half mirror.

計測用光路１２に分けられた光は計測ヘッド４を経て計測対象面１４に照射され、反射および散乱する。反射光および散乱光の一部１５は再び計測ヘッド４に入射し、計測用光路１２を光分配器３の方向に進む。一方、参照用光路１３に分けられた光は周期的光路長変化素子５および遅延光学系６を通過した後、全反射素子７で全反射し、参照用光路１３を光分配器３の方向に進む。   The light divided into the measurement optical path 12 is irradiated to the measurement target surface 14 through the measurement head 4, and is reflected and scattered. A part 15 of the reflected light and the scattered light again enters the measurement head 4 and travels along the measurement optical path 12 in the direction of the light distributor 3. On the other hand, the light divided into the reference optical path 13 passes through the periodic optical path length changing element 5 and the delay optical system 6 and then totally reflected by the total reflection element 7, so that the reference optical path 13 is directed in the direction of the optical distributor 3. move on.

光分配器３に戻ってきた計測用光路１２の光と参照用光路１３の光は光分配器３で再び一つの光に合成され、波長分離器１８に入射する。波長分離器１８に入射した波長の異なる低コヒーレンス光と可視光は、ここで分離され各々異なる光路を進む。可視光側の光路を遮光し、低コヒーレンス光側の光路の後段に光検出器８を設置することで、低コヒーレンス光のみが光検出器８に入射する。   The light in the measurement optical path 12 and the light in the reference optical path 13 that have returned to the optical distributor 3 are combined again into one light by the optical distributor 3 and enter the wavelength separator 18. Low coherence light and visible light having different wavelengths incident on the wavelength separator 18 are separated here and travel on different optical paths. The light path on the visible light side is shielded, and the photodetector 8 is installed in the subsequent stage of the optical path on the low coherence light side, so that only the low coherence light is incident on the photodetector 8.

光検出器８に入射した低コヒーレンス光の強度は計測用光路１２と参照用光路１３の光路差により変化し、光路差が計測用低コヒーレンス光源１の持つ波長の１／２の整数倍となったときに最大強度を示す。図１（ｂ）に光検出器８に入射した光の強度変化の一例を示す。   The intensity of the low coherence light incident on the photodetector 8 changes due to the optical path difference between the measurement optical path 12 and the reference optical path 13, and the optical path difference is an integral multiple of 1/2 of the wavelength of the measurement low coherence light source 1. The maximum strength is shown. FIG. 1B shows an example of a change in intensity of light incident on the photodetector 8.

図１（ｂ）のような光強度変化が現れる場合の条件は、計測用光路１２と参照用光路１３の光路長が等しく（光路差がゼロと）なるように遅延光学系６が調整されており、周期的光路長変化素子５により光路差ゼロの点を中心として周期的に光路差を変化させた場合である。また、このとき周期的に変化させた光路差の振幅Ａは計測用低コヒーレンス光源１のコヒーレンス長より大きい場合である。   The condition when the light intensity change as shown in FIG. 1B appears is that the delay optical system 6 is adjusted so that the optical path lengths of the measurement optical path 12 and the reference optical path 13 are equal (the optical path difference is zero). This is a case where the optical path difference is periodically changed around the point where the optical path difference is zero by the periodic optical path length changing element 5. Further, the amplitude A of the optical path difference periodically changed at this time is larger than the coherence length of the measurement low coherence light source 1.

周期的光路長変化素子５の振幅がゼロとなり、計測用光路１２と参照用光路１３の光路長が等しくなったとき光強度は最大となり、周期的光路長変化素子５の変化にともない光強度は強弱変化する。しかし、周期的光路長変化素子５の振幅が低コヒーレンス光源１のコヒーレンス長に近づくにつれ、計測用光路１２からの光と参照用光路１３からの光の干渉度が小さくなるため光強度変化は徐々に小さくなる。そして、周期的光路長変化素子５の振幅が低コヒーレンス光源１のコヒーレンス長より大きくなると光強度変化は観測されなくなる。   When the amplitude of the periodic optical path length changing element 5 becomes zero and the optical path lengths of the measurement optical path 12 and the reference optical path 13 become equal, the light intensity becomes maximum, and the light intensity accompanying the change of the periodic optical path length changing element 5 becomes Changes strength. However, as the amplitude of the periodic optical path length changing element 5 approaches the coherence length of the low-coherence light source 1, the degree of interference between the light from the measurement optical path 12 and the light from the reference optical path 13 decreases, so that the light intensity change gradually. Becomes smaller. When the amplitude of the periodic optical path length changing element 5 becomes larger than the coherence length of the low coherence light source 1, no change in light intensity is observed.

図１（ｃ）は、遅延光学系６により調整された計測用光路１２と参照用光路１３の光路差Ｌが計測用低コヒーレンス光源１のコヒーレンス長より十分に大きい場合の光強度変化の一例である。この場合は、図１（ｂ）と同様に周期的光路長変化素子５を振幅Ａで変化させても光強度変化は観測されない。   FIG. 1C is an example of a change in light intensity when the optical path difference L between the measurement optical path 12 and the reference optical path 13 adjusted by the delay optical system 6 is sufficiently larger than the coherence length of the measurement low coherence light source 1. is there. In this case, no change in the light intensity is observed even when the periodic optical path length changing element 5 is changed with the amplitude A as in FIG.

したがって、周期的光路長変化素子５で光路長を周期的に変化させながら、遅延光学系６を変化させ、図１（ｂ）に示すような光強度変化信号を探すことで、計測用光路１２と参照用光路１３の光路長が等しい点がわかり、間接的に計測ヘッド４と計測対象面１４の間の距離を計測することができる。   Accordingly, the optical path length is periodically changed by the periodic optical path length changing element 5 and the delay optical system 6 is changed to search for a light intensity change signal as shown in FIG. Thus, the point where the optical path lengths of the reference optical path 13 are equal can be found, and the distance between the measuring head 4 and the measurement target surface 14 can be indirectly measured.

計測ヘッド４と計測対象面１４の間の距離を自動で計測し表示するには以下のように行う。図１（ａ）に示した光検出器８は干渉による光強度変化信号を電気信号に変換する。変換された電気信号は信号検出部９により強度変化が検出され、信号処理制御部１０に送られる。信号処理制御部１０では入力された電気強度変化信号を処理し、常に計測用光路１２と参照用光路１３の光路長が等しくなるように遅延光学系６の遅延光路長を自動で制御する。また、遅延光学系６の遅延光路長から計測ヘッド４と計測対象面１４の間の距離を求め、距離表示部１１で距離を表示する。これらの動作により、自動で距離を計測し表示することができる。   In order to automatically measure and display the distance between the measurement head 4 and the measurement target surface 14, the following is performed. The photodetector 8 shown in FIG. 1A converts a light intensity change signal due to interference into an electrical signal. The converted electric signal is detected by the signal detection unit 9 in intensity change and sent to the signal processing control unit 10. The signal processing control unit 10 processes the input electric intensity change signal and automatically controls the delay optical path length of the delay optical system 6 so that the optical path lengths of the measurement optical path 12 and the reference optical path 13 are always equal. Further, the distance between the measurement head 4 and the measurement target surface 14 is obtained from the delay optical path length of the delay optical system 6, and the distance is displayed on the distance display unit 11. With these operations, the distance can be automatically measured and displayed.

本実施例によれば、計測対象面１４に計測用の低コヒーレンス光と可視光が照射され、光検出器８には低コヒーレンス光のみが入射するので、計測対象面１４上の計測点の視認性を確保することができ、可視光を計測ノイズ光とすることなく、計測ヘッド４と計測対象面１４の間の距離を計測することができる。   According to the present embodiment, the measurement target surface 14 is irradiated with low-coherence light and visible light for measurement, and only the low-coherence light is incident on the photodetector 8, so that the measurement point on the measurement target surface 14 is visually recognized. The distance between the measurement head 4 and the measurement target surface 14 can be measured without using visible light as measurement noise light.

図２は、本発明に係る光学式距離計測装置の第１の実施例の第１の変形例を示す図である。図２に示すように、本変形例は、低コヒーレンス光源１、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測ヘッド４、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８および光検出器８を接続する光路が光ファイバーあるいは導波管６２によって構成されている。   FIG. 2 is a diagram showing a first modification of the first embodiment of the optical distance measuring device according to the present invention. As shown in FIG. 2, the present modified example includes a low coherence light source 1, an isolator 2, a visible light source 16, a wavelength synthesizer 17, a light distributor 3, a measuring head 4, a periodic optical path length changing element 5, and a delay optical system 6. The optical path connecting the total reflection element 7, the wavelength separator 18 and the photodetector 8 is constituted by an optical fiber or a waveguide 62.

このように構成された本変形例においては、低コヒーレンス光および可視光は光ファイバーあるいは導波管６２内を伝送する。そのため、計測ヘッド４を含む各光学素子の配置の自由度が高まる。したがって、自由な装置配置が可能となる他、直線光路では光を照射できないような計測対象面１４の計測を行うことができる。   In this modified example configured as described above, the low-coherence light and the visible light are transmitted through the optical fiber or the waveguide 62. Therefore, the freedom degree of arrangement | positioning of each optical element containing the measurement head 4 increases. Therefore, it is possible to freely arrange the apparatus, and it is possible to perform measurement on the measurement target surface 14 so that light cannot be irradiated on the straight optical path.

図３は、本発明に係る光学式距離計測装置の第１の実施例の第２の変形例を示す図である。図３に示すように、本変形例は、低コヒーレンス光源１、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、光路切替え器６０、複数の計測ヘッド６１、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１から構成されている。   FIG. 3 is a diagram showing a second modification of the first embodiment of the optical distance measuring device according to the present invention. As shown in FIG. 3, this modified example is a low-coherence light source 1, an isolator 2, a visible light source 16, a wavelength synthesizer 17, an optical distributor 3, an optical path switch 60, a plurality of measuring heads 61, and a periodic optical path length change. It comprises an element 5, a delay optical system 6, a total reflection element 7, a wavelength separator 18, a photodetector 8, a signal detection unit 9, a signal processing control unit 10 and a distance display unit 11.

このように構成された本変形例においては、光路切替え器６０によって複数の計測ヘッド６１の各々に光路を切り替えるという簡単な操作によって複雑な形状あるいは複数の計測対象面の距離計測を行うことができる。   In this modified example configured as described above, it is possible to perform distance measurement of a complicated shape or a plurality of measurement target surfaces by a simple operation of switching the optical path to each of the plurality of measurement heads 61 by the optical path switch 60. .

次に、本発明の第２の実施例を説明する。本実施例の光学式距離計測装置は、図４に示すように、水中透過率の高い波長の低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２、水密構造の計測ヘッド２０、参照用光路１３、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０、信号処理制御部１０および距離表示部１１から構成され、信号処理制御部１０には屈折率補正部２１が備えられている。   Next, a second embodiment of the present invention will be described. As shown in FIG. 4, the optical distance measuring device of the present embodiment includes a low-coherence light source 19, an isolator 2, a visible light source 16, a wavelength synthesizer 17, a light distributor 3, and an optical path for measurement. 12, a measurement head 20 having a watertight structure, a reference optical path 13, a periodic optical path length changing element 5, a delay optical system 6, a total reflection element 7, a wavelength separator 18, a photodetector 8, a signal detector 9, and signal processing control Unit 10, a signal processing control unit 10, and a distance display unit 11, and the signal processing control unit 10 includes a refractive index correction unit 21.

低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２および計測ヘッド２０が計測用光学系を構成し、光分配器３、参照用光路１３、周期的光路長変化素子５、遅延光学系６および全反射素子７が参照用光学系を構成し、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１が信号検出演算部を構成する。   The low coherence light source 19, isolator 2, visible light source 16, wavelength synthesizer 17, light distributor 3, measuring optical path 12 and measuring head 20 constitute a measuring optical system, and the optical distributor 3, reference optical path 13, period The optical path length changing element 5, the delay optical system 6 and the total reflection element 7 constitute a reference optical system, and a wavelength separator 18, a photodetector 8, a signal detection unit 9, a signal processing control unit 10 and a distance display unit 11. Constitutes a signal detection calculation unit.

このように構成された本実施例の光学式距離計測装置において、計測対象面１４が水中に設置されている場合、水密構造の計測ヘッド２０を水中に設置することができ、水密構造の計測ヘッド２０から計測対象面１４に照射される光は水中透過率の高い波長を有する低コヒーレンス光であるため、水中を低損失で透過する。   In the optical distance measuring device according to the present embodiment configured as described above, when the measurement target surface 14 is installed in water, the watertight structure measurement head 20 can be installed in water, and the watertight structure measurement head. Since the light irradiated from 20 to the measurement target surface 14 is low-coherence light having a wavelength with high transmittance in water, it transmits through water with low loss.

ここで、水中に設置された水密構造の計測ヘッド２０と計測対象面１４の間の距離は、空気中に設置された遅延光学系６での遅延光路長により求められるが、水と空気の屈折率が異なるため、水中での距離を求めるためには屈折率による校正が必要となる。信号処理制御部１０に備えられた屈折率校正部２１は、この屈折率による校正を行い、空気中に設置された遅延光学系６での遅延光路長から水中に設置された水密構造の計測ヘッド２０と計測対象面１４の間の距離を求める。そして距離表示部１１で水中の距離が表示される。   Here, the distance between the measurement head 20 having a watertight structure installed in the water and the measurement target surface 14 is determined by the delay optical path length in the delay optical system 6 installed in the air. Since the rates are different, calibration by refractive index is required to determine the distance in water. The refractive index calibration unit 21 provided in the signal processing control unit 10 performs calibration based on this refractive index, and a measurement head having a watertight structure installed in water from the delay optical path length in the delay optical system 6 installed in the air. The distance between 20 and the measurement target surface 14 is obtained. Then, the distance display unit 11 displays the distance in water.

本実施例によれば、水密構造の計測ヘッド２０を水中に設置することができ、水密構造の計測ヘッド２０からの光は低損失で水中を透過して計測対象面１４で反射および散乱し、この反射光および散乱光の一部１５は再び水密構造の計測ヘッド２０に入射する。また、信号処理制御部１０に備えられた屈折率補正部２１において空気の屈折率と水の屈折率との校正をすることができるので、水中に設置された水密構造の計測ヘッド２０と計測対象面１４の間の距離を計測することができる。   According to the present embodiment, the watertight structure measuring head 20 can be installed in the water, and the light from the watertight structure measuring head 20 is transmitted through the water with low loss and reflected and scattered by the measurement target surface 14. A part 15 of the reflected light and scattered light again enters the measurement head 20 having a watertight structure. Further, since the refractive index correction unit 21 provided in the signal processing control unit 10 can calibrate the refractive index of air and the refractive index of water, the measurement head 20 having a watertight structure installed in water and the measurement target The distance between the surfaces 14 can be measured.

次に本発明に係る光学式距離計測装置の第３の実施例を図５を用いて説明する。
本実施例の光学式距離計測装置は、図５（ａ）に示すように、水中透過率の高い波長の低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２、水密構造の計測ヘッド２０、参照用光路１３、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８、光検出器８、振幅復調部２２と自動利得制御部２３を備えた信号検出部９、屈折率補正部２１を備えた信号処理制御部１０、および信号処理制御部１０に接続された距離表示部１１から構成されている。 Next, a third embodiment of the optical distance measuring device according to the present invention will be described with reference to FIG.
As shown in FIG. 5A, the optical distance measuring device of the present embodiment includes a low-coherence light source 19 having a high transmittance in water, an isolator 2, a visible light source 16, a wavelength synthesizer 17, a light distributor 3, Measurement optical path 12, watertight structure measuring head 20, reference optical path 13, periodic optical path length changing element 5, delay optical system 6, total reflection element 7, wavelength separator 18, optical detector 8, amplitude demodulator 22 The signal detection unit 9 includes an automatic gain control unit 23, the signal processing control unit 10 includes a refractive index correction unit 21, and the distance display unit 11 connected to the signal processing control unit 10.

低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２および計測ヘッド２０が計測用光学系を構成し、光分配器３、参照用光路１３、周期的光路長変化素子５、遅延光学系６および全反射素子７が参照用光学系を構成し、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１が信号検出演算部を構成する。   The low coherence light source 19, isolator 2, visible light source 16, wavelength synthesizer 17, light distributor 3, measuring optical path 12 and measuring head 20 constitute a measuring optical system, and the optical distributor 3, reference optical path 13, period The optical path length changing element 5, the delay optical system 6 and the total reflection element 7 constitute a reference optical system, and a wavelength separator 18, a photodetector 8, a signal detection unit 9, a signal processing control unit 10 and a distance display unit 11. Constitutes a signal detection calculation unit.

このように構成された本実施例の光学式距離計測装置において、光検出器８において検出され変換された電気信号は、一般に直流成分と強度変化信号成分が合成されたものとなっている。例えば、信号検出部９において、まず、電気信号の中から直流成分を除去すると、図５（ｂ）に示すような強度変化信号が得られる。この強度変化信号はエンベロープを持つ。したがって、このエンベロープを検出することによっても、距離計測が可能となる。   In the optical distance measuring device of the present embodiment thus configured, the electrical signal detected and converted by the photodetector 8 is generally a combination of a direct current component and an intensity change signal component. For example, in the signal detection unit 9, first, when the DC component is removed from the electric signal, an intensity change signal as shown in FIG. 5B is obtained. This intensity change signal has an envelope. Therefore, the distance can be measured by detecting this envelope.

強度変化信号エンベロープを検出するためには、例えば、強度変化信号を全波または半波整流した後、信号検出部９に備えられた振幅復調部２２により、図５（ｃ）に示すように検出することができる。さらに、検出されたエンベロープを信号検出部９に備えられた自動利得制御部２３に通すことで、信号レベルを高くし、かつ一定レベルの検出信号を出力することができる。   In order to detect the intensity change signal envelope, for example, the intensity change signal is full-wave or half-wave rectified, and then detected by the amplitude demodulation unit 22 provided in the signal detection unit 9 as shown in FIG. can do. Further, by passing the detected envelope through the automatic gain control unit 23 provided in the signal detection unit 9, it is possible to increase the signal level and output a detection signal at a constant level.

本実施例によれば、光検出器８において検出、変換された電気信号の中から、強度変化信号のエンベロープを検出し、さらに高い一定レベルの検出信号を出力することができるので、高感度で安定した水中距離計測を行うことができる。なお、本実施例の光学式距離計測装置における信号検出部９および信号処理制御部１０の構成および動作は気中距離計測においても利用することができる。   According to the present embodiment, since the envelope of the intensity change signal can be detected from the electric signal detected and converted by the photodetector 8, and a detection signal having a higher constant level can be output. Stable underwater distance measurement can be performed. In addition, the structure and operation | movement of the signal detection part 9 and the signal processing control part 10 in the optical distance measuring device of a present Example can be utilized also in aerial distance measurement.

次に本発明に係る光学式距離計測装置の第４の実施例を図６を用いて説明する。
本実施例の光学式距離計測装置は、図６（ａ）に示すように、水中透過率の高い波長の低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２、水密構造の計測ヘッド２０、参照用光路１３、周期的光路長変化素子５、遅延光学系６、全反射素子７、波長分離器１８、光検出器８、振幅復調部２２と自動利得制御部２３を備えた信号検出部９、発振器２４と同期検波部２５と演算制御部２６と屈折率補正部２１を備えた信号処理制御部１０、および距離表示部１１から構成されている。 Next, a fourth embodiment of the optical distance measuring device according to the present invention will be described with reference to FIG.
As shown in FIG. 6A, the optical distance measuring device according to the present embodiment includes a low-coherence light source 19 having a high underwater transmittance, an isolator 2, a visible light source 16, a wavelength synthesizer 17, a light distributor 3, A measurement optical path 12, a watertight measuring head 20, a reference optical path 13, a periodic optical path length changing element 5, a delay optical system 6, a total reflection element 7, a wavelength separator 18, a photodetector 8, and an amplitude demodulator 22. The signal detection unit 9 includes an automatic gain control unit 23, the signal processing control unit 10 includes an oscillator 24, a synchronous detection unit 25, a calculation control unit 26, and a refractive index correction unit 21, and a distance display unit 11. .

低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３、計測用光路１２および計測ヘッド２０が計測用光学系を構成し、光分配器３、参照用光路１３、周期的光路長変化素子５、遅延光学系６および全反射素子７が参照用光学系を構成し、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１が信号検出演算部を構成する。   The low coherence light source 19, isolator 2, visible light source 16, wavelength synthesizer 17, light distributor 3, measuring optical path 12 and measuring head 20 constitute a measuring optical system, and the optical distributor 3, reference optical path 13, period The optical path length changing element 5, the delay optical system 6 and the total reflection element 7 constitute a reference optical system, and a wavelength separator 18, a photodetector 8, a signal detection unit 9, a signal processing control unit 10 and a distance display unit 11. Constitutes a signal detection calculation unit.

このように構成された本実施例の光学式距離計測装置において、信号処理制御部１０に備えられた発振器２４は周期的光路長変化素子５と同期検波部２５に周波数ｆの周期的信号を送る。信号検出部９で検出され、出力された信号は信号処理制御部１０に入力され、同期検波部２５において発振器２４から送られてきた周波数ｆの周期的信号により同期検波される。   In the optical distance measuring apparatus of the present embodiment configured as described above, the oscillator 24 provided in the signal processing control unit 10 sends a periodic signal having a frequency f to the periodic optical path length changing element 5 and the synchronous detection unit 25. . The signal detected and output by the signal detection unit 9 is input to the signal processing control unit 10, and synchronous detection is performed by the synchronous detection unit 25 using a periodic signal having a frequency f transmitted from the oscillator 24.

遅延光学系６により計測用光路１２と参照用光路１３の光路長が等しく（光路差がゼロに）調整されたとき、信号検出部９からの出力信号は、例えば、図６（ｂ）のように周波数２ｆの周期的信号となる。また、計測用光路１２と参照用光路１３の光路差がゼロより大きくなるにつれて、信号検出部９からの出力信号の中の周波数２ｆ成分は減少する。   When the optical path lengths of the measurement optical path 12 and the reference optical path 13 are adjusted to be equal (the optical path difference is zero) by the delay optical system 6, the output signal from the signal detector 9 is, for example, as shown in FIG. Becomes a periodic signal of frequency 2f. Further, as the optical path difference between the measurement optical path 12 and the reference optical path 13 becomes larger than zero, the frequency 2f component in the output signal from the signal detection unit 9 decreases.

したがって、信号検出部９からの出力信号を同期検波部２５で同期検波した後、演算制御部２６で検波信号中の周波数２ｆ成分を演算により検知し、周波数２ｆ成分が大きくなるように演算制御部２６が遅延光学系６の遅延光路長を調整制御することによって、水密構造の計測ヘッド２０と計測対象面１４の間の水中距離を自動で精度良く計測することができる。   Therefore, after the output signal from the signal detection unit 9 is synchronously detected by the synchronous detection unit 25, the calculation control unit 26 detects the frequency 2f component in the detection signal by calculation, and the calculation control unit so that the frequency 2f component is increased. By adjusting and controlling the delay optical path length of the delay optical system 6, the underwater distance between the measurement head 20 having the watertight structure and the measurement target surface 14 can be automatically and accurately measured.

本実施例によれば、計測用光路１２と参照用光路１３の光路長が常に等しくなるように遅延光学系６での遅延光路長を制御するので、距離を自動で精度良く計測することができる。なお、本実施例の光学式距離計測装置における信号検出部９および信号処理制御部１０の構成および動作は気中距離計測においても利用することができる。   According to the present embodiment, the delay optical path length in the delay optical system 6 is controlled so that the optical path lengths of the measurement optical path 12 and the reference optical path 13 are always equal, so that the distance can be automatically and accurately measured. . In addition, the structure and operation | movement of the signal detection part 9 and the signal processing control part 10 in the optical distance measuring device of a present Example can be utilized also in aerial distance measurement.

次に本発明に係る光学式距離計測装置の第５の実施例を説明する。
本実施例の光学式距離計測装置は、図７に示すように、水中透過率の高い波長の低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、第１の光分配器３ａ、計測用光路１２、水密構造の計測ヘッド２０、第２の光分配器３ｂ、参照用光路１３ａ，１３ｂ、周期的光路長変化素子５、全反射素子付き遅延光学系２９、全反射素子７、波長分離器１８、光検出器８、振幅復調部２２と自動利得制御部２３を備えた信号検出部９、発振器２４と同期検波部２５と演算制御部２６と屈折率補正部２１を備えた信号処理制御部１０、および距離表示部１１から構成されている。ここで、第１の光分配器３ａおよび第２の光分配器３ｂは、前記光分配器３と同様に例えばハーフミラーなどによって構成されている。 Next, a fifth embodiment of the optical distance measuring device according to the present invention will be described.
As shown in FIG. 7, the optical distance measuring device according to the present embodiment includes a low-coherence light source 19 having a high transmittance in water, an isolator 2, a visible light source 16, a wavelength synthesizer 17, a first light distributor 3a, Measurement optical path 12, watertight structure measurement head 20, second light distributor 3b, reference optical paths 13a and 13b, periodic optical path length changing element 5, delay optical system with total reflection element 29, total reflection element 7, wavelength Signal processor 9 including a separator 18, a photodetector 8, a signal detector 9 including an amplitude demodulator 22 and an automatic gain controller 23, an oscillator 24, a synchronous detector 25, a calculation controller 26, and a refractive index corrector 21. It is comprised from the control part 10 and the distance display part 11. FIG. Here, the first light distributor 3 a and the second light distributor 3 b are configured by, for example, a half mirror, similarly to the light distributor 3.

低コヒーレンス光源１９、アイソレータ２、可視光源１６、波長合成器１７、光分配器３ａ、計測用光路１２および計測ヘッド２０が計測用光学系を構成し、光分配器３ｂ、参照用光路１３ａ，１３ｂ、周期的光路長変化素子５、全反射素子付き遅延光学系２９および全反射素子７が参照用光学系を構成し、波長分離器１８、光検出器８、信号検出部９、信号処理制御部１０および距離表示部１１が信号検出演算部を構成する。   The low coherence light source 19, the isolator 2, the visible light source 16, the wavelength synthesizer 17, the light distributor 3a, the measurement optical path 12 and the measurement head 20 constitute a measurement optical system, and the light distributor 3b and the reference optical paths 13a and 13b. The periodic optical path length changing element 5, the delay optical system 29 with a total reflection element, and the total reflection element 7 constitute a reference optical system, and include a wavelength separator 18, a photodetector 8, a signal detection unit 9, and a signal processing control unit. 10 and the distance display part 11 comprise a signal detection calculating part.

このように構成された本実施例の光学式距離計測装置において、低コヒーレンス光源１９から発せられた光はアイソレータ２を通過した後、波長合成器１７で可視光源１６からの可視光と同一光路に合成され、第１の光分配器３ａに入射する。   In the optical distance measuring device of the present embodiment configured as described above, the light emitted from the low coherence light source 19 passes through the isolator 2 and is then placed in the same optical path as the visible light from the visible light source 16 by the wavelength synthesizer 17. The combined light enters the first light distributor 3a.

第１の光分配器３ａに入射した光は二つの光路に分けられ、計測用光路１２を通って一方は水密構造の計測ヘッド２０へ向かい、もう一方は遮光される。計測ヘッド２０へ向かった光は、計測ヘッド２０の出口に設けられている例えば光学基板でできた窓を通過して計測対象面１４に照射される。また、このとき、光学基板でできている窓を光が通過する際、窓の表面で反射して第１の光分配器３ａへ戻る反射光２８が存在する。   The light incident on the first light distributor 3a is divided into two optical paths. One passes through the measurement optical path 12 to the measurement head 20 having a watertight structure, and the other is shielded. The light traveling toward the measurement head 20 passes through a window made of, for example, an optical substrate provided at the outlet of the measurement head 20 and is irradiated onto the measurement target surface 14. At this time, when light passes through a window made of an optical substrate, there is reflected light 28 that is reflected by the surface of the window and returns to the first light distributor 3a.

計測対象面１４に照射された光は計測対象面１４の表面で反射および散乱し、反射光および散乱光の一部１５が再び水密構造の計測ヘッド２０に戻り、計測用光路１２を通って第１の光分配器３ａへと進む。つまり反射光２８と反射光および散乱光の一部１５は光路差を持って第１の光分配器３ａを通過し、第２の光分配器３ｂに入射する。   The light irradiated on the measurement target surface 14 is reflected and scattered on the surface of the measurement target surface 14, and a part 15 of the reflected light and scattered light returns to the measurement head 20 having a watertight structure again, and passes through the measurement optical path 12. Proceed to one optical distributor 3a. That is, the reflected light 28 and a part 15 of the reflected light and the scattered light pass through the first light distributor 3a with an optical path difference and enter the second light distributor 3b.

第２の光分配器３ｂに入射した光は参照用光路１３ａと参照用光路１３ｂに分けられ、参照用光路１３ａに分けられた光は全反射素子付き遅延光学系２９を通過して再び第２光分配器３ｂに戻る。他方、参照用光路１３ｂに分けられた光は周期的光路長変化素子５を通過した後、全反射素子７で全反射して再び第２の光分配器３ｂに戻る。参照用光路１３ａからの光と参照用光路１３ｂからの光は光分配器３ｂで再び合成され、波長分離器１８を通過して光検出器８に入射する。   The light incident on the second light distributor 3b is divided into a reference optical path 13a and a reference optical path 13b, and the light divided into the reference optical path 13a passes through the delay optical system 29 with a total reflection element and again enters the second optical path 13a. Return to the light distributor 3b. On the other hand, after the light divided into the reference optical path 13b passes through the periodic optical path length changing element 5, it is totally reflected by the total reflection element 7 and returns to the second light distributor 3b again. The light from the reference optical path 13a and the light from the reference optical path 13b are combined again by the optical distributor 3b, pass through the wavelength separator 18, and enter the photodetector 8.

これらの過程において、反射光２８と反射光および散乱光の一部１５が干渉するように全反射素子付き遅延光学系２９の遅延光路長を調整することで、水密構造の計測ヘッド２０と計測対象面１４の間の距離が計測できる。この構成の場合、第１の光分配器３ａから水密構造の計測ヘッド２０までの計測用光路１２の長さは干渉に影響を与えない。例えば、計測用光路１２の長さが極端に長い場合、この長さに合わせた参照用の光路１３ａ，１３ｂを必要としない。   In these processes, by adjusting the delay optical path length of the delay optical system 29 with a total reflection element so that the reflected light 28 and a part 15 of the reflected light and scattered light interfere with each other, the measurement head 20 having a watertight structure and the measurement target are adjusted. The distance between the surfaces 14 can be measured. In the case of this configuration, the length of the measurement optical path 12 from the first light distributor 3a to the measurement head 20 having a watertight structure does not affect interference. For example, when the length of the measurement optical path 12 is extremely long, the reference optical paths 13a and 13b matching the length are not required.

ここで、反射光２８は窓等の部分反射面の反射率が３４％のときに最適となる。すなわち、計測ヘッド２０の部分反射率をRr1、全反射素子７の反射率をRr2、計測対象面１４の反射率をRsとすると、干渉信号強度Sは、

Figure 0004229793
となる（Aは比例定数）。この式から、Sが最大値をとるときのRr1は３４％となる。 Here, the reflected light 28 is optimal when the reflectance of a partial reflection surface such as a window is 34%. That is, when the partial reflectance of the measurement head 20 is Rr1, the reflectance of the total reflection element 7 is Rr2, and the reflectance of the measurement target surface 14 is Rs, the interference signal intensity S is
Figure 0004229793
 (A is a proportional constant). From this equation, Rr1 when S takes the maximum value is 34%.

本実施の形態によれば、第１の光分配器３ａから水密構造の計測ヘッド２０までの計測用光路１２の長さが干渉に影響を与えないので、水密構造の計測ヘッド２０の配置構成の自由度が高まる。なお、本実施例の構成および動作は気中距離計測においても利用することができる。   According to the present embodiment, the length of the measurement optical path 12 from the first light distributor 3a to the measurement head 20 having the watertight structure does not affect the interference. Increased freedom. Note that the configuration and operation of the present embodiment can also be used for airborne distance measurement.

次に本発明に係る光学式距離計測装置の第６の実施例を図８を用いて説明する。この第６の実施例は計測用の低コヒーレンス光を発生する低コヒーレンス光源１，１９に関する実施例である。   Next, a sixth embodiment of the optical distance measuring device according to the present invention will be described with reference to FIG. The sixth embodiment is an embodiment relating to the low-coherence light sources 1 and 19 that generate low-coherence light for measurement.

図８（ａ）に示す実施例は、レーザダイオード４８および変調ドライブ用高周波電源４９から構成されている。このように構成された本実施例のコヒーレンス光源において、変調ドライブ用高周波電源４９によりレーザダイオード４８のドライブ電流を高周波で振動させレーザダイオード４８を発振させる。これにより、通常コヒーレンス長の長いレーザダイオードからの光５０は低コヒーレンス光となる。低コヒーレンス光源として使用しやすいレーザダイオードの波長は主に近赤外領域であるので、変調されたレーザ光を低コヒーレンス光源とすることで、近赤外領域の光を用いる距離計測装置が可能となる。   The embodiment shown in FIG. 8A includes a laser diode 48 and a modulation drive high-frequency power source 49. In the coherence light source of this embodiment configured as described above, the laser diode 48 is oscillated by oscillating the drive current of the laser diode 48 at a high frequency by the modulation drive high frequency power supply 49. Thereby, the light 50 from the laser diode having a long coherence length is usually a low coherence light. The wavelength of laser diodes that are easy to use as a low-coherence light source is mainly in the near-infrared region, so by using modulated laser light as a low-coherence light source, a distance measurement device that uses light in the near-infrared region is possible. Become.

図８（ｂ）に示す実施例は、スーパールミネッセントダイオード５１およびドライブ用電源５２から構成されている。このように構成された本実施例の低コヒーレンス光源において、ドライブ用電源５２によりスーパールミネッセントダイオード５１は発光する。ここで、スーパールミネッセントダイオードからの光５３は通常低コヒーレンス光であるため、このまま計測用光源として使用できる。スーパールミネッセントダイオードは低コヒーレンス光源として可視光端から極近赤外領域の波長もカバーすることができるので、スーパールミネッセントダイオード５１を低コヒーレンス光源とすることで、可視光端から極近赤外領域の光を用いる距離計測装置が可能となる。   The embodiment shown in FIG. 8B includes a super luminescent diode 51 and a drive power source 52. In the low coherence light source of this embodiment configured as described above, the superluminescent diode 51 emits light from the drive power source 52. Here, since the light 53 from the super luminescent diode is usually low coherence light, it can be used as it is as a light source for measurement. Since the super luminescent diode can cover the wavelength from the visible light end to the near-infrared region as a low coherence light source, the super luminescent diode 51 can be used as a low coherence light source so as to be close to the visible light end. A distance measuring device using light in the infrared region becomes possible.

図８（ｃ）に示す実施例は、フラッシュランプ５４およびドライブ用パルス電源５５から構成されている。このように構成された本実施例の低コヒーレンス光源において、ドライブ用パルス電源５５によりフラッシュランプ５４は発光する。ここで、フラッシュランプからの光５６は通常低コヒーレンス光であるため、このまま計測用光源として使用できる。フラッシュランプは低コヒーレンス光源として紫外領域の波長もカバーすることができるので、フラッシュランプ５４を低コヒーレンス光源とすることで、紫外領域の光を利用した距離計測装置が可能となる。   The embodiment shown in FIG. 8C includes a flash lamp 54 and a drive pulse power supply 55. In the low coherence light source of this embodiment configured as described above, the flash lamp 54 emits light by the drive pulse power supply 55. Here, since the light 56 from the flash lamp is usually low-coherence light, it can be used as it is as a light source for measurement. Since the flash lamp can cover the wavelength in the ultraviolet region as a low coherence light source, a distance measuring device using light in the ultraviolet region can be realized by using the flash lamp 54 as a low coherence light source.

図８（ｄ）に示す本実例は、Ｘ線源５７および電源５８から構成されている。このように構成された本実施例の低コヒーレンス光源において、電源５８によりＸ線源５７中の電子が加速され、この電子の制動放射によりＸ線源５７からＸ線５９が発生する。ここで、Ｘ線源５７からのＸ線５９は通常低コヒーレンス光であるため、このまま計測用光源として使用できる。これにより、Ｘ線領域の光を利用した距離計測装置が可能となる。   The actual example shown in FIG. 8D includes an X-ray source 57 and a power source 58. In the low coherence light source of this embodiment configured as described above, electrons in the X-ray source 57 are accelerated by the power source 58, and X-rays 59 are generated from the X-ray source 57 by the bremsstrahlung of the electrons. Here, since the X-ray 59 from the X-ray source 57 is normally low coherence light, it can be used as it is as a measurement light source. Thereby, a distance measuring device using light in the X-ray region is possible.

以上のように、本発明の第６の実施例によれば、変調されたレーザ光５０では主に近赤外領域、スーパールミネッセントダイオード５１では主に可視光端から極近赤外領域、フラッシュランプ５４では主に紫外領域、Ｘ線源５７ではＸ線領域の光を計測用低コヒーレンス光源１あるいは１９として利用できるので、空気中、水中等の計測雰囲気および各種計測対象面への適用が可能となる。   As described above, according to the sixth embodiment of the present invention, the modulated laser beam 50 is mainly in the near infrared region, and the superluminescent diode 51 is mainly in the near near infrared region from the visible light end. The flash lamp 54 can mainly use light in the ultraviolet region, and the X-ray source 57 can use light in the X-ray region as the low-coherence light source 1 or 19 for measurement. It becomes possible.

次に本発明に係る光学式距離計測装置の第７の実施例を図９を用いて説明する。この第７の実施例は計測ヘッド４あるいは２０に関する実施例である。   Next, a seventh embodiment of the optical distance measuring device according to the present invention will be described with reference to FIG. The seventh embodiment relates to the measurement head 4 or 20.

９（ａ）に示す実施例は、計測ヘッドカバー３１と集束レンズ３２から構成されている。このように構成された本実施例の計測ヘッドにおいて、計測ヘッド４，２０に入射された光が平行光３３である場合、計測ヘッドカバー３１内に設置された集束レンズ３２によって平行光３３は集束光３４となって計測対象面１４に照射される。こうして高い強度密度を持った光が計測対象面１４に照射されることとなる。
図９（ｂ）に示す実施例は、計測ヘッドカバー３１、第１のコリメータレンズ３５および第２のコリメータレンズ３６から構成されている。 The embodiment shown in FIG. 9A includes a measurement head cover 31 and a focusing lens 32. In the measurement head of this embodiment configured as described above, when the light incident on the measurement heads 4 and 20 is the parallel light 33, the parallel light 33 is focused by the focusing lens 32 installed in the measurement head cover 31. 34 and the measurement target surface 14 is irradiated. In this way, light having a high intensity density is irradiated onto the measurement target surface 14.
The embodiment shown in FIG. 9B includes a measurement head cover 31, a first collimator lens 35, and a second collimator lens 36.

このように構成された本実施例の計測ヘッドにおいて、計測ヘッド４，２０に入射された光が平行光３３である場合、計測ヘッドカバー３１内に設置された第１のコリメータレンズ３５と第２のコリメータレンズ３６とによって平行光３３は、さらに小さい断面積の平行光３７となって計測対象面１４に照射される。こうして、第２のコリメータレンズ３６と計測対象面１４の距離にかかわらず、すなわち計測ヘッド４，２０の先端と計測対象面１４の距離にかかわらず高い強度密度を持った光が計測対象面１４に照射されることとなる。   In the measurement head of the present embodiment configured as described above, when the light incident on the measurement heads 4 and 20 is parallel light 33, the first collimator lens 35 and the second collimator lens 35 installed in the measurement head cover 31 are used. The collimator lens 36 causes the parallel light 33 to irradiate the measurement target surface 14 as parallel light 37 having a smaller cross-sectional area. In this way, light having a high intensity density is applied to the measurement target surface 14 regardless of the distance between the second collimator lens 36 and the measurement target surface 14, that is, regardless of the distance between the tips of the measurement heads 4, 20 and the measurement target surface 14. It will be irradiated.

本実施例によれば、図９（ａ）の集束照射型の場合は、計測対象面１４に照射される計測光強度の密度が高くなるので、高感度の計測が可能となる。また、図９（ｂ）平行照射型の場合は、計測ヘッド４，２０の先端から計測対象面１４までの距離に関係なく高く一定な光強度密度の計測光を計測対象面１４に照射することができるので、高感度でかつ計測レンジの大きい計測が可能となる。   According to the present embodiment, in the case of the focused irradiation type shown in FIG. 9A, the density of the measurement light intensity irradiated onto the measurement target surface 14 is increased, and therefore high-sensitivity measurement is possible. 9B, the measurement target surface 14 is irradiated with measurement light having a high and constant light intensity density regardless of the distance from the tips of the measurement heads 4 and 20 to the measurement target surface 14. Therefore, measurement with high sensitivity and a wide measurement range is possible.

次に本発明に係る光学式距離計測装置の第８の実施例を説明する。この実施例は遅延光学系に関する実施例である。
図１０に示すように、本実施例においては、遅延光学系６が第１の多重反射素子３８、第２の多重反射素子３９および前記第１または第２の多重反射素子３８，３９を保持し移動させる移動ステージ４０から構成されている。 Next, an eighth embodiment of the optical distance measuring device according to the present invention will be described. This embodiment relates to a delay optical system.
As shown in FIG. 10, in this embodiment, the delay optical system 6 holds the first multiple reflection element 38, the second multiple reflection element 39, and the first or second multiple reflection element 38, 39. The moving stage 40 is configured to move.

このように構成された本実施例において、遅延光学系６への入射光４１は第１の多重反射素子３８で反射した後、第２の多重反射素子３９に向かい、ここで反射した後、再び第１の多重反射素子３８で反射して遅延光学系６からの放出光４２となる。このとき、例えば第１の多重反射素子３８が移動ステージ４０の上に設置されていると、遅延光路長を変化させることができる。このように遅延光学系６として多重反射素子３８、３９を用いることで、遅延光学系入口から出口までの距離を短くしても長い遅延光路長を確保することができる。また、遅延光路長を変化させるときの移動ステージ４０の移動量を小さくすることができる。   In the present embodiment configured as described above, the incident light 41 to the delay optical system 6 is reflected by the first multiple reflection element 38, then directed to the second multiple reflection element 39, reflected here, and then again. The light is reflected by the first multiple reflection element 38 to be emitted light 42 from the delay optical system 6. At this time, for example, if the first multiple reflection element 38 is installed on the moving stage 40, the delay optical path length can be changed. Thus, by using the multiple reflection elements 38 and 39 as the delay optical system 6, a long delay optical path length can be ensured even if the distance from the delay optical system entrance to the exit is shortened. Further, the moving amount of the moving stage 40 when changing the delay optical path length can be reduced.

本実施例によれば、遅延光学系６の入口から出口までの距離を短くしても長い遅延光路長を確保することができ、遅延光路長を変化させるときの移動ステージ４０の移動量を小さくすることができるので、遅延光学系６を小型化でき、小型の光学式距離計測装置が可能となる。   According to the present embodiment, a long delay optical path length can be secured even if the distance from the entrance to the exit of the delay optical system 6 is shortened, and the amount of movement of the moving stage 40 when the delay optical path length is changed is reduced. Therefore, the delay optical system 6 can be reduced in size, and a small optical distance measuring device can be realized.

次に本発明に係る光学式距離計測装置の第９の実施例を説明する。この実施例は全反射素子に関する実施例である。
図１１に示すように、本実施例においては、全反射素子７が全反射ミラー４３と、全反射ミラー４３を周期的に微小振動させる微小振動機構４４と、全反射ミラー４３を移動させる移動機構４５から構成されている。 Next, a ninth embodiment of the optical distance measuring device according to the present invention will be described. This embodiment relates to a total reflection element.
As shown in FIG. 11, in this embodiment, the total reflection element 7 has a total reflection mirror 43, a minute vibration mechanism 44 that periodically finely vibrates the total reflection mirror 43, and a movement mechanism that moves the total reflection mirror 43. 45.

このように構成された本実施例において、全反射ミラー４３に入射した光４６が微小振動機構４４により周期的に微小振動している全反射ミラー４３により反射されると、反射光４７の光路長は周期的に変化することとなる。すなわち、周期的光路長変化素子５と同等な作用が得られる。また、移動機構４５により全反射ミラー４３の位置を変化させることで反射光４７の光路長は変化することとなる。すなわち、遅延光学系６と同等な作用が得られる。   In the present embodiment configured as described above, when the light 46 incident on the total reflection mirror 43 is reflected by the total reflection mirror 43 that is periodically microvibrated by the microvibration mechanism 44, the optical path length of the reflected light 47 is reduced. Will change periodically. That is, an action equivalent to that of the periodic optical path length changing element 5 is obtained. Further, the optical path length of the reflected light 47 is changed by changing the position of the total reflection mirror 43 by the moving mechanism 45. That is, an action equivalent to that of the delay optical system 6 can be obtained.

本実施例によれば、微小振動機構４４により周期的光路長変化素子５と同等な作用が得られ、移動機構４５により遅延光学系６と同等な作用が得られるので、周期的光路長変化素子５と遅延光学系６を全反射素子７内に置き換えることができ、小型の光学式距離計測装置が可能となる。   According to the present embodiment, the micro-vibration mechanism 44 can obtain an action equivalent to that of the periodic optical path length changing element 5, and the moving mechanism 45 can obtain an action equivalent to that of the delay optical system 6. Therefore, the periodic optical path length changing element 5 and the delay optical system 6 can be replaced with the total reflection element 7, and a small optical distance measuring device can be realized.

つぎに本発明に係る光学式距離計測装置の第１０の実施例を図１２を用いて説明する。
図１２に示すように、本実施例の光学式距離計測装置は、光分配器３、計測ヘッド４、周期的光路長変化素子５、遅延光学系６、全反射素子７、光ファイバー６３および光ファイバー用コネクタ６４から構成されている。光ファイバー用コネクタ６４にはコネクタ端面６５が存在する。 Next, a tenth embodiment of the optical distance measuring device according to the present invention will be described with reference to FIG.
As shown in FIG. 12, the optical distance measuring device of this embodiment includes an optical distributor 3, a measuring head 4, a periodic optical path length changing element 5, a delay optical system 6, a total reflection element 7, an optical fiber 63, and an optical fiber. The connector 64 is configured. The optical fiber connector 64 has a connector end face 65.

このように構成された本実施例において、光分配器３から光ファイバー用コネクタ６４のコネクタ端面６５までの距離Ｌ１と光分配器３から全反射素子７の反射端までの距離は等しい状態に各光学素子が配置されているとする（Ｌ１＝Ｌ２）。また、コネクタ端面６５から計測対象面１４までの距離をｄ、遅延光学系６の遅延光路長をｘとする。この場合、２ｘとｄが等しいとき、計測対象面１４からの反射および散乱光の一部１５と全反射素子７からの反射光が干渉し、計測ヘッド４と計測対象面１４の間の距離が計測できる。しかし、このような光学系配置の場合は、ｘ＝０のときにも、コネクタ端面６５からの反射光と全反射素子７からの反射光が干渉する。したがって、どちらの干渉信号が距離計測のための干渉信号かを判断することが難しくなり、距離計測が困難になる。   In this embodiment configured as above, the distance L1 from the optical distributor 3 to the connector end face 65 of the optical fiber connector 64 and the distance from the optical distributor 3 to the reflection end of the total reflection element 7 are equal to each other. It is assumed that elements are arranged (L1 = L2). In addition, the distance from the connector end surface 65 to the measurement target surface 14 is d, and the delay optical path length of the delay optical system 6 is x. In this case, when 2x and d are equal, a part of the reflected and scattered light 15 from the measurement target surface 14 interferes with the reflected light from the total reflection element 7, and the distance between the measurement head 4 and the measurement target surface 14 is as follows. It can be measured. However, in the case of such an optical system arrangement, the reflected light from the connector end face 65 interferes with the reflected light from the total reflection element 7 even when x = 0. Therefore, it becomes difficult to determine which interference signal is an interference signal for distance measurement, and distance measurement becomes difficult.

一方、光分配器３から光ファイバー用コネクタ６４のコネクタ端面６５までの距離Ｌ１が光分配器３から全反射素子７の反射端までの距離Ｌ２より短い状態に各光学素子が配置されているとき（Ｌ１＜Ｌ２）には、２ｘ＝ｄのときのみ干渉信号が得られることとなり、コネクタ端面６５からの反射光と全反射素子７からの反射光との干渉信号による影響を受けずに距離計測を行うことができる。   On the other hand, when each optical element is arranged such that the distance L1 from the optical distributor 3 to the connector end face 65 of the optical fiber connector 64 is shorter than the distance L2 from the optical distributor 3 to the reflection end of the total reflection element 7 ( In L1 <L2), an interference signal is obtained only when 2x = d, and distance measurement is performed without being affected by the interference signal between the reflected light from the connector end face 65 and the reflected light from the total reflection element 7. It can be carried out.

なお、光分配器３から光ファイバー用コネクタ６４のコネクタ端面６５までの距離Ｌ１が光分配器３から全反射素子７の反射端までの距離Ｌ２より長い状態に各光学素子が配置されている場合（Ｌ１＞Ｌ２）には、２ｘ＝０と２ｘ＝ｄのときに干渉信号が現れてしまうため、Ｌ１＝Ｌ２の場合と同様に距離計測が困難となる。   When each optical element is arranged such that the distance L1 from the optical distributor 3 to the connector end face 65 of the optical fiber connector 64 is longer than the distance L2 from the optical distributor 3 to the reflection end of the total reflection element 7 ( In L1> L2), since an interference signal appears when 2x = 0 and 2x = d, it becomes difficult to measure the distance as in the case of L1 = L2.

本実施例によれば、光分配器３から光ファイバー用コネクタ６４のコネクタ端面６５までの距離Ｌ１が光分配器３から全反射素子７の反射端までの距離Ｌ２より短い状態に各光学素子を配置することによってコネクタ端面６５からの反射光との干渉による光信号を防ぐことができるので、距離計測の信頼性が向上する。   According to the present embodiment, the optical elements are arranged such that the distance L1 from the optical distributor 3 to the connector end face 65 of the optical fiber connector 64 is shorter than the distance L2 from the optical distributor 3 to the reflection end of the total reflection element 7. By doing so, an optical signal due to interference with the reflected light from the connector end face 65 can be prevented, so that the reliability of distance measurement is improved.

本発明の第１実施例を示し、（ａ）は光学式距離計測装置のブロック図、（ｂ），（ｃ）は動作を説明するタイムチャート。BRIEF DESCRIPTION OF THE DRAWINGS The 1st Example of this invention is shown, (a) is a block diagram of an optical distance measuring device, (b), (c) is a time chart explaining operation | movement. 本発明の第１の実施例の第１の変形例の光学式距離計測装置を示すブロック図。The block diagram which shows the optical distance measuring device of the 1st modification of the 1st Example of this invention. 本発明の第１の実施例の第２の変形例の光学式距離計測装置を示すブロック図。The block diagram which shows the optical distance measuring device of the 2nd modification of the 1st Example of this invention. 本発明の第２の実施例の光学式距離計測装置を示すブロック図。The block diagram which shows the optical distance measuring device of the 2nd Example of this invention. 本発明の第３の実施例を示し、（ａ）は光学式距離計測装置のブロック図、（ｂ），（ｃ）は動作を説明するタイムチャート。The 3rd Example of this invention is shown, (a) is a block diagram of an optical distance measuring device, (b), (c) is a time chart explaining operation | movement. 本発明の第４の実施例を示し、（ａ）は光学式距離計測装置のブロック図、（ｂ）は動作を説明するタイムチャート。The 4th Example of this invention is shown, (a) is a block diagram of an optical distance measuring device, (b) is a time chart explaining operation | movement. 本発明の第５の実施例の光学式距離計測装置を示すブロック図。The block diagram which shows the optical distance measuring device of the 5th Example of this invention. 本発明の第６の実施例を示し、低コヒーレンス光源を示すブロック図。The block diagram which shows the 6th Example of this invention and shows a low coherence light source. 本発明の第７の実施例を示し、計測ヘッドを示す断面図。Sectional drawing which shows the 7th Example of this invention and shows a measurement head. 本発明の第８の実施例を示し、遅延光学系を示す断面図。Sectional drawing which shows the 8th Example of this invention and shows a delay optical system. 本発明の第９の実施例を示し、全反射素子を示す断面図。Sectional drawing which shows the 9th Example of this invention and shows a total reflection element. 本発明の第１０の実施例の光学式距離計測装置の要部を示すブロック図。The block diagram which shows the principal part of the optical distance measuring device of the 10th Example of this invention.

符号の説明Explanation of symbols

１…低コヒーレンス光源、２…アイソレータ、３，３ａ，３ｂ…光分配器、４…計測ヘッド、５…周期的光路長変化素子、６…遅延光学系、７…全反射素子、８…光検出器、９…信号検出部、１０…信号処理制御部、１１…距離表示部、１２…計測用光路、１３，１３ａ，１３ｂ…参照用光路、１４…計測対象面、１５…反射光および散乱光の一部、１６…可視光源、１７…波長合成器、１８…波長分離器、１９…計測用低コヒーレンス光源（水中透過率の高い波長）、２０…水密構造の計測ヘッド、２１…屈折率補正部、２２…振幅復調部、２３…自動利得制御部、２４…発振器、２５…同期検波部、２６…演算制御部、２８…反射光、２９…全反射素子付き遅延光学系、３１…計測ヘッドカバー、３２…集束レンズ、３３…平行光、３４…集束光、３５，３６…コリメータレンズ、３７…小さい断面積の平行光、３８，３９…多重反射素子、４０…移動ステージ、４１…入射光、４２…放出光、４３…全反射ミラー、４４…微小振動機構、４５…移動機構、４６…入射光、４７…反射光、４８…レーザダイオード、４９…変調ドライブ用高周波電源、５０…レーザダイオードからの光、５１…スーパールミネッセントダイオード、５２…ドライブ用電源、５３…スーパールミネッセントダイオードからの光、５４…フラッシュランプ、５５…ドライブ用パルス電源、５６…フラッシュランプからの光、５７…Ｘ線源、５８…電源、５９…Ｘ線、６０…光路切替え器、６１…複数の計測ヘッド、６２…光ファイバーあるいは導波管、６３…光ファイバー、６４…光ファイバー用コネクタ、６５…コネクタ端面。
DESCRIPTION OF SYMBOLS 1 ... Low coherence light source, 2 ... Isolator, 3, 3a, 3b ... Optical distributor, 4 ... Measuring head, 5 ... Periodic optical path length change element, 6 ... Delay optical system, 7 ... Total reflection element, 8 ... Light detection 9 ... signal detection unit, 10 ... signal processing control unit, 11 ... distance display unit, 12 ... measurement optical path, 13, 13a, 13b ... reference optical path, 14 ... measurement target surface, 15 ... reflected light and scattered light 16 ... Visible light source, 17 ... Wavelength synthesizer, 18 ... Wavelength separator, 19 ... Low coherence light source for measurement (wavelength with high transmittance in water), 20 ... Measuring head with watertight structure, 21 ... Refractive index correction , 22 ... Amplitude demodulation unit, 23 ... Automatic gain control unit, 24 ... Oscillator, 25 ... Synchronous detection unit, 26 ... Calculation control unit, 28 ... Reflected light, 29 ... Delay optical system with total reflection element, 31 ... Measurement head cover 32 ... Converging lens, 33 ... Parallel light, 34 Focusing light, 35, 36 ... collimator lens, 37 ... parallel light with small cross section, 38, 39 ... multiple reflection element, 40 ... moving stage, 41 ... incident light, 42 ... emission light, 43 ... total reflection mirror, 44 ... Microvibration mechanism 45 ... Movement mechanism 46 ... Incident light 47 ... Reflected light 48 ... Laser diode 49 ... High frequency power supply for modulation drive 50 ... Light from laser diode 51 ... Super luminescent diode 52 ... Power source for drive, 53: Light from super luminescent diode, 54: Flash lamp, 55: Pulse power source for drive, 56: Light from flash lamp, 57 ... X-ray source, 58 ... Power source, 59 ... X-ray, 60: Optical path switch, 61: Multiple measuring heads, 62: Optical fiber or waveguide, 63: Optical fiber, 64: Optical fiber core Kuta, 65 ... connector end face.

Claims (11)

距離計測用の低コヒーレンス光を発生する低コヒーレンス光源と、可視光を発生する可視光源と、前記低コヒーレンス光と前記可視光を同一光路に合成する波長合成器と、前記波長合成器に接続され前記同一光路に合成された光を計測用光路と参照用光路に分割する光分配器と、前記計測用光路の末端に接続され計測対象面に対向して設けられる計測ヘッドと、前記参照用光路に順次接続された周期的光路長変化素子および遅延光学系および全反射素子と、前記光分配器に接続され前記計測用光路を戻った光および前記参照用光路を戻った光が合成された光から低コヒーレンス光と可視光を分離する波長分離器と、前記波長分離器に接続され低コヒーレンス光を検出して前記計測用光路からの低コヒーレンス光と前記参照用光路からの低コヒーレンス光の干渉による光強度変化を電気信号に変換する光検出器と、前記光検出器に接続され前記電気信号を電気強度変化信号に変換する信号検出部と、前記信号検出部に接続され前記電気強度変化信号により前記干渉による光強度変化が最大になるように前記遅延光学系の変位量を調節して前記計測用光路の光路長と前記参照用光路の光路長を等しくするとともに前記遅延光学系の遅延光路長から前記計測ヘッドと前記計測対象面の間の距離を求める信号処理制御部と、前記信号処理制御部に接続され前記距離を表示する距離表示部とを備え、前記低コヒーレンス光源は水中透過率の高い波長の光を発生する光源であり、前記計測ヘッドは水密構造であり、前記信号処理制御部は水の屈折率によって光路長を補正する屈折率補正部を備えていることを特徴とする光学式距離計測装置。 A low coherence light source that generates low coherence light for distance measurement, a visible light source that generates visible light, a wavelength synthesizer that synthesizes the low coherence light and the visible light in the same optical path, and is connected to the wavelength synthesizer. An optical distributor for dividing the light combined in the same optical path into a measurement optical path and a reference optical path; a measurement head connected to an end of the measurement optical path and facing the measurement target surface; and the reference optical path And the light that has been connected to the optical path length changing element, the delay optical system, and the total reflection element, the light that has been connected to the optical distributor and returned to the measurement optical path, and the light that has returned to the reference optical path. A wavelength separator that separates low-coherence light and visible light from the light source, and a low-coherence light connected to the wavelength separator to detect the low-coherence light from the measurement optical path and low-coherence from the reference optical path. A light detector for converting a light intensity change due to interference of the lens light into an electric signal, a signal detector connected to the light detector for converting the electric signal into an electric intensity change signal, and connected to the signal detector The amount of change in the delay optical system is adjusted so that the change in the light intensity due to the interference is maximized by the electric intensity change signal so that the optical path length of the measurement optical path is equal to the optical path length of the reference optical path, and the delay optics A low-coherence light source comprising: a signal processing control unit that obtains a distance between the measurement head and the measurement target surface from a delay optical path length of a system; and a distance display unit that is connected to the signal processing control unit and displays the distance Is a light source that generates light with a high transmittance in water, the measurement head has a watertight structure, and the signal processing control unit includes a refractive index correction unit that corrects the optical path length by the refractive index of water. Optical distance measuring apparatus characterized by there. 前記信号検出部は、前記電気強度変化信号を整流してエンベロープを求める振幅復調部と、信号レベルを高め所定レベルの信号を出力する自動利得制御部とを備えていることを特徴とする請求項１記載の光学式距離計測装置。 The signal detection unit includes an amplitude demodulation unit that rectifies the electric intensity change signal to obtain an envelope, and an automatic gain control unit that increases a signal level and outputs a signal of a predetermined level. 1 optical distance measuring apparatus according. 前記信号処理制御部は、前記周期的光路長変化素子の光路長変化周波数を持つ信号で前記信号検出部からの電気強度変化信号を同期検波し、前記電気強度変化信号の周波数成分のうち支配的周波数成分が前記周期的光路長変化素子の周波数の２倍高調波成分となるように前記遅延光学系を制御することを特徴とする請求項１記載の光学式距離計測装置。 The signal processing control unit synchronously detects an electrical intensity change signal from the signal detection unit with a signal having an optical path length change frequency of the periodic optical path length change element, and is dominant among frequency components of the electrical intensity change signal. optical distance measuring apparatus according to claim 1, wherein the frequency component and controls the delay optical system such that the second harmonic component of the frequency of the periodic change in the optical path length element. 前記光分配器の後段に第２の光分配器を備え、前記計測ヘッドからの反射光と前記計測対象面からの反射光および散乱光との干渉を利用することを特徴とする請求項１記載の光学式距離計測装置。 A second optical distributor downstream of the optical distributor, claim 1, wherein utilizing the interference between the reflected light and the scattered light from the measurement target surface and the reflected light from the measuring head Optical distance measuring device. 前記計測ヘッドから前記計測対象面に照射される計測光を、集束照射型あるいは平行照射型としたことを特徴とする請求項１記載の光学式距離計測装置。 The measurement light emitted from the measurement head to the measurement target surface, an optical distance measuring apparatus according to claim 1, characterized in that a focused illumination type or parallel-illuminated. 前記遅延光学系は多重反射素子を備えていることを特徴とする請求項１記載の光学式距離計測装置。 The delay optical system optical distance measuring apparatus according to claim 1, characterized in that it comprises a multiple reflection element. 前記全反射素子は、全反射ミラーと、前記全反射ミラーを光軸の方向に微小振動させる微小振動機構と、前記全反射ミラーを光軸の方向に移動させる移動機構とを備えていることを特徴とする請求項１記載の光学式距離計測装置。 The total reflection element includes a total reflection mirror, a minute vibration mechanism that minutely vibrates the total reflection mirror in the direction of the optical axis, and a moving mechanism that moves the total reflection mirror in the direction of the optical axis. The optical distance measuring device according to claim 1, wherein: 前記低コヒーレンス光源は、変調されたレーザ光源あるいはスーパールミネッセントダイオード光源あるいはフラッシュランプ光源あるいはＸ線光源であることを特徴とする請求項１記載の光学式距離計測装置。 The low coherence light source, an optical distance measuring device according to claim 1, characterized in that the modulated laser light source or a super luminescent diode light source or flash lamp light source or X-ray light source. 前記計測用光路は、複数の計測ヘッドと、前記複数の計測ヘッドに光路を切り替える光路切替え器とを備えていることを特徴とする請求項１記載の光学式距離計測装置。 The measurement optical path, a plurality of the measurement head, an optical distance measuring apparatus according to claim 1, characterized in that it comprises an optical path switching unit for switching the optical path to said plurality of measurement heads. 前記各光学部品間の光路あるいはその一部が光ファイバーあるいは導波管で構成されていることを特徴とする請求項１記載の光学式距離計測装置。 The optical distance measuring apparatus according to claim 1, wherein the optical path or a part thereof is characterized in that it is constituted by an optical fiber or waveguide between the optical components. 前記光ファイバーのコネクタ端面からの反射光が計測光と参照光の光路差内に存在しないように光路長設定された位置に前記コネクタが設置されていることを特徴とする請求項１０記載の光学式距離計測装置。 11. The optical system according to claim 10 , wherein the connector is installed at a position where an optical path length is set so that reflected light from the connector end face of the optical fiber does not exist within an optical path difference between measurement light and reference light. Distance measuring device.
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