JP4185958B1 - ガスレーザ装置の立ち上げ方法及びガスレーザ装置 - Google Patents
ガスレーザ装置の立ち上げ方法及びガスレーザ装置 Download PDFInfo
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- JP4185958B1 JP4185958B1 JP2007153979A JP2007153979A JP4185958B1 JP 4185958 B1 JP4185958 B1 JP 4185958B1 JP 2007153979 A JP2007153979 A JP 2007153979A JP 2007153979 A JP2007153979 A JP 2007153979A JP 4185958 B1 JP4185958 B1 JP 4185958B1
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- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000001514 detection method Methods 0.000 claims description 11
- 230000005284 excitation Effects 0.000 claims description 3
- 230000001174 ascending effect Effects 0.000 abstract description 2
- 239000003990 capacitor Substances 0.000 description 7
- 230000001052 transient effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000007664 blowing Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/095—Processes or apparatus for excitation, e.g. pumping using chemical or thermal pumping
- H01S3/0951—Processes or apparatus for excitation, e.g. pumping using chemical or thermal pumping by increasing the pressure in the laser gas medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10069—Memorized or pre-programmed characteristics, e.g. look-up table [LUT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
【解決手段】通常の圧力制御によればレーザガス圧は立ち上げ前の圧力p1からp2まで徐々に上昇していくが、時刻t3においてDC電流が所定の閾値に達する場合、時刻t3以降はDC電流が閾値を超えないようにレーザガス圧のフィードバック制御を行うことにより、結果として上昇勾配がやや緩やかになってp2よりいくらか低いp2′まで徐々に上昇する制御がなされる。
【選択図】図2
Description
2 レーザ発振器
3 レーザ電源
4 制御部
5 DC電源部
6 RF電源部
8 マッチングユニット
9 放電管
10 電流検出部
14 ガス循環路
15 圧力制御ユニット
18 圧力センサ
23 光共振器
Claims (3)
- レーザ放電管にレーザガスを循環させ、高周波放電によりレーザを発生させる放電励起式ガスレーザ装置の立ち上げ方法であって、
前記ガスレーザ装置が正常に立ち上がるときの、前記ガスレーザ装置のレーザ電源のDC電源部の出力電流特性を、正常電流特性として予め記憶するステップと、
前記ガスレーザ装置の立ち上げ時における前記レーザ電源のDC電源部の出力電流を検出するステップと、
前記DC電源部の検出された出力電流が前記正常電流特性に基づいて定められた閾値を超えないように、前記レーザ放電管内のレーザガスの圧力を制御するステップと、
を有する立ち上げ方法。 - 前記レーザガスの圧力を制御するステップは、前記DC電源部の検出された出力電流が前記閾値に達したときから前記レーザ放電管内のレーザガスの圧力を下げる方向に制御することを含む、請求項1に記載の立ち上げ方法。
- レーザ放電管にレーザガスを循環させ、高周波放電によりレーザを発生させる放電励起式ガスレーザ装置において、
前記ガスレーザ装置が正常に立ち上がるときの、前記ガスレーザ装置のレーザ電源のDC電源部の出力電流特性を、正常電流特性として予め記憶する記憶手段と、
前記ガスレーザ装置の立ち上げ時における前記レーザ電源のDC電源部の出力電流を検出する検出手段と、
前記検出手段により検出された前記DC電源部の出力電流が前記正常電流特性に基づいて定められた閾値を超えないように、前記レーザ放電管内のレーザガスの圧力を制御する圧力制御手段と、
を有する放電励起ガスレーザ装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007153979A JP4185958B1 (ja) | 2007-06-11 | 2007-06-11 | ガスレーザ装置の立ち上げ方法及びガスレーザ装置 |
EP08010117A EP2003743A3 (en) | 2007-06-11 | 2008-06-03 | Startup method for gas laser unit and gas laser unit having startup function |
US12/132,905 US20080304533A1 (en) | 2007-06-11 | 2008-06-04 | Startup method for gas laser unit and gas laser unit having startup function |
CN2008101101273A CN101325305B (zh) | 2007-06-11 | 2008-06-10 | 气体激光装置的启动方法以及气体激光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007153979A JP4185958B1 (ja) | 2007-06-11 | 2007-06-11 | ガスレーザ装置の立ち上げ方法及びガスレーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4185958B1 true JP4185958B1 (ja) | 2008-11-26 |
JP2008306110A JP2008306110A (ja) | 2008-12-18 |
Family
ID=39731625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007153979A Expired - Fee Related JP4185958B1 (ja) | 2007-06-11 | 2007-06-11 | ガスレーザ装置の立ち上げ方法及びガスレーザ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080304533A1 (ja) |
EP (1) | EP2003743A3 (ja) |
JP (1) | JP4185958B1 (ja) |
CN (1) | CN101325305B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5172996B2 (ja) * | 2011-07-15 | 2013-03-27 | ファナック株式会社 | 高速、高精度に指令が可能なガスレーザ発振器における指令装置 |
JP5661834B2 (ja) * | 2013-03-05 | 2015-01-28 | ファナック株式会社 | レーザガス容器の密閉性を推定可能なレーザ装置 |
JP5927261B2 (ja) | 2014-10-03 | 2016-06-01 | ファナック株式会社 | アラームの種類を判別する機能を備えたガスレーザ装置 |
JP6010152B2 (ja) * | 2015-02-16 | 2016-10-19 | ファナック株式会社 | 送風機を備えるレーザ発振器 |
JP6162768B2 (ja) * | 2015-10-05 | 2017-07-12 | ファナック株式会社 | 補助電極を備えたガスレーザ発振器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4451766A (en) * | 1982-05-03 | 1984-05-29 | Hughes Aircraft Company | Radio frequency laser pumping system |
US4748634A (en) * | 1987-03-20 | 1988-05-31 | Hughes Aircraft Company | Pumping system for RF excited gas devices |
DE59205437D1 (de) * | 1991-06-27 | 1996-04-04 | Zeiss Carl Jena Gmbh | Hochfrequenzangeregter Laser für hohe Eingangsleistungen, insbesondere CO2-Bandleiterlaser |
JPH06326543A (ja) | 1993-05-12 | 1994-11-25 | Jeol Ltd | 高周波装置 |
US5754579A (en) * | 1994-06-16 | 1998-05-19 | Komatsu Ltd. | Laser gas controller and charging/discharging device for discharge-excited laser |
US6389052B2 (en) * | 1999-03-17 | 2002-05-14 | Lambda Physik Ag | Laser gas replenishment method |
JP4223887B2 (ja) * | 2003-08-11 | 2009-02-12 | 株式会社小松製作所 | 2ステージレーザのパルスエネルギー制御装置及び2ステージレーザシステム |
JP4975291B2 (ja) * | 2004-11-09 | 2012-07-11 | 株式会社ダイヘン | インピーダンス整合装置 |
JP2006156634A (ja) * | 2004-11-29 | 2006-06-15 | Fanuc Ltd | ガスレーザ発振器 |
GB2424752A (en) * | 2005-03-29 | 2006-10-04 | Gsi Lumonics Ltd | Power supply circuit for lasers |
JP2007059690A (ja) * | 2005-08-25 | 2007-03-08 | Fanuc Ltd | 高周波放電励起ガスレーザ発振器 |
JP5023479B2 (ja) | 2005-12-02 | 2012-09-12 | 住友化学株式会社 | ポリオレフィンペレットの後処理方法 |
JP4137972B2 (ja) * | 2006-12-14 | 2008-08-20 | ファナック株式会社 | ガス組成異常判断方法及び放電励起ガスレーザ発振器 |
-
2007
- 2007-06-11 JP JP2007153979A patent/JP4185958B1/ja not_active Expired - Fee Related
-
2008
- 2008-06-03 EP EP08010117A patent/EP2003743A3/en not_active Withdrawn
- 2008-06-04 US US12/132,905 patent/US20080304533A1/en not_active Abandoned
- 2008-06-10 CN CN2008101101273A patent/CN101325305B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2003743A3 (en) | 2009-11-25 |
CN101325305A (zh) | 2008-12-17 |
JP2008306110A (ja) | 2008-12-18 |
CN101325305B (zh) | 2010-06-02 |
US20080304533A1 (en) | 2008-12-11 |
EP2003743A2 (en) | 2008-12-17 |
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