JP4182156B2 - Ultrasonic transducer and electronic equipment - Google Patents

Ultrasonic transducer and electronic equipment Download PDF

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Publication number
JP4182156B2
JP4182156B2 JP2003045349A JP2003045349A JP4182156B2 JP 4182156 B2 JP4182156 B2 JP 4182156B2 JP 2003045349 A JP2003045349 A JP 2003045349A JP 2003045349 A JP2003045349 A JP 2003045349A JP 4182156 B2 JP4182156 B2 JP 4182156B2
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Prior art keywords
vibration element
piezoelectric vibration
substrate
ultrasonic transducer
flexible substrate
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JP2003045349A
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JP2004260239A (en
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順司 太田
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は超音波送受波器と電子機器とに係り、特には、超音波送受波器の電極接続構造に関する。
【0002】
【従来の技術】
自動車のバンパー等に取り付けられて車両後方や角隅方向の障害物を検知する障害物検知装置、いわゆるバックソナーやコーナーソナーのうちには、超音波を送信して障害物で反射された超音波を受信する超音波送受波器21が組み込まれたものがある。この超音波送受波器21は空中超音波センサともいわれ、図7で示す全体断面図のように、有底筒形の収納ケース22と、円板形の圧電振動素子23と、フレキシブル基板24とを備えている(例えば、特許文献1参照)。
【0003】
収納ケース22の底面部22aは振動可能な薄肉状とされており、その内側位置には圧電振動素子23が配設されている。また、この圧電振動素子23の対向する振動面上には電極25,26がそれぞれ形成されており、一方側(図7では下側)の振動面上に形成された電極、つまり、下側電極25は、圧電振動素子23の側面を通って他方側(図7では上側)の振動面上にまで折り返されている。
【0004】
そして、圧電振動素子23の上側振動面には他の電極、つまり、上側電極26も形成されており、この上側電極26と下側電極25の折り返し部25aとの間は空隙によって絶縁されている。なお、図示省略しているが、下側電極25の折り返し部25aと、圧電振動素子23の側面及び上側振動面との間も絶縁されている。
【0005】
さらに、フレキシブル基板24は、図8の外観斜視図で示すように、圧電振動素子23より大径のベース部24aと、このベース部24aの一端から延出された延出部24bとを具備しており、ベース部24a及び延出部24bの一方側(図8では表面側)の基板面上には一対のリード電極27,28が形成されている。そして、ベース部24aに形成されたリード電極27,28の各々は、これらの所定位置毎に形成されたスルーホールHを介してベース部24aの他方側(図8では裏面側)の基板面上に形成されたバンプLと各別に接続されている。
【0006】
すなわち、超音波送受波器21は、収納ケース22の底面部22aの内側位置に圧電振動素子23を収納し、この圧電振動素子23上にフレキシブル基板24のベース部24aが載置された構造を有している。そこで、圧電振動素子23の下側電極25は収納ケース22と接続されて導通し、この下側電極25の折り返し部25aはバンプL及びスルーホールHを通じてフレキシブル基板24の一方側のリード電極27と接続されて導通する。
【0007】
また、圧電振動素子23の上側電極26は、バンプL及びスルーホールHを通じてフレキシブル基板24の他方側のリード電極28と導通している。さらに、収納ケース22の底面部22aと圧電振動素子23とは接着剤(図示省略)を用いて接合されており、防音用充填材29及び封止用絶縁樹脂30によって密封された収納ケース22の内部からは、フレキシブル基板24の延出部24bのみが引き出されている。
【0008】
【特許文献1】
特開2002−112392号公報
【0009】
【発明が解決しようとする課題】
ところで、前記従来の形態に係る超音波送受波器21には、次のような不都合があった。すなわち、この超音波送受波器21が備える圧電振動素子23では、その下側電極25を上側振動面上にまで折り返す製造工程が必要となる。しかしながら、圧電振動素子23の側面及び上側振動面との間の絶縁を確保したうえで下側電極25の折り返し部25aを上側振動面上に形成するのは困難であり、そのため、前記した構造は実現し難いのが実状である。
【0010】
また、圧電振動素子23においては、その上側振動面上に下側電極25の折り返し部25aを形成する必要があるため、同じ上側振動面上に形成される上側電極26の占有面積が下側電極25に比して少なくなる。その結果、圧電振動素子23を全面的に振動させることはできず、振動効率が大幅に低下してしまう。なお、具体的な検討によれば、直径7mm程度の圧電振動素子23である場合、その振動可能領域は直径5mm程度の範囲であるに過ぎないことが分かっている。
【0011】
本発明はこれらの不都合に鑑みて創案されたものであり、圧電振動素子の電極を折り返して形成する必要がなく、その全面的な振動が可能となって振動効率の向上を実現できる超音波送受波器と、この超音波送受波器を組み込んでなる電子機器との提供を目的としている。
【0012】
【課題を解決するための手段】
請求項1記載の発明に係る超音波送受波器は、両主面に電極が形成された圧電振動素子と、該圧電振動素子が底面部の内側に配設される収納ケースと、該収納ケースに収納されるフレキシブル基板とを備えている。そして、この超音波送受波器では、前記フレキシブル基板は切り込み部が設けられて一方側の基板部分と他方側の基板部分とに分岐しており、これらの基板部分で前記圧電振動素子を挟み込むと共に、前記一方側の基板部分に形成されたリード電極を前記圧電振動素子の一方側の電極と接続し、前記他方側の基板部分に形成されたリード電極を前記圧電振動素子の他方側の電極と接続している。
【0014】
請求項記載の発明に係る超音波送受波器は、請求項に記載したものであり、前記一方側の基板部分に形成されたリード電極は、前記収納ケースとも接続されて導通している。
【0015】
請求項記載の発明に係る超音波送受波器は請求項1または請求項に記載したものであり、前記フレキシブル基板は、温度補償用の電子部品を搭載している。
【0016】
請求項記載の発明に係る電子機器は、請求項1〜請求項のいずれかに記載の超音波送受波器が組み込まれていることを特徴とする。
【0017】
【発明の実施の形態】
図1は本実施の形態に係る超音波送受波器を側面方向から見た状態を示す全体断面図、図2は本実施の形態に係る超音波送受波器を正面方向から見た状態を示す全体断面図、図3は本実施の形態に係るフレキシブル基板の組立状態を示す外観斜視図である。そして、図4は本実施の形態に係るフレキシブル基板の展開状態を示す平面図であり、図4(a)はその表面側を示し、図4(b)はその裏面側を示している。
【0018】
また、図5は変形例に係るフレキシブル基板の展開状態を示す平面図であり、図5(a)はその表面側を、図5(b)はその裏面側を示している。さらに、図6は、本実施の形態に係る超音波送受波器が組み込まれた障害物検知装置の使用状態を示す説明図である。
【0019】
本実施の形態に係る超音波送受波器1は、図1及び図2で示すように、有底筒形の収納ケース2と、円板形の圧電振動素子3と、フレキシブル基板4とを備えている。収納ケース2はアルミニウム等のような金属材料から作製されており、その外表面はアルマイト処理または塗装されている。そして、この収納ケース2の底面部2aは振動可能な薄肉状とされ、その内側位置には圧電振動素子3が平行状として配設されている。
【0020】
また、圧電振動素子3の対向する両主面上には、電極5,6がそれぞれ形成されている。つまり、このとき、圧電振動素子3の一方側(図1,2では下側)の主面上には一方側の電極、つまり、下側電極5が、その他方側(図1,2では上側)の主面上には他方側の電極、つまり、上側電極6が形成されている。
【0021】
フレキシブル基板4は、図3及び図4(a)で示すように、圧電振動素子3よりも大径の円形とされたベース部4aと、このベース部4aの一端から延出された矩形の延出部4bとを具備しており、ベース部4a及び延出部4bの一方側(図3では表面側)の基板面上には、一対のリード電極7,8が周縁に沿って形成されている。そして、ベース部4aの表面側に形成されたリード電極7,8のそれぞれは、図4(b)で示すように、これらの所定位置毎に形成されたスルーホールHを介してベース部4aの他方側(図3では裏面側)に形成されたリード電極9,10と各別に接続されている。
【0022】
なお、フレキシブル基板4は厚みが60μm程度のポリイミドを基体とし、リード電極7〜10のそれぞれは厚みが30μm程度の銅箔から形成されたものである。また、フレキシブル基板4のベース部4aでは、その中央箇所が必ずしも必要ではないため、図4中の仮想線で示すような開口4cを形成してもよい。ところで、フレキシブル基板4のベース部4aが円形に限られず、他の形状であってもよいことは勿論であり、図1及び図2で示すように、並列配置されたリード電極7,8間に温度補償用コンデンサ11を接続しておいてもよい。
【0023】
さらに、フレキシブル基板4の所定位置には、ベース部4aから延出部4bにまで至るスリットである切り込み部Sが設けられており、この切り込み部Sを介しては、フレキシブル基板4の所定部分が切離可能な一方側の基板部分12と他方側の基板部分13との2つに分岐している。そして、これらの基板部分12,13によっては、図1及び図2で示すように、圧電振動素子3を厚み方向に沿って挟み込むことが可能となっている。なお、ここでの基板部分12はベース部4aの大半に対応しており、他方側の基板部分13はベース部4aの一部のみに対応している。
【0024】
そこで、これらの基板部分12,13によって圧電振動素子3を挟み込んだ場合、一方側の基板部分12に形成されて導通しあったリード電極7,9は圧電振動素子3の下側電極5と接続され、他方側の基板部分13に形成されて導通したリード電極8,10は圧電振動素子3の上側電極6と接続される。そして、この際、リード電極7,10と下側電極5及び上側電極6との各々同士は、図示省略しているが、導電ペーストによる接着や半田付け等によって電気的に導通させられる。
【0025】
すなわち、本実施の形態に係る超音波送受波器1は、収納ケース2の底面部2aの内側位置に圧電振動素子3を収納しており、この圧電振動素子3をフレキシブル基板4の分岐した一方側及び他方側の基板部分12,13で挟み込んだ構造を有している。そこで、フレキシブル基板4の分岐した一方側の基板部分12に形成されたリード電極7は圧電振動素子3の下側電極5と導通し、かつ、この下側電極5とスルーホールHを通じて接続されたリード電極9は収納ケース2の底面部2aと導通する。
【0026】
また、フレキシブル基板4の他方側の基板部分13に形成されたリード電極10は圧電振動素子3の上側電極6と導通し、このリード電極10はスルーホールHを通じてリード電極8と接続されている。従って、本実施の形態に係る超音波送受波器1は、フェルト等である防音用充填材14と、シリコン樹脂等である封止用絶縁樹脂15によって密封された収納ケース2の内部からフレキシブル基板4の延出部4bのみが引き出された構造となる。
【0027】
ところで、本実施の形態では、フレキシブル基板4が具備するベース部4a及び延出部4bの一方側(図3では表面側)の基板面上に、一対のリード電極7,8を並列で形成している。しかしながら、このような構成に限定されず、図5で示すような構成とすることも可能である。つまり、図5(a)で示すように、ベース部4a及び延出部4bからなるフレキシブル基板4の表面側の基板面上に一方側のリード電極7を形成し、このベース部4aの裏面側にはスルーホールHを介してリード電極7と接続されたリード電極9を形成する。
【0028】
一方、このとき、フレキシブル基板4が具備するベース部4a及び延出部4bの裏面側の基板面上には、他方側のリード電極8をリード電極9とは別に形成しておく。このような構成としても、フレキシブル基板4の所定位置に切り込み部Sを設けたのに伴って分岐した一方側の基板部分12と他方側の基板部分13とで圧電振動素子3を挟み込むと、一方側の基板部分12に形成されて導通しあったリード電極7,9は圧電振動素子3の下側電極5と接続され、他方側の基板部分13に形成されたリード電極8は圧電振動素子3の上側電極6と接続される。なお、フレキシブル基板4のベース部4aに対し、図5中の仮想線で示すような複数の開口4dを形成してもよい。
【0029】
次に、超音波送受波器が組み込まれた電子機器について説明する。この種の電子機器としては、車両後方や角隅方向の障害物を検知するバックソナー17やコーナーソナー等の障害物検知装置が一般的である。
【0030】
すなわち、バックソナー17は、図6で示すように、自動車18のバンパー等に取り付けられ、自動車18内の制御装置19によって駆動されたバックソナー17からは超音波が送信される。そして、壁面等の障害物で反射されてきた超音波をバックソナー17が受信すると、制御装置19では、送信から受信までの所要時間に基づいて障害物との離間距離の算出等が行われる。
【0031】
【発明の効果】
請求項1記載の発明に係る超音波送受波器によれば、フレキシブル基板の分岐した一方側の基板部分と他方側の基板部分とにより圧電振動素子を挟み込むことが可能となる。そして、一方側の基板部分に形成されたリード電極を圧電振動素子の一方側の電極と直接的に接続し、かつ、他方側の基板部分に形成されたリード電極を圧電振動素子の他方側の電極と直接的に接続することができる。
【0032】
従って、圧電振動素子の一方側の電極を他方側に折り返す必要はなくなり、その製造工程が簡単になるという効果が得られる。また、圧電振動素子における一方側及び他方側の電極それぞれの占有面積が略同一となるので、圧電振動素子を全面的に振動させることが可能となり、振動効率の大幅な向上を実現できる。
【0033】
しかも、本願発明に係る超音波送受波器では、切り込み部を設けたので、フレキシブル基板を容易に一方側の基板部分と他方側の基板部分とに分岐することができる。
【0034】
請求項記載の発明に係る超音波送受波器であれば、圧電振動素子と収納ケースとの確実な接続による導通を実現することが可能となる。そのため、ノイズの発生を抑制することができる。また、請求項記載の発明に係る超音波送受波器によれば、温度補償用の電子部品を安定的に搭載することが可能になるという利点が確保される。
【0035】
請求項記載の発明に係る電子機器であれば、超音波送受波器が組み込まれた電子機器を安価に構成することが可能になり、その耐久性の向上をも図ることができるという効果が得られる。
【図面の簡単な説明】
【図1】本実施の形態に係る超音波送受波器を側面方向から見た状態を示す全体断面図である。
【図2】本実施の形態に係る超音波送受波器を正面方向から見た状態を示す全体断面図である。
【図3】本実施の形態に係るフレキシブル基板の組立状態を示す外観斜視図である。
【図4】本実施の形態に係るフレキシブル基板の展開状態を示す平面図である。
【図5】変形例に係るフレキシブル基板の展開状態を示す平面図である。
【図6】本実施の形態に係る超音波送受波器が組み込まれた障害物検知装置の使用状態を示す説明図である。
【図7】従来の形態に係る超音波送受波器を正面方向から見た状態を示す全体断面図である。
【図8】従来の形態に係るフレキシブル基板の組立状態を示す外観斜視図である。
【符号の説明】
1 超音波送受波器
2 収納ケース
2a 底面部
3 圧電振動素子
4 フレキシブル基板
5 圧電振動素子の一方側の電極
6 圧電振動素子の他方側の電極
7 リード電極
8 リード電極
9 リード電極
10 リード電極
12 一方側の基板部分
13 他方側の基板部分
S 切り込み部
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ultrasonic transducer and an electronic apparatus, and more particularly to an electrode connection structure of an ultrasonic transducer.
[0002]
[Prior art]
Among obstacle detection devices attached to automobile bumpers and the like that detect obstacles in the rear and corner directions of vehicles, so-called back sonar and corner sonar, ultrasonic waves transmitted and reflected by obstacles Some of them incorporate an ultrasonic transducer 21 for receiving the signal. The ultrasonic transducer 21 is also referred to as an aerial ultrasonic sensor. As shown in the overall sectional view of FIG. 7, the bottomed cylindrical storage case 22, the disk-shaped piezoelectric vibration element 23, the flexible substrate 24, (For example, refer to Patent Document 1).
[0003]
The bottom surface portion 22a of the storage case 22 has a thin wall shape that can vibrate, and a piezoelectric vibration element 23 is disposed at an inner position thereof. Electrodes 25 and 26 are formed on the opposing vibration surfaces of the piezoelectric vibration element 23, respectively. The electrodes formed on the vibration surface on one side (the lower side in FIG. 7), that is, the lower electrode 25 is folded back to the vibration surface on the other side (the upper side in FIG. 7) through the side surface of the piezoelectric vibration element 23.
[0004]
Another electrode, that is, an upper electrode 26 is also formed on the upper vibration surface of the piezoelectric vibration element 23, and the upper electrode 26 and the folded portion 25 a of the lower electrode 25 are insulated by a gap. . Although not illustrated, the folded portion 25a of the lower electrode 25 is also insulated from the side surface and the upper vibration surface of the piezoelectric vibration element 23.
[0005]
Further, as shown in the external perspective view of FIG. 8, the flexible substrate 24 includes a base portion 24a having a diameter larger than that of the piezoelectric vibration element 23 and an extending portion 24b extending from one end of the base portion 24a. A pair of lead electrodes 27 and 28 are formed on the substrate surface on one side (the surface side in FIG. 8) of the base portion 24a and the extension portion 24b. Each of the lead electrodes 27 and 28 formed on the base portion 24a is on the substrate surface on the other side (the back surface side in FIG. 8) of the base portion 24a through the through holes H formed at the predetermined positions. Are separately connected to the bumps L formed.
[0006]
That is, the ultrasonic transducer 21 has a structure in which the piezoelectric vibration element 23 is housed inside the bottom surface portion 22 a of the housing case 22, and the base portion 24 a of the flexible substrate 24 is placed on the piezoelectric vibration element 23. Have. Therefore, the lower electrode 25 of the piezoelectric vibration element 23 is connected to the storage case 22 to be conductive, and the folded portion 25a of the lower electrode 25 is connected to the lead electrode 27 on one side of the flexible substrate 24 through the bump L and the through hole H. Connected and conductive.
[0007]
Further, the upper electrode 26 of the piezoelectric vibration element 23 is electrically connected to the lead electrode 28 on the other side of the flexible substrate 24 through the bump L and the through hole H. Further, the bottom surface portion 22 a of the storage case 22 and the piezoelectric vibration element 23 are joined using an adhesive (not shown), and the storage case 22 sealed by the soundproofing filler 29 and the sealing insulating resin 30 is used. Only the extending portion 24b of the flexible substrate 24 is drawn out from the inside.
[0008]
[Patent Document 1]
Japanese Patent Laid-Open No. 2002-112392
[Problems to be solved by the invention]
Incidentally, the ultrasonic transducer 21 according to the conventional form has the following disadvantages. That is, the piezoelectric vibration element 23 provided in the ultrasonic transducer 21 requires a manufacturing process in which the lower electrode 25 is folded back onto the upper vibration surface. However, it is difficult to form the folded portion 25a of the lower electrode 25 on the upper vibration surface while ensuring the insulation between the side surface of the piezoelectric vibration element 23 and the upper vibration surface. The actual situation is difficult to achieve.
[0010]
Further, in the piezoelectric vibration element 23, since it is necessary to form the folded portion 25a of the lower electrode 25 on the upper vibration surface, the area occupied by the upper electrode 26 formed on the same upper vibration surface is the lower electrode. Less than 25. As a result, the piezoelectric vibration element 23 cannot be vibrated entirely, and the vibration efficiency is greatly reduced. In addition, according to a specific study, it is known that in the case of the piezoelectric vibration element 23 having a diameter of about 7 mm, the viable region is only a range of about 5 mm in diameter.
[0011]
The present invention was devised in view of these disadvantages, and it is not necessary to fold and form the electrodes of the piezoelectric vibration element, and the ultrasonic transmission / reception capable of improving the vibration efficiency by enabling the entire vibration thereof. An object of the present invention is to provide a waver and an electronic device incorporating the ultrasonic wave transducer.
[0012]
[Means for Solving the Problems]
An ultrasonic transducer according to the first aspect of the present invention includes a piezoelectric vibration element having electrodes formed on both main surfaces thereof, a storage case in which the piezoelectric vibration element is disposed inside a bottom surface portion, and the storage case And a flexible substrate housed in the housing. In this ultrasonic transducer, the flexible substrate is provided with a cut portion and is branched into a substrate portion on one side and a substrate portion on the other side, and the piezoelectric vibration element is sandwiched between these substrate portions. The lead electrode formed on the one side substrate portion is connected to the one side electrode of the piezoelectric vibration element, and the lead electrode formed on the other side substrate portion is connected to the other side electrode of the piezoelectric vibration element. Connected.
[0014]
An ultrasonic transducer according to a second aspect of the present invention is the ultrasonic transducer according to the first aspect , wherein the lead electrode formed on the substrate portion on the one side is also connected to the storage case to be conductive. .
[0015]
An ultrasonic transducer according to a third aspect of the present invention is the ultrasonic transducer according to the first or second aspect , wherein the flexible substrate is mounted with an electronic component for temperature compensation.
[0016]
An electronic apparatus according to a fourth aspect of the invention is characterized in that the ultrasonic transducer according to any one of the first to third aspects is incorporated.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is an overall cross-sectional view showing a state in which the ultrasonic transducer according to the present embodiment is viewed from the side, and FIG. 2 shows a state in which the ultrasonic transducer according to the present embodiment is viewed from the front. FIG. 3 is an overall perspective view, and FIG. 3 is an external perspective view showing an assembly state of the flexible substrate according to the present embodiment. 4 is a plan view showing an unfolded state of the flexible substrate according to the present embodiment. FIG. 4 (a) shows the front side and FIG. 4 (b) shows the back side.
[0018]
FIG. 5 is a plan view showing an unfolded state of the flexible substrate according to the modification. FIG. 5 (a) shows the front side and FIG. 5 (b) shows the back side. Furthermore, FIG. 6 is explanatory drawing which shows the use condition of the obstacle detection apparatus with which the ultrasonic transducer which concerns on this Embodiment was integrated.
[0019]
As shown in FIGS. 1 and 2, the ultrasonic transducer 1 according to the present embodiment includes a bottomed cylindrical storage case 2, a disk-shaped piezoelectric vibration element 3, and a flexible substrate 4. ing. The storage case 2 is made of a metal material such as aluminum, and its outer surface is anodized or painted. And the bottom face part 2a of this storage case 2 is made into the thin-walled shape which can vibrate, and the piezoelectric vibration element 3 is arrange | positioned in parallel at the inner position.
[0020]
Electrodes 5 and 6 are formed on both opposing main surfaces of the piezoelectric vibration element 3, respectively. That is, at this time, one side of the piezoelectric vibration element 3 (the lower side in FIGS. 1 and 2) has one electrode, that is, the lower electrode 5 on the other side (the upper side in FIGS. 1 and 2). ), The other electrode, that is, the upper electrode 6 is formed.
[0021]
As shown in FIGS. 3 and 4A, the flexible substrate 4 includes a base portion 4a having a larger diameter than the piezoelectric vibration element 3, and a rectangular extension extending from one end of the base portion 4a. A pair of lead electrodes 7 and 8 are formed along the periphery on the substrate surface on one side (the surface side in FIG. 3) of the base portion 4a and the extension portion 4b. Yes. Then, each of the lead electrodes 7 and 8 formed on the surface side of the base portion 4a is connected to the base portion 4a through through holes H formed at predetermined positions as shown in FIG. 4B. The lead electrodes 9 and 10 formed on the other side (the back side in FIG. 3) are connected separately.
[0022]
The flexible substrate 4 is based on polyimide having a thickness of about 60 μm, and each of the lead electrodes 7 to 10 is formed from a copper foil having a thickness of about 30 μm. Further, since the central portion of the base portion 4a of the flexible substrate 4 is not necessarily required, an opening 4c as indicated by an imaginary line in FIG. 4 may be formed. Incidentally, the base portion 4a of the flexible substrate 4 is not limited to a circular shape, but may be of other shapes. As shown in FIG. 1 and FIG. 2, the lead electrodes 7 and 8 arranged in parallel are arranged. A temperature compensating capacitor 11 may be connected.
[0023]
Further, a cut portion S, which is a slit extending from the base portion 4a to the extending portion 4b, is provided at a predetermined position of the flexible substrate 4, and a predetermined portion of the flexible substrate 4 is provided through the cut portion S. The substrate part 12 is branched into two parts, that is, a detachable substrate part 12 and a substrate part 13 on the other side. And depending on these board | substrate parts 12 and 13, as shown in FIG.1 and FIG.2, it is possible to pinch | interpose the piezoelectric vibration element 3 along the thickness direction. The substrate portion 12 here corresponds to most of the base portion 4a, and the substrate portion 13 on the other side corresponds to only a part of the base portion 4a.
[0024]
Therefore, when the piezoelectric vibration element 3 is sandwiched between these substrate portions 12 and 13, the lead electrodes 7 and 9 formed on the substrate portion 12 on one side and conducted are connected to the lower electrode 5 of the piezoelectric vibration element 3. The lead electrodes 8, 10 formed on the other substrate portion 13 and made conductive are connected to the upper electrode 6 of the piezoelectric vibration element 3. At this time, the lead electrodes 7 and 10 and the lower electrode 5 and the upper electrode 6 are electrically connected by bonding with a conductive paste, soldering, or the like, although not shown.
[0025]
That is, the ultrasonic transducer 1 according to the present embodiment stores the piezoelectric vibration element 3 in the inner position of the bottom surface portion 2 a of the storage case 2, and the piezoelectric vibration element 3 is branched from the flexible substrate 4. It has a structure sandwiched between the substrate portions 12 and 13 on the side and the other side. Therefore, the lead electrode 7 formed on the branched substrate portion 12 of the flexible substrate 4 is electrically connected to the lower electrode 5 of the piezoelectric vibration element 3 and is connected to the lower electrode 5 through the through hole H. The lead electrode 9 is electrically connected to the bottom surface portion 2 a of the storage case 2.
[0026]
The lead electrode 10 formed on the substrate portion 13 on the other side of the flexible substrate 4 is electrically connected to the upper electrode 6 of the piezoelectric vibration element 3, and the lead electrode 10 is connected to the lead electrode 8 through the through hole H. Therefore, the ultrasonic transducer 1 according to the present embodiment includes a flexible substrate from the inside of the storage case 2 sealed by the soundproof filler 14 such as felt and the sealing insulating resin 15 such as silicon resin. Only the four extending portions 4b are pulled out.
[0027]
By the way, in the present embodiment, a pair of lead electrodes 7 and 8 are formed in parallel on the substrate surface on one side (surface side in FIG. 3) of the base portion 4a and the extension portion 4b included in the flexible substrate 4. ing. However, the present invention is not limited to such a configuration, and a configuration as shown in FIG. 5 is also possible. That is, as shown in FIG. 5 (a), a lead electrode 7 on one side is formed on the substrate surface on the front surface side of the flexible substrate 4 composed of the base portion 4a and the extending portion 4b, and the back surface side of the base portion 4a. The lead electrode 9 connected to the lead electrode 7 through the through hole H is formed.
[0028]
On the other hand, the lead electrode 8 on the other side is formed separately from the lead electrode 9 on the substrate surface on the back side of the base portion 4 a and the extension portion 4 b included in the flexible substrate 4. Even in such a configuration, when the piezoelectric vibration element 3 is sandwiched between the substrate portion 12 on one side and the substrate portion 13 on the other side that are branched when the cut portion S is provided at a predetermined position of the flexible substrate 4, The lead electrodes 7 and 9 formed on the substrate portion 12 on the side and made conductive are connected to the lower electrode 5 of the piezoelectric vibration element 3, and the lead electrodes 8 formed on the substrate portion 13 on the other side are connected to the piezoelectric vibration element 3. The upper electrode 6 is connected. Note that a plurality of openings 4 d as shown by phantom lines in FIG. 5 may be formed in the base portion 4 a of the flexible substrate 4.
[0029]
Next, an electronic device in which an ultrasonic transducer is incorporated will be described. As this type of electronic device, an obstacle detection device such as a back sonar 17 or a corner sonar that detects an obstacle in the rear or corner of the vehicle is common.
[0030]
That is, as shown in FIG. 6, the back sonar 17 is attached to a bumper or the like of the automobile 18, and ultrasonic waves are transmitted from the back sonar 17 driven by the control device 19 in the automobile 18. Then, when the back sonar 17 receives the ultrasonic wave reflected by the obstacle such as the wall surface, the control device 19 calculates the distance from the obstacle based on the required time from transmission to reception.
[0031]
【The invention's effect】
According to the ultrasonic transducer according to the first aspect of the present invention, the piezoelectric vibration element can be sandwiched between the branched substrate portion on one side and the substrate portion on the other side of the flexible substrate. The lead electrode formed on the substrate portion on one side is directly connected to the electrode on one side of the piezoelectric vibration element, and the lead electrode formed on the substrate portion on the other side is connected to the other side of the piezoelectric vibration element. It can be directly connected to the electrode.
[0032]
Therefore, it is not necessary to fold the electrode on one side of the piezoelectric vibration element to the other side, and the manufacturing process can be simplified. In addition, since the occupation areas of the electrodes on one side and the other side of the piezoelectric vibration element are substantially the same, the piezoelectric vibration element can be vibrated entirely, and a significant improvement in vibration efficiency can be realized.
[0033]
In addition, since the ultrasonic transducer according to the present invention is provided with the cut portion, the flexible substrate can be easily branched into the substrate portion on one side and the substrate portion on the other side.
[0034]
According to the ultrasonic transducer according to the second aspect of the present invention, it is possible to realize conduction by a reliable connection between the piezoelectric vibration element and the storage case. Therefore, generation of noise can be suppressed. In addition, according to the ultrasonic transducer according to the third aspect of the present invention, the advantage that the temperature compensating electronic component can be stably mounted is secured.
[0035]
If it is the electronic device which concerns on invention of Claim 4, it will become possible to comprise the electronic device incorporating the ultrasonic transducer at low cost, and the effect that the improvement of the durability can also be aimed at. can get.
[Brief description of the drawings]
FIG. 1 is an overall cross-sectional view showing a state in which an ultrasonic transducer according to an embodiment is viewed from a side surface direction.
FIG. 2 is an overall cross-sectional view showing a state in which the ultrasonic transducer according to the present embodiment is viewed from the front.
FIG. 3 is an external perspective view showing an assembled state of the flexible substrate according to the present embodiment.
FIG. 4 is a plan view showing a developed state of the flexible substrate according to the present embodiment.
FIG. 5 is a plan view showing a developed state of a flexible substrate according to a modification.
FIG. 6 is an explanatory diagram showing a use state of an obstacle detection apparatus incorporating the ultrasonic transducer according to the present embodiment.
FIG. 7 is an overall cross-sectional view showing a state in which an ultrasonic transducer according to a conventional embodiment is viewed from the front.
FIG. 8 is an external perspective view showing an assembly state of a flexible substrate according to a conventional form.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ultrasonic transducer 2 Storage case 2a Bottom face part 3 Piezoelectric vibration element 4 Flexible substrate 5 Electrode on one side of piezoelectric vibration element 6 Electrode on the other side of piezoelectric vibration element 7 Lead electrode 8 Lead electrode 9 Lead electrode 10 Lead electrode 12 One side substrate portion 13 The other side substrate portion S Cut portion

Claims (4)

両主面に電極が形成された圧電振動素子と、該圧電振動素子が底面部の内側に配設される収納ケースと、該収納ケースに収納されるフレキシブル基板とを備えてなる超音波送受波器であって、
前記フレキシブル基板は切り込み部が設けられて一方側の基板部分と他方側の基板部分とに分岐しており、これらの基板部分で前記圧電振動素子を挟み込むと共に、前記一方側の基板部分に形成されたリード電極を前記圧電振動素子の一方側の電極と接続し、前記他方側の基板部分に形成されたリード電極を前記圧電振動素子の他方側の電極と接続していることを特徴とする超音波送受波器。
Ultrasonic wave transmission / reception comprising a piezoelectric vibration element having electrodes formed on both main surfaces, a storage case in which the piezoelectric vibration element is disposed inside the bottom surface portion, and a flexible substrate stored in the storage case A vessel,
The flexible substrate is provided with a notch and branches into a substrate portion on one side and a substrate portion on the other side. The piezoelectric vibration element is sandwiched between these substrate portions and formed on the substrate portion on the one side. The lead electrode formed on the other side of the piezoelectric vibration element is connected to the electrode on one side of the piezoelectric vibration element, and the lead electrode formed on the substrate portion on the other side is connected to the electrode on the other side of the piezoelectric vibration element. Sonic transducer.
前記一方側の基板部分に形成されたリード電極は、前記収納ケースとも接続されて導通していることを特徴とする請求項1に記載した超音波送受波器。  2. The ultrasonic transducer according to claim 1, wherein the lead electrode formed on the one-side substrate portion is also connected to the storage case to be conductive. 前記フレキシブル基板は、温度補償用の電子部品を搭載していることを特徴とする請求項1または請求項2に記載した超音波送受波器。The ultrasonic transducer according to claim 1 or 2 , wherein the flexible substrate is mounted with an electronic component for temperature compensation. 請求項1〜請求項3のいずれかに記載の超音波送受波器が組み込まれていることを特徴とする電子機器。An electronic device in which the ultrasonic transducer according to any one of claims 1 to 3 is incorporated.
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JP4855713B2 (en) * 2005-05-18 2012-01-18 オリンパスメディカルシステムズ株式会社 Ultrasonic vibrator manufacturing method and ultrasonic endoscope apparatus
EP1769854A4 (en) 2004-07-22 2016-07-13 Olympus Corp Ultrasonic transducer
JP5033575B2 (en) * 2007-10-24 2012-09-26 日立アロカメディカル株式会社 Annual array transducer
WO2013051525A1 (en) * 2011-10-05 2013-04-11 株式会社村田製作所 Ultrasonic sensor
DE102015212683A1 (en) * 2015-07-07 2017-01-12 Robert Bosch Gmbh Sound transducer and installation arrangement with a sound transducer
KR102351065B1 (en) * 2017-05-10 2022-01-13 현대모비스 주식회사 Sensor cell for ultrasonic sensor
JP7487473B2 (en) 2019-12-26 2024-05-21 セイコーエプソン株式会社 Piezoelectric device and MEMS device

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