JP4171539B2

JP4171539B2 - Direct pressure continuous abrasive supply and injection method and apparatus

Info

Publication number: JP4171539B2
Application number: JP16120698A
Authority: JP
Inventors: 恵二間瀬; 真治神田
Original assignee: Fuji Manufacturing Co Ltd
Current assignee: Fuji Manufacturing Co Ltd
Priority date: 1998-06-09
Filing date: 1998-06-09
Publication date: 2008-10-22
Anticipated expiration: 2018-06-09
Also published as: JPH11347946A; KR100393374B1; KR20000006013A; TW467808B

Description

【０００１】
【発明の属する技術分野】
ブラスト加工において、研磨材回収タンク内の研磨材を噴射ノズルから被加工物へ定量的に噴射する、すなわち噴射量を一定に維持することは、良好で安定したブラスト加工を行うための重要なブラスト加工条件の１つであり、とくに、近年ブラスト加工が伝統的な単なるスケール除去やバリ取り等以外に数μmから数百μmの微細な切削加工を行う用途が増加している。例えば、半導体、ファインセラミック、ＰＤＰ（プラズマデイスプレイ）その他の薄膜面の微少切削、また、金属部品等の機械加工、レーザー加工、超音波加工に代替するものとして、ブラスト加工による微少切削が行われている。とくにこれらの加工が自動化ラインによって行われる場合には、噴射量の制御は重要な要素となる。
【０００２】
本発明は、かようなニーズに対応するものとして、研磨材タンク内の研磨材を定量的に噴射ノズルへ直圧式で連続して安定的に供給し、且つ、噴射するための研磨材の直圧式連続供給・噴射方法及び装置に関する。
【０００３】
【従来の技術】
ブラスト装置を噴射方式で分類すると、研磨材を研磨材回収タンク内に入れて該タンク内を圧縮空気で加圧して研磨材を圧送し、ノズルから噴射させる直圧式と、圧縮空気の噴射によるエゼクター効果によるサクション力により研磨材をノズル構造内部に吸い込み、その先端から圧縮空気と共に研磨材を噴射するサクション式に分けられる。
【０００４】
従来の直圧式ブラスト加工装置を示す図７において、研磨材回収タンク４０において、噴射後の研磨材とダストを分離して、ダストはダストコレクタ５３へ送られ、研磨材は下方に落ちて前記研磨材回収タンク４０の下部に溜まる。研磨材回収タンク４０の下部には研磨材加圧タンク４２が設けられ、研磨材加圧タンク４２に研磨材が無くなるとダンプバルブ４１が下がり研磨材回収タンク４０にある研磨材が研磨材加圧タンク４２に入る。研磨材加圧タンク４２に研磨材が入ると研磨材加圧用圧縮空気供給口４４より研磨材加圧用圧縮空気４７が入り、同時にダンプバルブ４１が閉まり研磨材加圧タンク４２内の圧力が高くなり、研磨材供給口４３より研磨材が押し出される。このとき、研磨材供給量調整バルブ４５により研磨材加圧圧縮空気３２の圧力を調整し、研磨材供給口４３の研磨材は研磨材ホース１２に送られ、前記研磨材加圧圧縮空気３２によりノズル本体１１まで運ばれ、ノズルチップ１４より研磨材が噴射される。
【０００５】
また、従来の直圧式における研磨材供給装置７０としては、例えば図８に示すように、研磨材から粉塵を分級して再利用可能な研磨材を回収する直圧式における回収タンク７１の底面近傍の下部に、当該回収タンク７１の側壁から内部を通過し前記側壁の反対側の側壁７２を貫通する給送管７３を設け、前記給送管７３の上部に小径の導入孔７４を設けている。前記給送管７３の一端は図示せざる研磨材供給管を介して噴射ノズルに連通し、給送管７３の他端は図１０の回収タンク７１の側壁の外方へ臨んでいる。
【０００６】
回収タンク７１内の研磨材が給送管７３に設けた導入孔７４から給送管７３内へ徐々にほぼ一定の速度で落下するにつれて、回収タンク７１内の研磨材に図８に一点鎖線に示すようなすり鉢状の穴ができ、このすり鉢状の穴は次第に拡がっていく。一方、導入孔７４から落下した研磨材は給送管７３内へ円錐体を成すように積み上げられ、この円錐体の研磨材は給送管７３内を流れる空気流により噴射ノズルへ向けて吸引される。
【０００７】
【発明が解決しようとする課題】
前述のように、最近のブラスト加工は、微少切削に利用され、そのため、噴射量を正確にコントロールすることが求められているが、従来のブラスト加工装置にあっては以下のような問題点があった。
【０００８】
前述の従来の直圧式ブラスト加工装置においては、エネルギー効率が高く、強烈なブラスト噴射が得られるが、研磨材を加圧タンク内において加圧して吐出するために一度研磨材を加圧タンクに入れる必要があり、連続噴射ができなかった。
【０００９】
また、研磨材の供給量、従って噴射量は、研磨材供給口４３の内径及び研磨材供給量調整バルブ４５を調整して研磨材加圧圧縮空気３２の量を調整するしかないことに加え、研磨材加圧タンク４２内の研磨材量によっても研磨材の噴射量が変化する傾向があり、研磨材供給量を細かくコントロールすることができなっかった。
【００１０】
前述した研磨材供給手段において、回収タンク７１及び研磨材を貯溜する単なる研磨材の貯溜タンク等を含む回収タンクから給送管７３へ落下する研磨材供給量は、導入孔７４の大きさ、研磨材の材質、粒径、比重等の違いにより大きく左右されていた。さらに、回収タンク７１内の研磨材の量が多いときと少ないときでは回収タンクから給送管７３へ落下する研磨材の量や速度が異なる場合があった。研磨材を噴射ノズルから被加工物へ向けて噴射すると、被加工物へ衝突して破損した再利用不可能な研磨材は、回収タンク７１で分級されてダストコレクタへ送られ破棄される。したがって、ブラスト加工を行うにつれて、回収タンク７１内の研磨材量が減少するため、給送管７３内への研磨材の落下量は必ずしも一定量にならないという問題があった。
【００１１】
また、研磨材には微粉性質を示すものと微粉性質を示さないものがある。微粉性質とは、回収タンク内の底部に集積した研磨材の安息角θが一定にならないほどの微粉状態を示す性質をいう。なお、研磨材が微粉性質を示す要因は、研磨材の材質、比重、粒径、及び回収タンク内の圧力等によって異なる。微粉性質を示す研磨材は、従来の研磨材供給装置７０を用いると、微粉特有の相互の付着力のために互いに吸着したり回収タンク７１の壁面に付着するなどして安息角θが一定にならず、図９に示すように回収タンク７１内の研磨材は導入孔７４の直上方に穴が開いた状態になり、あるいは図１０に示すように導入孔７４の上部に空洞７５を形成して研磨材が落下しなくなることがあった。
【００１２】
サクション式ブラスト装置にあっては、連続的に噴射できるが直圧式より噴射性能が劣る。
【００１３】
以上のように、従来の研磨材供給・噴射方法及び装置においては、回収タンクから常に一定量の研磨材を噴射ノズルへ供給し、噴射することが難しいという問題点があった。
【００１４】
本発明は、途上の問題を解決するためになされたもので、研磨材回収タンクないしはこれに連通する研磨材収容部から噴射ノズルへ定量の研磨材を安定した状態で、且つ連続的に供給し、噴射するための研磨材供給・噴射方法及び装置を提供し、さらに、研磨材の種類に応じて所望の研磨材供給・噴射量を容易に設定でき、微細加工、微少切削に対応し、且つ加工ラインの自動化が可能な研磨材供給・噴射方法及び装置を提供することを目的とする。
【００１５】
【課題を解決するための手段】
上記目的を達成するために、本発明の研磨材供給・噴射方法は、研磨材供給盤を水平または垂直回転させ、この研磨材供給盤の外周もしくは側面に形成された所定容量の複数の研磨材供給孔に研磨材回収タンク内の研磨材を装填ないし捕集し、前記研磨材供給孔の回転軌跡上に、前記研磨材供給孔の形成部分における前記研磨材供給盤の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤の回転に伴う移動により内部に配置された前記研磨材供給孔と、該研磨材供給孔に臨み開口する研磨材供給管に連通する空間を形成し、この空間に射出空気を注入し、前記研磨材を噴射ノズルへ連通する前記研磨材供給管に供給することを特徴とする（請求項１）。
【００１６】
前記研磨材供給孔は、研磨材供給盤の外周に形成した複数列を成す研磨材供給孔もしくは側面に形成した複数列を成す、例えば、該研磨材供給盤の回転中心に対して同心円状に複数列を成す、例えば、同一の回転軌跡を描く環状に複数の研磨材供給孔を形成したものとし（請求項２、１２）、
噴射ノズルの射出口内径が大きく空気消費量が大きくなるときは、前記研磨材を射出空気により研磨材供給管に供給すると共に、前記研磨材を圧送する加圧空気を前記研磨材供給管に供給することが有効である（請求項２、９、１０）。
【００１７】
前記研磨材供給盤を、前記研磨材回収タンク内で回転させて前記研磨材を、例えば、前記研磨材供給盤外周に形成した研磨材供給孔で捕集し、前記研磨材供給管を介して噴射ノズルへ供給することもできる（請求項３、８、１４）。
【００１８】
前記研磨材の噴射量は、前記研磨材供給盤を設定回転数又は速度において回転し、あるいは、前記研磨材供給孔の数、密度、体積、容量、又は開口部の面積を変更し、任意設定量に調整できる（請求項４）。
【００１９】
さらに、前記研磨材回収タンクに振動を加えるか（請求項５）、又は研磨材回収タンク内の研磨材を攪拌して、前記研磨材供給盤に落下する研磨材の設定量をより確実に一定に維持することもできる（請求項６）。また、本発明の研磨材供給・噴射装置にあっては、研磨材回収タンク２６下部に装填口２７を設け、該装填口に臨み複数の研磨材供給孔２４を形成した研磨材供給盤２０を回転駆動手段で回転自在に設けると共に、前記研磨材供給孔２４の回転軌跡上に、前記研磨材供給孔２４の形成部分における前記研磨材供給盤２０の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤の回転に伴う移動により内部に配置された前記研磨材供給孔と、該空間内で該研磨材供給孔２４に臨み開口すると共に噴射ノズルへ連通する研磨材供給管に連通する空間３５を配置し、この空間３５に前記研磨材を射出供給する射出空気の導管２８を設けると共に、該導管２８を射出空気供給源に連通したことを特徴とする（請求項７）。
【００２０】
前記研磨材供給孔は、内径に対して深さが８倍以内が実験の結果好ましいことが判明した。
【００２１】
また、複数列条形成した研磨材供給孔の回転軌跡に臨み、それぞれ、研磨材供給管を設け、該研磨材供給管を介して複数の噴射ノズルに連通するよう設けることができ、加工効率を向上させることができる。
【００２２】
さらに、本発明の研磨材供給・噴射装置は、研磨材回収タンクあるいは、これに連通する研磨材収容部（２６）内に、外周に研磨材供給孔２４を有する研磨材供給盤２０を回転駆動手段で回転自在に設け、且つ、前記研磨材供給盤２０の前記研磨材供給孔２４の少なくとも一部を研磨材収容部（２６）内の研磨材３４内へ埋没させると共に、前記研磨材供給孔２４の回転軌跡上に、前記研磨材供給孔２４の形成部分における前記研磨材供給盤２０の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤２０の回転に伴う移動により内部に配置された前記研磨材供給孔と、該空間内で該研磨材供給孔に臨み開口すると共に噴射ノズルへ連通する研磨材供給管に連通する空間３５を配置し、この空間３５に連通する射出空気の導管２８を設けると共に、該導管を射出空気供給源に連通したことを特徴とする（請求項８）。
【００２３】
前記研磨材供給孔２４は、平面矩形又は円形を成す多数の凹痕又は前記研磨材供給盤外周幅方向に至り形成された凹溝から形成することができる。
【００２４】
【発明の実施の形態】
本発明の研磨材供給・噴射方法及び装置の実施の形態について、以下に図を参照して説明する。
【００２５】
本発明の研磨材供給・噴射装置を設置するブラスト加工装置５０は、前記被加工物へ研磨材を噴射する噴射ノズル１１を備え、且つ被加工物を投入するキャビネット５１と噴射ノズル１１から噴射された研磨材から粉塵を分離して再使用可能な研磨材を回収し、貯溜する研磨材回収タンク２６と管を介して連通し、このようなブラスト加工装置に送風機や排風機、圧縮機などの気流発生手段を連通して、気流をキャビネット５１から研磨材回収タンク２６へ発生させ、この気流に研磨材或いは粉塵を載せて移送する。前記研磨材回収タンク２６はそれ自体が所謂サイクロンであってもよく、或いはサイクロン１３の下部に連通し、当該サイクロン１３の研磨材を単に貯溜するタンクであってもよい。
【００２６】
なお、本明細書において、各種研磨材噴射方式における噴射ノズルに研磨材供給管を介して研磨材を供給するタンクとして機能する研磨材収容部を総称して「研磨材回収タンク」という。
【００２７】
図１〜図３において、前記サイクロン１３の下部に連通する研磨材回収タンク２６は、下部に研磨材供給孔２４に連通する装填口２７を設け、前記研磨材回収タンク２６内に貯溜した研磨材３４が前記研磨材供給孔２４に落下して流入し、充填ないし装填されるようになっている。
【００２８】
好ましくは、前記研磨材回収タンク２６に図示せざるバイブレーターなどの振動発生手段または圧縮空気などによるタンク内研磨材の攪拌手段を連結し、研磨材供給孔２４への研磨材３４の流入を確実にし、つまり、前記振動発生手段及び攪拌手段により、研磨材回収タンク２６内の研磨材３４のブリッジを防ぐことにより、研磨材供給孔２４への研磨材供給量が一定量となる。
【００２９】
前記研磨材供給孔２４を有する研磨材供給盤２０はモータ２１等の回転駆動手段の回転力で等速度に水平回転する好ましくは、例えば合成樹脂製の平板円盤状であり、前記装填口２７と前記研磨材供給孔２４が連通するように、前記装填口２７の下部に近接して設ける。なお、研磨材供給盤２０の厚さは、研磨材の供給・噴射量に対応して任意に設定でき、厚く形成すれば、研磨材供給孔２４の容積も大きく形成でき、多くの研磨材３４を効率よく供給できる。
【００３０】
また、前記研磨材供給孔２４は、前記研磨材供給盤２０の厚さ方向に穿設形成され、その形状は、装填ないし捕集された研磨材が研磨材供給孔２４を保持できるものである必要がある。つまり、研磨材供給孔２４に装填ないし捕集された研磨材が、研磨材供給管３０の端縁もしくはこの研磨材供給管３０を分岐した送受管２９の好ましくは金属製の送受口２２の下部に移送され、該部に画成される、前記研磨材供給孔および該研磨材供給孔に臨む研磨材供給管に連通する空間３５において、研磨材を射出空気３１を成す、ここでは圧縮空気で射出され吹き上げることができればどのような形状でもよいが、例えば、紡錘形状の前記研磨材供給孔２４の（最大）内径を、３mmとし、深さ１５mm程度に形成すれば、微粉研磨材でも、研磨材が落下せずに射出空気３１による前記空間内に発生する乱流で研磨材供給孔２４より前記送受管２９内の空間３５内へ舞い上げられ該空間３５から射出される。
【００３１】
研磨材供給孔２４は、内径に対して深さが８倍以内であることが好ましく、深さが上記範囲外では、研磨材が残留することがあった。
【００３２】
また、研磨材供給孔２４は、複数の挿孔をそれぞれ研磨材供給盤２０の回転中心に対して同心円状に配置された同一の回転軌跡を描く複数の、図１〜図３の第１実施例では、３本の環状に形成し、また、１又は２本以上の複数列条に形成することができる。なお、この際前記複数の環状の研磨材供給孔２４列は、内周側及び外周側の各列において研磨材供給盤２０の直径方向において互いに重ならない位置に設ければ、各複数の研磨材供給孔２４は、研磨材供給盤２０の回転中常に、前記研磨材供給管３０の端縁もしくはこの研磨材供給管３０を分岐した送受管２９の送受口２２の下部に移送され、送受管２９に画成される一端が閉鎖され他端が前記研磨材供給孔２４および該研磨材供給孔に臨む研磨材供給管２９に連通する空間３５内に複数位置することとなり、前記送受口２２への研摩材３４の供給が途切れることがない。
【００３３】
噴射ノズル１１に連通する研磨材供給管３０は、これを分岐して送受管２９とし、この送受管２９の端部に形成した送受口２２は、前記複数列の研磨材供給孔２４の回転軌跡、実施例では、複数の前記研磨材供給孔２４のすべての回転軌跡に臨ませて形成されることになる。
【００３４】
前記空間３５は、図２、図４（Ａ）に示すように、前記送受管２９の外壁を２重構造とし、前記送受管２９内及び２重構造外壁内空間に画成される。
【００３５】
したがって、研磨材供給孔２４は、図示せざる射出空気供給源に、送受口２２、空間（３５）を成す送受管２９、送受管２９の２重構造外壁内空間３５そして導管２８を介して連通している。
【００３６】
図４（Ｂ）は、前記導管２８から空間３５を成す射出空気の通路を、送受管２９の中央に立設し、研磨材供給管３０上に突設して射出空気供給源に連通し、直接前記導管２８の先端が研磨材供給孔２４へ臨むように構成したもので、図４（Ａ）における空間３５を有しない構造となっている。
【００３７】
また、前記送受管２９に、射出空気供給源に連通する導管２８の端部に形成した送受口２２が研磨材供給盤２０が回転可能に可及的接近あるいは摺接して設けられている。
【００３８】
研磨材供給孔２４に装填ないし捕集された研磨材は、前記研磨材供給盤２０の回転により、前記送受口２２の下部に移送され、導管２８からの射出空気３１により前記送受管２９を含む空間３５において研磨材が吹き上げられて前記研磨材供給管３０に送られる。
【００３９】
送受管２９に送られた研磨材は、射出空気３１により研磨材供給管３０を経て噴射ノズル１１より噴射されるが、微粉研磨材、消費空気量がすくないときは、上記射出空気単独で研磨材の供給およびノズルからの噴射による加工が可能であるが、研磨材の材質、比重ないし粒径によっては、研磨材の研磨材供給孔２４からの射出は十分としても、この射出空気３１とは別に図示せざる加圧空気供給源からの加圧された空気を研磨材供給管３０に連結し、この加圧空気３２、ここでは、圧縮空気により研磨材を被加工物に噴射することにより、所望の圧力での噴射が可能となる。
【００４０】
同一条件で、研磨材供給孔の深さを２５mmとしたとき若干の研磨材の残留が認められた。
【００４１】
また、前記研磨材供給孔２４を複数列条に形成した場合、それぞれの研磨材供給孔２４の回転軌跡に臨ませて、複数の送受口２２を設け、該複数の送受口２２それぞれに対して連通した噴射ノズル１１を備えると、被加工物に複数の噴射ノズル１１から研磨材を安定して噴射することができる。
【００４２】
２０は研磨材供給盤で、本実施例では図１〜図３に示すように、研磨材供給盤２０の厚さ方向に、研磨材供給盤の回転中心に対して同心円状にすなわちそれぞれ同一回転軌跡で、その回転方向に連続する円形の孔である研磨材供給孔２４を３列平行に形成している。
【００４３】
一例として、前記供給孔２４内径を３mm、深さ１５mmとした。深さ２５mmでは、若干の研磨材の残留が認められた。
【００４４】
研磨材供給盤２０は、モータ２１の回転駆動手段に連結されているが、回転駆動手段の回転速度は既知の手段により回転数が調整自在に構成されている。
【００４５】
なお、研磨材供給盤２０の回転速度を調整することにより回転数の増減を図り、噴射ノズル１１への研磨材供給量を調整することができる。例えば、研磨材供給盤２０の回転速度を速くすることにより研磨材が多く供給され、研磨材供給盤２０の回転速度を遅くすることにより研磨材が少なく供給される。なお、研磨材供給盤２０の回転速度を一定に維持することにより、常時安定した状態で一定量の研磨材が噴射ノズル１１へ供給され、定量の研磨材が噴射ノズル１１から連続して安定的に被加工物へ噴射される。したがって、他の研磨材供給孔２４の容積あるいは、送受口２２の開口面積などが一定のとき、研磨材供給盤２０の回転速度と研磨材供給量は相関関係にあるので、この関係式を求めて研磨材供給量を研磨材供給盤２０の回転速度でデジタル化することにより所望の研磨材供給量を容易に調整できる。
【００４６】
研磨材供給盤２０が回転駆動手段により等速度で回転すると、研磨材供給孔２４内に装填された研磨材が送受口２２下部に移送される。フットスイッチあるいはマイクロスイッチの作動により図示せざる電磁弁を開放して射出空気供給源から前記導管２８を介して射出空気３１を送ると、研磨材供給孔２４内の研磨材が送受口２２及び送受管２９を介して研磨材供給管３０内に射出され吹き上げられる。同時に、前記研磨材供給管３０は図示せざる加圧空気供給源に連通し、送受管２９を介して送られてきた研磨材を加圧空気３２もあいまって、高圧で噴射ノズル１１へ供給される。
【００４７】
さらに、前記研磨材回収タンク２６にバイブレイター又は撹拌手段を連結し、研磨材回収タンク２６に振動を与えるか又は研磨材回収タンク２６内の研磨材３４を撹拌することにより、研磨材３４が装填口２７より研磨材供給孔２４内に十分に装填され、研磨材供給孔２４に流入する研磨材の量は常時、定量になり、より一層安定した状態で一定量の研磨材が供給される。
【００４８】
キャビネット５１内で研磨材を噴射ノズル１１から被加工物へ噴射して被加工物をブラスト加工すると、研磨材は再使用可能な研磨材と、破損した再使用不可能な研磨材になり、これらの研磨材と被加工物が剥離して生じた粉塵等が共に導管５２を介して気流に乗ってサイクロン１３へ給送される。このサイクロン１３で再使用可能な研磨材から再使用不可能な研磨材と粉塵が分離され、再使用不可能な研磨材や粉塵はダストコレクタ５３へ給送され、ダストコレクタ５３内の下部に集積され、清浄な空気がダストコレクタ５３の排風機５４から外気へ放出される。一方、再使用可能な研磨材は研磨材回収タンク２６の底部へ貯溜した後、前述した動作が繰り返される。
【００４９】
上述の研磨材供給・噴射方法及び装置を用いて以下の加工条件にて、ブラスト加工した。
【００５０】
実施例１
【００５１】
【表１】

【００５２】
上記実施例による加工で研磨材供給孔２４内に研磨材の残留はなく、ガラス基板に微細加工をしたところ、３０cm²あたりの均一性（加工の強い部分と弱い部分の差）は、２％以内で加工できた。
【００５３】
実施例２（図２、図３）
【００５４】
【表２】

【００５５】
次に、図４〜図６の実施態様について、上述実施態様と異なる点につき、説明する。
【００５６】
図４（Ａ）において、２６は研磨材回収タンクで、略直方体を成す好ましくは密閉型のタンクで、研磨材回収タンク２６内の下部に流入した研磨材で成る研磨材層１７が下方に形成され、当該研磨材層１７の上方に空気層１８が形成される。
【００５７】
２０は研磨材供給盤で、本実施例では図４（Ａ）及び図６に示すように、研磨材供給盤２０の円周面に円周方向に連続する一連の断面コ字状の条溝で成る研磨材供給孔２４を円周面幅方向に平行に複数形成している。研磨材供給盤２０は研磨材回収タンク２６内の研磨材層１７中で垂直方向に回転自在に回転軸２５で軸承され、研磨材供給盤２０の上部又は上部の一部分が空気層１８に露出する位置に設けている。
【００５８】
図４（Ｂ）は、前述したように、直接前記導管２８の先端が研磨材供給孔２４へ臨むように構成したもので、図４（Ａ）における空間３５を有しない構造である。
【００５９】
図５は、研磨材供給盤２０の外周面に円周方向に連続する一連の円筒状の凹部で成る研磨材供給孔２４を円周面幅方向に複数形成している。この際前記複数の環状の研磨材供給孔２４列は、研磨材供給盤２０の外周の幅方向の各列において互いに重ならない位置に設けたものである。
【００６０】
したがって、研磨材供給盤２０の円周のほぼ下半部全体は研磨材層１７内に確実に没し、且つ研磨材供給盤２０の円周の上半部の一部が空気層１８に露出している。研磨材供給盤２０が回転する時、研磨材供給盤２０の円周の上半部の一部分が研磨材層１７内に没しているので研磨材が研磨材供給孔２４内に入り込み易くなり、研磨材層１７の研磨材が確実に空気層１８へ移送される。
【００６１】
前記回転軸２５は研磨材回収タンク２６の外部で、軸受により軸支され、回転軸２５の軸端に図示せざるプーリを設け、このプーリにモータ２１等の回転駆動手段に回転力を伝達するＶベルトを介して連結する。なお、前記回転駆動手段の回転速度は既知の手段により容易に調整自在に構成されている。
【００６２】
研磨材供給盤２０が回転駆動手段により等速度で図４（Ａ）、（Ｂ）の紙面上時計回り方向に回転すると、研磨材供給盤２０の円周面の研磨材供給孔２４内に入り込んで補集された研磨材層１７の研磨材が空気層１８へ移送される。前記研磨材供給盤２０を等速度で回転し、研磨材供給盤２０の円周面で補集される研磨材の量は定量となるので、噴射ノズル１１へ供給される研磨材の量が定量になる。
【００６３】
実施例３（図４（Ａ）、図６）
【００６４】
【表３】

【００６５】
前述実施例２および上記実施例３では、研磨材供給盤が同一回転数で実施例３が約６．５倍の噴射量が得られた。
【００６６】
【発明の効果】
本発明は。以上説明したように構成されているので、以下に記載されるような効果を奏する。
【００６７】
本発明は、たとえ微粉性質を示す研磨材に対しても一定量の研磨材を安定的に連続して噴射ノズルへ供給・噴射することができた。
【００６８】
本発明は研磨材供給盤の回転速度を変化させて、回転数を増減させることにより研磨材供給量の増減を図ることができ、また研磨材供給盤の回転速度に応じて研磨材を連続して安定した状態で一定量に供給することができる。したがって、研磨材供給盤の回転速度を自在に調整することにより、研磨材の種類に応じて所望の研磨材供給量に確実且つ容易に調整できる。しかも、研磨材供給量に対応する研磨材供給盤の回転速度をデジタル化することにより所望の研磨材供給量、したがって、噴射量を容易に調整できる。
【００６９】
あるいは、前記研磨材供給孔の数、密度、体積、容量、開口部の面積又は前記送受口の開口面積を変更し、任意設定量の研磨材を供給し噴射することができる。
【００７０】
本願発明においては、研磨材供給盤の研磨材供給孔に装填ないし捕集された研磨材を、射出空気にて研磨材供給管内に射出し、吹き上げ、さらに加圧空気で研磨材を噴射ノズルへ供給して噴射すれば、射出空気の供給量は加圧空気供給量に比べ少なく、したがって、一定量の所望の噴射密度及び圧力で噴射でき、さらに被加工物に対して均一なブラスト加工が可能となった。
【図面の簡単な説明】
【図１】本発明の研磨材供給・噴射装置を備えたブラスト加工装置の正面図である。
【図２】本発明の研磨材供給・噴射装置の要部断面を示す正面図である。
【図３】本発明の研磨材供給・噴射装置の要部を示す斜視図である。
【図４】（Ａ）本発明の研磨材供給・噴射装置の他の実施態様における要部断面図である。
（Ｂ）本発明の研磨材供給・噴射装置のさらに他の実施態様における要部断面図である。
【図５】本発明の研磨材供給・噴射装置のさらに他の実施態様における要部断面を示す要部斜視図である。
【図６】本発明の研磨材供給・噴射装置のさらに他の実施態様における要部断面を示す要部斜視図である。
【図７】従来の直圧式のブラスト加工装置を示す正面図である。
【図８】従来の研磨材供給装置の要部断面を示し、特に微粉性質を示さない研磨材が給送管内に落下するときの研磨材の状態を示すものである。
【図９】従来の研磨材供給装置の要部断面を示し、特に微粉性質を示す研磨材が給送管内に落下するときの研磨材の状態を示すものである。
【図１０】従来の研磨材供給装置の要部断面を示し、特に微粉性質を示す研磨材がパイプ内に落下するときの研磨材の状態を示すものである。
【符号の説明】
１１噴射ノズル（ノズル本体）
１２研磨材ホース
１３サイクロン
１４ノズルチップ
１７研磨材層
１８空気層
２０研磨材供給盤
２１回転モータ
２２送受口
２４研磨材供給孔
２５回転軸
２６研磨材回収タンク
２７装填口
２８導管
２９送受管
３０研磨材供給管
３１射出（圧縮）空気
３２加圧（圧縮）空気
３４研磨材
３５空間
４０研磨材回収タンク
４１ダンプバルブ
４２研磨材加圧タンク
４３研磨材供給口
４４研磨材加圧用圧縮空気供給口
４５研磨材供給量調整バルブ
４７研磨材加圧用圧縮空気
５０ブラスト加工装置
５１キャビネット
５２導管
５３ダストコレクタ
５４排風機
６０回転軸
６１補集孔
６２補集回転板
６３送受口
６４送受管
６５空気層
７０研磨材供給装置
７１回収タンク
７３給送管
７４導入孔
７５空洞
７６研磨材[0001]
BACKGROUND OF THE INVENTION
In blasting, the abrasive in the abrasive recovery tank is quantitatively injected from the injection nozzle to the work piece, that is, maintaining the injection amount constant is an important blasting for good and stable blasting. This is one of the processing conditions, and in particular, in recent years, blasting has been increasingly used for performing fine cutting of several μm to several hundred μm in addition to traditional simple scale removal and deburring. For example, micro cutting of semiconductor, fine ceramic, PDP (plasma display) and other thin film surfaces, and micro cutting by blasting are performed as an alternative to machining, laser processing, and ultrasonic processing of metal parts. Yes. Especially when these processes are performed by an automated line, the control of the injection amount is an important factor.
[0002]
In order to meet such needs, the present invention supplies the abrasive in the abrasive tank quantitatively to the injection nozzle continuously in a direct pressure manner and directly supplies the abrasive for injection. The present invention relates to a pressure type continuous supply / injection method and apparatus.
[0003]
[Prior art]
When the blasting device is classified by the injection method, the abrasive is put in the abrasive recovery tank, the inside of the tank is pressurized with compressed air, the abrasive is pumped, and the pressure is injected from the nozzle, and the ejector by jetting compressed air The suction material is sucked into the nozzle structure by the suction force due to the effect, and is divided into a suction type in which the abrasive material is jetted together with compressed air from the tip.
[0004]
In FIG. 7 showing a conventional direct pressure blasting apparatus, in the abrasive recovery tank 40, the injected abrasive and dust are separated, the dust is sent to the dust collector 53, and the abrasive falls downward and the polishing is performed. It collects in the lower part of the material recovery tank 40. An abrasive pressure tank 42 is provided below the abrasive material recovery tank 40. When the abrasive material pressure tank 42 runs out of abrasive material, the dump valve 41 is lowered and the abrasive material in the abrasive material recovery tank 40 is pressurized. Enter tank 42. When the abrasive enters the abrasive pressure tank 42, the compressed air 47 for pressurizing the abrasive enters from the compressed air supply port 44 for pressurizing the abrasive. At the same time, the dump valve 41 is closed to increase the pressure in the abrasive pressure tank 42. The abrasive material is pushed out from the abrasive material supply port 43. At this time, the pressure of the abrasive pressurization compressed air 32 is adjusted by the abrasive supply amount adjusting valve 45, and the abrasive of the abrasive supply port 43 is sent to the abrasive hose 12, and the abrasive pressurization compressed air 32 It is carried to the nozzle body 11 and the abrasive is sprayed from the nozzle tip 14.
[0005]
Further, as shown in FIG. 8, for example, as shown in FIG. 8, a conventional direct pressure type abrasive supply device 70 is provided near the bottom of a direct pressure type recovery tank 71 that classifies dust from the abrasive and collects reusable abrasive. A feed pipe 73 that passes through the inside of the collection tank 71 from the side wall and penetrates the side wall 72 opposite to the side wall is provided in the lower part, and a small-diameter introduction hole 74 is provided in the upper part of the feed pipe 73. One end of the feed pipe 73 communicates with the spray nozzle via an unillustrated abrasive feed pipe, and the other end of the feed pipe 73 faces the outside of the side wall of the recovery tank 71 in FIG.
[0006]
As the abrasive in the collection tank 71 gradually drops from the introduction hole 74 provided in the feed pipe 73 into the feed pipe 73 at a substantially constant speed, the abrasive in the collection tank 71 is shown by a one-dot chain line in FIG. A mortar-shaped hole is formed as shown, and this mortar-shaped hole gradually expands. On the other hand, the abrasive that has fallen from the introduction hole 74 is piled up into the feed pipe 73 so as to form a cone, and the abrasive in the cone is sucked toward the injection nozzle by the air flow flowing in the feed pipe 73. The
[0007]
[Problems to be solved by the invention]
As described above, recent blasting is used for micro-cutting, and therefore, it is required to accurately control the injection amount. However, the conventional blasting machine has the following problems. there were.
[0008]
In the above-described conventional direct pressure type blasting apparatus, energy efficiency is high and intense blast injection can be obtained. However, the abrasive is once put in the pressurized tank in order to pressurize and discharge the abrasive in the pressurized tank. It was necessary and continuous injection was not possible.
[0009]
In addition, the supply amount of the abrasive material, and hence the injection amount, can only be adjusted by adjusting the inner diameter of the abrasive material supply port 43 and the abrasive material supply amount adjusting valve 45 to adjust the amount of the pressurized compressed air 32 of the abrasive material, The amount of abrasive sprayed tends to change depending on the amount of abrasive in the abrasive pressure tank 42, and the amount of abrasive supplied cannot be finely controlled.
[0010]
In the above-described abrasive material supply means, the amount of abrasive material that falls from the collection tank 71 including the recovery tank 71 and the mere abrasive material storage tank for storing the abrasive material to the feed pipe 73 is the size of the introduction hole 74, the polishing material It was greatly influenced by differences in the material, particle size, specific gravity and the like. Further, the amount and speed of the abrasive that falls from the recovery tank to the feed pipe 73 may differ depending on whether the amount of abrasive in the recovery tank 71 is large or small. When the abrasive is sprayed from the spray nozzle toward the workpiece, the non-reusable abrasive that collides with the workpiece and is damaged is classified by the recovery tank 71 and sent to the dust collector and discarded. Therefore, as the blasting process is performed, the amount of abrasive in the collection tank 71 decreases, so that the amount of abrasive dropped into the feed pipe 73 is not always constant.
[0011]
In addition, some abrasives show fine powder properties and others do not show fine powder properties. The fine powder property refers to a property showing a fine powder state such that the angle of repose θ of the abrasive accumulated at the bottom in the recovery tank is not constant. The factor that the abrasive exhibits fine powder properties varies depending on the material of the abrasive, the specific gravity, the particle size, the pressure in the recovery tank, and the like. Abrasives exhibiting fine powder properties can have a constant angle of repose θ when adhering to each other or adhering to the wall surface of the recovery tank 71 due to the mutual adhesive force specific to the fine powders by using the conventional abrasive supply device 70. Instead, as shown in FIG. 9, the abrasive in the recovery tank 71 is in a state where a hole is formed immediately above the introduction hole 74, or a cavity 75 is formed above the introduction hole 74 as shown in FIG. As a result, the abrasive may not fall.
[0012]
In the suction type blasting apparatus, it is possible to inject continuously, but the injection performance is inferior to that of the direct pressure type.
[0013]
As described above, the conventional abrasive supply / injection method and apparatus have a problem that it is difficult to always supply and inject a fixed amount of abrasive from the recovery tank to the injection nozzle.
[0014]
The present invention has been made to solve the problems on the way, and supplies a fixed amount of abrasive material stably and continuously from an abrasive material recovery tank or an abrasive material container communicating therewith to an injection nozzle. Providing an abrasive supply / injection method and apparatus for spraying, and can easily set a desired abrasive supply / injection amount according to the type of the abrasive, corresponding to fine processing and micro-cutting, and It is an object of the present invention to provide an abrasive supply / injection method and apparatus capable of automating a processing line.
[0015]
[Means for Solving the Problems]
In order to achieve the above-described object, the abrasive supply / injection method of the present invention comprises a plurality of abrasives having a predetermined capacity formed on an outer periphery or a side surface of an abrasive supply board by rotating the abrasive supply board horizontally or vertically. Abrasive material in the abrasive material recovery tank is loaded into or collected in the supply hole, and a part of the outer periphery or side surface of the abrasive material supply board in the formation part of the abrasive material supply hole on the rotation locus of the abrasive material supply hole a space for covering, and the abrasive supplying holes disposed inside by movement caused by the rotation of the abrasive supplying machine, the space communicating to the abrasive supplying pipe for extraordinary opened only to the abrasive supply hole formed Then, injection air is injected into this space, and the abrasive is supplied to the abrasive supply pipe communicating with the injection nozzle.
[0016]
The abrasive supply holes are a plurality of rows of abrasive supply holes formed on the outer periphery of the abrasive supply plate or a plurality of rows formed on the side surfaces. For example, the abrasive supply holes are concentric with the rotation center of the abrasive supply plate. It is assumed that a plurality of abrasive supply holes are formed in a plurality of rows, for example, in an annular shape that draws the same rotation locus (claims 2 and 12),
When the injection nozzle has a large injection nozzle inner diameter and air consumption increases, the abrasive is supplied to the abrasive supply pipe by the injection air, and pressurized air for pumping the abrasive is supplied to the abrasive supply pipe It is effective to do this (claims 2, 9, 10).
[0017]
The abrasive supply board is rotated in the abrasive recovery tank to collect the abrasive, for example, in an abrasive supply hole formed on the outer periphery of the abrasive supply board, and through the abrasive supply pipe It can also supply to an injection nozzle (Claims 3, 8, and 14).
[0018]
The abrasive injection amount is arbitrarily set by rotating the abrasive supply board at a set rotation speed or speed, or changing the number, density, volume, capacity, or area of the opening of the abrasive supply holes. The amount can be adjusted (claim 4).
[0019]
Furthermore, vibration is applied to the abrasive recovery tank (Claim 5), or the abrasive in the abrasive recovery tank is agitated so that the set amount of the abrasive falling on the abrasive supply board is more reliably constant. (Claim 6). In the abrasive material supply / injection apparatus of the present invention, the abrasive material supply disk 20 having a loading port 27 provided at the lower part of the abrasive material recovery tank 26 and having a plurality of abrasive material supply holes 24 facing the loading port. It is a space that is rotatably provided by a rotation driving means and covers a part of the outer periphery or side surface of the abrasive material supply board 20 in the formation part of the abrasive material supply hole 24 on the rotation locus of the abrasive material supply hole 24. The abrasive material supply hole disposed inside by the movement of the abrasive material supply plate as it rotates, and an abrasive material supply pipe that opens to face the abrasive material supply hole 24 and communicates with the injection nozzle in the space. A communicating space 35 is disposed, and an injection air conduit 28 for supplying the abrasive material is provided in the space 35, and the conduit 28 communicates with an injection air supply source (claim 7).
[0020]
As a result of experiments, it has been found that the depth of the abrasive supply hole is preferably within 8 times the inner diameter.
[0021]
Also, facing the rotation trajectory of the abrasive supply holes formed in a plurality of rows, each can be provided with an abrasive supply pipe, and can be provided to communicate with a plurality of injection nozzles via the abrasive supply pipe. Can be improved.
[0022]
Further, the abrasive supply / injection apparatus of the present invention rotationally drives the abrasive supply board 20 having the abrasive supply holes 24 on the outer periphery thereof within the abrasive recovery tank or the abrasive accommodating portion (26) communicating therewith. And at least a part of the abrasive material supply hole 24 of the abrasive material supply board 20 is buried in the abrasive material 34 in the abrasive material accommodating portion (26) and the abrasive material supply hole. 24 is a space covering the outer periphery or part of the side surface of the abrasive material supply board 20 in the portion where the abrasive material supply hole 24 is formed, and is moved by the movement of the abrasive material supply board 20 due to the movement. and it placed the abrasive supply hole, a space 35 which communicates with the abrasive supplying pipe communicating with the injection nozzle with opening faces to the abrasive material supply holes in the space disposed, communicating with the space 35 injection Air conduit 28 Provided with, characterized in that communicating the conduit into the injection air source (claim 8).
[0023]
The abrasive material supply hole 24 can be formed from a number of concave marks having a planar rectangular shape or a circular shape or a concave groove formed so as to extend in the outer peripheral width direction of the abrasive material supply board.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of an abrasive material supply / injection method and apparatus according to the present invention will be described below with reference to the drawings.
[0025]
The blast processing apparatus 50 in which the abrasive material supply / injection apparatus of the present invention is installed includes an injection nozzle 11 for injecting the abrasive material to the workpiece, and is injected from the cabinet 51 and the injection nozzle 11 for injecting the workpiece. Dust is separated from the collected abrasives, and reusable abrasives are collected and communicated with the abrasive collection tank 26 for storage through a pipe. Such a blasting apparatus is connected to a blower, an exhaust fan, a compressor, etc. An airflow generating means is communicated to generate an airflow from the cabinet 51 to the abrasive recovery tank 26, and the abrasive or dust is placed on the airflow and transferred. The abrasive recovery tank 26 itself may be a so-called cyclone, or may be a tank that communicates with the lower part of the cyclone 13 and simply stores the abrasive of the cyclone 13.
[0026]
In this specification, an abrasive container that functions as a tank that supplies an abrasive to an injection nozzle in various abrasive injection methods via an abrasive supply pipe is collectively referred to as an “abrasive recovery tank”.
[0027]
1 to 3, the abrasive recovery tank 26 communicating with the lower part of the cyclone 13 is provided with a loading port 27 communicating with the abrasive supply hole 24 at the lower part, and the abrasive stored in the abrasive recovery tank 26. 34 falls and flows into the abrasive material supply hole 24, and is filled or loaded.
[0028]
Preferably, a vibration generating means such as a vibrator (not shown) or a stirring means for the abrasive in the tank by compressed air is connected to the abrasive recovery tank 26 to ensure that the abrasive 34 flows into the abrasive supply hole 24. That is, by preventing the bridge of the abrasive 34 in the abrasive recovery tank 26 by the vibration generating means and the agitating means, the amount of abrasive supplied to the abrasive supply hole 24 becomes a constant amount.
[0029]
The abrasive material supply board 20 having the abrasive material supply holes 24 preferably rotates horizontally at a constant speed by the rotational force of a rotational drive means such as a motor 21 and is preferably a flat plate disk made of, for example, synthetic resin. The abrasive supply hole 24 is provided close to the lower portion of the loading port 27 so as to communicate with each other. The thickness of the abrasive material supply board 20 can be arbitrarily set according to the amount of supply and injection of the abrasive material. If the abrasive material supply plate 20 is formed thick, the volume of the abrasive material supply hole 24 can be increased, and many abrasive materials 34 can be formed. Can be supplied efficiently.
[0030]
The abrasive supply hole 24 is formed in the thickness direction of the abrasive supply board 20, and the shape of the abrasive supply hole 24 is such that the loaded or collected abrasive can hold the abrasive supply hole 24. There is a need. That is, the abrasive loaded or collected in the abrasive supply hole 24 is the lower end of the end of the abrasive supply tube 30 or the metal receiving / receiving port 22 of the transmission / reception tube 29 branched from the abrasive supply tube 30. In the space 35 communicating with the abrasive material supply hole and the abrasive material supply pipe facing the abrasive material supply hole, the abrasive material is formed as the injection air 31. Any shape can be used as long as it can be injected and blown up. For example, if the spindle-shaped abrasive supply hole 24 has a (maximum) inner diameter of 3 mm and a depth of about 15 mm, even a fine powder abrasive can be polished. The material does not fall and is blasted into the space 35 in the transmission / reception tube 29 from the abrasive supply hole 24 by the turbulent flow generated in the space by the injection air 31 and is ejected from the space 35.
[0031]
The abrasive supply hole 24 preferably has a depth of 8 times or less with respect to the inner diameter. When the depth is outside the above range, the abrasive may remain.
[0032]
Further, the abrasive supply hole 24 is a plurality of first implementations shown in FIGS. 1 to 3, in which a plurality of insertion holes draw the same rotation locus arranged concentrically with respect to the rotation center of the abrasive supply board 20. In the example, it can be formed into three rings, or can be formed into one or more multiple rows. At this time, if the plurality of annular abrasive material supply hole 24 rows are provided at positions that do not overlap with each other in the diameter direction of the abrasive material supply board 20 in each of the inner circumferential side and outer circumferential side rows, the plurality of abrasive materials are provided. The supply hole 24 is always transferred to the edge of the abrasive supply pipe 30 or the lower part of the transmission / reception port 22 of the transmission / reception pipe 29 branched from the abrasive supply pipe 30 during the rotation of the abrasive supply board 20. One end defined in the above is closed, and the other end is located in a plurality of spaces 35 communicating with the abrasive supply hole 24 and the abrasive supply pipe 29 facing the abrasive supply hole. The supply of the abrasive 34 is not interrupted.
[0033]
The abrasive material supply pipe 30 communicating with the injection nozzle 11 is branched into a transmission / reception tube 29, and the transmission / reception port 22 formed at the end of the transmission / reception tube 29 is a rotation locus of the plurality of rows of the abrasive material supply holes 24. In the embodiment, the plurality of abrasive supply holes 24 are formed so as to face all the rotation trajectories.
[0034]
As shown in FIGS. 2 and 4A, the space 35 has a double structure on the outer wall of the transmission / reception tube 29 and is defined in the inner space of the transmission / reception tube 29 and the outer wall of the double structure.
[0035]
Therefore, the abrasive supply hole 24 communicates with an unillustrated injection air supply source through the transmission / reception port 22, the transmission / reception pipe 29 forming the space (35), the double-structure outer wall inner space 35 of the transmission / reception pipe 29, and the conduit 28. is doing.
[0036]
FIG. 4 (B) shows a passage of injection air that forms a space 35 from the conduit 28 in the center of the transmission / reception pipe 29, protrudes on the abrasive supply pipe 30 and communicates with the injection air supply source, The structure is such that the tip of the conduit 28 directly faces the abrasive supply hole 24 and does not have the space 35 in FIG.
[0037]
Further, a transmission / reception port 22 formed at an end portion of a conduit 28 communicating with an injection air supply source is provided in the transmission / reception tube 29 so that the abrasive supply plate 20 is as close as possible or slidable.
[0038]
The abrasive material loaded or collected in the abrasive material supply hole 24 is transferred to the lower part of the transmission / reception port 22 by the rotation of the abrasive material supply plate 20, and includes the transmission / reception tube 29 by the injection air 31 from the conduit 28. In the space 35, the abrasive is blown up and sent to the abrasive supply pipe 30.
[0039]
The abrasive sent to the transmission / reception tube 29 is injected from the injection nozzle 11 through the abrasive supply pipe 30 by the injection air 31, but when the fine powder abrasive and the amount of air consumption are not enough, the above-mentioned injection air alone is the abrasive. However, depending on the material, specific gravity, or particle size of the abrasive, the injection of the abrasive from the abrasive supply hole 24 may be sufficient, but separately from the injection air 31. Pressurized air from a pressurized air supply source (not shown) is connected to the abrasive supply pipe 30 and the abrasive is sprayed onto the workpiece by the compressed air 32, here, compressed air, to obtain a desired value. It is possible to inject at a pressure of.
[0040]
Under the same conditions, a slight residue of the abrasive was observed when the depth of the abrasive supply hole was 25 mm.
[0041]
Further, when the abrasive supply holes 24 are formed in a plurality of rows, a plurality of transmission / reception ports 22 are provided so as to face the rotation trajectory of each of the abrasive supply holes 24, and each of the plurality of transmission / reception ports 22 is provided. When the communication injection nozzle 11 is provided, the abrasive can be stably injected from the plurality of injection nozzles 11 onto the workpiece.
[0042]
In this embodiment, as shown in FIGS. 1 to 3, 20 is an abrasive supply board, and is concentric with the center of rotation of the abrasive supply board in the thickness direction of the abrasive supply board 20. In the locus, abrasive supply holes 24 that are circular holes continuous in the rotation direction are formed in three rows in parallel.
[0043]
As an example, the inner diameter of the supply hole 24 is 3 mm and the depth is 15 mm. At a depth of 25 mm, some abrasive residue was observed.
[0044]
The abrasive material supply board 20 is connected to the rotational drive means of the motor 21. The rotational speed of the rotational drive means is configured such that the rotational speed can be adjusted by known means.
[0045]
In addition, by adjusting the rotational speed of the abrasive material supply board 20, the number of rotations can be increased and decreased, and the amount of abrasive material supplied to the injection nozzle 11 can be adjusted. For example, a large amount of abrasive is supplied by increasing the rotational speed of the abrasive material supply board 20, and a small amount of abrasive is supplied by reducing the rotational speed of the abrasive material supply board 20. In addition, by maintaining the rotational speed of the abrasive material supply board 20 constant, a constant amount of abrasive material is supplied to the injection nozzle 11 in a constantly stable state, and a fixed amount of abrasive material is continuously and stably supplied from the injection nozzle 11. To the workpiece. Therefore, when the volume of the other abrasive material supply holes 24 or the opening area of the transmission / reception port 22 is constant, the rotational speed of the abrasive material supply board 20 and the abrasive material supply amount are correlated, and this relational expression is obtained. By digitizing the abrasive supply amount at the rotational speed of the abrasive supply board 20, the desired abrasive supply amount can be easily adjusted.
[0046]
When the abrasive supply board 20 is rotated at a constant speed by the rotation driving means, the abrasive loaded in the abrasive supply hole 24 is transferred to the lower part of the transmission / reception port 22. When the solenoid valve (not shown) is opened by the operation of the foot switch or the micro switch and the injection air 31 is sent from the injection air supply source through the conduit 28, the abrasive in the abrasive supply hole 24 is transferred to the transmission / reception port 22 and the transmission / reception. It is injected into the abrasive supply pipe 30 through the pipe 29 and blown up. At the same time, the abrasive supply pipe 30 communicates with a pressurized air supply source (not shown), and the abrasive sent through the transmission / reception pipe 29 is supplied to the injection nozzle 11 at high pressure together with the pressurized air 32. The
[0047]
Further, a vibrator or agitation means is connected to the abrasive recovery tank 26, and the abrasive 34 is loaded by applying vibration to the abrasive recovery tank 26 or agitating the abrasive 34 in the abrasive recovery tank 26. The amount of abrasive material that is sufficiently loaded into the abrasive material supply hole 24 from the opening 27 and flows into the abrasive material supply hole 24 is always fixed, and a certain amount of abrasive material is supplied in a more stable state.
[0048]
When the abrasive is sprayed from the injection nozzle 11 to the workpiece in the cabinet 51 and the workpiece is blasted, the abrasive becomes a reusable abrasive and a damaged non-reusable abrasive. Both the dust and the like produced by the separation of the abrasive and the workpiece are fed to the cyclone 13 along the air flow through the conduit 52. The cyclone 13 separates the non-reusable abrasive and dust from the reusable abrasive, and the non-reusable abrasive and dust are fed to the dust collector 53 and accumulated in the lower part of the dust collector 53. Then, clean air is discharged from the exhaust fan 54 of the dust collector 53 to the outside air. On the other hand, after the reusable abrasive is stored in the bottom of the abrasive recovery tank 26, the above-described operation is repeated.
[0049]
Blasting was performed under the following processing conditions using the above-described abrasive supply / injection method and apparatus.
[0050]
Example 1
[0051]
[Table 1]

[0052]
In the processing according to the above embodiment, there was no abrasive remaining in the abrasive supply hole 24, and when the glass substrate was finely processed, the uniformity per 30 cm ² (difference between the strong and weak portions) was 2%. We were able to process within.
[0053]
Example 2 (FIGS. 2 and 3)
[0054]
[Table 2]

[0055]
Next, the embodiment of FIGS. 4 to 6 will be described with respect to differences from the above-described embodiment.
[0056]
In FIG. 4A, reference numeral 26 denotes an abrasive recovery tank, which is preferably a sealed tank having a substantially rectangular parallelepiped shape, and an abrasive layer 17 made of abrasive that has flowed into the lower part of the abrasive recovery tank 26 is formed below. Then, an air layer 18 is formed above the abrasive layer 17.
[0057]
In this embodiment, as shown in FIGS. 4 (A) and 6, a series of U-shaped cross-sections that are continuous with the circumferential surface of the abrasive supply board 20 in the circumferential direction. A plurality of abrasive supply holes 24 are formed in parallel to the circumferential surface width direction. The abrasive material supply board 20 is supported by a rotary shaft 25 so as to be rotatable in the vertical direction in the abrasive material layer 17 in the abrasive material recovery tank 26, and an upper part or a part of the upper part of the abrasive material supply board 20 is exposed to the air layer 18. Provided in position.
[0058]
FIG. 4B is a structure in which the tip of the conduit 28 directly faces the abrasive supply hole 24 as described above, and does not have the space 35 in FIG.
[0059]
In FIG. 5, a plurality of abrasive supply holes 24 each including a series of cylindrical recesses continuous in the circumferential direction are formed on the outer peripheral surface of the abrasive supply board 20 in the circumferential surface width direction. At this time, the plurality of annular abrasive supply holes 24 are provided at positions that do not overlap each other in the width direction of the outer periphery of the abrasive supply board 20.
[0060]
Therefore, almost the entire lower half of the circumference of the abrasive supply board 20 is surely immersed in the abrasive layer 17, and a part of the upper half of the circumference of the abrasive supply board 20 is exposed to the air layer 18. is doing. When the abrasive supply board 20 rotates, a part of the upper half of the circumference of the abrasive supply board 20 is submerged in the abrasive layer 17, so that the abrasive easily enters the abrasive supply hole 24, The abrasive of the abrasive layer 17 is reliably transferred to the air layer 18.
[0061]
The rotary shaft 25 is supported by a bearing outside the abrasive material recovery tank 26, and a pulley (not shown) is provided at the shaft end of the rotary shaft 25, and the rotational force is transmitted to a rotary drive means such as the motor 21 to the pulley. Connect via V-belt. The rotational speed of the rotational drive means is configured to be easily adjustable by known means.
[0062]
When the abrasive material supply board 20 is rotated in the clockwise direction on the paper surface of FIGS. 4A and 4B by the rotational drive means at a constant speed, it enters the abrasive material supply hole 24 on the circumferential surface of the abrasive material supply board 20. The abrasive material of the abrasive material layer 17 collected in step 1 is transferred to the air layer 18. Since the abrasive supply board 20 is rotated at a constant speed and the amount of abrasive collected on the circumferential surface of the abrasive supply board 20 is fixed, the amount of abrasive supplied to the injection nozzle 11 is fixed. become.
[0063]
Example 3 (FIGS. 4A and 6)
[0064]
[Table 3]

[0065]
In Example 2 and Example 3 described above, the amount of injection was approximately 6.5 times that of Example 3 with the same rotation speed of the abrasive material supply disk.
[0066]
【The invention's effect】
The present invention. Since it is configured as described above, the following effects can be obtained.
[0067]
According to the present invention, a fixed amount of abrasive material can be stably and continuously supplied and injected to the injection nozzle even with respect to the abrasive material exhibiting fine powder properties.
[0068]
The present invention can increase or decrease the amount of abrasive supplied by changing the rotational speed of the abrasive supply board and increasing or decreasing the number of revolutions. Also, the abrasive is continuously supplied according to the rotational speed of the abrasive supply board. In a stable and stable state. Therefore, by freely adjusting the rotational speed of the abrasive supply board, it is possible to reliably and easily adjust the desired abrasive supply amount according to the type of the abrasive. In addition, by digitizing the rotational speed of the abrasive material supply board corresponding to the abrasive material supply amount, the desired abrasive material supply amount, and hence the injection amount, can be easily adjusted.
[0069]
Alternatively, the number, density, volume, capacity, opening area, or opening area of the transmitting / receiving port of the abrasive supply holes can be changed, and an arbitrarily set amount of abrasive can be supplied and injected.
[0070]
In the present invention, the abrasive material loaded or collected in the abrasive material supply hole of the abrasive material supply board is injected into the abrasive material supply pipe with the injection air, blown up, and further, the abrasive material is injected into the injection nozzle with the pressurized air. If supplied and injected, the supply amount of injection air is smaller than the supply amount of pressurized air. Therefore, it can be injected at a desired amount of injection density and pressure, and even blasting can be performed on the workpiece. It became.
[Brief description of the drawings]
FIG. 1 is a front view of a blasting apparatus equipped with an abrasive material supply / injection device of the present invention.
FIG. 2 is a front view showing a cross section of a main part of the abrasive material supply / injection device of the present invention.
FIG. 3 is a perspective view showing a main part of the abrasive material supply / injection device of the present invention.
FIG. 4A is a cross-sectional view of a main part in another embodiment of the abrasive material supply / injection apparatus of the present invention.
(B) It is principal part sectional drawing in further another embodiment of the abrasives supply / injection apparatus of this invention.
FIG. 5 is a main part perspective view showing a cross section of the main part in still another embodiment of the abrasive material supply / injection apparatus of the present invention.
FIG. 6 is a main part perspective view showing a cross section of the main part in still another embodiment of the abrasive material supply / injection apparatus of the present invention.
FIG. 7 is a front view showing a conventional direct pressure blasting apparatus.
FIG. 8 is a cross-sectional view of a main part of a conventional abrasive supply device, and particularly shows the state of the abrasive when an abrasive that does not exhibit fine powder properties falls into a feed pipe.
FIG. 9 shows a cross-section of a main part of a conventional abrasive supply device, and particularly shows the state of the abrasive when an abrasive exhibiting fine powder properties falls into a feed pipe.
FIG. 10 shows a cross section of a main part of a conventional abrasive supply device, and particularly shows the state of the abrasive when an abrasive exhibiting fine powder properties falls into a pipe.
[Explanation of symbols]
11 Injection nozzle (nozzle body)
12 Abrasive material hose 13 Cyclone 14 Nozzle tip 17 Abrasive material layer 18 Air layer 20 Abrasive material supply board 21 Rotating motor 22 Transmission / reception port 24 Abrasive material supply hole 25 Rotating shaft 26 Abrasive material recovery tank 27 Loading port 28 Conduit 29 Transmission / reception tube 30 Polishing Material supply pipe 31 Injection (compressed) air 32 Pressurized (compressed) air 34 Abrasive material 35 Space 40 Abrasive material recovery tank 41 Dump valve 42 Abrasive material pressure tank 43 Abrasive material supply port 44 Compressed air supply port 45 for abrasive material pressurization Abrasive supply amount adjustment valve 47 Compressed air 50 for pressing abrasive material Blast processing device 51 Cabinet 52 Conduit 53 Dust collector 54 Ventilator 60 Rotating shaft 61 Collecting hole 62 Collecting rotating plate 63 Sending / receiving port 64 Sending / receiving tube 65 Air layer 70 Polishing Material supply device 71 Recovery tank 73 Feed pipe 74 Introduction hole 75 Cavity 76 Abrasive material

Claims

研磨材供給盤を回転させ、この研磨材供給盤の外周もしくは側面の複数の研磨材供給孔で研磨材回収タンク内の研磨材を装填ないし捕集し、前記研磨材供給孔の回転軌跡上に、前記研磨材供給孔の形成部分における前記研磨材供給盤の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤の回転に伴う移動により内部に配置された前記研磨材供給孔と、該研磨材供給孔に臨み開口する研磨材供給管に連通する空間を形成し、この空間に射出空気を注入し、前記研磨材を噴射ノズルへ連通する前記研磨材供給管に供給することを特徴とする直圧式連続研磨材供給・噴射方法。Rotate the abrasive material supply board, and load or collect the abrasive material in the abrasive material recovery tank with a plurality of abrasive material supply holes on the outer periphery or side surface of the abrasive material supply board, and on the rotational locus of the abrasive material supply hole The abrasive material supply hole is a space that covers a part of the outer periphery or side surface of the abrasive material supply board in the formation part of the abrasive material supply hole, and is disposed inside by the movement accompanying the rotation of the abrasive material supply board If, it forms a space which communicates with the abrasive supplying pipe for extraordinary opened only to the abrasive supply hole injecting injection air in this space is supplied to the abrasive supplying pipe communicating said abrasive to the injection nozzle A direct pressure continuous abrasive supply / injection method characterized by the above.

前記研磨材供給盤の外周もしくは側面に形成した複数列を成す複数の研磨材供給孔から、前記研磨材を射出空気により研磨材供給管に供給すると共に、前記研磨材を圧送する加圧空気を前記研磨材供給管に供給することを特徴とする請求項１記載の直圧式連続研磨材供給・噴射方法。The abrasive material is supplied to the abrasive material supply pipe by injection air from a plurality of abrasive material supply holes formed in a plurality of rows formed on the outer periphery or side surface of the abrasive material supply board, and pressurized air for pumping the abrasive material is supplied. The direct pressure type continuous abrasive supply / injection method according to claim 1, wherein the supply is performed to the abrasive supply pipe.

前記研磨材供給盤を、前記研磨材回収タンク内で回転させて前記研磨材を捕集し、前記研磨材供給管を介して噴射ノズルへ供給することを特徴とする請求項１又は２記載の直圧式連続研磨材供給・噴射方法。The said abrasive supply board is rotated in the said abrasive recovery tank, the said abrasive is collected, and it supplies to an injection nozzle through the said abrasive supply pipe | tube. Direct pressure type continuous abrasive supply and injection method.

前記研磨材供給盤を設定回転数又は速度において回転し、あるいは、前記研磨材供給孔の数、密度、体積、容量、又は開口部の面積を変更し、任意設定量の研磨材を供給し噴射する請求項１、２又は３記載の直圧式連続研磨材供給・噴射方法。Rotate the abrasive supply board at a set rotation speed or speed, or change the number, density, volume, capacity, or area of the opening of the abrasive supply holes, and supply and spray an arbitrarily set amount of abrasive The direct pressure type continuous abrasive supply / injection method according to claim 1, 2 or 3.

前記研磨材回収タンクに振動を加える請求項１、２、３又は４記載の直圧式連続研磨材供給・噴射方法。The direct pressure type continuous abrasive supply / injection method according to claim 1, wherein vibration is applied to the abrasive recovery tank.

前記研磨材回収タンク内の研磨材を攪拌する請求項１、２、３、４又は５記載の直圧式連続研磨材供給・噴射方法。6. The direct pressure continuous abrasive supply / injection method according to claim 1, wherein the abrasive in the abrasive recovery tank is agitated.

研磨材回収タンク下部に装填口を設け、該装填口に臨み複数の研磨材供給孔を形成した研磨材供給盤を回転駆動手段で回転自在に設けると共に、前記研磨材供給孔の回転軌跡上に、前記研磨材供給孔の形成部分における前記研磨材供給盤の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤の回転に伴う移動により内部に配置された前記研磨材供給孔と、該空間内で該研磨材供給孔に臨み開口すると共に噴射ノズルへ連通する研磨材供給管に連通する空間を配置し、この空間に連通する射出空気の導管を設けると共に、該導管を射出空気供給源に連通したことを特徴とする直圧式連続研磨材供給・噴射装置。A loading port is provided at the lower part of the polishing material recovery tank, and a polishing material supply panel having a plurality of polishing material supply holes facing the loading port is rotatably provided by a rotation driving means, and on the rotation locus of the polishing material supply hole. The abrasive material supply hole is a space that covers a part of the outer periphery or side surface of the abrasive material supply board in the formation part of the abrasive material supply hole, and is disposed inside by the movement accompanying the rotation of the abrasive material supply board And a space communicating with the abrasive material supply pipe that opens to the abrasive material supply hole and communicates with the injection nozzle in the space, and is provided with a conduit for the injection air that communicates with the space, and the conduit is injected. A direct pressure continuous abrasive supply / injection device characterized in that it communicates with an air supply source.

研磨材回収タンク内に、外周に研磨材供給孔を有する研磨材供給盤を回転駆動手段で回転自在に設け、且つ、前記研磨材供給盤の前記研磨材供給孔の少なくとも一部を研磨材回収タンク内の研磨材内へ埋没させると共に、前記研磨材供給孔の回転軌跡上に、前記研磨材供給孔の形成部分における前記研磨材供給盤の外周もしくは側面の一部を覆う空間であって、前記研磨材供給盤の回転に伴う移動により内部に配置された前記研磨材供給孔と、該空間内で該研磨材供給孔に臨み開口すると共に噴射ノズルへ連通する研磨材供給管に連通する空間を配置し、この空間に連通する射出空気の導管を設けると共に、該導管を射出空気供給源に連通したことを特徴とする直圧式連続研磨材供給・噴射装置。In the abrasive recovery tank, an abrasive supply board having an abrasive supply hole on its outer periphery is rotatably provided by a rotation driving means, and at least a part of the abrasive supply hole of the abrasive supply board is recovered. A space that is buried in the abrasive in the tank and covers a part of the outer periphery or side surface of the abrasive supply board in the formation part of the abrasive supply hole on the rotation locus of the abrasive supply hole, The abrasive material supply hole disposed inside by the movement of the abrasive material supply board as it rotates, and a space communicating with the abrasive material supply pipe that opens to face the abrasive material supply hole and communicates with the spray nozzle in the space. A direct pressure type continuous abrasive supply / injection apparatus characterized in that a conduit for injection air communicating with the space is provided and the conduit is connected to an injection air supply source.

前記研磨材供給管に加圧空気供給源を連通することを特徴とする請求項７又は８記載の研磨材供給・噴射装置。The abrasive supply / injection device according to claim 7 or 8, wherein a pressurized air supply source is communicated with the abrasive supply pipe.

前記研磨材供給盤の少なくとも一側面に該研磨材供給盤の回転中心に対して同心円状に複数列を成す複数の研磨材供給孔を形成したことを特徴とする請求項７記載の直圧式連続研磨材供給・噴射装置。8. The direct pressure type continuous as claimed in claim 7, wherein a plurality of abrasive supply holes are formed in at least one side surface of the abrasive supply plate in a plurality of rows concentrically with respect to the rotation center of the abrasive supply plate. Abrasive supply and injection equipment.

前記研磨材供給孔は、内径に対して深さが８倍以内であることを特徴とする請求項７、８、９又は１０記載の直圧式連続研磨材供給・噴射装置。The direct pressure type continuous abrasive material supply / injection device according to claim 7, 8, 9, or 10, wherein the abrasive material supply hole has a depth within 8 times the inner diameter.

前記研磨材供給孔は、複数の研磨材供給孔をそれぞれ同一の回転軌跡を描く環状に１又は複数列条形成したことを特徴とする請求項７、８、９又は１０記載の直圧式連続研磨材供給・噴射装置。11. The direct pressure type continuous polishing according to claim 7, wherein the abrasive supply holes are formed in one or a plurality of rows in an annular shape in which a plurality of abrasive supply holes are respectively drawn in the same rotation locus. Material supply and injection equipment.

複数列条形成した研磨材供給孔の回転軌跡に臨み、それぞれ、研磨材供給管を設け、該研磨材供給管を介して複数の噴射ノズルに連通するよう設けたことを特徴とする請求項７、９又は１０記載の直圧式連続研磨材供給・噴射装置。The abrasive supply holes that face the rotation trajectory of the abrasive supply holes formed in a plurality of rows, respectively, are provided with an abrasive supply pipe, and communicated with the plurality of injection nozzles through the abrasive supply pipe. , 9 or 10 direct pressure type continuous abrasive supply and injection device.

前記研磨材供給孔は、それぞれ複数列、平面矩形又は円形を成す多数の凹痕又は前記研磨材供給盤外周幅方向に至り形成された凹溝から成る請求項８、１１又は１２記載の直圧式連続研磨材供給・噴射装置。The abrasive test Kyuana each plurality of rows, a rectangular planar or multiple indentation marks or the abrasive leading to the supply board periphery widthwise consisting formed groove claims 8, 11 or 12 straight according a circular Pressure continuous abrasive supply and injection equipment.