JP4170886B2 - Coin stack carrier - Google Patents

Coin stack carrier Download PDF

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JP4170886B2
JP4170886B2 JP2003392041A JP2003392041A JP4170886B2 JP 4170886 B2 JP4170886 B2 JP 4170886B2 JP 2003392041 A JP2003392041 A JP 2003392041A JP 2003392041 A JP2003392041 A JP 2003392041A JP 4170886 B2 JP4170886 B2 JP 4170886B2
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wafer
carry
stack carrier
coin stack
pair
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JP2005158854A (en
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徹 高澤
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Disco Corp
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Description

本発明は、コインスタックキャリアー、さらに詳しくは半導体ウエーハのようなウエーハを、出し入れを自在に積層状態で収容するコインスタックキャリアーに関する。   The present invention relates to a coin stack carrier, and more particularly, to a coin stack carrier that accommodates a wafer such as a semiconductor wafer in a stacked state so that it can be inserted and removed freely.

ＩＣ、ＬＳＩ等の半導体チップが表面に複数形成された半導体ウエーハは、研削装置によって裏面が研削され所定の厚さに形成される。   A semiconductor wafer in which a plurality of semiconductor chips such as IC and LSI are formed on the front surface is ground to a predetermined thickness by grinding the back surface by a grinding device.

研削装置は、複数のウエーハを収容したカセットが載置されるカセット載置部と、カセット載置部に載置されたカセットに進入しウエーハを搬出入するウエーハ搬出入手段と、ウエーハ搬出入手段が搬出したウエーハの中心位置を調整する位置調整手段と、位置調整手段によって調整されたウエーハを搬送する搬入手段と、搬入手段によって搬入されたウエーハを保持するチャックテーブルと、チャックテーブルに保持されたウエーハを研削する研削手段と、研削手段によって研削されたウエーハをチャックテーブルから搬出する搬出手段と、搬出手段によって搬出されたウエーハを洗浄する洗浄手段と、洗浄手段によって洗浄されたウエーハを搬送する前記ウエーハ搬出入手段と、洗浄済みのウエーハを収容するカセットとを備え、半導体ウエーハの裏面が自動的に効率よく研削される（例えば、特許文献１参照）。   The grinding apparatus includes: a cassette mounting unit on which a cassette containing a plurality of wafers is mounted; a wafer loading / unloading unit that enters the cassette mounted on the cassette mounting unit and loads / unloads the wafer; and a wafer loading / unloading unit The position adjusting means for adjusting the center position of the unloaded wafer, the loading means for conveying the wafer adjusted by the position adjusting means, the chuck table for holding the wafer loaded by the loading means, and the chuck table Grinding means for grinding the wafer, unloading means for unloading the wafer ground by the grinding means from the chuck table, cleaning means for cleaning the wafer unloaded by the unloading means, and transporting the wafer cleaned by the cleaning means A wafer carrying means for loading and unloading and a cassette for storing a cleaned wafer. The back surface of Eha are automatically efficiently grinding (e.g., see Patent Document 1).

しかしながら、半導体ウエーハの裏面が研削されて、半導体ウエーハの厚みが１００μｍ以下５０μｍ以下と薄くなると、半導体ウエーハを両側に支持溝が形成された通常のカセットに収容するとウエーハに撓みが生じ、カセット内に収容できないという問題がある。   However, when the back surface of the semiconductor wafer is ground and the thickness of the semiconductor wafer is reduced to 100 μm or less and 50 μm or less, if the semiconductor wafer is accommodated in a normal cassette having support grooves formed on both sides, the wafer is bent and the wafer is bent. There is a problem that it cannot be accommodated.

そこで、コインスタックキャリアーと称する特殊なケースに半導体ウエーハを収容する技術が開発され実用に供されている。   Therefore, a technique for housing a semiconductor wafer in a special case called a coin stack carrier has been developed and put into practical use.

このコインスタックキャリアーは、あたかもコインを収容するかのように半導体ウエーハと仕切り用の紙ウエーハとを交互に積層させて収容するケースであり、半導体ウエーハがいかに薄く加工されても安全に収容し搬送することが可能になる。   This coin-stack carrier is a case where semiconductor wafers and partition paper wafers are alternately stacked and stored as if to store coins, and it can be safely stored and transported no matter how thin the semiconductor wafer is processed. It becomes possible to do.

特開２００３−５９８７２号公報JP 2003-59872 A

ところが、コインスタックキャリアーは、ウエーハを出し入れする搬出入開口部を有する筒体と、ウエーハをクッション材を介して支持する底部トから構成されており、ウエーハは紙ウエーハと交互に収容されるが、例えばウエーハの半導体チップの形成された回路面が底部を向いて収容されていた場合に、ウエーハの回路面を搬出入開口部に向けたい場合には、全てのウエーハをコインスタックキャリアーから搬出し、ウエーハの表裏を反転させコインスタックキャリアーに再度収容しなければならず、作業が煩雑であるとともにウエーハを損傷させるおそれもある。加えて、ウエーハの搬出入が充分に容易でない、ウエーハの有無を外部から確認することができない、という問題も存在する。 However, the coin stack carrier is composed of a cylindrical body having a loading / unloading opening for loading and unloading the wafer and a bottom portion for supporting the wafer via a cushioning material, and the wafer is alternately accommodated with the paper wafer. For example, when the circuit surface on which the semiconductor chip of the wafer is formed is accommodated facing toward the bottom, when the wafer circuit surface is directed toward the loading / unloading opening, all the wafers are unloaded from the coin stack carrier, The front and back of the wafer must be reversed and accommodated again in the coin stack carrier, which is cumbersome and may damage the wafer. In addition, there are problems that it is not easy to carry the wafer in and out, and that the presence or absence of the wafer cannot be confirmed from the outside.

本発明は上記事実に鑑みてなされたもので、その第一の技術的課題は、コインスタックキャリアー内に積層状態で収容されているウエーハの表裏を、ウエーハをコインスタックキャリアーから取り出して反転させ再度収容することなしに、容易に反転することができることに加えて、ウエーハを整列された状態で保持できるにも拘らずウエーハ出し入れを充分容易に行うことができるコインスタックキャリアーを提供することである。
本発明の第二の技術的課題は、コインスタックキャリアー内に積層状態で収容されているウエーハの表裏を、ウエーハをコインスタックキャリアーから取り出して反転させ再度収容することなしに、容易に反転することができることに加えて、ウエーハを充分容易に出し入れすることができ、そしてまたウエーハの有無を外部から確認することができる、コインスタックキャリアーを提供することである。 The present invention has been made in view of the above-mentioned facts, and the first technical problem thereof is that the front and back of the wafer housed in a stacked state in the coin stack carrier are taken out of the coin stack carrier and turned over again. To provide a coin stack carrier that can be easily reversed without being accommodated, and can be easily put in and out of a wafer even though the wafer can be held in an aligned state. .
The second technical problem of the present invention is to easily reverse the front and back of the wafer accommodated in a stacked state in the coin stack carrier without taking out the wafer from the coin stack carrier and reversing and accommodating it again. In addition to being able to do this, it is an object of the present invention to provide a coin stack carrier in which a wafer can be taken in and out easily and the presence or absence of a wafer can be confirmed from the outside.

本発明の第一の局面によれば、上記第一の技術的課題を達成するコインスタックキャリアーとして、ウエーハの外周を支持し複数のウエーハを積層状態で収容する筒体と、この筒体の両端部に形成された一対の搬出入開口部と、搬出入開口部の各々に着脱自在に取り付けられ収容されたウエーハの面を直接又はクッション材を介して支持する一対の底部とから構成され、 該筒体は、収容したウエーハの直径方向の移動を規制する規制部と、この規制部から両端の該搬出入開口部それぞれに向けて漸次広がる漏斗状部とを備えている、ことを特徴とするコインスタックキャリアーが提供される。 According to the first aspect of the present invention, as a coin stack carrier that achieves the first technical problem, a cylindrical body that supports the outer periphery of a wafer and accommodates a plurality of wafers in a stacked state, and both ends of the cylindrical body A pair of carry-in / out openings formed in the portion, and a pair of bottom portions that are detachably attached to the carry-in / out openings and support the surface of the wafer that is accommodated directly or via a cushion material , The cylindrical body includes a restricting portion that restricts movement of the accommodated wafer in the diameter direction, and a funnel-shaped portion that gradually spreads from the restricting portion toward each of the carry-in / out openings at both ends. A coin stack carrier is provided.

本発明の第二の局面によれば、上記第二の技術的課題を達成するコインスタックキャリアーとして、ウエーハの外周を支持し複数のウエーハを積層状態で収容する筒体と、この筒体の両端部に形成された一対の搬出入開口部と、搬出入開口部の各々に着脱自在に取り付けられ収容されたウエーハの面を直接又はクッション材を介して支持する一対の底部とから構成され、該筒体の外周には、該一対の搬出入開口部各々の端から該ウエーハが収容される部分まで延びる切欠きを、該搬出入開口部それぞれに少なくとも筒体の直径方向に対向して一対備えている、ことを特徴とするコインスタックキャリアーが提供される。 According to the second aspect of the present invention, as a coin stack carrier that achieves the second technical problem, a cylindrical body that supports the outer periphery of the wafer and accommodates a plurality of wafers in a stacked state, and both ends of the cylindrical body A pair of carry-in / out openings formed in the part, and a pair of bottom parts that support the surface of the wafer that is detachably attached to the carry-in / out openings and directly or via a cushion material, On the outer periphery of the cylindrical body, a pair of notches extending from the end of each of the pair of carry-in / out openings to the portion where the wafer is accommodated is provided facing each of the carry-in / out openings at least in the diameter direction of the cylinder. A coin stack carrier is provided.

本発明の第一の局面によって提供されるコインスタックキャリアーによれば、ウェーハを収容する筐体の両端にウエーハの搬出入開口部を備え、それぞれに底部を着脱自在に取り付けたので、一端の搬出入開口部に底部を取り付け他端の搬出入開口部には底部を取り付けない状態でこの開口した搬出入開口部を通して筒体内にウエーハを搬出入し、収容されたウエーハの表裏を反転させる場合には、開口した搬出入開口部にも底部を取り付け、すなわち両端の搬出入開口部に底部を取り付け、この状態でコインスタックキャリアーを反転させ、当初取り付けられていた方の底部を外せば、ウエーハを容易にコインスタックキャリアー内に収容したままで反転させた状態にすることができる。加えて、ウエーハを収容する筒体にウェーハの径方向の動きを規制する規制部及び漏斗形状部を備えたので。規制部によってウエーハを整列された状態で保持できるにも拘らず漏斗形状部を介してウエーハ出し入れを充分容易に行うことができる。
また、本発明の第二の局面によって提供されるコインスタックキャリアーによれば、ウェーハを収容する筐体の両端にウエーハの搬出入開口部を備え、それぞれに底部を着脱自在に取り付けたので、一端の搬出入開口部に底部を取り付け他端の搬出入開口部には底部を取り付けない状態でこの開口した搬出入開口部を通して筒体内にウエーハを搬出入し、収容されたウエーハの表裏を反転させる場合には、開口した搬出入開口部にも底部を取り付け、すなわち両端の搬出入開口部に底部を取り付け、この状態でコインスタックキャリアーを反転させ、当初取り付けられていた方の底部を外せば、ウエーハを容易にコインスタックキャリアー内に収容したままで反転させた状態にすることができる。加えて、筒体の外周に、ウエーハの収容されている部分から搬出入開口部につながる切欠きを備えたので、切欠きをウエーハを吸着保持して搬出入開口部を通して搬出入する手段の通路として用い、或いは作業者がウエーハを筒体内に搬出入する際に切欠きを通してウエーハに指をかけることができ、かくして充分容易にウエーハを出し入れすることができ、更にまた切欠きを通してウエーハの有無を外部から確認することができる。 According to the coin stack carrier provided by the first aspect of the present invention, the wafer loading / unloading openings are provided at both ends of the housing for accommodating the wafers, and the bottoms are detachably attached to the respective ends. When the wafer is carried into and out of the cylinder through the opened loading / unloading opening without attaching the bottom to the loading / unloading opening at the other end and the bottom is not mounted at the other loading / unloading opening, Attach the bottom to the opening / unloading opening, that is, attach the bottom to the loading / unloading opening at both ends, invert the coin stack carrier in this state, and remove the bottom that was originally attached to remove the wafer. It can be easily reversed while being accommodated in the coin stack carrier. In addition, the cylindrical body that accommodates the wafer is provided with a restricting portion and a funnel-shaped portion that restrict the movement of the wafer in the radial direction. Although the wafer can be held in an aligned state by the restricting portion, the wafer can be taken in and out through the funnel-shaped portion sufficiently easily.
Further, according to the coin stack carrier provided by the second aspect of the present invention, the wafer loading / unloading openings are provided at both ends of the housing for accommodating the wafer, and the bottoms are detachably attached to the respective ends. The bottom is attached to the loading / unloading opening of the other end, and the bottom is not attached to the loading / unloading opening of the other end. The wafer is carried into and out of the cylinder through the opened loading / unloading opening, and the front and back sides of the stored wafer are reversed. In that case, attach the bottom also to the opened loading / unloading opening, that is, attach the bottom to the loading / unloading opening at both ends, in this state, flip the coin stack carrier, remove the bottom that was originally attached, The wafer can be easily reversed while being accommodated in the coin stack carrier. In addition, since the outer periphery of the cylindrical body is provided with a notch that leads from the portion in which the wafer is accommodated to the carry-in / out opening, the passage for the means for holding the wafer to the wafer and carrying it in / out through the carry-in / out opening Or the operator can put a finger on the wafer through the notch when carrying the wafer into and out of the cylinder, thus allowing the wafer to be taken in and out easily, and also whether the wafer is present through the notch. It can be confirmed from the outside.

以下、本発明に従って構成されたコインスタックキャリアーについて、好適実施形態を図示している添付図面を参照して、さらに詳細に説明する。   Hereinafter, a coin stack carrier configured according to the present invention will be described in more detail with reference to the accompanying drawings illustrating a preferred embodiment.

先ずこのコインスタックキャリアーについて概要を、ウエーハを収容した状態のコインスタックキャリアーの側面断面図である図１、及びコインスタックキャリアー自体を分解して示した斜視図である図２を参照して説明する。全体を番号２で示すコインスタックキャリアーは、ウエーハＷの外周を支持し複数のウエーハＷを積層状態で収容する筒体４と、筒体４の両端部に形成されウエーハＷを出し入れする一対の搬出入開口部６ａ、６ｂと、搬出入開口部６ａ、６ｂ各々に着脱を自在に取り付けられ収容されたウエーハＷの面をそれぞれクッション材８を介して支持する一対の底部１０ａ、１０ｂを備えている。   First, an outline of the coin stack carrier will be described with reference to FIG. 1 which is a side sectional view of the coin stack carrier in a state where a wafer is accommodated, and FIG. 2 which is a perspective view showing the coin stack carrier itself in an exploded manner. . The coin stack carrier generally indicated by numeral 2 has a cylindrical body 4 that supports the outer periphery of the wafer W and accommodates a plurality of wafers W in a stacked state, and a pair of carry-outs that are formed at both ends of the cylindrical body 4 and take in and out the wafer W. There are provided a pair of bottom portions 10a and 10b for supporting the surfaces of the wafers W which are detachably attached to the entrance openings 6a and 6b and the carry-in and exit openings 6a and 6b, respectively, via cushioning materials 8. .

この搬出入開口部６ａと６ｂは、また底部１０ａと１０ｂは、実質的に同一の形状に形成されている。したがって以下の説明においては、単に搬出入開口部６、底部１０と呼ぶことがある。   The carry-in / out openings 6a and 6b and the bottoms 10a and 10b are formed in substantially the same shape. Therefore, in the following description, it may only be called the carry-in / out opening 6 and the bottom 10.

図１及び図２とともに、コインスタックキャリアー２の詳細図である図３及び図４を参照して説明する。筒体４は、ステンレス鋼板あるいはプラスチックなどによって成形され、収容したウエーハの直径方向の移動を規制する真直筒状の規制部１２と、規制部１２から両端の搬出入開口部６ａ、６ｂそれぞれに向けて漸次広がる漏斗状部１４ａ、１４ｂを備えている。   A description will be given with reference to FIGS. 3 and 4 which are detailed views of the coin stack carrier 2 together with FIGS. The cylindrical body 4 is formed of a stainless steel plate or plastic, and is directed to a straight cylindrical restriction portion 12 that restricts movement of the accommodated wafer in the diameter direction, and from the restriction portion 12 to the loading / unloading openings 6a and 6b at both ends. And funnel-like portions 14a and 14b that gradually expand.

この漏斗状部１４ａと１４ｂは、実質的に同一の形状に形成されている。したがって以下の説明においては、単に漏斗状部１４と呼ぶことがある。   The funnel portions 14a and 14b are formed in substantially the same shape. Therefore, in the following description, it may be simply referred to as a funnel portion 14.

筒体４の外周には、搬出入開口部６ａ、６ｂ各々の端からウエーハＷが収容される規制部１２まで、規制部１２を含めて延びる切欠きＳが、搬出入開口部６ａ、６ｂそれぞれに周方向に均等に４個、筒体４の直径方向に２個を対向させて一対とし、計２対４個備えられている。したがって、一端の搬出入開口部６ａから延びる４個の切欠きＳに対して、他端の搬出入開口部６ｂから延びる4個の切欠きＳは、一端側の切欠きＳに対して周方向に位相を４５°ずらして配設されている。   On the outer periphery of the cylindrical body 4, a notch S extending from the end of each of the carry-in / out openings 6 a, 6 b to the regulation part 12 in which the wafer W is accommodated, including the regulation part 12, respectively A total of 2 pairs of 4 pieces are provided, with 4 pieces equally in the circumferential direction and 2 pieces facing each other in the diameter direction of the cylinder 4. Therefore, with respect to the four notches S extending from the carry-in / out opening 6a at one end, the four cut-outs S extending from the carry-in / out opening 6b at the other end are circumferential with respect to the notch S at the one end side. The phase is shifted by 45 °.

切欠きＳの周方向の幅は、搬出入開口部６を通して規制部１２にウエーハＷを搬出入するときに、ウエーハＷを吸着保持し搬出入するウエーハ搬出入手段（図示していない）を切欠きＳに沿って移動させることができるように、あるいはウエーハＷをその端部を対向した一対の切欠きＳ、Ｓから手指を入れて支え搬出入できる大きさに設定されている。   The circumferential width of the notch S is determined by cutting a wafer loading / unloading means (not shown) that holds and holds the wafer W when the wafer W is loaded into and unloaded from the restricting portion 12 through the loading / unloading opening 6. The size of the wafer W is set so that it can be moved along the notch S, or can be supported and carried in and out by a pair of notches S and S facing the ends of the wafer W.

底部１０は、ステンレス鋼板あるいはプラスチックなどによって形成され、矩形板状の一面側に筒体４の搬出入開口部６を被嵌して受け入れる円形の凹部１６が形成されている。
凹部１６の内周面には筒体４の搬出入開口部６を着脱自在に固定する係合部としてのピン１８が４個、周方向に等間隔に、内方に向けて立設されている。 The bottom portion 10 is formed of a stainless steel plate, plastic, or the like, and a circular recess 16 is formed on one surface side of the rectangular plate shape so as to fit and receive the carry-in / out opening 6 of the cylindrical body 4.
On the inner peripheral surface of the recess 16, four pins 18 as engaging portions for detachably fixing the carry-in / out opening 6 of the cylindrical body 4 are erected inward at equal intervals in the circumferential direction. Yes.

クッション材８は、円錐台形状にウレタンのような合成樹脂によって生成されたスポンジにより形成されている。クッション材８は、筒体４の漏斗状部１４に挿入され、底部１０によりウエーハＷを支持するクッションとしての適宜のつぶし代を有する大きさに形成されている。   The cushion material 8 is formed of a sponge formed of a synthetic resin such as urethane in a truncated cone shape. The cushion material 8 is inserted into the funnel-shaped portion 14 of the cylindrical body 4 and is formed in a size having an appropriate crushing allowance as a cushion for supporting the wafer W by the bottom portion 10.

筒体４の搬出入開口部６ａ、６ｂの各々には、底部１０の係合部である４個のピン１８それぞれと係脱自在に係合する被係合部としての係合溝２０が周方向に等間隔に４個形成されている。係合溝２０は、搬出入開口部６の端から筒体４の規制部１２の方向に向けて延びる真直部２０ａとその先端から周方向に直角に曲がった水平部２０ｂを有したＬ字形状に形成されている（図３）。このＬ字形状の係合溝２０は、水平部２０ｂの方向を、底部１０をその凹部１６を搬出入開口部６に被せ４個のピン１８をそれぞれ係合溝２０の真直部２０ａに挿通し、底部１０を時計方向に回すことにより、筒体４と底部１０とが係止されるように形成されている。したがって、係止状態の底部１０を筒体４に対して反時計方向に回すことにより、筒体４と底部１０との係止を解除し底部１０を外すことができる。なお、ピン１８と係合溝２０とが係合した状態で回動を規制するストッパーを設けることが好ましい。   Each of the carry-in / out openings 6a and 6b of the cylindrical body 4 has an engagement groove 20 as an engaged portion that removably engages with each of the four pins 18 that are the engagement portions of the bottom portion 10. Four are formed at equal intervals in the direction. The engaging groove 20 has an L shape having a straight portion 20a extending from the end of the carry-in / out opening 6 toward the regulating portion 12 of the cylindrical body 4 and a horizontal portion 20b bent at right angles to the circumferential direction from the tip thereof. (FIG. 3). The L-shaped engagement groove 20 has a horizontal portion 20b in the direction of the horizontal portion 20b, with the bottom portion 10 covering the recess 16 with the loading / unloading opening 6 and the four pins 18 inserted through the straight portions 20a of the engagement groove 20, respectively. The cylinder 4 and the bottom 10 are formed to be locked by rotating the bottom 10 clockwise. Therefore, when the bottom portion 10 in the locked state is rotated counterclockwise with respect to the cylindrical body 4, the locking between the cylindrical body 4 and the bottom portion 10 can be released and the bottom portion 10 can be removed. In addition, it is preferable to provide the stopper which controls rotation in the state which the pin 18 and the engagement groove | channel 20 engaged.

上述したとおりのコインスタックキャリアー２によるウエーハの反転について、反転手順を示した図５を参照して説明する。   The reversal of the wafer by the coin stack carrier 2 as described above will be described with reference to FIG. 5 showing the reversal procedure.

手順（ａ）は、上方に位置した、コインスタックキャリアーの一方の底部が外され開口した搬出入開口部の側に、ウエーハが「表」側を位置づけて収容されている状態を示している。この状態のウエーハの「表」「裏」を、以下の手順によって反転させる。なお図５においては、コインスタックキャリアーの当初開口している搬出入開口部の側が「０」閉じている搬出入開口部の側が「１」で識別されている。   The procedure (a) shows a state in which the wafer is accommodated with the “front” side positioned on the side of the carry-in / out opening which is located above and opened by removing one bottom of the coin stack carrier. The “front” and “back” of the wafer in this state are reversed by the following procedure. In FIG. 5, the side of the carry-in / out opening that is initially opened in the coin stack carrier is identified by “1”, and the side of the carry-in / out opening that is closed is “1”.

手順（ｂ）においては、開口している搬出入開口部に取り付けるクッション材及び底部を用意する。   In the procedure (b), a cushion material and a bottom portion to be attached to the opened carry-in / out opening portion are prepared.

手順（ｃ）においては、搬出入開口部にクッション材を挿入し、底部を被せ、底部を搬出入開口部に固定する。   In step (c), a cushion material is inserted into the carry-in / out opening, the bottom is covered, and the bottom is fixed to the carry-in / out opening.

この手順（ｃ）のコインスタックキャリアーを反転させ手順（ｄ）の状態にする。手順（ｄ）の状態においてはウエーハの「表」側は下方に「裏」側は上方に位置づけられる。   The coin stack carrier of this procedure (c) is reversed to the state of procedure (d). In the state of step (d), the “front” side of the wafer is positioned below and the “back” side is positioned above.

手順（ｅ）において、上方に位置した搬出入開口部から底部及びクッション材を取り外す。   In step (e), the bottom and the cushion material are removed from the carry-in / out opening located above.

かくして、手順（ｆ）に示すように、上方に位置した、コインスタックキャリアーの底部が外されて開口した搬出入開口部の側に、ウエーハの「裏」側が位置づけられた状態になり、ウエーハの反転が完了する。   Thus, as shown in step (f), the “back” side of the wafer is positioned on the side of the loading / unloading opening that is opened by removing the bottom of the coin stack carrier. Inversion is complete.

したがって、コインスタックキャリアー内に積層状態で収容されているウエーハの表裏を、ウエーハをコインスタックキャリアーから取り出して反転させ再度収容することなしに、容易に反転することができる。   Therefore, the front and back sides of the wafers housed in a stacked state in the coin stack carrier can be easily reversed without taking out the wafer from the coin stack carrier and reversing and re-accommodating it.

上述したとおりのコインスタックキャリアー２の作用の説明を続ける。   The description of the operation of the coin stack carrier 2 as described above will be continued.

規制部及び漏斗状部：
ウエーハＷを収容する筒体４に、規制部１２及び漏斗状部１４を備えたので、ウエーハＷを確実にまた整列させた状態で保持することができるとともに、規制部１２から搬出入開口部６に漸次広がる漏斗状部１４によってウエーハＷの出し入れを容易に行うことができる。 Regulatory part and funnel-shaped part:
Since the cylindrical body 4 that accommodates the wafer W is provided with the restricting portion 12 and the funnel-shaped portion 14, the wafer W can be securely held in an aligned state, and the carry-in / out opening 6 from the restricting portion 12. The wafer W can be easily put in and out by the funnel-like portion 14 that gradually spreads out.

切欠き：
筒体４の外周に、ウエーハＷの収容されている部分から搬出入開口部６につながる切欠きＳを備えたので、この切欠きＳを、ウエーハを吸着保持して搬出入開口部６を通して搬出入する手段の通路として用いることができる。また、切欠きＳを筒体４の直径方向に対向して対に備えることにより、作業者はウエーハＷの両端部を切欠きＳを通した手指によって支持し筒体４内に搬出入することができる。さらに切欠きＳにより、筒体４の両端に底部１０を取り付けた状態であっても、内部のウエーハＷの有無を外部から容易に確認することができる。 Notch:
Since the notch S connected to the carry-in / out opening 6 from the portion in which the wafer W is accommodated is provided on the outer periphery of the cylindrical body 4, the cut-out S is carried out through the carry-in / out opening 6 while adsorbing and holding the wafer. It can be used as a passage for entering means. Further, by providing the pair of notches S opposed to each other in the diameter direction of the cylindrical body 4, the operator supports both ends of the wafer W with fingers passing through the notches S and carries it in and out of the cylindrical body 4. Can do. Furthermore, the presence or absence of the internal wafer W can be easily confirmed from the outside by the notch S even when the bottom portion 10 is attached to both ends of the cylindrical body 4.

以上、本発明を実施の形態に基づいて詳細に説明したが、本発明は上記の実施の形態に限定されるものではなく、例えば下記のように、本発明の範囲内においてさまざまな変形あるいは修正ができるものである。   As described above, the present invention has been described in detail based on the embodiments. However, the present invention is not limited to the above-described embodiments, and various modifications or corrections may be made within the scope of the present invention, for example, as described below. It is something that can be done.

係合部、被係合部：
本実施の形態においては、搬出入開口部６と底部１０とを着脱自在に固定する係合部としてピン１８を、被係合部として係合溝２０を備えたが、係合部及び被係合部として、搬出入開口部６と底部１０とを着脱自在に取り付けるものであれば、雌ねじと雄ねじの組み合わせなど、他の適宜の手段を用いてもよい。 Engagement part, engaged part:
In the present embodiment, the pin 18 is provided as the engaging portion for detachably fixing the carry-in / out opening 6 and the bottom portion 10 and the engaging groove 20 is provided as the engaged portion. Other appropriate means such as a combination of a female screw and a male screw may be used as long as the carry-in / out opening 6 and the bottom portion 10 are detachably attached as a joint portion.

クッション材：
本実施の形態においては、収容されたウエーハＷの面をクッション材８を介して底部１０によって支持したが、ウエーハＷの種類などによっては、底部１０の形状などを変更して、底部１０によって直接支持してもよい。 Cushion material:
In the present embodiment, the surface of the housed wafer W is supported by the bottom portion 10 via the cushion material 8. However, depending on the type of the wafer W, the shape of the bottom portion 10 is changed, and the bottom portion 10 directly You may support.

本発明に従って構成されたコインスタックキャリアーを、ウエーハを収容した状態で示した側面断面図。The side sectional view showing the coin stack carrier constituted according to the present invention in the state where the wafer was stored. 図１に示すコインスタックキャリアー自体を、分解した状態で示した斜視図。The perspective view which showed the coin stack carrier itself shown in FIG. 1 in the disassembled state. 図１に示すコインスタックキャリアーをウエーハを除いた状態で示した断面図。Sectional drawing which showed the coin stack carrier shown in FIG. 1 in the state except a wafer. 図３のＡ−Ａ矢印方向に見て筒体と底部の部分を示した断面図。Sectional drawing which showed the part of the cylinder and the bottom part seeing in the AA arrow direction of FIG. 本発明に係るコインスタックキャリアーによるウエーハの反転手順を示した説明図。Explanatory drawing which showed the inversion procedure of the wafer by the coin stack carrier which concerns on this invention.

符号の説明Explanation of symbols

２：コインスタックキャリアー
４：筒体
６、６ａ、６ｂ：搬出入開口部
８：クッション材
１０、１０ａ、１０ｂ：底部
１２：規制部
１４、１４ａ、１４ｂ：漏斗状部
１６：凹部
１８：ピン（係合部）
２０：係合溝（被係合部）
Ｓ：切欠き
Ｗ：ウエーハ 2: Coin stack carrier 4: Cylinder 6, 6a, 6b: Loading / unloading opening 8: Cushion material 10, 10a, 10b: Bottom 12: Restricting part 14, 14a, 14b: Funnel-shaped part 16: Recess 18: Pin ( Engagement part)
20: Engagement groove (engaged part)
S: Notch W: Wafer

Claims (5)

ウエーハの外周を支持し複数のウエーハを積層状態で収容する筒体と、この筒体の両端部に形成された一対の搬出入開口部と、搬出入開口部の各々に着脱自在に取り付けられ収容されたウエーハの面を直接又はクッション材を介して支持する一対の底部とから構成され、
該筒体は、収容したウエーハの直径方向の移動を規制する規制部と、この規制部から両端の該搬出入開口部それぞれに向けて漸次広がる漏斗状部とを備えている、ことを特徴とするコインスタックキャリアー。 A cylinder that supports the outer periphery of the wafer and accommodates a plurality of wafers in a stacked state, a pair of carry-in / out openings formed at both ends of the cylinder, and a detachably attached to each of the carry-in / out openings A pair of bottoms that support the wafer surface directly or through a cushioning material ,
The cylindrical body includes a restricting portion that restricts movement of the accommodated wafer in the diameter direction, and a funnel-shaped portion that gradually spreads from the restricting portion toward the carry-in / out openings at both ends. Coin stack carrier. 筒体の外周には、該一対の搬出入開口部各々の端から該ウエーハが収容される部分まで延びる切欠きを、該搬出入開口部それぞれに少なくとも筒体の直径方向に対向して一対備えている、請求項１記載のコインスタックキャリアー。 On the outer periphery of the cylindrical body, a pair of notches extending from the end of each of the pair of carry-in / out openings to the portion where the wafer is accommodated is provided facing each of the carry-in / out openings at least in the diameter direction of the cylinder. and it has a coin stack carrier of claim 1, wherein. ウエーハの外周を支持し複数のウエーハを積層状態で収容する筒体と、この筒体の両端部に形成された一対の搬出入開口部と、搬出入開口部の各々に着脱自在に取り付けられ収容されたウエーハの面を直接又はクッション材を介して支持する一対の底部とから構成され、
該筒体の外周には、該一対の搬出入開口部各々の端から該ウエーハが収容される部分まで延びる切欠きを、該搬出入開口部それぞれに少なくとも筒体の直径方向に対向して一対備えている、ことを特徴とするコインスタックキャリアー。 A cylinder that supports the outer periphery of the wafer and accommodates a plurality of wafers in a stacked state, a pair of carry-in / out openings formed at both ends of the cylinder, and a detachably attached to each of the carry-in / out openings A pair of bottoms that support the wafer surface directly or through a cushioning material,
On the outer periphery of the cylindrical body, a notch extending from the end of each of the pair of loading / unloading openings to a portion where the wafer is accommodated is opposed to each of the loading / unloading openings at least in the diameter direction of the cylinder. A coin stack carrier characterized by having . 該底部は、該筒体の搬出入開口部を受け入れる凹部及び搬出入開口部を固定する係合部を備え、搬出入開口部は、該係合部に係合する被係合部を備えている、請求項１から３までのいずれかに記載のコインスタックキャリアー。 The bottom portion includes a concave portion that receives the carry-in / out opening portion of the cylindrical body and an engaging portion that fixes the carry-in / out opening portion, and the carry-in / out opening portion includes an engaged portion that engages with the engaging portion. The coin stack carrier according to any one of claims 1 to 3 . 該係合部は、該底部の凹部の内周面に内方に向けて立設する複数個のピンを備え、該被係合部は、このピンの各々に係合する複数個の係合溝を備えている、請求項１から４までのいずれかに記載のコインスタックキャリアー。 The engaging portion includes a plurality of pins standing inwardly on the inner peripheral surface of the concave portion of the bottom portion, and the engaged portion includes a plurality of engaging portions that engage with each of the pins. The coin stack carrier according to any one of claims 1 to 4 , further comprising a groove.
JP2003392041A 2003-11-21 2003-11-21 Coin stack carrier Expired - Lifetime JP4170886B2 (en)

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