JP4168496B2 - Thin film specimen observation jig - Google Patents

Thin film specimen observation jig Download PDF

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Publication number
JP4168496B2
JP4168496B2 JP29074398A JP29074398A JP4168496B2 JP 4168496 B2 JP4168496 B2 JP 4168496B2 JP 29074398 A JP29074398 A JP 29074398A JP 29074398 A JP29074398 A JP 29074398A JP 4168496 B2 JP4168496 B2 JP 4168496B2
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Prior art keywords
sample
movable plate
thin film
mounting plate
plate
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JP2000121515A (en
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暢康 菅ケ谷
雅顕 谷中
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Toppan Inc
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Toppan Inc
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Description

【０００１】
【発明の属する技術分野】
本発明は合成樹脂フィルムなどの薄膜状試料を電子顕微鏡などにより観察する際に使用する治具に関するものである。
【０００２】
【発明が解決しようとする課題】
合成樹脂フィルムなどの薄膜に引っ張り力などの負荷条件を加えてその薄膜の変化などを観察するような場合、特に観察しようとする現象が極めて小さいものの場合には、電子顕微鏡、原子間力顕微鏡、金属顕微鏡などの汎用測定装置が使用されている。
しかしながら、このような汎用測定装置において、試料を配置し測定や観察などを行う測定部は狭い空間であって、この測定空間に観察対象である試料とともに、その試料に対する負荷を加える機構を組み入れることはできないものとなっていた。このため、薄膜状の試料に引っ張り力を加えたときの変化などを前記汎用測定装置を用いて測定、観察しようとした場合、引っ張り力を加える前の状態でその試料のみを測定空間に配置して観察や測定を行い、引っ張り力を加えた後も試料のみを測定空間に配置して観察、測定を行うこととなり、事前、事後の状態を観察するに留まっているのが現状であって、引っ張り力を加え続けるような装置を伴った状態で試料を前記測定空間に配置できず、連続的な引っ張り力を加えたる状態や任意の引っ張り力を固定的に加えた状態での測定、観察が行えないという不都合があった。さらに、上述したような各種の顕微鏡装置に引っ張り力を試料に付加する装置を測定空間に設けるような対処も考えられるが、顕微鏡装置が極めて高価な専用機となって不経済である。そして、仮に各種顕微鏡装置に引っ張り装置などを付加したような場合でも、それぞれの顕微鏡装置では引っ張り力などの条件を同一にすることは非常に難しく、試料に加わる条件を同一にした状態で各種顕微鏡装置を用いた観察は行えないという不都合がある。
そこで本発明は上記事情に鑑み、上記汎用測定装置における測定空間に設置できる小型の用具にて薄膜状の試料を保持するとともに、その用具により薄膜状の試料に引っ張り力を加えることができるようにすることを課題とし、薄膜状の試料に引っ張り力を加えながらの変化を汎用測定装置にて観察、測定できるようにすることを目的とする。
【０００３】
【課題を解決するための手段】
本発明は上記課題を考慮してなされたもので、片面を試料配置面とし一辺側にスライド用空所を有する試料載置板と、前記スライド用空所に前記試料載置板と面一にしてこの試料載置板に対して一方向にスライド可能に設けられた可動板とからなり、前記試料載置板と可動板とのそれぞれに、この可動板から試料載置板側に渡された薄膜状試料を挟み込む保持部が設けられ、かつ、前記可動板には、該可動板から試料載置板側に渡された前記薄膜状試料の引っ張り方向に位置調整する可動板移動手段が設けられていることを特徴とする薄膜状試料観察用治具を提供して、上記課題を提供することを目的とするものである。
そして、本発明において、上記保持部は、上記試料載置板と可動板とのそれぞれに形成された挟み込み空間に配置されて該空間内面とで薄膜状試料を挟み込み可能な押圧体と、この押圧体を常時試料開放方向に付勢するばね体と、前記押圧体を試料挟み付け方向に移動させる押圧体移動手段とからなるものとすることができる。
【０００４】
【発明の実施の形態】
つぎに本発明を図１と図２に示す実施の形態に基づいて詳細に説明する。
図中１は薄膜状試料観察用治具で、該治具１は例えば４０ｍｍ×４０ｍｍの略正方形状にし、厚さを約３ｍｍとした薄板の形状としている。そして、この治具１においては面一にして組み合わせることのできるステンレス製の試料載置板２と同じくステンレス製の可動板３とからなるもので、前記試料載置板２は片面を試料配置面４とし隅部からＬ形のステー５が延設されてこの試料載置板２の本体６と前記ステー５とで挟み込む形で本体６の一辺側にスライド用空所７を形成している。図示されてるように前記スライド用空所７に可動板３が配置されているものであって、スライド用空所７の開放側に渡された棒状のスライドガイド８をその可動板３の一端に貫通させるとともに、可動板３の他端を前記ステー５の基部内側に形成したガイド溝９に移動可能に支持させることで、この可動板３が試料載置板２に対して面一な状態にして一方向に移動可能となるように設けられている。
前記可動板３において試料載置板２の本体６側の端面部分には、可動板３に螺合して凸没可能なネジ体からなる可動板移動手段１０が設けられており、この可動板移動手段１０の位置から上記ステー５側に延び、かつ、このステー５を貫通するようにして形成された透孔１１に、例えば六角レンチを差し入れて前記ネジ体を回転させて可動板移動手段１０を突出させることでその先端を上記本体６に当接させることで、この可動板３を本体６から離れる方向（後述のように薄膜状試料を引っ張る方向）に移動させることができるようにしている。もちろん、可動板移動手段１０におけるネジ体を逆方向に回転させればその可動板移動手段１０が可動板内へと後退することとなり、可動板３を自由に本体６側へと近づけるようにすることができる。
【０００５】
上記試料載置板２と可動板３とのそれぞれには、可動板３の移動方向に対して直角方向に長く形成された保持部１２が一体ずつ設けられている。このように試料載置板２と可動板３とに横長の保持部１２が設けられているものであって、可動板３から試料載置板２へと渡された合成樹脂フィルムなどの薄膜状試料の端部をこの両保持部１２に保持させ、可動板３を上記可動板移動手段１０により上記スライド用空所７内において試料載置板２の本体６から離れるように移動させることで前記薄膜状試料に対して引っ張り力を加えることができるようにしている。
前記保持部１２はワイヤによる放電加工にて試料載置板２と可動板３とに面一にして作り込まれているものであって、放電加工にて試料載置板２と可動板３とのそれぞれに形成された挟み込み空間１３に配置された押圧体１４と、この押圧体１４から外側に位置しその押圧体１４の長さ方向に一対にして配置されたばね体１５と、前記押圧体１４を挟み込み空間１３の内面に向けて押し出す押圧板移動手段１６とからなるものである。前記ばね体１５自体も放電加工にて切り込み状にして形成され、それぞれ押圧体１４と試料載置板２の本体６とに連続し、他方においても押圧体１４と可動板３自体に連続しているものであり、よって、このばね体１５を介して押圧体１４それぞれが相対する方向に移動可能とされ、対向する側に進み出るようにさせることで前記挟み込み空間１３の内面と当接する状態で薄膜状試料の端部を挟み込み保持できるようにしている。即ち、この保持部１２それぞれで薄膜状試料の端部を挟み込み保持した状態で上記可動板３を後退移動（本体６から離れる方向に上記可動板移動手段により操作）させることで薄膜状試料に引っ張り力を加え、可動板移動手段の操作により、その引っ張り力を徐々に変化させたり、また、任意とした一定の引っ張り力を加えた状態とすることができるようにしているものである。
そして、前記押圧体移動手段１６それぞれは上記可動板移動手段１０と同じ構成であって、試料載置板２の外面と可動板３の外面とのそれぞれから押圧体１４側に向けて上記ばね体１５の間に対応する位置にして貫通する透孔１７の押圧体側にネジ体を螺合させてこれを凸没可能となるようにしてなるものであり、前記透孔１７に差し入れられた六角レンチなどによりネジ体を回転突出させて押圧体１４に当接させ、その押圧体１４を挟み込み空間１３の内面に向けて移動させるようにしたものである。なお、可動板３側における保持部１２では前記透孔１７がステー５も貫通する形で形成されている。
上記ばね体１５は常時押圧体１４を試料開放方向に付勢する状態で支持しているものであり、押圧体移動手段１６におけるネジ体が進み出るときはその付勢力に抗する形で回転突出することになる。そして、押圧体移動手段１６を緩めれば、即ち、後退させるようにすれば、ネジ体の所定後退距離の間はその押圧体１４が共に後退するようになり、押圧体移動手段１６の緩め操作時に迅速に押圧体１４の戻りが生じるようにしている。
【０００６】
図において１８はネジ孔を示している。このネジ孔１８は、試料載置板２の上に配置する試料引張板１９を固定するためのものである。通常、薄膜状試料を試料載置板２の上に置いて上述のように保持部により保持させた状態で可動板の後退によりその薄膜状試料に引っ張り力を加えるようにするが、引っ張り力を加えた時点で薄膜状試料が若干ではあるが試料載置面から浮く状態となり、その浮き状態で適正な観察、測定が行えない場合には、薄膜状試料と試料載置板との間にこの試料引張板を配置し、試料引張板１９の上で張られた状態となる試料を観察するようにする。前述したようにネジ孔１８はこの試料引張板１９を固定させるためのものであり、位置が選択できるように、試料引っ張り方向に複数設けられている。
なお、図示した例における試料載置板はその薄膜状試料の観察位置においては平板状のものとしているが、本発明はこれに限定されるものではなく、その試料載置板における観察位置には各種のセンサー機器が配置できるように機器設置用の凹部、や孔を形成するようにしてもよい。また、保持部における構成も上述した構成に限定されるものではない。
【０００７】
【発明の効果】
以上説明したように、本発明の薄膜状試料観察用治具によれば、片面を試料配置面とし一辺側にスライド用空所を有する試料載置板と、前記スライド用空所に前記試料載置板と面一にしてこの試料載置板に対して一方向にスライド可能に設けられた可動板とからなり、前記試料載置板と可動板とのそれぞれに、この可動板から試料載置板側に渡された薄膜状試料を挟み込む保持部が設けられ、かつ、前記可動板には、該可動板から試料載置板側に渡された前記薄膜状試料の引っ張り方向に位置調整する可動板移動手段が設けられていることを特徴とするものである。このように薄型で小さい形態の治具であって、薄膜状試料を保持できるようになるため、汎用測定装置における狭い測定空間にも簡単に配置することができる。しかも、薄膜状試料に引っ張り力を徐々に加えたり、任意の引っ張り力を加えた状態で維持させることができるため、汎用測定装置自体に付加機構を設けることなく引っ張り力が加わった状態での、また、その引っ張り力を変化させる時点での薄膜状試料の観察、測定が行えるようになる。さらに、薄膜状試料に引っ張り力を加えた状態を維持できるため、試料と治具とを伴ったまま、即ち、同一の引っ張り力を加えた状態のまま、一つの治具を各種の汎用測定装置に順次セットできるようになり、同一条件の引っ張り力が加わった薄膜状試料に対して各種の測定、観察が行えるようになるなど、実用性に優れた効果を奏するものである。
【図面の簡単な説明】
【図１】本発明に係る薄膜状試料観察用治具の一実施例を示す説明図である。
【図２】同じく一実施例における試料載置板と可動板とを示す説明図である。
【符号の説明】
１…薄膜状試料観察用治具
２…試料載置板
３…可動板
７…スライド用空所
１０…可動板移動手段
１２…保持部
１３…挟み込み空間
１４…押圧体
１５…ばね体
１６…押圧体移動手段[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a jig used when a thin film sample such as a synthetic resin film is observed with an electron microscope or the like.
[0002]
[Problems to be solved by the invention]
When applying a load condition such as tensile force to a thin film such as a synthetic resin film and observing changes in the thin film, especially when the phenomenon to be observed is extremely small, an electron microscope, an atomic force microscope, General-purpose measuring devices such as metal microscopes are used.
However, in such a general-purpose measurement device, the measurement unit for measuring and observing the sample is placed in a narrow space, and a mechanism for applying a load to the sample is incorporated into the measurement space together with the sample to be observed. It was impossible. For this reason, when attempting to measure and observe changes when a tensile force is applied to a thin film sample using the general-purpose measurement device, only the sample is placed in the measurement space before the tensile force is applied. After observing and measuring, after applying a tensile force, only the sample is placed in the measurement space for observation and measurement, and the current situation is that it only remains to observe the state before and after, Samples cannot be placed in the measurement space with a device that continues to apply a tensile force, and measurements and observations can be made in a state where a continuous tensile force is applied or in a state where an arbitrary tensile force is applied in a fixed manner. There was an inconvenience that it could not be done. Further, it may be possible to provide a measuring space with a device for applying a pulling force to the sample in the various microscope devices as described above, but the microscope device is uneconomical because it is a very expensive dedicated machine. And even if a tension device is added to various microscope devices, it is very difficult to make the conditions such as the tensile force the same in each microscope device, and various microscopes with the same conditions applied to the sample. There is an inconvenience that observation using the apparatus cannot be performed.
Therefore, in view of the above circumstances, the present invention holds a thin film sample with a small tool that can be installed in the measurement space of the general-purpose measurement device, and can apply a tensile force to the thin film sample with the tool. It is an object of the present invention to make it possible to observe and measure a change while applying a tensile force to a thin film sample with a general-purpose measuring device.
[0003]
[Means for Solving the Problems]
The present invention has been made in consideration of the above-described problems, and is provided with a sample placement plate having one side as a sample placement surface and a slide space on one side, and the slide placement space flush with the sample placement plate. And a movable plate provided to be slidable in one direction with respect to the sample mounting plate. Each of the sample mounting plate and the movable plate is passed from the movable plate to the sample mounting plate side. A holding part for sandwiching the thin film sample is provided, and the movable plate is provided with a movable plate moving means for adjusting the position in the pulling direction of the thin film sample passed from the movable plate to the sample mounting plate side. An object of the present invention is to provide a jig for observing a thin film sample characterized by having the above-mentioned problems.
In the present invention, the holding portion is disposed in a sandwiching space formed in each of the sample mounting plate and the movable plate, and a pressing body capable of sandwiching the thin film sample with the inner surface of the space, It may be composed of a spring body that constantly biases the body in the sample opening direction, and a pressing body moving means that moves the pressing body in the sample clamping direction.
[0004]
DETAILED DESCRIPTION OF THE INVENTION
Next, the present invention will be described in detail based on the embodiment shown in FIGS.
In the figure, reference numeral 1 denotes a thin film sample observation jig. The jig 1 has a substantially square shape of, for example, 40 mm × 40 mm, and has a thin plate shape with a thickness of about 3 mm. The jig 1 is composed of a stainless steel sample mounting plate 2 and a stainless steel movable plate 3 which can be combined with each other, and the sample mounting plate 2 has one surface arranged on the sample mounting surface. 4, an L-shaped stay 5 is extended from the corner, and a slide space 7 is formed on one side of the main body 6 so as to be sandwiched between the main body 6 of the sample mounting plate 2 and the stay 5. As shown in the figure, a movable plate 3 is arranged in the slide space 7, and a rod-shaped slide guide 8 passed to the open side of the slide space 7 is provided at one end of the movable plate 3. The movable plate 3 is made to be flush with the sample mounting plate 2 by allowing the other end of the movable plate 3 to be movably supported by a guide groove 9 formed inside the base of the stay 5. It can be moved in one direction.
In the movable plate 3, a movable plate moving means 10 made of a screw body that can be screwed into the movable plate 3 and protruded and retracted is provided on the end surface portion of the sample mounting plate 2 on the main body 6 side. For example, a hexagon wrench is inserted into a through hole 11 extending from the position of the moving means 10 toward the stay 5 and penetrating through the stay 5, and the screw body is rotated to move the movable plate moving means 10. The movable plate 3 can be moved in a direction away from the main body 6 (a direction in which a thin film sample is pulled as will be described later). . Of course, if the screw body in the movable plate moving means 10 is rotated in the reverse direction, the movable plate moving means 10 will be retracted into the movable plate, and the movable plate 3 can be freely brought closer to the main body 6 side. be able to.
[0005]
Each of the sample mounting plate 2 and the movable plate 3 is integrally provided with a holding portion 12 that is formed long in a direction perpendicular to the moving direction of the movable plate 3. Thus, the horizontally long holding portion 12 is provided on the sample mounting plate 2 and the movable plate 3, and a thin film such as a synthetic resin film passed from the movable plate 3 to the sample mounting plate 2. The end portions of the sample are held by both holding portions 12, and the movable plate 3 is moved away from the main body 6 of the sample mounting plate 2 in the slide space 7 by the movable plate moving means 10. A tensile force can be applied to the thin film sample.
The holding portion 12 is formed on the sample mounting plate 2 and the movable plate 3 by electric discharge machining using a wire, and the sample mounting plate 2 and the movable plate 3 are formed by electric discharge machining. A pressing body 14 disposed in the sandwiching space 13 formed in each of the above, a spring body 15 positioned outside the pressing body 14 and disposed in a pair in the length direction of the pressing body 14, and the pressing body 14 And a pressing plate moving means 16 that pushes out toward the inner surface of the space 13. The spring body 15 itself is also formed in a cut shape by electric discharge machining, and is continuously connected to the pressing body 14 and the main body 6 of the sample mounting plate 2, respectively, and is continuously connected to the pressing body 14 and the movable plate 3 itself. Therefore, the pressing bodies 14 can be moved in the opposite directions via the spring body 15, and the thin film is brought into contact with the inner surface of the sandwiching space 13 by being advanced to the opposite side. The end of the sample is sandwiched and held. That is, the movable plate 3 is moved backward (operated by the movable plate moving means in a direction away from the main body 6) while the end of the thin film sample is sandwiched and held by each of the holding portions 12 to pull the thin film sample. By applying a force and operating the movable plate moving means, the pulling force can be gradually changed, or an arbitrary fixed pulling force can be applied.
Each of the pressing body moving means 16 has the same configuration as the movable plate moving means 10, and the spring body is directed from the outer surface of the sample mounting plate 2 and the outer surface of the movable plate 3 toward the pressing body 14. 15 is a hexagonal wrench inserted into the through-hole 17 so that the screw body can be screwed into the pressing body side of the through-hole 17 penetrating at a corresponding position between 15. For example, the screw body is rotated and protruded to come into contact with the pressing body 14, and the pressing body 14 is sandwiched and moved toward the inner surface of the space 13. In the holding part 12 on the movable plate 3 side, the through hole 17 is formed so as to penetrate the stay 5.
The spring body 15 always supports the pressing body 14 in a state in which the pressing body 14 is urged in the sample opening direction. When the screw body in the pressing body moving means 16 advances, the spring body 15 rotates and protrudes against the urging force. It will be. If the pressing body moving means 16 is loosened, that is, if the pressing body moving means 16 is moved back, the pressing bodies 14 are moved back together during a predetermined retraction distance of the screw body. Sometimes the pressing body 14 is returned quickly.
[0006]
In the figure, reference numeral 18 denotes a screw hole. The screw hole 18 is for fixing the sample tension plate 19 disposed on the sample placement plate 2. Normally, a thin film sample is placed on the sample mounting plate 2 and held by the holding portion as described above, and a tensile force is applied to the thin film sample by retreating the movable plate. When a thin film sample is slightly lifted from the sample mounting surface at the time of addition, and proper observation and measurement cannot be performed in the floating state, the thin film sample is placed between the thin film sample and the sample mounting plate. A sample tension plate is arranged, and a sample that is stretched on the sample tension plate 19 is observed. As described above, the screw holes 18 are for fixing the sample tension plate 19, and a plurality of screw holes 18 are provided in the sample pulling direction so that the positions can be selected.
The sample mounting plate in the illustrated example is a flat plate at the observation position of the thin film sample, but the present invention is not limited to this, and the observation position on the sample mounting plate is not limited to this. You may make it form the recessed part and hole for apparatus installation so that various sensor apparatuses can be arrange | positioned. Further, the configuration of the holding unit is not limited to the configuration described above.
[0007]
【The invention's effect】
As described above, according to the thin-film sample observation jig of the present invention, the sample mounting plate having one side as a sample placement surface and having a slide space on one side, and the sample mounting in the slide space. A movable plate that is flush with the mounting plate and is slidable in one direction with respect to the sample mounting plate. The sample mounting plate and the movable plate are respectively mounted on the sample mounting plate and the movable plate. A holding part for sandwiching the thin film sample passed to the plate side is provided, and the movable plate is movable to adjust the position in the pulling direction of the thin film sample passed from the movable plate to the sample mounting plate side. A plate moving means is provided. Since the jig is thin and small and can hold the thin film sample, it can be easily arranged in a narrow measurement space in a general-purpose measurement apparatus. Moreover, since it is possible to gradually apply a tensile force to the thin film-like sample or maintain it in a state where an arbitrary tensile force is applied, the general-purpose measuring device itself is in a state where a tensile force is applied without providing an additional mechanism. In addition, the thin film sample can be observed and measured at the time when the tensile force is changed. Furthermore, since a state in which a tensile force is applied to the thin film sample can be maintained, a single jig can be used as a general-purpose measuring device with the sample and the jig, that is, with the same tensile force applied. In this way, it is possible to set them sequentially, and various measurements and observations can be performed on a thin film sample to which a tensile force of the same condition is applied.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing an embodiment of a thin film sample observation jig according to the present invention.
FIG. 2 is an explanatory view showing a sample mounting plate and a movable plate in the same embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Thin-film sample observation jig | tool 2 ... Sample mounting plate 3 ... Movable plate 7 ... Sliding space 10 ... Movable plate moving means 12 ... Holding part 13 ... Clamping space 14 ... Press body 15 ... Spring body 16 ... Press Body moving means

Claims (2)

片面を試料配置面とし一辺側にスライド用空所を有する試料載置板と、前記スライド用空所に前記試料載置板と面一にしてこの試料載置板に対して一方向にスライド可能に設けられた可動板とからなり、
前記試料載置板と可動板とのそれぞれに、この可動板から試料載置板側に渡された薄膜状試料を挟み込む保持部が設けられ、かつ、前記可動板には、該可動板から試料載置板側に渡された前記薄膜状試料の引っ張り方向に位置調整する可動板移動手段が設けられていることを特徴とする薄膜状試料観察用治具。A sample mounting plate that has one side as the sample placement surface and has a sliding space on one side, and can slide in one direction relative to the sample mounting plate in the sliding space, flush with the sample mounting plate. It consists of a movable plate provided in
Each of the sample mounting plate and the movable plate is provided with a holding portion for sandwiching a thin film sample passed from the movable plate to the sample mounting plate side, and the movable plate is provided with a sample from the movable plate. A jig for observing a thin film sample, comprising movable plate moving means for adjusting the position in the pulling direction of the thin film sample passed to the mounting plate side. 上記保持部は、上記試料載置板と可動板とのそれぞれに形成された挟み込み空間に配置されて該空間内面とで薄膜状試料を挟み込み可能な押圧体と、この押圧体を常時試料開放方向に付勢するばね体と、前記押圧体を試料挟み付け方向に移動させる押圧体移動手段とからなるものである請求項１に記載の薄膜試料観察用治具。The holding unit is disposed in a sandwiching space formed in each of the sample mounting plate and the movable plate, and a pressing body capable of sandwiching a thin film sample with the inner surface of the space, and the pressing body is always in a sample opening direction. The thin film sample observation jig according to claim 1, comprising: a spring body that biases the pressure body, and a pressing body moving means that moves the pressing body in a sample clamping direction.
JP29074398A 1998-10-13 1998-10-13 Thin film specimen observation jig Expired - Fee Related JP4168496B2 (en)

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