JP4167175B2 - ドライ現像方法 - Google Patents
ドライ現像方法 Download PDFInfo
- Publication number
- JP4167175B2 JP4167175B2 JP2003522153A JP2003522153A JP4167175B2 JP 4167175 B2 JP4167175 B2 JP 4167175B2 JP 2003522153 A JP2003522153 A JP 2003522153A JP 2003522153 A JP2003522153 A JP 2003522153A JP 4167175 B2 JP4167175 B2 JP 4167175B2
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- Prior art keywords
- gas
- resist
- resist layer
- dry
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 77
- 238000011161 development Methods 0.000 title claims description 34
- 238000012545 processing Methods 0.000 claims description 70
- 239000007789 gas Substances 0.000 claims description 64
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 13
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 12
- 229910001882 dioxygen Inorganic materials 0.000 claims description 12
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 10
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 238000009832 plasma treatment Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000009966 trimming Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 63
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 230000003247 decreasing effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 239000000112 cooling gas Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 229920000734 polysilsesquioxane polymer Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006884 silylation reaction Methods 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZYUVGYBAPZYKSA-UHFFFAOYSA-N 5-(3-hydroxybutan-2-yl)-4-methylbenzene-1,3-diol Chemical compound CC(O)C(C)C1=CC(O)=CC(O)=C1C ZYUVGYBAPZYKSA-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- GJWAPAVRQYYSTK-UHFFFAOYSA-N [(dimethyl-$l^{3}-silanyl)amino]-dimethylsilicon Chemical compound C[Si](C)N[Si](C)C GJWAPAVRQYYSTK-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- NHADDZMCASKINP-HTRCEHHLSA-N decarboxydihydrocitrinin Natural products C1=C(O)C(C)=C2[C@H](C)[C@@H](C)OCC2=C1O NHADDZMCASKINP-HTRCEHHLSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- -1 t-butyloxylcarbonyl Chemical group 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/36—Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/265—Selective reaction with inorganic or organometallic reagents after image-wise exposure, e.g. silylation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Description
図2は,ドライ現像を行う前の被処理体を示す断面模式図である。
図3は,ドライ現像を行った後の被処理体を示す断面模式図である。
図4は,従来の方法により現像を行った後の被処理体を模式的に示した断面図である。
102 処理容器
104 下部電極
105 絶縁部材
106 昇降軸
107 導電部材
108 高周波電源
112 フォーカスリング
120 排気リング
126 上部電極
128 排気管
150 被処理体
152 被エッチング層
154 下層レジスト
156 上層レジスト
Claims (12)
- 真空容器内に処理ガスを導入するとともに高周波電力を印加して前記処理ガスのプラズマを形成し,被処理体上に形成されたレジストを描画するためのドライ現像方法であって:
前記レジストは,描画パターンが形成されたシリコンを含有する第1のレジスト層と;
前記第1のレジスト層の下層に設けられる第2のレジスト層と;
を有し,
前記第2のレジスト層は,一酸化炭素ガスと酸素ガスとの混合ガスを用いてプラズマ処理される第1の工程によりドライ現像され,
前記第1の工程の後に窒素ガスと水素ガスとの混合ガスを用いてプラズマ処理される第2の工程によりさらにドライ現像されることを特徴とするドライ現像方法。 - 前記第1の工程において,前記第1のレジスト層に対する前記第2のレジスト層の,プラズマ処理時のエッチング速度の比は10以上であることを特徴とする,請求項1に記載のドライ現像方法。
- 前記第1の工程において,一酸化炭素ガスの酸素ガスに対する流量比は0.2以上5以下であることを特徴とする,請求項2に記載のドライ現像方法。
- 前記第1の工程において印加される高周波電力密度は,0.32W/cm2以上3.18W/cm2以下であることを特徴とする,請求項2に記載のドライ現像方法。
- 前記第1の工程において,前記高周波電力が印加される下部電極の,前記被処理体を載置する載置台の温度は,−30℃以上20℃以下であることを特徴とする,請求項2に記載のドライ現像方法。
- 前記第1の工程では前記第2のレジスト層の上端近傍にアンダーカットを形成し,前記第2の工程では前記第2レジスト層の下端部分に前記第1のレジスト層の描画パターンと略同寸法の描画パターンを形成することを特徴とする,請求項1に記載のドライ現像方法。
- 前記第1の工程のアンダーカットは,処理時間で制御することを特徴とする,請求項6に記載のドライ現像方法。
- 前記第1の工程のアンダーカットは,前記第1の工程における,一酸化炭素ガスと酸素ガスとの流量比で制御すること特徴とする,請求項6に記載のドライ現像方法。
- 前記第1の工程のアンダーカットは,前記下部電極に印加する高周波電力で制御することを特徴とする,請求項6に記載のドライ現像方法。
- 前記第1の工程と前記第2の工程とにより描画パターンのトリミングを行うことを特徴とする,請求項1に記載のドライ現像方法。
- 前記第1のレジスト層の厚さは,前記第1および第2の工程により第1のレジスト層がエッチングされる膜厚の合計よりも厚く形成されることを特徴とする,請求項1に記載のドライ現像方法。
- 前記プラズマの形成は,真空処理容器内に設けた平行平板電極間において行われることを特徴とする,請求項1に記載のドライ現像方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001249233 | 2001-08-20 | ||
JP2001249233 | 2001-08-20 | ||
PCT/JP2002/008242 WO2003017343A1 (fr) | 2001-08-20 | 2002-08-13 | Procede de developpement a sec |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2003017343A1 JPWO2003017343A1 (ja) | 2004-12-09 |
JP4167175B2 true JP4167175B2 (ja) | 2008-10-15 |
Family
ID=19078269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003522153A Expired - Fee Related JP4167175B2 (ja) | 2001-08-20 | 2002-08-13 | ドライ現像方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6986851B2 (ja) |
JP (1) | JP4167175B2 (ja) |
KR (1) | KR100557843B1 (ja) |
CN (1) | CN1290156C (ja) |
TW (1) | TW563201B (ja) |
WO (1) | WO2003017343A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100647695B1 (ko) * | 2005-05-27 | 2006-11-23 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터 및 그의 제조방법과 이를 구비한평판표시장치 |
CN1925001B (zh) * | 2005-08-31 | 2010-04-14 | 新科实业有限公司 | 具有微纹的磁性读/写磁头及其制造方法 |
US7432210B2 (en) * | 2005-10-05 | 2008-10-07 | Applied Materials, Inc. | Process to open carbon based hardmask |
KR101431466B1 (ko) * | 2008-07-30 | 2014-08-22 | 삼성디스플레이 주식회사 | 유기 발광 소자의 제조 방법 |
JP2010267670A (ja) * | 2009-05-12 | 2010-11-25 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP6305825B2 (ja) * | 2014-05-12 | 2018-04-04 | 東京エレクトロン株式会社 | プラズマ処理装置およびそれに用いる排気構造 |
JP6408903B2 (ja) * | 2014-12-25 | 2018-10-17 | 東京エレクトロン株式会社 | エッチング処理方法及びエッチング処理装置 |
US9570291B2 (en) * | 2015-07-14 | 2017-02-14 | GlobalFoundries, Inc. | Semiconductor substrates and methods for processing semiconductor substrates |
US11537049B2 (en) * | 2019-02-26 | 2022-12-27 | Tokyo Electron Limited | Method of line roughness improvement by plasma selective deposition |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59169137A (ja) | 1983-03-16 | 1984-09-25 | Fujitsu Ltd | 有機膜のパタ−ン形成方法 |
JPS6294933A (ja) | 1985-10-22 | 1987-05-01 | Toshiba Corp | ドライエツチング方法 |
JPH01118126A (ja) * | 1987-10-31 | 1989-05-10 | Fujitsu Ltd | パターン形成方法 |
JPH01206624A (ja) | 1988-02-15 | 1989-08-18 | Koujiyundo Kagaku Kenkyusho:Kk | レジストのドライエッチング法 |
JPH03177021A (ja) * | 1989-12-05 | 1991-08-01 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH07135140A (ja) | 1993-06-25 | 1995-05-23 | Kawasaki Steel Corp | レジストパターン形成方法 |
KR100209698B1 (ko) | 1996-10-11 | 1999-07-15 | 구본준 | 유기 반사방지막 식각방법 |
JPH10268526A (ja) | 1997-03-24 | 1998-10-09 | Toshiba Corp | 半導体装置の製造方法およびパターン形成方法 |
US6136511A (en) * | 1999-01-20 | 2000-10-24 | Micron Technology, Inc. | Method of patterning substrates using multilayer resist processing |
-
2002
- 2002-08-13 US US10/486,828 patent/US6986851B2/en not_active Expired - Fee Related
- 2002-08-13 JP JP2003522153A patent/JP4167175B2/ja not_active Expired - Fee Related
- 2002-08-13 KR KR1020047002480A patent/KR100557843B1/ko not_active IP Right Cessation
- 2002-08-13 CN CNB028162145A patent/CN1290156C/zh not_active Expired - Fee Related
- 2002-08-13 WO PCT/JP2002/008242 patent/WO2003017343A1/ja active Application Filing
- 2002-08-14 TW TW091118308A patent/TW563201B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20040044460A (ko) | 2004-05-28 |
WO2003017343A1 (fr) | 2003-02-27 |
US20040169009A1 (en) | 2004-09-02 |
KR100557843B1 (ko) | 2006-03-10 |
CN1543666A (zh) | 2004-11-03 |
US6986851B2 (en) | 2006-01-17 |
JPWO2003017343A1 (ja) | 2004-12-09 |
CN1290156C (zh) | 2006-12-13 |
TW563201B (en) | 2003-11-21 |
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