JP4143761B2 - Fluid controller - Google Patents
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- JP4143761B2 JP4143761B2 JP2003123170A JP2003123170A JP4143761B2 JP 4143761 B2 JP4143761 B2 JP 4143761B2 JP 2003123170 A JP2003123170 A JP 2003123170A JP 2003123170 A JP2003123170 A JP 2003123170A JP 4143761 B2 JP4143761 B2 JP 4143761B2
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Description
【０００１】
【発明の属する技術分野】
この発明は、配管や流体制御装置で使用される流体制御器に関する。
【０００２】
【従来の技術】
従来、流体流入通路、流体流出通路、および両通路を連通する連通路を有するボディと、連通路を含む縦通路内で上下方向に移動させられることにより先端部が連通路を遮断または開放するステムと、ステムを上下移動させる駆動装置とを備えている流体制御器はよく知られており、このうち、駆動装置としてステッピングモータを使用するものは、位置決め精度が高いという利点を有しており、微量コントロールが必要な場合などに好適に利用されている（特許文献１）。
【０００３】
【特許文献１】
特開昭６０−２６３７８４号公報
【０００４】
【発明が解決しようとする課題】
上記ステッピングモータを使用する流体制御器では、モータの回転を上下移動に変換する機構が必要であり、その機構の設置スペースのために流体制御器の上下長さが大きくなるという問題があった。
【０００５】
一方、駆動装置として、上下移動する移動体を有するリニア駆動のステッピングモータが開発されており、流体制御器にこの駆動装置を使用することが考えられる。この場合には、駆動装置の移動体と流体制御器のステムとを接続する接続手段にガタや芯ずれが生じないようにして、移動体の移動が流体制御器のステムに精度を損なうことなく伝達されることが新たな課題となる。
【０００６】
この発明の目的は、リニア駆動のステッピングモータを駆動装置として使用するとともに、駆動装置の移動体の移動が流体制御器のステムに精度を損なうことなく伝達される流体制御器を提供することにある。
【０００７】
【課題を解決するための手段および発明の効果】
この発明による流体制御器は、流体流入通路、流体流出通路、および両通路を連通する連通路を有するボディと、連通路を含む縦通路内で上下方向に移動させられることにより先端部が連通路を遮断または開放するステムと、ステムを上下移動させる駆動装置とを備えている流体制御器において、駆動装置は、回転せずに上下移動する移動体を有するリニア駆動のステッピングモータとされ、移動体の下端面は、縦断面円弧状に形成され、ステムの上端部に、駆動装置の移動体の下端を受ける移動体受けが設けられ、移動体受けは、底面が断面円弧状で移動体下端部が嵌め入れられる凹所が上端部に形成されて、弾性部材に上向きに付勢されることによって、上向きの荷重が常にかかった状態で移動体に下から当接させられていることを特徴とするものである。
【０００８】
この発明の流体制御器によると、駆動装置としてリニア駆動のステッピングモータを使用することにより、流体制御器の小型化が図れるとともに、移動体受けは、弾性部材に上向きに付勢されることによって、上向きの荷重が常にかかった状態で移動体に下から当接させられているので、駆動装置の移動体とステムとが溶接やねじ等で連結されていなくても、駆動装置の移動体の移動がステムにガタなく伝達され、ステッピングモータの位置決め精度が高いという利点を損なわない高い分解能の流体制御器を得ることができる。
【０００９】
駆動装置としては、例えば、ステッピングモータのロータ内にねじ機構を設けて、軸（移動体）を直線運動させるものが使用される。この場合、ねじ機構を構成するおねじとめねじとの間で発生する軸方向のガタが微量コントロールをする流体制御器では問題となるが、弾性部材が移動体を常に上方に押し上げていることによって、ロータ内にねじ機構がある場合でもその軸方向のガタをなくすことができる。
【００１０】
駆動装置の移動体の下端面は、縦断面円弧状に形成され、移動体受けの上端部に凹所が形成されていることが好ましい。このようにすると、移動体の下端部が移動体受けの凹所内に嵌め入れられた状態で、弾性部材が移動体受けを上向きに付勢するので、駆動装置取付け時の位置合わせが容易にでき、移動体の軸とステムの軸との芯ずれがあったとしても、作動上問題とならない程度に芯ずれを吸収することができる。
【００１１】
上記凹所の底面が平面の底面であっても動作には全く問題ないが、断面円弧状の底面とすることにより、駆動装置の移動体の縦断面円弧状下端面が移動体受けの断面円弧状の底面に当接した状態で、弾性部材が移動体受けを上向きに付勢するので、移動体の軸とステムの軸との芯ずれがより確実に吸収される。
【００１２】
【発明の実施の形態】
この発明の実施の形態を、以下図面を参照して説明する。以下の説明において、左右は、図の左右をいうものとする。
【００１３】
図１は、この発明の流体制御器の第１実施形態を示している。
【００１４】
この実施形態の流体制御器(1)は、管状の左方突出部(7)および管状の右方突出部(8)を下部に有する有底円筒状のボディ(2)と、ボディ(2)内に上下移動可能に挿入された円柱状ステム(3)と、ボディ(2)の上端部に嵌め被せられた円筒状ホルダ(4)と、ホルダ(4)の上端に取り付けられた駆動装置(5)と、ホルダ(4)内に収められたステムと駆動装置との接続手段(6)とを備えている。
【００１５】
駆動装置(5)は、リニア駆動のステッピングモータであって、ケーシング(11)と、ケーシング(11)内に収められたステータおよびロータ(図示略)と、ケーシング(11)の下壁から下方に突出させられている移動体(16)とを有している。
【００１６】
駆動装置(5)のケーシング(11)とホルダ(4)とは、ホルダ(4)の上端の円板状フランジ部(4a)に等間隔で設けられた貫通めねじ部(4b)にケーシング(11)の下壁の張り出し部(17)を貫通したボルト(12)がねじ合わされることにより結合されている。
【００１７】
ボディ(2)の下端部には、中心部近くから若干左上がりにのびて左方突出部(7)内通路に通じる流体流入通路(2a)と、流体流入通路(2a)の中心側端部よりも上方にのびる連通路(2b)と、連通路(2b)の上端からボディ(2)の上端までのびるステム案内路(19)の下端部から右方にのびて右方突出部(8)内通路に通じる流体流出通路(2c)とが設けられている。
【００１８】
ステム(3)は、下端部(3a)が先細り円錐状とされており、円錐状部分(3a)の上方の部分に、下部フランジ部(3b)が設けられている。ボディ(2)の上端部には、ステム(3)を上下移動可能に案内しかつステム案内路(19)からの流体漏れを防止する上部フランジ部(20)およびシール部材(26)が設けられている。上部フランジ部(20)下面とステム(3)の下部フランジ部(3b)上面との間には、ベローズ(21)が設けられている。また、上部フランジ部(20)内周とステム(3)の外周との間には、ステム(3)のガイドの役割を果たすガイドパッキン(27)が配されている。
【００１９】
ステム(3)の上端は、ボディ(2)の上端より上方にあり、ステム(3)の上端部には、おねじ部(22)が形成されている。このおねじ部(22)には、駆動装置(5)の移動体(16)を受ける移動体受け(23)の下部がねじ合わされている。
【００２０】
ステムと駆動装置との接続手段(6)は、移動体受け(23)とこれを付勢する弾性部材としての圧縮コイルばね(24)とからなる。
【００２１】
移動体受け(23)は、段付き円柱状に形成されており、その上端のフランジ部(23a)が、ホルダ(4)の内周に対して十分なすきまを持ち、摺動可能となされている。ホルダ(4)の下端寄り部分には、内向きフランジ部(4c)が設けられており、この内向きフランジ部(4c)の上面と移動体受け(23)の上端のフランジ部(23a)下面とによって、移動体受け(23)を上向きに付勢する圧縮コイルばね（弾性部材）(24)が受け止められている。これにより、移動体受け(23)は、上向きの荷重が常にかかった状態で移動体(16)に下から当接させられている。
【００２２】
駆動装置(5)の移動体(16)の下端部は、縦断面凸円弧状に形成され、移動体受け(23)の上端部に、断面円弧状の底面を有し移動体(16)下端部が嵌め入れられる凹所(23b)が形成されている。凹所(23b)の径は、移動体(16)の下端部の径よりも若干大きくなされており、凹所(23b)の円弧状底面のアールは、移動体(16)の下端部の凸円弧状面のアールより若干大きく形成されている。したがって、移動体(16)の下端部は、若干の遊びを有して移動体受け(23)の凹所(23b)に嵌まり合っている。
【００２３】
この実施形態の流体制御器によると、ボディを除いた部分の長さ（アクチュエータ部の長さ）は、従来のものに比べて、約１／２にすることができ、流体制御器の小型化を図ることができる。また、移動体(16)の縦断面円弧状下端面が移動体受け(23)の凹所(23b)の断面円弧状底面に当接した状態で、移動体受け(23)がコイルばね(24)によって上向きに付勢されていることから、駆動装置(5)の移動体(16)と接続手段(6)の移動体受け(23)とは、この上向き付勢力によって連結され、駆動装置(5)の移動体(16)とステム(3)とを溶接やねじで一体物としたのと同様の効果が得られ、軸方向のがたつきが防止されている。また、駆動装置(5)内のロータにねじ機構がある場合、ねじ部に発生するねじの軸方向のがたつきも上向き付勢力によってなくすことができる。さらにまた、駆動装置(5)の移動体(16)とステム(3)とを例えば溶接やねじなどにより接合した場合には、移動体(16)の軸とステム(3)の軸とが一体物となるため、芯出しが難しく、芯が出ていない場合は、スラスト荷重が常にかかった状態となって、作動中に問題が起こりやすいが、移動体受け(23)をコイルばね(24)で上向きに付勢することにより、移動体(16)の軸とステム(3)の軸とが接合されていなくても、移動体(16)と移動体受け(23)とが一体に移動するようになされているので、溶接やねじ込みなどの作業が不要でしかも移動体(16)の軸とステム(3)の軸との芯ずれがなく、スラスト荷重が発生しないために作動不良が起こりにくいという利点も有している。
【００２４】
図２は、この発明の流体制御器の第２実施形態を示している。
【００２５】
この実施形態の流体制御器(1)は、第１実施形態のものとステムと駆動装置との接続手段(6)とが異なっている。すなわち、この実施形態では、ステムと駆動装置との接続手段(6)において、移動体(16)下端部が嵌め入れられる移動体受け(23)の凹所(23b)の底面は、平面とされている。凹所(23b)の径は、移動体(16)の下端部の径よりも若干大きくなされており、移動体(16)の下端部は、若干の遊びを有して移動体受け(23)の凹所(23b)に嵌まり合っている。
【００２６】
第２実施形態のその他の構成は、第１実施形態のものと同様であり、同様の構成に同じ符号を付してその説明を省略する。
【００２７】
この実施形態の流体制御器は、移動体受け(23)の凹所(23b)の底面が平面とされているが、第１実施形態のものと同様の作用効果を有している。すなわち、ボディを除いた部分の長さ（アクチュエータ部の長さ）は、従来のものに比べて、約１／２にすることができ、流体制御器の小型化を図ることができる。また、移動体(16)の縦断面円弧状下端面が移動体受け(23)の凹所(23b)の底面に当接した状態で、移動体受け(23)がコイルばね(24)によって上向きに付勢されていることから、駆動装置(5)の移動体(16)と接続手段(6)の移動体受け(23)とは、この上向き付勢力によって連結され、駆動装置(5)の移動体(16)とステム(3)とを溶接やねじで一体物としたのと同様の効果が得られ、軸方向のがたつきが防止されている。また、駆動装置(5)内のロータにねじ機構がある場合、ねじ部に発生するねじの軸方向のがたつきをなくすことができる。さらにまた、駆動装置(5)の移動体(16)とステム(3)とを例えば溶接やねじなどにより接合した場合には、移動体(16)の軸とステム(3)の軸とが一体物となって、芯出しが難しく、芯が出ていない場合は、スラスト荷重が常にかかった状態となるため、作動中に問題が起こりやすいが、移動体受け(23)をコイルばね(24)で上向きに付勢することにより、移動体(16)の軸とステム(3)の軸とが接合されていなくても、移動体(16)と移動体受け(23)とが一体に移動するようになされているので、溶接やねじ込みなどの作業が不要でしかも移動体(16)の軸線とステム(3)の軸線との芯ずれがなく、スラスト荷重が発生しないために作動不良が起こりにくいという利点も有している。
【図面の簡単な説明】
【図１】この発明による流体制御器の第１実施形態を示す断面図である。
【図２】この発明による流体制御器の第２実施形態を示す断面図である。
【符号の説明】
(1) 流体制御器
(2) ボディ
(2a) 流体流入通路
(2b) 連通路
(2c) 流体流出通路
(3) ステム
(4) ホルダ
(5) リニア型のステッピングモータ（駆動装置）
(6) ステムと駆動装置との接続手段
(16) 移動体
(23) 移動体受け
(23b) 凹所
(24) 圧縮コイルばね（弾性部材）[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a fluid controller used in piping and fluid control devices.
[0002]
[Prior art]
Conventionally, a body having a fluid inflow passage, a fluid outflow passage, and a communication passage communicating both passages, and a stem whose tip portion blocks or opens the communication passage by being moved vertically in a vertical passage including the communication passage. And a fluid controller having a drive device that moves the stem up and down is well known, and among these, those using a stepping motor as the drive device have the advantage of high positioning accuracy, It is suitably used when a trace amount control is required (Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 60-263784
[Problems to be solved by the invention]
In the fluid controller using the stepping motor, a mechanism for converting the rotation of the motor into the vertical movement is required, and there is a problem that the vertical length of the fluid controller is increased due to the installation space of the mechanism.
[0005]
On the other hand, a linear driving stepping motor having a moving body that moves up and down has been developed as a driving device, and it is conceivable to use this driving device in a fluid controller. In this case, the connecting means for connecting the moving body of the driving device and the stem of the fluid controller does not cause backlash or misalignment, and the movement of the moving body does not impair the accuracy of the stem of the fluid controller. Communication is a new challenge.
[0006]
An object of the present invention is to provide a fluid controller that uses a linear driving stepping motor as a driving device, and that allows the movement of a moving body of the driving device to be transmitted to the stem of the fluid controller without impairing accuracy. .
[0007]
[Means for Solving the Problems and Effects of the Invention]
The fluid controller according to the present invention has a fluid inflow passage, a fluid outflow passage, a body having a communication passage communicating the two passages, and a vertical passage in the vertical passage including the communication passage, whereby the tip portion is a communication passage. In a fluid controller including a stem that shuts off or opens and a drive device that moves the stem up and down, the drive device is a linear drive stepping motor having a moving body that moves up and down without rotating , and the moving body The lower end surface of the movable body receiver is formed in a circular arc shape in the vertical cross section, and the upper end portion of the stem is provided with a moving body receiver that receives the lower end of the moving body of the driving device. features are formed into recesses upper end to be fitted it is, upwards by being biased in the elastic member, that are brought into contact from below to the mobile in a state where upward load is always took It is intended to.
[0008]
According to the fluid controller of the present invention, the linear controller stepping motor can be used as the drive device, whereby the fluid controller can be reduced in size, and the movable body receiver is urged upward by the elastic member. Since the moving body is in contact with the moving body from below with an upward load always applied, the moving body of the driving apparatus can be moved even if the moving body of the driving apparatus and the stem are not connected by welding or screws. Can be transmitted to the stem without backlash, and a fluid controller with high resolution that does not impair the advantage of high positioning accuracy of the stepping motor can be obtained.
[0009]
As the drive device, for example, a screw mechanism provided in a rotor of a stepping motor to linearly move the shaft (moving body) is used. In this case, there is a problem with the fluid controller in which the axial play generated between the male screw and the female screw constituting the screw mechanism controls a small amount, but the elastic member constantly pushes the moving body upward. Even if there is a screw mechanism in the rotor, the axial play can be eliminated.
[0010]
It is preferable that the lower end surface of the moving body of the driving device is formed in an arc shape in the longitudinal section, and a recess is formed in the upper end portion of the moving body receiver. In this way, the elastic member biases the moving body receiver upward in a state where the lower end of the moving body is fitted in the recess of the moving body receiver. Even if there is a misalignment between the axis of the moving body and the shaft of the stem, the misalignment can be absorbed to the extent that there is no problem in operation.
[0011]
Even if the bottom surface of the recess is a flat bottom surface, there is no problem in operation. However, by making the bottom surface of the cross section arcuate, the lower end surface of the vertical cross section of the moving body of the drive device is Since the elastic member urges the moving body receiver upward while being in contact with the arc-shaped bottom surface, the misalignment between the axis of the moving body and the axis of the stem is more reliably absorbed.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right refer to the left and right in the figure.
[0013]
FIG. 1 shows a first embodiment of the fluid controller of the present invention.
[0014]
The fluid controller (1) of this embodiment comprises a bottomed cylindrical body (2) having a tubular left protrusion (7) and a tubular right protrusion (8) at the bottom, and a body (2) A columnar stem (3) inserted in a vertically movable manner inside, a cylindrical holder (4) fitted on the upper end portion of the body (2), and a drive device attached to the upper end of the holder (4) ( 5) and connecting means (6) between the stem housed in the holder (4) and the driving device.
[0015]
The drive device (5) is a linear drive stepping motor, and includes a casing (11), a stator and a rotor (not shown) housed in the casing (11), and a lower wall of the casing (11). And a projecting moving body (16).
[0016]
The casing (11) and the holder (4) of the driving device (5) are formed by connecting the casing (4) to the through-fitting screw portion (4b) provided at equal intervals on the disc-like flange portion (4a) at the upper end of the holder (4). 11) The bolt (12) which penetrates the overhanging part (17) of the lower wall is connected by being screwed together.
[0017]
The lower end of the body (2) has a fluid inflow passage (2a) that extends slightly upward from near the center and leads to the left protrusion (7) and the inner end of the fluid inflow passage (2a). The communication passage (2b) extending upward and the stem protrusion (19) extending from the upper end of the communication passage (2b) to the upper end of the body (2) and extending rightward from the lower end portion (8) A fluid outflow passage (2c) communicating with the inner passage is provided.
[0018]
The stem (3) has a lower end portion (3a) having a tapered cone shape, and a lower flange portion (3b) is provided above the conical portion (3a). The upper end of the body (2) is provided with an upper flange part (20) and a seal member (26) for guiding the stem (3) so as to move up and down and preventing fluid leakage from the stem guide path (19). ing. A bellows (21) is provided between the lower surface of the upper flange portion (20) and the upper surface of the lower flange portion (3b) of the stem (3). A guide packing (27) serving as a guide for the stem (3) is disposed between the inner periphery of the upper flange portion (20) and the outer periphery of the stem (3).
[0019]
The upper end of the stem (3) is above the upper end of the body (2), and a male screw portion (22) is formed at the upper end of the stem (3). The lower part of the moving body receiver (23) that receives the moving body (16) of the drive device (5) is screwed to the male thread portion (22).
[0020]
The connecting means (6) between the stem and the drive device is composed of a moving body receiver (23) and a compression coil spring (24) as an elastic member for biasing the moving body receiver (23).
[0021]
The movable body receiver (23) is formed in a stepped columnar shape, and the flange (23a) at the upper end thereof has a sufficient clearance with respect to the inner periphery of the holder (4) and is slidable. Yes. An inward flange portion (4c) is provided on the lower end portion of the holder (4), and the upper surface of the inward flange portion (4c) and the upper surface of the flange portion (23a) of the upper end of the moving body receiver (23) Thus, a compression coil spring (elastic member) (24) that urges the moving body receiver (23) upward is received. Thereby, the moving body receiver (23) is brought into contact with the moving body (16) from below in a state where an upward load is always applied.
[0022]
The lower end of the moving body (16) of the driving device (5) is formed in a convex arc shape in the longitudinal section, and the upper end of the moving body receiver (23) has a bottom surface having an arc shape in cross section. A recess (23b) into which the portion is fitted is formed. The diameter of the recess (23b) is slightly larger than the diameter of the lower end portion of the moving body (16), and the radius of the arc-shaped bottom surface of the recess (23b) is the convexity of the lower end portion of the moving body (16). It is formed slightly larger than the radius of the arcuate surface. Therefore, the lower end portion of the moving body (16) is fitted in the recess (23b) of the moving body receiver (23) with some play.
[0023]
According to the fluid controller of this embodiment, the length of the portion excluding the body (length of the actuator portion) can be reduced to about ½ compared to the conventional one, and the fluid controller can be downsized. Can be achieved. In addition, the moving body receiver (23) is a coil spring (24 ), The moving body (16) of the driving device (5) and the moving body receiver (23) of the connecting means (6) are coupled by this upward biasing force, and the driving device ( The same effect as that obtained by integrating the moving body (16) and the stem (3) of 5) by welding or screws is obtained, and shakiness in the axial direction is prevented. Further, when the rotor in the drive device (5) has a screw mechanism, the axial rattling of the screw generated in the screw portion can be eliminated by the upward biasing force. Furthermore, when the movable body (16) of the drive device (5) and the stem (3) are joined by welding or screws, for example, the shaft of the movable body (16) and the shaft of the stem (3) are integrated. If the center is difficult to align, the thrust load is always applied and problems are likely to occur during operation. By urging upward, the moving body (16) and the moving body receiver (23) move together even if the shaft of the moving body (16) and the shaft of the stem (3) are not joined. Therefore, work such as welding and screwing is unnecessary, and there is no misalignment between the shaft of the moving body (16) and the shaft of the stem (3), and no thrust load is generated, so malfunctions are unlikely to occur. It also has the advantage.
[0024]
FIG. 2 shows a second embodiment of the fluid controller of the present invention.
[0025]
The fluid controller (1) of this embodiment is different from that of the first embodiment in the connection means (6) between the stem and the driving device. That is, in this embodiment, in the connecting means (6) between the stem and the driving device, the bottom surface of the recess (23b) of the moving body receiver (23) into which the lower end of the moving body (16) is fitted is a flat surface. ing. The diameter of the recess (23b) is slightly larger than the diameter of the lower end portion of the movable body (16), and the lower end portion of the movable body (16) has a slight play and the movable body receiver (23). It fits into the recess (23b).
[0026]
Other configurations of the second embodiment are the same as those of the first embodiment, and the same components are denoted by the same reference numerals and description thereof is omitted.
[0027]
In the fluid controller of this embodiment, the bottom surface of the recess (23b) of the movable body receiver (23) is flat, but has the same operational effects as those of the first embodiment. That is, the length of the portion excluding the body (the length of the actuator portion) can be reduced to about ½ compared to the conventional one, and the fluid controller can be downsized. Further, the moving body receiver (23) is directed upward by the coil spring (24) in a state where the lower end surface of the moving object (16) has an arcuate cross-section and a bottom surface of the recess (23b) of the moving body receiver (23). Therefore, the moving body (16) of the driving device (5) and the moving body receiver (23) of the connecting means (6) are coupled by this upward biasing force, and the driving device (5) An effect similar to that obtained by integrating the movable body (16) and the stem (3) by welding or screws is obtained, and shakiness in the axial direction is prevented. In addition, when the rotor in the drive device (5) has a screw mechanism, it is possible to eliminate the shakiness in the axial direction of the screw generated in the screw portion. Furthermore, when the movable body (16) of the drive device (5) and the stem (3) are joined by welding or screws, for example, the shaft of the movable body (16) and the shaft of the stem (3) are integrated. If the center is difficult and the center is not centered, the thrust load is always applied, so problems are likely to occur during operation, but the moving body receiver (23) is attached to the coil spring (24). By urging upward, the moving body (16) and the moving body receiver (23) move together even if the shaft of the moving body (16) and the shaft of the stem (3) are not joined. Therefore, work such as welding and screwing is unnecessary, and there is no misalignment between the axis of the moving body (16) and the axis of the stem (3), and no thrust load is generated, so malfunctions are unlikely to occur. It also has the advantage.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a first embodiment of a fluid controller according to the present invention.
FIG. 2 is a cross-sectional view showing a second embodiment of the fluid controller according to the present invention.
[Explanation of symbols]
(1) Fluid controller
(2) Body
(2a) Fluid inflow passage
(2b) Communication passage
(2c) Fluid outflow passage
(3) Stem
(4) Holder
(5) Linear stepping motor (drive device)
(6) Means for connecting the stem and drive unit
(16) Mobile object
(23) Mobile object receiver
(23b) Recess
(24) Compression coil spring (elastic member)
Claims (2)
駆動装置は、回転せずに上下移動する移動体を有するリニア駆動のステッピングモータとされ、移動体の下端面は、縦断面円弧状に形成され、ステムの上端部に、駆動装置の移動体の下端を受ける移動体受けが設けられ、移動体受けは、底面が断面円弧状で移動体下端部が嵌め入れられる凹所が上端部に形成されて、弾性部材に上向きに付勢されることによって、上向きの荷重が常にかかった状態で移動体に下から当接させられていることを特徴とする流体制御器。A body having a fluid inflow passage, a fluid outflow passage, and a communication passage communicating both passages, a stem whose tip portion blocks or opens the communication passage by being moved vertically in a vertical passage including the communication passage, and In a fluid controller comprising a drive device for moving the stem up and down,
The driving device is a linear drive stepping motor having a moving body that moves up and down without rotating. The lower end surface of the moving body is formed in an arc of a vertical cross section, and the moving body of the driving device is formed at the upper end of the stem. A movable body receiver for receiving the lower end is provided, and the movable body receiver is formed by forming a recess in the upper end portion in which the bottom surface has a circular arc shape and the lower end portion of the movable body is fitted, and is urged upward by the elastic member. A fluid controller characterized in that it is brought into contact with the moving body from below in a state where an upward load is always applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003123170A JP4143761B2 (en) | 2003-04-28 | 2003-04-28 | Fluid controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003123170A JP4143761B2 (en) | 2003-04-28 | 2003-04-28 | Fluid controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004324833A JP2004324833A (en) | 2004-11-18 |
| JP4143761B2 true JP4143761B2 (en) | 2008-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003123170A Expired - Fee Related JP4143761B2 (en) | 2003-04-28 | 2003-04-28 | Fluid controller |
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| Country | Link |
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| JP (1) | JP4143761B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5435902B2 (en) | 2008-07-07 | 2014-03-05 | サーパス工業株式会社 | Flow control valve |
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| Publication number | Publication date |
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| JP2004324833A (en) | 2004-11-18 |
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