JP4125738B2 - 半導体発光素子 - Google Patents
半導体発光素子 Download PDFInfo
- Publication number
- JP4125738B2 JP4125738B2 JP2005120209A JP2005120209A JP4125738B2 JP 4125738 B2 JP4125738 B2 JP 4125738B2 JP 2005120209 A JP2005120209 A JP 2005120209A JP 2005120209 A JP2005120209 A JP 2005120209A JP 4125738 B2 JP4125738 B2 JP 4125738B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- emitting device
- semiconductor light
- light
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 49
- 239000000758 substrate Substances 0.000 claims description 89
- 238000005253 cladding Methods 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 238000009751 slip forming Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 19
- 230000008569 process Effects 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 230000000994 depressogenic effect Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Description
上述したように、本発明によると、チップスケールの半導体発光素子に用いられる基板上面の各辺に沿って連続的に形成された側部パターンを提供することにより、側面部において生成されたり側面部まで導波した光を回折または散乱させて上部または下部へ放出させると同時に、側面領域において内部全反射する光をより効果的に取り出すことにより光取り出し効率が大きく向上された半導体発光素子を提供することができる。
13 凹凸部
14、34、104 第1導電型クラッド層
15、35、105 活性層
16、36、106 第2導電型クラッド層
21 高屈折率層
22 突出部分
32、42、52、62、72、82、92、102 側部パターン
41a、51a、61a、81a、91a 基板上面
42a、52a、62a、82a、92a 傾斜された面
42b、82b 上面
62b、92b 底面
73、83、93、103 内部パターン
100 発光素子
107、108 電極
Claims (8)
- 基板並びに、前記基板上に順次に形成された第1導電型クラッド層、活性層、及び、第2導電型クラッド層を備えた半導体発光素子において、
前記基板上には、その上面の各辺に沿って連続的に形成されていて、当該発光素子の側面方向へ放出される光を当該発光素子の上部または下部へ散乱または回折させるよう、***部または沈下部から成る側部パターンと、
前記基板上面の内部領域に不連続的に形成され、前記活性層から発生した光を散乱または回折させるための凹部または凸部からなる内部パターンと、
を有することを特徴とする半導体発光素子。 - 前記基板の上面は四角形であり、
前記側部パターンは、4辺に沿って形成されていること、
を特徴とする請求項1に記載の半導体発光素子。 - 前記側部パターンは、前記基板上面の内部に向かって傾斜された面を有する前記***部で構成されていること、
を特徴とする請求項1または2に記載の半導体発光素子。 - 前記側部パターンを構成する前記***部は、前記基板上面の結晶面と同一な上面を有すること、
を特徴とする請求項1から3のいずれか一項に記載の半導体発光素子。 - 前記側部パターンは、前記基板の外部に向かって傾斜された面を有する前記沈下部で構成されていること、
を特徴とする請求項1または2に記載の半導体発光素子。 - 前記側部パターンを構成する前記沈下部は、前記基板上面の結晶面と同一な底面を有すること、
を特徴とする請求項1、2及び5のいずれか一項に記載の半導体発光素子。 - 前記第1導電型クラッド層、前記第2導電型クラッド層、及び、前記活性層は、窒化物系半導体層であること、
を特徴とする請求項1から6のいずれか一項に記載の半導体発光素子。 - 前記基板は、サファイア、SiC、Si、または、GaAs基板であること、
を特徴とする請求項1から7のいずれか一項に記載の半導体発光素子。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040089313A KR100664988B1 (ko) | 2004-11-04 | 2004-11-04 | 광추출효율이 향상된 반도체 발광소자 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006135285A JP2006135285A (ja) | 2006-05-25 |
JP4125738B2 true JP4125738B2 (ja) | 2008-07-30 |
Family
ID=36260769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005120209A Active JP4125738B2 (ja) | 2004-11-04 | 2005-04-18 | 半導体発光素子 |
Country Status (3)
Country | Link |
---|---|
US (3) | US7692201B2 (ja) |
JP (1) | JP4125738B2 (ja) |
KR (1) | KR100664988B1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7781789B2 (en) * | 2006-11-15 | 2010-08-24 | The Regents Of The University Of California | Transparent mirrorless light emitting diode |
JP4957130B2 (ja) * | 2006-09-06 | 2012-06-20 | 日立電線株式会社 | 発光ダイオード |
EP2087563B1 (en) | 2006-11-15 | 2014-09-24 | The Regents of The University of California | Textured phosphor conversion layer light emitting diode |
WO2008073400A1 (en) | 2006-12-11 | 2008-06-19 | The Regents Of The University Of California | Transparent light emitting diodes |
US8101447B2 (en) * | 2007-12-20 | 2012-01-24 | Tekcore Co., Ltd. | Light emitting diode element and method for fabricating the same |
JP5150684B2 (ja) | 2010-07-13 | 2013-02-20 | 株式会社東芝 | 半導体発光素子および半導体発光素子の製造方法 |
TWI470829B (zh) * | 2011-04-27 | 2015-01-21 | Sino American Silicon Prod Inc | 磊晶基板的製作方法、發光二極體,及其製作方法 |
JP6028690B2 (ja) * | 2013-08-06 | 2016-11-16 | 豊田合成株式会社 | Iii 族窒化物半導体発光素子 |
JP6226681B2 (ja) * | 2013-10-09 | 2017-11-08 | エルシード株式会社 | Led素子 |
JP2018022919A (ja) * | 2017-10-06 | 2018-02-08 | エルシード株式会社 | Led素子 |
KR102427640B1 (ko) | 2017-12-19 | 2022-08-01 | 삼성전자주식회사 | 자외선 반도체 발광소자 |
US11592166B2 (en) | 2020-05-12 | 2023-02-28 | Feit Electric Company, Inc. | Light emitting device having improved illumination and manufacturing flexibility |
US11876042B2 (en) | 2020-08-03 | 2024-01-16 | Feit Electric Company, Inc. | Omnidirectional flexible light emitting device |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5627851A (en) * | 1995-02-10 | 1997-05-06 | Ricoh Company, Ltd. | Semiconductor light emitting device |
GB9511336D0 (en) * | 1995-06-05 | 1995-08-02 | Secr Defence | Reflecting semiconductor substrates |
US5956568A (en) * | 1996-03-01 | 1999-09-21 | Motorola, Inc. | Methods of fabricating and contacting ultra-small semiconductor devices |
US6057565A (en) * | 1996-09-26 | 2000-05-02 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device including a non-stoichiometric compound layer and manufacturing method thereof |
JPH1168158A (ja) * | 1997-08-20 | 1999-03-09 | Sanyo Electric Co Ltd | 窒化ガリウム系化合物半導体装置 |
JP3625377B2 (ja) * | 1998-05-25 | 2005-03-02 | ローム株式会社 | 半導体発光素子 |
JP3592553B2 (ja) * | 1998-10-15 | 2004-11-24 | 株式会社東芝 | 窒化ガリウム系半導体装置 |
JP3511372B2 (ja) * | 1999-08-31 | 2004-03-29 | シャープ株式会社 | 半導体発光素子およびそれを使用した表示装置 |
JP2002016311A (ja) * | 2000-06-27 | 2002-01-18 | Sharp Corp | 窒化ガリウム系発光素子 |
WO2002059552A2 (en) * | 2000-11-08 | 2002-08-01 | Leonard Reiffel | Product and method for measuring temperature in flowing objects |
US6881981B2 (en) * | 2001-01-04 | 2005-04-19 | Sharp Kabushiki Kaisha | Nitride semiconductor light emitting device chip |
WO2002056435A1 (en) * | 2001-01-15 | 2002-07-18 | Sharp Kabushiki Kaisha | Nitride semiconductor laser element and optical device containing it |
KR100632760B1 (ko) * | 2001-03-21 | 2006-10-11 | 미츠비시 덴센 고교 가부시키가이샤 | 반도체 발광 소자 |
JP3772098B2 (ja) * | 2001-05-15 | 2006-05-10 | シャープ株式会社 | 窒化物系半導体発光装置 |
JP4055503B2 (ja) * | 2001-07-24 | 2008-03-05 | 日亜化学工業株式会社 | 半導体発光素子 |
DE10148227B4 (de) * | 2001-09-28 | 2015-03-05 | Osram Opto Semiconductors Gmbh | Strahlungsemittierender Halbleiterchip, Verfahren zu dessen Herstellung und strahlungsemittierendes Bauelement |
WO2003038957A1 (en) * | 2001-10-29 | 2003-05-08 | Sharp Kabushiki Kaisha | Nitride semiconductor device, its manufacturing method, and semiconductor optical apparatus |
JP3715627B2 (ja) * | 2002-01-29 | 2005-11-09 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
US7071494B2 (en) * | 2002-12-11 | 2006-07-04 | Lumileds Lighting U.S. Llc | Light emitting device with enhanced optical scattering |
US7042150B2 (en) * | 2002-12-20 | 2006-05-09 | Showa Denko K.K. | Light-emitting device, method of fabricating the device, and LED lamp using the device |
US6781160B1 (en) * | 2003-06-24 | 2004-08-24 | United Epitaxy Company, Ltd. | Semiconductor light emitting device and method for manufacturing the same |
US7622742B2 (en) * | 2003-07-03 | 2009-11-24 | Epivalley Co., Ltd. | III-nitride compound semiconductor light emitting device |
TWI290402B (en) * | 2003-10-24 | 2007-11-21 | Ind Tech Res Inst | Edge-emitting laser with circular beam |
JP4067504B2 (ja) * | 2004-03-17 | 2008-03-26 | 三洋電機株式会社 | 光導波路及びその製造方法 |
KR100568300B1 (ko) * | 2004-03-31 | 2006-04-05 | 삼성전기주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
US7419912B2 (en) * | 2004-04-01 | 2008-09-02 | Cree, Inc. | Laser patterning of light emitting devices |
JP2006196631A (ja) * | 2005-01-13 | 2006-07-27 | Hitachi Ltd | 半導体装置及びその製造方法 |
-
2004
- 2004-11-04 KR KR1020040089313A patent/KR100664988B1/ko active IP Right Grant
-
2005
- 2005-04-05 US US11/098,802 patent/US7692201B2/en active Active
- 2005-04-18 JP JP2005120209A patent/JP4125738B2/ja active Active
-
2009
- 2009-11-23 US US12/624,106 patent/US8071994B2/en active Active
-
2011
- 2011-11-01 US US13/286,881 patent/US8455906B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR100664988B1 (ko) | 2007-01-09 |
KR20060040100A (ko) | 2006-05-10 |
US20060091376A1 (en) | 2006-05-04 |
US20100065877A1 (en) | 2010-03-18 |
US20120043557A1 (en) | 2012-02-23 |
US8071994B2 (en) | 2011-12-06 |
US8455906B2 (en) | 2013-06-04 |
JP2006135285A (ja) | 2006-05-25 |
US7692201B2 (en) | 2010-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4125738B2 (ja) | 半導体発光素子 | |
JP5206923B2 (ja) | 半導体発光素子 | |
JP5157081B2 (ja) | 半導体発光素子及び半導体発光素子の製造方法 | |
JP5181371B2 (ja) | 半導体発光装置 | |
KR100631133B1 (ko) | 수직구조 질화물계 반도체 발광 다이오드 | |
US8614458B2 (en) | Patterned substrate for light emitting diode and light emitting diode employing the same | |
JP2018078310A (ja) | 発光ダイオード及びそれを製造する方法 | |
JP4311173B2 (ja) | 半導体発光素子 | |
US20100178616A1 (en) | Method of making a rough substrate | |
KR20140118654A (ko) | 발광 다이오드 칩 | |
JP5168890B2 (ja) | 半導体発光素子及び半導体発光素子の製造方法 | |
JP5023674B2 (ja) | 半導体発光素子、半導体発光素子の製造方法及び半導体発光装置 | |
JP2009038377A (ja) | Iii族窒化物半導体発光素子 | |
KR101171330B1 (ko) | 개선된 발광 효율을 갖는 발광 다이오드 | |
JP4881492B2 (ja) | 半導体発光素子 | |
JP4258191B2 (ja) | 窒化物半導体発光素子とその製造方法 | |
KR20130128745A (ko) | 기판 내에 보이드를 갖는 발광다이오드 및 그의 제조방법 | |
KR101106138B1 (ko) | 개선된 발광 효율을 갖는 발광다이오드 및 제조방법 | |
KR100843455B1 (ko) | 질화물 반도체 발광소자 및 제조 방법 | |
KR100787361B1 (ko) | 발광 다이오드 | |
KR101625126B1 (ko) | 반도체 발광소자 및 그 제조방법 | |
KR20110019643A (ko) | 반도체 광소자 및 그 제조방법 | |
JP2006287026A (ja) | 発光素子およびこれを用いた発光装置 | |
JP2008166609A (ja) | 半導体発光素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080415 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080508 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4125738 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120516 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120516 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 5 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
S633 | Written request for registration of reclamation of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313633 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 5 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 5 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 5 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |