JP4098780B2 - Laser equipment - Google Patents

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JP4098780B2
JP4098780B2 JP2005006163A JP2005006163A JP4098780B2 JP 4098780 B2 JP4098780 B2 JP 4098780B2 JP 2005006163 A JP2005006163 A JP 2005006163A JP 2005006163 A JP2005006163 A JP 2005006163A JP 4098780 B2 JP4098780 B2 JP 4098780B2
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cooling water
housing
laser
heat generating
water channel
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JP2006196644A (en
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祐司 西川
宏之 吉田
久忠 町田
明彦 西尾
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FANUC Corp
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Description

本発明は、レーザ装置に関し、より詳細には、装置内部の結露防止が図られたレーザ装置に関する。   The present invention relates to a laser device, and more particularly to a laser device in which dew condensation inside the device is prevented.

従来のレーザ装置は一般に、筐体と、筐体の内部に配置されるレーザ発振器とを備えた構成を有する。またレーザ発振器はレーザ発振のための電子部品及び光学部品を有するが、これらの部品の中には、高温加熱による故障や誤動作を防止するために冷却を要するものがある。この冷却のためには、配管等を用いて筐体外から筐体内へ冷却水を導入し、電子部品や光学部品と冷却水との間で熱交換させた後にその冷却水を筐体外へ排出する方法が一般的である。   Conventional laser devices generally have a configuration including a casing and a laser oscillator disposed inside the casing. Laser oscillators have electronic components and optical components for laser oscillation, and some of these components require cooling to prevent failure and malfunction due to high-temperature heating. For this cooling, cooling water is introduced from the outside of the housing into the housing using piping or the like, and after the heat exchange between the electronic components and optical components and the cooling water, the cooling water is discharged outside the housing. The method is common.

上述の構成では、冷却水の温度とレーザ装置設置場所の湿度との関係によっては、電子部品又は光学部品の表面に結露が生じる場合がある。一般に筐体の密閉性は完全ではないため、レーザ設置場所の外気湿度の影響が筐体内部にも及ぶからである。この結露により生じた水分は、電子部品の電気的短絡や光学部品の曇り等の不具合を生じさせ、結果としてレーザビームの出力低下やビーム拡散角の増大等のレーザ装置性能の悪化に至る虞がある。このような不具合を防止するために、例えば特許文献１には、乾燥空気を筐体内に導入することによって筐体内の湿度を下げ、結露防止を図るレーザ発振装置が開示されている。   In the above-described configuration, dew condensation may occur on the surface of the electronic component or the optical component depending on the relationship between the temperature of the cooling water and the humidity of the laser device installation location. This is because, generally, the sealing property of the casing is not perfect, and the influence of the outside air humidity at the laser installation location also reaches the inside of the casing. Moisture generated by this condensation may cause problems such as electrical short circuits of electronic components and fogging of optical components, resulting in deterioration of laser device performance such as a decrease in laser beam output and an increase in beam diffusion angle. is there. In order to prevent such inconvenience, for example, Patent Document 1 discloses a laser oscillation device that reduces the humidity in the housing by introducing dry air into the housing to prevent condensation.

特開平６−２６０７０８号公報JP-A-6-260708

特許文献１に記載されるような乾燥空気を筐体内に導入する方法では、乾燥空気を供給するためのランニングコストが無視できない。また導入する乾燥空気に含まれる汚染物質がレーザ発振に悪影響を与える場合があるが、乾燥空気をそのような汚染物質を含まないレベルにまで清浄化することは非常に困難であり、可能であるにしてもさらなるコストを要する。   In the method of introducing dry air into the casing as described in Patent Document 1, the running cost for supplying dry air cannot be ignored. In addition, contaminants contained in the introduced dry air may adversely affect laser oscillation, but it is extremely difficult and possible to clean the dry air to a level that does not contain such contaminants. But it costs more.

従って本発明は、簡易かつ低コストな手段を用いて筐体内の結露を効果的に防止できるレーザ装置を提供することを目的とする。   Accordingly, an object of the present invention is to provide a laser device that can effectively prevent condensation in the housing using simple and low-cost means.

上記目的を達成するために、請求項１に記載の発明は、筐体と、前記筐体内に配置されるレーザ発振器と、前記筐体内に配置されるとともに前記レーザ発振器の作動により発熱する発熱部と、前記発熱部を冷却する冷却水を流すための冷却水路と、前記冷却水路の表面に結露した水分を前記筐体の外側に放出する水分放出手段と、を有するレーザ装置を提供する。   In order to achieve the above-mentioned object, the invention according to claim 1 includes a housing, a laser oscillator disposed in the housing, and a heat generating portion disposed in the housing and generating heat by the operation of the laser oscillator. And a cooling water channel for flowing cooling water for cooling the heat generating part, and a water release means for releasing water condensed on the surface of the cooling water channel to the outside of the housing.

請求項２に記載の発明は、請求項１に記載のレーザ装置において、前記水分放出手段は吸水性材料を有し、前記吸水性材料は、前記冷却水路の一部に接触するとともに、前記筐体に形成された開口部を通って前記筐体の外側に延びるように構成される、レーザ装置を提供する。   According to a second aspect of the present invention, in the laser apparatus according to the first aspect, the moisture releasing means has a water absorbing material, and the water absorbing material contacts a part of the cooling water channel and the housing. Provided is a laser device configured to extend outside the housing through an opening formed in a body.

請求項３に記載の発明は、請求項１又は２に記載のレーザ装置において、前記筐体内の空気を強制的に攪拌するファンをさらに有する、レーザ装置を提供する。   According to a third aspect of the present invention, there is provided the laser device according to the first or second aspect, further comprising a fan for forcibly stirring the air in the casing.

請求項４に記載の発明は、請求項１〜３のいずれか１項に記載のレーザ装置において、前記冷却水路を流れる冷却水による前記発熱部の過冷却を防止する過冷却防止手段をさらに有する、レーザ装置を提供する。   According to a fourth aspect of the present invention, in the laser device according to any one of the first to third aspects, the apparatus further includes a supercooling prevention means for preventing the superheater from being overcooled by the cooling water flowing through the cooling water passage. A laser apparatus is provided.

請求項５に記載の発明は、請求項４に記載のレーザ装置において、前記過冷却防止手段は、前記レーザ発振器が作動していないときに前記発熱部を冷却する冷却水量を低減するように制御された自動弁を有する、レーザ装置を提供する。   According to a fifth aspect of the present invention, in the laser device according to the fourth aspect, the overcooling prevention means controls to reduce the amount of cooling water that cools the heat generating portion when the laser oscillator is not operating. Provided is a laser device having an automatic valve.

請求項６に記載の発明は、請求項１〜５のいずれか１項に記載のレーザ装置において、前記冷却水路は金属製配管を含む、レーザ装置を提供する。   A sixth aspect of the present invention provides the laser apparatus according to any one of the first to fifth aspects, wherein the cooling water channel includes a metal pipe.

本発明に係るレーザ装置においては、冷却水路の表面に結露した水分を積極的に筐体外へ排出することができるので、筐体内の湿度を下げて発熱部での望ましくない結露を低減又は防止することができる。また冷却水路での結露はファンの使用によってさらに促進することができ、結果として筐体内の湿度をさらに低下させることができる。さらに発熱部への冷却水量を調節し、発熱部の過冷却を防止することも可能である。   In the laser apparatus according to the present invention, moisture condensed on the surface of the cooling water channel can be positively discharged out of the casing, so that the humidity in the casing is lowered to reduce or prevent undesirable condensation in the heat generating portion. be able to. Further, condensation in the cooling water channel can be further promoted by using a fan, and as a result, the humidity in the housing can be further reduced. Furthermore, it is possible to prevent the cooling of the heat generating part by adjusting the amount of cooling water to the heat generating part.

以下、図面を参照しながら本発明を詳細に説明する。図１に基本構成を示すレーザ装置１０は、筐体１２と、筐体１２内に配置されるレーザ発振器１４とを有する。レーザ発振器１４は、レーザ発振等の作動により発熱する発熱部１６を有する。発熱部１６は、レーザ発振のための電源等の電子部品１８及びミラー等の光学部品２０を含む。発熱部１６を冷却するための冷却水は、配管等から構成される冷却水路２２によって筐体１２の外部から供給され、発熱部１６を冷却（すなわち発熱部１６と熱交換）した後に筐体１２の外部へ排出される。   Hereinafter, the present invention will be described in detail with reference to the drawings. A laser apparatus 10 having a basic configuration shown in FIG. 1 includes a housing 12 and a laser oscillator 14 disposed in the housing 12. The laser oscillator 14 has a heat generating portion 16 that generates heat by an operation such as laser oscillation. The heat generating portion 16 includes an electronic component 18 such as a power source for laser oscillation and an optical component 20 such as a mirror. Cooling water for cooling the heat generating unit 16 is supplied from the outside of the housing 12 by a cooling water channel 22 constituted by piping or the like, and after cooling the heat generating unit 16 (that is, heat exchange with the heat generating unit 16), the housing 12 It is discharged outside.

冷却水路２２を構成する配管は、金属等の熱伝導率の高い材料から作製される。そうすることにより、冷却水路２２の表面は筐体１２内の発熱部１６の表面よりも温度が低くなり、結露しやすくなる。そこで図１に示すように、冷却水路２２において結露した水分を積極的に筐体１２の外側へ放出する水分放出手段２４を設けることにより、筐体１２内の湿度を下げることができる。水分放出手段２４としては、例えば図２に示すように、筐体１２に形成された適当な開口部を通って冷却水路２２から筐体１２の外側に延びる布帛又はスポンジ等の吸水性材料が好ましい。詳細には吸水性材料２４は、冷却水路すなわち配管２２の一部２２ａ（例えば結露した水が配管２２を伝って流れ落ちてくる部位）に巻き付け等により接触するとともに、冷却水路２２が挿入される筐体１２の開口部２６から筐体１２の外側に延びるように布設される。このような構成により、配管２２で結露した水分を、吸水性材料内を拡散させて効率よく筐体１２の外に放出することができる。   The piping constituting the cooling water channel 22 is made of a material having high thermal conductivity such as metal. By doing so, the temperature of the surface of the cooling water channel 22 becomes lower than the surface of the heat generating part 16 in the housing 12, and condensation tends to occur. Therefore, as shown in FIG. 1, the moisture inside the casing 12 can be lowered by providing the moisture releasing means 24 that positively releases the moisture condensed in the cooling water channel 22 to the outside of the casing 12. As the moisture release means 24, for example, as shown in FIG. 2, a water-absorbing material such as a cloth or a sponge that extends from the cooling water passage 22 to the outside of the housing 12 through an appropriate opening formed in the housing 12 is preferable. . Specifically, the water-absorbing material 24 contacts the cooling water channel, that is, a part 22a of the pipe 22 (for example, a portion where condensed water flows down through the pipe 22) by wrapping or the like, and the housing into which the cooling water channel 22 is inserted. It is laid so as to extend from the opening 26 of the body 12 to the outside of the housing 12. With such a configuration, moisture condensed in the pipe 22 can be diffused through the water-absorbing material and efficiently discharged out of the housing 12.

筐体１２は、一般のレーザ装置の筐体と同様に、筐体１２の内外間のある程度の通気は制限するが、完全な密閉性は有さない。従ってレーザ装置１０の設置場所の雰囲気の湿度が変化すれば、その影響を受けて筐体１２内の湿度もいくらか変化する。上述の結露水放出手段２４により、配管２２で結露した水を筐体内で再び気化する前に外部に排出することができるため、筐体１２の密閉性が幾分不十分であっても筐体内の湿度を低く維持することができる。従って筐体内の空気の露点が下がり、結果として好ましくない発熱部１６での結露の発生を抑制することができる。   The housing 12 restricts a certain amount of ventilation between the inside and the outside of the housing 12 as in the case of a general laser device, but does not have a complete sealing property. Therefore, if the humidity of the atmosphere at the installation location of the laser device 10 changes, the humidity in the housing 12 also changes somewhat due to the influence. The condensed water discharge means 24 described above allows the water condensed in the pipe 22 to be discharged to the outside before being vaporized again in the casing, so that the casing 12 can be sealed even if the sealing performance of the casing 12 is somewhat insufficient. The humidity can be kept low. Therefore, the dew point of the air in the housing is lowered, and as a result, it is possible to suppress the occurrence of dew condensation in the heat generating portion 16 which is not preferable.

レーザ装置１０は、図３に示すように、レーザ装置の性能には影響しない冷却水路２２での結露をさらに促進するための結露促進手段として、好ましくは電動式のファン２８を有することができる。ファン２８は、筐体１２内の空気を強制的に攪拌し、好ましくは配管２２に吹き付けるように構成される。ファン２８を作動させることにより、配管２２の表面に接する空気が常に更新されるので、ファン２８を作動させない場合よりも配管２２の表面での結露量を増やすことができる。従って発熱部１６での結露をより発生しにくくすることができる。   As shown in FIG. 3, the laser device 10 can preferably include an electric fan 28 as dew condensation promoting means for further promoting dew condensation in the cooling water channel 22 that does not affect the performance of the laser device. The fan 28 is configured to forcibly agitate the air in the housing 12 and preferably blow it to the pipe 22. By operating the fan 28, the air in contact with the surface of the pipe 22 is constantly updated, so that the amount of condensation on the surface of the pipe 22 can be increased as compared with the case where the fan 28 is not operated. Accordingly, it is possible to make the condensation at the heat generating portion 16 less likely to occur.

レーザ発振が行われていないときは発熱部１６の発熱量は少ないので、レーザ発振停止時にもレーザ発振時と同流量の冷却水を発熱部１６に供給すると、発熱部１６が過冷却されて望ましくない結露を促進してしまうことになる。そこでレーザ装置１０は、発熱部１６の過冷却防止手段として、図３に示すように、電子部品１８への冷却水量を調節可能な自動弁３０及び光学部品２０への冷却水量を調節可能な自動弁３２を有することができる。自動弁３０及び３２は、レーザ発振停止時には全閉又はレーザ発振時より小流量の冷却水を流すように、図示しない制御装置によって制御可能である。このような制御により、発熱部１６の過冷却すなわち発熱部１６での結露の発生をさらに抑制することができる。   When the laser oscillation is not performed, the heat generation amount of the heat generating portion 16 is small. Therefore, even when the laser oscillation is stopped, supplying the same amount of cooling water as that during laser oscillation to the heat generating portion 16 causes the heat generating portion 16 to be overcooled, which is desirable. Will promote no condensation. Therefore, as shown in FIG. 3, the laser device 10 is an automatic valve 30 that can adjust the amount of cooling water to the electronic component 18 and an automatic device that can adjust the amount of cooling water to the optical component 20 as means for preventing overcooling of the heat generating portion 16. A valve 32 may be provided. The automatic valves 30 and 32 can be controlled by a control device (not shown) so that when the laser oscillation is stopped, the coolant is fully closed or a smaller flow rate of cooling water is supplied than when the laser oscillation is performed. By such control, it is possible to further suppress the overcooling of the heat generating portion 16, that is, the occurrence of condensation in the heat generating portion 16.

本発明に係るレーザ装置の基本構成を示す概略図である。It is the schematic which shows the basic composition of the laser apparatus concerning this invention. 図１の水分放出手段の具体的構成を示す部分拡大図である。It is a partial enlarged view which shows the specific structure of the water | moisture content discharge | release means of FIG. 電動ファン及び自動弁をさらに備えたレーザ装置の概略図である。It is the schematic of the laser apparatus further provided with the electric fan and the automatic valve.

符号の説明Explanation of symbols

１０ レーザ装置
１２ 筐体
１４ レーザ発振器
１６ 発熱部
１８ 電子部品
２０ 光学部品
２２ 冷却水路
２４ 水分放出手段
２６ 開口部
２８ ファン
３０、３２ 自動弁 DESCRIPTION OF SYMBOLS 10 Laser apparatus 12 Case 14 Laser oscillator 16 Heat generating part 18 Electronic component 20 Optical component 22 Cooling water channel 24 Water | moisture content discharge | release means 26 Opening part 28 Fan 30, 32 Automatic valve

Claims (5)

筐体と、
前記筐体内に配置されるレーザ発振器と、
前記筐体内に配置されるとともに前記レーザ発振器の作動により発熱する発熱部と、
前記発熱部を冷却する冷却水を流すための冷却水路と、
前記冷却水路の表面に結露した水分を前記筐体の外側に放出する吸水性材料と、
を有するレーザ装置であって、
前記吸水性材料は、前記冷却水路の一部に接触するとともに、前記筐体に形成された開口部を通って前記筐体の外側に延びるように構成される、レーザ装置。 A housing,
A laser oscillator disposed in the housing;
A heat generating part disposed in the housing and generating heat by the operation of the laser oscillator;
A cooling water channel for flowing cooling water for cooling the heat generating part;
A water-absorbing material that releases moisture condensed on the surface of the cooling water channel to the outside of the housing;
A laser device comprising :
The water absorbing material is configured to be in contact with a part of the cooling water channel and extend to the outside of the casing through an opening formed in the casing . 前記筐体内の空気を強制的に攪拌するファンをさらに有する、請求項１に記載のレーザ装置。 The laser apparatus according to claim 1 , further comprising a fan for forcibly stirring air in the housing . 前記冷却水路を流れる冷却水による前記発熱部の過冷却を防止する過冷却防止手段をさらに有する、請求項１又は２に記載のレーザ装置。 3. The laser device according to claim 1 , further comprising an overcooling prevention unit that prevents overcooling of the heat generating portion by the cooling water flowing through the cooling water passage . 前記過冷却防止手段は、前記レーザ発振器が作動していないときに前記発熱部を冷却する冷却水量を低減するように制御された自動弁を有する、請求項３に記載のレーザ装置。 The laser apparatus according to claim 3 , wherein the overcooling preventing unit includes an automatic valve controlled to reduce an amount of cooling water for cooling the heat generating portion when the laser oscillator is not operating . 前記冷却水路は金属製配管を含む、請求項１〜４のいずれか１項に記載のレーザ装置。 The laser apparatus according to claim 1, wherein the cooling water channel includes a metal pipe .
JP2005006163A 2005-01-13 2005-01-13 Laser equipment Expired - Fee Related JP4098780B2 (en)

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JP6235527B2 (en) * 2015-05-14 2017-11-22 ファナック株式会社 Laser device with a function to predict the occurrence of condensation
JP6259419B2 (en) 2015-06-01 2018-01-10 ファナック株式会社 Laser device having a function for determining whether or not the door can be opened
JP6166310B2 (en) * 2015-06-11 2017-07-19 ファナック株式会社 Laser device that cools laser oscillator, air cooler, and dehumidifier with common cooling water
JP6629801B2 (en) 2017-09-05 2020-01-15 ファナック株式会社 Water leak detection system for laser equipment
JP6640811B2 (en) 2017-10-06 2020-02-05 ファナック株式会社 Laser device with dew condensation prevention function
JP6687663B2 (en) * 2018-04-12 2020-04-28 ファナック株式会社 Laser device including heat transfer device for radiating heat inside housing to outside
JP7088861B2 (en) * 2019-02-12 2022-06-21 ファナック株式会社 Laser oscillator with enhanced dehumidifying function

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