JP4085127B1 - Removal suction device - Google Patents

Removal suction device Download PDF

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JP4085127B1
JP4085127B1 JP2007258982A JP2007258982A JP4085127B1 JP 4085127 B1 JP4085127 B1 JP 4085127B1 JP 2007258982 A JP2007258982 A JP 2007258982A JP 2007258982 A JP2007258982 A JP 2007258982A JP 4085127 B1 JP4085127 B1 JP 4085127B1
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upper movable
movable chamber
side chambers
intake
suction device
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JP2009082974A (en
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治 瀬川
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株式会社エムアンドシー
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Priority to PCT/JP2008/062155 priority patent/WO2009044574A1/en
Priority to KR1020107005067A priority patent/KR20100047887A/en
Priority to CN200880108069A priority patent/CN101801587A/en
Priority to TW097128067A priority patent/TW200938325A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials
    • B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

【課題】太陽電池用基板のパターニングに際して発生するアブレーション滓を良好に除去できる吸引装置を提供する。
【解決手段】上面が多孔状の吸気用面板１１Ａとされる上部可動チャンバ１１、上部可動チャンバ１１を吸気用面板１１Ａに平行する面内で一方向に移動せしめるリニア駆動部２０、リニア駆動部２０による上部可動チャンバ１１の移動方向に沿って平行に設けられるサイドチャンバ７，７、及び両サイドチャンバ７，７に接続する吸気源３５を有する。サイドチャンバ７は、それぞれ一対のローラ５，５間に巻き掛けた無端の走行ベルト６の内側に配置され、それらサイドチャンバ７，７には各々その長手方向に沿って走行ベルト６により覆われる開口部７Ａが形成される。走行ベルト６には、開口部７Ａに対応する位置で上部可動チャンバ１１に連結する通気管８が固設され、その通気管８を介して上部可動チャンバ１１とサイドチャンバ７，７との内部が連通する。
【選択図】図１The present invention provides a suction device capable of satisfactorily removing ablation defects generated during patterning of a substrate for a solar cell.
An upper movable chamber 11 having an intake top plate 11A having a porous upper surface, a linear drive unit 20 for moving the upper movable chamber 11 in one direction within a plane parallel to the intake face plate 11A, and a linear drive unit 20 Side chambers 7, 7 provided in parallel along the moving direction of the upper movable chamber 11, and an intake source 35 connected to both side chambers 7, 7. The side chambers 7 are arranged inside an endless traveling belt 6 wound between a pair of rollers 5 and 5, respectively, and the side chambers 7 and 7 each have an opening covered by the traveling belt 6 along the longitudinal direction thereof. Part 7A is formed. The running belt 6 is fixedly provided with a vent pipe 8 connected to the upper movable chamber 11 at a position corresponding to the opening 7A, and the inside of the upper movable chamber 11 and the side chambers 7 and 7 is connected through the vent pipe 8. Communicate.
[Selection] Figure 1

Description

本発明は、集積型薄膜太陽電池などを製造する際に用いられる吸引装置に係り、特にレーザビームによるパターニングの際に発生する薄膜のアブレーション滓を好適に除去することのできる吸引装置に関する。   The present invention relates to a suction device used when manufacturing an integrated thin film solar cell or the like, and more particularly, to a suction device capable of suitably removing ablation defects of a thin film generated during patterning with a laser beam.

一般に、薄膜太陽電池はガラスなどの透光性絶縁基板上に、薄膜として透明導電膜、光電変換層、及び裏面電極を順次積層するなどして構成されるが、集積型では通常、レーザビームにより薄膜を構成する各層を短冊状に分離して直列接続するパターニング（レーザパターニング）が行われる。   In general, a thin film solar cell is configured by sequentially laminating a transparent conductive film, a photoelectric conversion layer, and a back electrode as a thin film on a light-transmitting insulating substrate such as glass. Patterning (laser patterning) is performed in which the layers constituting the thin film are separated into strips and connected in series.

ここに、薄膜形成面を上向きにしてレーザパターニングを行うと、レーザビームにより取り除かれた薄膜の分離成分（アブレーション滓）が飛散し、そのアブレーション滓がパターニングされた薄膜部分に再付着して電気的に絶縁されるべき箇所を導電結合してしまい、その除去に大変なクリーニング作業を行う必要が生ずる。   When laser patterning is performed with the thin film formation surface facing upward, the thin film separation component (ablation flaw) removed by the laser beam scatters, and the ablation flaw reattaches to the patterned thin film portion and is electrically connected. The portion to be insulated is conductively coupled, and it is necessary to perform a great cleaning operation for the removal.

このため、近年では、薄膜に対するアブレーション滓の再付着を軽減することなどを目的として、薄膜形成面を下向きにし、その薄膜形成面に下方からレーザビームを照射するか、あるいは透光性絶縁基板を通して上方からレーザビームを照射してパターニングを行っているが、このとき発生するアブレーション滓が煙のように微細な粉塵として舞い上がることも少なくなく、これを放置した場合には当該アブレーション滓により薄膜が汚損されてしまう。   Therefore, in recent years, for the purpose of reducing the reattachment of the ablation flaws to the thin film, the thin film formation surface is directed downward, and the thin film formation surface is irradiated with a laser beam from below or through the light-transmitting insulating substrate. Patterning is performed by irradiating a laser beam from above, but the ablation soot generated at this time often rises as fine dust like smoke, and if left untreated, the thin film is damaged by the ablation soot. Will be.

そこで、凹部を有するステージ上に、ガラス基板を薄膜形成面が下向きとなる姿勢で配置すると共に、ステージの底部に集塵ダクトを連通せしめ、その集塵ダクトを集塵機に接続してアブレーション滓を回収するという提案がされている（例えば、特許文献１）。   Therefore, the glass substrate is placed on the stage with the concave part in a posture with the thin film forming surface facing down, and the dust collecting duct is connected to the bottom of the stage, and the dust collecting duct is connected to the dust collector to collect the ablation soot. (For example, patent document 1).

特開２００１−１１１０７８号公報Japanese Patent Laid-Open No. 2001-111078

しかしながら、集積型薄膜太陽電池などに係るパターニングでは、加工精度の関係上、レーザ発振器を定位置に固定し、ワークとなる太陽電池用基板を往復移動させる方式が採られるので、特許文献１に開示されるような集塵機をもつ装置では、その集塵機とステージとを繋ぐ可撓性の集塵ダクトが基板を載せたステージの往復移動により暴れ、これによる振動が基板に伝わってレーザビームの焦点深さがずれてしまったり、集塵ダクトが繰り返しの曲げ応力によって早期に破断してしまったりするという問題を惹起する。   However, in patterning related to an integrated thin film solar cell or the like, a method in which a laser oscillator is fixed at a fixed position and a substrate for a solar cell serving as a work is reciprocated is taken into consideration because of processing accuracy. In such a device with a dust collector, the flexible dust collection duct that connects the dust collector and the stage is disturbed by the reciprocating movement of the stage on which the substrate is placed, and the resulting vibration is transmitted to the substrate and the focal depth of the laser beam. This causes a problem that the dust collecting duct is displaced or the dust collecting duct is prematurely broken by repeated bending stress.

又、集塵ダクトはステージの底部中央に連通されるので、レーザビームの照射位置が中央から端部に移動したときに集塵効果が低下してしまう。これに鑑み、複数の集塵ダクトをステージの数カ所に連通させることも考えられるが、これではステージの底部で集塵ダクトが絡み合い、ステージの移動に支障を来してしまうことになる。又、集塵ダクトを排除して集塵機をステージに直結すれば、基板への伝播振動が大きくなって加工精度が大幅に低下してしまう。   In addition, since the dust collection duct communicates with the center of the bottom of the stage, the dust collection effect is reduced when the laser beam irradiation position moves from the center to the end. In view of this, it is conceivable to connect a plurality of dust collecting ducts to several places on the stage. However, in this case, the dust collecting ducts are entangled at the bottom of the stage, which hinders the movement of the stage. Further, if the dust collecting duct is removed and the dust collector is directly connected to the stage, the vibration propagated to the substrate becomes large and the processing accuracy is greatly reduced.

本発明は以上のような事情に鑑みて成されたものであり、その目的は太陽電池用基板のパターニングに際して発生するアブレーション滓を良好に除去することのできる吸引装置を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a suction device capable of satisfactorily removing ablation defects generated during patterning of a solar cell substrate.

上記の目的を達成するため、本発明に係る吸引装置は、
上面が多孔状の吸気用面板とされる上部可動チャンバと、この上部可動チャンバを前記吸気用面板に平行する面内で一方向に移動せしめるリニア駆動部と、このリニア駆動部による前記上部可動チャンバの移動方向に沿って平行に設けられる一対のサイドチャンバと、この両サイドチャンバに接続する吸気源とを有し、前記吸気用面板に近接して前記上部可動チャンバ上に固定される板状のワークから発生するアブレーション滓を吸引除去する除滓吸引装置であり、
前記両サイドチャンバは、それぞれ一対のローラ間に巻き掛けた無端の走行ベルトの内側に配置されると共に、それらサイドチャンバには各々その長手方向に沿って前記走行ベルトにより覆われる開口部が形成され、
前記走行ベルトには、前記開口部に対応する位置で前記上部可動チャンバに連結する通気管が固設され、その通気管を介して前記上部可動チャンバとサイドチャンバとの内部が連通する構成とされていることを特徴とする。 In order to achieve the above object, a suction device according to the present invention comprises:
An upper movable chamber whose upper surface is a porous suction face plate, a linear drive unit that moves the upper movable chamber in one direction within a plane parallel to the suction face plate, and the upper movable chamber by the linear drive unit And a pair of side chambers provided in parallel along the moving direction of each of the two, and an intake source connected to both the side chambers, and are fixed on the upper movable chamber in the vicinity of the intake faceplate It is a desorption and suction device that removes ablation flaws generated from workpieces by suction,
The both side chambers are arranged inside endless running belts wound around a pair of rollers, respectively, and the side chambers are each formed with an opening covered by the running belt along the longitudinal direction thereof. ,
The running belt is fixedly provided with a vent pipe connected to the upper movable chamber at a position corresponding to the opening, and the inside of the upper movable chamber and the side chamber communicate with each other through the vent pipe. It is characterized by.

加えて、上部可動チャンバには、板状のワークを前記吸気用面板に近接状態にして支持するワーク支持具が設けられることを特徴とする。   In addition, the upper movable chamber is provided with a work support that supports a plate-like work in the proximity of the suction face plate.

又、リニア駆動部が一対のサイドチャンバの間に設置されていることを特徴とする。   Further, the linear drive unit is provided between the pair of side chambers.

本発明に係る吸引装置によれば、上面が多孔状の吸気用面板とされる上部可動チャンバの移動方向に沿って一対のサイドチャンバが平行に設けられると共に、その両サイドチャンバには各々その長手方向に沿って無端の走行ベルトにより覆われる開口部が形成され、その開口部に対応する位置で走行ベルトと上部可動チャンバが通気管により連結され、その通気管を介して上部可動チャンバと両サイドチャンバとの内部が連通する構成とされていることから、可撓性のダクトを使用せずして上部可動チャンバを往復移動させながら下流の両サイドチャンバに連続吸気することができ、しかも平行する２つのサイドチャンバが上部可動チャンバに連通することから、吸気用面板の全域からほぼ一様に吸気することができる。   According to the suction device of the present invention, a pair of side chambers are provided in parallel along the moving direction of the upper movable chamber whose upper surface is a porous suction faceplate, and each of the side chambers has its longitudinal length. An opening covered with an endless traveling belt is formed along the direction, and the traveling belt and the upper movable chamber are connected by a vent pipe at a position corresponding to the opening, and the upper movable chamber and both sides are connected via the vent pipe. Since the interior of the chamber communicates with each other, the upper movable chamber can be reciprocated without using a flexible duct, and continuous intake can be performed in both downstream side chambers, and in parallel. Since the two side chambers communicate with the upper movable chamber, it is possible to intake air substantially uniformly from the entire area of the intake faceplate.

従って、整然としたコンパクト構造にして、上部可動チャンバの移動位置に拘わらず良好な集塵吸引効果を得られる。   Therefore, an orderly compact structure can be obtained, and a good dust collection suction effect can be obtained regardless of the movement position of the upper movable chamber.

又、上部可動チャンバには、板状のワークを吸気用面板に近接状態にして支持するワーク支持具が設けられることから、太陽電池用基板を、その薄膜形成面を下向きにして支持しながら、パターニング時に発生するアブレーション滓を確実に吸引除去して薄膜の汚損を防止できる。   In addition, the upper movable chamber is provided with a work support for supporting the plate-like work in a state close to the intake faceplate, so that the solar cell substrate is supported with its thin film forming surface facing downward, Ablation flaws generated during patterning can be reliably removed by suction to prevent the thin film from being damaged.

更に、上部可動チャンバを移動させるリニア駆動部が一対のサイドチャンバの間に設置されていることから、無駄なスペースを形成せずして装置全体を一体的にコンパクトに纏めることができる。   Furthermore, since the linear drive unit for moving the upper movable chamber is installed between the pair of side chambers, the entire apparatus can be integrated in a compact manner without forming a useless space.

以下、図面に基づいて本発明を詳しく説明する。図１は本発明に係る吸引装置を示した側面図、図２は同装置を部分的に破断して示した平面図であり、図３には図１におけるＸ−Ｘ断面を示す。   Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a side view showing a suction device according to the present invention, FIG. 2 is a plan view showing the device partially cut away, and FIG. 3 shows an XX cross section in FIG.

図１において、１は架台であり、この架台１は複数の支持脚２で座板３を所定高さに水平状に支持して構成され、座板３上には横長のバキュームユニット４が設置されている。   In FIG. 1, reference numeral 1 denotes a gantry. The gantry 1 is configured by horizontally supporting a seat plate 3 at a predetermined height by a plurality of support legs 2, and a horizontally long vacuum unit 4 is installed on the seat plate 3. Has been.

バキュームユニット４は、前後一対のローラ５，５間に巻き掛けた無端の走行ベルト６を含み、その走行ベルト６の内側に上部開放型のサイドチャンバ７を配置して構成されている。特に、ローラ５，５の間において、サイドチャンバ７の上端面に摺接する走行ベルト６の上部側には、金属パイプなどから成る硬質の通気管８（硬質ダクト）が直立状に固設されている。尚、ローラ５，５は座板３に固設した一対の側板フレーム９の間で回転自在に支持されており、側板フレーム９の外側にはサイドチャンバ７の両端部に連通するパイプジョイント１０，１０が突出されている。   The vacuum unit 4 includes an endless traveling belt 6 wound between a pair of front and rear rollers 5, 5, and an upper open side chamber 7 is disposed inside the traveling belt 6. In particular, between the rollers 5 and 5, a hard ventilation pipe 8 (hard duct) made of a metal pipe or the like is fixed upright on the upper side of the running belt 6 that is in sliding contact with the upper end surface of the side chamber 7. Yes. The rollers 5 and 5 are rotatably supported between a pair of side plate frames 9 fixed to the seat plate 3, and pipe joints 10 communicating with both ends of the side chamber 7 on the outside of the side plate frame 9. 10 is projected.

一方、１１はバキュームユニット４上に配置される上部可動チャンバである。この上部可動チャンバ１１は、プラスチック板を接合するなどして形成される偏平な箱型で、その上面は多孔状の吸気用面板１１Ａとされている。特に、上部可動チャンバ１１は、後述するリニア駆動部により吸気用面板１１Ａと平行する面内で一方向（図１の左右方向）に移動可能とされている。尚、リニア駆動部による上部可動チャンバ１１の移動方向は、走行ベルト６及びサイドチャンバ７の長手方向に一致している。つまり、走行ベルト６及びサイドチャンバ７は、上部可動チャンバ１１の移動方向に沿って配置されている。そして、上部可動チャンバ１１の底部には、その移動方向中央にて上記通気管８の一端（上端）が接続され、その通気管８を介して上部可動チャンバ１１とサイドチャンバ７との内部が連通されている。   On the other hand, 11 is an upper movable chamber disposed on the vacuum unit 4. The upper movable chamber 11 is a flat box shape formed by bonding a plastic plate or the like, and its upper surface is a porous intake face plate 11A. In particular, the upper movable chamber 11 can be moved in one direction (the left-right direction in FIG. 1) within a plane parallel to the intake face plate 11A by a linear drive unit described later. In addition, the moving direction of the upper movable chamber 11 by the linear drive unit coincides with the longitudinal directions of the traveling belt 6 and the side chamber 7. That is, the traveling belt 6 and the side chamber 7 are arranged along the moving direction of the upper movable chamber 11. One end (upper end) of the vent pipe 8 is connected to the bottom of the upper movable chamber 11 at the center in the moving direction, and the inside of the upper movable chamber 11 and the side chamber 7 communicates with each other through the vent pipe 8. Has been.

図２から明らかなように、上記バキュームユニット４（走行ベルト６及びサイドチャンバ７）は２つ平行に配置されており、その両者４，４により上部可動チャンバ１１の左右両側が下方から支持される構成とされている。又、上部可動チャンバ１１内には、走行ベルト６に沿って左右一対の吸気チャンネル１２が固設される。図２〜図４から明らかなように、吸気チャンネル１２は門型の断面をもつ構造体で、その上面および両側面には所定の間隔で吸気口１２Ａが穿設されている。尚、吸気チャンネル１２内の中央部において、上部可動チャンバ１１の底部に排気口１３が穿設され、その排気口１３に上記通気管８が接続する構成とされている。   As is apparent from FIG. 2, the vacuum unit 4 (travel belt 6 and side chamber 7) is arranged in parallel, and both the left and right sides of the upper movable chamber 11 are supported from below by both of them. It is configured. In the upper movable chamber 11, a pair of left and right intake channels 12 are fixed along the traveling belt 6. As is apparent from FIGS. 2 to 4, the intake channel 12 is a structure having a gate-shaped cross section, and intake ports 12 </ b> A are formed at predetermined intervals on the upper surface and both side surfaces thereof. An exhaust port 13 is formed in the bottom of the upper movable chamber 11 in the central portion of the intake channel 12, and the vent pipe 8 is connected to the exhaust port 13.

更に、上部可動チャンバ１１には、後述する板状のワークを支持する支持具として、図２、図３に示されるようにジャッキ１４及びローラ１５が設けられる。このうち、ジャッキ１４は上部可動チャンバ１１の内底部上に所定の間隔で配列される。   Furthermore, the upper movable chamber 11 is provided with a jack 14 and a roller 15 as shown in FIG. 2 and FIG. Among these, the jacks 14 are arranged on the inner bottom portion of the upper movable chamber 11 at a predetermined interval.

本例において、それらジャッキ１４は流体圧シリンダ１４Ａの伸縮ロッドを上向きにして、その伸縮ロッドにワーク受け１４Ｂを固定することにより構成されており、ワーク受け１４Ｂの先端部は流体圧シリンダ１４Ａの伸縮駆動により吸気用面板１１Ａ上に出没可能とされている。尚、吸気用面板１１Ａにはワーク受け１４Ｂの先端部を突出させるための貫通孔１６が穿設されている。   In this example, these jacks 14 are configured by fixing the work receiver 14B to the telescopic rod with the telescopic rod of the fluid pressure cylinder 14A facing upward, and the tip of the work receiver 14B is extended and contracted by the hydraulic cylinder 14A. It can be made to appear on the intake faceplate 11A by driving. The intake face plate 11A is provided with a through hole 16 for projecting the tip of the work receiver 14B.

一方、上記ローラ１５は、上部可動チャンバ１１の両側縁に沿って直列状に配列されている。図２において、１７は上部可動チャンバ１１の外部に固設した左右一対の帯板で、その帯板１７に複数のローラ１５が回転自在に取り付けられている。尚、１８はジャッキ１４やローラ１５に支持されたワークの端縁部を挟持するワーククランプであり、これによりワークが上部可動チャンバ１１上の定位置に固定されるようになっている。   On the other hand, the rollers 15 are arranged in series along both side edges of the upper movable chamber 11. In FIG. 2, reference numeral 17 denotes a pair of left and right strips fixed to the outside of the upper movable chamber 11, and a plurality of rollers 15 are rotatably attached to the strips 17. Reference numeral 18 denotes a work clamp that clamps the end edge of the work supported by the jack 14 or the roller 15 so that the work is fixed at a fixed position on the upper movable chamber 11.

図３において、Ｗは上記のワークである。ワークＷは、例えばレーザパターニングを施すための薄膜を形成した太陽電池用パネル（本例において、縦１４００ｍｍ、横１１００ｍｍ）であり、係るワークＷはガラスなどの透光性絶縁基板に施された光電変換層などの薄膜形成面を下向きにして、吸気用面板１１Ａに近接する状態でジャッキ１４及びローラ１５で撓みなく平面状に支持される。尚、図３から明らかなように、ワーク受け１４Ｂはその先端に転動自在なボール１４Ｃを有し、そのボール１４ＣがワークＷに転がり接触するようになっている。   In FIG. 3, W is the above workpiece. The work W is, for example, a solar cell panel (in this example, 1400 mm long and 1100 mm wide) on which a thin film for laser patterning is formed. The work W is a photoelectric film applied to a translucent insulating substrate such as glass. The thin film forming surface such as the conversion layer faces downward and is supported in a flat shape by the jack 14 and the roller 15 without being bent in a state of being close to the intake face plate 11A. As is clear from FIG. 3, the workpiece receiver 14B has a ball 14C that can roll freely at its tip, and the ball 14C rolls into contact with the workpiece W.

又、図３から明らかなように、座板３上には左右一対のバキュームユニット４（走行ベルト６及びサイドチャンバ７）の間で上記したリニア駆動部２０が設置されている。本例において、リニア駆動部２０は、リニアガイドとして上部可動チャンバ１１の移動方向に沿って延びるレール２１上を摺動する３つのスライドテーブル２２Ａ，２２Ｂ，２２Ｃを含み、それらスライドテーブル２２Ａ〜２２Ｃがアーム２３などを介して上部可動チャンバ１１の底部に連結する構成とされている。   As is clear from FIG. 3, the linear drive unit 20 described above is installed on the seat plate 3 between the pair of left and right vacuum units 4 (travel belt 6 and side chamber 7). In this example, the linear drive unit 20 includes three slide tables 22A, 22B, and 22C that slide on rails 21 that extend along the moving direction of the upper movable chamber 11 as linear guides. It is configured to be connected to the bottom of the upper movable chamber 11 via the arm 23 or the like.

特に、中央のスライドテーブル２２Ａにはリニアモータを構成する移動子２４が取り付けられ、その移動子２４に対向して座板３上にレール２１と平行な固定子２５が固設されている。しかして、係るリニア駆動部２０によれば、移動子２４に駆動電流を供給することにより、上部可動チャンバ１１を一方向（図３の図示面直角方向）に精度よく高速で移動させることができる。尚、図３において、２６はスライドテーブル２２Ａ〜２２Ｃなどを覆う防塵カバーであり、この防塵カバー２６は支柱２７により所定の高さ位置に支持されている。   In particular, a mover 24 constituting a linear motor is attached to the center slide table 22 </ b> A, and a stator 25 parallel to the rail 21 is fixed on the seat plate 3 so as to face the mover 24. Thus, according to the linear drive unit 20, by supplying a drive current to the moving element 24, the upper movable chamber 11 can be accurately moved at high speed in one direction (in the direction perpendicular to the plane of FIG. 3). . In FIG. 3, reference numeral 26 denotes a dustproof cover that covers the slide tables 22 </ b> A to 22 </ b> C, and the dustproof cover 26 is supported by a column 27 at a predetermined height position.

次に、図５及び図６によりバキュームユニットの構成を詳しく説明する。図５から明らかなように、サイドチャンバ７は上部開放した溝型で、その上端面にはその長手方向に沿って走行ベルト６よりも幅の小さい開口部７Ａが一連に形成されている。そして、走行ベルト６は、開口部７Ａを覆うようにサイドチャンバ７の上端面に摺接されると共に、サイドチャンバ７の底面に対しても押圧ローラ３１により押え付けられて弛みが防止されている。尚、サイドチャンバ７は、固定ねじ３２により側板フレーム９に対して所定の高さ位置に固定されている。又、走行ベルト６はステンレスなどの金属薄板からなり、該走行ベルト６には開口部７Ａに対応する位置で枠体３３により囲まれた吸気口６Ａが穿設され、その吸気口６Ａに上記通気管８の一端が接続されるようになっている。   Next, the configuration of the vacuum unit will be described in detail with reference to FIGS. As is apparent from FIG. 5, the side chamber 7 has a groove shape with an open top, and a series of openings 7A having a width smaller than that of the traveling belt 6 are formed in the upper end surface along the longitudinal direction. The traveling belt 6 is slidably contacted with the upper end surface of the side chamber 7 so as to cover the opening 7A, and is also pressed against the bottom surface of the side chamber 7 by the pressing roller 31 to prevent looseness. . The side chamber 7 is fixed to the side plate frame 9 by a fixing screw 32 at a predetermined height position. The traveling belt 6 is made of a thin metal plate such as stainless steel. The traveling belt 6 is provided with an intake port 6A surrounded by a frame 33 at a position corresponding to the opening 7A. One end of the trachea 8 is connected.

又、図６から明らかなように、サイドチャンバ７の両端部に連通する上記パイプジョイント１０は箱型であり、その一端面には管接続口１０Ａが形成されている。   Further, as is apparent from FIG. 6, the pipe joint 10 communicating with both end portions of the side chamber 7 has a box shape, and a pipe connection port 10A is formed on one end face thereof.

そして、上記のようなサイドチャンバ７は、図７及び図８に示されるよう管路３４を介して吸気源３５に接続される。本例において、管路３４は複数の可撓管３６とそれを繋ぎ合わせるマニホールド３７Ａ〜３７Ｃから成り、吸気源３５に繋がる末端の可撓管３７Ｃにはフィルタユニット３８が介在される。尚、吸気源３５には、真空ポンプや排風機が好適に用いられる。   The side chamber 7 as described above is connected to an intake source 35 via a conduit 34 as shown in FIGS. In this example, the pipe line 34 includes a plurality of flexible pipes 36 and manifolds 37 </ b> A to 37 </ b> C connecting the flexible pipes 36, and a filter unit 38 is interposed in the terminal flexible pipe 37 </ b> C connected to the intake source 35. As the intake source 35, a vacuum pump or an exhaust fan is preferably used.

ここで、以上のように構成される吸引装置の使用態様について説明すると、係る吸引装置は、例えば図７及び図８のようにレーザ加工機４０（レーザエッチング装置）を付属してパターニング用除滓吸引装置として利用される。レーザ加工機４０は、レーザビームを発生するレーザ発振器４１ほか、このレーザ発振器４１から発射されたレーザビームを上部可動チャンバ１１上に支持されたワークＷ（透光性絶縁基板の片面に光電変換層などの薄膜が形成された薄膜太陽電池パネル）に照射するレンズ４２Ａを含む照射光学系４２などを具備して構成される。   Here, the use mode of the suction apparatus configured as described above will be described. The suction apparatus includes a laser processing machine 40 (laser etching apparatus) as shown in FIGS. Used as a suction device. The laser processing machine 40 includes a laser oscillator 41 that generates a laser beam, and a workpiece W (a photoelectric conversion layer on one side of a translucent insulating substrate) that supports the laser beam emitted from the laser oscillator 41 on the upper movable chamber 11. A thin film solar cell panel on which a thin film is formed) and the like, and an irradiation optical system 42 including a lens 42A for irradiation.

照射光学系４２は、上部可動チャンバ１１上に設けられ、図示せぬリニアアクチュエータによりワークＷと平行する面（水平面）内で上部可動チャンバ１１の移動方向と直交する方向に移動可能とされる。   The irradiation optical system 42 is provided on the upper movable chamber 11 and can be moved in a direction orthogonal to the moving direction of the upper movable chamber 11 within a plane (horizontal plane) parallel to the workpiece W by a linear actuator (not shown).

尚、レーザビームによるパターニング時には、吸気源３５が連続駆動されるほか、リニア駆動部２０の駆動により上部可動チャンバ１１が一方向に往復移動されるが、上部可動チャンバ１１が往復移動すると、これに通気管８を介して連なる走行ベルト６はサイドチャンバ７の開口部７Ａを閉鎖したまま正逆に同調走行する。一方、照射光学系４２は、上部可動チャンバ１１の往復移動に同期して、これと直交する方向に一定量ずつ間欠送りされ、当該照射光学系４２から出力されるレーザビームがワークＷを構成する透光性絶縁基板を透過してその下側に形成される薄膜に焦点を合わせて照射される。このため、ワークＷに形成された薄膜は部分的に除去され、照射光学系４２がワークＷ上を横断した後には薄膜形成面に一定幅に溝が形成されることになる。   During the patterning by the laser beam, the intake source 35 is continuously driven, and the upper movable chamber 11 is reciprocated in one direction by the drive of the linear drive unit 20, but when the upper movable chamber 11 is reciprocated, The running belt 6 connected through the ventilation pipe 8 runs in the forward and reverse directions while the opening 7A of the side chamber 7 is closed. On the other hand, the irradiation optical system 42 is intermittently fed by a certain amount in a direction orthogonal to the reciprocating movement of the upper movable chamber 11, and the laser beam output from the irradiation optical system 42 constitutes the workpiece W. The thin film formed below the light-transmitting insulating substrate is focused and irradiated. For this reason, the thin film formed on the workpiece W is partially removed, and after the irradiation optical system 42 crosses the workpiece W, a groove having a constant width is formed on the thin film forming surface.

ここに、薄膜に対するレーザビームの照射により発生するアブレーション滓は、その多くが微細な粉塵と化して浮遊するので、これをそのまま放置すると薄膜に再付着して電気的に絶縁されるべき箇所が導電結合してしまうなどの問題を惹起する。   Here, most of the ablation soot generated by laser beam irradiation on the thin film floats as fine dust, and if left as it is, it will reattach to the thin film and the part that should be electrically insulated becomes conductive. Causes problems such as merging.

この点、本発明に係る吸引装置を用いれば、発生したアブレーション滓が薄膜に近接状態で対面する吸気用面板１１Ａを通して上部可動チャンバ１１内にすぐさま引き込まれ、これが両側の吸気チャンネル１２，１２から通気管８，８を通じてサイドチャンバ７，７内に吸引され、そして管路３４を通じてサイドチャンバ７，７内から排出されるために、パターニングされた薄膜を汚損せず好適な状態に保つことができる。尚、管路３４中のアブレーション滓はフィルタユニット３８により捕捉され、吸気源３５からは清浄な空気が放出される。   In this regard, if the suction device according to the present invention is used, the generated ablation fistula is immediately drawn into the upper movable chamber 11 through the suction face plate 11A facing the thin film in a close state, and this is passed from the suction channels 12 and 12 on both sides. Since the air is sucked into the side chambers 7 and 7 through the trachea 8 and 8 and is discharged from the side chambers 7 and 7 through the conduit 34, the patterned thin film can be kept in a suitable state without being contaminated. The ablation soot in the pipe 34 is captured by the filter unit 38, and clean air is released from the intake source 35.

以上、本発明について係る吸引装置の構成例を詳しく説明したが、係る吸引装置は太陽電池に限らず、液晶パネルのパターニングその他の加工にも好適に用いることができる。
In the above, the configuration example of the suction device according to the present invention has been described in detail. However, the suction device is not limited to the solar cell, and can be suitably used for patterning and other processing of the liquid crystal panel .

一方、上記例では、リニア駆動部としてリニアモータユニットを一対のサイドチャンバ７，７の間に設置したが、走行ベルト６をリニア駆動部として兼用することもできる。つまり、走行ベルト６が巻き掛けられるローラ５，５の一方にモータを連結し、そのモータでローラ５，５を介して走行ベルト６を駆動するようにしてもよい。   On the other hand, in the above example, the linear motor unit is installed between the pair of side chambers 7 and 7 as the linear drive unit, but the traveling belt 6 can also be used as the linear drive unit. That is, a motor may be connected to one of the rollers 5 and 5 around which the traveling belt 6 is wound, and the traveling belt 6 may be driven by the motor via the rollers 5 and 5.

本発明に係る吸引装置を示す側面概略図Schematic side view showing a suction device according to the present invention 同吸引装置を部分的に破断して示した平面概略図Schematic plan view showing the suction device partially broken 図１のＸ−Ｘ断面図XX sectional view of FIG. 上部可動チャンバの内部構造を示す斜視図A perspective view showing the internal structure of the upper movable chamber 走行ベルトとその内側のサイドチャンバを部分的に破断して示した斜視図The perspective view which showed the traveling belt and the side chamber inside it partially fractured サイドチャンバの一端部を示す斜視図The perspective view which shows the one end part of a side chamber 本発明に係る吸引装置の使用態様を示す側面概略図Schematic side view showing how the suction device according to the present invention is used 本発明に係る吸引装置の使用態様を示す正面図The front view which shows the usage condition of the suction device which concerns on this invention

符号の説明Explanation of symbols

６ 走行ベルト
７ サイドチャンバ
７Ａ 開口部
８ 通気管
１１ 上部可動チャンバ
１１Ａ 吸気用面板
１４ ジャッキ（ワーク支持具）
１５ ローラ（ワーク支持具）
２０ リニア駆動部
３５ 吸気源 6 running belt 7 side chamber 7A opening 8 vent pipe 11 upper movable chamber 11A suction face plate 14 jack (work support)
15 Roller (work support)
20 Linear drive 35 Intake source

Claims (3)

上面が多孔状の吸気用面板とされる上部可動チャンバと、この上部可動チャンバを前記吸気用面板に平行する面内で一方向に移動せしめるリニア駆動部と、このリニア駆動部による前記上部可動チャンバの移動方向に沿って平行に設けられる一対のサイドチャンバと、この両サイドチャンバに接続する吸気源とを有し、前記吸気用面板に近接して前記上部可動チャンバ上に固定される板状のワークから発生するアブレーション滓を吸引除去する除滓吸引装置であり、
前記両サイドチャンバは、それぞれ一対のローラ間に巻き掛けた無端の走行ベルトの内側に配置されると共に、それらサイドチャンバには各々その長手方向に沿って前記走行ベルトにより覆われる開口部が形成され、
前記走行ベルトには、前記開口部に対応する位置で前記上部可動チャンバに連結する通気管が固設され、その通気管を介して前記上部可動チャンバとサイドチャンバとの内部が連通する構成とされていることを特徴とする除滓吸引装置。 An upper movable chamber whose upper surface is a porous intake face plate, a linear drive unit that moves the upper movable chamber in one direction within a plane parallel to the intake face plate, and the upper movable chamber by the linear drive unit And a pair of side chambers provided in parallel along the moving direction of each of the two, and an intake source connected to both the side chambers, and are fixed on the upper movable chamber in the vicinity of the intake faceplate It is a desorption and suction device that removes ablation flaws generated from workpieces by suction,
The both side chambers are arranged inside endless running belts wound around a pair of rollers, respectively, and the side chambers are each formed with an opening covered by the running belt along the longitudinal direction thereof. ,
The running belt is fixedly provided with a vent pipe connected to the upper movable chamber at a position corresponding to the opening, and the inside of the upper movable chamber and the side chamber communicate with each other through the vent pipe. A degaussing suction device characterized by that. 上部可動チャンバには、板状のワークを前記吸気用面板に近接状態にして支持するワーク支持具が設けられることを特徴とする請求項１記載の除滓吸引装置。 2. The apparatus according to claim 1, wherein the upper movable chamber is provided with a work support for supporting a plate-like work in a state of being close to the suction face plate. リニア駆動部が一対のサイドチャンバの間に設置されていることを特徴とする請求項１、又は２記載の除滓吸引装置。 3. The degaussing suction device according to claim 1, wherein the linear drive unit is installed between the pair of side chambers.
JP2007258982A 2007-10-02 2007-10-02 Removal suction device Expired - Fee Related JP4085127B1 (en)

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